CN117419498B - Gradual cooling device and cooling method thereof - Google Patents
Gradual cooling device and cooling method thereof Download PDFInfo
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- CN117419498B CN117419498B CN202311735372.4A CN202311735372A CN117419498B CN 117419498 B CN117419498 B CN 117419498B CN 202311735372 A CN202311735372 A CN 202311735372A CN 117419498 B CN117419498 B CN 117419498B
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- 238000001816 cooling Methods 0.000 title claims abstract description 288
- 239000000463 material Substances 0.000 claims abstract description 148
- 239000007788 liquid Substances 0.000 claims abstract description 124
- 230000007246 mechanism Effects 0.000 claims abstract description 88
- 238000003860 storage Methods 0.000 claims abstract description 57
- 239000000110 cooling liquid Substances 0.000 claims abstract description 48
- 230000008859 change Effects 0.000 claims abstract description 8
- 239000000498 cooling water Substances 0.000 claims description 29
- 230000005540 biological transmission Effects 0.000 claims description 18
- 238000006073 displacement reaction Methods 0.000 claims description 17
- 238000007599 discharging Methods 0.000 claims description 15
- 230000000750 progressive effect Effects 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 230000004308 accommodation Effects 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 239000011120 plywood Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 239000002826 coolant Substances 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000005253 cladding Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002700 tablet coating Substances 0.000 description 1
- 238000009492 tablet coating Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D15/00—Devices not covered by group F25D11/00 or F25D13/00, e.g. non-self-contained movable devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D25/00—Charging, supporting, and discharging the articles to be cooled
- F25D25/02—Charging, supporting, and discharging the articles to be cooled by shelves
- F25D25/028—Cooled supporting means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
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- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
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Abstract
The invention discloses a gradual cooling device and a cooling method thereof, and relates to the technical field of semiconductors. The gradual cooling device comprises a cooling bin, a storage box, an annular cooling pipe, a temperature sensor and a variable-frequency liquid cooling mechanism. The storage box is arranged in the cooling bin, the storage box is provided with a containing cavity for containing the tablets, the annular cooling pipe is fixedly arranged in the cooling bin and is surrounded outside the containing cavity and connected with the variable frequency liquid cooling mechanism, the variable frequency liquid cooling mechanism is electrically connected with the temperature sensor, the temperature sensor is used for detecting the initial temperature of the tablets, and the variable frequency liquid cooling mechanism is used for conveying cooling liquid with the temperature reduced according to the preset speed to the annular cooling pipe according to the material, the thickness and the initial temperature of the tablets so as to liquid cool the tablets. The gradual cooling device provided by the invention can carry out gradual temperature change type liquid cooling on the material sheets, so that the cooling efficiency is improved as much as possible under the condition of ensuring the quality of the material sheets, the boxing period is shortened, and the production efficiency is improved.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a gradual cooling device and a cooling method thereof.
Background
At present, in the semiconductor production process, the temperature of the tablet is higher after coating, and the tablet box for containing the tablet is made of plastic and cannot resist high temperature, so that the tablet after coating is cooled and then is put into the tablet box, so that the tablet box is prevented from being damaged due to high temperature. At present, the mode of cooling the tablet is generally air cooling or constant temperature water cooling, wherein, the cooling efficiency of air cooling is lower, leads to the boxing cycle of tablet longer, influences production efficiency, and constant temperature water cooling can make the temperature of tablet reduce rapidly to lead to tablet warpage, tablet cladding material compactness inhomogeneous scheduling problem.
In view of the above, it is important to design and manufacture a gradual cooling device and a cooling method thereof, which can improve the cooling efficiency and ensure the quality of the material sheets, especially in the semiconductor production.
Disclosure of Invention
The invention aims to provide a gradual cooling device which can carry out gradual temperature change type liquid cooling on a tablet, so that the cooling efficiency is improved as much as possible under the condition of ensuring the tablet quality, the boxing period is shortened, and the production efficiency is improved.
Another object of the present invention is to provide a cooling method of a progressive cooling device, which can perform temperature progressive liquid cooling on a web, so as to improve cooling efficiency as much as possible while ensuring quality of the web, shorten a boxing period, and improve production efficiency.
The invention is realized by adopting the following technical scheme.
The utility model provides a gradual change formula cooling device, including cooling storehouse, the storage box, annular cooling tube, temperature sensor and frequency conversion liquid cooling mechanism, the storage box sets up in the cooling storehouse, the storage box is provided with the holding cavity that is used for holding the tablet, annular cooling tube fixed mounting is in the cooling storehouse, and enclose and locate the holding cavity outside, and be connected with frequency conversion liquid cooling mechanism, frequency conversion liquid cooling mechanism is connected with the temperature sensor electricity, temperature sensor is used for detecting the initial temperature of tablet, frequency conversion liquid cooling mechanism is used for according to the material of tablet, thickness and initial temperature to annular cooling tube transport temperature according to the coolant liquid that presets the speed reduction, in order to carry out the liquid cooling to the tablet.
Optionally, the variable frequency liquid cooling mechanism includes feed liquor pipe, drain pipe, cooling water machine and variable frequency heater, and cooling water machine, feed liquor pipe, annular cooling pipe and drain pipe enclose into the circulation liquid way jointly, and variable frequency heater installs on the feed liquor pipe, and variable frequency heater is used for carrying out variable frequency heating to cooling liquid of cooling water machine output to make the temperature of cooling liquid reduce according to predetermineeing the speed.
