CN117381552A - Polishing method and polishing device for ultra-smooth polishing of optical lens - Google Patents
Polishing method and polishing device for ultra-smooth polishing of optical lens Download PDFInfo
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- CN117381552A CN117381552A CN202311642368.3A CN202311642368A CN117381552A CN 117381552 A CN117381552 A CN 117381552A CN 202311642368 A CN202311642368 A CN 202311642368A CN 117381552 A CN117381552 A CN 117381552A
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- 238000005498 polishing Methods 0.000 title claims abstract description 382
- 230000003287 optical effect Effects 0.000 title claims abstract description 97
- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000007788 liquid Substances 0.000 claims abstract description 219
- 239000002994 raw material Substances 0.000 claims abstract description 60
- 239000000843 powder Substances 0.000 claims abstract description 40
- 238000004062 sedimentation Methods 0.000 claims abstract description 12
- 238000001556 precipitation Methods 0.000 claims description 22
- 239000002699 waste material Substances 0.000 claims description 13
- 239000012528 membrane Substances 0.000 claims description 11
- 238000001728 nano-filtration Methods 0.000 claims description 11
- 239000010687 lubricating oil Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000000725 suspension Substances 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 2
- 239000008187 granular material Substances 0.000 abstract description 5
- 238000012958 reprocessing Methods 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 36
- 239000002245 particle Substances 0.000 description 25
- 230000000694 effects Effects 0.000 description 12
- 238000003825 pressing Methods 0.000 description 10
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 8
- 238000000227 grinding Methods 0.000 description 7
- 239000012263 liquid product Substances 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007688 edging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010705 motor oil Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 229940099259 vaseline Drugs 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
- B24B13/0055—Positioning of lenses; Marking of lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The application relates to a polishing method and a polishing device for ultra-smooth polishing of an optical lens, which relate to the field of polishing treatment of the optical lens, wherein the polishing device for ultra-smooth polishing of the optical lens comprises a conveying tank, a settling tank and a polishing disk, wherein the conveying tank is used for storing polishing liquid raw materials subjected to ultrasonic vibration, and a first conveying piece is arranged in the conveying tank; the polishing disk is provided with a polishing mold for placing an optical lens to be polished, a first driving piece for driving the polishing mold to rotate and a fixing piece for fixing the optical lens to be polished; the polishing mould is provided with a plurality of liquid outlets, and a second conveying part for conveying upper liquid in the sedimentation tank to the plurality of liquid outlets is arranged in the sedimentation tank. The cooperation of each part in this application can be used to carry out the reprocessing to the polishing solution raw materials after ultrasonic vibration for the granule size of polishing powder reduces greatly in the polishing solution finished product, makes the optical lens carry out the product that obtains after the polishing treatment and can reach roughness requirement.
Description
Technical Field
The application relates to the field of optical lens polishing treatment, in particular to a polishing method and a polishing device for ultra-smooth polishing of an optical lens.
Background
In daily life, the application of optical lenses is widely seen, and in recent years, as the requirements of people on the smoothness and the precision of the optical lenses are higher and higher, the requirements on the precision of equipment in the production process are also improved. In the production and processing process of the optical lens, polishing is an important process, and the quality and efficiency of polishing directly influence the cost required by production.
The optical lens processing technology adopts the following procedures: rough machining and cutting, namely machining the optical lens into a certain shape, dimensional accuracy and surface roughness to play a role in molding; then sequentially performing rough grinding and fine grinding processes to fix the R value of the optical lens; then adopting an edging process to grind the outer diameter of the original optical lens to a specified outer diameter; then, through a polishing procedure, removing a finely-polished damage layer through polishing to meet the requirement of a specified surface defect grade, and simultaneously finishing the surface shape to meet the diaphragm and the local diaphragm number required by a drawing, so as to finally form a smooth and transparent surface; finally, the cleaning process and the cleaning process are carried out.
The polishing process is the process which has the greatest influence on the precision of the optical lens and is also the most important process in the processing process of the optical lens. When the polishing process is carried out, the optical lens to be polished is required to be placed on the polishing grinding tool, polishing liquid prepared by polishing powder is introduced into the contact surface of the polishing mould and the optical lens, namely the polishing surface, and the polishing grinding tool or the optical lens rotates subsequently, so that relative movement occurs between the contact surface of the polishing grinding tool and the optical lens to grind the polishing surface, and therefore, the performance of the polishing liquid has an important influence on the polishing quality of the optical lens.
The polishing powder is dissolved in the liquid to obtain the polishing liquid, while the polishing powder in the traditional polishing liquid used in the industry at present has coarser particles, and the particle size is usually between 0.5 and 1 mu m. Therefore, the polishing effect by using the traditional polishing solution is not ideal, and the smoothness of the optical lens obtained after polishing is difficult to reach the ideal state of roughness requirement.
Disclosure of Invention
In order to solve the problems in the prior art, the present application provides a polishing method and a polishing apparatus for ultra-smooth polishing of an optical lens.
The polishing method and the polishing device for ultra-smooth polishing of the optical lens adopt the following technical scheme:
the polishing device comprises a conveying tank, a settling tank and a polishing disk, wherein the conveying tank is used for storing polishing liquid raw materials subjected to ultrasonic vibration, a first conveying piece is arranged in the conveying tank, and the first conveying piece is used for conveying the polishing liquid raw materials subjected to ultrasonic vibration into the settling tank; the polishing device comprises a polishing disc, a first driving piece, a second driving piece and a fixing piece, wherein the polishing disc is provided with a polishing die used for placing an optical lens to be polished; the polishing mould is provided with a plurality of liquid outlets, a second conveying part is arranged in the sedimentation tank and used for conveying upper liquid in the sedimentation tank to the plurality of liquid outlets.
