CN117448785A - Three-way integrated jet pipe and manufacturing method thereof - Google Patents
Three-way integrated jet pipe and manufacturing method thereof Download PDFInfo
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- CN117448785A CN117448785A CN202311425658.2A CN202311425658A CN117448785A CN 117448785 A CN117448785 A CN 117448785A CN 202311425658 A CN202311425658 A CN 202311425658A CN 117448785 A CN117448785 A CN 117448785A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 238000002347 injection Methods 0.000 claims abstract description 38
- 239000007924 injection Substances 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 6
- 238000000227 grinding Methods 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 21
- 238000005553 drilling Methods 0.000 claims description 9
- 238000003754 machining Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
Abstract
The three-way integrated injection pipe comprises an injection pipe group and a bearing joint, wherein the bearing joint is provided with a first boss, a second boss and a third boss which are vertically arranged, and a first hole path, a second hole path and a third hole path are arranged in the bearing joint; the jet pipe group comprises a first pipe section, a second pipe section and a third pipe section, the lower ends of the first pipe section, the second pipe section and the third pipe section are flush, the total length of the first pipe section, the second pipe section and the third pipe section is increased one by one, so that the left side wall of the jet pipe group forms a stepped structure, and the first pipe section, the second pipe section and the third pipe section are all provided with exhaust through holes. According to the scheme, the first pipe section, the second pipe section and the third pipe section are connected side by side to form the three-way integrated structure, and the gas of the first hole path, the second hole path and the third hole path of the bearing joint is more uniformly discharged to the furnace body through the exhaust through holes with different heights of the first pipe section, the second pipe section and the third pipe section, so that the structural strength and the service life of the jet pipe group are effectively improved. The disclosure also provides a method for manufacturing the three-way integrated injection pipe.
Description
Technical Field
The invention relates to the technical field of injection pipes, in particular to a three-way integrated injection pipe and a manufacturing method of the three-way integrated injection pipe.
Background
One of the key steps in the fabrication of integrated circuits is the performance of various chemical processes, such as thin film deposition and high temperature annealing, in a reactor. The furnace tube positions of the reaction furnace are often provided with injection tubes for uniformly feeding various types of reaction gases into the furnace tube positions at different heights.
The existing jet pipes are all of circular pipe structures, and the jet pipes are large in length and small in diameter, so that the structural characteristics of the slender jet pipes are difficult to process, and the problems of low strength and easiness in fragmentation are caused. In the prior art, a part of the design adopts a multi-section coaxial splicing structure in sequence, but because gaps exist between the pipe sections, the injection pipe is of a thin-wall structure, and the injection pipe is often broken after being deposited to a certain thickness along with the increase of the service time.
Disclosure of Invention
The invention aims to solve the problems of difficult processing and short service life caused by low structural strength and easy fragmentation of the jet pipe in the prior art.
In order to solve the problems, the invention provides a three-way integrated injection pipe, which comprises an injection pipe group and a bearing joint, wherein the front side wall of the bearing joint is an arc inner concave surface for being matched with a furnace body, and the rear side wall of the bearing joint is an arc outer convex surface;
the bearing joint comprises a bearing joint body and is characterized in that a first boss, a second boss and a third boss which are vertically arranged are arranged on the upper side surface of the bearing joint body, the first boss and the third boss are respectively positioned on the left side and the right side of the second boss, a first hole path, a second hole path and a third hole path are arranged in the bearing joint body, one end of the first hole path penetrates through the left part of the upper end face of the first boss, the other end of the first hole path penetrates through the arc-shaped outer convex surface, one end of the second hole path penetrates through the middle part of the upper end face of the second boss, the other end of the second hole path penetrates through the arc-shaped outer convex surface, and one end of the third hole path penetrates through the right part of the upper end face of the third boss, and the other end of the third hole path penetrates through the arc-shaped outer convex surface;
the utility model provides a jet stack, including all along vertical setting and from left to right side first pipe section, second pipe section and the third pipe section that links to each other side by side, the lower extreme parallel and level and the total length of first pipe section, second pipe section and third pipe section increase one by one so that the left side wall of jet stack forms the echelonment structure, the lower extreme of first pipe section cup joints to first boss and with first hole way intercommunication and upper end seal setting, the lower extreme of second pipe section cup joints to the second boss and with second hole way intercommunication and upper end seal setting, the lower extreme of third pipe section cup joints to the third boss and with third hole way intercommunication and upper end seal setting, the left side wall of first pipe section, second pipe section and third pipe section all is equipped with the exhaust through hole of intercommunication to the external world.
