CN117428738A - Electric control micro gripper for micro-nano operation - Google Patents
Electric control micro gripper for micro-nano operation Download PDFInfo
- Publication number
- CN117428738A CN117428738A CN202311602771.3A CN202311602771A CN117428738A CN 117428738 A CN117428738 A CN 117428738A CN 202311602771 A CN202311602771 A CN 202311602771A CN 117428738 A CN117428738 A CN 117428738A
- Authority
- CN
- China
- Prior art keywords
- micro
- nano
- gripper
- flexible clamping
- shape memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims abstract description 69
- 230000007246 mechanism Effects 0.000 claims abstract description 13
- 230000008859 change Effects 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000011151 fibre-reinforced plastic Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003578 releasing effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- HZEWFHLRYVTOIW-UHFFFAOYSA-N [Ti].[Ni] Chemical compound [Ti].[Ni] HZEWFHLRYVTOIW-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/02—Gripping heads and other end effectors servo-actuated
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Micromachines (AREA)
Abstract
The invention provides an electric control micro gripper for micro-nano operation, comprising: the clamping platform and the driving mechanism are arranged on the clamping platform; the clamping platform is provided with a pair of cantilever beams, and a nano probe is correspondingly arranged below each cantilever beam and is used for contacting with an object to be clamped; one side of each cantilever beam is provided with a flexible clamping arm, and a deformation space is defined between the two flexible clamping arms; the driving mechanism comprises shape memory elastic pieces which are arranged in pairs, each pair of shape memory elastic pieces is connected with the corresponding flexible clamping arm and used for pulling the flexible clamping arm to bend and deform towards the inside of the deformation space when the flexible clamping arm contracts, so that the flexible clamping arm pulls each cantilever beam to bend inwards and further drives the pair of nano probes to clamp an object to be clamped. The invention adopts the driver with the shape memory elastic piece, the required driving voltage is smaller, and no noise is generated during driving.
Description
Technical Field
The invention relates to the technical field of micro-nano operation equipment, in particular to an electric control micro-gripper for micro-nano operation.
Background
With the rapid development of modern science and technology and the continuous and deep search of people in the micro-field, the micro-nano operation technology is rising, so that the human knowledge is deep from the macroscopic world to the molecular and atomic level. Micro-nano operation technology is one of the key technologies of the current development of nano technology. The micro-nano operation technology refers to a technology for realizing micro-nano measurement, test, assembly and manufacture by operating a micro-nano scale object, including operations such as searching, grabbing, moving, releasing, pushing, pulling, cutting, bending, twisting and the like of the operating object.
The cantilever probe capability of atomic force microscopes and scanning tunneling microscopes is not comparable in micro-nano operation. However, typical single probe designs are limited in certain applications because they can only be subjected to simple micronano-manipulations (e.g., push, pull) and the sample may slip during the manipulation without a complementary probe. The built-in multi-probe system can make up for the defects, but the operation is complex and the system cost is high. Another effective solution is to use a micro-electromechanical system, and the micro-gripper used for micro-nano operation at present has a micro-gripper assembled by nano materials and a micro-gripper prepared by micro-electromechanical, which are driven to open and close by electrostatic force, and the tip of the micro-gripper directly contacts an operation object, however, the following defects still exist: 1) Noise generated by the driver is difficult to eliminate; 2) The voltage required by the driver is excessive, and charge leakage can occur to affect operation; 3) The clamping force of the driver is insufficient.
Disclosure of Invention
In view of the above, the invention provides an electric control micro gripper for micro-nano operation, which aims to solve the technical problems of overlarge voltage, larger noise and insufficient gripping force of the driver of the existing micro gripper.
