CN117444761A - High-precision large-curvature focusing lens and processing method thereof - Google Patents
High-precision large-curvature focusing lens and processing method thereof Download PDFInfo
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- CN117444761A CN117444761A CN202311482496.6A CN202311482496A CN117444761A CN 117444761 A CN117444761 A CN 117444761A CN 202311482496 A CN202311482496 A CN 202311482496A CN 117444761 A CN117444761 A CN 117444761A
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- 238000003672 processing method Methods 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 90
- 238000000034 method Methods 0.000 claims abstract description 44
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 38
- 239000011521 glass Substances 0.000 claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 238000005498 polishing Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 17
- 229910002804 graphite Inorganic materials 0.000 claims description 17
- 239000010439 graphite Substances 0.000 claims description 17
- 230000007704 transition Effects 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 7
- 239000005350 fused silica glass Substances 0.000 claims description 6
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 238000007517 polishing process Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 abstract description 13
- 239000003292 glue Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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Abstract
The invention relates to a focusing lens and a processing method thereof, in particular to a high-precision large-curvature focusing lens and a processing method thereof, which solve the problems of low imaging stability during focusing imaging of the existing imaging equipment and low processing precision during processing of a spherical surface with a large curvature radius by the existing method. The processing method is characterized by comprising the following steps: step one: selecting a glass substrate; step two: fixing the substrate in a glue coiling mode; polishing the two surfaces of the substrate to ensure that the surface RMS value is better than 0.02λ; step three: manufacturing a tool and installing the tool on a substrate, and completely shielding the region of the surface to be processed except for the region to be processed of the next ion beam equipment through the tool; step four: the ion beam equipment processes the exposed area, and the method of detecting the POWER value by adopting an interferometer is adopted to control the curvature radius during the processing; stopping the ion beam equipment after the curvature radius meets the requirement, and taking down the tool; step five: and step three and step four are circularly executed until the processing of all spherical areas is completed.
Description
Technical Field
The invention relates to a focusing lens and a processing method thereof, in particular to a high-precision large-curvature focusing lens and a processing method thereof.
Background
Most of the existing focusing lenses adopt a mode of resin materials or liquid lenses, the precision is low, and the existing focusing lenses are widely applied in civil industry. In the aerospace field, the requirement on the precision of the lens is high, the lens materials are all glass materials, and if the focusing function is realized by the lens, the focusing function is usually realized by a moving component, so that the imaging stability of the imaging equipment is greatly reduced.
On the other hand, in the prior art, when a spherical surface with a curvature radius below 2m is processed, a ring-type sphere diameter gauge is adopted to manufacture a standard template to measure the curvature radius of the processed spherical surface, and the measurement precision is higher than 0.001mm; however, when a spherical surface with a large curvature radius of 20m to 100m is processed, a practical processing method is not available in the prior processing technology, if a ring-type spherical diameter meter is still used for manufacturing a standard template to measure the curvature radius of the processed spherical surface, the measurement error is usually 1% -5%, and further the precision of the processed lens is low, so that the requirement of the aerospace field on the high precision of the lens is difficult to meet, namely, the error is usually required to be controlled within 1%.
Disclosure of Invention
The invention aims to provide a high-precision large-curvature focusing lens and a processing method thereof, so as to solve the technical problems that when the existing imaging equipment with a focusing function is used for focusing imaging in the aerospace field, the imaging stability is low, and when the existing processing method is used for processing a spherical surface with a large curvature radius, the processing precision is low, and the requirement of the aerospace field on the high precision of the lens is difficult to meet.
In order to solve the technical problems, the invention adopts the following technical scheme:
the high-precision large-curvature focusing lens is characterized in that:
a glass material substrate comprising a unitary structure;
defining the front surface and the back surface of the substrate as a first surface and a second surface respectively;
the first surface is planar;
the second surface comprises a plurality of spherical areas, the curvature radiuses of the spherical areas are different, and the spherical areas with the curvature radiuses being more than or equal to 20000mm are included.
Further, for focusing convenience, the glass material substrate is circular in shape;
the spherical areas are concentrically arranged adjacently from inside to outside in sequence, and the curvature radius of the spherical surfaces from inside to outside is increased in sequence;
the second surface further comprises an annular plane area positioned at the outermost side of the spherical areas.
