CN117430311A - Micro hemispherical harmonic oscillator flame blowing device, system and method - Google Patents
Micro hemispherical harmonic oscillator flame blowing device, system and method Download PDFInfo
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- CN117430311A CN117430311A CN202311375065.XA CN202311375065A CN117430311A CN 117430311 A CN117430311 A CN 117430311A CN 202311375065 A CN202311375065 A CN 202311375065A CN 117430311 A CN117430311 A CN 117430311A
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- 238000007664 blowing Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 18
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 113
- 239000010439 graphite Substances 0.000 claims abstract description 113
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 112
- 230000007246 mechanism Effects 0.000 claims abstract description 70
- 239000007921 spray Substances 0.000 claims abstract description 46
- 238000012545 processing Methods 0.000 claims abstract description 21
- 239000007789 gas Substances 0.000 claims description 40
- 239000011521 glass Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 32
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 8
- 238000000465 moulding Methods 0.000 claims description 5
- 229920001169 thermoplastic Polymers 0.000 claims description 5
- 239000004416 thermosoftening plastic Substances 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000003345 natural gas Substances 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 230000000087 stabilizing effect Effects 0.000 claims description 4
- 238000005457 optimization Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 2
- 238000005086 pumping Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B9/00—Blowing glass; Production of hollow glass articles
- C03B9/30—Details of blowing glass; Use of materials for the moulds
- C03B9/36—Blow heads; Supplying, ejecting or controlling the air
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B9/00—Blowing glass; Production of hollow glass articles
- C03B9/30—Details of blowing glass; Use of materials for the moulds
- C03B9/34—Glass-blowing moulds not otherwise provided for
- C03B9/347—Construction of the blank or blow mould
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B9/00—Blowing glass; Production of hollow glass articles
- C03B9/30—Details of blowing glass; Use of materials for the moulds
- C03B9/38—Means for cooling, heating, or insulating glass-blowing machines or for cooling the glass moulded by the machine
- C03B9/3841—Details thereof relating to direct cooling, heating or insulating of the moulded glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention discloses a micro hemispherical harmonic oscillator flame blowing device, a system and a method, wherein the blowing device comprises a graphite mold, a flame spray head, an adjusting mechanism and a plurality of temperature measuring mechanisms, wherein the graphite mold is in a cylindrical shape and is vertically arranged, and a circular ring-shaped groove is formed in the center of the upper end surface of the graphite mold; a plurality of air suction holes are uniformly distributed in the annular groove, and the air suction holes are vertically arranged and penetrate through the lower end surface of the graphite mold; the flame spray head is arranged above the graphite mold and is connected with a gas pipeline; the flame spray head is connected with the adjusting mechanism, so that the flame spray head can be lifted and rotated by the adjusting mechanism, the flame spray head is at a certain height from the graphite die, and the center of the flame spray head is coaxial with the center of the graphite die; all temperature measuring mechanisms are uniformly embedded in the graphite mold along the circumference of the graphite mold, and the distances from the temperature measuring mechanisms to the center of the graphite mold are equal. The invention can effectively ensure the symmetry of flame temperature field and improve the symmetry and consistency of the structure of the micro-hemispherical harmonic oscillator, thereby improving the processing precision of the micro-hemispherical harmonic oscillator.
Description
Technical Field
The invention belongs to the technical field of hot working/special working, and particularly relates to a micro-hemispherical harmonic oscillator flame blowing device, a micro-hemispherical harmonic oscillator flame blowing system and a micro-hemispherical harmonic oscillator flame blowing method.
Background
Gyroscopes are one of the core devices of inertial navigation systems for measuring angular velocity and angular variation of moving objects. The micro hemispherical gyroscope has the technical characteristics of full-axis symmetry structural form and mass manufacturing, has the comprehensive advantages of volume, cost and performance, and can be widely applied to the navigation and attitude measurement fields of equipment such as aviation, aerospace, ships, vehicles, robots and the like.
The micro hemispherical resonator is a core sensitive device of the micro hemispherical gyroscope, adopts high-purity quartz glass as a material, and needs to form a highly symmetrical hemispherical thin shell structure by processing, and the structural symmetry and the process consistency are core indexes for influencing the performance of the gyroscope.