The invention provides an electric control micro gripper for micro-nano operation, which comprises: the clamping platform and the driving mechanism are arranged on the clamping platform; wherein,
the clamping platform is provided with a pair of cantilever beams, and a nano probe is correspondingly arranged below each cantilever beam and is used for being contacted with an object to be clamped;
one side of each cantilever beam is provided with a flexible clamping arm, and a deformation space is defined between the two flexible clamping arms;
the driving mechanism comprises shape memory elastic pieces which are arranged in pairs, each pair of shape memory elastic pieces is connected with the corresponding flexible clamping arm and used for pulling the flexible clamping arm to bend and deform towards the inside of the deformation space when the flexible clamping arm contracts, so that the flexible clamping arm pulls each cantilever beam to bend inwards and further drives the pair of nano probes to clamp an object to be clamped.
Further, in the above-mentioned electrically controlled micro gripper for micro-nano operation, the gripping platform includes: a connecting part and the flexible clamping arms arranged in pairs; wherein,
the two flexible clamping arms are symmetrically arranged at two ends of the connecting portion, and one end, far away from the connecting portion, of each flexible clamping arm is provided with the cantilever beam.
Further, in the electrically controlled micro gripper for micro-nano operation, the flexible gripping arm is of an L-shaped structure or an arc-shaped structure.
Further, in the electrically controlled micro gripper for micro-nano operation, a deformation groove is formed in the middle of the flexible gripper arm.
Further, in the electrically controlled micro-gripper for micro-nano operation, the deformation groove is an arc groove, a triangle groove or a right angle groove.
Further, in the above-mentioned electrically controlled micro-gripper for micro-nano operation, a piezoresistive sensor is disposed on an upper surface of the flexible cantilever, and the piezoresistive sensor is configured to convert a reverse acting force from the object to be gripped received by the cantilever into a variable amount of a resistance value when the nano probe is kept in contact with the object to be gripped.
Further, in the electrically controlled micro gripper for micro-nano operation, two ends of the shape memory elastic piece are arranged at two ends of the flexible gripping arm through the fixing rod.
Further, in the above electrically controlled micro gripper for micro-nano operation, the driving mechanism further includes: a power supply; wherein,
the power supply is communicated with the shape memory elastic piece and is used for supplying power to the shape memory elastic piece.
Further, in the electronically controlled micro-gripper for micro-nano operation, the nano probe is spherical, cylindrical or conical.
Further, in the electronically controlled micro-gripper for micro-nano operation, the distance between the two nano probes is 0-1mm.
The electric control micro gripper for micro-nano operation adopts the driver with the shape memory elastic piece, the required driving voltage is small, noise is not generated during driving, and enough clamping force can be generated; the flexible clamping arm is adopted, so that the structure is stable, and the required driving force can be reduced.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
FIG. 1 is a schematic diagram of an electrically controlled micro-gripper for micro-nano operation according to an embodiment of the present invention;
FIG. 2 is a top view of an electronically controlled micro-gripper for micro-nano operation according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an electronically controlled micro-gripper for micro-nano operation in a closed state, according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a nanoprobe in an electrically controlled micro-gripper for micro-nano operation according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of resistance measurements of piezoresistive sensors in an electronically controlled micro-gripper for micro-nano operation according to an embodiment of the present invention;
fig. 6 is a schematic diagram of the principle that the piezoresistive sensor in the electric control micro-gripper for micro-nano operation provided by the embodiment of the invention is applied to the double-probe atomic force microscope to measure the electric signals of each point of the micro-nano sample.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.
Referring to fig. 1-3, an electronically controlled micro-gripper for micro-nano operation according to an embodiment of the present invention includes: a clamping platform 1 and a driving mechanism 2 arranged on the clamping platform 1; the clamping platform 1 is provided with a pair of cantilever beams 13, and a nano probe 3 is correspondingly arranged below each cantilever beam 13 and is used for being contacted with an object (not shown in the figure) to be clamped; a flexible clamping arm 12 is arranged on one side of each cantilever beam 13, and a deformation space is defined between the two flexible clamping arms 12; the driving mechanism 2 includes shape memory elastic members 21 disposed in pairs, where each pair of shape memory elastic members 21 is connected to a corresponding flexible clamping arm 12, so as to pull the flexible clamping arm 12 to bend and deform toward the inside of the deformation space when contracting, so that the flexible clamping arm 12 pulls each cantilever beam 13 to bend inward, and further drives the paired nano probes 3 to clamp the object to be clamped.