Optionally, the annular cooling pipe comprises an annular section, a liquid inlet section and a liquid outlet section, wherein the liquid inlet section and the liquid outlet section are oppositely arranged at two ends of the annular section and are communicated with the annular section, the liquid inlet section is connected with the liquid inlet pipe, and the liquid outlet section is connected with the liquid outlet pipe.
Optionally, the gradual change type cooling device further comprises a lifting mechanism, the cooling bin is provided with a material passing hole, the material passing hole and the annular cooling pipe are arranged in a staggered mode, the lifting mechanism is connected with the material storage box, and the lifting mechanism is used for driving the material storage box to ascend or descend so that the position of the accommodating cavity corresponds to the position of the material passing hole or the annular cooling pipe.
Optionally, the material passing hole comprises a feeding hole and a discharging hole, and the feeding hole and the discharging hole are oppositely arranged at two sides of the cooling bin and are positioned on the same plane.
Optionally, a temperature sensor is fixedly installed in the cooling bin and is arranged close to the feeding hole, and the temperature sensor is used for measuring the temperature of the material sheet fed from the feeding hole so as to obtain the initial temperature of the material sheet.
Optionally, the number of the accommodating cavities is multiple, the accommodating cavities are stacked in the storage box, each accommodating cavity is used for accommodating one tablet, and the material passing opening or the annular cooling pipe is used for selectively corresponding to the position of one accommodating cavity under the action of the lifting mechanism.
Optionally, elevating system includes base, driving motor, drive assembly, slider and transfer line, and driving motor installs on the base, and is connected with the slider transmission through drive assembly, slider and base sliding fit, and the one end and the slider of transfer line are connected, and the other end is connected with the storage box.
Optionally, the drive assembly includes first band pulley, drive belt, second band pulley, lead screw and nut, and first band pulley and second band pulley are all rotationally installed on the base, and driving motor is connected with first band pulley, and first band pulley passes through the drive belt to be connected with the second band pulley, and the second band pulley is connected with the lead screw, and the nut cover is located outside the lead screw, and with lead screw threaded fit to be connected with the slider.
Optionally, the lifting mechanism further comprises a displacement sensor, wherein the displacement sensor is electrically connected with the driving motor, and the displacement sensor is used for detecting the displacement of the sliding block so as to conveniently perform servo control on the driving motor.
Optionally, the storage box includes first plywood, connecting plate and second plywood, and first plywood and second plywood parallel interval set up, and first plywood passes through the connecting plate to be connected with the second plywood, forms the accommodation cavity between first plywood and the second plywood.
Optionally, first cooling water course has been seted up to first plywood, and the second cooling water course has been seted up to the second plywood, and first cooling water course and second cooling water course all meander the setting, and all are connected with the frequency conversion liquid cooling mechanism, and frequency conversion liquid cooling mechanism is used for carrying the coolant liquid to annular cooling tube, first cooling water course and second cooling water course simultaneously.
The cooling method of the gradual cooling device is applied to the gradual cooling device, and the cooling method of the gradual cooling device comprises the following steps: the material and thickness of the material obtaining sheet are obtained; detecting an initial temperature of the web using a temperature sensor; and conveying cooling liquid with the temperature reduced according to a preset rate to the annular cooling pipe by using the variable-frequency liquid cooling mechanism so as to liquid-cool the material sheets, wherein the preset rate is calculated according to the material quality, thickness and initial temperature of the material sheets.
Optionally, the initial temperature of the cooling liquid conveyed to the annular cooling pipe by the variable-frequency liquid cooling mechanism is the same as the initial temperature of the material sheet, and the range is 200-300 ℃; the preset rate ranges from 2 degrees celsius/second to 5 degrees celsius/second; the end temperature range of the cooling liquid delivered to the annular cooling pipe by the variable frequency liquid cooling mechanism is 25-50 ℃.
Optionally, the gradual cooling device further comprises a lifting mechanism, and the cooling bin is provided with a material passing opening; the variable frequency liquid cooling mechanism is used for conveying cooling liquid with the temperature reduced according to a preset speed to the annular cooling pipe so as to liquid-cool the material sheets, wherein before the step of calculating the preset speed according to the material, thickness and initial temperature of the material sheets, the cooling method of the gradual change type cooling device further comprises the following steps: the lifting mechanism is utilized to drive the storage box to move so that the position of the accommodating cavity corresponds to the position of the material passing opening; feeding the material sheets to the accommodating cavity through the material passing opening by using a mechanical arm; the lifting mechanism is utilized to drive the storage box to move so that the position of the accommodating cavity corresponds to the position of the annular cooling pipe; the variable frequency liquid cooling mechanism is used for conveying cooling liquid with the temperature reduced according to a preset speed to the annular cooling pipe so as to liquid-cool the material sheets, wherein after the step of calculating the preset speed according to the material, the thickness and the initial temperature of the material sheets, the cooling method of the gradual change type cooling device further comprises the following steps: the lifting mechanism is utilized to drive the storage box to move so that the position of the accommodating cavity corresponds to the position of the material passing opening; and taking out the material sheets in the accommodating cavity through the material passing opening by using the mechanical arm.
