CN117423589A - Micro-focus X-ray tube and X-ray generating device - Google Patents
Micro-focus X-ray tube and X-ray generating device Download PDFInfo
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- CN117423589A CN117423589A CN202311451711.6A CN202311451711A CN117423589A CN 117423589 A CN117423589 A CN 117423589A CN 202311451711 A CN202311451711 A CN 202311451711A CN 117423589 A CN117423589 A CN 117423589A
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- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 229910000792 Monel Inorganic materials 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 3
- 210000001503 joint Anatomy 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
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- 229910000833 kovar Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
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- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
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- 229910003460 diamond Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/153—Spot position control
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- X-Ray Techniques (AREA)
Abstract
The application provides a microfocus X-ray tube and X-ray generating device, microfocus X-ray tube includes: a housing, an anode assembly, and a cathode assembly; an electron beam channel is arranged in the cathode assembly, the anode assembly comprises an anode target, and the shell comprises an exit window; the center of the anode target is arranged on one side of the central line of the electron beam channel, and the exit window is arranged on the other side of the central line of the electron beam channel; the included angle between the anode target and the horizontal plane is more than 0 degrees and less than 90 degrees, the included angle between the anode target and the incident direction is more than the included angle between the anode target and the horizontal plane, and the incident direction is the incident direction of the electron beam emitted by the electron beam channel on the anode target. The center of the anode target is not coincident with the center line of the electron beam channel, the electron beam bombards the anode target in a more vertical mode, higher X-ray generation efficiency can be obtained, meanwhile, the stability of the micro-focus X-ray tube can be improved, and the artifacts caused by sputtering of anode target materials to the exit window can be reduced.
Description
Technical Field
The application belongs to the technical field of X-ray tubes, and particularly relates to a micro-focus X-ray tube and an X-ray generating device.
Background
This section is intended to provide a background or context for embodiments of the present application that are recited in the claims. The description herein is not admitted to be prior art by inclusion in this section.
An X-ray tube is a special device capable of generating X-rays, and is widely used in fields of medical treatment, security inspection, industrial detection, etc., in view of its extremely strong penetrability. The X-ray tube is encapsulated by a shell to provide a vacuum environment, emits electron beams through a cathode, accelerates electrons by utilizing an electric field generated by high voltage between a cathode and an anode by using an external power supply, and the accelerated electrons bombard an anode target to interact with inner atomic nuclei and out-of-nuclear electrons to generate X-rays, and the X-rays are radiated outside the X-ray tube through an emergent window. In the whole process, a stable high-pressure environment and a stable electron beam current are required to ensure that the tube continuously and reliably generates X-rays.
Currently, the energy conversion efficiency of an X-ray tube is typically around 1%, and the remaining 99% of the energy is converted to heat. Basically, the conventional X-ray generation technology is realized by bombarding the target material with an electron beam, and most of energy remains in the anode target material in the form of heat in the process of interaction with atomic nuclei and extra-nuclear electrons, and only a small part of the energy forms X-ray photons and radiates into an external space. Also during this process, a large amount of secondary electrons are emitted near the anode target and bombard other materials near the target. This situation may lead to reduced vacuum near the anode target, which may further cause sparking and the like; sputtering of nearby material onto the exit window, artifacts, etc. may also be caused.
Therefore, there is an urgent need in the art for an X-ray tube having high energy conversion efficiency and low secondary electron emission.
Disclosure of Invention
In order to solve the problems of the prior art, a microfocus X-ray tube and an X-ray generator have been proposed, and the microfocus X-ray tube and the X-ray generator can solve the problems.
The present application provides the following solutions.
In a first aspect, the present application provides a microfocus X-ray tube comprising: a housing, an anode assembly, and a cathode assembly;
an electron beam channel is arranged in the cathode assembly, the anode assembly comprises an anode target, and the shell comprises an exit window;
the center of the anode target is arranged on one side of the central line of the electron beam channel, and the exit window is arranged on the other side of the central line of the electron beam channel;
the included angle between the anode target and the horizontal plane is more than 0 degrees and less than 90 degrees, the included angle between the anode target and the incident direction is more than the included angle between the anode target and the horizontal plane, and the incident direction is the incident direction of the electron beam emitted by the electron beam channel on the anode target.
In some possible embodiments, the anode target is perpendicular to the direction of incidence.
In some possible embodiments, the center point of the anode target is on the same vertical line as the center point of the exit window.
