CN117406558A - Side exposure device - Google Patents
Side exposure device Download PDFInfo
- Publication number
- CN117406558A CN117406558A CN202311455437.XA CN202311455437A CN117406558A CN 117406558 A CN117406558 A CN 117406558A CN 202311455437 A CN202311455437 A CN 202311455437A CN 117406558 A CN117406558 A CN 117406558A
- Authority
- CN
- China
- Prior art keywords
- light source
- exposure
- module
- source strip
- lifting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010606 normalization Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 238000003384 imaging method Methods 0.000 abstract description 3
- 239000000428 dust Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005273 aeration Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention provides a side exposure device, which comprises a frame-type light source bottom plate, four side light source strip modules and two inner light source strip modules, wherein the frame-type light source bottom plate is provided with a plurality of side light source strip modules; the side light source strip modules are arranged around the bottom surface of the light source bottom plate, two inner light source strip modules are arranged in the middle of the light source bottom plate at intervals in parallel, and the inner light source strip modules and the side light source strip modules are matched to realize exposure of one half sheet, one whole sheet or two half sheet products below; the side exposure device has novel design and simple structure, can expose the sides and the edges of sheets of various types, has no influence on the front side and the back side, ensures the efficient side exposure of the product, and is convenient for popularization and application in the side imaging field of sheet products (such as silicon chips and battery pieces) in photovoltaics and semiconductors.
Description
Technical Field
The invention belongs to the field of imaging of semiconductor wafers, and particularly relates to a side exposure device.
Background
In the field of sheet material transport, problems such as tilting and offset often occur after sheet material loading, and therefore, the sheet material needs to be regulated before detection and processing. Conventional alignment designs are guide wheel side guided adjustment. However, in the fields requiring high-precision attitude transmission such as photovoltaic silicon wafers, battery pieces and semiconductor silicon wafers, the adjustment precision cannot be achieved by only adopting the guide wheels, and the requirements of the height difference energy cannot be met.
Disclosure of Invention
In order to overcome the defects in the prior art, an object of the present invention is to provide a side exposure apparatus, which can solve the above-mentioned problems.
A side exposure device comprises a frame-type light source base plate, a side light source strip module and an inner light source strip module; the side light source strip modules are arranged around the bottom surface of the light source bottom plate, two inner light source strip modules are arranged in the middle of the light source bottom plate at intervals in parallel, and the inner light source strip modules and the side light source strip modules are matched to realize exposure of one half sheet, one whole sheet or two half sheet of sheet products below.
Further, two interior light source strip modules are installed to the middle window of frame-type light source bottom plate through an tip adaptor, and the exit direction of two interior light source strip modules sets up in opposite directions, and the exit direction of a side light source strip module of an interior light source strip module and the adjacent side department of another interior light source strip module sets up in opposite directions.
Further, the side light source strip module and the inner light source strip module adopt strip light sources, and a cooling unit is arranged on the back surface of the strip light sources.
Further, the emergent angles of the side light source strip module and the inner light source strip module are adjustable, and the distance between the two inner light source strip modules is adjustable.
Further, the side exposure device also comprises a lifting adsorption module, wherein the lifting adsorption module comprises a lifting fixed base, a lifting driving module, a lifting plate group and two side exposure plates; the upper surfaces of the two side plates of the frame-type light source bottom plate are directly or indirectly arranged on the lower surface of the lifting fixed base; the lifting driving module is mounted to the lifting fixing base, the lifting plate group is connected to the lifting driving module in a driven mode, the two side surface exposure plates are mounted below the lifting plate group at intervals, the bottom surface of each side surface exposure plate is provided with an air suction hole and an air groove for adsorbing sheet products below, and the adsorption surface completely covers the upper surface of the sheet products to be exposed.