Specifically, a preset distance is provided between the two flexible clamping arms 12, so as to provide deformation space for the two cantilever beams 13. The cantilever beam 13 may be a square plate-like structure that is located below the end of the flexible gripping arm 12, forming a stepped structure with the flexible gripping arm 12. In this embodiment, the shape memory elastic member 21 is preferably a one-way shape memory alloy of nickel titanium (NiTi) capable of generating a sufficient clamping force for the object to be clamped.
The distance between the two nanoprobes 3 is as small as possible, and the distance between the two nanoprobes 3 may be 0 to 1mm.
Referring to fig. 4, in this embodiment, the nanoprobe 3 is spherical, cylindrical or conical, and may be selected according to the shape and type of the object to be clamped. Such as spherical or cylindrical probes for manipulation of soft samples such as cells, or tapered probes for mining of harder objects such as metal particles, nanowires, etc.
The clamping platform 1 comprises: a connecting portion 11 and the flexible holding arms 12 provided in pairs; the two flexible clamping arms 12 are symmetrically arranged at two ends of the connecting portion 11, and one end of the flexible clamping arm 12 away from the connecting portion 11 is provided with the cantilever beam 13.
Specifically, the connection portion 11 may have a plate-like structure, and the two flexible clamp arms 12 may be integrally formed with the connection portion 11 or welded thereto. The end of each flexible clamping arm 12, which is far away from the connecting part 11, is provided with a cantilever beam 13, the bottom of the cantilever beam 13 is respectively provided with a nano probe 3, and the nano probes 3 are arranged along the vertical direction and are connected with the bottom of the cantilever beam 13. The two nanoprobes 3 are oppositely arranged below the two cantilever beams 13 to form a clamping part.
In this embodiment, the flexible clamping arm 12 has an L-shaped structure or an arc-shaped structure. A deformation groove 121 is arranged in the middle of the flexible clamping arm 12. Preferably, the deformation groove 121 is an arc groove, a triangle groove or a right angle groove.
More specifically, in this embodiment, the flexible gripping arms 12 are constructed of a fiber reinforced polymer composite material having high tensile strength and insulating properties.
In this embodiment, the driving mechanism 2 may include one or more pairs of shape memory elastic members 21, and when there are a plurality of pairs of shape memory elastic members 21, each pair of shape memory elastic members 21 is disposed between the flexible gripping arm 12 and the connecting portion 11 of the gripping platform 1 in order from the inside of the deformation space to the outside in the lateral direction. In a specific implementation manner of this embodiment, a pair of shape memory elastic members 21 are disposed in the driving mechanism 2, and the two shape memory elastic members 21 are disposed on the two flexible clamping arms 12 respectively along the extending direction of the flexible clamping arms 12, so that the flexible clamping arms 12 are contracted in the power supply state to drive the flexible clamping arms 12 to bend and deform. The shape memory elastic member 21 may be a shape memory alloy spring.
Further, the driving mechanism 2 further includes: a power supply (not shown); wherein the power source is in communication with the shape memory spring 21 for powering the shape memory spring 21.
In the implementation, both ends of the shape memory elastic piece 21 are communicated with a power supply, when the shape memory elastic piece 21 is electrified, the shape memory elastic piece is contracted along the length direction, and symmetrically arranged nano probes 3 are driven by a deformation groove 121 arranged in the middle of a flexible clamping arm 12 to clamp an object to be clamped; after the clamping action of the object to be clamped is completed, the shape memory alloy elastic element 21 is powered off, and is stretched in the length direction to restore to the original state, so that the releasing action can be completed.