Further, in order to make the effective focusing caliber of the focusing lens larger, the width dimension of the projection on the plane of the substrate outer contour line along the radial direction of the substrate is smaller than 0.1mm in the transition region between two adjacent spherical surface regions and a plane region.
Furthermore, in order to ensure that the optical stability and the irradiation resistance of the focusing lens are better, the application requirements of the aerospace field can be better met, and the glass material is fused quartz glass material.
Meanwhile, the invention also provides a processing method of the high-precision large-curvature focusing lens, which is characterized by comprising the following steps of:
step one: selecting a substrate which corresponds to the radial dimension and the thickness dimension and is made of glass material according to the radial dimension and the thickness dimension requirements of the focusing lens to be processed;
step two: fixing the substrate selected in the step one by using a mode of coiling on the photoresist; then polishing the front surface and the back surface of the substrate, and detecting the plane surface shape of the polished two surfaces by adopting a method of detecting plane surface shape errors by adopting a plane template and an interferometer in the polishing process so that the RMS value of the plane surface shape of the two surfaces is better than 0.02λ, wherein λ refers to the wavelength of a standard light source on the interferometer;
step three: according to the distribution and curvature radius of each area to be processed on the surface to be processed of the substrate and the spherical area to be processed, manufacturing a corresponding tool, wherein the tool can completely shield the area except the area to be processed of the next ion beam equipment on the surface to be processed of the substrate, and only exposes the protective outer cover of the area to be processed of the next ion beam equipment; then the fixture is mounted on the substrate polished in the second step;
step four: adopting ion beam equipment to process the processing area of the ion beam equipment in the next step exposed in the third step, and adopting an interferometer to detect the POWER value in the processing process, and controlling the curvature radius of the processed spherical surface to obtain the spherical surface meeting the curvature radius required by design; after the curvature radius of the processing area meets the design requirement, stopping processing by the ion beam equipment, and then taking down the tool; calculating to obtain the height of the spherical crown according to the curvature radius R of the spherical surface region to be processed and the base circle radius R of the spherical crown corresponding to the region, wherein the height of the spherical crown is the sagittal height H of the spherical surface region to be processed, and then converting the sagittal height H into a POWER value to obtain the POWER value;
step five: and step three and step four are circularly executed until the processing of all spherical areas to be processed is completed, and the required high-precision large-curvature focusing lens is obtained.
Further, in order to prevent pollution to ion beam equipment during processing and avoid bringing great economic loss, in the third step, the tool is a graphite tool.
Further, for focusing convenience and better ensuring the precision of the finally processed focusing lens and enabling the effective focusing caliber of the finally processed focusing lens to be larger, in the first step, the shape of the substrate is circular;
in the third step, the graphite tool is in a round bottle cap shape with an opening on the top and flanging on the periphery; the inner radial dimension of the round bottle cap shape is matched with the radial dimension of the substrate; the position and the size of the opening arranged on the cover top correspond to the area to be processed of the ion beam equipment in the next step in the third step; the dimensional accuracy of the graphite tool meets the following conditions: the width dimension of the projection of the transition area of each adjacent area on the plane of the outer contour line of the substrate along the radial direction of the substrate on the surface of the processed substrate with the spherical area is smaller than 0.1mm.
In the fourth step, in order to make the precision of the finally processed focusing lens higher, the method for detecting the POWER value by using the interferometer is adopted, when the radius of curvature of the processed spherical surface is controlled, the standard lens used by the interferometer is a plane lens, and the precision of detecting the POWER value of the interferometer is 0.001-0.01 lambda.
Further, in order to make the optical stability and irradiation resistance of the finally processed focusing lens better, the application requirements in the aerospace field can be better met, and in the first step, the glass material is a fused quartz glass material;
the fifth step is specifically as follows: circularly executing the third step and the fourth step until finishing the processing of all the spherical areas to be processed, then plating an antireflection film on the substrate processed by all the spherical areas to be processed by using a film plating machine, wherein the outermost layer film system material of the plated antireflection film is SiO 2 And obtaining the required high-precision large-curvature focusing lens.
Further, the surface to be processed of the substrate in the third step comprises a plurality of different spherical areas to be processed, wherein the spherical areas are concentrically arranged from inside to outside and the curvature radius of the spherical areas is increased from small to large; and (3) circularly processing according to the third step and the fourth step so as to finish the processing of all the spherical areas to be processed, wherein when each spherical area to be processed is processed according to the processing sequence from outside to inside, the ion beam equipment in the next step in the third step is to process the area to be processed as follows: the spherical surface area to be processed is close to the area within the outer side contour line of one side of the outer edge of the substrate;
or: the surface to be processed of the substrate in the third step comprises a plurality of different spherical areas to be processed, wherein the spherical areas are concentrically arranged from inside to outside and adjacent to each other, and the curvature radius of the spherical areas is reduced from large to small; and (3) circularly processing according to the third step and the fourth step so as to finish the processing of all the spherical areas to be processed, wherein when each spherical area to be processed is processed according to the processing sequence from inside to outside and each spherical area to be processed is processed, the next ion beam equipment in the third step is to process the areas to be processed: the region between the outer contour line of the outermost sphere region to be processed near the outer edge of the substrate and the inner contour line of the sphere region to be processed near the center of the substrate.
The beneficial effects of the invention are as follows:
(1) According to the processing method of the high-precision large-curvature focusing lens, the characteristic that the ion beam equipment can accurately process a specific area is utilized, then the area which does not need to be processed by the ion beam equipment is completely shielded by matching with the tool, only the area which needs to be processed by the ion beam equipment is exposed, and in the processing process, the method of detecting the POWER value by adopting an interferometer is adopted to control the curvature radius of a processed spherical surface; the circulation is carried out in this way, and the processing of a plurality of spherical areas on the same surface is completed; the processing and detection precision is very high, and the problems that the existing processing technology is adopted, the ring-type sphere diameter meter is adopted to manufacture a standard sample plate for measurement in the process of processing a large-curvature radius sphere, the measurement precision is low, and the requirement of the aerospace field on the high precision of the lens is difficult to meet are avoided; the processing method of the high-precision large-curvature focusing lens is adopted, the processed focusing lens is of an integrated structure, the structure is stable and reliable, the coaxiality and the eccentric value error are small, the focusing function is realized by utilizing the different curvatures of different areas of the lens, a moving component is not needed in the focusing process, and the focusing lens is used for imaging equipment and has good imaging stability; therefore, the invention solves the technical problems that the imaging stability is lower when the existing imaging equipment with the focusing function is used for focusing imaging in the aerospace field, and the processing precision is lower when the existing processing method is adopted for processing the spherical surface with the large curvature radius, so that the high precision requirement of the aerospace field on the lens is difficult to meet. The processing method of the high-precision large-curvature focusing lens can meet the requirement of processing the spherical surface with the large curvature radius of 20-100 m, and the error of the processed focusing lens is within 1%.
(2) In the processing method of the high-precision large-curvature focusing lens, the tool is preferably a graphite tool, so that pollution to ion beam equipment during processing can be prevented, and larger economic loss is avoided.
(3) In the processing method of the high-precision large-curvature focusing lens, the graphite tool is preferably in a round bottle cap shape with an opening on the top and a flanging at the periphery, so that the tool and a substrate can be conveniently mounted, the higher matching precision can be realized, and the precision of the finally processed focusing lens can be better ensured; meanwhile, the dimension precision of the graphite tool is controlled, so that the width dimension of the projection of the transition area of each adjacent area on the surface of the substrate with the spherical surface area processed on the plane where the outer contour line of the substrate is located along the radial direction of the substrate is smaller than 0.1mm, and the effective focusing caliber of the finally processed focusing lens is larger.
(4) The processing method of the high-precision large-curvature focusing lens preferably further comprises the step of plating an antireflection film, wherein the outermost layer film system material of the plated antireflection film is SiO 2 Therefore, the finally processed focusing lens has better optical stability and irradiation resistance, and can better meet the application requirements in the aerospace field.