Further, a material carrying table switching plate with a concave cavity below is arranged between the lifting plate group and the two side surface exposure plates, the two side surface exposure plates are arranged at two ends of the bottom surface of the material carrying table switching plate, and the two inner light source strip modules are arranged in the concave cavity at the bottom of the material carrying table switching plate.
Furthermore, the interval distance between the two side surface exposure and absorption plates ensures that the emergent light sources of the two upper inner light source strip modules penetrate.
Further, the side exposure device further comprises a side exposure portal frame, and the bottom of the lifting fixed base is mounted on a beam of the side exposure portal frame.
Further, the side exposure device further comprises a side exposure line for conveying the sheet product to be exposed to the side exposure station, so that the lifting adsorption module can adsorb and lift the sheet product below to the exposure height.
Further, a normalization module is arranged in front of the side exposure station on the side exposure line and used for normalizing the position of the sheet product to be exposed before exposure.
Compared with the prior art, the invention has the beneficial effects that: the side exposure device has novel design and simple structure, can expose the sides and the edges of sheets of various types, has no influence on the front side and the back side, ensures the efficient side exposure of the product, and is convenient for popularization and application in the side imaging field of sheet products (such as silicon chips and battery pieces) in photovoltaics and semiconductors.
Drawings
FIG. 1 is a schematic view of a side exposure apparatus;
FIG. 2 is a schematic view of a portion of an exposure beam of a side exposure apparatus;
FIG. 3 is a schematic diagram of a lifting adsorption module and a gantry;
fig. 4 and 5 are schematic views of a part of the structure of the lifting adsorption module;
FIG. 6 is a schematic view of a side exposure apparatus provided with side exposure lines and a trimming module.
In the drawing the view of the figure,
1. a frame-type light source base plate; 2. a side light bar module; 3. an inner light source bar module; 4. an end adaptor; 5. lifting the fixed base; 6. a lifting driving module; 7. a lifting plate group; 8. a side surface aeration plate; 9. the material carrying platform is connected with the plate; 10. a side exposure portal frame; 11. a side exposure line; 12. and (5) a normalization module.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Side exposure device
A side exposure apparatus, see fig. 1 and 2, includes a frame-type light source base plate 1, four side light source bar modules 2, and two inner light source bar modules 3. The side light source strip modules 2 are arranged around the bottom surface of the light source bottom plate 1, two inner light source strip modules 3 are arranged in the middle of the light source bottom plate 1 at intervals in parallel, and the inner light source strip modules 3 and the side light source strip modules 2 are matched to realize exposure of one half piece, one whole piece or two half piece of sheet products below.
Six light source strip modules are arranged into a 'mu' -shape, and two controllable switches of the inner light source strip modules 3 are matched with the side light source strip modules 2 to realize exposure of one half piece, one whole piece or two half piece of sheet products below.
The two inner light source bar modules 3 are installed in the middle window of the frame-type light source bottom plate 1 through one end part adapter 4, the emergent directions of the two inner light source bar modules 3 are opposite, and the emergent directions of one side light source bar module 2 at the adjacent side surfaces of one inner light source bar module 3 and the other inner light source bar module 3 are opposite.
The emergent directions of the four side light source bar modules 2 are all inclined downwards towards the center of the light source bottom plate 1. The four sides of the lower sheet product are exposed in cooperation with two inner light source strip modules 3 which emit outwards obliquely.
Specifically, the side light source bar module 2 and the inner light source bar module 3 adopt bar light sources, and a cooling unit is arranged on the back of each bar light source.
Such as a radiator fan, a water cooling circulation mechanism, etc.
The outgoing angles of the side light source strip module 2 and the inner light source strip module 3 are adjustable, and the distance between the two inner light source strip modules 3 is adjustable. Thereby being suitable for sheet products to be exposed with different specifications.
Further, referring to fig. 3-5, the side exposure device further includes a lifting adsorption module, where the lifting adsorption module includes a lifting fixing base 5, a lifting driving module 6, a lifting plate set 7, and two side exposure plates 8; wherein, the upper surfaces of the two side plates of the frame-type light source bottom plate 1 are directly or indirectly mounted to the lower surface of the lifting fixing base 5.
