CN108873616A - Exposure device - Google Patents
Exposure device Download PDFInfo
- Publication number
- CN108873616A CN108873616A CN201810667779.0A CN201810667779A CN108873616A CN 108873616 A CN108873616 A CN 108873616A CN 201810667779 A CN201810667779 A CN 201810667779A CN 108873616 A CN108873616 A CN 108873616A
- Authority
- CN
- China
- Prior art keywords
- lamp
- exposure
- exposed
- lid
- exposure device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70208—Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention provides a kind of exposure devices, including shell, product mounting table, side exposure lamp group and face exposure lamp group.The side, which exposes lamp group, to be used with sliding rail collocation, and the position of exposure is quickly adjusted, and can be exposed for various sizes of product side to be exposed.Through above structure, the present invention is directed to product side simultaneously and front is exposed, while being suitable for various sizes of product to be exposed, and manufacturing cost is effectively reduced.
Description
Technical field
The technology of the present invention is related to optical exposure field, particularly relates to a kind of while being exposed for product side and front
The exposure device of light.
Background technique
Its volume of the exposure bench of general non-ultraviolet light-emitting diodes system is larger, and shared production space is also big, leads
Cost of investment is caused also to increase relatively, in addition, the exposure bench of non-ultraviolet light-emitting diodes uses high-pressure sodium lamp as light source more,
And or so service life of high-pressure sodium lamp usually only 1000 hours, it is therefore necessary to replace light source often.
Therefore, it is mostly exposed at present using ultraviolet LED (UV-LED), recent UV-LED luminous efficiency has
Very big promotion, and it has the following advantages that：1. the service life is long, the service life of UV-LED, therefore can be at 20000 more than hour
Avoid the trouble for frequently replacing light source.2.UV LED effective spectral range is narrow, and light utilization efficiency is high, more energy saving.3.UV LED
Ozone will not be generated when use, keep its more environmentally-friendly.High pressure is free of in 4.UV LED light source driving power, keeps it safer.
In the fitting processing procedure of touch device, cover sheet (CGS) is carried out using optical cement (OCA) or glue (OCR)
With being bonded for LCD MODULE (LCM).In the fitting processing procedure using glue (OCR), to guarantee deaeration system after product attaches
The deaeration effect of journey will increase face exposure (main cure) processing procedure after the completion of product fitting, promote product visible area glue
(OCR) curing degree.It also will increase four edge exposures (side cure) processing procedure simultaneously, promote product protection cover board ink area (CG
INK glue (OCR) curing degree under).In general, face exposure (main cure) processing procedure and four edge exposures (side cure)
Processing procedure can be separated and be carried out, and traditional four edge exposures (side cure) processing procedure can be exposed in two times four side of product, that is, distinguish
Product long side side is exposed and is exposed for product short side.This mode causes product processing time to elongate, and causes to produce
Product yield thus declines.
Summary of the invention
The main purpose system of the present invention provides a kind of exposure device, can by face exposure in conventional process (main cure),
Four edge exposures (side cure) are integrated into same fixture while being exposed, and can both reduce equipment cost, while can reduce
Processing procedure reduces cost of labor, avoids the risk of product yield decline.In order to achieve the above object, system of the present invention take it is following it
Technological means is reached, wherein and the present invention provides a kind of exposure device, including：One shell, a product mounting table, one side
Expose lamp group and a face exposure lamp group.The shell includes an inner wall, four side walls and a lid, which is set to this
The periphery of inner wall, the lid are covered on the grade side walls, make the inner wall, four side wall and the lid that accommodating sky be collectively formed
Between.The product mounting table is located at the accommodating space, to place a body to be exposed.It includes that plural groups are led that the side, which exposes lamp group,
Rail, a plurality of lamp bars.The plural groups guide rail is set on the inner wall, which penetrates a sliding block and wherein one group respectively
The guide rail is connected, and enables the lamp bars such as this to carry out a displacement movement along the grade guide rails, wherein the irradiation side of the lamp bars such as this
To in face of the body to be exposed.The face exposure lamp group includes a main exposure lamp and a transmission component.The main exposure lamp is set to
On one inner surface of the lid, and the direction of illumination of the main exposure lamp faces the body to be exposed.The transmission component and the lid
One outer surface is articulated, to make the lid carry out an open and close movement.
In an embodiment of the present invention, which includes a cylinder and a support plate, the cylinder and the lid
One outer surface is articulated, which is articulated with the cylinder, to support the cylinder to carry out the open and close movement.
In an embodiment of the present invention, which further includes an opening and a barn door, and the position of the opening is corresponding should
Product mounting table, the barn door are articulated through a bearing with the lid, and cover and be set in the opening.
In an embodiment of the present invention, which is set on a surface of the barn door, the cylinder and the shading
Another surface of plate is articulated, and the barn door is made to carry out the open and close movement along the bearing.