The traditional hemispherical thin shell is processed by adopting an ultra-precise mechanical grinding and polishing mode, the dimensional accuracy can reach submicron level, but the time consumption is long, the cost is high, and the shell size is difficult to miniaturize. In order to realize the processing of the micro-hemispherical thin shell, foreign researchers have proposed a processing method based on flame blowing to heat and soften glass and shaping under the constraint of a die. The processing method has the advantages of high forming efficiency and low cost, but the symmetry of flame temperature fields and the consistency of multiple processing are difficult to ensure, so that the improvement of the processing precision of the micro hemispherical resonator is limited.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a device, a system and a method for blowing the micro-hemispherical harmonic oscillator flame, which can effectively ensure the symmetry of a flame temperature field and improve the symmetry and consistency of the structure of the micro-hemispherical harmonic oscillator so as to improve the processing precision of the micro-hemispherical harmonic oscillator.
The technical scheme of the invention is realized as follows:
a micro-hemispherical harmonic oscillator flame blowing device comprises a graphite mold, a flame spray head, an adjusting mechanism and a plurality of temperature measuring mechanisms.
The graphite mold is cylindrical and is vertically arranged, a circular ring-shaped groove is formed in the center of the upper end face of the graphite mold, and a glass substrate to be processed is placed on the graphite mold and completely covers the circular ring-shaped groove; a plurality of air suction holes are uniformly distributed in the annular groove, and the air suction holes are vertically arranged and penetrate through the upper end face and the lower end face of the graphite die.
The flame spray head is arranged above the graphite die and is connected with a gas pipeline, so that combustible gas can be conveniently introduced to heat the glass substrate to be processed; the flame spray head is connected with the adjusting mechanism, and is convenient to lift and rotate through the adjusting mechanism, so that the flame spray head is at a certain height from the graphite die, and the center of the flame spray head is coaxial with the center of the graphite die.
All temperature measuring mechanisms are uniformly embedded in the graphite die along the circumference of the graphite die, and have equal distances from the center of the graphite die, and are used for detecting the temperature of the flame temperature field.
Further, the periphery of the annular groove corresponds to the upward bulge of the inner wall of the graphite mold, the bulge has a certain width so as to form an annular boss on the upper end surface of the graphite mold, and a groove center column corresponding to the center of the annular groove extends upwards to a certain height and is flush with the upper surface of the annular boss.
Further, a pressure stabilizing valve is arranged on the gas pipeline to ensure the stability of flame.
Further, the temperature measuring mechanism comprises a thermocouple and a bracket for fixing the thermocouple, the thermocouple is arranged at the front end of the bracket, a concave cavity for accommodating the thermocouple and corresponding to the temperature measuring mechanism is arranged on the side wall of the graphite mold, the temperature measuring mechanism is inserted into the concave cavity, the temperature measuring surface of the thermocouple is contacted with the wall of the concave cavity of the graphite mold, which is positioned at the center side of the graphite mold, and the outer end of the bracket is fixedly connected with the graphite mold through a fixing piece, so that the thermocouple is arranged in the graphite mold.
Further, each temperature measuring mechanism is provided with two thermocouples, and the two thermocouples are arranged at the front end of the bracket in parallel.
Further, the adjusting mechanism has the functions of three horizontal movement adjusting directions and two rotational movement adjusting directions.
The invention also provides a micro-hemispherical resonator flame blowing system, which comprises the micro-hemispherical resonator flame blowing device, and further comprises a vacuum pump and a data processing end.
The vacuum pump is connected with the air suction hole corresponding to the lower end face of the graphite die, so that negative pressure is generated on the lower surface of the glass substrate to be processed.
The data processing end is connected with all the temperature measuring mechanisms and is used for receiving the temperature of the flame temperature field detected by the temperature measuring mechanisms and calculating the deviation of the flame temperature field.
The adjusting mechanism adjusts the flame spray head according to the flame temperature field deviation so that the center of the flame spray head is coaxial with the center of the graphite mold.