Drawings
FIG. 1 is a front view of an embodiment of a high precision high curvature focus lens of the invention;
FIG. 2 is a cross-sectional view taken along line F-F in FIG. 1;
FIG. 3 is a flow chart of an embodiment of a method of processing a high precision large curvature focus lens of the present invention;
FIG. 4 is a schematic view of the calculation of the sagittal height of the spherical surface area to be processed in the method for processing a high-precision large-curvature focusing lens of the present invention;
FIG. 5 is a process flow diagram of the processing of the focus lens of the configuration shown in FIGS. 1 and 2 using the method of processing a high precision large curvature focus lens of the present invention;
fig. 6 is a schematic structural diagram of a fixture when the high-precision large-curvature focusing lens of the present invention is processed by the processing method of the focusing lens of the structure shown in fig. 1 and 2, wherein:
(A) Is to change phi d 2 A tool used when the radius of curvature of the spherical surface of the inner region of the spherical crown base circle is equal to the radius of curvature of the spherical surface of the inner region of the spherical crown base circle;
(B) Is to change phi d 1 A tool used when the radius of curvature of the spherical surface of the inner region of the spherical crown base circle is equal to the radius of curvature of the spherical surface of the inner region of the spherical crown base circle;
fig. 7 is a surface view of the focusing lens of the structure shown in fig. 1 and 2, which is manufactured by the method for manufacturing a high-precision large-curvature focusing lens of the present invention, wherein:
(C) Is phi d 1 A regional inner profile;
(D) Is phi d 1 ～Φd 2 A regional inner profile;
(E) Is phi d 2 ～Φd 3 A regional profile;
fig. 8 is a physical view of an embodiment of the high precision high curvature focusing lens of the present invention.
The reference numerals in the drawings are as follows:
1-zone one, 2-zone two, 3-zone three, 4-first surface, 5-second surface, 6-non-working surface, phid 1 Diameter dimension of an outer circular contour line of + -a-region-one side near the outer edge of the substrate phid 2 The diameter dimension of the outside circular contour line of the side of the + -b-region II near the outer edge of the substrate,the diameter of the outer circle of the circular substrate, S+ -G-the thickness of the substrate, G-the roughness required by the first surface and the second surface, R-the radius of curvature of the sphere area to be processed, R-the base radius of the spherical crown, H-sagittal height, phid 2 + -i-change phid 2 Diameter size phi d of circular opening arranged on cover top of tool used for spherical curvature radius of spherical crown base circle inner region 1 + -j-change phid 1 Diameter size phi d of circular opening arranged on tool cover top used in spherical curvature radius of spherical crown bottom circle inner region 4 Round bottle cap-shaped toolDiameter of base circle of outer cylindrical surface phid 3 The diameter of the bottom circle of the inner cylindrical surface of the + -h-round bottle cap-shaped tool, the height of the flanging at the periphery of the K-round bottle cap-shaped tool and the thickness of the cap top of the L-round bottle cap-shaped tool.
Detailed Description
The invention will be described in detail below with reference to the drawings and the detailed description.
Referring to fig. 1 and 2, the high-precision large-curvature focusing lens of the present invention comprises a glass material substrate of an integral structure; defining the front surface and the back surface of the substrate as a first surface 4 and a second surface 5 respectively; the first surface 4 is planar; the second surface 5 includes a plurality of spherical areas, each of which has a different radius of curvature and includes spherical areas having a radius of curvature of 20000mm or more.
In order to make the optical stability and irradiation resistance of the focusing lens better and better meet the application requirements in the aerospace field, the glass material of the substrate of the high-precision large-curvature focusing lens is preferably fused silica glass material. For focusing convenience, referring to fig. 1 and 2, the high-precision large-curvature focusing lens of the present embodiment, the shape of the glass material substrate is preferably circular; the spherical areas are arranged concentrically in sequence from inside to outside, and the curvature radius of the spherical surfaces from inside to outside is increased in sequence; in this embodiment, the plurality of spherical areas are convex. Referring to fig. 1, the second surface 5 in this embodiment includes two spherical areas: namely region one 1 and region two 2. The second surface 5 in this embodiment further includes an annular planar area located at the outermost side of the spherical areas, i.e., area three 3 shown in fig. 1. The high-precision large-curvature focusing lens of the embodiment is preferable to select a transition region between two adjacent spherical regions and a plane region, wherein the width dimension of the projection on the plane of the outer contour line of the substrate along the radial direction of the substrate is smaller than 0.1mm, so that the effective focusing caliber of the focusing lens is larger.
Specific dimensions of the high-precision large-curvature focusing lens of the present embodiment are shown in fig. 1 and 2, wherein: phid 1 The + -a is equal to phi 15.2 + -0.03 mm;φd 2 b is equal to phi 22 plus or minus 0.03mm;equal to->mm; s+ -g equals 6+ -0.05 mm; g is equal to 0.008+ -0.001 μm; the curvature radius of the spherical surface in the first area 1 is 22506+/-2000 mm, the curvature radius of the spherical surface in the second area 2 is 46082 +/-2000 mm, and the spherical surfaces in the first area 1 and the second area 2 are convex surfaces; the area III 3 is a plane; the circumferential cylindrical surface of the focusing lens is a non-working surface 6.