By adopting the technical scheme, when the optical lens is required to be polished, the optical lens to be polished is placed on the polishing die, so that the polishing surface of the optical lens is attached to the polishing die, and then the optical lens to be polished is fixed by the fixing piece, so that the optical lens to be polished is fixed on the polishing die; storing the polishing solution raw material subjected to ultrasonic vibration treatment into a conveying tank, conveying the polishing solution raw material into a precipitation tank through a first conveying piece, and standing and precipitating the polishing solution raw material in the precipitation tank; after a period of time, the polishing powder with larger particles is positioned in the lower layer liquid, and the polishing powder with smaller particles in the polishing liquid raw material is positioned in the upper layer liquid, namely the finished polishing liquid product; the upper liquid in the sedimentation tank is conveyed into a plurality of liquid outlets through the operation of the second conveying part, the first driving part drives the polishing mould to rotate simultaneously, so that relative motion is generated between the polishing mould and the polishing surface of the optical lens to be polished, and the polishing liquid finished product is sent out between the polishing mould and the polishing surface of the optical lens to be polished through the liquid outlets simultaneously, so that the optical lens is polished. The cooperation of all the components in the device can be used for reprocessing the polishing liquid raw material subjected to ultrasonic vibration to obtain a final polishing liquid finished product, and the polishing liquid finished product can be directly used in the polishing treatment of the optical lens to improve the efficiency and convenience of the polishing treatment of the optical lens; after the components are matched in the process, the particle size of polishing powder in the finished polishing solution is greatly reduced, and the product obtained after polishing the optical lens by using the finished polishing solution can reach the roughness requirement, thereby achieving the ideal polishing effect.
Optionally, a layered plate is arranged in the precipitation tank, a liquid passing port is formed in the layered plate, and the layered plate divides the space in the precipitation tank into a lower space and an upper space; the second conveying part comprises a first conveying pump, a liquid inlet of the first conveying pump is connected with a liquid inlet pipe, the liquid inlet pipe is located in the upper space, the liquid inlet pipe is connected to the laminated plate through a connecting part, a liquid outlet of the first conveying pump is communicated with a first liquid outlet pipe, and the first liquid outlet pipe is communicated with the liquid outlet.
By adopting the technical scheme, the space in the precipitation tank is divided into the lower space and the upper space by the layering plate, so that the polishing solution raw material in the precipitation tank is divided, the polishing solution raw material containing the polishing powder with smaller particles is positioned in the upper space to form a polishing solution finished product, and the polishing solution raw material containing the polishing powder with larger particles is positioned in the lower space; the first delivery pump operates, and as the liquid inlet pipe is connected to the laminated plate through the connecting piece, the polishing liquid finished product in the upper space is output to the first liquid outlet pipe through the liquid inlet pipe and then is delivered to the liquid outlets through the first liquid outlet pipe. The cooperation of each part of above-mentioned in-process is favorable to dividing the polishing solution raw materials in the precipitation tank to the first delivery pump of being convenient for more accurately carries the polishing solution finished product to the liquid outlet.
Optionally, the nanofiltration membrane is arranged in the liquid passing port, the first conveying member comprises a second conveying pump, the liquid inlet of the second conveying pump is communicated with the conveying tank, the liquid outlet of the second conveying pump is communicated with a second liquid outlet pipe, and the second liquid outlet pipe is communicated with the lower-layer space.
Through adopting above-mentioned technical scheme, the operation of second delivery pump carries the polishing solution raw materials in the delivery jar to the second drain pipe in, and the polishing solution raw materials passes through the lower floor space of second drain pipe blowout to the precipitation tank in, and the less polishing powder of granule upwards floats, later gets into in the upper space through the nanofiltration membrane, and the great polishing powder of granule is then intercepted by the nanofiltration membrane and is located in the lower floor space, carries out further control to the granule size of polishing powder in the upper space from this to ensure that the granule size of polishing powder in the polishing solution finished product accords with the requirement.
Optionally, the layering board slides and locates in the setting tank, be provided with on the setting tank and be used for driving the layering board vertically gliding second driving piece.
Through adopting above-mentioned technical scheme, the second driving piece is used for driving the layering board and carries out vertical slip in the precipitation tank, and the slip of layering board will make the size in upper space and lower floor's space change, from this can be more nimble the size to upper space control to the capacity of the finished polishing solution that uses at last is controlled.
Optionally, a liquid guide seat is arranged on the periphery of the polishing mold, a liquid guide cavity is formed in the liquid guide seat, a liquid outlet cavity communicated with the liquid outlet is formed in the polishing mold, and the liquid outlet cavity is communicated with the liquid guide cavity; the liquid guide cavity is internally provided with a ring groove, the first liquid outlet pipe is provided with a sliding block, the sliding block is positioned in the ring groove and is in sliding connection with the ring groove, and the liquid outlet of the first liquid outlet pipe faces the liquid guide cavity.
By adopting the technical scheme, the finished polishing solution is conveyed into the first liquid outlet pipe through the first conveying pump, then flows into the liquid guide cavity through the liquid outlet of the first liquid outlet pipe, then flows into the liquid outlet cavity through the liquid guide cavity, and flows out through the liquid outlet to carry out polishing treatment; when polishing treatment is carried out, the polishing mould is driven by the first driving piece to rotate, the polishing mould drives the liquid guide seat to synchronously rotate, at the moment, the annular groove rotates, relative sliding is generated between the sliding block and the annular groove, the sliding block is not moved, and the position of the first liquid outlet pipe is fixed and different, so that the first liquid outlet pipe is prevented from synchronously rotating along with the polishing mould during polishing treatment, and therefore the first liquid outlet pipe is wound and the follow-up operation is influenced.
Optionally, the polishing disk is provided with a waste liquid tank, and the polishing mold is located in the waste liquid tank.
By adopting the technical scheme, the waste liquid tank is used for collecting waste liquid in the polishing treatment process, so that the waste liquid flowing down through the polishing die is prevented from flowing randomly, and the subsequent burden of cleaning work is avoided.
On the other hand, the application also provides a polishing method for ultra-smooth polishing of the optical lens, and the polishing device for ultra-smooth polishing of the optical lens comprises the following steps:
and (3) preparing a polishing solution:
blending polishing powder and pure water according to a certain proportion to obtain a polishing liquid raw material, carrying out ultrasonic vibration on the polishing liquid raw material, and storing the polishing liquid raw material subjected to ultrasonic vibration treatment into a conveying tank; the first conveying part conveys the polishing solution raw material in the conveying tank into the precipitation tank for precipitation, and takes the upper layer liquid as a polishing solution finished product;
polishing:
placing the optical lens to be polished on a polishing mold, enabling a polishing surface of the optical lens to be attached to the polishing mold, and fixing the optical lens to be polished on the polishing mold through a fixing piece; the second conveying part conveys the upper liquid in the sedimentation tank to a plurality of liquid outlets, and the first driving part drives the polishing die to rotate simultaneously.
By adopting the technical scheme, the polishing powder is firstly mixed with the pure water and then subjected to ultrasonic vibration, the ultrasonic vibration enables the polishing powder to be mixed with the pure water to form a polishing liquid raw material, and polishing powder particles in the polishing liquid raw material can be further crushed, so that the particles of the polishing powder in the polishing liquid raw material are reduced; after the polishing solution raw material obtained after ultrasonic vibration treatment is placed in a precipitation tank for a period of time, polishing powder with smaller particles in the polishing solution raw material is positioned in upper liquid, polishing powder with larger particles is positioned in lower liquid, and then the upper liquid is taken as a final polishing solution finished product, so that the particle size of the polishing powder in the polishing solution finished product is further controlled to obtain a polishing solution finished product in an ideal state; and after the preparation of the finished polishing solution is finished, polishing the optical lens by using the finished polishing solution. The polishing solution finished product obtained by the method has greatly reduced particle size of polishing powder, and the product obtained by polishing the optical lens with the polishing solution finished product can reach the roughness requirement, thereby achieving the ideal polishing effect.
Optionally, in the step of preparing the polishing solution, the mixing range ratio of the polishing powder to the pure water is 1: n and N have values of 30-70.
By adopting the technical scheme, in order to avoid that the content of polishing powder in the final polishing liquid finished product is too high or too low, the concentration of the polishing liquid finished product is too thick, so that the surface roughness of the polished optical lens cannot meet the requirement, or the concentration of the polishing liquid finished product is too thin, the polishing liquid finished product is difficult to achieve the polishing effect, and the polishing powder and the pure water are blended according to the proportion of 1:30-1:70.
Optionally, in the step of preparing the polishing solution, after the polishing solution raw material is subjected to ultrasonic vibration, lubricating oil is added into the polishing solution raw material, then the polishing solution raw material is subjected to ultrasonic vibration again, and the polishing solution raw material subjected to ultrasonic vibration treatment twice is stored in a conveying tank.
By adopting the technical scheme, the lubricating oil is added into the polishing liquid raw material subjected to ultrasonic vibration treatment, so that the finally obtained polishing liquid finished product contains a certain amount of lubricating oil, and under the action of the lubricating oil, when the polishing liquid finished product is used for polishing in the follow-up process, the movement between the optical lens subjected to polishing treatment and the polishing grinding tool is smoother, and the clamping stagnation cannot occur.
Optionally, in the step of preparing the polishing solution, after the polishing solution raw material subjected to ultrasonic vibration treatment is kept stand for a period of time, taking the suspension within the range of M of the upper layer as a finished polishing solution product, wherein the value of M is 30% -50%.
Through the technical scheme, through experiments, when the polishing solution raw material subjected to ultrasonic vibration treatment is kept stand for a period of time, polishing powder with smaller particles floats to suspension within 30-50% of the upper layer in the polishing solution raw material, so that the suspension within 30-50% of the upper layer is taken as a polishing solution finished product, and the particle size of the polishing powder in the polishing solution finished product is further controlled, so that the polishing solution raw material in an ideal state is obtained.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the particle size of the polishing powder is greatly reduced, and the product obtained after polishing the optical lens by using the polishing liquid finished product can reach the roughness requirement, thereby achieving the ideal polishing effect;
2. adding lubricating oil into the polishing liquid raw material subjected to ultrasonic vibration treatment, so that the finished polishing liquid product finally obtained contains a certain amount of lubricating oil, and when the polishing liquid product is used for polishing in the follow-up process, the polished optical lens and the polishing grinding tool move more smoothly without clamping stagnation;
3. the operation of the second delivery pump conveys the polishing solution raw material in the delivery tank to the second liquid outlet pipe, the polishing solution raw material is sprayed out to the lower space of the precipitation tank through the second liquid outlet pipe, the polishing powder with smaller particles floats upwards and then enters the upper space through the nanofiltration membrane, the polishing powder with larger particles is intercepted by the nanofiltration membrane and is positioned in the lower space, and therefore the particle size of the polishing powder in the upper space is further controlled, and the particle size of the polishing powder in a polishing solution finished product is ensured to meet the requirements.
Drawings
FIG. 1 is a schematic view showing the overall structure of a polishing apparatus for ultra-smooth polishing of an optical lens in example 1 of the present application;
FIG. 2 is a cross-sectional view of a polishing apparatus for ultra-smooth polishing of an optical lens in example 1 of the present application;
FIG. 3 is a schematic view of the screw, layering plate and slide bar fit in example 1 of the present application;
fig. 4 is an enlarged view of a portion a in fig. 2.
Reference numerals illustrate: 1. a transfer pot; 2. a precipitation tank; 3. polishing disk; 4. a first conveying member; 41. a second transfer pump; 42. a second liquid outlet pipe; 5. polishing the mold; 6. a first driving member; 61. a second driving motor; 7. a fixing member; 71. a telescopic rod; 72. briquetting; 8. a liquid outlet; 9. a second conveying member; 91. a first transfer pump; 92. a liquid inlet pipe; 93. a first liquid outlet pipe; 10. a laminated plate; 11. a liquid passing port; 12. a top space; 13. a lower space; 14. a first driving motor; 15. a screw rod; 16. a slide bar; 17. a liquid guide seat; 18. a liquid guiding cavity; 19. a liquid outlet cavity; 20. a ring groove; 21. a slide block; 22. a waste liquid tank; 23. a hoop clamp; 24. and (5) mounting a frame.
Detailed Description
The present application is described in further detail below in conjunction with figures 1-4.