The lifting driving module 6 is installed to the lifting fixing base 5, the lifting plate set 7 is in driving connection with the lifting driving module 6, the two side exposure and suction plates 8 are installed below the lifting plate set 7 at intervals, the bottom surface of the side exposure and suction plates 8 is provided with air suction holes and air grooves for adsorbing sheet products below, and the adsorption surface completely covers the upper surface of the sheet products to be exposed.
The lifting driving module 6 adopts the forms of a motor screw rod, a linear motor, a hydraulic cylinder and the like, and the steering mechanism formed by the motor screw rod, the inclined sliding block and the vertical sliding block is adopted in the illustration.
The lifting plate group 7 and the two side surface exposure and absorption plates 8 extend downwards from the hollow opening in the middle of the frame-type light source bottom plate 1 and are driven by the lifting driving module 6 to lift at the hollow opening.
Wherein, a material carrying platform switching plate 9 with a concave cavity below is arranged between the lifting plate group 7 and the two side surface exposure plates 8, the two side surface exposure plates 8 are arranged at two ends of the bottom surface of the material carrying platform switching plate 9, and the two inner light source bar modules 3 are arranged in the concave cavity at the bottom of the material carrying platform switching plate 9.
The spacing distance between the two side surface exposure and absorption plates 8 ensures that the emergent light sources of the upper two inner light source strip modules 3 penetrate.
There are various carrying modes, such as the whole side exposure device is suspended above the sheet product to be exposed, and a gantry supporting mode can be adopted, that is, the side exposure device further comprises a side exposure gantry 10, and the bottom of the lifting fixing base 5 is mounted on a beam of the side exposure gantry 10.
Referring to fig. 6, the side exposure apparatus further includes a side exposure line 11 for conveying the sheet product to be exposed to the side exposure station so that the elevation adsorption module adsorbs and lifts the sheet product below to an exposure height.
Further, a normalization module 12 is further disposed in front of the side exposure station on the side exposure line 11, for normalizing the position of the sheet product to be exposed before exposure.
The form of the leveling module 12 includes a form of leveling of the side roller, leveling of the nip side, adjustment of the suction posture, and the like, for the purpose of ensuring that the sheet product reaches an optimal position before exposure.
Further, the side exposure device further comprises a dust removal module, such as a suction module arranged at the exposure height of the side exposure station, and the suction modules can be arranged at the two sides of the belt streamline of the side exposure streamline 11 or around the inside of the side exposure portal frame 10. The dust collector is not limited in form, and can be used for collecting dust by adopting blowing and sucking combination or pure suction, and a dust collecting assembly is correspondingly arranged at the suction module.
Principle of side exposure
For the battery piece in the photovoltaic field, the battery piece to be exposed is two half pieces, and of course, the battery piece can also be a whole piece, and here, taking two half pieces as an example, the battery piece is fed through the side exposure line 11, the battery piece is guided and regulated through the regulation module 12 at the regulation station, then the battery piece is conveyed to the side exposure station, and the line is suspended.
The product adsorbs, and lift drive module 6 drive lifter plate group 7 and two side exposure and absorption boards 8 descend to the height of picking up, and side exposure and absorption board 8 passes through the battery piece on the vacuum adsorption side exposure line 11. At this time, the complete light shielding of the upper surface of the battery piece is also completed.
Lifting, lifting and driving the battery piece adsorbed by the side surface exposing and sucking plate 8 to rise to the exposing height by the lifting and driving module 6.
The exposure power supply is started, the side light source strip module 2 and the inner light source strip module 3 expose four sides and four edges of the battery piece, and the power supply is closed after the exposure is completed.
