CN115355899A - Connection method for miniature laser gyro reflector - Google Patents
Connection method for miniature laser gyro reflector Download PDFInfo
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- CN115355899A CN115355899A CN202211276160.XA CN202211276160A CN115355899A CN 115355899 A CN115355899 A CN 115355899A CN 202211276160 A CN202211276160 A CN 202211276160A CN 115355899 A CN115355899 A CN 115355899A
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- laser gyro
- resonant cavity
- reflector
- reflector lens
- mirror
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- 238000000034 method Methods 0.000 title claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims abstract description 36
- 238000004140 cleaning Methods 0.000 claims abstract description 34
- 239000004568 cement Substances 0.000 claims abstract description 28
- 238000005498 polishing Methods 0.000 claims abstract description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000000137 annealing Methods 0.000 claims abstract description 7
- 238000001035 drying Methods 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 239000000126 substance Substances 0.000 claims abstract 2
- 239000012788 optical film Substances 0.000 claims description 33
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 22
- 239000011521 glass Substances 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 12
- 229910052786 argon Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 8
- 238000002955 isolation Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 230000003746 surface roughness Effects 0.000 claims description 3
- 241000283690 Bos taurus Species 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 8
- 238000010008 shearing Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000009489 vacuum treatment Methods 0.000 description 2
- 235000015842 Hesperis Nutrition 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000678 plasma activation Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010407 vacuum cleaning Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Abstract
The invention provides a connection method of a miniature laser gyro reflector, which relates to the technical field of laser gyro manufacturing and comprises the following steps: performing high-precision polishing on the mirror pieces of the reflector and the airtight surface of the laser gyro resonant cavity; chemically cleaning the polished reflector lens and the airtight surface of the laser gyro resonant cavity, and drying after the chemical cleaning; the reflector lens optical cement is connected to the airtight surface of the laser gyro resonant cavity, the upper surface and the lower surface of the laser gyro resonant cavity assembled with the reflector lens are cleaned by ethanol, and then the laser gyro resonant cavity is placed in a vacuum oven to be baked for a preset time length; annealing is performed after baking. The strength of the optical cement connecting technology can be improved by at least 2 times, and the shearing strength reaches more than 15 MPa.
Description
Technical Field
The invention belongs to the technical field of laser gyroscope manufacturing, and relates to a connection method of a reflecting mirror of a miniaturized laser gyroscope.
Background
The laser gyro is an inertia instrument with high precision, high reliability and long service life, and is widely used in the fields of carrier rockets, satellite airships, missile weapons, aviation airplanes, submarines, ships and warships and the like.
With the continuous reduction of the important requirements of the volume of the laser gyroscope, the connection between the reflector and the microcrystalline glass cavity becomes a difficult problem. The reason is that the optical cement technology based on molecular acting force is adopted between the glass reflector and the microcrystalline glass cavity, the optical cement bonding area is greatly reduced along with the reduction of the volume of the gyroscope, and the application of high dynamic and strong vibration of the micro laser gyroscope cannot be adapted.
The existing patents and documents relate to the technical measures in the aspect, a fusing technology adopting glass powder is generally adopted for connection, the ultralow-expansion microcrystalline glass cannot be fused, and only can be changed into high-expansion BK7 glass, and the reflector is connected with the glass cavity through the glass powder fusing technology. BK7 glass is adopted as a matrix material of the laser gyroscope, so that the temperature performance of the gyroscope is obviously greatly reduced.