The gradual cooling device and the cooling method thereof provided by the invention have the following beneficial effects:
the gradual change type cooling device provided by the invention is characterized in that a storage box is arranged in a cooling bin, the storage box is provided with a containing cavity for containing a tablet, an annular cooling pipe is fixedly arranged in the cooling bin and is surrounded outside the containing cavity and connected with a variable frequency liquid cooling mechanism, the variable frequency liquid cooling mechanism is electrically connected with a temperature sensor, the temperature sensor is used for detecting the initial temperature of the tablet, and the variable frequency liquid cooling mechanism is used for conveying cooling liquid with the temperature reduced according to a preset rate to the annular cooling pipe according to the material, thickness and initial temperature of the tablet so as to liquid-cool the tablet. Compared with the prior art, the gradual cooling device provided by the invention adopts the annular cooling pipe which is arranged outside the accommodating cavity in a surrounding manner and the variable frequency liquid cooling mechanism which is connected with the annular cooling pipe, so that the gradual cooling of the temperature of the material sheet can be carried out, the cooling efficiency is improved as much as possible under the condition of ensuring the quality of the material sheet, the boxing period is shortened, and the production efficiency is improved.
The cooling method of the gradual cooling device provided by the invention is applied to the gradual cooling device, can carry out gradual temperature liquid cooling on the material sheets, improves the cooling efficiency as much as possible under the condition of ensuring the quality of the material sheets, shortens the boxing period and improves the production efficiency.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a gradual cooling device according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a storage box disposed in a cooling bin in the gradual cooling device according to the first embodiment of the present invention;
fig. 3 is a schematic structural diagram of a connection between a lifting mechanism and a storage box in the gradual cooling device according to the first embodiment of the present invention;
fig. 4 is a schematic structural diagram of a lifting mechanism in the gradual cooling device according to the first embodiment of the present invention;
FIG. 5 is a block diagram showing the steps of a cooling method of the progressive cooling apparatus according to the first embodiment of the present invention;
fig. 6 is a schematic structural diagram of a storage box in the gradual cooling device according to the second embodiment of the present invention.
Icon: 100-gradual cooling device; 110-cooling bin; 111-a material passing opening; 112-a feed inlet; 113-a discharge port; 120-a storage box; 121-accommodating the cavity; 122-a first laminate; 123-connecting plates; 124-a second laminate; 125-third laminate; 126-fourth laminate; 127-first cooling water channel; 128-a second cooling water channel; 129-insulating layer; 130-annular cooling tube; 131-ring segments; 132-a liquid inlet section; 133-a liquid outlet section; 140-a temperature sensor; 150-a variable frequency liquid cooling mechanism; 151-liquid inlet pipe; 152-a liquid outlet pipe; 153-a water chiller; 154-a variable frequency heater; 160-lifting mechanism; 161-base; 162-drive motor; 163-drive assembly; 1631-a first pulley; 1632-a drive belt; 1633-a second pulley; 1634-a screw rod; 1635-a nut; 164-a slider; 165-a transmission rod; 166-displacement sensor.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "inner", "outer", "upper", "lower", "horizontal", etc., are directions or positional relationships based on those shown in the drawings, or those that are conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific direction, be configured and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "connected," "mounted," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Some embodiments of the present invention are described in detail below with reference to the accompanying drawings. Features of the embodiments described below may be combined with each other without conflict.
First embodiment
Referring to fig. 1 and 2 in combination, a progressive cooling device 100 for cooling a coated web is provided in an embodiment of the invention. The device can carry out temperature gradient type liquid cooling on the material sheets, so that the cooling efficiency is improved as much as possible under the condition of ensuring the quality of the material sheets, the boxing period is shortened, and the production efficiency is improved.
The progressive cooling apparatus 100 includes a cooling bin 110, a magazine 120, an annular cooling tube 130, a temperature sensor 140, a variable frequency liquid cooling mechanism 150, and a lifting mechanism 160. Wherein, the storage box 120 is disposed in the cooling bin 110, the storage box 120 is provided with a containing cavity 121 for containing the tablet, and the tablet is disposed in the containing cavity 121. The annular cooling tube 130 is fixedly installed in the cooling bin 110, is enclosed outside the accommodating cavity 121 and is connected with the variable frequency liquid cooling mechanism 150, and the position of the annular cooling tube 130 corresponds to the position of the accommodating cavity 121, namely, the annular cooling tube 130 is enclosed outside the material sheet, and a certain gap is formed between the annular cooling tube 130 and the material sheet so as to liquid-cool the peripheral side of the material sheet. The variable frequency liquid cooling mechanism 150 is electrically connected to the temperature sensor 140, the temperature sensor 140 is used for detecting the initial temperature of the web, and the variable frequency liquid cooling mechanism 150 is used for delivering cooling liquid (cooling water, cooling oil or other cooling medium) with the temperature reduced according to a preset rate to the annular cooling tube 130 according to the material, thickness and initial temperature of the web, so as to liquid-cool the web. In this way, the temperature of the cooling liquid is reduced according to the preset rate, namely, the temperature of the cooling liquid is reduced along with the reduction of the temperature of the tablet, so that the gradual liquid cooling of the temperature of the tablet is realized, the rapid reduction of the temperature of the tablet is avoided, the problems of tablet warping, uneven tablet coating compactness and the like are avoided, the cooling efficiency is improved as much as possible under the condition of ensuring the tablet quality, the boxing period is shortened, and the production efficiency is improved.
It should be noted that, the cooling bin 110 is provided with a material passing hole 111, and the material passing hole 111 and the annular cooling tube 130 are arranged in a staggered manner, that is, the height of the material passing hole 111 is different from that of the annular cooling tube 130, and the material passing hole 111 is used for passing a feeding sheet so as to realize feeding and discharging of the feeding sheet. Specifically, the lifting mechanism 160 is connected to the storage box 120, and the lifting mechanism 160 is used to drive the storage box 120 to rise or fall, so that the position of the accommodating cavity 121 corresponds to the position of the material passing hole 111 or the annular cooling tube 130. When the position of the accommodating cavity 121 corresponds to the position of the material passing hole 111, the manipulator can extend into the accommodating cavity 121 through the material passing hole 111 so as to realize feeding and discharging of the material sheets; when the position of the accommodating cavity 121 corresponds to the position of the annular cooling tube 130, the annular cooling tube 130 can perform temperature-gradient liquid cooling on the material sheet in the accommodating cavity 121, so as to improve the cooling efficiency as much as possible under the condition of ensuring the quality of the material sheet.
Further, the material passing hole 111 comprises a material feeding hole 112 and a material discharging hole 113, the material feeding hole 112 and the material discharging hole 113 are oppositely arranged at two sides of the cooling bin 110 and are positioned on the same plane, namely, the height of the material feeding hole 112 is the same as that of the material discharging hole 113, the material feeding hole 112 is used for feeding the material feeding sheet, and the material discharging hole 113 is used for discharging the material feeding sheet. In this embodiment, the plane of the inlet 112 and the outlet 113 is higher than the plane of the annular cooling tube 130, i.e. the height of the inlet 112 and the outlet 113 is higher than the height of the annular cooling tube 130. In the feeding process, the lifting mechanism 160 is used for driving the storage box 120 to lift up so that the accommodating cavity 121 and the feeding port 112 are positioned on the same plane, and then the mechanical arm is used for feeding the tablet into the accommodating cavity 121 through the feeding port 112; in the cooling process, the lifting mechanism 160 is utilized to drive the material storage box 120 to descend so that the accommodating cavity 121 and the annular cooling pipe 130 are positioned on the same plane, and then the variable frequency liquid cooling mechanism 150 is utilized to input cooling liquid into the annular cooling pipe 130 so as to perform temperature gradient type liquid cooling on the material sheets in the accommodating cavity 121; in the discharging process, the lifting mechanism 160 is used to drive the storage box 120 to lift, so that the accommodating cavity 121 and the discharging hole 113 are located on the same plane, and then the material sheets in the accommodating cavity 121 are taken out through the discharging hole 113 by using a mechanical arm.
In this embodiment, the temperature sensor 140 is fixedly installed in the cooling bin 110 and is disposed near the feeding hole 112, and the temperature sensor 140 is used for measuring the temperature of the web fed from the feeding hole 112 to obtain the initial temperature of the web. Specifically, the temperature sensor 140 is an infrared temperature sensor, the temperature sensor 140 is disposed above the feed inlet 112, and the temperature sensor 140 is configured to receive radiant energy emitted by the web and convert the radiant energy into an electrical signal, thereby obtaining an initial temperature of the web.
The variable frequency liquid cooling mechanism 150 comprises a liquid inlet pipe 151, a liquid outlet pipe 152, a water chiller 153 and a variable frequency heater 154. The water chiller 153, the liquid inlet pipe 151, the annular cooling pipe 130 and the liquid outlet pipe 152 together form a circulating liquid path, the water chiller 153 is used for outputting cooling liquid to the annular cooling pipe 130 through the liquid inlet pipe 151, and the annular cooling pipe 130 is used for refluxing the cooling liquid to the water chiller 153 through the liquid outlet pipe 152. Specifically, the chiller 153 is configured to output a cooling liquid with a preset temperature (normal temperature, with a temperature range of 25 degrees to 30 degrees) to the liquid inlet pipe 151, the variable frequency heater 154 is mounted on the liquid inlet pipe 151, and the variable frequency heater 154 is configured to perform variable frequency heating on the cooling liquid output by the chiller 153, so that the temperature of the cooling liquid decreases at a preset rate, that is, the heating power of the cooling liquid by the variable frequency heater 154 is gradually reduced, so that the material sheets in the accommodating cavity 121 are subjected to temperature-gradient liquid cooling by the annular cooling pipe 130.
Further, during the circulation flow of the cooling liquid, the chiller 153 outputs the cooling liquid with a preset temperature to the annular cooling pipe 130 through the liquid inlet pipe 151, so as to cool the tablet in the accommodating cavity 121, and during the process, the heat of the tablet is transferred to the cooling liquid, so that the temperature of the cooling liquid rises; the annular cooling pipe 130 then returns the cooled liquid after temperature rise to the chiller 153 through the liquid outlet pipe 152; then the cooling water machine 153 cools the returned cooling liquid to make the temperature return to the preset temperature; the circulation is like this for the coolant liquid can cyclic utilization, practices thrift the cost, guarantees cooling efficiency.
Referring to fig. 3 and 4 in combination, the annular cooling tube 130 includes an annular section 131, a liquid inlet section 132 and a liquid outlet section 133. The liquid inlet section 132 and the liquid outlet section 133 are oppositely arranged at two ends of the annular section 131 and are communicated with the annular section 131, the liquid inlet section 132 is connected with the liquid inlet pipe 151, the liquid outlet section 133 is connected with the liquid outlet pipe 152, and the cooling liquid output by the water chiller 153 sequentially passes through the liquid inlet pipe 151, the liquid inlet section 132, the annular section 131, the liquid outlet section 133 and the liquid outlet pipe 152 and finally flows back to the water chiller 153. Specifically, since the liquid inlet section 132 and the liquid outlet section 133 are disposed at two ends of the annular section 131, the cooling liquid entering the annular section 131 from the liquid inlet section 132 is divided into two paths to flow in the annular section 131 and finally flow together and flow out from the liquid outlet section 133, so that, on one hand, the maximum distance between the liquid inlet position and the liquid outlet position of the annular section 131 can be ensured, and the mutual influence of the cooling liquid temperature (lower) at the liquid inlet position of the annular section 131 and the cooling liquid temperature (higher) at the liquid outlet position of the annular section 131 can be prevented, on the other hand, the cooling can be performed on the material sheets in the accommodating cavity 121 from two paths simultaneously, so that the uniformity of cooling the two sides of the material sheets simultaneously is improved, and the problems of warping or uneven plating compactness and the like of the material sheets are prevented.