The invention also provides a micro-hemispherical harmonic oscillator flame blowing method, which adopts the micro-hemispherical harmonic oscillator flame blowing system to blow; the method specifically comprises the following steps:
s1: fixing a temperature measuring mechanism in a graphite mold, and adjusting a flame spray head through an adjusting mechanism to enable the flame spray head to have a certain height from the graphite mold, and enabling the center of the flame spray head to be coaxially and primarily aligned with the center of the graphite mold;
s2: introducing a first combustible gas into the gas pipeline, igniting, receiving the temperature of the flame temperature field detected by the temperature measuring mechanism through the data processing end after the temperature of the graphite mold is stable, and calculating the deviation of the flame temperature field;
s3: according to the calculated flame temperature field deviation, an adjusting mechanism is adjusted, and the error of coaxial alignment between the center of the flame spray head and the center of the graphite mold is reduced;
s4: repeating the steps S2 and S3 for a plurality of times, performing iterative optimization to ensure that the center of the flame spray head is coaxial with the center of the graphite mold, ensuring the symmetry of a temperature field on the graphite mold, and taking down the temperature measuring mechanism from the graphite mold;
s5: placing a glass substrate to be processed on a graphite die and completely covering the annular groove, and starting a vacuum pump to enable the lower surface of the glass substrate to be processed to generate negative pressure;
s6: and introducing a second combustible gas into the gas pipeline and igniting to heat the glass substrate to be processed, so that the glass substrate to be processed is turned off after thermoplastic deformation is carried out to a designed size, and the blowing molding of the micro-hemispherical resonator is completed.
Further, the first combustible gas is ethanol gas or natural gas mixed gas.
Further, the second combustible gas is a mixed gas of hydrogen and oxygen.
Compared with the prior art, the invention has the following beneficial effects:
compared with the traditional precise grinding processing of the hemispherical harmonic oscillator, the method can greatly improve the processing efficiency of the harmonic oscillator, reduce the process cost and is more suitable for processing the hemispherical harmonic oscillator with small size. Compared with the traditional flame blowing process, the invention realizes the test of the flame temperature field and the correction of blowing errors, so that the processing precision of flame blowing is greatly improved, and the high-precision, small-volume and low-cost processing of the micro-hemispherical resonator is realized.
Drawings
Fig. 1-schematic view of the structure of the flame blowing apparatus of the present invention.
Fig. 2-fig. 1 are partial exploded views.
Fig. 3-schematic diagram of the structure of the flame blowing apparatus of the present invention.
Fig. 4-schematic structural view of the flame blowing apparatus of the present invention.
FIG. 5-schematic diagram of the molding principle.
Wherein: 1-a temperature measuring mechanism; 2-graphite mold; 3-a circular groove; 4-flame spray nozzle; 5-an adjusting mechanism; 6-a pressure stabilizing valve; 7-an air suction hole; 8-a glass substrate to be processed; 9-flame; 10-micro hemispherical harmonic oscillator.
Fig. 1, 3 and 4 are schematic structural views of a flame-blowing apparatus at different angles of view.
Detailed Description
The invention is described in further detail below with reference to the drawings and the detailed description.
Referring to fig. 1, 2, 3 and 4, a micro hemispherical resonator flame blowing device comprises a graphite mold 2, a flame spray head 4, an adjusting mechanism 5 and a plurality of temperature measuring mechanisms 1.
The graphite mold 2 is cylindrical and is vertically arranged, a circular groove 3 is formed in the center of the upper end face of the graphite mold 2, and a glass substrate to be processed is placed on the graphite mold 2 and completely covers the circular groove 3; a plurality of air suction holes 7 are uniformly distributed in the annular groove 3, and the air suction holes 7 are vertically arranged and penetrate through the lower end face of the graphite die 2.
The flame spray head 4 is arranged above the graphite die 2 and is connected with a gas pipeline, so that combustible gas can be conveniently introduced to heat the glass substrate to be processed; the flame spray head 4 is connected with the adjusting mechanism 5, so that the flame spray head 4 can be lifted and rotated conveniently through the adjusting mechanism 5, the flame spray head 4 is at a certain height from the graphite die 2, and the center of the flame spray head 4 is coaxial with the center of the graphite die 2.
All temperature measuring mechanisms 1 are uniformly embedded in the graphite mold 2 along the circumference of the graphite mold 2, and have equal distances from the center of the graphite mold 2, and are used for detecting the temperature of a flame temperature field.
The graphite mold is in a cylindrical structure, and the area corresponding to the annular groove part is a molding area; the side wall area of the graphite mold cylinder is a temperature measuring area, four concave cavities are uniformly distributed at intervals of 90-degree circumference angles, a temperature measuring mechanism is arranged in each concave cavity, and four temperature measuring mechanisms are symmetrically arranged in pairs and are used for acquiring symmetry data of flame temperature fields; the air pumping holes penetrate through the lower end face of the graphite die and the forming area. Therefore, the graphite die is fixed on the working platform, the vacuum pump is connected below the working platform, the air suction hole is used for sucking air, the glass substrate to be processed can be fixed, and meanwhile, the glass substrate to be processed is subjected to thermoplastic deformation in the heating process of the flame head.
In specific implementation, the periphery of the annular groove 3 corresponds to the upward bulge of the inner wall of the graphite mold 2, the bulge has a certain width so as to form an annular boss on the upper end surface of the graphite mold 2, and a groove center column corresponding to the center of the annular groove 3 extends upwards to a certain height and is flush with the upper surface of the annular boss. The boss and the graphite mold are integrally formed.
As shown in fig. 1-3, the center of the graphite mold is provided with a circular boss, and the groove center column of the circular groove is flush with the upper surface of the circular boss, so that the glass substrate to be processed can be conveniently observed and placed. The schematic diagram is shown in fig. 5, a glass substrate 8 to be processed is placed on a graphite mold 2 or a circular boss of the graphite mold 2, a circular groove is completely covered, the graphite mold or the circular boss and a groove center column support the glass substrate to be processed, a vacuum pump pumps air from an air pumping hole 7 in the blowing process, the glass substrate 8 to be processed is heated by flame 9, the glass substrate 8 to be processed is heated and subjected to thermoplastic deformation, and a micro hemispherical resonator 10 is obtained. Meanwhile, as can be seen from fig. 5, the longitudinal section of the annular groove is provided with two air pumping holes, and when the air pumping holes are arranged, the air pumping holes are uniformly arranged, so that the air pumping uniformity is ensured.
In specific implementation, the gas pipeline is provided with a pressure stabilizing valve 6 to ensure the stability of flame.
During concrete implementation, the temperature measuring mechanism 1 comprises a thermocouple and a bracket for fixing the thermocouple, the thermocouple is arranged at the front end of the bracket, a concave cavity for accommodating and corresponding to the temperature measuring mechanism 1 is formed in the side wall of the graphite mold 2, the temperature measuring mechanism 1 is inserted into the concave cavity, a thermocouple temperature measuring surface is in contact with the wall of the concave cavity of the graphite mold, which is positioned at the center side of the graphite mold 2, and the outer end of the bracket is fixedly connected with the graphite mold 2 through a fixing piece, so that the thermocouple is arranged in the graphite mold 2.
The concave cavity corresponding to the temperature measuring mechanism is formed in the graphite die, the temperature measuring mechanism can be limited, and the positioning accuracy of the temperature measuring mechanism is guaranteed, so that the symmetry of a flame temperature field is guaranteed.
In specific implementation, each temperature measuring mechanism 1 is provided with two thermocouples which are arranged at the front end of the bracket in parallel.
Here, each temperature measuring mechanism includes two thermocouples, which can be used for calibrating measurement errors with each other, for example, four pairs of thermocouples in the embodiment form an array, and the temperature difference of the two thermocouples in each of the other three pairs is within 2 ℃ to be considered as normal measurement errors, but the temperature difference of the two thermocouples in the pair is 8 ℃, so that the two thermocouples may be faulty, and the faults need to be checked, so that the effectiveness of flame temperature error compensation is improved by ensuring the accuracy of flame temperature field measurement.
It can be seen from fig. 2 that in this embodiment, the support of the temperature measuring mechanism is composed of a short cross rod, a long cross rod and a connecting rod arranged between the short cross rod and the long cross rod, and forms an i-shaped structure, two thermocouples are arranged at two ends of the two short cross rods and located at the front end of the support, the long cross rod is arranged on the outer wall of the graphite mold, connecting holes are arranged at two ends of the long cross rod, corresponding connecting holes are also required to be arranged on the side wall of the graphite mold, then the long cross rod can be fixed on the graphite mold through bolts, and meanwhile, a data line channel is arranged on the support, so that the thermocouples can transmit detection data conveniently. In the concrete implementation, the bracket is various in form and can be arranged according to the needs.
In specific implementation, the adjusting mechanism 5 has the functions of three horizontal movement adjusting directions and two rotation movement adjusting directions, specifically a five-degree-of-freedom precision displacement/deflection platform, so that the position of the flame spray head can be conveniently adjusted according to the flame temperature field, and the symmetry of the flame temperature field is ensured.
The micro-hemispherical resonator flame blowing system comprises the micro-hemispherical resonator flame blowing device, and further comprises a vacuum pump and a data processing end.
The vacuum pump is connected with the air suction holes 7 corresponding to the lower end face of the graphite die so as to enable the lower surface of the glass substrate to be processed to generate negative pressure.
The data processing end is connected with all the temperature measuring mechanisms 1 and is used for receiving the temperature of the flame temperature field detected by the temperature measuring mechanisms 1 and calculating the deviation of the flame temperature field.
The adjusting mechanism 5 adjusts the flame spray head according to the flame temperature field deviation so that the center of the flame spray head 4 is coaxial with the center of the graphite mold 2.
A micro-hemispherical resonator flame blowing method, wherein a micro-hemispherical resonator flame blowing system is adopted for blowing; the method specifically comprises the following steps:
s1: fixing a temperature measuring mechanism in a graphite mold, and adjusting a flame spray head through an adjusting mechanism to enable the flame spray head to have a certain height from the graphite mold, and enabling the center of the flame spray head to be coaxially and primarily aligned with the center of the graphite mold;
s2: after the temperature of the graphite mold is stable, the temperature of the flame temperature field detected by the temperature measuring mechanism is received through the data processing end, and the deviation of the flame temperature field (comprising the error type, the error azimuth and the error amount of the flame temperature field in particular) is calculated;
s3: according to the calculated flame temperature field deviation, an adjusting mechanism is adjusted, and the error of coaxial alignment between the center of the flame spray head and the center of the graphite mold is reduced;
s4: repeating the steps S2 and S3 for a plurality of times, performing iterative optimization to ensure that the center of the flame spray head is coaxial with the center of the graphite mold, ensuring the symmetry of a temperature field on the graphite mold, and taking down the temperature measuring mechanism from the graphite mold;
s5: placing a glass substrate to be processed on a graphite die and completely covering the annular groove, and starting a vacuum pump to enable the lower surface of the glass substrate to be processed to generate negative pressure;
s6: and introducing a second combustible gas into the gas pipeline and igniting to heat the glass substrate to be processed, so that the glass substrate to be processed is turned off after thermoplastic deformation is carried out to a designed size, and the blowing molding of the micro-hemispherical resonator is completed.
The first combustible gas is ethanol gas or natural gas mixed gas. The second combustible gas is a mixed gas of hydrogen and oxygen.
The first combustible gas (ethanol gas or natural gas mixed gas) can be combusted to generate flame with the temperature lower than 1000 ℃, the thermocouple and a data line thereof can be ensured to be within the working temperature range, after debugging is completed, the temperature measuring mechanism is taken out of the graphite die and is switched into the second combustible gas (oxygen and hydrogen mixed gas), and the second combustible gas can be combusted to generate high-temperature flame with the temperature of about 2600 ℃ to heat the glass substrate to be processed, so that the glass substrate is subjected to thermal plastic deformation to the design size.
In the early stage, a large number of experiments prove that when the height of the flame head from the graphite mold is fixed and the flow rate of combustible gas is fixed, the blowing time required for processing the micro hemispherical resonators with the same design size is also fixed. Therefore, the deformation of the glass substrate to be processed to the designed size can be ensured by controlling the blowing time as long as the flow rate of the combustible gas is constant.
Finally, it should be noted that the above-mentioned examples of the present invention are only illustrative of the present invention and are not limiting of the embodiments of the present invention. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. Not all embodiments are exhaustive. Obvious changes and modifications which are extended by the technical proposal of the invention are still within the protection scope of the invention.
Claims (10)
1. The micro hemispherical resonator flame blowing device is characterized by comprising a graphite mold, a flame spray head, an adjusting mechanism and a plurality of temperature measuring mechanisms,
the graphite mold is cylindrical and is vertically arranged, a circular ring-shaped groove is formed in the center of the upper end face of the graphite mold, and a glass substrate to be processed is placed on the graphite mold and completely covers the circular ring-shaped groove; a plurality of air suction holes are uniformly distributed in the annular groove, and the air suction holes are vertically arranged and penetrate through the upper end face and the lower end face of the graphite die;
the flame spray head is arranged above the graphite die and is connected with a gas pipeline, so that combustible gas can be conveniently introduced to heat the glass substrate to be processed; the flame spray head is connected with the adjusting mechanism, so that the flame spray head can be lifted and rotated conveniently through the adjusting mechanism, the flame spray head is at a certain height from the graphite die, and the center of the flame spray head is coaxial with the center of the graphite die;
all temperature measuring mechanisms are uniformly embedded in the graphite die along the circumference of the graphite die, and have equal distances from the center of the graphite die, and are used for detecting the temperature of the flame temperature field.
2. The flame blowing device for the micro hemispherical resonator according to claim 1, wherein the periphery of the annular groove corresponds to the upper bulge of the inner wall of the graphite mold, the bulge has a certain width so as to form an annular boss on the upper end surface of the graphite mold, and a groove center column corresponding to the center of the annular groove extends upwards to a certain height and is flush with the upper surface of the annular boss.
3. A micro-hemispherical resonator flame blowing device according to claim 1, characterized in that a pressure stabilizing valve is arranged on the gas pipeline to ensure the stability of the flame.
4. The device for blowing the flame of the micro hemispherical resonator according to claim 1, wherein the temperature measuring mechanism comprises a thermocouple and a bracket for fixing the thermocouple, the thermocouple is arranged at the front end of the bracket, a concave cavity which is used for accommodating the thermocouple and corresponds to the temperature measuring mechanism is arranged on the side wall of the graphite mold, the temperature measuring mechanism is inserted into the concave cavity, the temperature measuring surface of the thermocouple is contacted with the concave cavity wall of the graphite mold positioned at the center side of the graphite mold, and the outer end of the bracket is fixedly connected with the graphite mold through a fixing piece, so that the thermocouple is arranged in the graphite mold.
5. The device of claim 4, wherein each temperature measuring mechanism is provided with two thermocouples, and the two thermocouples are arranged at the front end of the bracket in parallel.
6. A micro-hemispherical resonator flame blowing device according to claim 1, characterized in that the adjusting mechanism has the function of three horizontal movement adjusting directions and two rotational movement adjusting directions.
7. A micro-hemispherical resonator flame blowing system, which is characterized by comprising the micro-hemispherical resonator flame blowing device according to any one of claims 1-6, and further comprising a vacuum pump and a data processing end;
the vacuum pump is connected with the air suction hole corresponding to the lower end surface of the graphite die so as to enable the lower surface of the glass substrate to be processed to generate negative pressure;
the data processing end is connected with all the temperature measuring mechanisms and is used for receiving the temperature of the flame temperature field detected by the temperature measuring mechanisms and calculating the deviation of the flame temperature field;
the adjusting mechanism adjusts the flame spray head according to the flame temperature field deviation so that the center of the flame spray head is coaxial with the center of the graphite mold.
8. A method of micro-hemispherical resonator flame blowing, characterized in that a micro-hemispherical resonator flame blowing system according to claim 7 is used for blowing; the method specifically comprises the following steps:
s1: fixing a temperature measuring mechanism in a graphite mold, and adjusting a flame spray head through an adjusting mechanism to enable the flame spray head to have a certain height from the graphite mold, and enabling the center of the flame spray head to be coaxially and primarily aligned with the center of the graphite mold;
s2: introducing a first combustible gas into the gas pipeline, igniting, receiving the temperature of the flame temperature field detected by the temperature measuring mechanism through the data processing end after the temperature of the graphite mold is stable, and calculating the deviation of the flame temperature field;
s3: according to the calculated flame temperature field deviation, an adjusting mechanism is adjusted, and the error of coaxial alignment between the center of the flame spray head and the center of the graphite mold is reduced;
s4: repeating the steps S2 and S3 for a plurality of times, performing iterative optimization to ensure that the center of the flame spray head is coaxial with the center of the graphite mold, ensuring the symmetry of a temperature field on the graphite mold, and taking down the temperature measuring mechanism from the graphite mold;
s5: placing a glass substrate to be processed on a graphite die and completely covering the annular groove, and starting a vacuum pump to enable the lower surface of the glass substrate to be processed to generate negative pressure;
s6: and introducing a second combustible gas into the gas pipeline and igniting to heat the glass substrate to be processed, so that the glass substrate to be processed is turned off after thermoplastic deformation is carried out to a designed size, and the blowing molding of the micro-hemispherical resonator is completed.
9. A method of flame blowing a micro-hemispherical resonator according to claim 8, wherein the first combustible gas is an ethanol gas or a natural gas mixture.
10. A method of flame blowing a micro-hemispherical resonator according to claim 8, wherein the second combustible gas is a mixture of hydrogen and oxygen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311375065.XA CN117430311A (en) | 2023-10-23 | 2023-10-23 | Micro hemispherical harmonic oscillator flame blowing device, system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311375065.XA CN117430311A (en) | 2023-10-23 | 2023-10-23 | Micro hemispherical harmonic oscillator flame blowing device, system and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117430311A true CN117430311A (en) | 2024-01-23 |
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