Disclosure of Invention
In order to solve the technical problem, a first aspect of the present invention provides a connection method for a miniaturized laser gyro reflector, including the following steps:
step 1, polishing an optical cement connection area of a reflector lens and an airtight surface of a laser gyro resonant cavity, wherein the polishing is to perform high-precision polishing on the optical cement connection area of the reflector lens and the airtight surface of the laser gyro resonant cavity; the high-precision polishing meets the following requirements: the surface roughness is less than or equal to 0.025um, and the surface shape error is less than or equal to 0.06um;
storing the reflector lens after plasma cleaning in a dry environment;
performing plasma cleaning on the laser gyroscope resonant cavity subjected to the step 2 by using vacuum plasma equipment; method for producing a composite material
And 4, taking out the dried and stored reflector lens, fixedly connecting the reflector lens to the airtight surface of the laser gyro resonant cavity after plasma cleaning in an optical cement connection mode, and maintaining the pressure during optical cement connection: 5-10N, the pressure connection time is as follows: 10-30 seconds;
step 5, cleaning the outer surface of the laser gyro resonant cavity after the step 4 by using ethanol, then placing the laser gyro resonant cavity into a vacuum oven, and baking for a preset time length at a preset temperature; and after baking, annealing treatment is carried out according to a preset cooling rate.
In the method according to the first aspect of the present invention, the mirror plate is square, the center of the mirror surface of the mirror is a circular optical film region of the mirror, and the diameter of the circular optical film region matches with the diameter of the optical cavity of the laser gyro resonant cavity; the periphery of the circular optical film region is an annular isolation region; outside the isolation region is the optical cement connection region.
In the method according to the first aspect of the present invention, the mirror plate is a flat mirror.
In the method according to the first aspect of the present invention, the material of the special tool is glass or stainless steel.
In the method according to the first aspect of the present invention, the storage time of the dried mirror plate is less than 5 hours, and the plasma cleaning in step 3 is performed again on the mirror plate stored for more than 5 hours.
In the method according to the first aspect of the present invention, the process gas of the vacuum plasma apparatus is a mixed gas of argon and oxygen, wherein the ratio of argon to oxygen is: 10.
In the method according to the first aspect of the present invention, the ratio of the mixture of argon and oxygen is: 5:1.
In the method according to the first aspect of the present invention, the predetermined temperature for the vacuum oven baking is: 120-450 ℃, and the preset time length of baking is as follows: 5 to 72 hours;
the predetermined cooling rate of the vacuum oven is: 0.1-1 deg.c/min.
In the method according to the first aspect of the present invention, the baking temperature of the vacuum oven is 300 ℃, and the baking time is 48 hours; the cooling rate of the vacuum oven is 0.1 ℃/min.
The square mirror of the invention can also be modified in the following manner: the center of the mirror surface of the reflector is a circular optical film area of the reflector, and the diameter size of the circular optical film area is matched with the diameter of an optical cavity of the laser gyro resonant cavity; and etching an annular groove on the periphery of the circular optical film region to serve as an isolation region, wherein the annular groove is used for isolating the circular optical film region and the optical cement connection region.
By adopting the method, the invention uses the square reflector lens, the shape of the lens is matched with the shape of the airtight surface of the cavity of the laser gyroscope, and the optical cement bonding area of the square reflector lens is increased by more than 30 percent compared with the circular reflector lens used in the prior art. Particularly, after a plasma vacuum cleaning measure is added, the optical cement connecting strength between the square reflector lens and the airtight surface is improved by more than 2 times compared with that of the original round lens, and the shearing strength reaches more than 15 MPa; the invention has good adaptability to other laser gyros.
Drawings
FIG. 1 is a schematic diagram of a cavity of a micro laser gyroscope according to the present invention;
FIG. 2 is a view showing the shape of the optical film surface of the laser gyro reflector of the present invention, wherein A is a front view and B is a transverse sectional view;
FIG. 3 is a drawing showing the shape of the optical film surface of another laser gyro reflector of the present invention, wherein A is a front view and B is a transverse sectional view.
The laser gyroscope comprises a laser gyroscope resonant cavity 1, an elongated hole 2, a laser gyroscope resonant cavity 3, an airtight surface of the laser gyroscope resonant cavity 4, a circular optical film area of a reflector 5a, an annular groove on the back surface of the reflector 5b, and an annular groove on the optical film surface of the reflector 5b.