The magazine 120 includes a first deck 122, a web 123, and a second deck 124. The first laminate 122 and the second laminate 124 are arranged in parallel and spaced apart, the first laminate 122 is connected to the second laminate 124 by means of the connecting plate 123, and a receiving cavity 121 is formed between the first laminate 122 and the second laminate 124, i.e. a material sheet is placed between the first laminate 122 and the second laminate 124. Specifically, the first ply 122 is disposed over the second ply 124 and the web is placed on the second ply 124.
In this embodiment, the storage box 120 has a multi-layer structure, that is, the storage box 120 further includes a third layer plate 125, a fourth layer plate 126, and the like, and the plurality of layer plates are all connected to the connecting plate 123 to form a plurality of accommodating cavities 121. The number of the accommodating cavities 121 is multiple, the accommodating cavities 121 are stacked in the storage box 120, each accommodating cavity 121 is used for accommodating one tablet, and the material passing hole 111 or the annular cooling tube 130 is used for selectively corresponding to the position of one accommodating cavity 121 under the action of the lifting mechanism 160. Specifically, the storage box 120 is designed into a multi-layer structure, so as to realize the buffering function of the material sheets, that is, the material sheets do not need to be sent out immediately after being cooled, and the material sheets can be discharged one by one after the material sheets are cooled completely, so that the production efficiency is improved.
Further, in the process of cooling the plurality of webs, the lifting mechanism 160 is utilized to drive the storage box 120 to move, so that the material passing hole 111 and the first accommodating cavity 121 are located on the same plane; the first web is then transferred by means of a robot arm through the feed opening 111 to the first receiving cavity 121; then, the lifting mechanism 160 is utilized to drive the storage box 120 to move so that the first accommodating cavity 121 and the annular cooling pipe 130 are positioned on the same plane, thereby realizing the cooling function of the first material sheet; then, the lifting mechanism 160 is utilized to drive the storage box 120 to move so that the material passing opening 111 and the second accommodating cavity 121 are positioned on the same plane; the second material sheet is sent to the second accommodating cavity 121 through the material passing opening 111 by using the mechanical arm; then, the lifting mechanism 160 is utilized to drive the storage box 120 to move so that the second accommodating cavity 121 and the annular cooling pipe 130 are positioned on the same plane, thereby realizing the cooling function of the second material sheet; and the cooling and buffering of the material sheets are realized by circulating in this way.
The elevating mechanism 160 includes a base 161, a driving motor 162, a transmission assembly 163, a slider 164, a transmission lever 165, and a displacement sensor 166. The driving motor 162 is installed on the base 161 and is in transmission connection with the sliding block 164 through the transmission component 163, the sliding block 164 is in sliding fit with the base 161, the driving motor 162 can drive the sliding block 164 to slide relative to the base 161 through the transmission component 163, and the base 161 can limit and guide the sliding block 164. One end of the transmission rod 165 is connected with the slider 164, and the other end is connected with the storage box 120, and the slider 164 synchronously drives the storage box 120 to ascend or descend in the cooling bin 110 in the process of sliding relative to the base 161.
The displacement sensor 166 is electrically connected to the driving motor 162, and the displacement sensor 166 is configured to detect a displacement of the slider 164, so as to perform servo control on the driving motor 162. In this embodiment, the displacement sensor 166 is a grating scale displacement sensor, which uses the optical principle of the grating to detect and feedback the displacement. Specifically, in the process that the lifting mechanism 160 drives the storage box 120 to move, the driving motor 162 drives the transmission component 163 to move according to the control signal sent by the controller, so that the sliding block 164 drives the storage box 120 to move; when the driving motor 162 drives the sliding block 164 to move by a preset distance through the transmission component 163, the driving motor 162 feeds back an in-place signal to the controller, at this time, the displacement sensor 166 feeds back an actual distance moved by the sliding block 164 to the controller synchronously, the controller compares the preset distance with the actual distance, if an error exists between the preset distance and the actual distance, the controller controls the driving motor 162 to perform error compensation so as to ensure that the actual distance moved by the sliding block 164 is equal to the preset distance, thereby realizing servo control of the driving motor 162, ensuring the moving accuracy of the sliding block 164 and further ensuring the lifting accuracy of the storage box 120.
The drive assembly 163 includes a first pulley 1631, a drive belt 1632, a second pulley 1633, a lead screw 1634, and a nut 1635. The first pulley 1631 and the second pulley 1633 are rotatably mounted on the base 161, and the first pulley 1631 and the second pulley 1633 are rotatable relative to the base 161. The driving motor 162 is connected with the first belt pulley 1631, the first belt pulley 1631 is connected with the second belt pulley 1633 through the driving belt 1632, the second belt pulley 1633 is connected with the screw rod 1634, the driving motor 162 can drive the first belt pulley 1631 to rotate, the first belt pulley 1631 can drive the second belt pulley 1633 to rotate through the driving belt 1632, and the second belt pulley 1633 can drive the screw rod 1634 to rotate. The nut 1635 is sleeved outside the screw rod 1634 and is in threaded fit with the screw rod 1634 and connected with the sliding block 164, and the screw rod 1634 can drive the nut 1635 to displace along the axial direction of the screw rod 1634 in the rotation process, so that the sliding block 164 is driven to move along the axial direction of the screw rod 1634, and the storage box 120 is driven to ascend or descend in the cooling bin 110.
