CN1173594A - Non-linear hinge for micro-mechanical device - Google Patents
Non-linear hinge for micro-mechanical device Download PDFInfo
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- CN1173594A CN1173594A CN 96111811 CN96111811A CN1173594A CN 1173594 A CN1173594 A CN 1173594A CN 96111811 CN96111811 CN 96111811 CN 96111811 A CN96111811 A CN 96111811A CN 1173594 A CN1173594 A CN 1173594A
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- hinge strap
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Abstract
A non-linear torsion hinge for a micro-mechanical device having a hinged movable element. Each hinge is comprised of two hing strips spaced apart in the same plane, such that the axis of rotation of at least one of the hinge strips is different from the axis of rotation of the movable element. As a result, the hinge strip must elongate as it twists, thereby providing a greater restoring torque.
Description
The present invention relates to micromachine, relate in particular to this type of device of the one or more moving elements with the torsion hinge utilized rotation.
A nearest improvement has made various mechanical device miniaturizations in the dynamo-electric field.The feature of these devices is small transmission device, controlling rod and valves.These " micromechanics " devices utilize integrated circuit technique and often make in conjunction with electric control circuit.Usually use and comprise accelerometer, pressure transducer and actuator.As another example, spatial light modulator can be made of the micromechanics mirror elements.
A type of micromachine is digital micromirror device (DMD), but is sometimes referred to as the deformation lens device.DMD has the array of up to a hundred or thousands of small tilted mirrors.Incide light on the DMD optionally from every specularly reflected to imaging plane or be not reflected, to form image.For mirror is tilted, every mirror is installed on one or more torsion hinge.The air clearance that utilization is positioned on lower floor's control circuit separates mirror.Control circuit provides the electrostatic force that can cause that every mirror optionally tilts.In order to obtain optimal operations, every mirror should return the position of its do not tilt (balance) when needed immediately.
The micromachine that can predict other also uses torsion hinge.For DMD, wish to design the hinge that can automatically revert to their equilibrium positions.
One aspect of the present invention is certain a type of improved micromachine, and this type has at least one by the rotatable member of torsional hinge support, thereby rotatable member can rotate around a running shaft.This hinge strap comprises at least two hinges.These hinge strap separate in same plane, depart from the running shaft of rotatable member thereby the running shaft of at least one hinge strap is substantially parallel.
An advantage of the invention is that it provides a kind of hinge, its torque is increase non-linearly with the angle of rotation of the rotatable member that hinge is installed.To utilizing the hinge of electrostatic attraction operation, this non-linear torque is corresponding to the non-linear force of applied field.As a result, this hinge has bigger restoring force, is used for the added power of initial rotation and can keeps quite little.Falling another lip-deep rotatable member will land to such an extent that be not very fast.
Fig. 1 is the exploded perspective view of digital micromirror device (DMD) hidden hinge type mirror element, and this device has according to non-linear hinge of the present invention.
Fig. 2 is the stereogram of DMD torque rod type mirror element, and this device has according to non-linear hinge of the present invention.
Fig. 3 illustrates in greater detail the hinge of Fig. 1 and 2.
Fig. 4 illustrates another embodiment of Fig. 1 and 2 hinge.
Fig. 5 illustrates another type of non-linear hinge.
Fig. 6 illustrates with common micromachine and compares, according to the non-linear relation of torque-angle in the micromechanical hinges of the present invention.
For example, following description is the micromachine that utilizes a kind of specific type, and namely " numeral is miniature Lens device " (DMD), be sometimes referred to as " deformable mirror device ". As described in the background art, DMD comprises little Little hinged mirrors, every mirror is supported on the substrate of control circuit. The objective of the invention is a kind of improved turning round The turning hinge chain, wherein the meaning of " torsion hinge " be a kind of can be by reversing rather than the crooked hinge that operates.
The application of DMD is to be used to form image, and DMD has optionally light is reflexed to here But the array of the deflecting mirror of imaging plane. The image that is formed by DMD can be used for display system or non-bump is beaten In the application of seal. Other application of DMD is the formation that can not relate to image, turns to such as optics driving, optics Change and accelerometer. During therein some were used, " mirror " needed not be reflection-type. In some applications, Also can simulate rather than figure pattern operation DMD. Generally, word used herein " DMD " comprises any class The micromachine of type, these devices have all that at least one separates by the air gap from substrate But hinged deflecting element, it is this substrate motion relatively.
The present invention also may be used on being installed to the micromachine of other type of the rotatable member of torsion hinge.As the mirror element of DMD, other micromachine also has rotating part, and its motion is to be caused by reversing of torsion hinge.Here the identical notion to the discussion of DMD hinge may be used in any micromechanics torsion hinge.
Fig. 1 is the stereogram that single mirror element 10 is decomposed among the DMD.In Fig. 1, mirror 11 is not deflection, but as the arrow indication, and its torsion hinge 12 makes it can be along any deflection in the both direction.As mentioned above, various DMD equipment can use these mirror element 10 separately or with the form of array.
For other hidden hinge DMD design, the hinge 12 of mirror element 10 is supported by the hinge support post 13 that forms on the substrate.Addressing electrode 14 is supported by electrode supporting post 15 (they and hinge 12 and hinge support post 13 are in same level).
Fig. 2 illustrates the mirror element 20 of torque rod type DMD.Hinge 22 is not hide, but extends from mirror 21 relative both sides.Hinge 22 is installed on the hinge support post 23.Addressing electrode 26 provides the gravitation of inclination mirror 21 (its contact overlap joint liner 27).On substrate 28, make mirror element 20 with storage unit and control circuit.
Many design modification of Fig. 1 and 2 are possible.For example, support 27 (or mirror 21) can be slotted, thereby can put into hinge 12 (or 22).Hinge 12 (or 22) can be installed a side of support 17 (or mirror 21) as shown in Figure 1 or be installed in one jiao as shown in Figure 2.In addition, the hinge installation need be on the relative angle or on the side.Hinge can be installed, to allow asymmetric inclination.
Be used for the operation of image display, and be example with the array of mirror element 20, light source illuminates the surface of DMD.Can use lens combination to make the wide size that is configured as mirror element 20 arrays that causes, and this light scan mirror sub-element 20.Voltage based on data in the memory cell of substrate 28 is added to addressing electrode 26.By voltage optionally is added to addressing electrode 26, can between mirror 21 and addressing electrode 26 thereof, produce electrostatic force.This electrostatic force causes that every mirror 21 tilts approximately+10 to spend (opening) or about-10 degree (pass), thereby the light on DMD surface is incided in modulation.Pass through the directed imaging plane of display device eyeglass from the light of " opening " mirror 21 reflections.From the light of " pass " mirror 21 reflection away from imaging plane.The pattern that obtains has formed image.Determined shade of gray at mirror 21 for the ratio of time in each picture frame of " opening ".Color can utilize colour wheel or three-DMD to dispose to add.
In fact, mirror 21 and addressing electrode 26 thereof form capacitor.But when mirror 21 and addressing electrode 26 thereof were added suitable voltage, the electrostatic force of acquisition (gravitation or repulsion) caused that mirror 21 tilts to coupling addressing electrode 26 or away from the addressing electrode 26 that repels each other.Mirror 21 keeps tilting, up to its EDGE CONTACT lower floor overlap joint liner 27.In case removed the electrostatic force between addressing electrode 26 and the mirror 21, the energy that is stored in the hinge 22 just provides restoring force, so that mirror 21 turns back to the position of not deflection.Can add suitable voltage to mirror 21 or addressing electrode 26, return the position of its not deflection to help mirror 21.
One aspect of the present invention is to think that electric field non-linearly increases when mirror 21 (or support 1) rotates.In order to prevent to land immediately, and for stronger restoring force is provided, hinge 22 (or 12) should nonlinear response.As described below, this realizes by make each hinge 12 and 22 from two adjacent hinge bars.
Fig. 3 illustrates in greater detail mirror 21 and hinge 22.For purpose of the present invention, the support 17 of mirror element 10 and hinge 12 structurally and in operation are equal to.The running shaft of mirror 21 is along the Y-Y direction.Each hinge 22 comprises a pair of hinge strap 22a, and the hinge strap that is arranged in same plane separates.Each hinge strap 22a has it self running shaft.In the example described here, the hinge strap 22a of each hinge aims in line, thereby two running shaft h1-h1 and h2-h2 are arranged.As shown in the figure, these spin axiss are parallel to but depart from the running shaft of mirror 21.As a result, during mirror 21 rotations, hinge strap 22a elongation.The power of the required increase of elongated hinges bar 22a causes the increase of restoring torque.
By etching two hinge strap 22a rather than a slice hinge on each face of mirror 21, can be comprising in the manufacture process of DMD according to hinge 22 of the present invention.Typical DMD has the mirror 21 of about 16 square microns.For the mirror 21 of this size, the width w of hinge strap 22a approximately is 1 micron.Its length approximately is 4 microns.Between them approximately is 1 micron apart from d.The size of W and d is subjected to the restriction of photoengraving ability; Better resolution ability can make size littler.
Can regulate the amount of the every rotation of pixel hinge elongation once the time by the span between the hinge strap 22a in the hinge 22.Span causes nonlinear degree also bigger than senior general.The little angle of being extended by the extra hinge of certain span d generation is approximately:
ε elongation=0.5 (d θ/2L)
2In the formula: ε elongation=elongation stress
Span between the d=adjacent hinge
θ=mirror angle of rotation
The L=hinge length
Fig. 4 illustrates another embodiment of hinge 22.Can similarly change hinge 12.With parallel to each other different be that the hinge strap 22a in each hinge 22 forms the V font.This design makes hinge shape can adapt to structure on every side.