In practice, the two ends of the shape memory elastic member 21 are disposed at the two ends of the flexible clamping arm 12 through the fixing rod 22.
Two ends of each flexible clamping arm 12 are respectively provided with a fixing rod 22 along the vertical direction, the fixing rods 22 can be welded on the flexible clamping arms 12, and two ends of the shape memory elastic piece 21 are respectively connected with the corresponding fixing rods 22.
The micro-nano operation in the present invention refers to a micro-size operation of nanometer and micrometer.
As apparent from the above description, the electrically controlled micro gripper for micro-nano operation provided in the present embodiment adopts a driver with a shape memory elastic member, which requires a small driving voltage, generates no noise during driving, and can generate a sufficient clamping force; the flexible clamping arm is adopted, so that the structure is stable, and the required driving force can be reduced.
In the above embodiment, referring to fig. 1 and fig. 5, the upper surface of the flexible cantilever 13 is provided with a piezoresistive sensor 4, and the piezoresistive sensor 4 is configured to convert the reverse acting force from the object to be clamped received by the cantilever 13 into the variable amount of the resistance value when the nano probe 3 is kept in contact with the object to be clamped.
Specifically, the piezoresistive sensor 4 may be a resistive thin film pressure sensor, and when the piezoresistive sensor 4 contacts an object to be clamped, that is, receives external force or pressure, the thin film material deforms, so that the contact area or the contact density between the conductive particles changes. When no force is applied, the contact between the conductive particles is less, and the resistance is larger. When subjected to force or pressure, the deformation of the film increases the contact between the conductive particles, resulting in a decrease in the resistance value. By measuring the resistance values across the piezoresistive sensor 4, the magnitude of the externally applied force can be deduced.
Referring to fig. 5, the magnitude of the resistance value of the piezoresistive sensor 4 is measured by a wheatstone bridge method, the circuit consisting of four resistors, generally denoted R1, R2, R3 and Ry. Where Ry is the resistance to be measured of the piezoresistive sensor 4, and R1, R2 and R3 are resistances of known resistance. At this time:
when R1, R2 and R3 are adjusted to balance the bridge, the voltages on the two diagonals of the bridge are equal, i.e. V out =0. When Ry changes its resistance value, V out Generating bias voltage, and obtaining the Ry resistance value by detecting the magnitude of the bias voltage.
In this embodiment, the piezoresistive sensor 4 may be adhered to the cantilever beam 13, when the nano-probe 3 contacts the object to be clamped, the cantilever beam 13 receives a reverse acting force of the object to be clamped, the resistance value of the piezoresistive sensor 4 will change, and the degree of clamping of the object to be clamped by the nano-probe 3 can be determined through the change of the resistance value of the piezoresistive sensor 4, which indicates that the clamping force of the two nano-probes 3 to the object to be clamped is increased under the condition that the real-time resistance value of the piezoresistive sensor 4 is decreased.
The working principle of the electric control micro gripper for micro-nano operation in the embodiment is as follows: before clamping, the flexible clamping arm 12 is in an open state, at this time, the shape memory elastic member 21 is electrified and heated, and when the heating temperature is increased to the reverse phase transition temperature of the shape memory elastic member 21, the shape memory elastic member 21 is contracted, and the length is shortened. The cantilever beam 13 is pulled to be bent inwards through the flexible clamping arm 12 to drive the nano probe 3 to approach an object to be clamped, when the nano probe 3 contacts the object to be clamped, the object to be clamped generates a reaction force on the nano probe 3 and the cantilever beam 13, the resistance value of the piezoresistive sensor 4 is caused to change, and whether the nano probe 3 clamps the object to be clamped is judged; after the clamping action on the clamping object is completed, the shape memory elastic member 21 is powered off, and is elongated and restored in the length direction, so that the nano probe 3 is reset, and the release action is completed.