Compared with the prior art, the injection pipe set is designed to comprise the first pipe section, the second pipe section and the third pipe section, and the first pipe section, the second pipe section and the third pipe section are connected side by side to form a three-way integrated structure, so that the structural strength and the service life of the injection pipe set are effectively improved, and the problems that the injection pipe is easy to crack in processing and short in service life in the prior art are solved; meanwhile, as the total length of the first pipe section, the second pipe section and the third pipe section is sequentially increased, the gas of the first hole path, the second hole path and the third hole path of the bearing joint can be more uniformly discharged to the furnace body through the exhaust through holes with different heights of the first pipe section, the second pipe section and the third pipe section; in addition, the scheme is that the first hole path penetrates to the left part of the upper end face of the first boss, so that gas in the first hole path can directly flow to the left side of the first pipe section and flow out from the exhaust through hole on the left side wall of the first pipe section, the third hole section penetrates to the right part of the upper end face of the second boss, so that the gas in the third hole path flows to the right side of the third pipe section more first, and after the gas flows to the upper part of the third pipe section, the gas flows out from the exhaust through hole on the left side wall of the third pipe section, and therefore the flow characteristic of the gas is more met.
Preferably, the arc-shaped outer convex surface of the bearing joint is provided with a first round convex pipe, a second round convex pipe and a third round convex pipe which are transversely arranged, the first round convex pipe and the third round convex pipe are respectively positioned on the left side and the right side of the second round convex pipe, the first hole path, the second hole path and the third hole path respectively comprise a transverse hole section and a vertical hole section which are mutually communicated, the vertical hole section of the first hole path penetrates through to the left part of the upper end face of the first boss, the transverse hole section penetrates through to the first round convex pipe, the vertical hole section of the second hole path penetrates through to the middle part of the upper end face of the second boss, the transverse hole section penetrates through to the second round convex pipe, and the vertical hole section of the third hole path penetrates through to the right part of the upper end face of the third boss, and the transverse hole section penetrates through to the third round convex pipe.
Preferably, the upper part and the lower part of the left side wall of the first pipe section are provided with at least one exhaust through hole, the upper part and the lower part of the left side wall of the second pipe section are provided with at least one exhaust through hole, and the upper part and the lower part of the left side wall of the third pipe section are provided with at least one exhaust through hole.
Preferably, the second pipe section is twice as long as the first pipe section, and the third pipe section is three times as long as the first pipe section.
Preferably, the front side wall of the jet pipe is an arc inner concave surface for being matched with the furnace body, and the rear side wall is an arc outer convex surface.