Example 1
The embodiment 1 of the application discloses a polishing device for ultra-smooth polishing of an optical lens, which is used in a polishing method for ultra-smooth polishing of an optical lens, and referring to fig. 1 and 2, the polishing device for ultra-smooth polishing of an optical lens comprises a conveying tank 1, a settling tank 2 and a polishing disk 3, wherein the conveying tank 1 is used for storing polishing liquid raw materials subjected to ultrasonic vibration, a first conveying member 4 is arranged in the conveying tank 1, and the first conveying member 4 is used for conveying the polishing liquid raw materials subjected to ultrasonic vibration into the settling tank 2; the polishing disc 3 is provided with a polishing die 5 for placing an optical lens to be polished, the polishing disc 3 is provided with a first driving piece 6 for driving the polishing die 5 to rotate, and the polishing disc 3 is provided with a fixing piece 7 for fixing the optical lens to be polished; a plurality of liquid outlets 8 are formed in the polishing mould 5, a second conveying member 9 is arranged in the settling tank 2, and the second conveying member 9 is used for conveying upper-layer liquid in the settling tank 2 to the plurality of liquid outlets 8.
Referring to fig. 2, a layering plate 10 vertically slides in the settling tank 2, an initial position of the layering plate 10 is located at a position 40% of the height of the settling tank 2, a liquid passing port 11 is formed in the layering plate 10, the layering plate 10 divides the space in the settling tank 2 into a lower space 13 and an upper space 12, and the ratio of the lower space 13 to the upper space 12 is 6:4, a nanofiltration membrane (not shown in the figure) is arranged in the liquid passing port 11, and the liquid passing port 11 is closed by the nanofiltration membrane; the first conveying member 4 comprises a second conveying pump 41 arranged in the conveying tank 1, a liquid inlet of the second conveying pump 41 is communicated with the conveying tank 1, a liquid outlet of the second conveying pump 41 is communicated with a second liquid outlet pipe 42, and the second liquid outlet pipe 42 is communicated with the lower-layer space 13.
The operation of the second transfer pump 41 transfers the polishing liquid raw material in the transfer pipe to the second liquid outlet pipe 42, the polishing liquid raw material is sprayed out into the lower space 13 of the precipitation tank 2 through the second liquid outlet pipe 42, the polishing powder with smaller particles floats upwards and then enters the upper space 12 through the nanofiltration membrane, and the polishing powder with larger particles is intercepted by the nanofiltration membrane and is positioned in the lower space 13.
Referring to fig. 2 and 3, the second conveying member 9 includes a first conveying pump 91, a liquid inlet of the first conveying pump 91 is connected with a liquid inlet pipe 92, a corrugated pipe is arranged in the middle of the liquid inlet pipe 92, the liquid inlet pipe 92 is located in the upper space 12, the liquid inlet pipe 92 is connected to the layering plate 10 through a hoop clamp 23, a liquid outlet of the first conveying pump 91 is communicated with a first liquid outlet pipe 93, and the first liquid outlet pipe 93 is communicated with the liquid outlet 8.
The slurry material containing smaller particles of slurry is disposed in the upper space 12 through the nanofiltration membrane, so that the slurry material in the upper space 12 is supplied to the plurality of liquid outlets 8 through the first liquid outlet pipe 93 by the slurry material being supplied to the first liquid outlet pipe 93 through the liquid inlet pipe 92 by the operation of the first transfer pump 91.
In embodiment 1 of the present application, the connector is selected as the hoop clip 23.
Referring to fig. 2 and 3, a first driving motor 14 is installed at the top of the precipitation tank 2, an output shaft of the first driving motor 14 is fixedly connected with a screw rod 15 coaxially, the screw rod 15 is vertically arranged in the precipitation tank 2 and is rotationally connected with the precipitation tank 2, a sliding rod 16 parallel to the screw rod 15 is fixed in the precipitation tank 2, and the layering plate 10 penetrates through the sliding rod 16 and is in sliding connection with the sliding rod 16.
The operation of the first driving motor 14 drives the screw rod 15 to rotate, thereby driving the layering plate 10 to vertically slide in the precipitation tank 2, and the sliding of the layering plate 10 changes the sizes of the upper layer space 12 and the lower layer space 13, so that the size of the upper layer space 12 can be controlled more flexibly, and the capacity of a finished polishing solution used finally can be controlled.
In embodiment 1 of the present application, the second driving member is selected from the first driving motor 14 and the screw 15.
Referring to fig. 2, a mounting frame 24 is fixed on one side of the settling tank 2, a second driving motor 61 is mounted on the mounting frame 24, an output shaft of the second driving motor 61 is fixed with the polishing disc 3, and rotation of the output shaft of the second driving motor 61 drives the polishing disc 3 to rotate, so that the polishing die 5 is driven to rotate.
In embodiment 1 of the present application, in order to facilitate the installation of the polishing disc 3, the installation frame 24 is provided, and the first driving member 6 is selected as the second driving motor 61, and the second driving motor 61 drives the polishing disc 3 to rotate so as to drive the polishing mold 5 to rotate; in other embodiment 1, the second driving motor 61 may be mounted on the polishing disk 3, and the output shaft of the second driving motor 61 is fixed to the polishing mold 5, thereby directly driving the polishing mold 5 to rotate.
Referring to fig. 2, the fixing member 7 includes a telescopic rod 71 mounted on the mounting frame 24, the telescopic rod 71 is vertically arranged and is an electrically controlled telescopic rod 71, a fixed end of the telescopic rod 71 is fixed on the mounting frame 24, a pressing block 72 for pressing the optical lens is fixed on a movable rod of the telescopic rod 71, the pressing block 72 is arranged opposite to the polishing mold 5, and a placing cavity for placing the optical lens is formed between the pressing block 72 and the polishing mold 5.
When polishing the optical lens, the optical lens is placed on the polishing mold 5, so that the polishing surface of the optical lens is attached to the polishing mold 5, the telescopic rod 71 is operated subsequently, and the telescopic movement of the telescopic rod 71 drives the pressing block 72 to press down, so that the pressing block 72 moves along the direction approaching to the polishing mold 5, and the optical lens is pressed and fastened between the pressing block 72 and the polishing mold 5.
Referring to fig. 2 and 4, a liquid guide seat 17 is arranged on the periphery of the polishing mold 5, a liquid guide cavity 18 is formed in the liquid guide seat 17, a liquid outlet cavity 19 communicated with the liquid outlet 8 is formed in the polishing mold 5, and the liquid outlet cavity 19 is communicated with the liquid guide cavity 18; the liquid guide cavity 18 is internally provided with a ring groove 20, the first liquid outlet pipe 93 is fixedly provided with a sliding block 21, the sliding block 21 is positioned in the ring groove 20 and is in sliding connection with the ring groove 20, and the outlet of the first liquid outlet pipe 93 is vertically downward and faces the liquid guide cavity 18.
The polishing solution finished product is conveyed into a first liquid outlet pipe 93 through a first conveying pump 91, then flows into a liquid guide cavity 18 through a liquid outlet 8 of the first liquid outlet pipe 93, then flows into a liquid outlet cavity 19 through the liquid guide cavity 18, and flows out through the liquid outlet 8 to carry out polishing treatment; when polishing is performed, the first driving piece 6 drives the polishing mold 5 to rotate, the polishing mold 5 drives the liquid guide seat 17 to synchronously rotate, at the moment, the annular groove 20 rotates, the sliding block 21 and the annular groove 20 relatively slide, the sliding block 21 is not moved, and the positions of the first liquid outlet pipes 93 are fixed differently, so that the first liquid outlet pipes 93 are prevented from synchronously rotating along with the polishing mold 5 during polishing, and the first liquid outlet pipes 93 are prevented from winding to influence subsequent operation.
Referring to fig. 2, the polishing disk 3 is provided with a waste liquid tank 22, and the polishing mold 5 is positioned in the waste liquid tank 22; the waste liquid tank 22 is used for collecting waste liquid during polishing treatment, thereby avoiding the burden of subsequent cleaning work caused by random flow of waste liquid flowing down through the polishing die 5.
The implementation principle of the polishing device for ultra-smooth polishing of the optical lens in the embodiment 1 of the application is as follows: when polishing treatment is required to be carried out on the optical lens, the optical lens to be polished is placed on the polishing die 5, so that the polishing surface of the optical lens is attached to the polishing die 5; the telescopic rod 71 then drives the pressing block 72 to press down, so that the optical lens is pressed and fastened between the pressing block 72 and the polishing die 5; the polishing solution raw material after ultrasonic vibration treatment is stored in a conveying tank 1, and is conveyed into a settling tank 2 through a second conveying pump 41, and is settled in the settling tank 2; after a period of time, the polishing powder with larger particles is positioned in the lower layer liquid, and the polishing powder with smaller particles in the polishing liquid raw material is positioned in the upper layer liquid, namely the finished polishing liquid product; the upper liquid in the sedimentation tank 2 is conveyed into the liquid outlets 8 through the operation of the first conveying pump 91, the polishing mould 5 is driven to rotate by the second driving motor 61 at the same time, so that relative motion is generated between the polishing mould 5 and the polishing surface of the optical lens to be polished, and the polishing liquid finished product is simultaneously sent out between the polishing mould 5 and the polishing surface of the optical lens to be polished through the liquid outlets 8, so that polishing of the optical lens is carried out. The cooperation of each part in the device can be used for reprocessing the polishing solution raw material subjected to ultrasonic vibration to obtain a final polishing solution finished product, and the polishing solution finished product can be directly used in the polishing treatment of the optical lens so as to improve the efficiency and convenience of the polishing treatment of the optical lens.
Example 2
Embodiment 2 of the present application discloses a polishing method for ultra-smooth polishing of an optical lens, and a polishing apparatus for ultra-smooth polishing of an optical lens in embodiment 1 is applied, comprising the following steps:
and (3) preparing a polishing solution:
s1: blending 0.5-1 mu m polishing powder and pure water according to the proportion of 1:N to obtain a polishing solution raw material;
s2: carrying out ultrasonic vibration on the polishing solution raw material, wherein the value of Y is 250-480 Hz;
s3: adding lubricating oil into the polishing liquid raw material, carrying out ultrasonic vibration on the polishing liquid raw material again, storing the polishing liquid raw material subjected to ultrasonic vibration treatment twice into a conveying tank 1, conveying the polishing liquid raw material in the conveying tank 1 into a settling tank 2 by a second conveying pump 41 for settling, and taking upper liquid as a polishing liquid finished product.
Polishing:
placing the optical lens to be polished on the polishing mold 5, enabling the polishing surface of the optical lens to be attached to the polishing mold 5, and driving the pressing block 72 to press down through the telescopic rod 71 so as to fix the optical lens to be polished on the polishing mold 5; the first transfer pump 91 transfers the upper liquid in the settling tank 2 to the plurality of liquid outlets 8, and the second drive motor 61 drives the polishing mold 5 to rotate at the same time.
TABLE 1
The effects of the polishing liquid products obtained under the conditions of values 30, 40, 50, 60 and 70 of N in Table 1 are most preferably obtained when the mixing ratio of the polishing powder to the pure water is 1:50. The polishing solution finished product obtained by the blending proportion is not too thick, so that the surface roughness of the optical lens subjected to polishing treatment can meet the requirement, and is not too thin, and the polishing solution finished product can achieve the polishing effect.
When polishing is carried out on the finished product of the corresponding polishing solution under the conditions of the N values of 30, 40, 60 and 70, the smoothness of the optical lens obtained after polishing can also meet certain roughness requirements.
TABLE 2
The polishing effects corresponding to the values of Y in Table 2 of 250Hz, 310Hz, 360Hz, 420Hz and 480Hz were found to be most preferable when the polishing slurry material was ultrasonically vibrated.
TABLE 3 Table 3
Table 3 shows the effects of the finished polishing liquid products obtained under the conditions that the lubricating oil was selected from the group consisting of glycerin, engine oil and vaseline.
TABLE 4 Table 4
Table 4 shows the polishing effects corresponding to the glycerol solutions added at the proportions of 1%, 1.5%, 2%, 2.5% and 3%, and thus, the glycerol solution of 2% is most preferable.
TABLE 5
The polishing effects were obtained under the conditions of M values 50, 45, 40, 35 and 30 in Table 5, and it was found that the suspension in the upper layer of 40% was the most preferable as the final polishing slurry.