The present embodiment may further include: a controller (not shown in the figure); the controller is electrically connected with the piezoresistive sensor 4 and the power supply, and is configured to receive real-time resistance data of the piezoresistive sensor 4 and strain data of the cantilever 13, and accordingly control the power supply to supply or cut off power.
In practice, when the object to be clamped is clamped, a reaction force is generated on the cantilever beam 13, and the cantilever beam 13 is slightly deformed, so that the resistance value of the piezoresistive sensor 4 on the cantilever beam 13 is changed. And indirectly judging the clamping degree of the sample through the change of the resistance value. The method comprises the following steps:
(1) the piezoresistive sensor 4 is initially calibrated and the resistance of the piezoresistive sensor 4 is recorded when no external force is applied.
(2) Determining a strain-resistance relationship: through experiments, a strain-resistance relation curve of the piezoresistive sensor 4 is obtained, which shows the change of the resistance value of the cantilever 13 when an external force is applied. In practice, the strain-resistance relation curve of the piezoresistive sensor 4 on the cantilever beam can be obtained by applying forces of different magnitudes to the cantilever beam, and at the same time, the clamping degree of the two nano probes 3 to the sample to be clamped can be observed under the condition of different forces.
(3) Monitoring the change in resistance: the resistance value change of the piezoresistive sensor 4 is monitored in real time, and the deformation or strain of the cantilever 13 caused by external force can be determined by comparing the resistance value with the resistance value at the initial calibration. In practice, the deformation or strain of the cantilever beam 13 may be determined from the resistance value of the piezoresistive sensor 4 and the strain-resistance relationship of the piezoresistive sensor 4, which are monitored in real time.
(4) Controlling clamping force: from the magnitude of the resistance change and the strain-resistance relationship, the force actually applied to the sample can be deduced. In the measuring process, the magnitude of the clamping force is controlled according to the strain-resistance relation curve in the step 2, so that the clamping force is kept within a safe range, and damage to a sample is avoided. In practice, the change of the resistance value is used as a feedback signal, and the controller can change the PWM duty ratio (the proportion of the high level time to the total period) at any time, control the electrifying duration of the power supply to the shape memory alloy, and further adjust the clamping force in real time, so that the clamping force is kept in a safe range.
The electric control micro-clamp for micro-nano operation in the embodiment can be used as an operation hand in a scanning probe microscope to realize the operation on micro-nano samples, and the piezoresistive sensor is used for clamping the samples without complex light path design;
the electric control micro-clamp holder for micro-nano operation in the embodiment can also be used for realizing measurement of electric signals of each point of a micro-nano sample in a double-probe atomic force microscope; when the method is specifically operated, firstly, the method replaces one probe in the double-probe atomic force microscope, then the method is used for clamping the sample, voltage is applied to the sample through a loop formed by two ends of the electric control micro-clamp used for micro-nano operation, and finally, the measurement of electric signals of each point of the micro-nano sample is finished by using the remaining one probe 5 of the atomic force microscope.
Referring to fig. 6, a voltage loop and a voltmeter connected in parallel across a micro-nano sample are generally required for measuring the voltage of the micro-nano sample. The dual probe atomic force microscope has only two probes, so that only a voltage loop can be formed, and no redundant probes are used for measuring voltage, so that a three-probe or four-probe atomic force microscope is usually required. The electric control micro-clamp used for micro-nano operation replaces one probe in the double-probe atomic force microscope, so that the pseudo three-probe atomic force microscope is formed. The clamping of the micro-nano sample is completed, namely, the nano probes at the two ends are contacted with the two ends of the micro-nano sample, and bias voltage is respectively applied to the nano probes at the two ends, at the moment, the nano probes at the two ends and the micro-nano sample form a voltage loop, and the other probe 5 in the double-probe atomic force microscope acts as a voltmeter and can move back and forth to complete the measurement of the potential distribution (electric signal) of each point of the micro-nano sample.
