CN117434682A - Installation and adjustment device for reflective mirror for laser interferometry - Google Patents

Installation and adjustment device for reflective mirror for laser interferometry Download PDF

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Publication number
CN117434682A
CN117434682A CN202311338559.0A CN202311338559A CN117434682A CN 117434682 A CN117434682 A CN 117434682A CN 202311338559 A CN202311338559 A CN 202311338559A CN 117434682 A CN117434682 A CN 117434682A
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CN
China
Prior art keywords
adjusting
piece
arm
main body
mounting
Prior art date
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Pending
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CN202311338559.0A
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Chinese (zh)
Inventor
张超
陈李松
李宣伦
范江华
刘千伍
叶文龙
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CETC 48 Research Institute
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CETC 48 Research Institute
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Application filed by CETC 48 Research Institute filed Critical CETC 48 Research Institute
Priority to CN202311338559.0A priority Critical patent/CN117434682A/en
Publication of CN117434682A publication Critical patent/CN117434682A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention discloses a reflector installation and adjustment device for laser interferometry, which comprises: the device comprises a mounting seat main body, a supporting piece, a fine tuning piece, a reference piece, an adjusting arm and a pre-tightening assembly; the mounting seat main body comprises a lower bottom, a side part and an upper top; the supporting piece is arranged at the lower bottom of the mounting seat main body; the fine tuning piece is arranged on the side part of the mounting seat main body; the reference piece is arranged at one end of the lower bottom and is higher than the inner surface of the lower bottom; the adjusting arm is arranged on the back of the side part and is provided with a protrusion and an adjusting piece, and the adjusting piece is used for adjusting the position of the adjusting arm so that the protrusion pushes the fine adjusting piece to protrude out of the groove and further pushes the reflector; the pretension assembly is arranged on the mounting seat main body and used for pressing the reflector after angle adjustment. The installation and adjustment device can control minimum adjustment precision, and has the advantages of high adjustment precision, simple structure, simple and convenient operation, high repeatability, little influence by temperature and strong reliability.