Referring to fig. 5, an embodiment of the present invention further provides a cooling method of a gradual cooling device, which is applied to the gradual cooling device 100, and the cooling method of the gradual cooling device includes:
step S110: the material and thickness of the material obtaining sheet.
In step S110, the material of the material sheet is obtained by referring to the record, and the material of the material sheet may be silicon, silicon carbide, or the like; the thickness of the material sheet was obtained by a laser thickness gauge, and the thickness range of the material sheet was 0.5 mm to 2 mm. Specifically, the material and the thickness of the material sheet can influence the cooling of the material sheet, and the accuracy of the follow-up preset rate calculation can be improved through the material and the thickness of the material sheet.
Step S120: the initial temperature of the web is detected by the temperature sensor 140.
It should be noted that, in step S120, the temperature sensor 140 is used to receive radiant energy emitted from the web to obtain an initial temperature of the web, where the initial temperature of the web ranges from 200 degrees celsius to 300 degrees celsius. Specifically, the initial temperature of the material sheet can affect the cooling of the material sheet, and the accuracy of the subsequent calculation of the preset rate can be improved by obtaining the initial temperature of the material sheet.
Step S130: the variable frequency liquid cooling mechanism 150 is utilized to convey the cooling liquid with the temperature reduced according to the preset speed to the annular cooling pipe 130 so as to liquid-cool the material sheets, wherein the preset speed is calculated according to the material quality, thickness and initial temperature of the material sheets.
It should be noted that, before step S130, the lifting mechanism 160 is utilized to drive the storage box 120 to move so that the position of the accommodating cavity 121 corresponds to the position of the material passing hole 111, and at this time, the accommodating cavity 121 and the material passing hole 111 are located on the same plane; then, the material sheet is sent to the accommodating cavity 121 through the material passing hole 111 by using a mechanical arm, so as to realize feeding of the material sheet, and in the process, the temperature sensor 140 detects the temperature of the material sheet extending into the material passing hole 111, so as to obtain the initial temperature of the material sheet; then, the lifting mechanism 160 is used to drive the storage box 120 to move, so that the position of the accommodating cavity 121 corresponds to the position of the annular cooling tube 130, and at this time, the accommodating cavity 121 and the annular cooling tube 130 are located on the same plane.
In step S130, the variable frequency liquid cooling mechanism 150 is utilized to continuously convey the cooling liquid to the annular cooling tube 130, so as to liquid-cool the material sheet in the accommodating cavity 121, wherein the temperature of the cooling liquid is reduced according to the preset rate, that is, the temperature of the cooling liquid for liquid-cooling the material sheet is higher, and then the temperature of the cooling liquid for liquid-cooling the material sheet is lower, so that the rapid reduction of the temperature of the material sheet is prevented, and the problems of warping of the material sheet, uneven compactness of the material sheet coating and the like are avoided.
In this embodiment, the initial temperature of the cooling liquid delivered to the annular cooling tube 130 by the variable frequency liquid cooling mechanism 150 is the same as the initial temperature of the tablet, and the range is 200 to 300 degrees celsius, that is, the temperature of the cooling liquid initially output by the variable frequency liquid cooling mechanism 150 in the cooling process of the tablet is the same as the initial temperature of the tablet, so as to prevent the tablet temperature from rapidly decreasing. The range of the preset speed is 2-5 ℃ per second, and the reasonable preset speed can improve the cooling efficiency as much as possible and shorten the boxing period under the condition of ensuring the quality of the tablets. The end temperature range of the cooling liquid conveyed to the annular cooling pipe 130 by the variable frequency liquid cooling mechanism 150 is 25-50 ℃, namely the temperature range of the cooling liquid finally output by the variable frequency liquid cooling mechanism 150 in the cooling process of the tablet is 25-50 ℃, so that the temperature range of the tablet after cooling is 25-50 ℃, and the tablet can not be damaged by boxing at the temperature.
After step S130, the lifting mechanism 160 is used to drive the storage box 120 to move, so that the position of the accommodating cavity 121 corresponds to the position of the material passing hole 111, and the accommodating cavity 121 and the material passing hole 111 are located on the same plane; the material sheet in the accommodating cavity 121 is then taken out through the material passing opening 111 by using a mechanical arm so as to realize the discharging of the material sheet.
According to the gradual cooling device 100 provided by the embodiment of the invention, the storage box 120 is arranged in the cooling bin 110, the storage box 120 is provided with the accommodating cavity 121 for accommodating the tablet, the annular cooling pipe 130 is fixedly arranged in the cooling bin 110, is arranged outside the accommodating cavity 121 in a surrounding manner and is connected with the variable frequency liquid cooling mechanism 150, the variable frequency liquid cooling mechanism 150 is electrically connected with the temperature sensor 140, the temperature sensor 140 is used for detecting the initial temperature of the tablet, and the variable frequency liquid cooling mechanism 150 is used for conveying the cooling liquid with the temperature reduced according to the preset rate to the annular cooling pipe 130 according to the material, thickness and initial temperature of the tablet so as to liquid-cool the tablet. Compared with the prior art, the gradual cooling device 100 provided by the invention adopts the annular cooling pipe 130 which is arranged outside the accommodating cavity 121 in a surrounding manner and the variable frequency liquid cooling mechanism 150 which is connected with the annular cooling pipe 130, so that the gradual cooling of the temperature of the material sheets can be carried out, the cooling efficiency is improved as much as possible under the condition of ensuring the quality of the material sheets, the boxing period is shortened, and the production efficiency is improved. The cooling method of the gradual cooling device is simple in steps, high in cooling efficiency and good in cooling effect.
