CN117368230A - Position correction system and method for optical detection equipment - Google Patents
Position correction system and method for optical detection equipment Download PDFInfo
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- CN117368230A CN117368230A CN202311428616.4A CN202311428616A CN117368230A CN 117368230 A CN117368230 A CN 117368230A CN 202311428616 A CN202311428616 A CN 202311428616A CN 117368230 A CN117368230 A CN 117368230A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 42
- 238000001514 detection method Methods 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000003384 imaging method Methods 0.000 claims abstract description 43
- 239000003550 marker Substances 0.000 claims description 53
- 238000007689 inspection Methods 0.000 claims description 13
- 230000007547 defect Effects 0.000 abstract description 5
- 238000004364 calculation method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011496 digital image analysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The invention discloses a position correction system of optical detection equipment and a method thereof, wherein the optical detection equipment comprises an imaging device and a machine table, the imaging device is positioned at the upper end of the machine table, the imaging device is used for generating a digital image, the optical detection equipment position correction system comprises an imaging module, a calibration workpiece and a motion assembly, the imaging module is used for uploading the digital image and comparing the digital image with a system image, the imaging module comprises an instruction generation module, the instruction generation module generates an instruction according to the comparison result of the imaging module, the calibration workpiece is arranged at one side of the machine table, the upper end surface of the calibration workpiece is provided with a calibration area, and the motion assembly is arranged at the lower end of the calibration workpiece. Compared with the prior art, the system and the method for correcting the position of the optical detection equipment can avoid the situation that the position of the standard piece is easy to deviate, so that the deviation is avoided when the lens of the optical detection equipment is calibrated, and the accuracy of the lens in scanning and positioning the defect position is reduced.
Description
Technical Field
The present invention relates to the field of optical detection technology, and more particularly, to a system and method for correcting a position of an optical detection device.
Background
At present, in automatic optical inspection equipment for elements such as panels and wafers, various lenses are required to be equipped due to the diversification of customer demands, and calibration of lens position consistency is generally performed by using standard pieces at present, but the calibration is limited by position accuracy of a mechanical arm for conveying the standard pieces and position uncertainty of the standard pieces in a mechanical arm clamp, so that certain dynamic deviation exists, and the positions of the standard pieces are easily deviated, so that the lens calibration deviation of the optical inspection equipment is caused, and the accuracy of the lens in scanning and positioning defect positions is reduced.
Disclosure of Invention
The invention aims to provide a position correction system and a position correction method for optical detection equipment, which can avoid the situation that the position of a standard film is easy to deviate, so that the deviation is avoided when a lens of the optical detection equipment is calibrated, and the accuracy of the lens in scanning and positioning the defect position is reduced.
In order to achieve the above object, the present invention provides a position correction system for an optical detection device, where the optical detection device includes an imaging device and a machine, the imaging device is located at an upper end of the machine, the imaging device is used for generating a digital image, the position correction system for the optical detection device includes an imaging module, a calibration workpiece and a motion assembly, the imaging module is used for uploading the digital image and comparing the digital image with a system image, the imaging module includes an instruction generating module, the instruction generating module generates an instruction according to a result of the comparison of the imaging module, the calibration workpiece is installed at one side of the machine, a calibration area is provided on an upper end surface of the calibration workpiece, the calibration workpiece is used for calibrating a lens, the motion assembly is disposed at a lower end of the calibration workpiece, and the motion assembly drives the calibration workpiece to move according to an instruction of the instruction generating module.
In one or more embodiments, the calibration area includes a first marking surface and a second marking surface, the first marking surface and the second marking surface are adjacently disposed, a plurality of marking groups are disposed on the first marking surface, a single marking group forms a coverage area, and the coverage area formed by the plurality of marking groups sequentially decreases from outside to inside.
In one or more embodiments, the marker sets include a first marker set, a second marker set, and a third marker set, the second marker set being disposed between the first marker set and the third marker set.
In one or more embodiments, the number of sets of markers is from 2 to 5 sets.
In one or more embodiments, the set of indicia consists of four indicia, the four indicia forming a rectangular footprint.
In one or more embodiments, the indicia are cross-shaped indicia.
In one or more embodiments, the cross-shaped indicia of a plurality of the sets of indicia are all different in size.
In one or more embodiments, the cross-shaped marker sizes of a plurality of the marker sets are scaled equally to the footprint formed by the marker sets.