And (3) blanking, wherein the lifting driving module 6 drives the battery piece adsorbed by the side surface exposure plate 8 to descend, and when the battery piece approaches the side surface exposure line 11, the side surface exposure plate 8 breaks vacuum, so that the battery piece exposed on the side surface is released to the side surface exposure line 11, the side surface exposure line 11 is started, and the battery piece is conveyed to the downstream.
The device can be matched with a front exposure device, a panel turnover device and a back exposure device to realize comprehensive graphical processing of the battery piece. Is convenient for popularization and application in the fields of photovoltaics, semiconductors and the like.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A side exposure apparatus, characterized in that: the side exposure device comprises a frame-type light source base plate (1), a side light source strip module (2) and an inner light source strip module (3); the side light source strip modules (2) are arranged around the bottom surface of the light source bottom plate (1), two inner light source strip modules (3) are arranged in the middle of the light source bottom plate (1) at intervals in parallel, and the inner light source strip modules (3) and the side light source strip modules (2) are matched to realize exposure of one half piece, one whole piece or two half piece of sheet products below.
2. The side exposure apparatus according to claim 1, wherein:
two interior light source strip modules (3) are installed to the middle window of frame-type light source bottom plate (1) through an tip adaptor (4), and the emergence direction of two interior light source strip modules (3) sets up in opposite directions, and the emergence direction of one side light source strip module (2) of one interior light source strip module (3) and the adjacent side department of another interior light source strip module (3) sets up in opposite directions.
3. The side exposure apparatus according to claim 1, wherein:
the side light source strip module (2) and the inner light source strip module (3) adopt strip light sources, and a cooling unit is arranged on the back of each strip light source.
4. The side exposure apparatus according to claim 1, wherein:
the emergent angles of the side light source strip modules (2) and the inner light source strip modules (3) are adjustable, and the distance between the two inner light source strip modules (3) is adjustable.
5. The side exposure apparatus according to claim 1, wherein:
the side exposure device further comprises a lifting adsorption module, wherein the lifting adsorption module comprises a lifting fixed base (5), a lifting driving module (6), a lifting plate group (7) and two side exposure plates (8); the upper surfaces of the two side plates of the frame-type light source bottom plate (1) are directly or indirectly arranged on the lower surface of the lifting fixed base (5);
the lifting drive module (6) is mounted to the lifting fixed base (5), the lifting plate group (7) is connected to the lifting drive module (6) in a driving mode, the two side surface exposure plates (8) are mounted below the lifting plate group (7) at intervals, the bottom surface of each side surface exposure plate (8) is provided with air suction holes and air grooves for adsorbing sheet products below, and the adsorption surface completely covers the upper surface of the sheet products to be exposed.
6. The side exposure apparatus according to claim 5, wherein:
a material carrying table switching plate (9) with a concave cavity below is further arranged between the lifting plate group (7) and the two side surface exposure plates (8), the two side surface exposure plates (8) are installed from two ends of the bottom surface of the material carrying table switching plate (9), and the two inner light source strip modules (3) are arranged in the concave cavity at the bottom of the material carrying table switching plate (9) in this way.
7. The side exposure apparatus according to claim 5, wherein:
the spacing distance between the two side surface exposure and absorption plates (8) ensures that the emergent light sources of the two upper inner light source strip modules (3) penetrate.
8. The side exposure apparatus according to claim 5, wherein:
the side exposure device also comprises a side exposure portal frame (10), and the bottom of the lifting fixed base (5) is mounted on the beam of the side exposure portal frame (10).
9. The side exposure apparatus according to claim 8, wherein:
the side exposure device further comprises a side exposure line (11) for conveying the sheet product to be exposed to the side exposure station so that the lifting adsorption module can adsorb and lift the sheet product below to the exposure height.