Description

Installation and adjustment device for reflective mirror for laser interferometry
Technical Field
The invention relates to the technical field of optical element adjustment, in particular to a reflector mounting and adjusting device for laser interferometry.
Background
The laser measuring device is a component frequently adopted in high-precision equipment, instruments or systems, is a key guarantee for accurately carrying out actions such as micro-nano machining, high-precision motion positioning and the like on the equipment, instruments or systems, wherein the laser interferometer measuring system is the outstanding part in laser measurement, can realize very high-precision measurement by means of an interference principle, has resolution of less than 1nm, and provides powerful guarantee for operation accuracy. However, such high precision of laser interferometry also means that it is extremely demanding in terms of use. Of which the most difficult is the mounting angle of the mirror for reflecting the measuring beam. The ideal situation between the reflector and the measuring beam is completely vertical, and once an included angle is formed, the measuring result loses a certain accuracy.
At present, two main modes of reflector installation are fixed, namely, the angle of the reflector is measured, adjusted and fixed on a platform with a measuring function through a third party device, and the fixing can be realized through structural fastening or through gluing and other modes, so that the reflector can not be adjusted easily later. And secondly, the adjustable type installation is carried out, the angle of the reflector is adjusted through a support or a structure with a fine adjustment function, and then the reflector is fastened. The former (fixed installation) has the advantages of accurate installation result, compact structure, simple subsequent operation, and basically long-term maintenance free after installation, and has the disadvantages of needing a third party device or platform with high-precision measurement function, and having high technical difficulty of manual adjustment, and being difficult once deviation or other conditions needing adjustment appear in the subsequent process. The latter (adjustable installation) has the advantages of no need of a third party platform and additional instrument tools, simple and flexible operation, convenient maintenance and readjustment, and the disadvantage of more complex structure, great influence on accuracy by adjustment means and difficult long-term guarantee of reliability.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects of the prior art and providing the installation and adjustment device for the reflective mirror for laser interferometry, which has the advantages of simple operation, high adjustment precision and small operation space requirement.
In order to solve the technical problems, the invention adopts the following technical scheme:
a mirror mounting and adjustment device for laser interferometry, comprising:
the device comprises a mounting seat main body, a supporting piece, a fine tuning piece, a reference piece, an adjusting arm and a pre-tightening assembly;
the mounting seat main body comprises a lower bottom, a side part and an upper top, and a containing space for containing the reflector is formed among the lower bottom, the side part and the upper top;
the supporting piece is arranged at the lower bottom of the mounting seat main body and is higher than the inner surface of the lower bottom and used for supporting the reflector;
the fine tuning piece is arranged on the side part of the mounting seat main body, and a groove is correspondingly arranged on the side part so as to accommodate the fine tuning piece, and penetrates through the side part;
the reference piece is arranged at one end of the lower bottom and is higher than the inner surface of the lower bottom and used as a side positioning reference of the reflector;
the adjusting arm is arranged on the back surface of the side part, a protrusion is arranged at the position of the adjusting arm corresponding to the fine tuning piece, and the adjusting arm is provided with an adjusting piece for adjusting the position of the adjusting arm so that the protrusion pushes the fine tuning piece to protrude out of the groove, and then pushes the reflector to realize angle adjustment;
the pre-tightening assembly is arranged on the mounting seat main body and used for compressing the reflector with the angle adjusted.
As a further improvement of the above technical scheme:
the adjusting arm comprises an adjusting end and a fixed end, the fixed end of the adjusting arm is fastened on the side part, the adjusting end of the adjusting arm is provided with a mounting hole, and the protrusion is positioned in the middle of the adjusting arm; the adjusting piece comprises an adjusting screw and an elastic gasket, the adjusting screw penetrates through the mounting hole to be in threaded connection with the side portion, and the elastic gasket is sleeved on the adjusting screw and is located between the screw head and the side portion of the adjusting screw.
The groove for accommodating the fine tuning piece is a special-shaped groove, the front end aperture of the special-shaped groove is smaller than the size of the fine tuning piece, and the rear end aperture of the special-shaped groove is matched with the size of the fine tuning piece.