Referring to fig. 3, the invention further provides a processing method of the high-precision large-curvature focusing lens, which comprises the following steps:
step one: selecting a substrate which corresponds to the radial dimension and the thickness dimension and is made of glass material according to the radial dimension and the thickness dimension requirements of the focusing lens to be processed;
step two: fixing the substrate selected in the step one by using a mode of coiling the photoresist; then polishing the front and back surfaces of the substrate, and detecting the plane surface shape error by adopting a method of detecting the plane surface shape error by adopting a plane template and an interferometer in the polishing process, so that the RMS value of the plane surface shape of the two polished surfaces is better than 0.02λ, wherein λ refers to the wavelength of a standard light source on the interferometer;
step three: according to the distribution and curvature radius of each area to be processed on the surface to be processed of the substrate and the spherical area to be processed, manufacturing corresponding tools which can completely shield the areas except the area to be processed of the next ion beam equipment on the surface to be processed of the substrate, and only exposing the protective outer cover of the area to be processed of the next ion beam equipment; then the fixture is mounted on the substrate polished in the second step;
step four: adopting ion beam equipment to process the processing area of the ion beam equipment in the next step exposed in the third step, and adopting an interferometer to detect the POWER value in the processing process to control the curvature radius of the processed spherical surface so as to obtain the spherical surface meeting the curvature radius required by design; after the curvature radius of the processing area meets the design requirement, stopping processing by the ion beam equipment, and then taking down the tool; referring to fig. 4, according to the curvature radius R of the spherical surface region to be processed and the base circle radius R of the spherical crown corresponding to the region, calculating to obtain the height of the spherical crown, wherein the height of the spherical crown is the sagittal height H of the spherical surface region to be processed, and then converting the sagittal height H into a POWER value to obtain the POWER value;
step five: and step three and step four are circularly executed until the processing of all spherical areas to be processed is completed, and the required high-precision large-curvature focusing lens is obtained.
In order to make the optical stability and irradiation resistance of the finally processed focusing lens better, and better meet the application requirements in the aerospace field, in the first step, the glass material may be preferably fused silica glass material.
In order to prevent pollution to ion beam equipment during processing and avoid bringing great economic loss, in the third step, the tool can be preferably a graphite tool.
In the first step, the shape of the substrate may preferably be circular in order to facilitate focusing, and to better ensure the precision of the finally processed focusing lens and make the effective focusing caliber of the finally processed focusing lens larger; in the third step, the graphite tool is preferably in a round bottle cap shape with an opening on the top and a flanging on the periphery; the radial dimension of the inner part of the circular bottle cap shape is matched with the radial dimension of the substrate; the position and the size of the opening arranged on the cover top correspond to the area to be processed of the ion beam equipment in the next step in the third step; the dimensional accuracy of the graphite tool preferably meets the following conditions: the width dimension of the projection of the transition area of each adjacent area on the plane of the outer contour line of the substrate along the radial direction of the substrate on the surface of the processed substrate with the spherical area is smaller than 0.1mm.
In order to make the precision of the finally processed focusing lens higher, in the fourth step, the method of detecting the POWER value by using an interferometer is adopted, when the curvature radius of the processed spherical surface is controlled, the standard lens used by the interferometer is preferably a plane lens, and the POWER value detection precision of the interferometer is preferably 0.001-0.01 lambda.