In order to achieve the above object, the present invention provides a method for correcting a position of an optical detection device, comprising the steps of:
s1, acquiring a system image;
s2, the imaging device shoots the mark group and obtains a digital image, the digital image is compared with a system image to obtain a deviation value, and the position of the imaging device is adjusted according to the deviation value;
s3, calculating the central position of the calibration workpiece, acquiring an intermediate mark image, completing system calibration if the central mark pattern is completely matched with the system image, and repeating the step S2 if the central mark pattern is not matched with the system image;
s4, rotating each lens through a turret to align the lens with the calibration workpiece, and repeatedly acquiring a center pattern of the calibration workpiece;
s5, comparing the central mark pattern acquired anticlockwise with the central mark pattern acquired clockwise, if the central mark pattern acquired anticlockwise is completely matched with the central mark pattern acquired clockwise, the system calibration is performed, the physical deviation angle of the lens is applied to the system, and otherwise, the step S4 is repeated.
In one or more embodiments, when the step S2 is repeated, the coverage area formed by the marker group photographed by the imaging device becomes sequentially smaller from larger.
Compared with the prior art, the system and the method for correcting the position of the optical detection equipment can avoid the situation that the position of the standard piece is easy to deviate, so that the deviation is avoided when the lens of the optical detection equipment is calibrated, and the accuracy of the lens in scanning and positioning the defect position is reduced.
Drawings
Fig. 1 is a schematic view of the structure of an alignment workpiece according to an embodiment of the invention.
Fig. 2 is a schematic plan view of an alignment workpiece according to an embodiment of the invention.
FIG. 3 is a block flow diagram of a method for correcting the position of an optical inspection apparatus according to an embodiment of the present invention.
The main reference numerals illustrate:
1. a first marking surface; 11. a first set of indicia; 12. a second set of indicia; 13. a third set of markers; 2. a second marking surface.
Detailed Description
The following detailed description of embodiments of the invention is, therefore, to be taken in conjunction with the accompanying drawings, and it is to be understood that the scope of the invention is not limited to the specific embodiments.
Throughout the specification and claims, unless explicitly stated otherwise, the term "comprise" or variations thereof such as "comprises" or "comprising", etc. will be understood to include the stated element or component without excluding other elements or components.
An optical inspection apparatus position correction system and method according to an embodiment of the present invention includes an optical inspection apparatus position correction system and an optical inspection apparatus position correction method. The optical detection device position correction system and the optical detection device position correction method are used for avoiding deviation of lens calibration of the optical detection device and reducing accuracy of the lens in scanning and positioning of the defect position.
Specifically, the optical detection equipment comprises an imaging device and a machine table, the imaging device is located at the upper end of the machine table and is used for shooting a detection piece, after the detection piece is shot, a digital image is generated, and the optical detection equipment is operated through a position correction system, so that deviation between the imaging device and the detection piece is avoided.
The imaging device comprises a camera, a turret and a plurality of lenses, wherein a plurality of assembly holes matched with the lenses are formed in the turret, and the camera is arranged at one end of the turret far away from the lenses. Typically, the turret has four lens assembly holes, typically a black and white 2D turret is equipped with 4 lenses, a color camera turret is equipped with 4 lenses, and a 3D measuring turret is equipped with 2 lenses.
The optical inspection apparatus position correction system includes an imaging module, a motion assembly, and a calibration work piece. The imaging module is used for uploading the digital image generated by the imaging device and comparing the digital image with the system image, and comprises an instruction generating module which generates an instruction according to the comparison result of the imaging module. The calibration workpiece is mounted on one side of the machine. The motion assembly is arranged at the lower end of the calibration workpiece and drives the calibration workpiece to move according to the instruction of the instruction generation module.
Specifically, the calibration workpiece is located at the lower right side of the machine table, and in order to ensure the accuracy of lens calibration, the calibration workpiece is calibrated in horizontal height through a sensor equipped with the machine. So that the height of the upper surface of the calibration workpiece is equal to the height of the table top.
Referring to fig. 1 to 2, a calibration area is provided on the upper end surface of a calibration workpiece, the calibration workpiece is used for calibrating a lens, the calibration area includes a first marking surface 1 and a second marking surface 2, the first marking surface 1 and the second marking surface 2 are adjacently arranged, and a plurality of marking groups are provided on the first marking surface 1. The marker sets are different in size and are used for calibrating the lens.