The fine tuning piece is a cylinder made of sapphire material, and the fine tuning piece is in line contact with the reflecting mirror.
The number of the fine tuning pieces and the adjusting arms is two, and the fine tuning pieces and the adjusting arms are symmetrically arranged on the mounting seat main body.
The pre-tightening assembly comprises a pre-tightening long arm; the middle part of the pre-tightening long arm is mounted on the upper top of the mounting seat main body through a plurality of first fasteners, protruding parts are arranged at two ends of the pre-tightening long arm, and through holes are correspondingly formed in the upper top to accommodate the protruding parts of the pre-tightening long arm.
The pre-tightening assembly further comprises a pre-tightening short arm; the pre-tightening short arm is mounted on the front surface of the lower bottom through a second fastener, and the pre-tightening short arm is provided with an extension part extending towards the upper top.
The second fastener and the first fastener are screws or bolts.
The lower bottom of mount pad main part still is equipped with a plurality of counter sunk holes that hold a plurality of erection columns, the erection column is used for with the mount pad main part is installed on the outside object that awaits measuring.
The lower bottom of the mounting seat main body is also provided with one or more hollowed-out parts.
Compared with the prior art, the invention has the advantages that:
1. according to the reflector installation and adjustment device, the support piece arranged at the lower bottom of the installation seat main body is used for installation and support, compared with an installation mode that the whole installation seat is in direct contact with the reflector, the processing difficulty can be greatly reduced, and the influence of temperature change on the device is small due to small-area contact.
2. According to the reflector installation and adjustment device, the reference piece is used for providing a reference for positioning the angle of the reflector, and the adjusting piece on the adjusting arm is adjusted to enable the protrusion on the adjusting arm to push the fine adjusting piece so as to adjust the angle of the reflector, so that the minimum adjustment quantity can be controlled more accurately, and high-precision adjustment is realized;
3. according to the reflector installation and adjustment device, the pre-tightening assembly is used for compressing the adjusted reflector, so that the reflector with the adjusted angle cannot be displaced in the use process, and when the angle of the reflector needs to be adjusted again later, the pre-tightening assembly can be loosened, the angle of the reflector can be adjusted by using the adjustment arm again conveniently, and the whole operation is simple and convenient, and the repeatability is high.
Drawings
FIG. 1 is a schematic perspective view of a mirror mounting and adjusting device for laser interferometry according to an embodiment of the present invention.
Fig. 2 is a front view of the mirror mounting and adjusting device for laser interferometry in this embodiment.
Fig. 3 is a top view of the mirror mounting and adjustment device for laser interferometry in this embodiment.
FIG. 4 is a top view of the mirror mounting and adjustment device for laser interferometry of this embodiment with the upper top and pre-tensioned long arm structure removed.
Fig. 5 is an enlarged view of the recess of fig. 4 in which the trim is received in part a.
Fig. 6 is a schematic perspective view of the mirror mounting and adjusting device for laser interferometry in this embodiment with the mirror mounted thereon.
Fig. 7 is a schematic diagram of the fine tuning principle of this embodiment.
The attached drawings are used for identifying and describing:
1. a mount main body; 11. a lower bottom; 12. a side portion; 13. an upper top; 14. a countersunk hole; 15. a mounting column; 16. a hollowed-out part; 2. a support; 3. a fine tuning member; 31. a special-shaped groove; 4. a reference member; 5. an adjusting arm; 51. a protrusion; 52. an adjusting member; 6. pre-tightening the short arm; 61. an extension; 62. a second fastener; 7. pre-tightening the long arm; 71. a protruding portion; 72. a first fastener; 8. a reflective mirror.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by one of ordinary skill in the art without inventive effort, are intended to be within the scope of the present invention, based on the embodiments herein.
In the description of the present invention, it should be noted that, the terms "center," "upper," "lower," "horizontal," "inner," "outer," "top," "bottom," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, rather than indicate or imply that the apparatus or elements being referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the present invention.
As shown in fig. 1 to 5, an embodiment of the present invention provides a mirror mounting and adjusting device for laser interferometry, including:
the device comprises a mounting seat main body 1, a supporting piece 2, a fine adjusting piece 3, a reference piece 4, an adjusting arm 5 and a pre-tightening assembly;
the mounting seat main body 1 comprises a lower bottom 11, a side part 12 and an upper top 13, and a containing space for containing the reflector 8 is formed among the lower bottom 11, the side part 12 and the upper top 13;
the supporting piece 2 is arranged at the lower bottom 11 of the mounting seat main body 1 and is higher than the inner surface of the lower bottom 11 and is used for supporting the reflector 8;
the fine tuning piece 3 is arranged on the side part 12 of the mounting seat main body 1, the side part 12 is correspondingly provided with a groove for accommodating the fine tuning piece 3, and the groove penetrates through the side part 12;
the reference piece 4 is arranged at one end of the lower bottom 11 and is higher than the inner surface of the lower bottom 11, and is used as a side positioning reference of the reflector 8;
the adjusting arm 5 is arranged on the back of the side part 12, a protrusion 51 is arranged at the position of the adjusting arm 5 corresponding to the fine tuning piece 3, and an adjusting piece 52 is arranged on the adjusting arm 5 and used for adjusting the position of the adjusting arm 5 so that the protrusion 51 pushes the fine tuning piece 3 to protrude out of the groove, and then pushes the reflector 8 to realize angle adjustment;
the pre-tightening assembly is arranged on the mounting seat main body 1 and is used for compressing the angle-adjusted reflector 8..
It can be understood that, in the installation and adjustment device for the reflective mirror of the present embodiment, the reflective mirror 8 is supported by the support member 2 disposed at the lower bottom 11 of the installation seat main body 1, that is, the reflective mirror 8 does not actually contact the surface of the lower bottom 11, compared with the existing installation method that adopts the reflective mirror 8 to directly contact the entire installation seat, the installation seat and the reflective mirror contact plane do not need to have higher flatness, so that the processing difficulty is greatly reduced, and the influence of temperature variation on the device is also smaller due to smaller area contact (if the reflective mirror 8 is directly installed on the installation seat main body 1, the entire surface that needs to contact the installation seat main body 1 and the reflective mirror 8 has extremely high tolerance requirement, the processing difficulty is greatly improved, and the influence of temperature variation on the device can be larger due to large area contact);
the reference piece 4 is used as a positioning reference (similar to a rotating shaft) of the reflector 8 during adjustment, so that high-precision adjustment is realized;
the adjusting piece 52 on the adjusting arm 5 is adjusted, so that the protrusion 51 on the adjusting arm 5 pushes the fine adjusting piece 3 to further realize the angle adjustment of the reflecting mirror 8, and the single-time adjustment feeding amount is small, so that the angle of the reflecting mirror 8 can be adjusted more accurately;
the pre-tightening assembly is used for compressing the regulated reflector 8, so that the reflector with the regulated angle is ensured not to generate displacement in the use process, and when the angle of the reflector is required to be regulated again later, the pre-tightening assembly can be loosened, the angle of the reflector can be regulated by utilizing the regulating arm 5 again, and the whole operation is simple and convenient, and the repeatability is high.
In this embodiment, as shown in fig. 3, the adjusting arm 5 includes an adjusting end and a fixed end, the fixed end of the adjusting arm 5 is fastened on the side portion 12, the adjusting end of the adjusting arm 5 is provided with a mounting hole, and the protrusion 51 is located in the middle of the adjusting arm 5; the adjusting member 52 includes an adjusting screw and an elastic washer, the adjusting screw passes through the mounting hole to be in threaded connection with the side portion 12, and the elastic washer is sleeved on the adjusting screw and is located between the screw head of the adjusting screw and the side portion 12. The elastic gasket is slightly deformed, and the fixed end is not required to be screwed up, so that subsequent adjustment is facilitated.
Fig. 7 shows a schematic diagram of the fine tuning function principle of the device. Wherein d 1 To adjust the feed distance d of the screw 2 For fine adjustment of the feed distance L of the member 3 1 For the distance L of the trimming member 3 (or the projection 51) from the adjustment end of the adjustment arm 5 2 The distance from the fine adjustment member 3 (or the projection 51) to the fixed end of the adjustment arm 5, θ is the rotation angle of the adjustment screw, and P is the screw lead (not shown in the figure) of the adjustment screw. From the principle of leverage, d can be derived 1 And d 2 The expression of (2) is:therefore, fine adjustment of the placing angle of the reflector 8 can be realized by rotating the adjusting screw by a certain angle, and meanwhile, the minimum adjusting amount during adjustment can be greatly reduced due to the design of the lever, so that the adjustment is more accurate.