Detailed Description
The invention provides a high-reliability connection technology for a reflector of a miniature laser gyroscope, which is suitable for high reliability, long service life and large-scale batch production application of the miniature laser gyroscope.
The technical problem to be solved by the invention is as follows: the risk that an existing laser gyroscope is small in airtight surface, low in connection strength and poor in airtight reliability when a circular lens is adopted is overcome, the lens based on the square design is provided, so that the optical cement area of the airtight surface is increased by 30%, and the square reflector is in a shape shown in figure 2. Secondly, a plasma activation treatment technology is adopted to enhance the surface activity of the optical cement surface, and finally a thermal vacuum treatment technology is adopted to promote the molecular connection and mutual fusion of the optical cement interface, so that the connection strength of the reflector and the laser gyro resonant cavity is greatly improved, and the reliability of the laser gyro under strong vibration and impact environments is ensured.
The invention provides a reflector lens connection method based on a square design and a reflector lens plasma treatment and thermal vacuum treatment technology, which are used for improving the optical cement connection strength.
The following detailed description of the embodiments of the invention refers to the accompanying drawings.
The structure diagram of the laser gyroscope is shown in the attached figure 1, and the structure diagram comprises a laser gyroscope resonant cavity 1 in a flat rectangular shape, wherein a slender hole 2 of a laser optical cavity is manufactured in the laser gyroscope resonant cavity 1, chamfer angles are formed at four vertex angles of the laser gyroscope resonant cavity 1, the chamfer angles reach the aperture center of the slender hole 2 serving as the laser optical cavity, and a reflector is bonded at the chamfer angle position, so that laser beams are transmitted in the slender hole 2 serving as the laser optical cavity in a circular manner. It is obvious that, since the cavity 1 is of flat rectangular shape, the section of the said chamfer must be of rectangular shape, this rectangular section being used as a whole for the gastight face 3 of the cavity for the bonding of the mirrors.
In order to solve the technical problem, a first aspect of the present invention provides a connection method for a miniaturized laser gyro reflector, including the following steps:
step 1, polishing an optical cement connection area of a reflector lens and an airtight surface 3 of a laser gyro resonant cavity, wherein the polishing is to perform high-precision polishing on the optical cement connection area of the reflector lens and the airtight surface 3 of the laser gyro resonant cavity; the high-precision polishing meets the following requirements: the surface roughness is less than or equal to 0.025um, and the surface shape error is less than or equal to 0.06um;
storing the reflector lens after plasma cleaning in a dry environment;
carrying out plasma cleaning on the laser gyro resonant cavity 1 subjected to the step 2 by using vacuum plasma equipment;
and 4, taking out the dried and stored reflector lens, fixedly connecting the reflector lens to the airtight surface 3 of the laser gyro resonant cavity after plasma cleaning in an optical cement connection mode, and maintaining the pressure during optical cement connection: 5-10 cows, and the pressure connection time is as follows: 10-30 seconds;
step 5, cleaning the outer surface of the laser gyro resonant cavity 1 subjected to the step 4 by using ethanol, then placing the laser gyro resonant cavity 1 into a vacuum oven, and baking for a preset time length at a preset temperature; and after baking, annealing treatment is carried out according to a preset cooling rate.
On the basis of the design of a conventional circular reflector lens, the invention adopts the design of a square reflector lens which is almost the same as the shape of a cavity sealing surface of a laser gyroscope. The disadvantage of the square mirror is that there is no way to adjust the rotation to find the direction of the best scattering, but in the state of the art, the laser gyro is not critical to the accuracy, and in general, the square mirror is the best choice.