Second embodiment
Referring to fig. 6, an embodiment of the present invention provides a gradual cooling device 100, which is different from the first embodiment in the structure of the storage box 120.
Notably, the first laminate 122 is provided with a first cooling water channel 127, the second laminate 124 is provided with a second cooling water channel 128, the first cooling water channel 127 and the second cooling water channel 128 are all arranged in a winding way and are connected with a variable frequency liquid cooling mechanism 150, the variable frequency liquid cooling mechanism 150 is used for simultaneously conveying cooling liquid to the annular cooling pipe 130, the first cooling water channel 127 and the second cooling water channel 128, wherein the cooling liquid in the annular cooling pipe 130 is used for cooling the peripheral side of the material sheet, the first cooling water channel 127 is used for cooling the top side of the material sheet, the second cooling water channel 128 is used for cooling the bottom side of the material sheet, and the annular cooling pipe 130, the first cooling water channel 127 and the second cooling water channel 128 are jointly acted to improve the cooling efficiency and enhance the cooling effect.
In this embodiment, the number of the first laminates 122, the second laminates 124 and the accommodating cavities 121 is plural, the first laminates 122 and the second laminates 124 are divided into multiple groups of hierarchical structures, each group of hierarchical structures comprises a first laminate 122 and a second laminate 124, i.e. each group of hierarchical structures is provided with one accommodating cavity 121, and a heat insulating layer 129 is arranged between two adjacent groups of hierarchical structures to prevent the temperatures in the two adjacent accommodating cavities 121 from affecting each other.
The beneficial effects of the gradual cooling device 100 provided in the embodiment of the present invention are the same as those of the first embodiment, and will not be described here again.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (15)
1. The utility model provides a gradual change formula cooling device, its characterized in that includes cooling storehouse (110), storage box (120), annular cooling tube (130), temperature sensor (140) and frequency conversion liquid cooling mechanism (150), storage box (120) set up in cooling storehouse (110), storage box (120) are provided with holding cavity (121) that are used for holding the tablet, annular cooling tube (130) fixed mounting in cooling storehouse (110), just enclose and locate outside holding cavity (121), and with frequency conversion liquid cooling mechanism (150) are connected, frequency conversion liquid cooling mechanism (150) with temperature sensor (140) electricity is connected, temperature sensor (140) are used for detecting the initial temperature of tablet, frequency conversion liquid cooling mechanism (150) are used for according to material, thickness and the initial temperature of tablet to annular cooling tube (130) carry the temperature according to the cooling liquid that the default rate reduces, so as to carry out the liquid cooling to the tablet.
2. The gradual cooling device according to claim 1, wherein the variable frequency liquid cooling mechanism (150) comprises a liquid inlet pipe (151), a liquid outlet pipe (152), a water chiller (153) and a variable frequency heater (154), the water chiller (153), the liquid inlet pipe (151), the annular cooling pipe (130) and the liquid outlet pipe (152) jointly enclose a circulating liquid path, the variable frequency heater (154) is mounted on the liquid inlet pipe (151), and the variable frequency heater (154) is used for performing variable frequency heating on cooling liquid output by the water chiller (153) so as to reduce the temperature of the cooling liquid according to the preset rate.
3. The gradual cooling device according to claim 2, wherein the annular cooling tube (130) comprises an annular section (131), a liquid inlet section (132) and a liquid outlet section (133), the liquid inlet section (132) and the liquid outlet section (133) are oppositely arranged at two ends of the annular section (131) and are communicated with the annular section (131), the liquid inlet section (132) is connected with the liquid inlet tube (151), and the liquid outlet section (133) is connected with the liquid outlet tube (152).
4. The gradual cooling device according to claim 1, further comprising a lifting mechanism (160), wherein the cooling bin (110) is provided with a material passing hole (111), the material passing hole (111) is arranged in a staggered manner with the annular cooling tube (130), the lifting mechanism (160) is connected with the storage box (120), and the lifting mechanism (160) is used for driving the storage box (120) to ascend or descend so that the position of the accommodating cavity (121) corresponds to the position of the material passing hole (111) or the annular cooling tube (130).
5. The gradual cooling device according to claim 4, wherein the overfeeding hole (111) comprises a feeding hole (112) and a discharging hole (113), and the feeding hole (112) and the discharging hole (113) are oppositely arranged at two sides of the cooling bin (110) and are positioned on the same plane.
6. The progressive cooling device of claim 5, wherein the temperature sensor (140) is fixedly mounted in the cooling bin (110) and is disposed proximate to the feed inlet (112), the temperature sensor (140) being configured to measure the temperature of the web fed from the feed inlet (112) to obtain an initial temperature of the web.
7. The progressive cooling device according to claim 4, wherein the number of the accommodating cavities (121) is plural, the plurality of accommodating cavities (121) are stacked in the storage box (120), each accommodating cavity (121) is used for accommodating one tablet, and the material passing opening (111) or the annular cooling tube (130) is used for selectively corresponding to the position of one accommodating cavity (121) under the action of the lifting mechanism (160).
8. The gradual cooling device according to claim 4, wherein the lifting mechanism (160) comprises a base (161), a driving motor (162), a transmission assembly (163), a sliding block (164) and a transmission rod (165), the driving motor (162) is mounted on the base (161) and is in transmission connection with the sliding block (164) through the transmission assembly (163), the sliding block (164) is in sliding fit with the base (161), one end of the transmission rod (165) is connected with the sliding block (164), and the other end is connected with the storage box (120).
9. The progressive cooling device of claim 8, wherein the transmission assembly (163) comprises a first pulley (1631), a transmission belt (1632), a second pulley (1633), a screw (1634) and a nut (1635), wherein the first pulley (1631) and the second pulley (1633) are rotatably mounted on the base (161), the drive motor (162) is connected with the first pulley (1631), the first pulley (1631) is connected with the second pulley (1633) through the transmission belt (1632), the second pulley (1633) is connected with the screw (1634), and the nut (1635) is sleeved outside the screw (1634), is in threaded fit with the screw (1634), and is connected with the slider (164).
10. The progressive cooling device of claim 8, wherein the lift mechanism (160) further comprises a displacement sensor (166), the displacement sensor (166) being electrically connected to the drive motor (162), the displacement sensor (166) being configured to detect an amount of displacement of the slider (164) for servo control of the drive motor (162).
11. The progressive cooling device according to claim 1, wherein the magazine (120) comprises a first plate (122), a connecting plate (123) and a second plate (124), the first plate (122) and the second plate (124) being arranged at parallel intervals, the first plate (122) being connected to the second plate (124) by the connecting plate (123), the first plate (122) and the second plate (124) forming the accommodation cavity (121) therebetween.
12. The gradual cooling device according to claim 11, wherein the first laminate (122) is provided with a first cooling water channel (127), the second laminate (124) is provided with a second cooling water channel (128), the first cooling water channel (127) and the second cooling water channel (128) are all arranged in a meandering manner and are all connected with the variable frequency liquid cooling mechanism (150), and the variable frequency liquid cooling mechanism (150) is used for conveying cooling liquid to the annular cooling pipe (130), the first cooling water channel (127) and the second cooling water channel (128) simultaneously.
13. A cooling method of a progressive cooling apparatus, characterized in that it is applied to a progressive cooling apparatus according to any one of claims 1 to 12, comprising:
acquiring the material and thickness of the material sheet;
detecting an initial temperature of the web with the temperature sensor (140);
and conveying cooling liquid with the temperature reduced according to a preset rate to the annular cooling pipe (130) by using the variable-frequency liquid cooling mechanism (150) so as to liquid-cool the material sheets, wherein the preset rate is calculated according to the material, thickness and initial temperature of the material sheets.
14. The cooling method of the progressive cooling apparatus of claim 13, wherein the variable frequency liquid cooling mechanism (150) delivers a cooling liquid to the annular cooling tube (130) at a starting temperature that is the same as an initial temperature of the web and ranges from 200 degrees celsius to 300 degrees celsius; the preset rate ranges from 2 degrees celsius/second to 5 degrees celsius/second; the end temperature range of the cooling liquid delivered to the annular cooling pipe (130) by the variable frequency liquid cooling mechanism (150) is 25-50 ℃.
15. The cooling method of a progressive cooling apparatus of claim 13, further comprising a lifting mechanism (160), the cooling bin (110) being provided with a pass (111);
the cooling method of the gradual cooling device further comprises the following steps of: the lifting mechanism (160) is utilized to drive the storage box (120) to move so that the position of the accommodating cavity (121) corresponds to the position of the material passing opening (111); feeding the web to the receiving cavity (121) through the feed opening (111) by means of a manipulator; the lifting mechanism (160) is utilized to drive the storage box (120) to move so that the position of the accommodating cavity (121) corresponds to the position of the annular cooling pipe (130);
the cooling method of the gradual cooling device further comprises the following steps of conveying the cooling liquid with the temperature reduced according to a preset rate to the annular cooling pipe (130) by using the variable frequency liquid cooling mechanism (150) so as to cool the material sheets, wherein the preset rate is calculated according to the material quality, the thickness and the initial temperature of the material sheets: the lifting mechanism (160) is utilized to drive the storage box (120) to move so that the position of the accommodating cavity (121) corresponds to the position of the material passing opening (111); and taking out the material sheets in the accommodating cavity (121) through the material passing opening (111) by using a mechanical arm.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003139458A (en) * | 2001-11-01 | 2003-05-14 | Toshiba Electric Appliance Co Ltd | Water cooler |
| WO2023272756A1 (en) * | 2021-07-02 | 2023-01-05 | 苏州友论新材料科技有限公司 | Device for preparing hydrophilic pet fibers |
| WO2023153734A1 (en) * | 2022-02-08 | 2023-08-17 | 주식회사 엘지에너지솔루션 | Battery rack and power storage device comprising same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4365017B2 (en) * | 2000-08-23 | 2009-11-18 | 東京エレクトロン株式会社 | Method for controlling temperature drop rate of heat treatment apparatus and heat treatment apparatus |
| US20050241333A1 (en) * | 2003-12-03 | 2005-11-03 | Hamilton Robert W | Rate-controlled freezer and cooling methods thereof |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003139458A (en) * | 2001-11-01 | 2003-05-14 | Toshiba Electric Appliance Co Ltd | Water cooler |
| WO2023272756A1 (en) * | 2021-07-02 | 2023-01-05 | 苏州友论新材料科技有限公司 | Device for preparing hydrophilic pet fibers |
| WO2023153734A1 (en) * | 2022-02-08 | 2023-08-17 | 주식회사 엘지에너지솔루션 | Battery rack and power storage device comprising same |
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