In an embodiment of the present invention, exposure lamp group in the side includes four groups of guide rails, this waits guide rails with the product mounting table
Centered on extend outwardly setting, and its extending direction of adjacent guide rail is orthogonal.It includes four lamp bars that the side, which exposes lamp group,
Four lamp bars are respectively arranged on four groups of guide rails, and to face this respectively to be exposed for the direction of illumination of four lamp bars
Four sides of body.
In an embodiment of the present invention, the lamp bars such as this are ultraviolet light lamp bar.
In an embodiment of the present invention, which is a ultraviolet lamp.
In an embodiment of the present invention, which further includes a control assembly, and the control assembly and the side expose
Lamp group is electrically connected, and to make the lamp bars such as this form a linkage status, and adjusts the lamp bars such as this according to the size of the body to be exposed
Position.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of one embodiment of exposure device of the present invention.
Fig. 2 is the perspective exploded view of one embodiment of exposure device of the present invention.
Fig. 3 A and 3B are that the side of one embodiment of exposure device of the present invention exposes lamp group displacement diagram one and two.
Fig. 4 is the structural schematic diagram of another embodiment of exposure device of the present invention.
Appended drawing reference：
1 shell 2 of exposure device
21 side wall 22 of inner wall
23 inner surface 231,231a of lid
Outer surface 232,232a opening 233
234 bearing 235 of barn door
3 side of product mounting table exposes lamp group 4
41 sliding block 411 of guide rail
42 face exposure lamp group 5 of lamp bar
51 cylinder 52 of main exposure lamp
53 transmission component 50 of support plate
The body 7 to be exposed of accommodating space 6
8 direction 91 of control assembly
Open and close movement 92
Specific embodiment
The technical means and structures that the present invention uses, hereby draw with regard to its feature and function of elaborate of the embodiment of the present invention
It is as follows, but it is noted that the content does not constitute restriction of the invention.
It please refers to shown in Fig. 1 and 2, is respectively the structural schematic diagram and solid point of one embodiment of exposure device of the present invention
Solve schematic diagram.The present invention, which provides one kind, can be directed to product side and front while the exposure device 1 being exposed, including：
One shell 2, a product mounting table 3, one side exposure lamp group 4 and a face exposure lamp group 5.
As shown in Figure 1, the shell 2 be opaque material made by container comprising an inner wall 21, four side walls 22 and
One lid 23, four side wall 22 are set to the periphery of the inner wall 21, and orthogonal with the inner wall 21.The lid 23 can be covered in
On the equal side walls 22, make the inner wall 21, four side wall 22 and the lid 23 that an accommodating space 6 be collectively formed.
As shown in Fig. 2, side exposure lamp group 4 includes plural groups guide rail 41 and a plurality of lamp bars 42.The plural groups are led
Rail 41 is set on the inner wall 21, is all provided with sliding block 411 on each group of guide rail 41, which can be along the equal guide rail
41 are slided.A plurality of lamp bars 42 are ultraviolet light lamp bar or ultraviolet LED lamp bar (UV-LED), are distinguished saturating
The sliding block 411 is crossed to be connected with wherein one group of guide rail 41, the direction of illuminations of the lamp bars such as this 42 faces body 7 to be exposed, can for
The side of exposure body 7 is exposed.Wherein, the lamp bars such as this 42 can carry out displacement movement along the equal guide rails 41, wait exposing according to this
The size of body of light 7 adjusts its exposure position.
The product mounting table 3 is located in the accommodating space 6, can be a bracket, a pedestal, a platform or a carrier,
But not limited to this.The product mounting table 3 is exposed as the target area of exposure to place body 7 to be exposed.This is to be exposed
Body 7 includes being coated with the knot such as substrate, carrier or panel of optical resin (Optical Clear Resin, OCR) or photoresist layer
Structure is placed on being exposed on product mounting table 3, can promote the curing degree and deaeration effect of photoresist layer or optical resin
Fruit.The product mounting table 3 can be set up in the top of the grade guide rails 41, and do not influence this etc. lamp bars 42 are carried out along the grade guide rails 41
Displacement movement.
The face exposure lamp group 5 includes a main exposure lamp 51 and a transmission component 50.The main exposure lamp 51 is one ultraviolet
Light lamp is set on an inner surface 231 of the lid 23, when the lid 23 is covered on the grade side walls 22, the main exposure
The direction of illumination of lamp 51 faces the body 7 to be exposed, and is exposed for the front of body 7 to be exposed.The transmission component 50 with should
Connection is combined in one outer surface 232 of lid 23, to make the lid 23 carry out an open and close movement 92.The transmission component 50 can be
One mechanical arm, a cylinder assembly, a transmission shaft component or a bearing motor, but not limited to this.
In an embodiment of the present invention, which further includes a control assembly 8, which is a transmission knot
Structure has a control terminal, which is electrically connected with the equal sliding blocks 411 or guide rail 41, and the lamp bars such as this 42 is made to form one
Linkage status, which can make the lamp bars such as this 42 on sliding rail while carrying out displacement movement, according to the size of the body 7 to be exposed
Quickly adjust the position that the lamp bars such as this 42 are located on sliding rail.
It please refers to shown in Fig. 3 A and Fig. 3 B, is that the side of one embodiment of exposure device of the present invention exposes lamp group displacement signal
Figure one and two.In an embodiment of the present invention, side exposure lamp group 4 includes four groups of guide rails 41 and four lamp bars 42, each
Group guide rail 41 all includes two tracks parallel to each other, and sliding block 411 is all provided on every track.Wherein, four groups of guide rails
41 are extended outwardly setting centered on the product mounting table 3, and adjacent its extending direction of guide rail 41 is orthogonal.Described four
Lamp bar 42 is respectively arranged on four groups of guide rails 41, and the direction of illumination of four lamp bars 42 faces four sides of the body to be exposed respectively
Face.The lamp bars such as this 42 can carry out a displacement movement along guide rail 41, adjust its exposure position according to the size of the body to be exposed.?
In one embodiment of the invention, when the size of body to be exposed is smaller, which can adjust its exposure along guide rail 41
Position, close to four sides of body 7 to be exposed, as shown in Figure 3A.When the size of body to be exposed is larger, four lamp bars 42 are also
Displacement movement can be carried out with along the direction of the arrow 91, adjust its exposure position, as shown in Figure 3B.
Please more as shown in fig.4, it is another example structure schematic diagram of exposure device of the present invention.Another reality of the present invention
It applies in example, which further includes an opening 233 and a barn door 234, and the position of the opening 233 corresponds to the product mounting table
3, which is articulated through a bearing 235 with the lid 23, can cover and be set in the opening 233, and can be somebody's turn to do
Bearing 235 is that axle center carries out open and close movement 92.The face exposure lamp group of second embodiment of the invention includes a main exposure lamp 51, one
Cylinder 52 and a support plate 53, the main exposure lamp 51 are a ultraviolet lamp, are set to the inner surface 231a of the barn door 234
On, when the barn door 234 is covered in the opening 233, the direction of illumination of the main exposure lamp 51 faces the body 7 to be exposed, and
It is exposed for the front of body 7 to be exposed.The outer surface 232a of the cylinder 52 and the barn door 234 is articulated, to make this
Barn door 234 carries out open and close movement 92 along the bearing 235, and 53 side of support plate and the cylinder 52 are pivotally connected, the other side with
The shell 2 connection.The support plate 53 can be used to that the cylinder 52 is supported to carry out open and close movement 92, by barn door 234 with the bearing 235
For axle center swing offset, removed from the opening 233, user can be carried out from the opening 233 body 7 to be exposed placement or
Replacement, with the progress of sharp exposure operation.
Therefore please refer to shown in whole attached drawings, the present invention provides a kind of exposure device, in addition to that can be directed to product side simultaneously
Outside face and front are exposed, lamp bar can also arrange in pairs or groups with sliding rail and use, and quickly adjust the position of exposure, be applicable to difference
The product to be exposed of size, without manufacturing cost is effectively reduced because exposing fixture again outside various sizes of turnout.
The above description is only an embodiment of the present invention, is not intended to limit the implementation manners and the protection scope of the present invention, right
For those skilled in the art, it should can appreciate that and all replace with being equal made by description of the invention and diagramatic content
It changes and obviously changes obtained scheme, should all be included within the scope of the present invention.
Claims (10)
1. a kind of exposure device, which is characterized in that including：
One shell, including an inner wall, four side walls and a lid, four side wall are set to the periphery of the inner wall, lid covering
In on the equal side walls, make the inner wall, four side wall and the lid that an accommodating space be collectively formed；
One product mounting table is located at the accommodating space, to place a body to be exposed；
One side exposes lamp group, including：
Plural groups guide rail is set on the inner wall；
A plurality of lamp bars are connected with wherein guide rail described in one group through a sliding block respectively, enable the lamp bars such as this along this etc.
Guide rail carries out a displacement movement, and wherein the direction of illumination of the lamp bars such as this faces the body to be exposed；
One face exposure lamp group, including：
One main exposure lamp, is set on an inner surface of the lid, and the direction of illumination of the main exposure lamp faces the body to be exposed；
One transmission component is articulated with an outer surface of the lid, to make the lid carry out an open and close movement.
2. exposure device as described in claim 1, wherein the transmission component includes a cylinder and a support plate, the cylinder with
One outer surface of the lid is articulated, which is articulated with the cylinder, to support the cylinder to carry out the open and close movement.
3. exposure device as described in claim 1, wherein the lid further includes an opening and a barn door, the position of the opening
The corresponding product mounting table is set, which is articulated through a bearing with the lid, and covers and be set in the opening.
4. exposure device as claimed in claim 3, wherein the main exposure lamp is set on a surface of the barn door, the cylinder
It is articulated with another surface of the barn door, the barn door is made to carry out the open and close movement along the bearing.
5. exposure device as described in claim 1, wherein exposure lamp group in the side includes four groups of guide rails, this waits guide rails with the production
Extend outwardly setting centered on product mounting table.
6. exposure device as claimed in claim 5, wherein its extending direction of adjacent guide rail is orthogonal.
7. exposure device as claimed in claim 5, wherein exposure lamp group in the side includes four lamp bars, four lamp bars point
It is not set on four groups of guide rails, and the direction of illumination of four lamp bars faces four sides of the body to be exposed respectively.
8. exposure device as described in claim 1, wherein the lamp bars such as this are ultraviolet light lamp bar.
9. exposure device as described in claim 1, wherein the main exposure lamp is a ultraviolet lamp.
10. exposure device as described in claim 1, wherein the exposure device further includes a control assembly, the control assembly with
The side exposes lamp group and is electrically connected, to make the lamp bars such as this form a linkage status, and according to the big ditty of the body to be exposed
It is whole this etc. lamp bars position.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810667779.0A CN108873616A (en) | 2018-06-26 | 2018-06-26 | Exposure device |
| TW107122832A TW202001431A (en) | 2018-06-26 | 2018-07-02 | Exposure device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810667779.0A CN108873616A (en) | 2018-06-26 | 2018-06-26 | Exposure device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108873616A true CN108873616A (en) | 2018-11-23 |
Family
ID=64295649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810667779.0A Pending CN108873616A (en) | 2018-06-26 | 2018-06-26 | Exposure device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108873616A (en) |
| TW (1) | TW202001431A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117406558A (en) * | 2023-11-03 | 2024-01-16 | 苏州天准科技股份有限公司 | Side exposure device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2288463Y (en) * | 1996-09-17 | 1998-08-19 | 陈健辉 | Exposure device for mask-making technology |
| KR20060055945A (en) * | 2004-11-19 | 2006-05-24 | 삼성전자주식회사 | Apparatus for exposing an edge portion of a semiconductor wafer |
| CN201828768U (en) * | 2010-06-04 | 2011-05-11 | 志圣科技（广州）有限公司 | Platform device of exposure machine |
| CN204247495U (en) * | 2014-11-25 | 2015-04-08 | 昆山国显光电有限公司 | Light supply apparatus |
| CN105137722A (en) * | 2015-09-24 | 2015-12-09 | 京东方科技集团股份有限公司 | Edge exposure device and edge exposure method |
| CN207457703U (en) * | 2017-10-26 | 2018-06-05 | 东莞市多普光电设备有限公司 | It is a kind of to install the exposure machine for sliding light source buck plate |
| CN207457701U (en) * | 2017-09-01 | 2018-06-05 | 昆山恒盛电子有限公司 | Pressing shaft type exposes gauge |
-
2018
- 2018-06-26 CN CN201810667779.0A patent/CN108873616A/en active Pending
- 2018-07-02 TW TW107122832A patent/TW202001431A/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2288463Y (en) * | 1996-09-17 | 1998-08-19 | 陈健辉 | Exposure device for mask-making technology |
| KR20060055945A (en) * | 2004-11-19 | 2006-05-24 | 삼성전자주식회사 | Apparatus for exposing an edge portion of a semiconductor wafer |
| CN201828768U (en) * | 2010-06-04 | 2011-05-11 | 志圣科技（广州）有限公司 | Platform device of exposure machine |
| CN204247495U (en) * | 2014-11-25 | 2015-04-08 | 昆山国显光电有限公司 | Light supply apparatus |
| CN105137722A (en) * | 2015-09-24 | 2015-12-09 | 京东方科技集团股份有限公司 | Edge exposure device and edge exposure method |
| CN207457701U (en) * | 2017-09-01 | 2018-06-05 | 昆山恒盛电子有限公司 | Pressing shaft type exposes gauge |
| CN207457703U (en) * | 2017-10-26 | 2018-06-05 | 东莞市多普光电设备有限公司 | It is a kind of to install the exposure machine for sliding light source buck plate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117406558A (en) * | 2023-11-03 | 2024-01-16 | 苏州天准科技股份有限公司 | Side exposure device |
| CN117406558B (en) * | 2023-11-03 | 2024-07-05 | 苏州天准科技股份有限公司 | Side exposure device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202001431A (en) | 2020-01-01 |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181123 |