When polishing is carried out on the finished product of the corresponding polishing solution under the conditions of the values 50, 45, 35 and 30 of M, the smoothness of the optical lens obtained after polishing can also meet certain roughness requirements.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (10)
1. The utility model provides a burnishing device of optical lens piece super smooth polishing which characterized in that: the polishing device comprises a conveying tank (1), a settling tank (2) and a polishing disc (3), wherein the conveying tank (1) is used for storing polishing liquid raw materials subjected to ultrasonic vibration, a first conveying piece (4) is arranged in the conveying tank (1), and the first conveying piece (4) is used for conveying the polishing liquid raw materials subjected to ultrasonic vibration into the settling tank (2); the polishing device comprises a polishing disc (3), wherein a polishing die (5) for placing an optical lens to be polished is arranged on the polishing disc (3), a first driving piece (6) for driving the polishing die (5) to rotate is arranged on the polishing disc (3), and a fixing piece (7) for fixing the optical lens to be polished is arranged on the polishing disc (3); a plurality of liquid outlets (8) are formed in the polishing die (5), a second conveying piece (9) is arranged in the settling tank (2), and the second conveying piece (9) is used for conveying upper-layer liquid in the settling tank (2) to the plurality of liquid outlets (8).
2. The polishing apparatus for ultra-smooth polishing of an optical lens according to claim 1, wherein: a laminated plate (10) is arranged in the sedimentation tank (2), a liquid passing port (11) is formed in the laminated plate (10), and the space in the sedimentation tank (2) is divided into a lower space (13) and an upper space (12) by the laminated plate (10); the second conveying part (9) comprises a first conveying pump (91), a liquid inlet of the first conveying pump (91) is connected with a liquid inlet pipe (92), the liquid inlet pipe (92) is located in the upper space (12), the liquid inlet pipe (92) is connected to the laminated plate (10) through a connecting piece, a liquid outlet of the first conveying pump (91) is communicated with a first liquid outlet pipe (93), and the first liquid outlet pipe (93) is communicated with the liquid outlet (8).
3. The polishing apparatus for ultra-smooth polishing of an optical lens according to claim 2, wherein: be provided with the nanofiltration membrane in crossing liquid mouth (11), first delivery member (4) are including second delivery pump (41), the inlet of second delivery pump (41) with delivery tank (1) intercommunication, the liquid outlet intercommunication of second delivery pump (41) has second drain pipe (42), second drain pipe (42) and lower floor's space (13) intercommunication.
4. The polishing apparatus for ultra-smooth polishing of an optical lens according to claim 2, wherein: the sedimentation tank (2) is provided with a second driving piece for driving the sedimentation tank (10) to vertically slide.
5. The polishing apparatus for ultra-smooth polishing of an optical lens according to claim 2, wherein: the periphery of the polishing die (5) is provided with a liquid guide seat (17), the liquid guide seat (17) is provided with a liquid guide cavity (18), the polishing die (5) is provided with a liquid outlet cavity (19) communicated with the liquid outlet (8), and the liquid outlet cavity (19) is communicated with the liquid guide cavity (18); the novel liquid guide device is characterized in that an annular groove (20) is formed in the liquid guide cavity (18), a sliding block (21) is arranged on the first liquid outlet pipe (93), the sliding block (21) is located in the annular groove (20) and is in sliding connection with the annular groove (20), and a liquid outlet (8) of the first liquid outlet pipe (93) faces the liquid guide cavity (18).
6. The polishing apparatus for ultra-smooth polishing of an optical lens according to claim 1, wherein: a waste liquid groove (22) is formed in the polishing disc (3), and the polishing die (5) is located in the waste liquid groove (22).
7. A polishing method of ultra-smooth polishing of an optical lens, using the polishing apparatus of ultra-smooth polishing of an optical lens according to any one of claims 1 to 6, comprising the steps of:
and (3) preparing a polishing solution:
blending polishing powder and pure water according to a certain proportion to obtain a polishing liquid raw material, carrying out ultrasonic vibration on the polishing liquid raw material, and storing the polishing liquid raw material subjected to ultrasonic vibration treatment into a conveying tank (1); the first conveying part (4) conveys the polishing solution raw material in the conveying tank (1) into the precipitation tank (2) for precipitation, and takes upper-layer liquid as a polishing solution finished product;
polishing:
placing an optical lens to be polished on a polishing mold (5) so that a polishing surface of the optical lens is attached to the polishing mold (5), and fixing the optical lens to be polished on the polishing mold (5) through a fixing piece (7); the second conveying part (9) conveys the upper layer liquid in the sedimentation tank (2) to a plurality of liquid outlets (8), and the first driving part (6) drives the polishing die (5) to rotate simultaneously.
8. The polishing method for ultra-smooth polishing of an optical lens according to claim 7, wherein: in the polishing solution preparation step, the mixing range ratio of the polishing powder to the pure water is 1: n and N have values of 30-70.
9. The polishing method for ultra-smooth polishing of an optical lens according to claim 7, wherein: in the polishing liquid manufacturing step, after ultrasonic vibration is carried out on the polishing liquid raw material, lubricating oil is added into the polishing liquid raw material, then ultrasonic vibration is carried out on the polishing liquid raw material again, and the polishing liquid raw material subjected to ultrasonic vibration treatment twice is stored in a conveying tank (1).
10. The polishing method for ultra-smooth polishing of an optical lens according to claim 7, wherein: in the polishing solution manufacturing step, after the polishing solution raw material subjected to ultrasonic vibration treatment is kept stand for a period of time, suspension liquid within the range of M of the upper layer is taken as a polishing solution finished product, and the value of M is 30% -50%.
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Citations (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1274949A (en) * | 1999-05-19 | 2000-11-29 | 因芬尼昂技术北美公司 | System for transfering polishing liquid when semiconductor wafer is chemimechanical polished |
| CN1275417A (en) * | 1999-05-27 | 2000-12-06 | 三洋电机株式会社 | Method for removing removed substance from fluid |
| JP2003136392A (en) * | 2001-10-26 | 2003-05-14 | Nihon Micro Coating Co Ltd | Device and method for micro-barreling and polishing liquid |
| KR20030093522A (en) * | 2002-06-03 | 2003-12-11 | 주식회사 티씨케이 | Method for processing hole in cathode electrode |
| JP2005329501A (en) * | 2004-05-19 | 2005-12-02 | Keisuke Kamijo | Ultrasonic polishing tool and polishing device provided with the same |
| US20060040591A1 (en) * | 2004-08-20 | 2006-02-23 | Sujit Naik | Polishing liquids for activating and/or conditioning fixed abrasive polishing pads, and associated systems and methods |
| CN1840250A (en) * | 1999-05-27 | 2006-10-04 | 三洋电机株式会社 | Mobile maintenance system |
| CN102922399A (en) * | 2012-11-01 | 2013-02-13 | 深圳市深丰泰模具有限公司 | Six-axis linkage numerical control polishing machine |
| CN103264352A (en) * | 2013-04-26 | 2013-08-28 | 中国科学院上海光学精密机械研究所 | Polishing liquid circulating filtration and injection device for large-sized ring polishing machine |
| CN103737471A (en) * | 2013-12-27 | 2014-04-23 | 湖南宇晶机器股份有限公司 | Ultrathin and fragile workpiece polishing method and polishing device |
| US20160130475A1 (en) * | 2014-11-06 | 2016-05-12 | Disco Corporation | POLISHING LIQUID AND METHOD OF POLISHING SiC SUBSTRATE |
| CN205799103U (en) * | 2016-06-22 | 2016-12-14 | 河源市新天彩科技有限公司 | A kind of multifunction supersonic vibration grinding mechanism |
| CN106676612A (en) * | 2016-12-15 | 2017-05-17 | 华侨大学 | Method for preparing ceramic bond superfine abrasive polishing disk through electrophoresis codeposition |
| CN206825148U (en) * | 2017-06-19 | 2018-01-02 | 中国工程物理研究院激光聚变研究中心 | Polishing instrument and polishing machine |
| CN107671605A (en) * | 2017-08-01 | 2018-02-09 | 贰陆光学（苏州）有限公司 | A kind of optical mirror slip burnishing device and glossing |
| CN107761101A (en) * | 2017-09-29 | 2018-03-06 | 昌宏精密刀具（东莞）有限公司 | A kind of anodic oxidationization throws waste liquid aluminum removing method and recovery system |
| CN207858483U (en) * | 2017-12-20 | 2018-09-14 | 湖南锐科机器人技术有限公司 | A kind of production equipment for glass polishing grinding |
| CN108587474A (en) * | 2018-03-25 | 2018-09-28 | 湖南皓志科技股份有限公司 | A kind of alumina powder polishing fluid and preparation method thereof |
| CN208147592U (en) * | 2018-03-23 | 2018-11-27 | 昆明勋凯瑞光学仪器有限公司 | A kind of optical mirror slip cold working system |
| CN209125558U (en) * | 2018-08-30 | 2019-07-19 | 湖北莱恩光电科技有限公司 | A kind of burnishing device in glass cover-plate production process |
| CN110788699A (en) * | 2019-12-11 | 2020-02-14 | 中国工程物理研究院激光聚变研究中心 | Polishing disk and polishing system |
| CN210736892U (en) * | 2019-10-08 | 2020-06-12 | 新兴国琳铝业有限公司 | Polishing acid liquor cyclic utilization device |
| CN211255554U (en) * | 2019-12-11 | 2020-08-14 | 广州市信纳德生物科技有限公司 | Waste acid recovery device for electro-polishing aluminum product production equipment |
| CN212191373U (en) * | 2020-05-27 | 2020-12-22 | 宜昌宇能精密科技有限公司 | Deep hole gun drill lathe cutting oil recycling system is used in production of rotation direction system |
| US20200406310A1 (en) * | 2019-06-27 | 2020-12-31 | Applied Materials, Inc. | Steam generation for chemical mechanical polishing |
| CN112454157A (en) * | 2020-09-29 | 2021-03-09 | 湖南科技大学 | Controllable discontinuous shear thickening and polishing method and device |
| CN213136280U (en) * | 2020-09-16 | 2021-05-07 | 江苏天晶智能装备有限公司 | Self-clamping type metallographic polishing machine |
| CN214559484U (en) * | 2021-03-29 | 2021-11-02 | 焦作市万方集团精密制造有限公司 | Milling machine coolant liquid recycle device |
| CN214603548U (en) * | 2021-04-16 | 2021-11-05 | 漳州同恒光学科技有限公司 | Anti-splashing swinging machine |
| CN113732876A (en) * | 2021-09-11 | 2021-12-03 | 南京泰迅光学仪器有限公司 | Optical lens polishing device and polishing process |
| CN215470448U (en) * | 2021-08-11 | 2022-01-11 | 昂士特科技(深圳)有限公司 | Semiconductor chemical mechanical polishing liquid recovery processing device |
| CN114045153A (en) * | 2021-12-21 | 2022-02-15 | 清华大学 | Method for preparing cerium dioxide suspension, cerium dioxide suspension and polishing solution |
| CN114473850A (en) * | 2022-02-23 | 2022-05-13 | 陈韬 | Chemical polishing machine for silicon materials |
| CN115502786A (en) * | 2022-10-18 | 2022-12-23 | 东北大学 | High-efficient high accuracy ultrasonic chemical polishing and abluent integrated device |
| CN218435031U (en) * | 2021-12-20 | 2023-02-03 | 廖崇亨 | Metal surface treatment liquid recycling system |
| CN219403751U (en) * | 2023-03-31 | 2023-07-25 | 辽宁忠旺集团有限公司 | Inner cavity polishing device for aluminum profile extrusion molding die |
| CN116945033A (en) * | 2023-09-05 | 2023-10-27 | 中北大学 | Ultrasonic-assisted chemical mechanical polishing device for SiC single crystal wafer |
| CN117067028A (en) * | 2023-08-23 | 2023-11-17 | 湖南戴斯光电有限公司 | Manufacturing method of optical lens |
-
2023
- 2023-12-04 CN CN202311642368.3A patent/CN117381552B/en active Active
Patent Citations (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1274949A (en) * | 1999-05-19 | 2000-11-29 | 因芬尼昂技术北美公司 | System for transfering polishing liquid when semiconductor wafer is chemimechanical polished |
| CN1275417A (en) * | 1999-05-27 | 2000-12-06 | 三洋电机株式会社 | Method for removing removed substance from fluid |
| CN1840250A (en) * | 1999-05-27 | 2006-10-04 | 三洋电机株式会社 | Mobile maintenance system |
| JP2003136392A (en) * | 2001-10-26 | 2003-05-14 | Nihon Micro Coating Co Ltd | Device and method for micro-barreling and polishing liquid |
| KR20030093522A (en) * | 2002-06-03 | 2003-12-11 | 주식회사 티씨케이 | Method for processing hole in cathode electrode |
| JP2005329501A (en) * | 2004-05-19 | 2005-12-02 | Keisuke Kamijo | Ultrasonic polishing tool and polishing device provided with the same |
| US20060040591A1 (en) * | 2004-08-20 | 2006-02-23 | Sujit Naik | Polishing liquids for activating and/or conditioning fixed abrasive polishing pads, and associated systems and methods |
| CN102922399A (en) * | 2012-11-01 | 2013-02-13 | 深圳市深丰泰模具有限公司 | Six-axis linkage numerical control polishing machine |
| CN103264352A (en) * | 2013-04-26 | 2013-08-28 | 中国科学院上海光学精密机械研究所 | Polishing liquid circulating filtration and injection device for large-sized ring polishing machine |
| CN103737471A (en) * | 2013-12-27 | 2014-04-23 | 湖南宇晶机器股份有限公司 | Ultrathin and fragile workpiece polishing method and polishing device |
| US20160130475A1 (en) * | 2014-11-06 | 2016-05-12 | Disco Corporation | POLISHING LIQUID AND METHOD OF POLISHING SiC SUBSTRATE |
| CN205799103U (en) * | 2016-06-22 | 2016-12-14 | 河源市新天彩科技有限公司 | A kind of multifunction supersonic vibration grinding mechanism |
| CN106676612A (en) * | 2016-12-15 | 2017-05-17 | 华侨大学 | Method for preparing ceramic bond superfine abrasive polishing disk through electrophoresis codeposition |
| CN206825148U (en) * | 2017-06-19 | 2018-01-02 | 中国工程物理研究院激光聚变研究中心 | Polishing instrument and polishing machine |
| CN107671605A (en) * | 2017-08-01 | 2018-02-09 | 贰陆光学（苏州）有限公司 | A kind of optical mirror slip burnishing device and glossing |
| CN107761101A (en) * | 2017-09-29 | 2018-03-06 | 昌宏精密刀具（东莞）有限公司 | A kind of anodic oxidationization throws waste liquid aluminum removing method and recovery system |
| CN207858483U (en) * | 2017-12-20 | 2018-09-14 | 湖南锐科机器人技术有限公司 | A kind of production equipment for glass polishing grinding |
| CN208147592U (en) * | 2018-03-23 | 2018-11-27 | 昆明勋凯瑞光学仪器有限公司 | A kind of optical mirror slip cold working system |
| CN108587474A (en) * | 2018-03-25 | 2018-09-28 | 湖南皓志科技股份有限公司 | A kind of alumina powder polishing fluid and preparation method thereof |
| CN209125558U (en) * | 2018-08-30 | 2019-07-19 | 湖北莱恩光电科技有限公司 | A kind of burnishing device in glass cover-plate production process |
| US20200406310A1 (en) * | 2019-06-27 | 2020-12-31 | Applied Materials, Inc. | Steam generation for chemical mechanical polishing |
| CN210736892U (en) * | 2019-10-08 | 2020-06-12 | 新兴国琳铝业有限公司 | Polishing acid liquor cyclic utilization device |
| CN110788699A (en) * | 2019-12-11 | 2020-02-14 | 中国工程物理研究院激光聚变研究中心 | Polishing disk and polishing system |
| CN211255554U (en) * | 2019-12-11 | 2020-08-14 | 广州市信纳德生物科技有限公司 | Waste acid recovery device for electro-polishing aluminum product production equipment |
| CN212191373U (en) * | 2020-05-27 | 2020-12-22 | 宜昌宇能精密科技有限公司 | Deep hole gun drill lathe cutting oil recycling system is used in production of rotation direction system |
| CN213136280U (en) * | 2020-09-16 | 2021-05-07 | 江苏天晶智能装备有限公司 | Self-clamping type metallographic polishing machine |
| CN112454157A (en) * | 2020-09-29 | 2021-03-09 | 湖南科技大学 | Controllable discontinuous shear thickening and polishing method and device |
| CN214559484U (en) * | 2021-03-29 | 2021-11-02 | 焦作市万方集团精密制造有限公司 | Milling machine coolant liquid recycle device |
| CN214603548U (en) * | 2021-04-16 | 2021-11-05 | 漳州同恒光学科技有限公司 | Anti-splashing swinging machine |
| CN215470448U (en) * | 2021-08-11 | 2022-01-11 | 昂士特科技(深圳)有限公司 | Semiconductor chemical mechanical polishing liquid recovery processing device |
| CN113732876A (en) * | 2021-09-11 | 2021-12-03 | 南京泰迅光学仪器有限公司 | Optical lens polishing device and polishing process |
| CN218435031U (en) * | 2021-12-20 | 2023-02-03 | 廖崇亨 | Metal surface treatment liquid recycling system |
| CN114045153A (en) * | 2021-12-21 | 2022-02-15 | 清华大学 | Method for preparing cerium dioxide suspension, cerium dioxide suspension and polishing solution |
| CN114473850A (en) * | 2022-02-23 | 2022-05-13 | 陈韬 | Chemical polishing machine for silicon materials |
| CN115502786A (en) * | 2022-10-18 | 2022-12-23 | 东北大学 | High-efficient high accuracy ultrasonic chemical polishing and abluent integrated device |
| CN219403751U (en) * | 2023-03-31 | 2023-07-25 | 辽宁忠旺集团有限公司 | Inner cavity polishing device for aluminum profile extrusion molding die |
| CN117067028A (en) * | 2023-08-23 | 2023-11-17 | 湖南戴斯光电有限公司 | Manufacturing method of optical lens |
| CN116945033A (en) * | 2023-09-05 | 2023-10-27 | 中北大学 | Ultrasonic-assisted chemical mechanical polishing device for SiC single crystal wafer |
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