CN111540661A - Soft X-ray tube for eliminating static electricity - Google Patents
Soft X-ray tube for eliminating static electricity Download PDFInfo
- Publication number
- CN111540661A CN111540661A CN202010389003.4A CN202010389003A CN111540661A CN 111540661 A CN111540661 A CN 111540661A CN 202010389003 A CN202010389003 A CN 202010389003A CN 111540661 A CN111540661 A CN 111540661A
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- Prior art keywords
- soft
- ray tube
- beryllium window
- tube
- nickel
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- 230000003068 static effect Effects 0.000 title claims abstract description 26
- 230000005611 electricity Effects 0.000 title claims abstract description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 76
- 229910052790 beryllium Inorganic materials 0.000 claims abstract description 70
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims abstract description 70
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 38
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 32
- 239000010937 tungsten Substances 0.000 claims abstract description 32
- 239000000919 ceramic Substances 0.000 claims abstract description 23
- 239000012212 insulator Substances 0.000 claims abstract description 16
- 230000008030 elimination Effects 0.000 claims abstract description 10
- 238000003379 elimination reaction Methods 0.000 claims abstract description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000010931 gold Substances 0.000 claims description 13
- 229910000833 kovar Inorganic materials 0.000 claims description 10
- 238000010894 electron beam technology Methods 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 239000011888 foil Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000005219 brazing Methods 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000013077 target material Substances 0.000 description 5
- 238000002083 X-ray spectrum Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
Landscapes
- X-Ray Techniques (AREA)
Abstract
The invention discloses a soft X-ray tube for eliminating static electricity, which comprises a soft X-ray tube structure, wherein the soft X-ray tube structure is provided with a beryllium window, a beryllium window supporting rod and a ceramic insulator base made of 96% alumina, the beryllium window and the beryllium window supporting rod are brazed on the ceramic insulator base to form a thin circular structure, the cathode part of the soft X-ray tube structure is provided with an annular tungsten filament, a nickel electrode rod and a nickel beam tube, and the annular tungsten filament is assembled with the nickel beam tube after being spot-welded with the nickel electrode rod. The invention has the advantages that the invention mainly uses static elimination, has lower voltage (about 10 Kv) compared with other tubes, has simple structure, large irradiation angle (more than 130 degrees), easy static elimination, easy combination with a heat-proof device, and small size and can be installed in a narrow space.
Description
Technical Field
The invention relates to the field of X-ray tubes, in particular to a soft X-ray tube for eliminating static electricity.
Background
X-rays are generated when thermal electrons generated from a heated tungsten filament strike the target after acceleration by the tube voltage. If the velocity at the instant of collision of the accelerated electrons is v, the kinetic energy of the electrons is 1/2mv, and at the instant of stop of collision of the accelerated electrons, this kinetic energy is converted into X-rays and thermal energy, and the relationship "kinetic energy is 1/2mv ═ X-ray energy + thermal energy" is established. In the normal acceleration voltage range (150kv or less) for medical diagnosis, about 1% of the energy of incident electron beams is converted into X-rays, and 99% of the energy is converted into heat energy. Only a portion of the generated X-rays emanate within the available angle of illumination. However, when the acceleration is performed with high energy in MV unit, the efficiency of conversion into X-rays can be 40% or more. When the accelerated electrons collide with the target, they do not lose all energy instantaneously but release energy through any number of stages, each stage emitting X-rays of a corresponding arbitrary frequency to produce a continuous spectrum. The relationship between the maximum frequency of the generated X-ray spectrum and the acceleration voltage is as follows.
υM: maximum frequency of X-rays
V: electronic (e) acceleration voltage (tube voltage)
v: velocity of the electrons
m: mass of the electrons
The amount of X-rays generated is proportional to the atomic number of the target material, and when the electron beam hits the target in a high power X-ray tube, it is likely to be damaged by heat generated at the focal point, so that the heat capacity, thermal conductivity, melting point, etc. in addition to the atomic number of the target material are important considerations for analyzing whether the material is suitable for use as a target. Therefore, tungsten (W) or a tungsten alloy having a high melting point and a high atomic number is generally used as the target material. When gold (Au) having an atomic number of 79 is used as a target material, the amount of X-ray generation increases by about 7% compared to tungsten having an atomic number of 74 under the same acceleration energy.
The amount of X-rays generated is also related to the tube current and the tube voltage, and if the tube voltage is increased, the amount of X-rays generated increases in proportion to approximately the square of the voltage, and characteristic lines are generated depending on different target materials, and the generated X-ray spectrum shifts in the high-energy direction. The amount of X-rays (lint.) can be referred to the following equation.
lint.∝iZVb
i: tube current
Z: atomic number
V: accelerating voltage (tube voltage)
b: arbitrary constant (2)
The conventional soft X-ray tube for static elimination has a structure shown in fig. 2, and the structure shown in fig. 2 uses X-rays emitted in a direction 90 degrees to an electron beam. Although the target with such a structure has durability, it has a disadvantage of small irradiation angle (about 40 degrees) and has a disadvantage that it cannot dissipate heat accumulated in the anode to the outside in time due to the structure of the anode during continuous operation, and the entire temperature rises to cause a failure. Moreover, the cover is made of glass, which has a disadvantage of weak impact resistance. The static elimination device is generally installed in a small space, but the current X-ray tube is also limited in space if installed in a small device.
Disclosure of Invention
The invention aims to solve the problems and designs a soft X-ray tube for eliminating static electricity.
The technical scheme of the invention is that the soft X-ray tube for eliminating static electricity comprises a soft X-ray tube structure, wherein the soft X-ray tube structure is provided with a beryllium window, a beryllium window supporting rod and a ceramic insulator base made of 96% alumina, the beryllium window and the beryllium window supporting rod are brazed on the ceramic insulator base to form a thin circular structure, the cathode part of the soft X-ray tube structure is provided with an annular tungsten filament, a nickel electrode rod and a nickel beam tube, and the annular tungsten filament is assembled with the nickel beam tube after spot welding with the nickel electrode rod.
As a further explanation of the invention, the beryllium window supporting rod is brazed with the kovar joint, the beryllium window supporting rod and the kovar joint are welded by argon arc welding, the nickel electrode rod is provided with the supporting disk, and the part of the ceramic insulator base, which is brazed with the beryllium window supporting rod, of the kovar joint and the part of the supporting disk, which is brazed with the supporting disk, of the supporting nickel electrode rod are metallized by molybdenum paste.
As a further description of the present invention, the beryllium window is formed by brazing an X-ray transparent beryllium foil disc to the beryllium window support rod, the beryllium window uses a beryllium foil of 0.12t as a transparent window, and the aperture of the beryllium window is consistent with that of the nickel beam tube.
As a further explanation of the invention, an insulating ceramic tube and an annular filament support rod are also arranged in the nickel bundling tube and are respectively connected with the annular tungsten filament.
As a further description of the present invention, a gold plated target is disposed inside the beryllium window, X-rays generated when accelerated thermal electrons collide with the target are in the same direction as an electron beam, gold (Au) with a high atomic number is selected as gold plating on the target to increase the amount of X-rays generated, and the target is grounded.
As a further explanation of the present invention, in order to form a circular focus concentric with the beryllium window on the target, the assembly structure of the nickel cluster tube and the annular tungsten filament is assembled in proportion, wherein the proportion is D: b: c is 1:2:4, wherein B is the distance between the tungsten filament and the side edge of the bundling tube groove, C is the distance between the tungsten filament and the bottom surface of the bundling tube groove, and D is the distance between the tungsten filament and the upper surface of the bundling tube groove.
As a further explanation of the invention, heat generated at the focal point of the target when X-rays are generated is dissipated through the beryllium window, and part of the heat can be discharged outwards through the beryllium window supporting rod.
As a further description of the present invention, the beryllium window supporting rod is provided with a fixing plug for separately splicing a heat-proof device.
As a further explanation of the present invention, the soft X-ray tube structure is a partially symmetrical structure, and a vacuum exhaust pipe for vacuum exhaust is brazed on a ceramic insulator base at one end of the soft X-ray tube structure.
The invention has the advantages that the invention can effectively eliminate static electricity due to large irradiation angle (more than 130 degrees) when emitting X-ray, simplifies the internal structure to ensure that the device has a thin appearance structure so as to be conveniently installed in a narrow space, is particularly easy to be installed on a rod-shaped static electricity eliminating device, can prolong the service life of a gold-plated target pole due to the adoption of a ring-shaped filament to form a larger focus concentric circle with a beryllium window, improves the impact resistance compared with other products with simplified structures and structures with ceramic insulators and beryllium window supporting rods, has lower voltage (about 10 Kv) compared with other tubes for other purposes, and is easier to combine with a heat-proof device in consideration of heat protection.
Drawings
Fig. 1 is a schematic structural view of a soft X-ray tube according to the present invention;
FIG. 2 is a cross-sectional view of a nickel cluster tube according to the present invention;
FIG. 3 is a schematic view of the operational circuit of the soft X-ray tube of the present invention;
in the figure, 2-1, beryllium window; 2-2, beryllium window supporting rods; 2-3, a target; 2-4, nickel bundling tube; 2-5, ring-shaped tungsten filament; 2-6, a ceramic insulator base; 2-7, kovar joint; 2-8, supporting the disc; 2-9, nickel electrode rod; 2-10, vacuum exhaust pipe; 2-11, fixing plug; 2-12, insulating ceramic tubes; 2-13, a ring-shaped filament support rod; 3-1, heating a power supply; 3-2, a high-voltage power supply; 3-3, grounding.
Detailed Description
First, the present invention is designed initially, and the prior art has a structure including an anode, a target, a collector tube, an insulating ceramic, a glass cover, a beryllium window support rod, and a beryllium window, which has a disadvantage of a small irradiation angle, and is not able to timely dissipate heat accumulated in the anode to the outside to cause a failure of the whole temperature rise easily due to the structure of the anode during continuous operation.
The invention will be described in detail with reference to the accompanying drawings, as shown in fig. 1 and fig. 2, a soft X-ray tube for eliminating static electricity comprises a soft X-ray tube structure, the soft X-ray tube structure is provided with a beryllium window 2-1, a beryllium window support rod 2-2 and a ceramic insulator base 2-6 made of 96% alumina, the beryllium window 2-1 and the beryllium window support rod 2-2 are brazed on the ceramic insulator base 2-6 to form a thin circular structure, a cathode part of the soft X-ray tube structure is provided with an annular tungsten filament 2-5, a nickel electrode rod 2-9 and a nickel beam tube 2-4, the annular tungsten filament 2-5 is spot-welded with the nickel electrode rod 2-9 and then assembled with the nickel beam tube 2-4, the nickel beam tube 2-4 is provided with an insulating ceramic tube 2-12 and an annular filament support rod 2-13, the nickel electrode rods 2-9 are inserted into the ceramic insulating tube, the ceramic insulating tube plays a role of insulating voltage, one end of the annular filament tube is connected with the annular tungsten filament 2-5, and the other end of the annular filament tube is embedded in the nickel bundling tube 2-4, so that a supporting function is mainly provided for the annular tungsten filament 2-5, and the annular tungsten filament 2-5 is prevented from sliding.
A gold-plated target 2-3 is arranged in the beryllium window 2-1, and the target 2-3 is grounded, in order to form a circular focus concentric with the beryllium window 2-1 on the foil target 2-3 plated with gold (Au) on the beryllium window 2-1, the assembly structure of the nickel beam tube 2-4 and the annular tungsten filament 2-5 is required to be D: b: the distance between the target 2-3 and the filament is 8mm, A is 15 phi (the aperture of the bundling tube is the aperture of the beryllium window 2-1), the depth of the bundling tube groove is 5mm, D is 1mm, B is 2mm, C is 4mm, wherein A is the aperture of the bundling tube slot, B is the distance between the tungsten filament and the side edge of the bundling tube slot, C is the distance between the tungsten filament and the bottom surface of the bundling tube slot, and D is the distance between the tungsten filament and the upper surface of the bundling tube slot.
The beryllium window 2-1 is formed by brazing a beryllium foil disc which is penetrated by X rays on a beryllium window supporting rod 2-2, a Kovar joint 2-7 is brazed on the beryllium window supporting rod 2-2, a supporting disc 2-8 is arranged on a nickel electrode rod 2-9, a ceramic insulator is a part which is used for assembling all components and plays a role of a base, and the part of the Kovar joint 2-7 brazed with the beryllium window supporting rod 2-2 and the part of the supporting disc 2-8 brazed with the nickel electrode rod 2-9 need to be metalized by molybdenum paste. Furthermore, 20KV withstand voltage test was performed in order to sufficiently insulate the nickel electrode rod 2 to 9 when a voltage of about 10KV was applied.
The X-ray emitted from the soft X-ray tube for eliminating static electricity has low energy in the soft X-ray field, and 0.12t of beryllium foil is used as a transmission window. And the irradiation angle is a very important parameter in the soft X-ray tube for eliminating static electricity, and mainly depends on the size of the beryllium window 2-1 and the structure of the beryllium window supporting rod 2-2. In the present invention, the X-ray generated when accelerated thermal electrons strike the gold-plated target 2-3 inside the beryllium window 2-1 is in the same direction as the electron beam, and the irradiation angle is increased in this structure, so that it is very advantageous for eliminating static electricity. When X-rays occur, heat generated on the focus of the target 2-3 in the beryllium window 2-1 is dissipated through the beryllium window 2-1, and part of the heat is discharged outwards through the beryllium window supporting rod 2-2, so that the heat is more easily discharged if the heat-proof structure is arranged on the supporting rod. And because the input voltage is low, the electron beam will not generate heat at the moment of focus generation when colliding with the target electrode 2-3, so the target electrode 2-3 selects gold (Au) with high atomic number to increase the X-ray generation amount. The size of the focus in the static eliminating device is irrelevant, and in order to reduce the damage to the focus part of the target 2-3 caused by long-time work as much as possible, an annular lamp filament is arranged to form a large focus concentric with the beryllium window 2-1 on the target 2-3. In order to more effectively discharge the heat conducted to the support rod of the beryllium window 2-1, a fixing plug 2-11 is designed thereon so as to additionally splice a heat-proof device. If the electron beam forms a small focal spot, the target 2-3 near the focal spot is damaged very quickly and the ability to generate X-rays will be drastically reduced.
The beryllium window supporting rod 2-2 and the kovar joint 2-7 are used for integral assembly and are finished by argon arc welding, and the whole assembly sequence is shown in figure 3. The soft X-ray tube structure is a local symmetrical structure, a vacuum exhaust pipe 2-10 for vacuum exhaust is brazed on a ceramic insulator base 2-6 at one end of the soft X-ray tube structure, vacuum exhaust is carried out through the vacuum exhaust pipe 2-10 in the state of assembly, baking is carried out after the vacuum degree reaches-10-9 torr, and sealing is carried out when the vacuum degree reaches-10-7 torr in the heating state.
As shown in fig. 2, which is a schematic view of the operation loop of the soft X-ray tube of the present invention, the present invention heats the annular tungsten filament 2-5 by applying a heating power supply 3-1VF to the nickel electrode rod 2-9 to generate thermal electrons, and accelerates the generated thermal electrons by applying a negative high voltage to the cathode of the soft X-ray tube structure by applying a high voltage 3-2 VH. The accelerated electron beam is focused by a nickel focusing tube 2-4 and then impinges on a gold-plated target 2-3 to generate X-rays, and then the X-rays are emitted through a range of the size of the irradiation angle of the soft X-ray tube structure, wherein the target 2-3 is grounded 3-3. The operation conditions are that the tube voltage is-10 Kv, the tube current is 0.6mA, the heating voltage of the annular tungsten filament is 2-5V, and the heating current of the annular tungsten filament is 2-5A, the X-ray quantity is measured by a measuring instrument at the position 2-11m away from the beryllium window in the indoor atmosphere. The measured X-ray dose is central (0 degrees): 20000mR/hr,20 degree: 20000mR/hr,40 degree: 19000mR/hr,50 degrees: 17000mR/hr,60 degree: 15000mR/hr,65 degrees: 11000mR/hr, which is sharply reduced by several thousand mR/hr at 70 degrees. According to the measured data, it can be confirmed that the irradiation angle of the present invention is 130 degrees, which is much larger than the irradiation angle of 40 degrees of the conventional soft X-ray tube, and the silence can be effectively eliminated.
The technical solutions described above only represent the preferred technical solutions of the present invention, and some possible modifications to some parts of the technical solutions by those skilled in the art all represent the principles of the present invention, and fall within the protection scope of the present invention.
Claims (9)
1. The soft X-ray tube for eliminating static electricity is characterized by comprising a soft X-ray tube structure, wherein the soft X-ray tube structure is provided with a beryllium window, a beryllium window supporting rod and a ceramic insulator base made of 96% alumina, the beryllium window and the beryllium window supporting rod are brazed on the ceramic insulator base to form a thin circular structure, an annular tungsten filament, a nickel electrode rod and a nickel beam tube are arranged at the cathode part of the soft X-ray tube structure, and the annular tungsten filament is spot-welded with the nickel electrode rod and then assembled with the nickel beam tube.
2. The soft X-ray tube for eliminating static electricity according to claim 1, wherein a kovar joint is brazed on the beryllium window support rod, the beryllium window support rod and the kovar joint are welded by argon arc welding, a support disk is disposed on the nickel electrode rod, and a part of the kovar joint brazed on the ceramic insulator base and the beryllium window support rod and a part of the support disk brazed on the nickel electrode rod are metalized with molybdenum paste.
3. The soft X-ray tube for static elimination according to claim 1, wherein the beryllium window is formed by brazing an X-ray transparent beryllium foil disc to the beryllium window support rod, the beryllium window is a 0.12t beryllium foil as a transparent window, and the aperture of the beryllium window is consistent with that of the nickel cluster tube.
4. The soft X-ray tube for static elimination according to claim 1, wherein an insulating ceramic tube and an annular filament support rod are further provided in the nickel cluster tube, and are connected to the annular tungsten filament, respectively.
5. The soft X-ray tube for static elimination according to claim 1, wherein a gold-plated target is provided inside the beryllium window, X-rays generated when accelerated thermal electrons collide with the target are in the same direction as an electron beam, gold (Au) having a high atomic number is selected for gold plating on the target to increase an amount of X-rays generated, and the target is grounded.
6. The soft X-ray tube for removing static electricity according to claim 4, wherein the nickel cluster tube and the annular tungsten filament are assembled in a ratio of (D: B: C) 1:2:4, wherein (B) is a distance between the tungsten filament and a side of the cluster tube slot, (C) is a distance between the tungsten filament and a bottom surface of the cluster tube slot, and (D) is a distance between the tungsten filament and an upper surface of the cluster tube slot, so as to form a circular focus concentric with the beryllium window on the target.
7. The soft X-ray tube for static elimination according to claim 4, wherein heat generated at a focal point of the target when X-rays are generated is dissipated through the beryllium window, and a part of the heat is discharged to the outside through the beryllium window support rod.
8. The soft X-ray tube for static elimination of claim, wherein a fixing plug for a separate splicing heat shield is provided on the beryllium window support bar.
9. The soft X-ray tube for static elimination according to claim 1, wherein the soft X-ray tube structure is a partially symmetrical structure, and a vacuum exhaust tube for vacuum exhaust is soldered to a ceramic insulator base at one end of the soft X-ray tube structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010389003.4A CN111540661A (en) | 2020-05-09 | 2020-05-09 | Soft X-ray tube for eliminating static electricity |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010389003.4A CN111540661A (en) | 2020-05-09 | 2020-05-09 | Soft X-ray tube for eliminating static electricity |
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| Publication Number | Publication Date |
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| CN111540661A true CN111540661A (en) | 2020-08-14 |
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| CN202010389003.4A Pending CN111540661A (en) | 2020-05-09 | 2020-05-09 | Soft X-ray tube for eliminating static electricity |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2760320C1 (en) * | 2021-04-13 | 2021-11-23 | Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г.Ромашина" | Method for manufacturing a vacuum-tight beryllium outlet window |
| RU2815735C1 (en) * | 2023-03-22 | 2024-03-21 | Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г. Ромашина" | Method of making vacuum-tight outlet beryllium window |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060009146A (en) * | 2004-07-20 | 2006-01-31 | 박래준 | Soft x-ray tube with free oxygen copper bulb for heat sink and radiation of heat |
| KR20060014925A (en) * | 2004-08-12 | 2006-02-16 | 윈테크주식회사 | Soft x-ray tube for static charge eliminator |
| KR20060032977A (en) * | 2006-03-24 | 2006-04-18 | 박래준 | Soft x-ray tube with field emission cold cathode by using carbon nano tube |
-
2020
- 2020-05-09 CN CN202010389003.4A patent/CN111540661A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060009146A (en) * | 2004-07-20 | 2006-01-31 | 박래준 | Soft x-ray tube with free oxygen copper bulb for heat sink and radiation of heat |
| KR20060014925A (en) * | 2004-08-12 | 2006-02-16 | 윈테크주식회사 | Soft x-ray tube for static charge eliminator |
| KR20060032977A (en) * | 2006-03-24 | 2006-04-18 | 박래준 | Soft x-ray tube with field emission cold cathode by using carbon nano tube |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2760320C1 (en) * | 2021-04-13 | 2021-11-23 | Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г.Ромашина" | Method for manufacturing a vacuum-tight beryllium outlet window |
| RU2815735C1 (en) * | 2023-03-22 | 2024-03-21 | Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г. Ромашина" | Method of making vacuum-tight outlet beryllium window |
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Application publication date: 20200814 |