When the processing method of the high-precision large-curvature focusing lens is adopted to process the focusing lens, the third step and the fourth step are circularly executed to finish the processing of all the spherical areas to be processed, different processing sequences can be selected for a plurality of spherical areas to be processed according to the distribution and the curvature radius of each area to be processed on the surface to be processed of a substrate, and different tools are matched, the distribution and the curvature radius of each area to be processed on the surface to be processed of two substrates are given below, and the specific processing sequences and the specific area to be processed by the ion beam equipment in the next step in the third step are given, namely, the area which the tools should cover when the tools are prepared in the third step, so that the specific application of the processing method of the high-precision large-curvature focusing lens is convenient; the method comprises the following steps:
the surface to be processed of the substrate in the third step comprises a plurality of different spherical areas to be processed, wherein the spherical areas are concentrically arranged from inside to outside and the curvature radius of the spherical areas is increased from small to large; and (3) circularly processing according to the third step and the fourth step so as to finish the processing of all the spherical areas to be processed, wherein when each spherical area to be processed is processed according to the processing sequence from outside to inside, the ion beam equipment in the next step in the third step is to process the area to be processed: the spherical surface area to be processed is close to the area within the outer side contour line of one side of the outer edge of the substrate;
or: the surface to be processed of the substrate in the third step comprises a plurality of different spherical areas to be processed, wherein the spherical areas are concentrically arranged from inside to outside and adjacent to each other, and the curvature radius of the spherical areas is reduced from large to small; and (3) circularly processing according to the third step and the fourth step so as to finish the processing of all the spherical areas to be processed, wherein when each spherical area to be processed is processed according to the processing sequence from inside to outside and each spherical area to be processed is processed, the ion beam equipment in the next step in the third step is that the processing area to be processed is: the region between the outer contour line of the outermost sphere region to be processed near the outer edge of the substrate and the inner contour line of the sphere region to be processed near the center of the substrate.
In order to make the irradiation resistance of the high-precision large-curvature focusing lens processed by the processing method of the high-precision large-curvature focusing lens of the present invention better, the above-mentioned step five of the processing method of the high-precision large-curvature focusing lens of the present embodiment specifically comprises: circularly executing the third step and the fourth step until finishing the processing of all the spherical areas to be processed, then plating an antireflection film on the substrate processed by all the spherical areas to be processed by using a film plating machine, wherein the outermost layer film system material of the plated antireflection film is SiO 2 And obtaining the required high-precision large-curvature focusing lens.
The following is a processing procedure for processing the structure shown in fig. 1 and 2, that is, the high-precision large-curvature focusing lens according to the embodiment of the present invention by adopting the processing method of the high-precision large-curvature focusing lens according to the present invention, and fig. 5 is a processing flow chart, specifically including the following steps:
the first step: selecting a substrate;
selecting radial dimension equal toA substrate having a thickness dimension equal to 6.+ -. 0.05mm;
and a second step of: fixing the substrate selected in the first step by using a manner of coiling the photoresist; then polishing the front and back surfaces of the substrate, and detecting the plane surface shape error by adopting a method of detecting the plane surface shape error by adopting a plane template and an interferometer in the polishing process, so that the RMS value of the plane surface shape of the two polished surfaces is better than 0.02λ, λ refers to the wavelength of a standard light source on the interferometer, and in the embodiment, λ is 632.8nm;
after the second polishing step is completed, the third and fourth steps are required to be circularly executed to complete the processing of all the spherical surface areas to be processed, and in this embodiment, the processing of the two 2 spherical surfaces of the area is completed first; then finishing the processing of the first spherical surface of the region; thus, the third and fourth steps are respectively:
and a third step of: change phi d 2 The spherical curvature radius of the region in the spherical crown base circle is 460822000mm, specifically:
first, a graphite tool as shown in fig. 6 (a) is manufactured, wherein: phid 2 I is equal to phi 22 plus or minus 0.01mm and phi d 3 H is equal to phi 59 plus or minus 0.02mm and phi d 4 Phi 65mm, K6 mm, L2 mm;
then mounting the tooling on the substrate polished in the second step;
then adopting ion beam equipment to process an exposed area which is not shielded by a graphite tool on the surface to be processed, and adopting an interferometer to detect the POWER value in the processing process, and controlling the curvature radius of the processed spherical surface so as to obtain the spherical surface meeting the curvature radius required by design; fig. 4 is a schematic diagram of calculation of the sagittal height of the spherical region to be processed, in fig. 4, R is the radius of curvature of the spherical region to be processed, R is the base circle radius of the spherical crown, and H is the sagittal height, so that the sagittal height H can be calculated by the following formula [1], and the formula [1] is:
the sagittal height of the second region 2 is 0.00126 mm-0.00137 mm obtained by the calculation of the formula [1], and the second region is converted into a POWER value of-2.165 lambda to-1.991lambda;
stopping processing by the ion beam equipment when the curvature radius of the second area 2 reaches 46082 +/-2000 mm, and then removing the tool;
fourth step: change phi d 1 The spherical curvature radius of the region in the spherical crown base circle is 22506 plus or minus 2000mm, specifically:
first, a graphite tool as shown in fig. 6 (B) is manufactured, wherein: phid 1 The + -j is equal to phi 15.2 + -0.01 mm and phi d 3 H is equal to phi 59 plus or minus 0.02mm and phi d 4 Phi 65mm, K6 mm, L2 mm;
then mounting the tooling on the substrate processed in the third step;
then adopting ion beam equipment to process an exposed area which is not shielded by a graphite tool on the surface to be processed, and adopting an interferometer to detect the POWER value in the processing process, and controlling the curvature radius of the processed spherical surface so as to obtain the spherical surface meeting the curvature radius required by design; the sagittal height of the first region 1 is 0.00118 mm-0.00141 mm obtained by the calculation of the formula [1], and the sagittal height is converted into a POWER value of-2.228 lambda to-1.865lambda;
when the curvature radius of the first area 1 reaches 22506+/-2000 mm, stopping processing by the ion beam equipment, and then removing the tool;
fifth step: coating an antireflection film on the substrate with the two spherical areas processed in the fourth step by using a coating machine, wherein the outermost layer of the coated antireflection film is made of SiO 2 . Thus, the focusing lens plated with the antireflection film has better irradiation resistance.
In the processing process of the embodiment, the dimensional tolerance of the graphite tool is controlled, so that the transition area between the first area 1 and the second area 2 and the transition area between the second area 2 and the third area 3 can be ensured, the width dimension of the projection on the plane of the outer contour line of the substrate along the radial direction of the substrate is smaller than 0.1mm, and the effective focusing caliber of the focusing lens is larger.
Fig. 7 is a plane view of the structure shown in fig. 1 and 2, i.e., the high-precision large-curvature focusing lens according to the embodiment of the present invention, which is processed by the processing method of the high-precision large-curvature focusing lens according to the present invention, wherein: (C) Is phi d 1 A regional inner profile; (D) Is phi d 1 ～Φd 2 A regional inner profile; (E) Is phi d 2 ～Φd 3 A regional profile; from FIG. 7 (C), it can be seen that the POWER value in zone one 1 is-1.978λ; it can be seen in fig. 7 (D) that the POWER value in region two 2 is-2.164 λ; in FIG. 7 (E), it can be seen that the RMS within region three 3 is 0.015 λ; therefore, the radius curvature of each region can be ensured to meet the technical requirements.
Fig. 8 is a physical view of an embodiment of the high precision high curvature focusing lens of the present invention.
In summary, the processing method of the high-precision large-curvature focusing lens can meet the processing of the large-curvature radius spherical surface with the curvature radius of 20-100 m, and the error of the processed focusing lens is within 1%.
Claims (10)
1. The utility model provides a high accuracy large curvature focusing lens which characterized in that:
a glass material substrate comprising a unitary structure;
defining the front surface and the back surface of the substrate as a first surface (4) and a second surface (5) respectively;
the first surface (4) is planar;
the second surface (5) comprises a plurality of spherical areas, and the spherical areas have different curvature radiuses and include spherical areas with curvature radiuses of 20000mm or more.
2. The high precision high curvature focusing lens of claim 1, wherein:
the glass material substrate is circular in appearance;
the spherical areas are concentrically arranged adjacently from inside to outside in sequence, and the curvature radius of the spherical surfaces from inside to outside is increased in sequence;
the second surface (5) further comprises an annular plane area positioned at the outermost side of the spherical areas.
3. The high precision high curvature focusing lens of claim 2, wherein:
and the width dimension of the projection on the plane of the outer contour line of the substrate along the radial direction of the substrate is smaller than 0.1mm in the transition region between two adjacent spherical regions and between the adjacent spherical regions and the plane region.
4. A high precision high curvature focusing lens according to any of claims 1 to 3, wherein:
the glass material is a fused silica glass material.
5. The processing method of the high-precision large-curvature focusing lens is characterized by comprising the following steps of:
step one: selecting a substrate which corresponds to the radial dimension and the thickness dimension and is made of glass material according to the radial dimension and the thickness dimension requirements of the focusing lens to be processed;
step two: fixing the substrate selected in the step one by using a mode of coiling on the photoresist; then polishing the front surface and the back surface of the substrate, and detecting the plane surface shape of the polished two surfaces by adopting a method of detecting plane surface shape errors by adopting a plane template and an interferometer in the polishing process so that the RMS value of the plane surface shape of the two surfaces is better than 0.02λ, wherein λ refers to the wavelength of a standard light source on the interferometer;
step three: according to the distribution and curvature radius of each area to be processed on the surface to be processed of the substrate and the spherical area to be processed, manufacturing a corresponding tool, wherein the tool can completely shield the area except the area to be processed of the next ion beam equipment on the surface to be processed of the substrate, and only exposes the protective outer cover of the area to be processed of the next ion beam equipment; then the fixture is mounted on the substrate polished in the second step;
step four: adopting ion beam equipment to process the processing area of the ion beam equipment in the next step exposed in the third step, and adopting an interferometer to detect the POWER value in the processing process, and controlling the curvature radius of the processed spherical surface to obtain the spherical surface meeting the curvature radius required by design; after the curvature radius of the processing area meets the design requirement, stopping processing by the ion beam equipment, and then taking down the tool; calculating to obtain the height of the spherical crown according to the curvature radius (R) of the spherical surface area to be processed and the base circle radius (R) of the spherical crown corresponding to the area, wherein the height of the spherical crown is the sagittal height (H) of the spherical surface area to be processed, and then converting the sagittal height (H) into a POWER value to obtain the POWER value;
step five: and step three and step four are circularly executed until the processing of all spherical areas to be processed is completed, and the required high-precision large-curvature focusing lens is obtained.
6. The method for manufacturing a high-precision high-curvature focusing lens according to claim 5, wherein:
in the third step, the tool is a graphite tool.
7. The method for manufacturing a high-precision high-curvature focusing lens according to claim 6, wherein:
in the first step, the shape of the substrate is circular;
in the third step, the graphite tool is in a round bottle cap shape with an opening on the top and flanging on the periphery; the inner radial dimension of the round bottle cap shape is matched with the radial dimension of the substrate; the position and the size of the opening arranged on the cover top correspond to the area to be processed of the ion beam equipment in the next step in the third step; the dimensional accuracy of the graphite tool meets the following conditions: the width dimension of the projection of the transition area of each adjacent area on the plane of the outer contour line of the substrate along the radial direction of the substrate on the surface of the processed substrate with the spherical area is smaller than 0.1mm.
8. The method for manufacturing a high-precision high-curvature focusing lens according to claim 5, wherein:
in the fourth step, when the method of detecting the POWER value by using the interferometer is used for controlling the curvature radius of the processed spherical surface, the standard lens used by the interferometer is a plane lens, and the detection precision of the POWER value of the interferometer is 0.001-0.01 lambda.
9. The method for manufacturing a high-precision high-curvature focusing lens according to claim 5, wherein:
in the first step, the glass material is fused quartz glass material;
the fifth step is specifically as follows: circularly executing the third step and the fourth step until finishing the processing of all the spherical areas to be processed, then plating an antireflection film on the substrate processed by all the spherical areas to be processed by using a film plating machine, wherein the outermost layer film system material of the plated antireflection film is SiO 2 And obtaining the required high-precision large-curvature focusing lens.
10. The method for processing a high-precision large-curvature focusing lens according to any one of claims 5 to 9, characterized in that:
the surface to be processed of the substrate in the third step comprises a plurality of different spherical areas to be processed, wherein the spherical areas are concentrically arranged from inside to outside and the curvature radius of the spherical areas is increased from small to large; and (3) circularly processing according to the third step and the fourth step so as to finish the processing of all the spherical areas to be processed, wherein when each spherical area to be processed is processed according to the processing sequence from outside to inside, the ion beam equipment in the next step in the third step is to process the area to be processed as follows: the spherical surface area to be processed is close to the area within the outer side contour line of one side of the outer edge of the substrate;
or: the surface to be processed of the substrate in the third step comprises a plurality of different spherical areas to be processed, wherein the spherical areas are concentrically arranged from inside to outside and adjacent to each other, and the curvature radius of the spherical areas is reduced from large to small; and (3) circularly processing according to the third step and the fourth step so as to finish the processing of all the spherical areas to be processed, wherein when each spherical area to be processed is processed according to the processing sequence from inside to outside and each spherical area to be processed is processed, the next ion beam equipment in the third step is to process the areas to be processed: the region between the outer contour line of the outermost sphere region to be processed near the outer edge of the substrate and the inner contour line of the sphere region to be processed near the center of the substrate.
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