In summary, the electrically controlled micro gripper for micro-nano operation provided by the embodiment of the invention has the following beneficial effects:
(1) The invention adopts the shape memory elastic piece as the driver, the required driving voltage is smaller, noise is not generated during driving, and enough clamping force can be generated;
(2) The invention combines the driving of the shape memory elastic piece and the resistance feedback of the piezoresistive sensor to control the probe of the cantilever beam, thus realizing the clamping control of the sample;
(3) The flexible clamping arm adopted by the invention is made of fiber reinforced polymer composite material and is provided with the deformation groove, so that the structure is stable and the driving force can be reduced.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (10)
1. An electronically controlled micro gripper for micro-nano operation, comprising: the clamping platform and the driving mechanism are arranged on the clamping platform; wherein,
the clamping platform is provided with a pair of cantilever beams, and a nano probe is correspondingly arranged below each cantilever beam and is used for being contacted with an object to be clamped;
one side of each cantilever beam is provided with a flexible clamping arm, and a deformation space is defined between the two flexible clamping arms;
the driving mechanism comprises shape memory elastic pieces which are arranged in pairs, each pair of shape memory elastic pieces is connected with the corresponding flexible clamping arm and used for pulling the flexible clamping arm to bend and deform towards the inside of the deformation space when the flexible clamping arm contracts, so that the flexible clamping arm pulls each cantilever beam to bend inwards and further drives the pair of nano probes to clamp an object to be clamped.
2. The electrically controlled micro-gripper for micro-nano operation according to claim 1, wherein the gripping platform comprises: a connecting part and the flexible clamping arms arranged in pairs; wherein,
the two flexible clamping arms are symmetrically arranged at two ends of the connecting portion, and one end, far away from the connecting portion, of each flexible clamping arm is provided with the cantilever beam.
3. The electrically controlled micro-gripper for micro-nano operation according to claim 1, wherein the flexible gripping arms are of L-shaped or arc-shaped configuration.
4. The electrically controlled micro gripper for micro-nano operation according to claim 1, wherein the middle part of the flexible gripping arm is provided with a deformation groove.
5. The electrically controlled micro-gripper for micro-nano operation according to claim 4, wherein the deformation groove is an arc groove, a triangle or a right angle groove.
6. The electrically controlled micro gripper for micro-nano operation according to claim 1, wherein a piezoresistive sensor is provided on an upper surface of the cantilever beam, and the piezoresistive sensor is used for converting a reverse acting force from the object to be gripped, which the cantilever beam receives, into a change of a resistance value when the nano probe is kept in contact with the object to be gripped.
7. The electrically controlled micro gripper for micro-nano operation according to claim 1, wherein both ends of the shape memory elastic member are provided at both ends of the flexible gripping arm by a fixing rod.
8. The electrically controlled micro gripper for micro-nano operation according to any one of claims 1 to 7, wherein the drive mechanism further comprises: a power supply; wherein,
the power supply is communicated with the shape memory elastic piece and is used for supplying power to the shape memory elastic piece.
9. An electrically controlled micro gripper for micro-nano manipulation according to any one of claims 1 to 7, wherein the nanoprobe is spherical, cylindrical or conical.
