CN117367258A - Displacement sensor for magnetic field type angular displacement and linear displacement combined measurement - Google Patents
Displacement sensor for magnetic field type angular displacement and linear displacement combined measurement Download PDFInfo
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- CN117367258A CN117367258A CN202311112689.2A CN202311112689A CN117367258A CN 117367258 A CN117367258 A CN 117367258A CN 202311112689 A CN202311112689 A CN 202311112689A CN 117367258 A CN117367258 A CN 117367258A
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/04—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
- G01B7/042—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length
- G01B7/046—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length using magnetic means
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Abstract
The invention relates to a displacement sensor for magnetic field type angular displacement and linear displacement combined measurement, and belongs to the technical field of precision measurement sensors. The sensor comprises a stator and a rotor, wherein the stator is sleeved in the rotor, the stator comprises a stator matrix and an excitation winding, the rotor comprises a rotor matrix and an induction winding, and when the rotor moves relative to the stator, an angular displacement and linear displacement induction signal pickup array outputs a signal U through a logic circuit X And U Y From F X 、F Y Output signal phi of induction winding X And phi Y To determine the dimensional motion direction from the difference of Z X 、Z Y Output signal U of induction winding F1 、U F2 、U F3 、U F4 To judge the positive and negative of the single dimension direction, by using U X 、U Y The traveling wave signals are respectively compared with the same frequency reference signals, the phase difference is represented by the number of the interpolated high-frequency clock pulses, and the angular displacement or axial direction of the rotor relative to the stator in the circumferential direction is obtained after conversionAnd (5) linearly displacing. Simple structure, high measurement resolution, easy batch production, low cost and the like.
Description
Technical Field
The invention belongs to the technical field of precision measurement sensors, and particularly relates to a displacement sensor for magnetic field type angular displacement and linear displacement combined measurement.
Background
Along with the global lifting of industrial manufacturing industry upgrading and turning billows, single-function sensors cannot meet the demands, and the demands of multifunctional measuring sensors are increased, such as a numerical control positioning table, a microscope stage, a mechanical arm and the like, all require accurate angular displacement and linear displacement when the positions are adjusted. The existing method for realizing simultaneous measurement of angular displacement and linear displacement is to install two sensors, one for angular displacement measurement and the other for linear displacement measurement, and the installation mode makes the structure of a measurement system more complex, increases the cost, has poor anti-interference capability, is easily influenced by interference of working environment, brings abbe errors and installation positioning errors to measurement, and does not have the condition of installing the two sensors in some cases. Therefore, it is urgent to study a multifunctional, high-precision and simple-structure displacement sensor.
In recent years, a time grating linear displacement sensor which adopts clock pulses as displacement measurement references and improves displacement measurement precision and resolution is developed domestically. The angular displacement sensor and the linear displacement sensor which are developed based on the time grating principle at present tend to be mature, products of the angular displacement sensor and the linear displacement sensor enter the market, and research on the two-dimensional plane linear displacement sensor also has achieved some results, but the research on the sensor which can realize angular displacement measurement and linear displacement measurement at the same time is still blank. It is therefore necessary to develop a sensor that is simple in structure and highly accurate and that can simultaneously perform angular displacement measurement and linear displacement measurement.
Disclosure of Invention
The invention aims to solve the technical problems and provide a displacement sensor for magnetic field type angular displacement and linear displacement composite measurement, wherein a stator matrix adopts exciting windings which are distributed in a special space to generate repetitive orthogonal magnetic fields which are uniformly distributed along the circumferential direction and the axial direction, a rotor matrix adopts induction windings which are in special shapes and distributed arrays to inhibit displacement induction signal harmonic components, the measurement accuracy is improved, the number of layers and the winding complexity of a sensor coil are reduced, the sensor structure is simplified, and the manufacturing cost is reduced.
