CN117434318A

CN117434318A - Combined probe card

Info

Publication number: CN117434318A
Application number: CN202311752991.4A
Authority: CN
Inventors: 薛冰
Original assignee: Anying Semiconductor Technology Changzhou Co ltd
Current assignee: Anying Semiconductor Technology Changzhou Co ltd
Priority date: 2023-12-20
Filing date: 2023-12-20
Publication date: 2024-01-23
Anticipated expiration: 2043-12-20
Also published as: CN117434318B

Abstract

The application discloses a combined probe card, which belongs to the technical field of probe cards. Mainly comprises an upper fixed ring and a lower fixed ring arranged at the lower side of the upper fixed ring; a cover plate welded within the upper retaining ring; the PCB is welded with one side of the cover plate, which is close to the lower fixing ring; the installation component is arranged in the lower fixing ring and comprises; the box body is arranged in the lower fixing ring, the inside of the box body is hollow, and at least two groups of first waist grooves are formed in the box body. The utility model provides a combination formula probe card is through being provided with installation component, first spring, second waist groove and push rod, when dismantling or install the multiunit probe, only needs the manual push rod of staff, aligns the probe spare with the waist groove, loosens the push rod and can with probe spare centre gripping in the waist groove to accomplish the quick dismantlement or the installation to multiunit probe spare, improved the work efficiency that the wafer detected.

Description

Combined probe card

Technical Field

The application relates to the technical field of probe cards, in particular to a combined probe card.

Background

The probe card is a testing interface instrument for testing wafers, and when the probe card is used for testing, the contact points of the probe card need to form good electric contact with the bonding pads or the protruding blocks of the wafers to be tested, so that signals sent by an electronic testing system can be transmitted to the wafers to be tested, and the wafers to be tested can be tested.

The existing probe card is composed of one or more probes, a housing and a PCB circuit board, wherein the PCB circuit board is connected with the probes usually by welding, and then the housing is welded with the PCB circuit board to complete the assembly of the probe card.

For example, patent with publication number CN212723014U discloses a detachable probe card device, which can quickly separate a signal line from a probe card probe by plugging method and collarbone assembly, so as to replace the probe card probe, thereby greatly reducing the operation time.

Although the above-mentioned device has realized the change of probe card gauge head, because current probe card is mostly used for the wafer detection in the electronic test, in order to test a plurality of circuit nodes or signals simultaneously, design a plurality of probes on the probe card, and every group probe and different circuit nodes contact, after carrying out the detection in batches, need dismantle the maintenance to multiunit probe, install multiunit probe again after the maintenance is accomplished, if can't dismantle or install the probe in batches, a large amount of probes can only install in proper order, this certainly reduces the efficiency of probe card wafer detection operation, so it is necessary to provide a combination type probe card to solve above-mentioned problem.

It should be noted that the above information disclosed in this background section is only for understanding the background of the present application concept and, therefore, it may contain information that does not constitute prior art.

Disclosure of Invention

Based on the above problems existing in the prior art, the problems to be solved by the present application are: the combined probe card solves the problem that probes cannot be detached or installed in batches, and improves the efficiency of probe card wafer detection operation.

The technical scheme adopted for solving the technical problems is as follows: a combined probe card comprises an upper fixing ring and a lower fixing ring arranged on the lower side of the upper fixing ring; a cover plate welded within the upper retaining ring; the PCB is welded with one side of the cover plate, which is close to the lower fixing ring; a mounting assembly disposed within the lower retaining ring, the mounting assembly comprising; the box body is arranged in the lower fixing ring, the inside of the box body is hollow, and at least two groups of first waist grooves are formed in the box body; the partition board is fixedly arranged in the box body, and at least two groups of third waist grooves are formed in the partition board; the mounting plate is placed on the partition plate, and at least two groups of second waist grooves are formed in the mounting plate; the probe piece is arranged in the first waist groove; the push rod is arranged on one side of the mounting plate, and one end of the push rod, which is far away from the push rod, extends to the outer side of the box body; and the first spring is fixedly arranged between the mounting plate and the push rod.