10. The side exposure apparatus according to claim 9, wherein:
a normalization module (12) is arranged in front of the side exposure station on the side exposure line (11) and is used for normalizing the position of the sheet product to be exposed before exposure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311455437.XA CN117406558A (en) | 2023-11-03 | 2023-11-03 | Side exposure device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311455437.XA CN117406558A (en) | 2023-11-03 | 2023-11-03 | Side exposure device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117406558A true CN117406558A (en) | 2024-01-16 |
Family
ID=89494215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311455437.XA Pending CN117406558A (en) | 2023-11-03 | 2023-11-03 | Side exposure device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117406558A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4682277A (en) * | 1986-05-24 | 1987-07-21 | Orc Manufacturing Co., Ltd. | Movable light source type exposure apparatus |
| CN108873616A (en) * | 2018-06-26 | 2018-11-23 | 业成科技（成都）有限公司 | Exposure device |
| CN114488712A (en) * | 2022-02-18 | 2022-05-13 | 广东科视光学技术股份有限公司 | Full-automatic high-speed exposure equipment and method for circuit board |
| CN217333111U (en) * | 2022-05-11 | 2022-08-30 | 汕头超声印制板（二厂）有限公司 | But angle regulation's parallel light exposure lamp |
| CN217467463U (en) * | 2022-04-29 | 2022-09-20 | 苏州迈为科技股份有限公司 | Photoetching exposure device |
-
2023
- 2023-11-03 CN CN202311455437.XA patent/CN117406558A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4682277A (en) * | 1986-05-24 | 1987-07-21 | Orc Manufacturing Co., Ltd. | Movable light source type exposure apparatus |
| CN108873616A (en) * | 2018-06-26 | 2018-11-23 | 业成科技（成都）有限公司 | Exposure device |
| CN114488712A (en) * | 2022-02-18 | 2022-05-13 | 广东科视光学技术股份有限公司 | Full-automatic high-speed exposure equipment and method for circuit board |
| CN217467463U (en) * | 2022-04-29 | 2022-09-20 | 苏州迈为科技股份有限公司 | Photoetching exposure device |
| CN217333111U (en) * | 2022-05-11 | 2022-08-30 | 汕头超声印制板（二厂）有限公司 | But angle regulation's parallel light exposure lamp |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111940306A (en) | Detection device and detection method for semiconductor chip | |
| CN115582284B (en) | Solar cell sorting device | |
| CN117406558A (en) | Side exposure device | |
| CN111908122A (en) | Automatic production device for photovoltaic solar frame | |
| CN209804695U (en) | Battery piece scribing device | |
| CN112209076A (en) | Paste dress conveyor and subsides dress equipment | |
| CN112496534A (en) | Laser cutting device for solar cell | |
| CN215069908U (en) | Battery piece conveyor and battery piece burst equipment | |
| CN106163253B (en) | Component position detection device | |
| CN213765771U (en) | Box overturning equipment | |
| CN211013682U (en) | Urine test tube circulation sampling device for medical clinical laboratory | |
| CN110246927B (en) | Lamination machine and device and method for scribing and gluing battery piece of lamination machine | |
| CN209804696U (en) | Laminating machine and battery piece scribing and gluing device thereof | |
| CN114476487A (en) | Tiled accurate location conveyor of lift backward flow | |
| CN210150091U (en) | Conveying device of photovoltaic solar cell IV detection machine | |
| CN107285035B (en) | Workpiece carrying device | |
| CN113423259A (en) | Automatic riveting equipment | |
| CN220925621U (en) | Be suitable for unloader of ultra-thin panel | |
| CN218016413U (en) | Solar cell panel edge cleaning equipment | |
| CN216996645U (en) | High-speed handling device of miniLED backlight production | |
| CN218087782U (en) | Feeding and positioning device | |
| CN220419195U (en) | Photovoltaic board detection device | |
| CN219303626U (en) | Regular conveyor of battery piece | |
| CN220350899U (en) | Flexible gravity sliding table | |
| CN220172086U (en) | Carrier, handling device and transportation equipment of battery piece |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |