CN117401373A - Transfer equipment and test system - Google Patents

Abstract

The invention discloses a transfer device and a test system, wherein the transfer device comprises: the transfer material box is provided with a first accommodating space and a second accommodating space for accommodating target products; the displacement device drives the transfer material box to move; the taking and placing device moves the target product outside the transferring equipment to the inside of the first accommodating space or moves the target product inside the second accommodating space to the outside of the transferring equipment through the movement of the taking and placing device; the discharging manipulator moves the target product in the first accommodating space to the outside of the transferring equipment or away from the first accommodating space through the movement of the discharging manipulator so as to avoid the taking and placing device; and the material returning manipulator moves the target product in the second accommodating space to the outside of the transfer equipment or away from the second accommodating space through the movement of the material returning manipulator so as to avoid the taking and placing device. The technical scheme of the invention improves the transfer efficiency when transferring the target product.

Description

Transfer equipment and test system

Technical Field

The invention relates to the technical field of test systems, in particular to transfer equipment and a test system.

Background

When the product is produced, processed, detected or tested, the time required by each process is different, when the process with larger time difference exists, the product is difficult to produce in a flow line mode, and for the process with longer time required, a plurality of identical devices are generally arranged to carry out the same process, so that the production efficiency of the product is improved.

However, this production method makes it necessary to transfer the product between a large number of devices, and in the prior art, the operator generally uses both hands to carry or uses a trolley to push the material.

This mode of transportation has the problem of inefficiency.

Disclosure of Invention

The invention mainly aims to provide a transfer device which aims to improve transfer efficiency when a target product is transferred.

In order to achieve the above object, the present invention provides a transfer device, comprising:

the transfer material box is provided with a first accommodating space and a second accommodating space, and the first accommodating space and the second accommodating space are used for accommodating target products;

the displacement device is arranged at the bottom of the transferring material box and is in driving connection with the transferring material box so as to drive the transferring material box to move;

the picking and placing device is movably arranged on the displacement device and is arranged at intervals with the transferring material box, and moves the target product outside the transferring equipment to the inside of the first accommodating space or moves the target product inside the second accommodating space to the outside of the transferring equipment through the self-movement of the picking and placing device;

the discharging manipulator is movably arranged on one side of the transferring material box, and moves the target product in the first accommodating space to the outside of the transferring equipment or away from the first accommodating space through the movement of the discharging manipulator so as to avoid the taking and placing device; and

The material returning manipulator is movably arranged on one side of the transferring material box, and moves the target product in the second accommodating space to the outside of the transferring equipment or away from the second accommodating space through the movement of the material returning manipulator so as to avoid the taking and placing device.

Optionally, the blanking manipulator and the material returning manipulator are symmetrically arranged and positioned on two opposite sides of the picking and placing device.

Optionally, the material returning manipulator includes:

a first lifting assembly;

the first lifting assembly is in driving connection with the first telescopic assembly so as to enable the first telescopic assembly to be close to or far from the second accommodating space; and

the pushing piece is driven by the first telescopic component to be connected with the pushing piece, and the pushing piece is driven by the first telescopic component to extend into the second accommodating space and push the target product to leave the second accommodating space or exit the second accommodating space.

Optionally, the pick-and-place device includes:

the second lifting assembly is arranged at intervals with the transferring material box;

the second lifting assembly is in driving connection with the rotating assembly; and

Get and put the mechanism, the rotation component drive is connected get and put the mechanism and make get and put the mechanism and rotate, so that get and put the structure orientation transport the magazine or towards the outside of transportation equipment.

Optionally, the pick-and-place mechanism includes:

the rotating assembly is in driving connection with the second telescopic assembly;

the second telescopic component is in driving connection with the material taking manipulator so that the material taking manipulator stretches into or withdraws from the second accommodating space;

the rotating assembly is in driving connection with the third telescopic assembly so as to enable the second telescopic assembly and the third telescopic assembly to synchronously rotate; and

and the third telescopic component is in driving connection with the discharging manipulator so that the discharging manipulator stretches into or withdraws from the first accommodating space.

The invention also provides a test system, which comprises:

the transfer device described above;

the storage device is arranged at one end of the transfer device; and

the test equipment is arranged on one side of the transfer equipment, the product to be tested moves to the second accommodating space through the storage equipment, and the product to be tested in the second accommodating space moves to the test equipment through the transfer equipment; the tested product moves from the testing device to the first accommodating space through the transferring device, and the tested product in the first accommodating space moves to the storage device through the transferring device.

Optionally, the storage device includes:

the transfer device is arranged at one end of the transfer equipment and is provided with a third accommodating space and a fourth accommodating space;

the storage device is arranged at one side of the transfer device, which is far away from the transfer equipment, and is provided with a fifth accommodating space and a sixth accommodating space, wherein the fifth accommodating space is used for accommodating the tested product, and the sixth accommodating space is used for accommodating the product to be tested; and

the charging and discharging device is movably arranged between the transfer device and the storage device, the product to be tested moves from the sixth accommodating space to the fourth accommodating space through the charging and discharging device, and the product to be tested in the fourth accommodating space moves to the second accommodating space through the transfer device; the tested product moves from the first accommodating space to the third accommodating space through the discharging mechanical arm, and the tested product in the third accommodating space moves to the fifth accommodating space through the feeding and discharging device.

Optionally, the transferring device includes:

the transfer material box is arranged at one end of the transfer equipment and is provided with the third accommodating space and the fourth accommodating space; and

The transfer manipulator is movably arranged on one side, deviating from the transfer equipment, of the transfer material box, and the transfer manipulator moves the product to be tested in the fourth accommodating space to the second accommodating space or away from the fourth accommodating space through the movement of the transfer manipulator so as to avoid the feeding and discharging device.

Optionally, the loading and unloading device includes:

the third lifting assembly is arranged between the transfer device and the storage device;

the third lifting assembly is in driving connection with the feeding and discharging assembly, so that the feeding and discharging assembly is positioned between the fourth accommodating space and the sixth accommodating space or between the third accommodating space and the fifth accommodating space; and

the direction adjusting assembly is rotatably arranged on the feeding and discharging assembly, the direction of the product to be tested is adjusted by the direction adjusting assembly, and the product to be tested moves from the interior of the sixth accommodating space to the interior of the fourth accommodating space through the direction adjusting assembly by the feeding and discharging assembly.

Optionally, the direction-adjusting assembly includes:

the direction-adjusting table is rotationally arranged on the feeding and discharging assembly, the product to be tested moves to the direction-adjusting table through the feeding and discharging assembly, and the direction-adjusting table drives the product to be tested to change direction through rotation of the direction-adjusting table; and

And the scanner is electrically connected with the direction-adjusting table, is arranged at one side of the product to be detected, which is away from the direction-adjusting table, and is used for detecting the direction of the product to be detected.

The transfer equipment in one technical scheme of the embodiment of the invention comprises a transfer material box, a displacement device, a taking and placing device, a discharging mechanical rear part and a material returning manipulator, wherein a target product can be transferred through the transfer equipment, so that the target product is moved to a target position to perform a target procedure. The transfer material box is provided with a first accommodating space and a second accommodating space, wherein the first accommodating space and the second accommodating space can accommodate target products, the first accommodating space is used for accommodating target products after target processes, and the second accommodating space is used for accommodating target products before target processes. When the second accommodating space accommodates the target product, the transferring material box moves to the target position through the displacement device, the taking and placing device firstly moves the target product which is not subjected to the target process from the inside of the second accommodating space to the outside of the transferring equipment to perform the target process, then the taking and placing device moves the target product which is subjected to the target process from the outside to the inside of the first accommodating space, and then the discharging manipulator moves out the target product which is subjected to the target process in the first accommodating space, so that the target product is convenient to store or perform the next process. When the product placed in the second accommodating space goes wrong, the material returning manipulator in the transferring equipment can move out the product inside the second accommodating space, so that the transferring equipment is prevented from transferring the wrong product to the target position, the wrong product is prevented from being subjected to the target procedure, the yield is improved, the waste of production time is avoided, and the production efficiency is improved. The discharging manipulator is movably arranged on one side of the transferring material box, and can move to avoid the taking and placing device when the taking and placing device places a target product into the first accommodating space; the material returning manipulator is movably arranged on one side of the transferring material box, when the material taking and placing device is taken out from the second accommodating space, the material returning manipulator can move to avoid the material taking and placing device, the mutual interference of a plurality of manipulators can be avoided through the position change of the material discharging manipulator and the material returning manipulator, the smooth transfer of a target product can be ensured, on the other hand, when a plurality of target positions are correspondingly arranged, the action frequency of the material taking and placing device is higher than that of the material discharging manipulator and the material returning manipulator, compared with the material taking and placing device, the material taking and placing device avoids the material discharging manipulator and the material returning manipulator, the avoidance times of the scheme is less, so that the efficiency of the material taking and placing device for taking or placing the target product is improved, and the production efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of an embodiment of a transfer apparatus according to the present invention;

FIG. 2 is a schematic diagram of a transfer apparatus according to a second embodiment of the present invention;

FIG. 3 is a schematic view of a portion of a transfer apparatus according to an embodiment of the present invention;

fig. 4 is a schematic structural view of a material returning manipulator of the transfer device of the present invention;

FIG. 5 is a schematic diagram of a pick-and-place device of the transfer apparatus according to the present invention;

fig. 6 is a schematic diagram of a pick-and-place device of the transfer device according to the present invention;

FIG. 7 is a schematic diagram of a test system according to an embodiment of the present invention;

FIG. 8 is a schematic diagram of a second embodiment of a testing system according to the present invention;

FIG. 9 is a schematic diagram of a storage device of the test system of the present invention;

FIG. 10 is a schematic diagram of a portion of a test system according to an embodiment of the invention;

FIG. 11 is a schematic view of a portion of a storage device of the testing system of the present invention;

fig. 12 is a schematic diagram of a part of a loading and unloading device of a storage device of the test system according to the present invention.

Reference numerals illustrate:

the achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.

In the present invention, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, if there is a description of "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" as it appears throughout includes three parallel schemes, for example "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B are satisfied simultaneously. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.

The invention provides a transfer device. The transfer device is suitable for transferring various types of products, such as wafers, circuit boards, substrates and the like, and the wafers are taken as examples in the specification.

Referring to fig. 1 to 3, fig. 1 is a schematic structural diagram of an embodiment of a transfer apparatus according to the present invention, fig. 2 is a schematic structural diagram of an embodiment of a transfer apparatus according to the present invention, and fig. 3 is a schematic structural diagram of a portion of an embodiment of a transfer apparatus according to the present invention.

In an embodiment of the present invention, the transferring apparatus 100 includes:

the transfer material box 110 is provided with a first accommodating space 111 and a second accommodating space 112, and the first accommodating space 111 and the second accommodating space 112 are used for accommodating target products;

the displacement device 120 is arranged at the bottom of the transfer material box 110 and is in driving connection with the transfer material box 110 to drive the transfer material box 110 to move;

the picking and placing device 130 is movably arranged on the displacement device 120 and is arranged at intervals with the transferring material box 110, and the picking and placing device 130 moves the target product outside the transferring equipment 100 to the inside of the first accommodating space 111 or moves the target product inside the second accommodating space 112 to the outside of the transferring equipment 100 through the movement of the picking and placing device 130;

the discharging manipulator 140 is movably arranged on one side of the transferring material box 110, and the discharging manipulator 140 moves the target product in the first accommodating space 111 to the outside of the transferring equipment 100 or away from the first accommodating space 111 through the movement of the discharging manipulator 140 so as to avoid the taking and placing device 130; and

the material returning manipulator 150 is movably arranged at one side of the transferring material box 110, and the material returning manipulator 150 moves the target product in the second accommodating space 112 to the outside of the transferring device 100 or away from the second accommodating space 112 through the movement of the material returning manipulator 150 so as to avoid the taking and placing device 130.

The transfer device 100 in one embodiment of the present invention includes a transfer magazine 110, a displacement device 120, a pick-and-place device 130, a post-blanking machine, and a returning manipulator 150, where a target product may be transferred by the transfer device 100, so that the target product is moved to a target position to perform a target process. The transfer magazine 110 is provided with a first accommodating space 111 and a second accommodating space 112, wherein the first accommodating space 111 and the second accommodating space 112 can accommodate target products, the first accommodating space 111 is used for accommodating target products after target processes, and the second accommodating space 112 is used for accommodating target products before target processes. When the second accommodating space 112 accommodates the target product, the transferring magazine 110 moves to the target position through the displacement device 120, the picking and placing device 130 firstly moves the target product which is not subjected to the target process from the inside of the second accommodating space 112 to the outside of the transferring device 100 to perform the target process, then the picking and placing device 130 moves the target product which has already completed the target process from the outside to the inside of the first accommodating space 111, and then the discharging manipulator 140 moves out the target product which has completed the target process inside the first accommodating space 111, so that the target product is convenient to store or perform the next process. When the product placed in the second accommodating space 112 goes wrong, the material returning manipulator 150 in the transferring device 100 can move out the product in the second accommodating space 112, so that the transferring device 100 is prevented from transferring the wrong product to the target position, the target procedure on the wrong product is avoided, the yield is improved, the waste of production time is avoided, and the production efficiency is improved. The discharging manipulator 140 is movably arranged at one side of the transferring material box 110, and when the picking and placing device 130 places the target product into the first accommodating space 111, the discharging manipulator 140 can move to avoid the picking and placing device 130; the material returning manipulator 150 is movably arranged on one side of the transferring material box 110, when the material taking and placing device 130 is taken out from the second accommodating space 112, the material returning manipulator 150 can move to avoid the material taking and placing device 130, through the position change of the material discharging manipulator 140 and the material returning manipulator 150, the mutual interference of a plurality of manipulators can be avoided, and the smooth transfer of the target product is ensured, on the other hand, when a plurality of target positions are correspondingly arranged, the action frequency of the material taking and placing device 130 is higher than that of the material discharging manipulator 140 and the material returning manipulator 150, and compared with the material taking and placing device 130, the material taking and placing device 130 avoids the material discharging manipulator 140 and the material returning manipulator 150, the avoiding times of the scheme are less, so that the efficiency of the material taking and placing device 130 for taking or placing the target product is improved, and the production efficiency is improved.

Referring to fig. 2 to 3, in this embodiment, the first accommodating space 111 and the second accommodating space 112 can accommodate a plurality of target products, specifically in this embodiment, the target products are wafers, the wafers are attached to a film-shaped material, such as a blue film or a white film, the film-shaped material is attached to an iron ring, and the transfer of the wafers is realized by transferring the iron ring in the actual transfer process. A plurality of grooves are respectively arranged on two opposite inner walls of the first accommodating space 111, the grooves on the two inner walls are opposite to each other, and two ends of the iron ring are inserted into the two grooves, so that the iron ring is arranged in the first accommodating space 111, wafers are accommodated, the second accommodating space 112 and the first accommodating space 111 are arranged in the same mode, and the structure is simple and easy to manufacture. The displacement device 120 may be a combination of a motor and a wheel, or a combination of a motor and a rack-and-pinion structure, a guide rail with a rack is provided, a motor and a gear are provided at the bottom of the transport material box 110, the motor drives the gear to rotate, and simultaneously, the gear and the rack are meshed to enable the transport material box 110 to travel along the guide rail, the specific structural form can be adjusted and designed according to requirements, and the functional requirements can be met, without limitation.

Alternatively, the discharging manipulator 140 and the returning manipulator 150 are symmetrically disposed and located at two opposite sides of the picking and placing device 130.

Referring to fig. 3, in this embodiment, the blanking manipulator 140 and the returning manipulator 150 are symmetrically arranged, and by adopting a similar structure, the types of parts in the transferring apparatus 100 are reduced, so that the processing and assembly of the transferring apparatus 100 are facilitated, the manufacturing efficiency of the transferring apparatus 100 is improved, and the manufacturing cost of the transferring apparatus 100 is reduced. The discharging manipulator 140 and the returning manipulator 150 are arranged on two opposite sides of the picking and placing device 130, so that the picking and placing device 130 is more convenient and easy to realize.

Optionally, the material returning manipulator 150 includes:

a first elevation assembly 151;

the first telescopic component 152, the first lifting component 151 is in driving connection with the first telescopic component 152, so that the first telescopic component 152 is close to or far from the second accommodating space 112; and

the pushing member 153, the first telescopic component 152 is driven to connect with the pushing member 153, and the pushing member 153 is driven by the first telescopic component 152 to extend into the second accommodating space 112 and push the target product to leave the second accommodating space 112 or exit the second accommodating space 112.

Referring to fig. 3 and 4, in this embodiment, the material returning manipulator 150 includes a first lifting assembly 151, a first telescopic assembly 152 and a material pushing member 153, and a specific operation flow is as follows: the first lifting component 151 is lifted to drive the first telescopic component 152 to lift, and then drive the pushing component 153 to approach the second accommodating space 112, when the pushing component 153 is aligned to the second accommodating space 112, the first telescopic component 152 stretches out to drive the pushing component 153 to stretch out, so that a target product in the second accommodating space 112 is pushed away from the second accommodating space 112, then the first telescopic component 152 retracts to drive the pushing component 153 to retract, collision between the pushing component 153 and the transferring material box 110 during subsequent descending is avoided, then the first lifting component 151 descends to drive the first telescopic component 152 to descend, and then drive the pushing component 153 to be far away from the second accommodating space 112, so that the action of the picking and placing device 130 is avoided. The first lifting assembly 151 and the first telescopic assembly 152 are both linear reciprocating motion mechanisms, have simple structures and are easy to realize, and can be realized by adopting modes such as an air cylinder, an electric push rod, a screw nut mechanism and the like. The specific structure of the pushing member 153 may be adjusted according to the requirement, and may meet the functional requirement, which is not limited herein. When the material returning manipulator 150 moves the wafer, the pushing member 153 pushes all the iron rings in the second accommodating space 112 out of the second accommodating space 112 at the same time, and similarly, when the material discharging manipulator 140 moves the wafer, all the iron rings in the first accommodating space 111 are pushed out of the first accommodating space 111 at the same time, so that the transfer efficiency is high, and the production efficiency is improved.

Optionally, the pick-and-place device 130 includes:

the second lifting assembly 131 is arranged at intervals with the transferring material box 110;

the rotating assembly 132, the second lifting assembly 131 is in driving connection with the rotating assembly 132; and

the pick-and-place mechanism 133, and the rotating assembly 132 is drivingly connected to the pick-and-place mechanism 133 such that the pick-and-place mechanism 133 rotates to orient the pick-and-place structure toward the transfer magazine 110 or toward the exterior of the transfer device 100.

Referring to fig. 5 and 6, in this embodiment, the pick-and-place device 130 includes a second lifting component 131, a rotating component 132 and a pick-and-place mechanism 133, where rotation of the rotating component 132 can drive the pick-and-place mechanism 133 to rotate, first, the pick-and-place mechanism 133 is aligned with the second accommodating space 112, then the pick-and-place mechanism 133 is rotated to take out a target product that is not subjected to a target process from the inside of the second accommodating space 112, and then the rotating component 132 rotates to drive the pick-and-place mechanism 133 to rotate, so that the pick-and-place mechanism 133 is aligned with the outside of the transferring device 100, the pick-and-place mechanism 133 places the target product that is not subjected to the target process at a target position, then the pick-and-place mechanism 133 takes out the target product that is subjected to the target process from the target position, and then the rotating component 132 rotates to drive the pick-and-place mechanism 133 to rotate, so that the pick-and-place mechanism 133 is aligned with the first accommodating space 111, and the target product that is subjected to the target process is placed into the first accommodating space 111. In this process, the second lifting assembly 131 lifts to drive the rotating assembly 132 to lift, and further drive the picking and placing mechanism 133 to lift, so that the picking and placing mechanism 133 can be aligned to the first accommodating space 111 or the second accommodating space 112. In particular, in the present embodiment, the rotation component 132 rotates 90 ° to make the pick-and-place mechanism 133 face the transfer magazine 110 or face the outside of the transfer device 100, and the angle is easy to control, so that the relative positions of the transfer device 100 and the test device 300 are set.

Optionally, the pick-and-place mechanism 133 includes:

a second telescoping assembly 1331, the rotating assembly 132 being drivingly connected to the second telescoping assembly 1331;

the material taking mechanical arm 1332, and the second telescopic component 1331 is in driving connection with the material taking mechanical arm 1332 so that the material taking mechanical arm 1332 stretches into or withdraws from the second accommodating space 112;

a third telescoping assembly 1333, the rotating assembly 132 drivingly connected to the third telescoping assembly 1333 to enable the second telescoping assembly 1331 and the third telescoping assembly 1333 to rotate synchronously; and

the discharging mechanical arm 1334, and the third telescopic component 1333 is connected with the discharging mechanical arm 1334 in a driving mode so that the discharging mechanical arm 1334 stretches into or withdraws from the first accommodating space 111.

In this embodiment, the picking and placing mechanism 133 includes a second telescopic component 1331, a material taking manipulator 1332, a third telescopic component 1333 and a material placing manipulator 1334, when the rotating component 132 drives the picking and placing mechanism 133 to rotate, the rotating component 132 actually drives the second telescopic component 1331 and the third telescopic component 1333 to synchronously rotate, so that the second telescopic component 1331 and the third telescopic component 1333 can be synchronously aligned with the outside of the transferring device 100 or the transferring material box 110. Firstly, the second telescopic component 1331 is aligned to the second accommodating space 112, the second telescopic component 1331 drives the material taking manipulator 1332 to stretch out and draw back, a target product is taken out from the second accommodating space 112, then the rotating component 132 drives the second telescopic component 1331 and the third telescopic component 1333 to rotate, the second telescopic component 1331 and the third telescopic component 1333 face the target position, the third telescopic component 1333 drives the material discharging manipulator 1334 to stretch out and draw back, the target product with the target position completing the target process is taken out, then the second telescopic component 1331 drives the material taking manipulator 1332 to stretch out and back, the target product on the material taking manipulator 1332 is placed at the target position to perform the target process, then the rotating component 132 drives the second telescopic component 1331 and the third telescopic component 1333 to rotate, the third telescopic component 1333 is aligned to the first accommodating space 111, and then the third telescopic component 1333 drives the material discharging manipulator 1334 to stretch out and back, and the target product on the material discharging manipulator 1334 is placed into the first accommodating space 111. Specifically, in this embodiment, the material picking robot 1332 and the material placing robot 1334 transfer only one iron ring with a wafer. The second telescoping component 1331 and the third telescoping component 1333 can be realized by adopting a cylinder, an electric push rod, a screw nut mechanism or the like, and in the embodiment, the second telescoping component 1331 and the third telescoping component 1333 are arranged on the same support, the rotating component 132 drives the support to rotate so as to drive the second telescoping component 1331 and the third telescoping component 1333 to synchronously rotate, the second telescoping component 1331 and the third telescoping component 1333 are both in a form of synchronous belts, a mounting structure is arranged on the synchronous belts, when the belt wheels drive the synchronous belts to move, the mounting structure moves along with the synchronous belts, forward and backward rotation is driven so that the mounting structure realizes linear reciprocating motion, the second telescoping component 1331 is connected with the material taking manipulator 1332 through the mounting structure, the third telescoping component 1333 is connected with the material taking manipulator 1334 through the mounting structure, so that the material taking manipulator 1332 and the material taking manipulator 1334 are respectively driven to stretch, the second telescoping component 1331 and the third telescoping component 1333 are accurate in transmission through the form of the synchronous belts, and the positioning precision and the repeated positioning precision are high, so that the position of a target product is ensured when the target product is taken or put.

The invention also provides a test system, which comprises:

the transfer apparatus 100 described above;

a storage device 200 provided at one end of the transfer device 100; and

the test device 300 is arranged at one side of the transfer device 100, the product to be tested moves to the second accommodating space 112 through the storage device 200, and the product to be tested in the second accommodating space 112 moves to the test device 300 through the transfer device 100; the tested product is moved from the testing apparatus 300 to the first receiving space 111 by the transferring apparatus 100, and the tested product inside the first receiving space 111 is moved to the storage apparatus 200 by the transferring apparatus 100.

Referring to fig. 7 and 8, the present invention further provides a testing system, where the testing system includes a transferring device 100, a storage device 200, and a testing device 300, and the specific structure of the transferring device 100 refers to the foregoing embodiments, and since the testing system adopts all the technical solutions of all the foregoing embodiments, the testing system at least has all the beneficial effects brought by the technical solutions of the foregoing embodiments, which are not described herein in detail. The storage device 200 is disposed at one end of the transferring device 100, the testing device 300 is disposed at one side of the transferring device 100, the storage device 200 is used for storing a product to be tested which does not participate in the test and a tested product which completes the test, firstly, the storage device 200 moves the product to be tested to the second accommodating space 112 of the transferring device 100, then the transferring device 100 approaches to the testing device 300 through movement of the transferring device 100, and the picking and placing device 130 transfers the product to be tested from the interior of the second accommodating space 112 to the testing device 300 for testing; the picking and placing device 130 of the tested product in the testing device 300 moves the tested product from the testing device 300 to the inside of the first accommodating space 111, then the transferring device 100 approaches the storage device 200 through self movement, and the discharging manipulator 140 moves the tested product from the inside of the first accommodating space 111 to the inside of the storage device 200. In particular, in this embodiment, the displacement device 120 includes a track, the transfer magazine 110 moves linearly along the track, a plurality of test devices 300 are disposed on two sides of the track, the storage device 200 is disposed at one end of the track, when the transfer magazine 110 approaches the storage device 200, the storage device 200 moves a plurality of iron rings filled with wafers to the inside of the second accommodating space 112 at the same time, then the transfer magazine 110 moves between positions corresponding to the plurality of test devices 300, distributes the iron rings to the plurality of test devices 300, and collects the iron rings in the plurality of test devices 300 to the inside of the first accommodating space 111, then the transfer magazine 110 returns to the position of the space storage device 200, and the blanking manipulator 140 moves the iron rings on the inner wall of the first accommodating space 111 to the inside of the storage device 200 at the same time. In this process, the exchange time between the transfer magazine 110 and the storage device 200 is short, thereby improving the transfer efficiency.

Optionally, the storage device 200 includes:

the transfer device 210 is arranged at one end of the transfer equipment 100, and the transfer device 210 is provided with a third accommodating space 2111 and a fourth accommodating space 2112;

the storage device 220 is arranged at one side of the transfer device 210 away from the transfer device 100, the storage device 220 is provided with a fifth accommodating space 2211 and a sixth accommodating space 2212, the fifth accommodating space 2211 is used for accommodating the product to be tested, and the sixth accommodating space 2212 is used for accommodating the product to be tested; and

the loading and unloading device 230 is movably arranged between the transfer device 210 and the storage device 220, the product to be tested moves from the sixth accommodating space 2212 to the fourth accommodating space 2112 through the loading and unloading device 230, and the product to be tested in the fourth accommodating space 2112 moves to the second accommodating space 112 through the transfer device 210; the measured product moves from the first accommodating space 111 to the third accommodating space 2111 through the discharging manipulator 140, and the measured product in the third accommodating space 2111 moves to the fifth accommodating space 2211 through the loading and discharging device 230.

Referring to fig. 7 to 10, in the present embodiment, the storage apparatus 200 includes a transferring device 210, a storage device 220, and a loading and unloading device 230, a fifth receiving space 2211 in the storage device 220 is used for receiving a tested product, a sixth receiving space 2212 in the storage device 220 is used for receiving a product to be tested, an operator places an iron ring with an untested wafer inside the sixth receiving space 2212, and removes the iron ring with the tested wafer from the inside of the fifth receiving space 2211. The storage device 220 may be provided with a plurality of fifth receiving spaces 2211, so that a large number of products to be tested are loaded at a time, and waiting for the transferring device 100 to be sequentially distributed to the plurality of testing devices 300, so that the loading times are reduced; a plurality of sixth receiving spaces 2212 may be provided so as to be uniformly removed after a large amount of tested products are loaded, thereby reducing the number of blanking times. The number and the size of the fifth receiving space 2211 and the sixth receiving space 2212 may be the same or different, and in this embodiment, eight identical storage cartridges 221 are disposed in the storage device 220, wherein each of the four storage cartridges 221 is provided with one fifth receiving space 2211, and each of the other four storage cartridges 221 is provided with one sixth receiving space 2212, so that the types of parts of the storage device 220 are reduced, the processing difficulty is reduced, and the assembly efficiency of the storage device 220 is improved. The products to be tested in the fifth accommodation spaces 2211 are transferred to the third accommodation space 2111 through the loading and unloading device 230 in advance, the third accommodation space 2111 of the transferring device 210 and the first accommodation space 111 of the transferring device 100 adopt the same structure, and are conveniently in butt joint with the first accommodation space 111, so that the transfer speed of the products to be tested between the storage device 200 and the transferring device 100 is increased, and the transferring time is shortened. The fourth accommodating space 2112 of the transferring device 210 and the second accommodating space 112 of the transferring device 100 adopt the same structure, so that the product to be tested can be conveniently in butt joint with the second accommodating space 112, thereby accelerating the transfer speed of the product to be tested between the storage device 200 and the transferring device 100, shortening the transferring time, and the product to be tested entering the fourth accommodating space 2112 is transferred to the plurality of sixth accommodating spaces 2212 through the loading and unloading device 230 respectively. In the process of transferring the target product between the transferring magazine 211 and the storage magazine 221 by the loading and unloading device 230, the transferring magazine 110 can be far away from the transferring magazine 211 to distribute and collect the target product to the plurality of test devices 300, and the two transferring processes are independent of each other and can be simultaneously performed, thereby improving the transferring efficiency of the target product.

Optionally, the transferring device 210 includes:

a transfer box 211 provided at one end of the transfer apparatus 100 and having a third accommodation space 2111 and a fourth accommodation space 2112; and

the transfer manipulator 212 is movably arranged on one side of the transfer box 211 away from the transfer device 100, and the transfer manipulator 212 moves the product to be tested in the fourth accommodating space 2112 to the second accommodating space 112 or away from the fourth accommodating space 2112 through the movement of the transfer manipulator so as to avoid the loading and unloading device 230.

In this embodiment, the transfer device 210 includes a transfer magazine 211 and a transfer manipulator 212, when the transfer magazine 110 approaches the transfer magazine 211, the first accommodating space 111 of the transfer magazine 110 is opposite to the third accommodating space 2111 of the transfer magazine 211, so that the discharging manipulator 140 can move the tested product in the first accommodating space 111 to the inside of the third accommodating space 2111, and the second accommodating space 112 of the transfer magazine 110 is opposite to the fourth accommodating space 2112 of the transfer magazine 211, so that the transfer manipulator 212 can move the product to be tested in the fourth accommodating space 2112 to the inside of the second accommodating space 112. The transfer manipulator 212 is movably arranged at one side of the transfer material box 211, when the feeding and discharging device 230 is used for placing a product to be tested into the fourth accommodating space 2112, the transfer manipulator 212 can move to avoid the feeding and discharging device 230, and through position transformation of the transfer manipulator 212, mutual interference between the transfer manipulator 212 and the feeding and discharging device 230 can be avoided, so that the target product can be smoothly transported. In this embodiment, the transfer manipulator 212 is disposed on one side of the transfer magazine 211 facing away from the transfer magazine 110, and the transfer manipulator 212 and the material returning manipulator 150 have the same structure, so that the types of parts are reduced, the processing and assembly of the whole testing system are facilitated, the manufacturing efficiency of the testing system is improved, and the manufacturing cost is reduced.

Optionally, the loading and unloading device 230 includes:

a third lifting assembly 231 disposed between the transfer device 210 and the storage device 220;

the loading and unloading assembly 232, and the third lifting assembly 231 is in driving connection with the loading and unloading assembly 232, so that the loading and unloading assembly 232 is positioned between the fourth accommodating space 2112 and the sixth accommodating space 2212 or between the third accommodating space 2111 and the fifth accommodating space 2211; and

the direction adjusting component 233 is rotatably arranged on the feeding and discharging component 232, the direction of the product to be tested is adjusted by the direction adjusting component 233, and the product to be tested moves from the interior of the sixth accommodating space 2212 to the interior of the fourth accommodating space 2112 through the direction adjusting component 233 by the direction adjusting component 232.

Referring to fig. 11, in the embodiment, the loading and unloading device 230 includes a third lifting assembly 231, a loading and unloading assembly 232 and a direction adjusting assembly 233, the third lifting assembly 231 lifts and drives the loading and unloading assembly 232 to lift, so that a product to be tested in the sixth accommodating space 2212 can enter the fourth accommodating space 2112 through the loading and unloading assembly 232, and a product to be tested in the fifth accommodating space 2211 can enter the sixth accommodating space 2212 through the loading and unloading assembly 232. The direction-adjusting component 233 is arranged on the feeding and discharging component 232, the product to be tested passes through the direction-adjusting component 233 when passing through the feeding and discharging component 232, the direction-adjusting component 233 detects the placement direction of the product to be tested, when the placement direction of the product to be tested does not meet the test requirement of the test equipment 300, the direction-adjusting component 233 adjusts the placement direction of the product to be tested, so that the placement direction of the product to be tested meets the test requirement and then enters the fourth accommodating space 2112 through the feeding and discharging component 232, the test problem caused by the error of the placement direction is reduced, and the test accuracy is improved. The manner of moving the target product by the loading and unloading assembly 232 can be designed according to the type of the target product, specifically to the embodiment, a guide rail and a belt mechanism are arranged on the lifting platform, the belt mechanism adopts a synchronous belt transmission mode, a mounting structure is arranged on the synchronous belt, a manipulator is arranged on the mounting structure, the manipulator follows the synchronous belt to carry out linear reciprocating movement, and the manipulator drives the iron ring to move along the guide rail in a pushing and pulling mode, so that the wafer on the iron ring is moved.

In this embodiment, the feeding and discharging device 230 further includes a moving component 234, the moving component 234 drives the third lifting component 231 to move linearly, the third lifting component 231 includes two lifting tables that move synchronously, each lifting table is correspondingly provided with one feeding and discharging component 232, each feeding and discharging component 232 is correspondingly provided with one direction adjusting component 233, the interval between the two feeding and discharging components 232 corresponds to the interval between the two storage boxes 221, when one feeding and discharging component 232 is in butt joint with the middle transfer box 211, the other feeding and discharging component 232 is in butt joint with the storage box 221 at the same time, so that when a target product is transferred between one feeding and discharging component 232 and the middle transfer box 211, the other feeding and discharging component 232 can transfer the target product with the storage box 221, then through the movement of the moving component 234, the feeding and discharging component 232 in butt joint with the storage box 221 is in butt joint with the middle transfer box 211, the feeding and discharging component 232 in butt joint with the storage box 221 is in butt joint with the interval between the two feeding and discharging components 232, when one feeding and discharging component 232 is in butt joint with the middle transfer box 211, the target product is alternately transferred between the two feeding and discharging components 232 is in butt joint with the storage box 221, so that the number of target products can be increased, and the transfer time per unit transfer time and the transfer time between the storage boxes 211 is increased. The moving assembly 234 and the third lifting assembly 231 are both linear reciprocating mechanisms, and can be realized by means of an air cylinder, an electric push rod, a screw nut mechanism or the like, so that the functional requirements can be met, and the invention is not limited herein.

Optionally, the steering component 233 includes:

the direction-adjusting table 2331 is rotationally arranged on the feeding and discharging assembly 232, a product to be tested moves to the direction-adjusting table 2331 through the feeding and discharging assembly 232, and the direction-adjusting table 2331 drives the product to be tested to change direction through rotation of the direction-adjusting table 2331; and

the scanner 2332 is electrically connected with the direction-adjusting table 2331, and is arranged at one side of the product to be detected, which is away from the direction-adjusting table 2331, at intervals, and is used for detecting the direction of the product to be detected.

Referring to fig. 12, in this embodiment, the direction adjusting component 233 includes a direction adjusting table 2331 and a scanner 2332, the product to be measured moves to the direction adjusting table 2331 through the feeding and discharging component 232, the scanner 2332 detects the placement direction of the product to be measured on the direction adjusting table 2331, specifically in this embodiment, a bar code is arranged on an iron ring, when the scanner 2332 cannot scan the bar code, it is indicated that the placement direction of the wafer is wrong, the direction adjusting table 2331 rotates to drive the iron ring to rotate until the scanner 2332 scans the bar code, it is indicated that the placement direction of the wafer is correct, if the direction adjusting table 2331 rotates for more than one week, the scanner 2332 does not detect the bar code yet, it is indicated that no bar code is available, and error reporting can be performed.

Referring to fig. 7, in this embodiment, the test system further includes a control device 400, where the control device 400 is electrically connected to the transferring device 100, the storage device 200, and the test device 300, and the control device 400 enables the transferring device 100, the storage device 200, and the test device 300 to operate automatically, so that the operation efficiency of the whole test system is improved, and errors caused by personnel operation are reduced. The control device 400 may control a time point of transferring the target product between the transferring device 100 and the testing device 300, so that material transfer is regularly performed between the transferring device 100 and the testing device 300, thereby improving working efficiency of each testing device 300, and in a process of testing the testing device 300, the transferring device 100 may perform material transfer with the transferring device 210, thereby improving transfer efficiency, and further improving working efficiency of the whole testing system.

Referring to fig. 7, in this embodiment, the test system further includes a safety door 500, the safety door 500 is disposed at an end of the transfer device 100 facing away from the storage device 200, the safety door 500, the storage device 200 and the test device 300 enclose a transfer area, the transfer magazine 110 moves in this transfer area, the safety door 500 and the displacement device 120 are provided with an interlocking mechanism, when the safety door 500 is closed, the transfer magazine 110 of the transfer device 100 can only move through the displacement device 120, and when the safety door 500 is opened, the transfer magazine 110 cannot move.

The foregoing description is only of the optional embodiments of the present invention, and is not intended to limit the scope of the invention, and all the equivalent structural changes made by the description of the present invention and the accompanying drawings or the direct/indirect application in other related technical fields are included in the scope of the invention.

Claims (10)

1. A transfer apparatus, comprising:

the transfer material box is provided with a first accommodating space and a second accommodating space, and the first accommodating space and the second accommodating space are used for accommodating target products;

the displacement device is arranged at the bottom of the transferring material box and is in driving connection with the transferring material box so as to drive the transferring material box to move;

The picking and placing device is movably arranged on the displacement device and is arranged at intervals with the transferring material box, and moves the target product outside the transferring equipment to the inside of the first accommodating space or moves the target product inside the second accommodating space to the outside of the transferring equipment through the self-movement of the picking and placing device;

the discharging manipulator is movably arranged on one side of the transferring material box, and moves the target product in the first accommodating space to the outside of the transferring equipment or away from the first accommodating space through the movement of the discharging manipulator so as to avoid the taking and placing device; and

the material returning manipulator is movably arranged on one side of the transferring material box, and moves the target product in the second accommodating space to the outside of the transferring equipment or away from the second accommodating space through the movement of the material returning manipulator so as to avoid the taking and placing device.

2. The transfer apparatus of claim 1, wherein the blanking manipulator and the return manipulator are symmetrically disposed and located on opposite sides of the pick-and-place device.

3. The transfer apparatus of claim 2, wherein the reject robot comprises:

A first lifting assembly;

the first lifting assembly is in driving connection with the first telescopic assembly so as to enable the first telescopic assembly to be close to or far from the second accommodating space; and

the pushing piece is driven by the first telescopic component to be connected with the pushing piece, and the pushing piece is driven by the first telescopic component to extend into the second accommodating space and push the target product to leave the second accommodating space or exit the second accommodating space.

4. The transfer apparatus of claim 1, wherein the pick-and-place device comprises:

the second lifting assembly is arranged at intervals with the transferring material box;

the second lifting assembly is in driving connection with the rotating assembly; and

get and put the mechanism, the rotation component drive is connected get and put the mechanism and make get and put the mechanism and rotate, so that get and put the structure orientation transport the magazine or towards the outside of transportation equipment.

5. The transfer apparatus of claim 4, wherein the pick-and-place mechanism comprises:

the rotating assembly is in driving connection with the second telescopic assembly;

the second telescopic component is in driving connection with the material taking manipulator so that the material taking manipulator stretches into or withdraws from the second accommodating space;

The rotating assembly is in driving connection with the third telescopic assembly so as to enable the second telescopic assembly and the third telescopic assembly to synchronously rotate; and

and the third telescopic component is in driving connection with the discharging manipulator so that the discharging manipulator stretches into or withdraws from the first accommodating space.

6. A test system, comprising:

the transfer device of any one of claims 1-5;

the storage device is arranged at one end of the transfer device; and

the test equipment is arranged on one side of the transfer equipment, the product to be tested moves to the second accommodating space through the storage equipment, and the product to be tested in the second accommodating space moves to the test equipment through the transfer equipment; the tested product moves from the testing device to the first accommodating space through the transferring device, and the tested product in the first accommodating space moves to the storage device through the transferring device.

7. The test system of claim 6, wherein the storage device comprises:

the transfer device is arranged at one end of the transfer equipment and is provided with a third accommodating space and a fourth accommodating space;

The storage device is arranged at one side of the transfer device, which is far away from the transfer equipment, and is provided with a fifth accommodating space and a sixth accommodating space, wherein the fifth accommodating space is used for accommodating the tested product, and the sixth accommodating space is used for accommodating the product to be tested; and

the charging and discharging device is movably arranged between the transfer device and the storage device, the product to be tested moves from the sixth accommodating space to the fourth accommodating space through the charging and discharging device, and the product to be tested in the fourth accommodating space moves to the second accommodating space through the transfer device; the tested product moves from the first accommodating space to the third accommodating space through the discharging mechanical arm, and the tested product in the third accommodating space moves to the fifth accommodating space through the feeding and discharging device.

8. The test system of claim 7, wherein the relay device comprises:

the transfer material box is arranged at one end of the transfer equipment and is provided with the third accommodating space and the fourth accommodating space; and

the transfer manipulator is movably arranged on one side, deviating from the transfer equipment, of the transfer material box, and the transfer manipulator moves the product to be tested in the fourth accommodating space to the second accommodating space or away from the fourth accommodating space through the movement of the transfer manipulator so as to avoid the feeding and discharging device.

9. The test system of claim 7, wherein the loading and unloading device comprises:

the third lifting assembly is arranged between the transfer device and the storage device;

the third lifting assembly is in driving connection with the feeding and discharging assembly, so that the feeding and discharging assembly is positioned between the fourth accommodating space and the sixth accommodating space or between the third accommodating space and the fifth accommodating space; and

the direction adjusting assembly is rotatably arranged on the feeding and discharging assembly, the direction of the product to be tested is adjusted by the direction adjusting assembly, and the product to be tested moves from the interior of the sixth accommodating space to the interior of the fourth accommodating space through the direction adjusting assembly by the feeding and discharging assembly.

10. The test system of claim 9, wherein the steering assembly comprises:

the direction-adjusting table is rotationally arranged on the feeding and discharging assembly, the product to be tested moves to the direction-adjusting table through the feeding and discharging assembly, and the direction-adjusting table drives the product to be tested to change direction through rotation of the direction-adjusting table; and

and the scanner is electrically connected with the direction-adjusting table, is arranged at one side of the product to be detected, which is away from the direction-adjusting table, and is used for detecting the direction of the product to be detected.