In the method according to the first aspect of the present invention, the mirror plate is square, the center of the mirror surface of the mirror is the circular optical film region 4 of the mirror, and the diameter of the circular optical film region 4 of the mirror is matched with the diameter of the optical cavity of the laser gyro resonant cavity 1; the periphery of the circular optical film region 4 of the reflector is an annular isolation region; outside the isolation region is the optical cement connection region. The shape and the sectional view of the reflector are shown in fig. 2, the reflector lens is a square plane lens, the center of the mirror is a circular optical film area 4 of the reflector, and the diameter of the optical film is a circular shape matched with the diameter of the elongated hole 2 in the laser gyro resonant cavity 1.
Another square mirror piece is shown in fig. 3, the mirror piece is square, a circular optical film region 4 of the mirror is arranged in the center of the mirror surface of the mirror, and the diameter of the circular optical film region 4 of the mirror is matched with the diameter of the optical cavity of the laser gyro resonant cavity 1; an annular groove 5b of the reflector optical film surface is etched on the periphery of the optical film surface to serve as an isolation region, and the annular groove 5b of the reflector optical film surface is used for isolating the circular optical film region 4 of the reflector and the optical cement connection region.
The square reflector lens is a square plane lens, wherein the center of the lens is a circular optical film region 4 of the reflector, and the diameter size of the optical film is matched with the diameter of the elongated hole 2 in the laser gyro resonant cavity 1; an annular groove 5b of the optical film surface of the reflector is etched on the periphery of the optical film area, and an area for optical cement is arranged outside the groove area. The annular groove 5b of the mirror optical film face serves to prevent contamination of the optical film area. Meanwhile, as shown in a transverse cross-sectional view of fig. 3, two grooves are respectively engraved on the front surface and the back surface of the square mirror plate, and an annular groove 5a on the back surface of the mirror and an annular groove 5b on the optical film surface of the mirror are formed, wherein the depth of the annular groove 5b on the optical film surface of the mirror on the front surface of the square mirror is larger, and the depth of the annular groove 5a on the back surface of the square mirror is shallower, so that the square mirror plate can deform in a small size under the action of an external force, and is used for tuning the laser oscillation state of a laser.
In the method according to the first aspect of the present invention, the mirror plate is a flat mirror.
In the method according to the first aspect of the present invention, the material of the special tool is glass or stainless steel.
In the method according to the first aspect of the present invention, the storage time of the dried mirror plate is less than 5 hours, and the plasma cleaning in step 3 is performed again on the mirror plate stored for more than 5 hours.
In the method according to the first aspect of the present invention, the process gas of the vacuum plasma apparatus is a mixed gas of argon and oxygen, wherein the ratio of argon to oxygen is: 10.
In the method according to the first aspect of the present invention, the ratio of the mixture of argon and oxygen is: 5:1.
In the method according to the first aspect of the present invention, the baking temperature of the vacuum oven is: 120-450 ℃, and the preset baking time is as follows: 5 to 72 hours;
the cooling rate of the vacuum oven during baking and cooling is as follows: 0.1-1 deg.c/min.
In the method provided by the first aspect of the present invention, the baking time of the vacuum oven is 300 ℃, and the baking time is 48 hours; the cooling rate of the vacuum oven during baking and cooling is 0.1 ℃/min.
Example 1.