Specifically, according to the pitch of the screw, the ratio of the screw-in angle to the feed amount is set to be k 1 Then the single feed of the adjusting screw in the adjusting member 52 during adjustment is d=k 1 θ. Whereas the feed of the adjusting screw is actually pushing the trim 3 by means of the projection 51 on the adjusting arm 5, the feed actually acting on the mirror 8 is also divided by a proportional number k 2 ，k 2 This value can be set between 5 and 20 according to the design, for the ratio of the length (l1+l2) of the adjusting arm 5 to the distance (L2) of the projection 51 from the fixed end. Thus, the single feed in the final adjustment is d=k 1 k 2 θ, even if the installer rotates the adjusting screw by using a tool such as an allen wrench or a line wrench at an angle of about 3 °, the adjusting accuracy of the device can be about 0.5 μm (the adjusting screw M5, pitch 0.8mm, k2=10), and a higher ratio (corresponding to k) can be used if necessary 2 ) Is realized by the adjusting arm of the device. Therefore, the invention adjusts the feeding amount by adjusting the screw, so that the feeding amount of single adjustment is smaller, the minimum adjustment amount can be controlled more accurately, and the feeding amount can be adjusted according to the precision required in actual adjustmentThe adjusting screw and the adjusting arm should be adjusted so that the overall adjustment is more accurate.
In this embodiment, as shown in fig. 5, the groove for accommodating the trimming member 3 is a special-shaped groove 31, the front end aperture of the special-shaped groove 31 is smaller than the size of the trimming member 3, and the rear end aperture of the special-shaped groove 31 is matched with the size of the trimming member 3. It will be appreciated that the profiled groove ensures that the trim 3 moves in a fore-and-aft direction along the slot but does not disengage from the slot. Of course, the shape of the groove may be adjusted according to the shape of the trim 3, as long as the position of the trim 3 can be restricted so as not to be disengaged from the notch.
In this embodiment, the supporting member 2, the fine tuning member 3 and the reference member 4 are all cylinders of sapphire material, and the fine tuning member 3 is in line contact with the reflective mirror 8. It can be understood that, because the sapphire glass material has the advantages of small thermal expansion coefficient, small environmental influence, high hardness, wear resistance and the like, the deformation influence caused by factors such as temperature change can be reduced by adopting the sapphire material, and the processing requirements of parts are greatly reduced under the condition of ensuring good mounting standard, thereby being more beneficial to realizing high-precision adjustment.
Compared with the traditional condition that the surface contact possibly causes local deformation of parts, the fine tuning piece 3 and the reflecting mirror 8 are in a line contact mode, so that friction resistance and abrasion in the adjusting process are greatly reduced, smoothness and long-term stability of the adjusting process are greatly improved, and the method is quite suitable for adjusting the reflecting mirror in high-precision equipment and instruments. Of course, the supporting member 2, the trimming member 3, and the reference member 4 may be made of other materials with low thermal expansion coefficients, and the trimming member 3 may be formed of regular or irregular polyhedrons or other shapes, so long as the linear contact between the trimming member and the reflective mirror 8 is achieved.
Specifically, as shown in fig. 1, the cylindrical support 2 is mounted on the lower bottom 11 through a larger diameter through hole provided in the lower bottom 11 of the mount main body 1, and the cylindrical reference 4 is mounted on the lower bottom 11 through non-penetrating through holes provided in both ends of the lower bottom 11 of the mount main body 1. Since the adjustment process is actually to move a certain point of the reflective mirror 8 in the Y-axis direction (as shown in fig. 7), if the adjustment process is operated for multiple times, the change of the X-axis direction (as shown in fig. 7) is easy to be caused, and the change of the X-axis direction of the adjustment process is extremely small and the controllability and the repeatability of the adjustment operation are improved by limiting the reflective mirror 8 through the cylindrical reference member 4.
In addition, the reference member 4 is used as a positioning reference for adjusting the reflector 8, and mainly improves the reference of the height direction (Z axis) of the reflector 8, in the adjusting process, one side of the reflector 8 is pushed by hand, a pretightening force is given to the reflector 8, so that the other side of the reflector 8 is tightly attached to the cylindrical reference member 4, the reflector 8 is guaranteed to rotate around an axis (a spool where the reflector 8 contacts with the cylindrical reference member 4) during angle adjustment, and the adjusting precision is improved (because the adjusting process is actually to move a certain point of the reflector in the Y axis direction, if the adjusting process is operated for many times, the change of the X axis direction is easily caused, and the change of the X axis direction of the adjusting process is extremely small and the controllability of the adjusting operation is improved by limiting the cylindrical reference member 7 on the side end face).
In this embodiment, as shown in fig. 1 to 4, the number of the fine tuning elements 3 and the adjusting arms 5 is two, and the fine tuning elements and the adjusting arms are symmetrically disposed on the mounting base main body 1. It can be understood that the two symmetrical supporting members 2 and the adjusting arms 5 can make the device have wider applicability (such as being applicable to reflectors with longer length directions, etc.), and improve the convenience of operation and the accuracy of adjustment in the process of installing and adjusting the reflectors 8.
In this embodiment, as shown in fig. 1 to 4, the pretensioning assembly includes a pretensioning long arm 7 and a pretensioning short arm 6, wherein the middle portion of the pretensioning long arm 7 is mounted on an upper top portion 13 of the mount body 1 through a plurality of first fasteners 72, two ends of the pretensioning long arm 7 have protruding portions 71, and the upper top portion 13 is correspondingly provided with through holes to accommodate the protruding portions 71 of the pretensioning long arm 7. The pre-tightening tab 6 is mounted to the front surface of the lower base 11 by a second fastener 62, and the pre-tightening tab 6 has an extension 61 extending in the direction of the upper top 13.
Specifically, the pretensioning long arm 7 is structured to be thin in the middle, thick on both sides, for ensuring a certain elasticity thereof, and thick on both sides, for providing the projection 71 for placing the first fastener 72 to press down the mirror 8 after the angle adjustment is completed. Since the pre-tightening long arm 7 has a certain elasticity, the protrusion 71 is elastically pressed against the mirror 8, so that damage to the mirror 8 due to hard contact is avoided. In addition, the protrusion 71 corresponds to the position of the support 2, and the protrusion 71 is located directly above the support 2, thereby ensuring the reliability of the pretension. The pre-tightening short arm 6 passes through the extension part 61 and is matched with the fine tuning piece 3 to realize the limit of the front and back directions of the reflector 8 with the angle adjustment, so that the reliability is ensured. It can be understood that by arranging the pre-tightening short arm 6 and the pre-tightening long arm 7, the reflector 8 after the angle adjustment is completed can be ensured not to shift in the use process, and the reliability of the device is further improved.
In this embodiment, as shown in fig. 1, the lower bottom 11 of the mount main body 1 is further provided with a plurality of countersunk holes 14 for accommodating a plurality of mounting posts 15, and the mounting posts 15 are used for mounting the mount main body 1 on an external object to be tested. It will be appreciated that the counter bore 14 may facilitate the installation of the mounting post 15 and does not occupy the installation space of the mirror 8; after the mirror 8 is mounted, the mounting post 15 can facilitate more stable mounting of the entire apparatus on the object to be measured.
In this embodiment, as shown in fig. 1, the lower bottom 11 of the mounting seat main body 1 is further provided with one or more hollowed-out portions 16, such as rectangular hollowed-out portions. It will be appreciated that the provision of the hollowed-out portion 16 reduces the overall weight of the device, while reducing costs. Of course, the hollowed-out portion 16 may not be provided according to the actual situation.
In this embodiment, the flatness and the height deviation of the upper and lower end surfaces of the support member 2 are both smaller than 0.05mm. It can be understood that, this device is because installing and supporting reflector 8 through support piece 2, in order to ensure the adjustment precision, this device only has higher tolerance requirement to the processing of support piece 2, and current scheme is because installing and supporting reflector 8 through whole mount pad bottom, in order to ensure the adjustment precision, has higher tolerance requirement to whole mounting plane, adopts this device can reduce the processing degree of difficulty, and then improves the adjustment precision.
The following briefly describes the adjustment method of the device:
the device is arranged on equipment, an instrument or a system, a first fastener 72 positioned on a pre-tightening long arm 7 of an upper top 13 and a second fastener 62 positioned on a pre-tightening short arm 6 are firstly loosened, a reflector 8 is arranged on a supporting piece 2, then an adjusting piece 52 on a corresponding adjusting arm 5 is screwed or loosened according to the angle direction to be adjusted, in the adjusting process, a certain force (such as light pushing by hand) is applied to the side part of the reflector 8 to enable the end face of the other side of the reflector to be always tightly attached to a reference piece 4 until the angle adjustment of the reflector 8 meets the requirement (namely, a measuring beam is almost absolutely perpendicular to a reflecting surface as far as possible), and finally the first fastener 72 on the pre-tightening long arm 7 and the second fastener 62 on the pre-tightening short arm 6 are screwed to tightly press the reflector 8, so that the adjusting process of the device is completed. The reflector installation and adjustment device can be realized by adjusting a plurality of screws, and the adjustment process is simple and quick.
While the invention has been described with reference to preferred embodiments, it is not intended to be limiting. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art, or equivalent embodiments with equivalent variations can be made, without departing from the scope of the invention. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention shall fall within the scope of the technical solution of the present invention.