Further, the inner ring of the lower fixed ring forms an inner ring body, a mounting ring is movably mounted on the inner ring body, a ring groove adapted to the mounting ring is formed in the inner ring body, a first mounting groove is formed in the mounting ring, the first mounting groove comprises a first channel for forming the inner ring of the mounting ring, the first channel is a section of vertical channel, a first opening is formed in the inner ring body, the first opening is communicated with the starting end of the first channel, the tail end of the first channel is communicated with a second channel, the first channel is deeper than the initial position of the first opening, a second slope is arranged in the second channel, and the tail end of the second slope is flush with the inner wall of the mounting ring.

Further, a first residence point is arranged at the position of the first channel communicated with the second channel, a first slope is arranged at the position of the first channel close to the second channel, the bottom of the first channel is gradually raised by the first slope, the end position of the first slope is higher than the bottom of the second channel, and a step is formed between the end position of the first slope and the second channel.

Further, a second mounting groove is formed in the mounting ring, the second mounting groove is provided with a fourth channel identical to the first channel and a third channel communicated with the fourth channel, a second opening and a third opening are formed in the bottom of the inner ring body, the second opening is communicated with the starting end of the third channel, and the third opening is communicated with the tail end of the fourth channel.

Further, a third slope is arranged in the third channel, a fourth slope is arranged at the position, close to the communication position of the third channel, the highest position of the third slope is consistent with the highest position of the fourth slope, a transition plane is formed, the end position of the fourth slope is higher than the bottom position of the fourth channel, a step is formed between the fourth slope and the fourth channel, and the bottom depth of the third channel is higher than the bottom depth of the fourth channel.

Further, the probe piece is provided with a clamping part at the upper end and a detection part at the lower end, a step is formed between the clamping part and the detection part, and a spring piece is arranged on the clamping part.

Further, the mounting ring is close to one side of the outer ring of the lower fixing ring to form a protruding portion, a limiting groove is formed in the lower fixing ring, the protruding portion is located in the limiting groove, two ends of the limiting groove are divided into a first port close to the protruding portion and a second port far away from the protruding portion, the protruding portion is located at the first port, a second spring is arranged in the limiting groove, and two sides of the second spring are fixedly connected with the protruding portion and the second port respectively.

Further, the outer surface of the lower fixing ring is provided with a mark part, the mark part comprises a first mark, the first mark corresponds to the first opening, the mark part further comprises a second mark, and the second mark corresponds to the second opening.

The beneficial effects of this application are: the application provides a pair of combination formula probe card through being provided with installation component, first spring, second waist groove and push rod, when dismantling or install the multiunit probe, only needs the manual push rod of staff, aligns the probe spare with the waist groove, loosens the push rod and can with probe spare centre gripping in the waist groove to accomplish the quick dismantlement or the installation to multiunit probe spare, improved the work efficiency that the wafer detected.

In addition to the objects, features, and advantages described above, there are other objects, features, and advantages of the present application. The present application will be described in further detail with reference to the drawings.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:

FIG. 1 is a schematic view of a combined probe card of the present application;

FIG. 2 is a bottom view of the overall structure of FIG. 1;

FIG. 3 is a split view of the mounting assembly structure and lower retaining ring structure of FIG. 1;

FIG. 4 is a split view of the mounting assembly of FIG. 3;

FIG. 5 is a bottom view of the overall structure of FIG. 3;

FIG. 6 is a schematic view of the lower retaining ring structure of FIG. 5;

FIG. 7 is an enlarged view of the area A of FIG. 6;

FIG. 8 is a cross-sectional view of the overall structure of FIG. 6;

FIG. 9 is a schematic view of the entire assembly structure of FIG. 4 during movement of the pusher bar structure during assembly of the probe member structure;

FIG. 10 is an overall schematic view of the movement of the pusher structure of the mounting assembly structure of FIG. 4 during removal of the probe member structure;

fig. 11 is an enlarged view of the structure of the region B in fig. 4.

Wherein, each reference sign in the figure:

1. a cover plate; 2. an upper fixing ring; 3. a lower fixing ring; 31. marking; 32. an inner ring body; 33. a first opening; 34. a second opening; 35. a third opening;

4. a mounting assembly; 41. a case body; 42. a first waist groove; 43. a partition plate;

5. a push rod; 6. a first spring; 7. a mounting plate; 71. a second waist groove;

8. a second mounting groove; 81. a third channel; 82. a third ramp; 83. a transition plane; 84. a fourth ramp; 85. a fourth channel;

9. a first mounting groove; 91. a first channel; 92. a second channel; 93. a first ramp; 94. a first dwell point; 95. a second ramp;

10. a mounting ring; 11. a PCB board; 12. a protruding portion; 13. a limit groove; 14. a second spring;

15. a probe member; 151. a spring leaf; 152. a clamping part; 153. and a detecting part.

Detailed Description

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

In order to make the present application solution better understood by those skilled in the art, the following description will be made in detail and with reference to the accompanying drawings in the embodiments of the present application, it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, shall fall within the scope of the present application.

Embodiment one: the present embodiment mainly describes the basic structure and principle of the combined probe card, and is specific to:

as shown in fig. 1 and 5, the present application provides a combined probe card, which includes an upper fixing ring 2 and a lower fixing ring 3 mounted under the upper fixing ring 2, wherein the upper fixing ring 2 and the lower fixing ring 3 form a shell part of the probe card, a cover plate 1 is welded in the upper fixing ring 2, and a plurality of groups of through holes (not labeled in the figure) for connecting with an electronic detection device are formed in the cover plate 1;

the PCB 11 for installing probes is welded on one side of the cover plate 1 close to the lower fixing ring 3, the outer ring of the PCB 11 is welded with the lower fixing ring 3, a plurality of groups of probe holes (not marked in the figure) for installing probes are formed in the PCB 11, the probe holes are communicated with the through holes, and a worker installs the plurality of groups of probes in the corresponding probe holes to form a complete probe card.

In order to mount a plurality of groups of probes on the PCB 11 in batches, as shown in fig. 2-4 and 11, a mounting assembly 4 for clamping the probes is arranged in the lower fixed ring 3, the mounting assembly 4 comprises a box body 41 arranged in the lower fixed ring 3, the diameter of the box body 41 is matched with the inner diameter of the lower fixed ring 3, and therefore the box body 41 is suitable for entering the lower fixed ring 3 to be attached to the bottom of the PCB 11;

referring to fig. 4, the inside of the case 41 is hollow and forms a hollow chamber, a partition plate 43 is fixedly installed in the hollow chamber of the case 41, the partition plate 43 divides the case 41 into two groups of chambers, the chamber located at the upper side of the partition plate 43 is called a first chamber, the chamber located at the lower side of the partition plate 43 is called a second chamber, and at the same time, a mounting plate 7 is placed on the partition plate 43, and the mounting plate 7 is located in the first chamber;

a plurality of groups of second waist grooves 71 for placing probes are formed on the mounting plate 7, and a third waist groove (not shown in the figure) corresponding to the second waist grooves 71 is formed on the partition plate 43;

with continued reference to fig. 4 and 11, a probe member 15, i.e., a probe body, is placed in the second waist groove 71, the probe member 15 has a clamping portion 152 at an upper end and a probe portion 153 at a lower end, a step is formed between the clamping portion 152 and the probe portion 153, and a spring piece 151 is provided on the clamping portion 152, in an initial state, referring to fig. 11, the spring piece 151 protrudes out of an outer wall of the clamping portion 152, and when an external force is applied, the spring piece 151 is retracted into the clamping portion 152, and is then held against the inside of the probe hole by a restoring force of the spring piece 151 so as to clamp the probe member 15;

the box 41 is provided with a plurality of groups of first waist slots 42 for placing probes, the first waist slots 42 correspond to the second waist slots 71, a push rod 5 is fixedly arranged on one side of the mounting plate 7, one side of the push rod 5 away from the mounting plate 7 extends to the outer side of the box 41, meanwhile, a first spring 6 is fixedly arranged between the push rod 5 and the mounting plate 7, and when an external force acts, the mounting plate 7 moves along the stress acting direction of the push rod 5 and is reset by itself after the external force acts.

In this embodiment, the first waist groove 42 and the second waist groove 71 are the same in size, while the third waist groove is slightly different in size, and the three sets of waist grooves are slightly different in mounting position, specifically:

with continued reference to fig. 4, the first waist groove 42 and the second waist groove 71 are divided into a first end (not shown) near the push rod 5 and a second end (not shown) far from the push rod 5, and the first waist groove 42 and the second waist groove 71 are arranged in a staggered manner, that is, the first end of the first waist groove 42 coincides with the second end of the second waist groove 71, the second end of the first waist groove 42 is far from the first end of the second waist groove 71, and the third waist groove is arranged in a same position as the first waist groove 42.

In the initial state, the probe member 15 penetrates the first waist groove 42, the second waist groove 71 and the third waist groove, and at this time, the probe member 15 is located at the first end of the first waist groove 42, i.e. at the second end of the second waist groove 71, which is the clamped state of the first waist groove 42 and the second waist groove 71;

when the probe 15 needs to be removed from the box 41, only the worker manually pushes the push rod 5, the mounting plate 7 moves towards the mounting position far away from the push rod 5, and at the moment, the two ends of the second waist groove 71 are overlapped with the two ends of the first waist groove 42 and the two ends of the third waist groove, so that the probe 15 can be loosened and taken out, and the state is a relaxed state of the first waist groove 42 and the second waist groove 71;

in the present embodiment, the clamping portion 152 of the probe member 15 penetrates the first waist groove 42 and the second waist groove 71, and the detecting portion 153 of the probe member 15 penetrates the third waist groove and extends into the second chamber, and the inner diameter dimension of the third waist groove is smaller than the diameter dimension of the clamping portion 152, so that the probe member 15 can be in a relaxed state, the step between the clamping portion 152 and the detecting portion 153 is overlapped on the third waist groove, and the probe member 15 cannot fall off in the relaxed state;

in this embodiment, a vertical through groove (not shown in the drawings) is formed on the outer ring of the lower fixing ring 3, the through groove is vertically disposed, and the push rod 5 may protrude out of the through groove and be located at the outer end of the lower fixing ring 3, so that the push rod 5 may be in a free state under the action of the spring sheet 151 and make the first waist groove 42 and the second waist groove 71 in a clamped state, and the push rod 5 may be in a pressed state under the pressing of a worker and make the first waist groove 42 and the second waist groove 71 in a relaxed state.

To sum up: when the probe card is installed, firstly, a worker manually presses the push rod 5 to enable the first waist groove 42 and the second waist groove 71 to be in a loose state, then, the worker manually places the probe piece 15 into the first waist groove 42, the push rod 5 is loosened after the placement is completed, and under the action of the spring elastic sheet 151, the second waist groove 71 is in a clamping state with the first waist groove 42 and clamps the probe piece 15;

then, the worker pushes the box 41 into the lower fixing ring 3, the push rod 5 corresponds to the position of the through groove and enters the through groove, after the box 41 enters the lower fixing ring 3, the probe piece 15 synchronously moves and enters the probe hole, along with the entering of the probe piece 15, the spring elastic piece 151 synchronously enters the probe hole, the spring elastic piece 151 contracts after entering the probe hole due to the matching of the size of the probe hole and the probe piece 15, and due to the rebound force of the spring elastic piece, one end of the spring elastic piece 151, which is far away from the probe piece 15, always abuts against the inner wall of the probe hole so as to prevent the probe piece 15 from falling from the probe hole, so that the installation of the probe piece 15 is completed;

subsequently, the worker presses the push rod 5 so that the first and second waist grooves 42 and 71 are in a relaxed state, and at this time, the case 41 can be separated from the probe member 15, thereby removing the mounting assembly 4 from the lower fixing ring 3;

when the probe card needs to be disassembled, a worker only needs to put the box body 41 into the lower fixing ring 3 and press the push rod 5 at the same time, the second waist groove 71 and the first waist groove 42 are in a relaxed state, and then the box body 41 can be pushed continuously to enable the probe piece 15 to penetrate through the third waist groove and enter the second chamber;

then, a worker releases the push rod 5 and clamps the probe piece 15, and after clamping, the worker pulls out the box 41 in a direction away from the lower fixing ring 3 by force, and the box 41 synchronously drives the probe piece 15 to move and separate from the probe hole so as to realize quick disassembly of the probe piece 15;

in this embodiment, the installation component 4 not only can use when installing and dismantling, when the periodic maintenance of probe card, can put into the fixed ring 3 down with installation component 4, play the effect of protection probe spare 15 to prevent that the probe spare 15 from appearing the mistake and touching circumstances such as bending in the transportation of probe card.

Embodiment two: in the process of disassembling and assembling the probe piece 15, the push rod 5 is pushed by external force to clamp the probe piece 15, and the push rod 5 is driven by the control rod, so that the aim of separating the probe piece 15 from the box 41 after the probe piece 15 is assembled is fulfilled, and the operation is simple and the use is convenient;

however, although the method has better effect, the push rod usually protrudes out of the outer surface of the lower fixing ring 3, and in the process of mounting or dismounting the probe card, the push rod is easily touched by mistake and is subjected to acting force to generate misplacement, so that the clamping of the mounting assembly 4 is affected;

in order to solve the above-mentioned problem, the present embodiment is an improvement on the basis of the first embodiment, and specifically:

as shown in fig. 6-7 and 9, the inner ring of the lower fixing ring 3 forms an inner ring body 32, the inner ring body 32 is movably provided with a mounting ring 10, meanwhile, a ring groove matched with the mounting ring 10 is formed in the inner ring body 32, and the mounting ring 10 is suitable for rotating in the ring groove and cannot be separated from the ring groove;

the mounting ring 10 is provided with a first mounting groove 9 for mounting the probe 15, the first mounting groove 9 is composed of a first channel 91 and a second channel 92 which are communicated in sequence, wherein the first channel 91 is a section of vertical channel, the starting end of the first channel 91 is one end far away from the upper fixing ring 2 (namely the bottom), meanwhile, the bottom of the inner ring body 32 is provided with a first opening 33, the first opening 33 is communicated with the starting end of the first channel 91, and the push rod 5 is suitable for entering the first channel 91 from the first opening 33;

in this embodiment, the first opening 33 and the first channel 91 are deeper in the initial positions, so that the push rod 5 does not touch the bottoms of the first opening 33 and the first channel 91 in the free state, and the push rod 5 is in the free state all the time, and the first waist groove 42 and the second waist groove 71 are in the clamping state, so as to clamp the probe member 15;

a first standing point 94 is arranged at a position where the first channel 91 is communicated with the second channel 92, and a first slope 93 is arranged at a position where the first channel 91 is close to the second channel 92, wherein the first slope 93 gradually increases the bottom of the first channel 91, as can be understood, the starting point position of the first slope 93 is an initial position close to the first channel 91, the end point position of the first slope 93 is a position close to the communication position of the first channel 91 and the second channel 92, and the first slope 93 is a slope which continuously increases from the starting point position to the end point position;

in the present embodiment, when the push rod 5 is at the start position of the first slope 93, the push rod 5 is still in a free state at this time, and as the push rod 5 moves at the first slope, the groove bottom of the first slope gradually contacts with the push rod 5, and presses the push rod 5, so that the first waist groove 42 and the second waist groove 71 are brought into a relaxed state, and the probe member 15 is lapped at the position of the third waist groove at this time;

with the movement of the push rod 5, the clamping part 152 of the probe piece 15 enters the probe hole on the PCB 11, and the clamping part 152 is installed in the probe hole through the spring piece 151;

until the push rod 5 reaches the end position of the first slope 93, the clamping part 152 can extend into the longer position of the probe hole and be fully clamped;

in this embodiment, since the probe hole is through, the push rod 5 can be pushed into the probe hole to the maximum extent without being blocked;

with continued reference to fig. 7, a second ramp 95 is provided within the second channel 92, the second ramp 95 causing the bottom of the second channel 92 to rise continuously and eventually flush with the inner wall of the mounting ring 10;

when the push rod 5 passes over the first slope 93 and reaches the first residence point 94, the push rod 5 cannot be pushed at the moment, after the push rod 5 is loosened, the push rod 5 starts to retract under the gravity of the installation assembly 4, and the installation assembly 4 is taken out of the second channel 92 with the assistance of staff;

in the present embodiment, the end position of the first slope 93 is higher than the groove bottom position of the second channel 92, so that a step is formed between the end position of the first slope 93 and the second channel 92 to prevent the push rod 5 from retreating into the first channel 91, and the groove bottom depth of the second channel 92 is higher than the groove bottom depth of the first channel 91, so that the first waist groove 42 and the second waist groove 71 are always in a relaxed state to prevent the movement of the mounting assembly 4 from affecting the mounted probe 15;

as shown in fig. 8, a protruding part 12 is arranged at one side of the mounting ring 10, which is close to the outer ring of the lower fixing ring 3, and a limiting groove 13 is formed in the lower fixing ring 3, the protruding part 12 is positioned in the limiting groove 13, two ends of the limiting groove 13 are divided into a first port, which is close to the protruding part 12, and a second port, which is far away from the protruding part 12, and a second spring 14 is arranged in the limiting groove 13, two sides of the second spring 14 are respectively fixedly connected with the protruding part 12 and the second port of the limiting groove 13, and when the push rod 5 moves in the first mounting groove 9, the restoring spring force generated by the second spring 14 can provide a direction for the movement of the push rod 5, and can be restored after the mounting ring 10 rotates;

in order to facilitate the removal of the installed probe 15, as shown in fig. 6 to 7 and 10, a second installation groove 8 is further formed in the installation ring 10, the second installation groove 8 has a fourth channel 85 communicating with the first channel 91 and a third channel 81 communicating with the fourth channel 85, and simultaneously, a second opening 34 and a third opening 35 are formed in the bottom of the inner ring body 32, the second opening 34 is communicated with the initial end of the third channel 81, the third opening 35 is communicated with the end of the fourth channel 85, and thus the push rod 5 is suitable for entering from the third channel 81 and sliding out from the fourth channel 85;

a third slope 82 is arranged in the third channel 81, the third slope 82 gradually increases the bottom of the third channel 81, a fourth slope 84 is arranged in the third channel 81 near the communication position with the fourth channel 85, the fourth slope 84 gradually decreases the bottom of the third channel 81, the highest position of the third slope 82 is in high agreement with the highest position of the fourth slope 84 and forms a transition plane 83, it is understood that the starting point of the third slope 82 is the initial position near the third channel 81, the end point of the third slope 82 can be one end of the transition plane 83, the starting point of the fourth slope 84 can be one end far from the third slope 82 in the transition plane, and the end point of the fourth slope 84 is the communication position of the third channel 81 and the fourth channel 85;

in the present embodiment, when the push rod 5 is at the starting point position of the third slope 82, the push rod 5 is still in a free state at this time, and as the push rod 5 moves on the third slope 82, the groove bottom of the third slope 82 gradually contacts the push rod 5 and presses the push rod 5, so that the first waist groove 42 and the second waist groove 71 enter a relaxed state, as the push rod 5 moves continuously, the first waist groove 42 and the second waist groove 71 enter a relaxed state continuously, at the same time, the detecting part 153 enters the first waist groove 42 and the second waist groove 71, and as the push rod 5 moves on the fourth slope 84 through the transition plane 83, the groove bottom of the fourth slope 84 gradually moves away from the push rod 5, the second waist groove 71 is in a gradually clamped state with the first waist groove 42 and clamps the probe 15;

until the push rod 5 reaches the end position of the fourth slope 84, the push rod 5 cannot be pushed at the moment, after the push rod 5 is released, the mounting assembly 4 cannot fall off from the lower fixed ring 3 due to the clamping force of the spring piece 151, and at the moment, the mounting assembly 4 is manually taken out from the lower fixed ring 3 by the assistance of staff;

in this embodiment, the end position of the fourth slope 84 is higher than the bottom position of the fourth channel 85, so that a step is formed between the fourth slope 84 and the fourth channel 85 to prevent the push rod 5 from retreating into the third channel 81, and the bottom depth of the third channel 81 is higher than the bottom depth of the fourth channel 85, so that the push rod 5 continues to move after passing through the transition plane 83, and the first waist groove 42 and the second waist groove 71 are in a continuously clamped state to prevent the movement of the mounting assembly 4 from affecting the clamped probe 15;

referring to fig. 2 to 3, in the present embodiment, a mark 31 for guiding the installation of the installation assembly 4 is provided at the outer surface of the lower fixing ring 3, and the mark 31 may be divided into a first mark (not shown) corresponding to the first opening 33 for guiding the installation direction of the probe member 15, which facilitates the insertion of the push rod 5 from the first opening 33 into the first installation groove 9, and a second mark (not shown) corresponding to the second opening 34 for guiding the removal direction of the probe member 15, which facilitates the insertion of the push rod 5 from the second opening 34 into the second installation groove 8, while a soft pad (not shown) for preventing the push rod 5 from being rigidly contacted with the first installation groove 9 and the second installation groove 8 to cause the push rod 5 to be damaged is fixedly installed at a side of the push rod 5 away from the case 41.

The foregoing description is only of the preferred embodiments of the present application and is not intended to limit the same, but rather, various modifications and variations may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A combination probe card, characterized in that: comprises the following steps of; an upper fixing ring (2) and a lower fixing ring (3) arranged at the lower side of the upper fixing ring (2); a cover plate (1), wherein the cover plate (1) is welded in the upper fixing ring (2); the PCB (11) is welded with one side of the cover plate (1) close to the lower fixing ring (3); a mounting assembly (4), the mounting assembly (4) being disposed within the lower stationary ring (3), the mounting assembly (4) comprising; the box body (41) is arranged in the lower fixing ring (3), the inside of the box body (41) is hollow, and at least two groups of first waist grooves (42) are formed in the box body (41); the partition board (43), the partition board (43) is fixedly installed in the box body (41), and at least two groups of third waist grooves are formed in the partition board (43); the mounting plate (7), the mounting plate (7) is placed on the partition plate (43), and at least two groups of second waist grooves (71) are formed in the mounting plate (7); a probe member (15), the probe member (15) being disposed within the first waist groove (42); a push rod (5), wherein the push rod (5) is arranged on one side of the mounting plate (7), and one end of the push rod (5) away from the push rod (5) extends to the outer side of the box body (41); and a first spring (6), wherein the first spring (6) is fixedly arranged between the mounting plate (7) and the push rod (5).

2. A combination probe card according to claim 1, wherein: the inner ring of lower solid fixed ring (3) forms inner ring body (32), movable mounting has collar (10) on inner ring body (32), form in the annular groove that collar (10) adapted in inner ring body (32), first mounting groove (9) have been seted up on collar (10), first mounting groove (9) are including seting up first passageway (91) of collar (10) inner ring, first passageway (91) are one section vertical passageway, first opening (33) have been seted up on inner ring body (32), first opening (33) with the starting end of first passageway (91) is linked together, the end intercommunication of first passageway (91) has second passageway (92), first passageway (91) with the degree of depth of the initial position of first opening (33) is all darker, be provided with second slope (95) in second passageway (92), the end of second slope (95) with the inner wall that collar (10) flushes mutually.

3. A combination probe card according to claim 2, wherein: the position that first passageway (91) with second passageway (92) communicates with each other is provided with first resident point (94), the position that first passageway (91) is close to second passageway (92) is provided with first slope (93), first slope (93) make the tank bottom of first passageway (91) rise gradually, the extreme point position of first slope (93) is higher than the tank bottom position of second passageway (92), the extreme point position of first slope (93) with form the step between second passageway (92).

4. A combination probe card according to claim 3, wherein: the mounting ring (10) is provided with a second mounting groove (8), the second mounting groove (8) is provided with a fourth channel (85) identical to the first channel (91) and a third channel (81) communicated with the fourth channel (85), the bottom of the inner ring body (32) is provided with a second opening (34) and a third opening (35), the second opening (34) is communicated with the starting end of the third channel (81), and the third opening (35) is communicated with the tail end of the fourth channel (85).

5. A combination probe card according to claim 4, wherein: be provided with third slope (82) in third passageway (81), third passageway (81) be close to with the intercommunication department of fourth passageway (85) is provided with fourth slope (84), the highest position of third slope (82) with the highest position of fourth slope (84) is unanimous and forms transition plane (83), the extreme point position of fourth slope (84) is higher than the tank bottom position of fourth passageway (85), fourth slope (84) with form the step between fourth passageway (85), the tank bottom degree of depth of third passageway (81) is higher than the tank bottom degree of depth of fourth passageway (85).

6. A combination probe card according to claim 5, wherein: the probe piece (15) is provided with a clamping part (152) at the upper end and a detection part (153) at the lower end, a step is formed between the clamping part (152) and the detection part (153), and a spring piece (151) is arranged on the clamping part (152).

7. A combination probe card according to claim 6, wherein: the mounting ring (10) is close to one side of the outer ring of the lower fixing ring (3) and forms a protruding portion (12), a limiting groove (13) is formed in the lower fixing ring (3), the protruding portion (12) is located in the limiting groove (13), two ends of the limiting groove (13) are divided into a first port close to the protruding portion (12) and a second port far away from the protruding portion (12), the protruding portion (12) is located at the first port, a second spring (14) is arranged in the limiting groove (13), and two sides of the second spring (14) are fixedly connected with the protruding portion (12) and the second port respectively.

8. A combination probe card according to claim 7, wherein: the outer surface of the lower fixing ring (3) is provided with a mark position (31), the mark position (31) comprises a first mark, the first mark corresponds to the first opening (33), the mark position (31) further comprises a second mark, and the second mark corresponds to the second opening (34).