And chemically cleaning and drying the polished reflector lens, and then putting the polished reflector lens into a special tool for plasma cleaning, wherein the special tool is made of glass or stainless steel. The plasma cleaning adopts a vacuum plasma cleaning mode, the process gas is mixed cleaning of argon and oxygen, wherein the ratio of argon to oxygen can be flexibly selected from 10 to 1, and the typical cleaning ratio is 5. The cleaning time is flexibly selected between 5 and 60 minutes, the typical cleaning time is 20 minutes, the assembled laser gyro resonant cavity 1 is wiped on the upper surface and the lower surface by using ethanol, the laser gyro resonant cavity is placed in a vacuum oven for high-temperature baking, the baking temperature is flexibly selected between 120 and 450 ℃, and the typical baking time is 300 ℃. The baking time is flexibly selected from 5 to 72 hours, and the typical baking time is 48 hours. The annealing rate in baking and cooling is a key parameter, the improper annealing rate can obviously influence the expansion coefficient of the glass ceramics, and can be usually selected from 0.1 to 1 ℃/minute, and the typical annealing rate is 0.1 ℃/minute.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the embodiments of the present invention and not for limiting, and although the embodiments of the present invention are described in detail with reference to the above preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the embodiments of the present invention without departing from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. A connection method for a reflector of a miniaturized laser gyro is characterized by comprising the following steps:
step 1, polishing an optical cement connecting area of a reflector lens and an airtight surface of a laser gyro resonant cavity, wherein the polishing is to perform high-precision polishing on the optical cement connecting area of the reflector lens and the airtight surface of the laser gyro resonant cavity; the high-precision polishing meets the following requirements: the surface roughness is less than or equal to 0.025um, and the surface shape error is less than or equal to 0.06um;
step 2, chemically cleaning the polished reflector lens and the airtight surface of the laser gyro resonant cavity, and drying the polished reflector lens and the polished laser gyro resonant cavity after the chemical cleaning;
step 3, putting the reflector lens after the step 2 into a special tool, and then putting the reflector lens into vacuum plasma equipment for plasma cleaning;
storing the reflector lens after plasma cleaning in a dry environment;
carrying out plasma cleaning on the laser gyro resonant cavity subjected to the step 2 by using vacuum plasma equipment; method for producing a composite material
And 4, taking out the dried and stored reflector lens, fixedly connecting the reflector lens to the airtight surface of the laser gyro resonant cavity after plasma cleaning in an optical cement connection mode, and maintaining the pressure during optical cement connection: 5-10 cows, and the pressure connection time is as follows: 10-30 seconds;
step 5, cleaning the outer surface of the laser gyro resonant cavity after the step 4 by using ethanol, then placing the laser gyro resonant cavity into a vacuum oven, and baking for a preset time length at a preset temperature; and after baking, annealing treatment is carried out according to a preset cooling rate.
2. The method of claim 1, wherein the mirror plate is square, and the center of the mirror surface is a circular optical film region of the mirror, the circular optical film region having a diameter size matching a diameter of an optical cavity of the laser gyro resonator; the periphery of the circular optical film region is an annular isolation region; outside the isolation region is the optical cement connection region.
3. The method of claim 2, wherein the mirror plate is a flat mirror.
4. The method of claim 1, wherein the special tool is made of glass or stainless steel.
5. The method of claim 1, wherein the dried mirror plate is stored for a period of time within 5 hours, and the plasma cleaning in step 3 is performed again for mirror plates stored for a period of time exceeding 5 hours.
6. The method of claim 1, wherein the process gas of the vacuum plasma apparatus is a mixed gas of argon and oxygen, wherein a ratio of argon to oxygen is: 10.
7. The method of claim 6, wherein the ratio of the argon gas to the oxygen gas mixture is 5.
8. The method of claim 1, wherein the predetermined temperature of the vacuum oven bake is: 120-450 ℃, and the preset time length of baking is as follows: 5 to 72 hours;
the predetermined cooling rate of the vacuum oven is: 0.1-1 deg.c/min.
9. The method of claim 8, wherein the baking temperature of the vacuum oven is 300 ℃; baking for 48 hours; the cooling rate of the vacuum oven is 0.1 ℃/min.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211276160.XA CN115355899A (en) | 2022-10-19 | 2022-10-19 | Connection method for miniature laser gyro reflector |
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| CN202211276160.XA CN115355899A (en) | 2022-10-19 | 2022-10-19 | Connection method for miniature laser gyro reflector |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115540913A (en) * | 2022-12-01 | 2022-12-30 | 天津集智航宇科技有限公司 | Laser gyro resonant cavity comprehensive error measurement method |
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