Claims (10)

1. A mirror mounting and adjustment device for laser interferometry, comprising:
the device comprises a mounting seat main body (1), a supporting piece (2), a fine adjusting piece (3), a reference piece (4), an adjusting arm (5) and a pre-tightening assembly;
the mounting seat main body (1) comprises a lower bottom (11), a side part (12) and an upper top (13), wherein a containing space for containing the reflector (8) is formed among the lower bottom (11), the side part (12) and the upper top (13);
the supporting piece (2) is arranged at the lower bottom (11) of the mounting seat main body (1) and is higher than the inner surface of the lower bottom (11) and used for supporting the reflector (8);
the fine tuning piece (3) is arranged on the side part (12) of the mounting seat main body (1), the side part (12) is correspondingly provided with a groove for accommodating the fine tuning piece (3), and the groove penetrates through the side part (12);
the reference piece (4) is arranged at one end of the lower bottom (11) and is higher than the inner surface of the lower bottom (11) and used as a side positioning reference of the reflector (8);
the adjusting arm (5) is arranged on the back of the side part (12), a protrusion (51) is arranged at the position of the adjusting arm (5) corresponding to the fine adjusting piece (3), an adjusting piece (52) is arranged on the adjusting arm (5), and the adjusting arm is used for adjusting the position of the adjusting arm (5) so that the protrusion (51) pushes the fine adjusting piece (3) to protrude out of the groove, and then pushes the reflecting mirror (8) to realize angle adjustment;
the pre-tightening assembly is arranged on the mounting seat main body (1) and used for compressing the angle-adjusted reflector (8).
2. The mirror mounting and adjustment device for laser interferometry according to claim 1, wherein: the adjusting arm (5) comprises an adjusting end and a fixed end, the fixed end of the adjusting arm (5) is fastened on the side part (12), the adjusting end of the adjusting arm (5) is provided with a mounting hole, and the protrusion (51) is positioned in the middle of the adjusting arm (5); the adjusting piece (52) comprises an adjusting screw and an elastic gasket, the adjusting screw penetrates through the mounting hole to be in threaded connection with the side portion (12), and the elastic gasket is sleeved on the adjusting screw and is located between a screw head of the adjusting screw and the side portion (12).
3. The mirror mounting and adjustment device for laser interferometry according to claim 1, wherein:
the groove for accommodating the fine tuning piece (3) is a special-shaped groove (31), the front end aperture of the special-shaped groove (31) is smaller than the size of the fine tuning piece (3), and the rear end aperture of the special-shaped groove (31) is matched with the size of the fine tuning piece (3).
4. A mirror mounting and adjustment device for laser interferometry according to claim 3, characterized in that:
the fine tuning piece (3) is a cylinder made of sapphire, and the fine tuning piece (3) is in line contact with the reflecting mirror (8).
5. A mirror mounting and adjustment device for laser interferometry according to claim 2 or 3, characterized in that:
the number of the fine tuning pieces (3) and the adjusting arms (5) is two, and the fine tuning pieces and the adjusting arms are symmetrically arranged on the mounting seat main body (1).
6. The mirror mounting and adjustment device for laser interferometry according to any one of claims 1-4, wherein:
the pre-tightening assembly comprises a pre-tightening long arm (7); the middle part of the pre-tightening long arm (7) is mounted on the upper top (13) of the mounting seat main body (1) through a plurality of first fasteners (72), protruding portions (71) are arranged at two ends of the pre-tightening long arm (7), and through holes are correspondingly formed in the upper top (13) to accommodate the protruding portions (71) of the pre-tightening long arm (7).
7. The mirror mounting and adjustment device for laser interferometry according to claim 6, wherein:
the pre-tightening assembly further comprises a pre-tightening short arm (6); the pre-tightening short arm (6) is mounted on the front surface of the lower bottom (11) through a second fastener (62), and the pre-tightening short arm (6) is provided with an extension part (61) extending towards the upper top (13).
8. The mirror mounting and adjustment device for laser interferometry according to claim 7, wherein:
the second fastener (62) and the first fastener (72) are screws or bolts.
9. The mirror mounting and adjustment device for laser interferometry according to any one of claims 1-4, wherein:
the lower bottom (11) of the mounting seat main body (1) is also provided with a plurality of countersunk holes (14) for accommodating a plurality of mounting columns (15), and the mounting columns (15) are used for mounting the mounting seat main body (1) on an external object to be tested.
10. The mirror mounting and adjustment device for laser interferometry according to any one of claims 1-4, wherein: the lower bottom (11) of the mounting seat main body (1) is also provided with one or more hollowed-out parts (16).
CN202311338559.0A 2023-10-16 2023-10-16 Installation and adjustment device for reflective mirror for laser interferometry Pending CN117434682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311338559.0A CN117434682A (en) 2023-10-16 2023-10-16 Installation and adjustment device for reflective mirror for laser interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311338559.0A CN117434682A (en) 2023-10-16 2023-10-16 Installation and adjustment device for reflective mirror for laser interferometry

Publications (1)

Publication Number Publication Date
CN117434682A true CN117434682A (en) 2024-01-23

Family

ID=89557569

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311338559.0A Pending CN117434682A (en) 2023-10-16 2023-10-16 Installation and adjustment device for reflective mirror for laser interferometry

Country Status (1)

Country Link
CN (1) CN117434682A (en)

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