The invention also provides a manufacturing method of the three-way integrated injection pipe, which is applied to the three-way integrated injection pipe and comprises the following steps of
S1, respectively manufacturing a bearing joint and a jet pipe group;
the manufacturing process of the bearing joint is as follows: firstly, processing raw materials into square refined materials with corresponding sizes by a grinding processing mode; fixing the square refined material on a quartz plate in a wax bonding mode, clamping, and processing a first hole path, a second hole path and a third hole path on the square refined material in a drilling mode; finally, a first boss, a second boss and a third boss, and a first convex circular tube, a second convex circular tube and a third convex circular tube are processed on the square refined material in a grinding mode;
the manufacturing process of the jet pipe group comprises the following steps: firstly, processing raw materials into square blank materials by a grinding processing mode, fixing the square blank materials on a quartz plate by adopting a wax bonding mode for clamping, and finely grinding the square blank materials to a required size; then a special convex arc grinding wheel is adopted to grind the front side wall of the square blank, and the outer peripheral wall of the convex arc grinding wheel is in a convex arc shape until the front side wall of the square blank forms an arc-shaped inner concave surface; then a special concave arc grinding wheel is adopted to grind the rear side wall of the square block-shaped blank, and the peripheral wall of the concave arc grinding wheel is concave arc-shaped until the rear side wall of the square block-shaped blank forms an arc-shaped outer convex surface; machining the appearance of the square block blank by adopting a grinding machining mode until a workpiece with the appearance of the first pipe section, the second pipe section and the third pipe section is obtained, and then drilling the workpiece by adopting a deep hole drill bit to machine inner holes of the first pipe section, the second pipe section and the third pipe section; finally, processing exhaust through holes on the left side walls of the first pipe section, the second pipe section and the third pipe section in a drilling processing mode;
s2, the jet pipe group is arranged above the bearing joint, the lower end of the first pipe section is sleeved on the first boss, the lower end of the second pipe section is sleeved on the second boss, and the lower end of the third pipe section is sleeved on the third boss.
Compared with the prior art, the injection pipe set is designed to comprise the first pipe section, the second pipe section and the third pipe section, and the first pipe section, the second pipe section and the third pipe section are connected side by side to form a three-way integrated structure, so that the structural strength and the service life of the injection pipe set are effectively improved, and the problems that the injection pipe is easy to crack and short in service life in the processing of the injection pipe in the prior art are solved.
Preferably, the deep hole drill bit is cylindrical, a chip removal groove arranged along the axial direction is formed in the side wall of the deep hole drill bit, the head of the deep hole drill bit is a metal diamond bonding head, and a water outlet hole is formed in the center of the head of the deep hole drill bit.
Preferably, chip removal ring grooves are formed in the middle of the two end faces of the convex arc grinding wheel, and chip removal ring grooves are formed in the middle of the two end faces of the concave arc grinding wheel.
Drawings
FIG. 1 is an overall schematic of a three-way integrated ejector tube of the present invention;
FIG. 2 is a schematic axial view of a receiving adapter for a three-way integrated ejector tube according to the present invention;
FIG. 3 is a schematic front view of a receiving adapter for a three-way integrated ejector tube according to the present invention;
FIG. 4 is a schematic cross-sectional view taken along section line A-A in FIG. 3;
FIG. 5 is a schematic bottom view of a jet stack of a three-way integrated jet stack of the present invention;
FIG. 6 is a schematic cross-sectional view taken along section line B-B in FIG. 5;
FIG. 7 is a schematic cross-sectional view of a convex arc grinding wheel of the present invention;
FIG. 8 is a schematic cross-sectional view of a concave arc grinding wheel of the present invention;
fig. 9 is a schematic view of the deep hole drill of the present invention.
The reference numerals are used to describe the components,
1. a jet pipe group; 11. a first pipe section; 12. a second pipe section; 13. a third pipe section; 14. an exhaust through hole; 2. a load bearing joint; 21. a first boss; 22. a second boss; 23. a third boss; 24. a first hole path; 25. a second hole path; 26. a third hole path; 27. a first round convex pipe; 28. the second round convex pipe; 29. a third round convex tube; 110. convex arc grinding wheel; 120. concave arc grinding wheel; 130. chip removal ring grooves; 200. a deep hole drill; 201. a chip removal groove; 202. and a water outlet hole.
Detailed Description
In order that the above objects, features and advantages of the present invention will be readily apparent, a more particular description of the invention briefly described above will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings, in which, as illustrated in the appended drawings, it is to be understood that the embodiments described are merely some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. It should be further noted that, in the embodiments of the present invention, all directional indications (such as up, down, left, right, front, back, inner, and outer) are merely used to explain the relative positional relationship, movement conditions, etc. between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indication is correspondingly changed.
Example 1
Referring to fig. 1-6, embodiment 1 of the present invention provides a three-way integrated injection pipe, which includes an injection pipe group 1 and a bearing joint 2, wherein the front side wall of the bearing joint 2 is an arc inner concave surface for being matched with a furnace body, and the rear side wall is an arc outer convex surface;
the upper side of the bearing joint 2 is provided with a first boss 21, a second boss 22 and a third boss 23 which are vertically arranged, the first boss 21 and the third boss 23 are respectively positioned on the left side and the right side of the second boss 22, a first hole path 24, a second hole path 25 and a third hole path 26 are arranged in the bearing joint 2, one end of the first hole path 24 penetrates to the left part of the upper end face of the first boss 21, the other end penetrates to the arc-shaped outer convex face, one end of the second hole path 25 penetrates to the middle part of the upper end face of the second boss 22, the other end penetrates to the arc-shaped outer convex face, and one end of the third hole path 26 penetrates to the right part of the upper end face of the third boss 23, and the other end penetrates to the arc-shaped outer convex face;
the ejector tube group 1 includes a first tube segment 11, a second tube segment 12 and a third tube segment 13, which are all vertically disposed and connected side by side from left to right, the lower ends of the first tube segment 11, the second tube segment 12 and the third tube segment 13 are flush and the total length is increased one by one so that the left side wall of the ejector tube group 1 forms a stepped structure, the lower end of the first tube segment 11 is sleeved to the first boss 21 and communicated with the first hole 24 and is closed at the upper end, the lower end of the second tube segment 12 is sleeved to the second boss 22 and communicated with the second hole 25 and is closed at the upper end, the lower end of the third tube segment 13 is sleeved to the third boss 23 and communicated with the third hole 26 and is closed at the upper end, and the left side walls of the first tube segment 11, the second tube segment 12 and the third tube segment 13 are all provided with an exhaust through hole 14 communicated to the outside.
Compared with the prior art, the injection pipe group 1 is designed to comprise the first pipe section 11, the second pipe section 12 and the third pipe section 13, and the first pipe section 11, the second pipe section 12 and the third pipe section 13 are connected side by side to form a three-way integrated structure, so that the structural strength and the service life of the injection pipe group 1 are effectively improved, and the problems that in the prior art, the injection pipe is easy to crack in processing and the service life is short are solved; meanwhile, since the total lengths of the first pipe section 11, the second pipe section 12 and the third pipe section 13 are sequentially increased, the gas from the first hole 24, the second hole 25 and the third hole 26 of the bearing joint 2 can be more uniformly discharged to the furnace body through the exhaust through holes 14 of different heights of the first pipe section 11, the second pipe section 12 and the third pipe section 13; in addition, the above solution penetrates the first hole 24 to the left portion of the upper end surface of the first boss 21, so that the gas in the first hole 24 can directly flow to the left side of the first pipe section 11 and flow out from the exhaust through hole 14 on the left side wall of the first pipe section 11, and the third hole penetrates the right portion of the upper end surface of the second boss 22, so that the gas in the third hole 26 flows to the right side of the third pipe section 13 more first, and after the gas flows to the upper portion of the third pipe section 13, flows out from the exhaust through hole 14 on the left side wall of the third pipe section 13, so as to conform to the flow characteristics of the gas.
It should be noted that since the first pipe section 11, the second pipe section 12, and the third pipe section 13 are adjacent side by side in this order from left to right, the lower portion of the second pipe section 12 is blocked by the first pipe section 11, and thus the left side wall of the second pipe section 12 refers to a position on the left side of the upper portion of the second pipe section 12 that is not blocked by the first pipe section 11; similarly, since the lower portion of the third pipe section 13 is shielded by the second pipe section 12, the left side wall of the third pipe section 13 refers to a position on the left side of the upper portion of the third pipe section 13 that is not shielded by the second pipe section 12. In the present embodiment, the second pipe section 12 is twice as long as the first pipe section 11, and the third pipe section 13 is three times as long as the first pipe section 11, so that the left side wall of the first pipe section 11, the left side wall of the second pipe section, and the left side wall of the third pipe section 13 are equal in length.
In the present embodiment, at least one exhaust through hole 14 is provided in the upper and lower portions of the left side wall of the first pipe section 11, at least one exhaust through hole 14 is provided in the upper and lower portions of the left side wall of the second pipe section 12, and at least one exhaust through hole 14 is provided in the upper and lower portions of the left side wall of the third pipe section 13.
In this embodiment, the arc-shaped outer convex surface of the bearing joint 2 is provided with a first circular convex tube 27, a second circular convex tube 28 and a third circular convex tube 29 which are arranged along the transverse direction, the first circular convex tube 27 and the third circular convex tube 29 are respectively positioned at the left side and the right side of the second circular convex tube 28, the first hole path 24, the second hole path 25 and the third hole path 26 respectively comprise a transverse hole section and a vertical hole section which are communicated with each other, the vertical hole section of the first hole path 24 penetrates to the left part of the upper end surface of the first boss 21 and the transverse hole section penetrates to the first circular convex tube 27, the vertical hole section of the second hole path 25 penetrates to the middle part of the upper end surface of the second boss 22 and the transverse hole section penetrates to the second circular convex tube 28, and the vertical hole section of the third hole path 26 penetrates to the right part of the upper end surface of the third boss 23 and the transverse hole section penetrates to the third circular convex tube 29.
In the present embodiment, the front side wall of the jet stack 1 is an arc-shaped concave inner surface for fitting to the furnace body and the rear side wall is an arc-shaped convex outer surface.
Example 2
Referring to fig. 1-9, embodiment 2 of the present invention provides a method for manufacturing a three-way integrated injection pipe, which is applied to the three-way integrated injection pipe, and includes the following steps
S1, respectively manufacturing a bearing joint 2 and an injection tube group 1;
the manufacturing process of the bearing joint 2 is as follows: firstly, processing raw materials into square refined materials with corresponding sizes by a grinding processing mode; fixing the square refined material on a quartz plate in a wax bonding manner, clamping, and processing a first hole path 24, a second hole path 25 and a third hole path 26 on the square refined material in a drilling manner; finally, a first boss 21, a second boss 22 and a third boss 23, and a first convex circular tube, a second convex circular tube and a third convex circular tube are processed on the square-shaped fine material in a grinding mode;
the manufacturing process of the jet pipe group 1 is as follows: firstly, processing raw materials into square blank materials by a grinding processing mode, fixing the square blank materials on a quartz plate by adopting a wax bonding mode for clamping, and finely grinding the square blank materials to a required size; then grinding the front side wall of the square block-shaped blank by adopting a special convex arc grinding wheel 110, wherein the outer peripheral wall of the convex arc grinding wheel 110 is in a convex arc shape until the front side wall of the square block-shaped blank forms an arc-shaped inner concave surface; then a special concave arc grinding wheel 120 is adopted to grind the rear side wall of the square block-shaped blank, and the peripheral wall of the concave arc grinding wheel 120 is concave arc-shaped until the rear side wall of the square block-shaped blank forms an arc-shaped outer convex surface; machining the outline of the square block blank by adopting a grinding machining mode until a workpiece with the outline of the first pipe section 11, the second pipe section 12 and the third pipe section 13 is obtained, and then drilling the workpiece by adopting a deep hole drill 200 to machine inner holes of the first pipe section 11, the second pipe section 12 and the third pipe section 13; finally, an exhaust through hole 14 is processed on the left side walls of the first pipe section 11, the second pipe section 12 and the third pipe section 13 in a drilling processing mode;
s2, the jet pipe set 1 is installed above the bearing joint 2, the lower end of the first pipe section 11 is sleeved on the first boss 21, the lower end of the second pipe section 12 is sleeved on the second boss 22, and the lower end of the third pipe section 13 is sleeved on the third boss 23.
Compared with the prior art, the injection pipe group 1 is designed to comprise the first pipe section 11, the second pipe section 12 and the third pipe section 13, and the first pipe section 11, the second pipe section 12 and the third pipe section 13 are connected side by side to form a three-way integrated structure, so that the structural strength and the service life of the injection pipe group 1 are effectively improved, and the problems that in the prior art, the injection pipe is easy to crack in processing and the service life is short are solved.
In this embodiment, the deep hole drill 200 is cylindrical, the side wall of the deep hole drill 200 is provided with a chip groove 201 axially arranged, the head of the deep hole drill 200 is a metal diamond bonding head, and the center of the head of the deep hole drill 200 is provided with a water outlet 202.
In this embodiment, the middle parts of the two end surfaces of the convex arc grinding wheel 110 are provided with chip removal ring grooves 130, and the middle parts of the two end surfaces of the concave arc grinding wheel 120 are provided with chip removal ring grooves 130.
Although the present disclosure is described above, the scope of protection of the present disclosure is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the disclosure, and these changes and modifications will fall within the scope of the invention.
Claims (8)
1. The three-way integrated injection pipe is characterized by comprising an injection pipe group (1) and a bearing joint (2), wherein the front side wall of the bearing joint (2) is an arc-shaped inner concave surface matched with a furnace body, and the rear side wall of the bearing joint is an arc-shaped outer convex surface;
the bearing joint comprises a bearing joint body and is characterized in that a first boss (21), a second boss (22) and a third boss (23) which are vertically arranged are arranged on the upper side surface of the bearing joint body (2), the first boss (21) and the third boss (23) are respectively positioned on the left side and the right side of the second boss (22), a first hole path (24), a second hole path (25) and a third hole path (26) are arranged in the bearing joint body (2), one end of the first hole path (24) penetrates through the left part of the upper end surface of the first boss (21) and the other end of the first hole path penetrates through the arc-shaped outer convex surface, one end of the second hole path (25) penetrates through the middle part of the upper end surface of the second boss (22) and the other end of the second hole path penetrates through the arc-shaped outer convex surface, and one end of the third hole path (26) penetrates through the right part of the upper end surface of the third boss (23) and the other end of the third hole path penetrates through the arc-shaped outer convex surface;
the jet pipe group (1) comprises a first pipe section (11), a second pipe section (12) and a third pipe section (13) which are all arranged vertically and are connected side by side from left to right, the lower ends of the first pipe section (11), the second pipe section (12) and the third pipe section (13) are flush and the total length is increased one by one so that the left side wall of the jet pipe group (1) forms a stepped structure, the lower end of the first pipe section (11) is sleeved to a first boss (21) and communicated with a first hole path (24) and the upper end is sealed, the lower end of the second pipe section (12) is sleeved to a second boss (22) and communicated with a second hole path (25) and the upper end is sealed, the lower end of the third pipe section (13) is sleeved to a third boss (23) and communicated with a third hole path (26) and the upper end is sealed, and the left side walls of the first pipe section (11), the second pipe section (12) and the third pipe section (13) are all provided with an exhaust through hole (14) communicated to the outside.
2. A three-way integrated ejector tube according to claim 1, characterized in that the arc-shaped outer convex surface of the bearing joint (2) is provided with a first round convex tube (27), a second round convex tube (28) and a third round convex tube (29) which are transversely arranged, the first round convex tube (27) and the third round convex tube (29) are respectively positioned at the left side and the right side of the second round convex tube (28), the first hole path (24), the second hole path (25) and the third hole path (26) comprise a transverse hole section and a vertical hole section which are mutually communicated, the vertical hole section of the first hole path (24) penetrates to the left part of the upper end face of the first boss (21) and the transverse hole section penetrates to the first round convex tube (27), the vertical hole section of the second hole path (25) penetrates to the middle part of the upper end face of the second boss (22) and the transverse hole section penetrates to the second round convex tube (28), and the vertical hole section of the third hole path (26) penetrates to the third hole section of the upper end face of the third boss (23) and the third hole section penetrates to the right round boss (29).
3. A three-way integrated ejector tube according to claim 1, characterized in that the upper and lower parts of the left side wall of the first tube section (11) each have at least one exhaust through hole (14), the upper and lower parts of the left side wall of the second tube section (12) each have at least one exhaust through hole (14), and the upper and lower parts of the left side wall of the third tube section (13) each have at least one exhaust through hole (14).
4. A three-way integrated ejector tube according to claim 1, characterized in that the second tube section (12) is twice the length of the first tube section (11) and the third tube section (13) is three times the length of the first tube section (11).
5. A three-way integrated ejector tube according to claim 1, characterized in that the front side wall of the ejector tube group (1) is an arc-shaped concave inner surface for fitting to the furnace body and the rear side wall is an arc-shaped convex outer surface.
6. A method for manufacturing a three-way integrated injection pipe, which is applied to the three-way integrated injection pipe as claimed in any one of claims 1 to 5, and is characterized by comprising the following steps
S1, respectively manufacturing a bearing joint (2) and an injection pipe group (1);
the manufacturing process of the bearing joint (2) is as follows: firstly, processing raw materials into square refined materials with corresponding sizes by a grinding processing mode; fixing the square refined material on a quartz plate in a wax bonding mode, clamping, and processing a first hole path (24), a second hole path (25) and a third hole path (26) on the square refined material in a drilling mode; finally, a first boss (21), a second boss (22) and a third boss (23) as well as a first convex circular tube, a second convex circular tube and a third convex circular tube are processed on the square refined material in a grinding mode;
the manufacturing process of the jet pipe group (1) is as follows: firstly, processing raw materials into square blank materials by a grinding processing mode, fixing the square blank materials on a quartz plate by adopting a wax bonding mode for clamping, and finely grinding the square blank materials to a required size; then a special convex arc grinding wheel (110) is adopted to grind the front side wall of the square block-shaped blank, and the peripheral wall of the convex arc grinding wheel (110) is in a convex arc shape until the front side wall of the square block-shaped blank forms an arc-shaped inner concave surface; then a special concave arc grinding wheel (120) is adopted to grind the rear side wall of the square block-shaped blank, and the peripheral wall of the concave arc grinding wheel (120) is concave-arc-shaped until the rear side wall of the square block-shaped blank forms an arc-shaped outer convex surface; machining the outline of the square blank by adopting a grinding machining mode until a workpiece with the outline of the first pipe section (11), the second pipe section (12) and the third pipe section (13) is obtained, and then drilling the workpiece by adopting a deep hole drill (200) to machine inner holes of the first pipe section (11), the second pipe section (12) and the third pipe section (13); finally, an exhaust through hole (14) is processed on the left side walls of the first pipe section (11), the second pipe section (12) and the third pipe section (13) in a drilling processing mode;
s2, the jet pipe group (1) is mounted above the bearing joint (2), the lower end of the first pipe section (11) is sleeved on the first boss (21), the lower end of the second pipe section (12) is sleeved on the second boss (22), and the lower end of the third pipe section (13) is sleeved on the third boss (23).
7. The method for manufacturing the three-way integrated injection pipe according to claim 6, wherein the deep hole drill (200) is cylindrical, chip grooves (201) are formed in the side wall of the deep hole drill (200) and are arranged along the axial direction, the head of the deep hole drill (200) is a metal diamond bonding head, and a water outlet hole (202) is formed in the center of the head of the deep hole drill (200).
8. The method for manufacturing the three-way integrated injection pipe according to claim 6, wherein chip removal ring grooves (130) are formed in the middle of two end faces of the convex arc grinding wheel (110), and chip removal ring grooves (130) are formed in the middle of two end faces of the concave arc grinding wheel (120).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311425658.2A CN117448785A (en) | 2023-10-31 | 2023-10-31 | Three-way integrated jet pipe and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311425658.2A CN117448785A (en) | 2023-10-31 | 2023-10-31 | Three-way integrated jet pipe and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117448785A true CN117448785A (en) | 2024-01-26 |
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ID=89596148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311425658.2A Pending CN117448785A (en) | 2023-10-31 | 2023-10-31 | Three-way integrated jet pipe and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117448785A (en) |
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2023
- 2023-10-31 CN CN202311425658.2A patent/CN117448785A/en active Pending
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