Referring to fig. 1 to 2, the marker sets include a first marker set 11, a second marker set 12, and a third marker set 13, and the second marker set 12 is disposed between the first marker set 11 and the third marker set 13. The first marker group 11, the second marker group 12 and the third marker group 13 are each composed of 4 cross markers, and the sizes of the cross markers of the first marker group 11, the second marker group 12 and the third marker group 13 are different, and the smaller the cross markers of the marker group which is closer to the center of the first marker surface 1 are.
Referring to fig. 1 to 2, 4 cross-shaped marks form a rectangular coverage area, and an imaging device shoots one rectangular coverage area at a time, and shooting accuracy of the imaging device is improved by shooting smaller rectangular coverage areas in sequence.
Wherein the coverage area of the coverage area closer to the outer side is larger and the coverage area of the coverage area closer to the center of the first marker face 1 is smaller, i.e. the cross-shaped marker sizes of the plurality of marker sets are scaled equally to the coverage area formed by the marker sets.
Wherein the number of the marking groups is 2-5 groups. Preferably, the number of sets of markers is 3. The single marker set consists of 4 markers, which are arranged at the four corners of the first marker face 1, the 4 markers forming a rectangular footprint. I.e. the number of coverage areas and the number of marker sets is 1:1.
the optical detection device position correction method comprises the following steps:
s1, acquiring a system image;
s2, the imaging device shoots the mark group and obtains a digital image, the digital image is compared with a system image to obtain a deviation value, and the position of the imaging device is adjusted according to the deviation value;
s3, calculating the central position of the calibration workpiece, acquiring an intermediate mark image, completing system calibration if the central mark pattern is completely matched with the system image, and repeating the step S2 if the central mark pattern is not matched with the system image;
s4, rotating each lens through a turret to align the lens with the calibration workpiece, and repeatedly acquiring a center pattern of the calibration workpiece;
s5, comparing the central mark pattern acquired anticlockwise with the central mark pattern acquired clockwise, if the central mark pattern acquired anticlockwise is completely matched with the central mark pattern acquired clockwise, the system calibration is performed, the physical deviation angle of the lens is applied to the system, and otherwise, the step S4 is repeated.
When step S2 is repeated, the coverage area formed by the mark group imaged by the imaging device is sequentially reduced from large to small.
Specifically, when the imaging device is aligned with the target position of the mark of the calibration workpiece, the imaging device can capture as long as the target physical position of the mark or the vicinity of the target physical position. The movement module drives the calibration workpiece to move according to the instruction, so that all four marks of the first mark group 11 can be shot by the imaging device, and a digital image of the first mark group 11 is acquired. According to the comparison of the digital image and the system image, calculating the primary position deviation of the lens position, and carrying out first correction on the position of the lens according to the primary position deviation.
The imaging device acquires the digital image of the second marker set 12, calculates a secondary deviation of the image according to the comparison of the digital image and the system image, and corrects the position of the lens for the second time according to the secondary deviation. The imaging device acquires the digital image of the third marker set 13, calculates the three-level deviation of the image according to the digital image analysis, and corrects the position of the lens a third time according to the three-level deviation.
The first marker group 11, the second marker group 12 and the third marker group 13 are different in marker size, so that the position deviation accuracy and the threshold value analyzed according to the digital image are also from low to high. After the first correction, a second correction with high accuracy is performed by a smaller cross mark, and after the second correction, a third correction with higher accuracy is performed by a smaller cross mark. Wherein the third correction amplitude is smaller than the second correction amplitude, which is smaller than the first correction amplitude. According to the deviation of the first image, calculating the other three position deviations to average so as to reduce the influence of calculation errors, hardware errors and the like of the single image.
After the correction is completed for a plurality of times, calculating the central position of the calibration workpiece and acquiring an intermediate mark image, wherein the mark image is circular, if the central mark pattern can be completely matched with the system, the calibration is performed through the system, and the offset value is applied to the system.
After the offset calibration of each lens is completed, the turret performs the calibration of the physical offset angle for each lens. And (3) each lens is aligned to the calibration workpiece to perform clockwise and anticlockwise repeated rotation, and the central pattern of the calibration workpiece is repeatedly acquired, wherein the anticlockwise acquisition of the central mark pattern is completely matched with the clockwise acquisition of the central mark pattern, so that the calibration is performed through the system, and the physical deviation angle of the lens is applied to the system.