The technical scheme for solving the technical problems is as follows: the displacement sensor for the combined measurement of the magnetic field type angular displacement and the linear displacement comprises: stator base member and active cell base member, the stator base member cover is in the active cell base member, and with active cell base member coaxial arrangement and leave the clearance, be equipped with exciting winding on the outer cylinder face of stator base member, be equipped with induction winding on the inner cylinder face of active cell base member, set for the circumferencial direction to mark as X direction, the coil of arranging along the circumferencial direction is called the row, the axial is recorded as Y direction, the coil of arranging along the axial is called the row, its characterized in that:
the exciting windings are uniformly and equally arranged along the X direction and the Y direction and have the side length L e1 Wherein the odd-numbered rows of excitation coils along the X direction are connected in series to form sine windings or cosine windings, and the odd-numbered columns are not provided with coils; the even number of lines of excitation coils along the X direction are connected in series to form cosine windings or sine windings, the even number of lines are not arranged with coils, and the excitation coils are provided with m in total 1 Row, m 2 A column;
the induction winding comprises an angular displacement and linear displacement judging array, a displacement direction judging array and an angular displacement and linear displacement induction signal pickup array;
the angular displacement and linear displacement judging array consists of a plurality of square coils and a plurality of rectangular coils X Induction winding and F Y Induction winding formation, F X The induction winding is formed by a square coilTwo rectangular coils with unchanged length along Y direction and halved length along X axis, F X The induction winding comprises D X1 、D X2 、D X3 ；F Y The induction winding consists of a square coil and two rectangular coils with unchanged length along the X axis and halved length along the Y axis, F Y The induction winding comprises D Y1 、D Y2 、D Y3 The method comprises the steps of carrying out a first treatment on the surface of the At F X In the induction winding: coil D X1 And D X2 Phase difference of starting position L i1 +L i5 Coil D X2 And D X3 Phase difference of starting position L i1 +L i5 The method comprises the steps of carrying out a first treatment on the surface of the At F Y In the induction winding: coil D Y2 And D Y3 Phase difference of starting position L i1 +L i5 Coil D Y1 And D Y2 Phase difference of starting position L i1 +L i5 The method comprises the steps of carrying out a first treatment on the surface of the And at F X Induction winding and F Y In the induction winding: coil D X1 And D Y1 Phase difference of starting position L i1 +NL i5 Wherein, N is 1,2, 3, 4 and … …, which are used for judging the angular displacement and the linear displacement;
the displacement direction judging array comprises X 21 、X 22 、X 23 、X 24 Z of composition X Inductive winding and Y 21 、Y 22 、Y 23 、Y 24 Z of composition Y Induction winding, X 21 And X is 22 、X 23 And X is 24 The initial position of the induction coil along the X direction is different by jW +L i1 +L i6 Wherein j=0, 1,2, 3 … …, X 21 And X is 23 、X 22 And X is 24 The initial position phase difference of the induction coil along the Y direction is L i1 +L i4 ，Y 21 And Y is equal to 22 、Y 23 And Y is equal to 24 The initial position of the induction coil along the Y direction is different by jW +L i1 +L i6 Wherein j=0, 1,2, 3 … …, Y 21 And Y is equal to 23 、Y 22 And Y is equal to 24 The initial position of the induction coil along the X direction is L i1 +L i4 The displacement sensor is used for judging the positive and negative of the displacement direction;
the angular displacement and linear displacement sensing signal pick-up arrayThe columns comprise MX and MY sensing arrays respectively arranged along the X direction and the Y direction, wherein the MX sensing arrays are used for measuring the angular displacement, and the MX sensing arrays are divided into X sensing arrays 11 、X 13 、X 15 、X 17 Coil construction MX 1 Induction winding and X 12 、X 14 、X 16 、X 18 Coil construction MX 2 An induction winding; for measuring linear displacement, MY induction arrays are divided into Y 11 、Y 13 、Y 15 、Y 17 Coil-forming MY 1 Inductive winding and Y 12 、Y 14 、Y 16 、Y 18 Coil-forming MY 2 An induction winding; x is X 11 Coil and X 13 Coil, X 15 Coil and X 17 The coils being oriented in the X-direction and Y 11 Coil and Y 13 Coil, Y 15 Coil and Y 17 The initial positions of the coils along the Y direction are different from each other by jW +L i1 +L i3 ；X 11 Coil and X 15 Coil, X 13 Coil and X 17 The coil being oriented in the Y-axis direction and Y 11 Coil and Y 15 Coil, Y 13 Coil and Y 17 The initial positions of the coils along the X-axis direction are different by jW +L i1 +L i4 ；X 11 Coil and X 12 Coil, X 15 Coil and X 16 The coils being oriented in the X-direction and Y 11 Coil and Y 12 Coil, Y 15 Coil and Y 16 The initial positions of the coils along the Y-axis direction are different by jW +L i1 +L i5 ；
When measuring, two paths of sine and cosine current excitation signals with the same frequency and the same amplitude are respectively applied to sine and cosine windings on the stator matrix, and when the rotor matrix moves relative to the stator matrix, MX (matrix X) 1 、MX 2 Induction winding, MY 1 、MY 2 The induction windings respectively generate U X1 、U X2 、U Y1 、U Y2 Four-way electric signal according to F X Induction winding and F Y Output signal phi of induction winding X And phi Y To determine the movement direction according to the difference of Z X Output signal U of induction winding F1 、U F2 ，Z Y Output signal U of induction winding F3 、U F4 Judging the positive and negative of the single-dimensional direction through the direction-distinguishing circuit, and finally outputting two paths of differential induction signals U by the MX induction array X1 And U X2 Output traveling wave signal U with angular displacement information through logic circuit X Two paths of differential induction signals U output by MY induction array Y1 And U Y2 Output traveling wave signal U with linear displacement information through logic circuit Y And U is also provided with X 、U Y The traveling wave signals are respectively compared with the same frequency reference signals, the phase difference is represented by the number of the interpolated high-frequency clock pulses, and the angular displacement or the linear displacement of the motion of the rotor matrix relative to the stator matrix is obtained after conversion.
Preferably, the stator matrix is provided with m in total on the outer cylindrical surface 1 Row, m 2 Column excitation coils which jointly form a cosine winding and a sine winding; the cosine winding comprises an A excitation winding and a D excitation winding which are connected in series, the A excitation winding and the D excitation winding are in opposite winding directions, the A excitation winding comprises an A1 excitation winding and an A2 excitation winding which are connected, and the A1 excitation winding is numbered as C 4n1+2,4n2+1 The square exciting coil of the coil is connected, the A2 exciting winding is numbered as C 4n1+4,4n2+3 The square exciting coil of the coil is formed by connecting a D exciting winding comprising a D1 exciting winding and a D2 exciting winding which are connected, wherein the D1 exciting winding is numbered as C 4n1+4,4n2+1 The square exciting coil of the coil is connected, and the D2 exciting winding is numbered as C 4n1+2,4n2+3 Is formed by connecting square exciting coils; the sine winding comprises a B excitation winding and an E excitation winding which are connected in series, the winding directions of the excitation winding B and the E excitation winding are opposite, the B excitation winding comprises a B1 excitation winding and a B2 excitation winding which are connected, and the B1 excitation winding is numbered as C 4n1+1,4n2+2 The square exciting coil of the coil is connected, the B2 exciting winding is numbered as C 4n1+3,4n2+4 The square exciting coil of the coil is formed by connecting an E1 exciting winding and an E2 exciting winding which are connected, and the E1 exciting winding is a C-numbered exciting winding 4n1+3,4n2+2 Is formed by connecting square exciting coils of the transformerThe E2 exciting winding is numbered as C 4n1+1,4n2+4 Is formed by connecting square exciting coils, wherein C a，b Represents the exciting coil, B a，b Representing the gap between two adjacent excitation coils, the distance being L e2 A and b represent an X-direction coordinate and a Y-direction coordinate, respectively, a=4n1+i, b=4n2+i, i being 1 or 2 or 3 or 4, n1 being in turn 0 to M 1 All integers of-1, M 1 Represents the total pole number of the exciting winding coil in the X direction, and n2 sequentially takes 0 to M 2 All integers of-1, M 2 Representing the total pole pair number of the Y-direction excitation winding coil, m 1 Equal to 4M 1 ，m 2 Equal to 4M 2 One counter-pole in the X direction or the Y direction consists of 4 adjacent exciting coils from A, B, D, E exciting windings, the width of the counter-pole is W, the circumferential angle corresponding to one pole distance W is P, and the circumference of the outer cylindrical surface of the stator matrix is l c ＝2πr 1 ＝n 3 W，r 1 For the outer radius of the stator base body, n 3 Take 1,2, 3, 4 … ….
Preferably, the coils of the angular displacement and linear displacement sensing signal pickup array have a plurality of lengths and widths L i1 Is formed by square induction coils.
Preferably, the coils of the angular displacement and linear displacement sensing signal pickup array are composed of a plurality of sine coils, the sine coils are formed by splicing two half sine edges in a mirror image mode, and the half period space width of the sine coils is L i1 Half-cycle spatial height L i1 。
Preferably, the coils of the angular displacement and linear displacement sensing signal pickup array have a plurality of radii L i1 Round coil composition of/2.
Preferably, the angular displacement and the linear displacement determine F in the array X Induction winding and F Y The induction windings are each of side length L i1 Square coil and two coils of length L along Y-axis or X-axis i1 Length L along X-axis or Y-axis i1 Rectangular coil of/2.
Preferably, the displacement direction is used for judging Z in the array X Inductive winding and Z Y Induction windingThe coils of the group being of a plurality of lengths and widths L i1 Is formed by square induction coils.
Preferably, the displacement direction is used for judging Z in the array X Inductive winding and Z Y The coil of the induction winding is composed of a plurality of sine coils, the sine coils are formed by splicing two half sine edges in a mirror image mode at the bottom, and the half period space width of the sine coils is L i1 Half-cycle spatial height L i1 。
Preferably, the displacement direction is used for judging Z in the array X Inductive winding and Z Y The coil of the induction winding is provided with a plurality of radiuses L i1 Round coil composition of/2.
Preferably, the U X 、U Y The traveling wave signals and the same frequency reference signals are shaped into square waves by a shaping circuit respectively, and then phase comparison is carried out.
The beneficial effects are that: the invention adopts the staggered arrangement mode of square exciting coils to realize the simultaneous coding of the circumferential direction and the axial direction, and two induction windings MX along the X direction (circumferential direction) 1 、MX 2 Forms a differential structure, and two induction windings MY along the Y direction (axial direction) 1 、MY 2 When the induction winding outputs signals, common mode interference is eliminated in a mode of making difference on the differential signals by a logic circuit, so that the anti-interference capability is further improved; the sensor structure is simplified through special coil shapes and arrangement modes; the PCB manufacturing technology is used, the ultra-precise manufacturing process is not relied on, and the manufacturing cost is reduced.
Drawings
FIG. 1 is a schematic overall structure of embodiment 1 of the present invention;
FIG. 2 is a schematic cross-sectional dimension of embodiment 1 of the present invention;
fig. 3 is a schematic development view of the stator according to embodiment 1 of the present invention in the circumferential direction;
FIG. 4 is a schematic view of the mover of embodiment 1 of the present invention in a circumferential direction;
fig. 5 is a schematic block diagram of signal processing in embodiment 1 of the present invention;
FIG. 6 is a schematic view showing the development of a mover according to embodiment 2 of the present invention in the circumferential direction;
fig. 7 is a schematic development view of a mover according to embodiment 3 of the present invention in the circumferential direction.
In the drawings, the list of components represented by the various numbers is as follows:
1. a stator base; 11. exciting the winding; 2. a mover substrate; 22. and (3) an induction winding.
Detailed Description
The principles and features of the present invention are described below with reference to the drawings, the examples are illustrated for the purpose of illustrating the invention and are not to be construed as limiting the scope of the invention.
Examples
The present invention will be described in detail with reference to fig. 1 to 7. F in the stator structure, angular displacement and linear displacement judgment array in the rotor in 3 different embodiments X Induction winding and F Y The induction windings are all consistent. The difference between the 3 different embodiments is that: MX induction signal pickup array, MY induction signal pickup array and displacement direction judging array Z in mover X 、Z Y In the case of a square coil in example 1, a sinusoidal coil in example 2 formed by splicing two half sinusoidal coils along the bottom mirror image, and a circular coil in example 3. The following will now be described respectively:
example 1: the displacement sensor for the combined measurement of the magnetic field type angular displacement and the linear displacement comprises a stator matrix 1 and a rotor matrix 2, wherein the stator matrix 1 and the rotor matrix 2 are coaxially arranged, and a gap d=0.4 mm is reserved along the radial direction.
For convenience of description, the stator is described as being stretched in the circumferential direction, and the circumferential direction is referred to as the X direction, the coils arranged in the circumferential direction are referred to as rows, the axial direction is referred to as the Y direction, and the coils arranged in the axial direction are referred to as columns, as shown in fig. 3, the outer surface of the stator base body is provided with 16 rows of square excitation coils (i.e., m 1 ＝16，M 1 =4), each row is composed of 8 square excitation coils of the same size uniformly arranged, 16 columns in total (i.e. m 2 ＝16，M 2 =4). Width L of square exciting coil e1 At a distance L of 2.8mm between two adjacent square excitation coils e2 Taking the distance L between two adjacent lines or columns of excitation coils of 3.2mm e3 Taking 0.2mm, the parameters in FIG. 2 are: θ 1 ＝21°，θ 2 1.5 DEG, a pole pitch angle P=90 DEG in the circumferential direction, r1=7.64 mm, r2=8.04 mm, a coil dimension L is induced i1 Is 2.9mm. The starting positions of the excitation coils of the odd rows (or the odd columns) along the same direction are the same, the starting positions of the excitation coils of the even rows (or the even columns) along the same direction are the same, and the starting positions of the excitation coils of the odd rows (or the odd columns) are staggered with the starting positions of the excitation coils of the even rows (or the even columns) by L in the same direction e2 。
The coils arranged on the stator base 1 are numbered as shown in FIG. 3 by C a，b Represents the exciting coil, B a，b Representing the gap between two adjacent excitation coils, a and b represent the X-axis and Y-axis coordinates (a=4n1+i, b=4n2+i, i taking 1,2, 3, 4), respectively. Wherein the number is C 4n1+2,4n2+1 The square exciting coils (n 1 is 0,1,2 and … …; n2 is 0,1,2 and … …) are connected in series through exciting signal leads to form an A1 exciting winding; numbered C 4n1+4,4n2+3 The square exciting coils (n 1 is 0,1,2 and … …; n2 is 0,1,2 and … …) are connected in series through exciting signal leads to form an A2 exciting winding; numbered C 4n1+1,4n2+2 The square exciting coils (n 1 is 0,1,2 and … …; n2 is 0,1,2 and … …) are connected in series through exciting signal leads to form a B1 exciting winding; numbered C 4n1+3,4n2+4 The square exciting coils (n 1 is 0,1,2 and … …; n2 is 0,1,2 and … …) are connected in series through exciting signal leads to form a B2 exciting winding; numbered C 4n1+4,4n2+1 The square exciting coils (n 1 is 0,1,2 and … …; n2 is 0,1,2 and … …) are connected in series through exciting signal leads to form a D1 exciting winding; numbered C 4n1+2,4n2+3 The square exciting coils (n 1 is 0,1,2 and … …; n2 is 0,1,2 and … …) are connected in series through exciting signal leads to form a D2 exciting winding; numbered C 4n1+3,4n2+2 The square exciting coils (n 1 is 0,1,2 and … …; n2 is 0,1,2 and … …) are connected in series through exciting signal leads to form an E1 exciting winding; numbered C 4n1+1,4n2+4 Square excitation of (c)The coils (n 1 takes 0,1,2 and … …, and n2 takes 0,1,2 and … …) are connected in series through excitation signal leads to form an E2 excitation winding. The A1 excitation winding is connected with the A2 excitation winding to form an A excitation winding; the B1 excitation winding is connected with the B2 excitation winding to form a B excitation winding; the D1 excitation winding is connected with the D2 excitation winding to form a D excitation winding; the E1 excitation winding is connected with the E2 excitation winding to form an E excitation winding. The winding directions of the excitation winding A and the excitation winding D are opposite, the excitation winding A and the excitation winding D are connected in series to form a cosine winding, and cosine excitation current is introduced; the winding direction of the B excitation winding is opposite to that of the E excitation winding, the B excitation winding and the E excitation winding are connected in series to form a sine winding, and sine excitation current is introduced. One counter-pole in the X-direction (circumferential direction) or the Y-direction (axial direction) is composed of adjacent excitation coils in 4A, B, D, E excitation windings, and the counter-pole width w=2 (L e1 +L e2 ) An angle p=4 (θ 1 +θ 2 )。
For convenience of description, the description will be given of the development of the mover in the circumferential direction, the circumferential direction will be referred to as the X direction, the axial direction will be referred to as the Y direction, and the above parameters j=0, n=2 will be taken. As shown in fig. 4, the inner surface of the mover substrate 2 is provided with a coil array composed of a plurality of induction coils having the same size and different arrangement directions. Wherein, four induction coils X are arranged in the angular displacement and linear displacement induction signal pickup array 11 、X 13 、X 15 、X 17 Composition MX 1 Induction winding, X 12 、X 14 、X 16 、X 18 Composition MX 2 An induction winding; MX (MX) 1 X in induction winding 11 And X 13 、X 15 And X 17 Phase difference L of initial position of induction coil along X direction (circumference direction) i1 +L i3 (L i3 ＝L i1 +L i5 +W/12)，MX 1 X in induction winding 11 And X 15 、X 13 And X 17 Phase difference L of initial position of induction coil along Y direction (axial direction) i1 +L i4 (L i4 ＝2L i1 +3L e3 ). MX of the mixture 1 The induction winding as a whole moves right along the X axis L i1 +L i5 (L i5 ＝L i1 +2L e3 ) Can obtain MX 2 And (3) an induction winding.
Y 11 、Y 13 、Y 15 、Y 17 Composition MY 1 Induction winding, Y 12 、Y 14 、Y 16 、Y 18 Composition MY 2 An induction winding; MY (MY) 1 Y in induction winding 11 And Y is equal to 13 、Y 15 And Y is equal to 17 Phase difference L of initial position of induction coil along Y direction i1 +L i3 (L i3 ＝L i1 +L i5 +W/12)，MY 1 Y in induction winding 11 And Y is equal to 15 、Y 13 And Y is equal to 17 Induction coil initial position phase difference L along X direction i1 +L i4 (L i4 ＝2L i1 +3L e3 ). MY is carried out 1 The induction winding as a whole moves L in the Y-axis direction i1 +L i5 (L i5 ＝L i1 +2L e3 ) Thus obtaining MY 2 And (3) an induction winding.
MX 1 、MX 2 The induction windings are arranged along the X-axis direction, MY 1 、MY 2 The induction windings are arranged along the Y-axis direction. Length, width L of induction coil in each induction winding i1 The four induction coils in each induction winding are arranged in a shape of a Chinese character 'tian' and are 2.9mm, and MX 1 X in induction winding 11 And X 13 Distance L between induction coils i3 7.2mm, X 11 And X 15 Distance L between induction coils i4 6.4mm, MX 2 X in induction winding 12 And X 14 The distance between the induction coils is L i3 ，X 12 And X 16 The distance between the induction coils is L i4 And the inductive windings MX in the same direction 1 And MX 2 In (a): x is X 11 And X is 12 、X 13 And X is 14 、X 15 And X is 16 、X 17 And X is 18 Distance of L i5 Is 3.3mm. MY (MY) 1 And MY 2 The induction winding adopts the phase-change material with MX in the Y-axis direction 1 And MX 2 The induction windings are arranged in the same manner in the X-axis direction. MX in X-axis direction 1 And MX 2 The induction winding outputs traveling wave signals U X1 And U X2 The two form differential signals, and finally output traveling wave signals U through a logic circuit X . MY in Y-axis direction 1 And MY 2 The induction winding outputs traveling wave signals U Y1 And U Y2 The two form differential signals, and finally output traveling wave signals U through a logic circuit Y 。
As shown in FIG. 4, the angular displacement and linear displacement judging array has two lengths and widths L i1 And four square coils of length L i1 Width is L i2 Wherein coil D X1 And D X2 Interval L i5 Coil D X2 And D X3 At a distance of L i5 Coil D Y1 And D Y2 At a distance of L i5 Coil D Y2 And D Y3 At a distance of L i5 Coil D X1 And D Y1 At a distance of 2L i5 . Eight arrays with L length and L width are judged in the displacement direction i1 Square coil of X 21 And X 22 、X 23 And X 24 、Y 21 And Y 22 、Y 23 And Y 24 Distance of separation L between coils i6 1mm; x is X 21 And X 23 、X 22 And X 24 、Y 21 And Y 23 、Y 22 And Y 24 Distance of separation L between coils i4 And are arranged in two groups in the X-axis direction and the Y-axis direction.
Two paths of sine and cosine excitation currents with the same frequency and the same amplitude are respectively applied to a sine winding and a cosine winding on the outer cylindrical surface of the stator matrix: i a ＝I m sinωt、I b ＝I m cos ωt, where the amplitude I of the excitation signal m The frequency of the excitation signal is ω=10khz. When the rotor and the stator generate relative motion, the induction winding in the displacement induction signal pickup array of the inner surface of the rotor matrix outputs a traveling wave signal U 0 ：
Wherein K is e And s is the magnetic field coupling coefficient and is the displacement of the rotor relative to the stator in the motion direction.
When the mover moves in the circumferential direction relative to the stator, then there is MX in the circumferential direction 1 、MX 2 Inductive winding generates traveling wave signal U by magnetic field coupling X1 、U X2 The method comprises the steps of carrying out a first treatment on the surface of the With MY in axial direction 1 、MY 2 Inductive winding generates traveling wave signal U by magnetic field coupling Y1 、U Y2 The expression is:
wherein, alpha is the measured angular displacement, P is the polar angle corresponding to a polar distance W in the circumferential direction, l is the measured linear displacement, and W is a complete polar distance.
The signal processing method is to process the differential signal U as shown in FIG. 5 X1 And U X2 Differential signal U Y1 And U Y2 Respectively through logic circuits, finally obtaining traveling wave signals U X And traveling wave signal U Y The expression is:
when the rotor moves relative to the stator, the angular displacement and linear displacement judging array can generate induction signals, wherein the array formed by two square windings and four rectangular windings can output two paths of signals containing the opposite area change of the windings. The magnetic flux of the induction winding changes:
Φ(t,x)＝B·ΔS (4)
b represents the magnetic induction intensity of the magnetic field where the induction winding is located, and delta S represents the changing area of the induction winding opposite to the excitation winding.
When the mover moves, pair D X1 、D Y1 Square winding, D X2 、D X3 、D Y2 、D Y3 The rectangular windings are analyzed one by one. D (D) X1 And D X2 The windings are connected in series according to the same winding direction X2 And D X3 The windings are connected in series according to opposite winding directions to form F X An induction winding; d (D) Y1 And D Y2 The windings are connected in series according to the same winding direction Y2 And D Y3 The windings are connected in series according to opposite winding directions to form F Y And (3) an induction winding. From equation (4), it can be seen that F X Induction winding and F Y The induction signal output by the induction winding changes along with the change of the total area of the induction coil opposite to the exciting coil. For example, when the mover moves in the X direction (circumferential direction), the rotor rotates by a pole pitch angle P corresponding to a complete pole pitch W, and the magnetic induction B= ±I is set m sinωt，F Y Total magnetic flux of induction winding:
Φ Y (x)＝0，x∈[0,W] (5)
F X total magnetic flux of induction winding:
f when the mover moves in the Y direction (axial direction) Y Total magnetic flux of induction winding:
F X total magnetic flux of induction winding:
Φ X (y)＝0，y∈[0,W] (8)
phi when the mover moves in the X (Y) direction Y (φ X ) The amplitude of the signal does not change (i.e. the total magnetic flux of the coil assembly does not change), phi X (φ Y ) The amplitude of the signal changes (i.e. the total magnetic flux of the coil combination changes periodically), and then the square wave signal is shaped by a shaping circuit to perform binarization operation, when phi X And phi Y Expressed as "10", indicates that the mover rotates relative to the stator, and angular displacement is measured, when phi X And phi Y When expressed as "01", the mover is axially (straightLine) movement, measured as linear displacement, when phi X And phi Y Expressed as "00" or "11", it means that the mover maintains the original motion state with respect to the stator.
When the movement direction is determined to be the X direction (circumferential direction), Z in the direction is selected X Two-path traveling wave signal U output by induction winding F1 And U F2 Shaping Cheng Fangbo signals and then comparing phases; when the movement direction is determined to be Y-direction (axial direction), Z in the direction is selected Y Two-path traveling wave signal U output by induction winding F3 And U F4 The Cheng Fangbo signal is shaped and then subjected to phase comparison. If the original phase difference(or->) When the phase difference is changed, the phase difference is moved in the original movement direction, and if the phase difference is not changed, the phase difference is moved in the original movement direction, so that the positive and negative of the movement direction are judged. Taking the X direction as an example, the expression is:
taking the Y direction as an example, the expression is:
the relative movement of the mover matrix 2 and the fixed-length matrix 1 occurs, the phase angle of the sensing signal will change periodically, when the mover matrix 2 and the fixed-length matrix 1 move relatively by a pole distance, the phase angle of the sensing signal (i.e.) Varying by one cycle. By passing the travelling wave signal U in the X direction (circumferential direction) X Traveling wave signal U in Y direction (axial direction) Y After being shaped into square wave signals by a shaping circuit,respectively comparing with the same frequency reference signal, and phase difference delta t X And Deltat Y The number of the high-frequency clock pulses is used for interpolation, and after conversion, the angular displacement or the linear displacement of the mover relative to the stator is obtained by combining judgment of the motion direction.
Wherein P is the polar angle corresponding to a polar distance W in the circumferential direction, W is a complete polar distance, N X 、N Y The complete pole pitch numbers of the rotor moving in the circumferential direction and the axial direction are respectively shown, and T is the clock period of the reference signal with the same frequency as the induction signal.
Example 2: the stator structure of the displacement sensor for the combined measurement of magnetic field type angular displacement and linear displacement in the embodiment is the same as that in embodiment 1, and is different in that: the windings in the angular displacement and linear displacement sensing signal pickup array and the displacement direction judging array are changed from square windings with the side length of 2.9mm in the embodiment 1 to sine windings formed by splicing two half sine windings along the bottom mirror image in the embodiment 2, and the parameters of the sine windings are as follows: the width of the windings is 2.9mm and the top to bottom height is 2.9mm as shown in figure 6.
Example 3: the stator structure of the displacement sensor for the combined measurement of magnetic field type angular displacement and linear displacement in the embodiment is the same as that in embodiment 1, and is different in that: the windings in the angular displacement and linear displacement sensing signal pickup array and the displacement direction judging array are changed from the square windings with the side length of 2.9mm in the embodiment 1 to the round windings with the radius of 1.45mm in the embodiment 3, as shown in fig. 7.
In the description of the present invention, it should be understood that the terms "center", "length", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "inner", "outer", "peripheral side", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the system or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (10)
1. The utility model provides a displacement sensor of magnetic field formula angular displacement and linear displacement complex measurement, includes stator base member (1) and active cell base member (2), stator base member (1) cover is in active cell base member (2), and with active cell base member (2) coaxial arrangement and leave the clearance, be equipped with excitation winding (11) on the outer cylindrical face of stator base member (1), be equipped with induction winding (22) on the inner cylindrical face of active cell base member (2), set for the circumferencial direction to mark as X direction, the coil of arranging along the circumferencial direction is called the row, the axial is recorded as Y direction, the coil of arranging along the axial is called the row, its characterized in that:
the excitation winding (11) is formed by uniformly and equally spacing along the X direction and the Y direction and has a side length L e1 Wherein the odd-numbered rows of excitation coils along the X direction are connected in series to form sine windings or cosine windings, and the odd-numbered columns are not provided with windings; the even number of the excitation coils in the X direction are connected in series to form cosine windings or sine windings, the even number of the excitation coils are not arranged with windings, and the excitation coils are arranged with m 1 Row, m 2 A column;
the induction winding (22) comprises an angular displacement and linear displacement judging array, a displacement direction judging array and an angular displacement and linear displacement induction signal pickup array;
the angular displacement and linear displacement judging array consists of a plurality of square coils and a plurality of rectangular coils X Induction winding and F Y Induction winding formation, F X The induction winding consists of a square coil and two rectangular coils with constant length along the Y direction and halved length along the X axis, F X The induction winding comprises D X1 、D X2 、D X3 ；F Y The induction winding consists of a square coil and two rectangular coils with unchanged length along the X axis and halved length along the Y axis, F Y The induction winding comprises D Y1 、D Y2 、D Y3 The method comprises the steps of carrying out a first treatment on the surface of the At F X In the induction winding: coil D X1 And D X2 Phase difference of starting position L i1 +L i5 Coil D X2 And D X3 Phase difference of starting position L i1 +L i5 The method comprises the steps of carrying out a first treatment on the surface of the At F Y In the induction winding: coil D Y2 And D Y3 Phase difference of starting position L i1 +L i5 Coil D Y1 And D Y2 Phase difference of starting position L i1 +L i5 The method comprises the steps of carrying out a first treatment on the surface of the And at F X Induction winding and F Y In the induction winding: coil D X1 And D Y1 Phase difference of starting position L i1 +NL i5 Wherein, N is 1,2, 3, 4 and … …, which are used for judging the angular displacement and the linear displacement;
the displacement direction judging array comprises X 21 、X 22 、X 23 、X 24 Z of composition X Inductive winding and Y 21 、Y 22 、Y 23 、Y 24 Z of composition Y Induction winding, X 21 And X is 22 、X 23 And X is 24 The initial position of the induction coil along the X direction is different by jW +L i1 +L i6 Wherein j=0, 1,2, 3 … …, X 21 And X is 23 、X 22 And X is 24 The initial position phase difference of the induction coil along the Y direction is L i1 +L i4 ，Y 21 And Y is equal to 22 、Y 23 And Y is equal to 24 The initial position of the induction coil along the Y direction is different by jW +L i1 +L i6 Wherein j=0, 1,2, 3 … …, Y 21 And Y is equal to 23 、Y 22 And Y is equal to 24 The initial position of the induction coil along the X direction is L i1 +L i4 The displacement sensor is used for judging the positive and negative of the displacement direction;
the angular displacement and linear displacement sensing signal pickup array comprises MX and MY sensing arrays respectively arranged along the X direction and the Y direction, wherein the MX sensing array is used for measuring the angular displacement and is divided into an X sensing array 11 、X 13 、X 15 、X 17 Coil construction MX 1 Induction winding and X 12 、X 14 、X 16 、X 18 Coil construction MX 2 An induction winding; for measuring linear displacement, MY induction arrays are divided into Y 11 、Y 13 、Y 15 、Y 17 Coil-forming MY 1 Inductive winding and Y 12 、Y 14 、Y 16 、Y 18 Coil-forming MY 2 An induction winding; x is X 11 Coil and X 13 Coil, X 15 Coil and X 17 The coils being oriented in the X-direction and Y 11 Coil and Y 13 Coil, Y 15 Coil and Y 17 The initial positions of the coils along the Y direction are different from each other by jW +L i1 +L i3 ；X 11 Coil and X 15 Coil, X 13 Coil and X 17 The coil being oriented in the Y-axis direction and Y 11 Coil and Y 15 Coil, Y 13 Coil and Y 17 The initial positions of the coils along the X-axis direction are different by jW +L i1 +L i4 ；X 11 Coil and X 12 Coil, X 15 Coil and X 16 The coils being oriented in the X-direction and Y 11 Coil and Y 12 Coil, Y 15 Coil and Y 16 The initial positions of the coils along the Y-axis direction are different by jW +L i1 +L i5 ；
When in measurement, two paths of sine and cosine current excitation signals with the same frequency and the same amplitude are respectively applied to sine and cosine windings on the stator matrix (1), and when the rotor matrix (2) moves relative to the stator matrix (1), MX 1 、MX 2 Induction winding, MY 1 、MY 2 The induction windings respectively generate U X1 、U X2 、U Y1 、U Y2 Four-way electric signal according to F X Induction winding and F Y Output signal phi of induction winding X And phi Y To determine the movement direction according to the difference of Z X Output signal U of induction winding F1 、U F2 ，Z Y Output signal U of induction winding F3 、U F4 Judging the positive and negative of the single-dimensional direction through the direction-distinguishing circuit, and finally outputting two paths of differential induction signals U by the MX induction array X1 And U X2 Output traveling wave signal U with angular displacement information through logic circuit X Two paths of differential induction signals U output by MY induction array Y1 And U Y2 Output traveling wave signal U with linear displacement information through logic circuit Y And U is also provided with X 、U Y The traveling wave signals are respectively compared with the same frequency reference signals, the phase difference is represented by the number of the interpolated high-frequency clock pulses, and the angular displacement or the linear displacement of the motion of the rotor matrix (2) relative to the stator matrix (1) is obtained after conversion.
2. The displacement sensor for combined measurement of magnetic field type angular displacement and linear displacement according to claim 1, wherein m is arranged on the outer cylindrical surface of the stator base body (1) 1 Row, m 2 Column excitation coils which jointly form a cosine winding and a sine winding; the cosine winding comprises an A excitation winding and a D excitation winding which are connected in series, the A excitation winding and the D excitation winding are in opposite winding directions, the A excitation winding comprises an A1 excitation winding and an A2 excitation winding which are connected, and the A1 excitation winding is numbered as C 4n1+2,4n2+1 The square exciting coil of the coil is connected, the A2 exciting winding is numbered as C 4n1+4,4n2+3 The square exciting coil of the coil is formed by connecting a D exciting winding comprising a D1 exciting winding and a D2 exciting winding which are connected, wherein the D1 exciting winding is numbered as C 4n1+4,4n2+1 The square exciting coil of the coil is connected, and the D2 exciting winding is numbered as C 4n1+2,4n2+3 Is formed by connecting square exciting coils; the sine winding comprises a B excitation winding and an E excitation winding which are connected in series, the winding directions of the excitation winding B and the E excitation winding are opposite, the B excitation winding comprises a B1 excitation winding and a B2 excitation winding which are connected, and the B1 excitation winding is numbered as C 4n1+1,4n2+2 The square exciting coil of the coil is connected, the B2 exciting winding is numbered as C 4n1+3,4n2+4 The square exciting coil of the coil is formed by connecting an E1 exciting winding and an E2 exciting winding which are connected, and the E1 exciting winding is a C-numbered exciting winding 4n1+3,4n2+2 The E2 exciting winding is formed by connecting square exciting coils with the number of C 4n1+1,4n2+4 Is formed by connecting square exciting coils, wherein C a，b Represents the exciting coil, B a，b Representing the gap between two adjacent excitation coils, the distance being L e2 A and b represent an X-direction coordinate and a Y-direction coordinate, respectively, a=4n1+i, b=4n2+i, i being taken1 or 2 or 3 or 4, n1 in turn takes from 0 to M 1 All integers of-1, M 1 Represents the total pole number of the exciting winding coil in the X direction, and n2 sequentially takes 0 to M 2 All integers of-1, M 2 Representing the total pole pair number of the Y-direction excitation winding coil, m 1 Equal to 4M 1 ，m 2 Equal to 4M 2 One counter-pole in the X direction or the Y direction consists of 4 adjacent exciting coils from A, B, D, E exciting windings, the width of the counter-pole is W, the circumferential angle corresponding to one pole distance W is P, and the circumference of the outer cylindrical surface of the stator matrix is l c ＝2πr 1 ＝n 3 W，r 1 For the outer radius of the stator base body, n 3 Take 1,2, 3, 4 … ….
3. The displacement sensor for combined measurement of angular displacement and linear displacement according to claim 1, wherein the coils of the angular displacement and linear displacement sensing signal pickup array are L in length and width i1 Is formed by square induction coils.
4. The displacement sensor for compositely measuring magnetic field type angular displacement and linear displacement according to claim 1, wherein the coils of the angular displacement and linear displacement sensing signal pickup array are composed of a plurality of sine coils, the sine coils are formed by splicing two half sine edges in mirror images at the bottom, and the half period space width of the sine coils is L i1 Half-cycle spatial height L i1 。
5. The displacement sensor for combined measurement of angular displacement and linear displacement according to claim 1, wherein the coils of the angular displacement and linear displacement sensing signal pickup array have a plurality of radii L i1 Round coil composition of/2.
6. The displacement sensor for combined measurement of angular displacement and linear displacement according to claim 1, wherein the angular displacement and linear displacement determine F in the array X Induction winding and F Y InductionThe windings each having a side length L i1 Square coil and two coils of length L along Y-axis or X-axis i1 Length L along X-axis or Y-axis i1 Rectangular coil of/2.
7. The displacement sensor for combined measurement of angular displacement and linear displacement according to claim 1, wherein the displacement direction is Z in the judgment array X Inductive winding and Z Y The coil of the induction winding has a plurality of lengths and widths L i1 Is formed by square induction coils.
8. The displacement sensor for combined measurement of angular displacement and linear displacement according to claim 1, wherein the displacement direction is Z in the judgment array X Inductive winding and Z Y The coil of the induction winding is composed of a plurality of sine coils, the sine coils are formed by splicing two half sine edges in a mirror image mode at the bottom, and the half period space width of the sine coils is L i1 Half-cycle spatial height L i1 。
9. The displacement sensor for combined measurement of angular displacement and linear displacement according to claim 1, wherein the displacement direction is Z in the judgment array X Inductive winding and Z Y The coil of the induction winding is provided with a plurality of radiuses L i1 Round coil composition of/2.
10. The displacement sensor for combined measurement of magnetic field type angular displacement and linear displacement according to claim 1, wherein the U is as follows X 、U Y The traveling wave signals and the same frequency reference signals are shaped into square waves by a shaping circuit respectively, and then phase comparison is carried out.
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