Fig. 5 illustrates another embodiment's of hinge 22 hinge 52.And have two hinge strap that separate different be that each hinge 52 is very wide.The ratio of its width and length is very big, thereby obtains non-linear torque when the angle of rotation of mirror 21 increases.Also can similarly change hinge 12.An example of wide hinge 52 is 2 microns wide and 4 microns long.
Fig. 6 illustrates the relation according to torque-angle between non-linear hinge of the present invention and the common micromechanical hinges.Non-linear hinge has the bar 1 of 1 micron of two 1 micron wide, 4 microns long and spacing.Linear hinge is 1 micron wide and 4 microns long monolithics.For linear hinge, its running shaft is corresponding to the running shaft of mirror, and the relation of its torque-angle is linear.
Other embodiment
Though described the present invention with reference to specific embodiment, this description does not also mean that the meaning of restriction.To described embodiment's various changes, and alternative embodiment will be tangible to the those of skill in the art in related domain.Therefore, attempt to make additional claims to cover all changes that drop in the actual range of the present invention.
Claims (15)
1. improved micromachine, it belongs to and has at least one rotatable member by hinge support, thus the type that described rotatable member can rotate around running shaft is characterized in that this improvement comprises:
Described hinge comprises at least two hinge strap, and described hinge strap is spaced from each other in same plane, departs from the running shaft of described motor element thereby the running shaft of at least one described hinge strap is parallel to.
2. improved micromachine as claimed in claim 1 is characterized in that described all hinge strap are substantially parallel.
3. improved micromachine as claimed in claim 1 is characterized in that described all hinge strap form the V font basically.
4. improved micromachine as claimed in claim 1 is characterized in that the width of described each hinge strap all is similar to 1 micron.
5. improved micromachine as claimed in claim 1 is characterized in that described all hinge strap separate about 1 micron far away.
6. improved micromachine as claimed in claim 1, the ratio that it is characterized in that described each hinge strap width and length is similar to 1: 4 or is littler.
7. improved micromachine, it belongs to and has at least one rotatable member by hinge support, thus the type that described rotatable member can rotate around running shaft is characterized in that this improvement comprises:
Described hinge has the size of width with respect to length, thereby when described rotatable member rotated, the edge of described hinge experienced nonlinear extension strain.
8. improved micromachine as claimed in claim 7, the ratio that it is characterized in that described hinge width and length was greater than 1: 2.
9. improved micromachine as claimed in claim 7, the size that it is characterized in that described hinge are about 2 microns wide, and 4 microns long.
10. a digital micromirror device (DMD) is characterized in that comprising:
Preparation has the substrate of following element on it: at least one overlaps electrode, a supporting post, at least one hinge from described supporting post extension, is contained in the mirror on the described hinge, wherein said at least one hinge deformable, thus the effect that makes described mirror be subjected to the power that applies is moved to described overlap joint electrode; And
Described hinge comprises at least two hinge strap, and described hinge strap is spaced from each other at grade, departs from the running shaft of described motor element thereby the running shaft of at least one described hinge strap is parallel to.
11. device as claimed in claim 10 is characterized in that described hinge strap is substantially parallel.
12. device as claimed in claim 10 is characterized in that described hinge strap forms the V font basically.
13. device as claimed in claim 10 is characterized in that the width of described each hinge strap all is similar to 1 micron.
14. device as claimed in claim 10 is characterized in that described all hinge strap separate about 1 micron far away.
15. device as claimed in claim 10 is characterized in that described each hinge strap width is similar to 1: 4 to the ratio of length or littler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96111811 CN1173594A (en) | 1996-08-08 | 1996-08-08 | Non-linear hinge for micro-mechanical device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96111811 CN1173594A (en) | 1996-08-08 | 1996-08-08 | Non-linear hinge for micro-mechanical device |
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| Publication Number | Publication Date |
|---|---|
| CN1173594A true CN1173594A (en) | 1998-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96111811 Pending CN1173594A (en) | 1996-08-08 | 1996-08-08 | Non-linear hinge for micro-mechanical device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100453833C (en) * | 2007-03-30 | 2009-01-21 | 北京航空航天大学 | Large deformation flexible Hooke's hinge with virtual rotating center |
| CN101426717B (en) * | 2006-04-24 | 2012-12-05 | 弗兰霍菲尔运输应用研究公司 | Torsion resilient element for hanging micromechanical elements which can be suspended and deflected |
-
1996
- 1996-08-08 CN CN 96111811 patent/CN1173594A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101426717B (en) * | 2006-04-24 | 2012-12-05 | 弗兰霍菲尔运输应用研究公司 | Torsion resilient element for hanging micromechanical elements which can be suspended and deflected |
| CN100453833C (en) * | 2007-03-30 | 2009-01-21 | 北京航空航天大学 | Large deformation flexible Hooke's hinge with virtual rotating center |
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