So far, the calculation of the offset and the physical offset angle of each lens is completed, and the consistency of the image positions of each lens after the switching can be realized.
The invention can realize full automation, high precision and self authentication, and complete the calibration of each lens offset and physical offset angle, thereby realizing the consistency of the image positions of each lens after switching.
The foregoing descriptions of specific exemplary embodiments of the present invention are presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain the specific principles of the invention and its practical application to thereby enable one skilled in the art to make and utilize the invention in various exemplary embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.
Claims (10)
1. An optical detection device position correction system, the optical detection device including an imaging device and a machine, the imaging device being located at an upper end of the machine, the imaging device being configured to generate a digital image, the optical detection device position correction system comprising:
the imaging module is used for uploading the digital image and comparing the digital image with the system image, and comprises an instruction generating module which generates an instruction according to the comparison result of the imaging module;
the calibration workpiece is arranged on one side of the machine table, the upper end face of the calibration workpiece is provided with a calibration area, and the calibration workpiece is used for calibrating the lens;
the motion assembly is arranged at the lower end of the calibration workpiece and drives the calibration workpiece to move according to the instruction of the instruction generation module.
2. The optical inspection apparatus position correction system of claim 1, wherein said calibration zone includes a first marking surface and a second marking surface, said first marking surface and said second marking surface being disposed adjacent, said first marking surface being provided with a plurality of marking groups, a single marking group forming a footprint, the plurality of marking groups forming a footprint that tapers from outside to inside.
3. An optical detection device position correction system as recited in claim 2, wherein said marker sets include a first marker set, a second marker set, and a third marker set, said second marker set being disposed between said first marker set and said third marker set.
4. An optical inspection apparatus position correction system as claimed in claim 2 wherein said number of marker sets is between 2 and 5 sets.
5. A system for correcting the position of an optical inspection apparatus according to claim 2 or 3, wherein said set of markers comprises four markers, four of said markers forming a rectangular footprint.
6. An optical detection device position correction system as recited in claim 4, wherein said indicia is a cross-shaped indicia.
7. An optical inspection apparatus position correction system as set forth in claim 6 wherein a plurality of said marker sets are of different cross-shaped marker sizes.
8. An optical detection device position correction system as recited in claim 7, wherein a cross-shaped marker size of a plurality of said marker sets is scaled equally to a footprint formed by the marker sets.
9. A method for correcting the position of an optical inspection apparatus, comprising the steps of:
s1, acquiring a system image;
s2, the imaging device shoots the mark group and obtains a digital image, the digital image is compared with a system image to obtain a deviation value, and the position of the imaging device is adjusted according to the deviation value;
s3, calculating the central position of the calibration workpiece, acquiring an intermediate mark image, completing system calibration if the central mark pattern is completely matched with the system image, and repeating the step S2 if the central mark pattern is not matched with the system image;
s4, rotating each lens through a turret to align the lens with the calibration workpiece, and repeatedly acquiring a center pattern of the calibration workpiece;
s5, comparing the central mark pattern acquired anticlockwise with the central mark pattern acquired clockwise, if the central mark pattern acquired anticlockwise is completely matched with the central mark pattern acquired clockwise, the system calibration is performed, the physical deviation angle of the lens is applied to the system, and otherwise, the step S4 is repeated.
10. The method of correcting the position of an optical inspection apparatus according to claim 9, wherein the coverage area formed by the mark group photographed by the imaging device is sequentially smaller from larger when the step S2 is repeated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311428616.4A CN117368230A (en) | 2023-10-31 | 2023-10-31 | Position correction system and method for optical detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311428616.4A CN117368230A (en) | 2023-10-31 | 2023-10-31 | Position correction system and method for optical detection equipment |
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| Publication Number | Publication Date |
|---|---|
| CN117368230A true CN117368230A (en) | 2024-01-09 |
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| CN202311428616.4A Pending CN117368230A (en) | 2023-10-31 | 2023-10-31 | Position correction system and method for optical detection equipment |
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| CN (1) | CN117368230A (en) |
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- 2023-10-31 CN CN202311428616.4A patent/CN117368230A/en active Pending
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