In some possible embodiments, the housing comprises a first housing portion and a second housing portion;
the end of the first housing part is provided with a first opening, the end of the second housing part is provided with a second opening, and the second opening is in butt joint with the first opening so that the second housing part is connected with the first housing part to form a housing.
In some possible embodiments, the first housing portion includes a first mounting port, a second mounting port, and a third mounting port;
the first mounting port is positioned at the end part of the first shell part opposite to the first opening, and the second mounting port and the third mounting port are positioned on the side wall of the first shell part;
the first mounting port is fitted with an exit window, the second mounting port is fitted with an exhaust port, and the third mounting port is fitted with a cathode assembly.
In some possible embodiments, the second housing portion includes a fourth mounting port located at an end of the second housing portion opposite the second opening, the fourth mounting port mounting the anode assembly.
In some possible embodiments, the cathode assembly includes a cathode, a cathode stem, and a cathode housing coupled to the third mounting opening of the first housing portion, the cathode being mounted inside the cathode housing on a side of the cathode housing adjacent the housing, the cathode stem being mounted inside the cathode housing on a side of the cathode housing remote from the housing.
In some possible embodiments, the anode assembly includes an anode stem, an anode target, an anode shield, and an adapter ring;
one end of the anode rod penetrates through the fourth mounting hole and extends to the outside of the shell, an anode target is arranged at the other end of the anode rod, an anode rod boss is arranged on the side face of the anode rod, the anode shielding cover is connected with one face of the anode rod boss, and the other face of the anode rod boss is connected with the second shell through the adapter ring.
In some possible embodiments, the edge of the anode stem on the side where the anode target is mounted is rounded.
In some possible embodiments, the cathode includes a bunching pole, a grid, and a cathode body;
an electron beam channel is arranged on one side of the beam focusing electrode, which is close to the anode assembly, a grid electrode is arranged on one side of the beam focusing electrode, which is far away from the anode assembly, and a cathode body is arranged on one side of the grid electrode, which is far away from the anode assembly.
In some possible embodiments, the cathode stem is provided with a gate pin, a hot wire pin, and a cathode body pin;
the grid electrode is provided with a grid electrode lead wire which is connected with a grid electrode pin of the cathode core column;
the cathode body is provided with a hot wire lead and a cathode body lead, the hot wire lead is connected with the hot wire pin of the cathode stem, and the cathode body lead is connected with the cathode body pin of the cathode stem.
In some possible embodiments, the cathode further comprises a cathode housing,
the cathode casing is connected to the first casing part through a third mounting port.
In some possible embodiments, the first housing portion is integrally formed, and the material of the first housing portion comprises any one of stainless steel, oxygen-free copper, or monel.
In some possible embodiments, the second housing part is made of an insulating material.
In a second aspect, the present application provides an X-ray generating device comprising: the micro-focus X-ray tube described above.
In the micro-focus X-ray tube provided by the embodiment of the application, the center of the anode target is arranged on one side of the central line of the electron beam channel, namely, the center of the anode target is not overlapped with the central line of the electron beam channel, so that the electron beam emitted by the electron beam channel is offset towards one side where the anode target is located, and then the anode target is impacted in the incidence direction of the offset central line, so that the included angle between the anode target and the incidence direction is larger than the included angle between the anode target and the horizontal plane. Compared with the center of the anode target and the center line of the electron beam channel in the related art are overlapped, so that the included angle between the anode target and the incident direction is approximately equal to the included angle between the anode target and the horizontal plane.
Other advantages of the present application will be explained in more detail in connection with the following description and accompanying drawings.
It should be understood that the foregoing description is only an overview of the technical solutions of the present application so that the technical means of the present application may be more clearly understood and may be implemented in accordance with the content of the specification. The following specific embodiments of the present application are illustrated in order to make the above and other objects, features and advantages of the present application more comprehensible.
Drawings
The advantages and benefits described herein, as well as other advantages and benefits, will become apparent to those of ordinary skill in the art upon reading the following detailed description of the exemplary embodiments. The drawings are only for purposes of illustrating exemplary embodiments and are not to be construed as limiting the application. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
fig. 1 is a schematic diagram of an X-ray tube according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a micro focus X-ray tube according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a micro-focus X-ray tube according to an embodiment of the present application;
fig. 4 is a schematic view of a part of a cathode assembly according to an embodiment of the present application.
In the drawings, the list of components represented by the various numbers is as follows:
10 a housing; 11a first housing part; 11a first mounting port; 11b a second mounting port; 11c a fixing part; 11d connection parts; 11e a third mounting port; 12 exhaust ports; 13 a second housing portion; a 20 exit window; an anode assembly 30; 31 anode rod; 31a anode stem boss; a 32 anode target; 33 anode shield; 34 an adapter ring; a 40 cathode assembly; a 41 cathode casing; a 42 cathode; 421 bunching pole; 421a electron beam channels; 421b bundling holes; 422 gate; 422a gate hole; 423 cathode body; 424 gate lead; 425 hot wire ground lead; 426 hot wire leads; 427 cathode body leads; 43 cathode stem; 43a ground pin; 43b gate pin; 43c hot wire pins; 43d cathode body pins.
In the drawings, the same or corresponding reference numerals indicate the same or corresponding parts.
Detailed Description
Exemplary embodiments of the present application will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
In the description of embodiments of the present application, it should be understood that terms such as "comprises" or "comprising" are intended to indicate that the disclosed features, numbers, steps, acts, components, portions, or combinations thereof, are present in the specification, and do not preclude the presence or addition of one or more other features, numbers, steps, acts, components, portions, or combinations thereof.
Unless otherwise indicated, "/" means or, e.g., A/B may represent A or B; "and/or" herein is merely an association relationship describing an association object, and means that three relationships may exist, for example, a and/or B may mean: a exists alone, A and B exist together, and B exists alone.
The terms "first," "second," and the like are used merely for convenience of description to distinguish between the same or similar technical features, and are not to be construed as indicating or implying a relative importance or quantity of such technical features. Thus, a feature defined by "first," "second," etc. may explicitly or implicitly include one or more such feature. In the description of embodiments of the present application, the term "plurality" means two or more unless otherwise indicated.
Prior to the description of the technical solution of the present application, the technical background of the present application is described.
Currently, the energy conversion efficiency of an X-ray tube is typically around 1%, and the remaining 99% of the energy is converted to heat. As shown in fig. 1, the center of the anode target in the related art is generally coincident with the center line of the electron beam channel such that the direction of the electron beam emitted from the electron beam channel coincides with the center line 1 of the electron beam channel, i.e., the electron beam impinges on the anode target in a nearly horizontal direction. The angle a between the anode target and the incident direction is approximately equal to the angle between the anode target and the horizontal plane. Therefore, in the related art, the included angle a between the anode target and the incident direction is smaller, the interaction between electrons and the anode target is smaller, the X-ray generation efficiency is lower, and a large amount of secondary electrons are emitted near the anode target and bombard other materials near the target. This situation may lead to reduced vacuum near the anode target, which may further cause sparking and the like; sputtering of nearby material onto the exit window, artifacts, etc. may also be caused.
In order to solve the above-mentioned problems, the technical solution of the present application will be described in detail with reference to the accompanying drawings in combination with embodiments. In addition, it should be noted that, without conflict, the embodiments and features of the embodiments in the present application may be combined with each other.
Referring to fig. 2, a schematic view of a microfocus X-ray tube of the present application is shown.
As shown in fig. 2, a micro focus X-ray tube provided in an embodiment of the present application includes: a housing 10, an anode assembly 30, and a cathode assembly 40;
an electron beam passage 421a is provided in the cathode assembly 40, the anode assembly 30 includes an anode target 32, and the housing 10 includes an exit window 20;
the center of the anode target 32 is disposed on one side of the center line 1 of the electron beam passage 421a, and the exit window 20 is disposed on the other side of the center line 1 of the electron beam passage 421 a;
the angle between the anode target 32 and the horizontal plane is greater than 0 degrees and less than 90 degrees, the angle between the anode target 32 and the incident direction is greater than the angle between the anode target 32 and the horizontal plane, and the incident direction is the incident direction of the electron beam emitted by the electron beam channel 421a on the anode target 32.
It should be noted that, in the micro-focus X-ray tube provided in this embodiment of the present application, the center of the anode target 32 is disposed at one side of the center line of the electron beam channel 421a, that is, the center of the anode target 32 is not coincident with the center line of the electron beam channel 421a, so that the electron beam emitted by the electron beam channel 421a will deflect toward the side where the anode target 32 is located.
As an example, the anode target 32 in embodiments of the present application may be at an angle of 45 degrees to the horizontal. In some possible embodiments, the anode target 32 in embodiments of the present application may be perpendicular to the direction of incidence. When the anode target 32 is perpendicular to the incident direction, the electron beam may vertically strike the anode target 32, so that electrons in the electron beam perform a more sufficient action with the anode target 32, thereby improving the conversion efficiency of X-rays, reducing the generation of secondary electrons and reducing the occurrence of sparking and causing artifacts due to sputtering of the anode target 32 material onto the exit window 20.
As shown in fig. 3, the housing 10 in the embodiment of the present application includes a first housing portion 11 and a second housing portion 13; the end of the first housing part 11 is provided with a first opening and the end of the second housing part 13 is provided with a second opening, which interfaces with the first opening such that the first housing part 11 connects the second housing part 13 to form the housing 10. As a possible embodiment, the second housing part 13 can be connected to the first housing part 11 via a connection 11 d. The connection portion 11d may be located below the fixing portion 11 c. The first housing 11 may be integrally formed, and the material of the first housing 11 may be any one of stainless steel, oxygen-free copper, and monel. The second housing portion 13 may be made of an insulating material, and the material of the second housing portion 13 includes, but is not limited to, ceramics and glass. In this embodiment, the material of the connecting portion 11d may be kovar.
Wherein the first housing part 11 includes a first mounting port 11a, a second mounting port 11b, and a third mounting port 11e; the first mounting port 11a is located at an end portion of the first housing portion 11 opposite to the first opening, and the second mounting port 11b and the third mounting port 11e are located at side walls of the first housing portion 11; the first mounting port 11a is mounted with the exit window 20, the second mounting port 11b is mounted with the exhaust port 12, and the third mounting port 11e is mounted with the cathode assembly 40. The second housing part 13 includes a fourth mounting opening at an end of the second housing part 13 opposite the second opening, the fourth mounting opening mounting the anode assembly 30.
The first housing part 11 may be grounded in this embodiment. The grounding of the first housing portion 11 can reduce the accumulation of charge around the anode assembly 30, improve the withstand voltage performance of the microfocus X-ray tube in the embodiment of the present application, and improve the stability of electron emission and electric field focusing. In this embodiment, the material of the exhaust port 12 may be oxygen-free copper.
In this embodiment, the first mounting hole 11a may be located directly above the anode target 32, and the center point of the anode target 32 and the center point of the exit window 20 may be on the same vertical line, i.e. the center line 2. In an ideal case, the electron beam may bombard the anode target 32 along a normal direction of the anode target, thereby improving interaction between electrons and the anode target, resulting in higher X-ray generation efficiency. In this embodiment, the material of the exit window 20 may be beryllium or diamond; in the embodiment of the application, the thickness of the exit window 20 can be selected to be 0.05mm-0.20mm, which is more beneficial to the exit of X-rays.
As shown in fig. 3, the cathode assembly 40 in the embodiment of the present application includes a cathode 42, a cathode stem 43, and a cathode housing 41, and the cathode housing 41 is connected to the third mounting port 11e of the first housing part 11. The cathode 42 is mounted inside the cathode housing 41 on the side close to the housing 10, and the cathode stem 43 is mounted inside the cathode housing 41 on the side remote from the housing 10. The anode assembly 30 includes an anode stem 31, an anode target 32, an anode shield 33, and an adapter ring 34; one end of the anode rod 31 passes through the fourth mounting port and extends to the outside of the casing 10, and the other end of the anode rod 31 is provided with an anode target 32. The edge of one side of the anode rod 31, on which the anode target 32 is arranged, can be subjected to round corner treatment, so that the effect of uniform electric field around the anode rod 31 is achieved, and the electron emission is more stable and is not easy to strike fire.
The anode rod 31 is provided with an anode rod boss 31a on a side surface thereof, and the anode shield 33 is connected to one surface of the anode rod boss 31a, and the other surface of the anode rod boss 31a is connected to the second housing portion 13 via an adapter ring 34. The anode shielding cover 33 wraps part of the anode rod 31, so that the electric field distortion can be reduced, and the electric field stability can be improved. Anode rod 31 is made of, but not limited to, stainless steel, oxygen-free copper, and monel. Preferably, the anode target 32 may be made of tungsten or tungsten rhenium, and the anode target 32 made of tungsten or tungsten rhenium may improve the X-ray generation efficiency. Preferably, the anode shield 33 is made of stainless steel, which is easy to obtain a higher surface finish. Preferably, the adaptor ring 34 is made of kovar.
As shown in fig. 4, the cathode 42 in the embodiment of the present application includes a bunching electrode 421, a grid 422, a cathode body 423, and a cathode casing 41; the cathode casing 41 is connected to the first casing portion 11 through the third mounting port 11 e. An electron beam channel 421a is arranged on one side of the beam focusing electrode 421, which is close to the anode assembly 30, a grid electrode 422 is arranged on one side of the beam focusing electrode 421, which is far away from the anode assembly 30, and a cathode body 423 is arranged on one side of the grid electrode 422, which is far away from the anode assembly 30. The cathode housing 41 is made of materials including, but not limited to, stainless steel, kovar, nickel, and oxygen-free copper. Preferably, the cathode stem 43 is made of ceramic; preferably, the cathode 42 may be a hot cathode.
As shown in fig. 3 and 4, the cathode stem 43 is provided with a gate pin 43b, a hot wire pin 43c, a cathode body pin 43d, and a ground pin 43a. The side of the gate electrode 422 remote from the anode assembly 30 is provided with a gate lead 424, and the gate lead 424 may be connected to the gate lead 43b of the cathode stem 43 by a wire or a metal tape. The cathode body 423 is provided with a hot wire lead 426, a cathode body lead 427, and a hot wire ground lead 425 on a side remote from the anode assembly 30. The hot wire lead 426 in the embodiment of the present application may be connected to the hot wire pin 43c of the cathode stem 43, and the cathode body lead 427 is connected to the cathode body pin 43d of the cathode stem 43. The hot wire ground lead 425 connects to the ground pin 43a on the cathode stem 43.
It should be noted that, the cathode body 423 in the embodiment of the present application generally has a bias voltage between-1200V and-500V; the gate 422 typically has a bias between-1500V and-500V; the beam forming pole 421 typically has a ground potential. In the process of micro-focus X-ray tube operation, the cathode body 423 in the embodiment of the present application is heated by the heating wire, the electrons in the cathode body 423 break through the work function and break away from the cathode body 423 to enter into the vacuum, the grid 422 controls the electron generation process through the adjustment of the bias voltage, and the electrons enter into the electron beam channel 421a through the grid hole 422a and the beam focusing hole 421b, finally enter into the housing 10 and fly to the anode target 32.
In summary, in the micro-focus X-ray tube provided by the embodiment of the application, the center of the anode target is disposed at one side of the center line of the electron beam channel, that is, the center of the anode target is not coincident with the center line of the electron beam channel, so that the electron beam emitted by the electron beam channel is offset towards one side where the anode target is located, and then hits the anode target in the incidence direction of the offset center line, so that the included angle between the anode target and the incidence direction is greater than the included angle between the anode target and the horizontal plane, the electron beam bombards the anode target in a more vertical manner, the interaction between electrons and the anode target can be improved, the higher X-ray generation efficiency can be obtained, the generation of secondary electrons and the sparking situation can be reduced, the stability of the micro-focus X-ray tube can be improved, and the artifacts caused by sputtering of anode target materials onto the exit window can be reduced.
In the description of the present specification, descriptions with reference to the terms "some possible embodiments," "some embodiments," "examples," "specific examples," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiments or examples is included in at least one embodiment or example of the present application, and that the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples described in this specification and the features of the various embodiments or examples may be combined and combined by those skilled in the art without contradiction.
An embodiment of the present application provides an X-ray generating device including: the microfocus X-ray tube in the above embodiment.
It should be noted that, the apparatus in the embodiments of the present application may implement each process of the foregoing method embodiments and achieve the same effects and functions, which are not described herein again.
While illustrative embodiments of the application have been illustrated and described in detail in the drawings and foregoing description, the same is to be considered as illustrative and not restrictive in character, it being understood that only certain illustrative embodiments have been shown and described and that all changes and modifications that come within the spirit of the inventions as claimed are desired to be protected. It should be understood that while the use of words such as preferable, preferred or more preferred in the foregoing description indicate that features so described may be more desirable, it may not be necessary and embodiments without such features are contemplated as falling within the scope of the invention, which is defined in the appended claims. When reading the claims, it is intended that the claims be limited to only one term when words such as "a," "an," "at least one," or "at least one portion" are used, unless specifically stated to the contrary in the claims. When the language "at least a portion" and/or "a portion" is used, an item may include a portion and/or the entire item unless specifically stated to the contrary.
While the spirit and principles of the present application have been described above with reference to several embodiments, it should be understood that the application is not limited to the particular embodiments disclosed nor does the division of aspects mean that features in these aspects cannot be combined. The application is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.
Claims (15)
1. A microfocus X-ray tube, comprising: a housing, an anode assembly, and a cathode assembly;
an electron beam channel is arranged in the cathode assembly, the anode assembly comprises an anode target, and the shell comprises an exit window;
the center of the anode target is arranged on one side of the center line of the electron beam channel, and the exit window is arranged on the other side of the center line of the electron beam channel;
the included angle between the anode target and the horizontal plane is larger than 0 degree and smaller than 90 degrees, the included angle between the anode target and the incident direction is larger than the included angle between the anode target and the horizontal plane, and the incident direction is the incident direction of the electron beam emitted by the electron beam channel on the anode target.
2. The microfocus X-ray tube of claim 1, wherein the anode target is perpendicular to the direction of incidence.
3. The microfocus X-ray tube of claim 1, wherein the center point of the anode target is on the same vertical line as the center point of the exit window.
4. The microfocus X-ray tube of claim 1, wherein the housing comprises a first housing portion and a second housing portion;
the end of the first housing part is provided with a first opening, the end of the second housing part is provided with a second opening, and the second opening is in butt joint with the first opening, so that the second housing part is connected with the first housing part to form the housing.
5. The microfocus X-ray tube of claim 4, wherein the first housing portion comprises a first mounting port, a second mounting port, and a third mounting port;
the first mounting port is positioned at the end part of the first shell part opposite to the first opening, and the second mounting port and the third mounting port are positioned on the side wall of the first shell part;
the first mounting port is provided with the exit window, the second mounting port is provided with an exhaust port, and the third mounting port is provided with the cathode assembly.
6. The microfocus X-ray tube of claim 4, wherein the second housing portion comprises a fourth mounting port located at an end of the second housing portion opposite the second opening, the fourth mounting port mounting the anode assembly.
7. The microfocus X-ray tube of claim 5, wherein the cathode assembly comprises a cathode, a cathode stem and a cathode housing, the cathode housing being connected to the third mounting port of the first housing portion, the cathode being mounted on a side of the cathode housing interior adjacent the housing, the cathode stem being mounted on a side of the cathode housing interior remote from the housing.
8. The microfocus X-ray tube of claim 6, wherein the anode assembly comprises an anode stem, an anode target, an anode shield and an adapter ring;
one end of the anode rod penetrates through the fourth mounting opening and extends to the outside of the shell, an anode target is arranged at the other end of the anode rod, an anode rod boss is arranged on the side face of the anode rod, the anode shielding cover is connected with one face of the anode rod boss, and the other face of the anode rod boss is connected with the second shell through the adapter ring.
9. The microfocus X-ray tube of claim 6, wherein the edge of the anode stem on the side on which the anode target is mounted is rounded.
10. The microfocus X-ray tube of claim 7, wherein the cathode comprises a beamer, a grid, and a cathode body;
an electron beam channel is arranged on one side of the beam focusing electrode, which is close to the anode assembly, the grid electrode is arranged on one side of the beam focusing electrode, which is far away from the anode assembly, and the cathode body is arranged on one side of the grid electrode, which is far away from the anode assembly.
11. The microfocus X-ray tube of claim 10, wherein the cathode stem is provided with a gate pin, a hot wire pin and a cathode body pin;
the grid electrode is provided with a grid electrode lead wire which is connected with a grid electrode pin of the cathode core column;
the cathode body is provided with a hot wire lead and a cathode body lead, the hot wire lead is connected with the hot wire pin of the cathode stem, and the cathode body lead is connected with the cathode body pin of the cathode stem.
12. The microfocus X-ray tube of claim 7, wherein the cathode further comprises a cathode housing,
the cathode housing is connected to the first housing portion through the third mounting port.
13. The microfocus X-ray tube of any of claims 4-12, wherein the first housing portion is integrally formed and the material of the first housing portion comprises any one of stainless steel, oxygen free copper, or monel.
14. The microfocus X-ray tube of any one of claims 4-12, wherein the second housing portion is made of an insulating material.
15. An X-ray generating device, characterized in that it comprises: the microfocus X-ray tube of any one of claims 1-14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311451711.6A CN117423589A (en) | 2023-11-03 | 2023-11-03 | Micro-focus X-ray tube and X-ray generating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311451711.6A CN117423589A (en) | 2023-11-03 | 2023-11-03 | Micro-focus X-ray tube and X-ray generating device |
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| CN117423589A true CN117423589A (en) | 2024-01-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118588517A (en) * | 2024-08-06 | 2024-09-03 | 电子科技大学 | Micro-focus X-ray tube |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118588517A (en) * | 2024-08-06 | 2024-09-03 | 电子科技大学 | Micro-focus X-ray tube |
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