10. Electronically controlled micro-gripper for micro-nano operations according to any one of claims 1 to 7, wherein the distance between two of the nano-probes is 0-1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311602771.3A CN117428738A (en) | 2023-11-28 | 2023-11-28 | Electric control micro gripper for micro-nano operation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311602771.3A CN117428738A (en) | 2023-11-28 | 2023-11-28 | Electric control micro gripper for micro-nano operation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117428738A true CN117428738A (en) | 2024-01-23 |
Family
ID=89553501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311602771.3A Pending CN117428738A (en) | 2023-11-28 | 2023-11-28 | Electric control micro gripper for micro-nano operation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117428738A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07143820A (en) * | 1993-11-22 | 1995-06-06 | Yanmar Agricult Equip Co Ltd | Device for judging result of grafting |
| JP2002214112A (en) * | 2001-01-15 | 2002-07-31 | Fuji Xerox Co Ltd | Scanning probe microscope |
| KR20040079770A (en) * | 2003-03-10 | 2004-09-16 | 엘지전자 주식회사 | SPM -type data storage apparatus using air bearing effect and driving method of the same |
| KR100665667B1 (en) * | 2005-09-23 | 2007-01-09 | 한국기계연구원 | Shape memory alloy of wire for micro gripper |
| US20090009033A1 (en) * | 2004-10-09 | 2009-01-08 | Voigtlaender Bert | Nanomanipulator Used for Analyzing or Machining Objects |
| CN105619377A (en) * | 2016-04-05 | 2016-06-01 | 江西理工大学 | Space micro-gripper based on compliant mechanisms |
-
2023
- 2023-11-28 CN CN202311602771.3A patent/CN117428738A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07143820A (en) * | 1993-11-22 | 1995-06-06 | Yanmar Agricult Equip Co Ltd | Device for judging result of grafting |
| JP2002214112A (en) * | 2001-01-15 | 2002-07-31 | Fuji Xerox Co Ltd | Scanning probe microscope |
| KR20040079770A (en) * | 2003-03-10 | 2004-09-16 | 엘지전자 주식회사 | SPM -type data storage apparatus using air bearing effect and driving method of the same |
| US20090009033A1 (en) * | 2004-10-09 | 2009-01-08 | Voigtlaender Bert | Nanomanipulator Used for Analyzing or Machining Objects |
| KR100665667B1 (en) * | 2005-09-23 | 2007-01-09 | 한국기계연구원 | Shape memory alloy of wire for micro gripper |
| CN105619377A (en) * | 2016-04-05 | 2016-06-01 | 江西理工大学 | Space micro-gripper based on compliant mechanisms |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Mølhave et al. | Electro-thermally actuated microgrippers with integrated force-feedback | |
| Cloitre et al. | Rheological aging and rejuvenation in microgel pastes | |
| US8065920B2 (en) | Gripper and driving method using the same | |
| US7586105B2 (en) | Microfabricated cantilever chip | |
| EP1970714A1 (en) | Device including a contact detector | |
| Piriyanont et al. | MEMS rotary microgripper with integrated electrothermal force sensor | |
| CN201653804U (en) | Nano-indentation system based on scanning electron microscope | |
| CN111396274B (en) | Perception-drive integrated thin plate driver based on shape memory alloy | |
| Lu et al. | Realization of nanoscale resolution with a micromachined thermally actuated testing stage | |
| Mackay et al. | Design optimisation and fabrication of SU-8 based electro-thermal micro-grippers | |
| CN103808565B (en) | Integrated comb-type electrostatic preloading micro nano material mechanical property detection structure | |
| JP4047023B2 (en) | Diode type nanotweezers and nanomanipulator device using the same | |
| Suzuki | Flexible microgripper and its application to micromeasurement of mechanical and thermal properties | |
| CN117428738A (en) | Electric control micro gripper for micro-nano operation | |
| CN103698211B (en) | Static pre-load micro-nano material mechanical property detection structure | |
| Li et al. | A novel technique of microforce sensing and loading | |
| CN201772963U (en) | Cantilever dynamic tension sensor | |
| CN209992295U (en) | Miniature SMA wire comprehensive performance experimental device | |
| CN103728074B (en) | A kind of micro-nano material mechanics properties testing structure | |
| CN201034883Y (en) | Single nano line in-situ mechanics all-round property testing device in scanning electron microscope | |
| CN101706340A (en) | Cantilever-type dynamic tension sensor | |
| KR20110057795A (en) | Sensor for measurement of nanomaterials | |
| Chen et al. | Piezoelectrically driven silicon microgrippers integrated with sidewall piezoresistive sensor | |
| Lu et al. | An integrated probe sensor for micro-force measurement | |
| Kim et al. | Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |