CN101426717B - Torsion resilient element for hanging micromechanical elements which can be suspended and deflected - Google Patents
Torsion resilient element for hanging micromechanical elements which can be suspended and deflected Download PDFInfo
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- CN101426717B CN101426717B CN2006800543800A CN200680054380A CN101426717B CN 101426717 B CN101426717 B CN 101426717B CN 2006800543800 A CN2006800543800 A CN 2006800543800A CN 200680054380 A CN200680054380 A CN 200680054380A CN 101426717 B CN101426717 B CN 101426717B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Springs (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention relates to torsion resilient elements for hanging micromechanical elements which can be deflected, for instance reflective elements which swivel around a rotation axis. The aim of the invention is to provide torsion resilient elements for hanging micromechanical elements which can be deflected and, compared to known resilient elements, can achieve improved qualities during operation. Torsion resilient elements pertaining to the invention are designed in such a manner that they have an altered geometrical form in the direction of their longitudinal axis and, thus a non-linear load-deflection curve. The longitudinal axis is aligned between a restraint or bearing and the movable micromechanical element, which is held by at least one torsion resilient element. The torsion resilient element pertaining to the invention can feature a linear section which is aligned in the direction of the longitudinal axis and at least one bifurcation/branch that is located on a face side over which the said linear section crosses.
Description
Technical field
The present invention relates to a kind of torsion resilient element pertaining, it is used to hang the deflectable micro-mechanical component such as the reflecting element that can center on the rotation pivot.In this connection, this pivot can carry out between two reversal points with preset anglec of rotation with the mode of swing.This pivoting action can pass through static driven, perhaps utilizes different physical principles to drive in a manner known way.
Background technology
Low as much as possible in order to guarantee to drive energy needed, such system keeps resonance condition to be driven through being everlasting.In this, just it should be noted that the natural resonance of this system.This depends on a plurality of parameters.Except that deadweight, also must consider the spring performance and corresponding deflection of spring element.Under the constant situation of driving power, when driver adopts resonant frequency, can access than driving frequency and the much bigger deflection of resonant frequency condition of different.Other problem in the appearance aspect this will be pointed out hereinafter.
The spring element that use has the Hookean spring characteristic hangs this deflectable micro-mechanical component.This also is the example in the system; These systems have utilized the drive principle of being described at " the innovation mini drive that is used for a peacekeeping two-dimensional deflection of light " by H.Schenk that also is referred to as " face external electrode brush (electrode comb) ", and the document is the academic dissertation in 2000 year of Germany Du of Duisburg according to Regensburg university.
Hysteresis effect occurs, and have to be noted that under normal circumstances, only utilize the driving frequency that exceeds resonant frequency (intrinsic frequency) to be used to keep resonance condition.This operation can not be resultant by less driving frequency.If do not reach resonant frequency, this state will disappear, and only can could start once more down being significantly higher than the driving frequency of resonant frequency (be generally resonant frequency four times).Under driving frequency, can have resonance condition and forever operate corresponding to double resonant frequency.
Need hard and fast rule for this purpose, wherein, also must consider phase place.
But, can not frequently use the maximum possible deflection of micro-mechanical component, this is that promptly vibration deflection just has been destroyed when the low fluctuation of driving frequency owing to have risk near the running being in resonant frequency.The stability that also have to be noted that maximum deflection (amplitude) depends near the corresponding driving frequency that is positioned at the resonant frequency largely.Thus, the less variation of driving frequency in this scope caused changing sizable deflection.
In this system that should under resonance condition, turn round, make great efforts to avoid influence, its on-stream variation of resonant frequency that causes to resonant frequency.This is applicable to the influence of corresponding deflection and the spring performance of employed spring element, and this spring element should have linear spring performance at least in working range.Utilize different spring performances; Corresponding deflection is depended in the variation of resonant frequency equally, under the situation of the spring performance that this causes when increasing deflection, successively decreasing, moves towards less resonant frequency direction; And under the spring performance situation that increases progressively, move towards bigger resonant frequency direction.
Also considered is called the effect of " absorption ", and this effect has such result unfriendly, promptly can not utilize maximum possible deflection to come to avoid reliably a kind of like this system is caused mechanical damage.
Summary of the invention
Therefore, the objective of the invention is, a kind of torsion resilient element pertaining that is used to hang deflectable micro-mechanical component is provided, it can the improved characteristic of on-stream acquisition with respect to known flexible member.
This purpose is to be achieved through the described torsion resilient element pertaining of claim 1 according to the present invention.Through being utilized in the characteristic of pointing out in the dependent claims, can realize advantageous embodiment of the present invention and further development.
Torsion resilient element pertaining according to the present invention is made for, and makes them have the geometry of variation along its longitudinal axis direction, thereby has nonlinear spring performance.
In this respect, longitudinal axis is oriented between anchor clamps or support and the deflectable micro element, and this deflectable micro element is kept by at least one torsion resilient element pertaining.
In this respect, can have directed along the longitudinal axis linearity region according to torsion resilient element pertaining of the present invention, and this linearity region is attached to fork/branch wherein.Thereby this torsion resilient element pertaining can at least roughly form " Y " type.
V-type or the U type with limb processed by one or more fork/branches on this torsion resilient element pertaining.These limbs are connected to deflectable element or are connected to support/anchor clamps on their outer face.
In fork/branch, can constitute at least two limbs.Certainly, also can there be limb more than two.These limbs connect through the part of for example processing the transversal web form again.
The limb of fork/branch can be rectilinear.They also can be parallel or be parallel to the longitudinal axis orientation.
The limb of fork/branch also can be crooked.
Fork/the branch that on torsion resilient element pertaining, forms should be with respect to the longitudinal axis symmetry.
Possible embodiment according to torsion resilient element pertaining of the present invention is forming triangle an end at least, and it is connected in rectilinear zone.
Fork/the branch that on the end face of torsion resilient element pertaining, forms can have the shape that is different from each other, and can directly be connected to each other when needing, so that on this torsion resilient element pertaining, needn't have directed along the longitudinal axis linear zone.
But the fork/branch of torsion resilient element pertaining also can have different length and/or limb number along the longitudinal axis.This can realize through the limb length that is different from fork/branch each other.
The zone that is connected to fork/branch or stretches by this way constitutes, and makes it longitudinally have the Torsion Section coefficient of variation.This can realize through the plain mode such as the cross section that changes.In this respect, can change cross-sectional area.
Preferably, can be chosen as be continuous along the longitudinal axis in the variation of this Torsion Section coefficient.
In this respect, this Torsion Section coefficient can increase to along the longitudinal axis and reach maximum, then, can reduce once more hereinafter.
In according to torsion resilient element pertaining of the present invention, also can between two rectilinear zones, constitute branch with limb, wherein there is different orientation each other in these limbs in this branch.The limb of this branch can be vertical with respect to longitudinal axis, parallel and/or the angular orientation that tilts with on-right angle.
Through corresponding design and the size that is fit to, can process torsion resilient element pertaining with the spring performance that is suitable for using.In this respect, predeterminable spring performance, wherein, the spring force of confirming obtains according to corresponding deflection.Thus, can demonstrate spring performance, the characteristic of successively decreasing wherein occur, then go out characteristic when big deflection, to occur increasing progressively according to torsion resilient element pertaining of the present invention.Thus, the driving force ratio that when beginning and than primary deflector the time, needs is littler in the situation of big deflection.The restoring force of the torsion flexible member of deflection shows equally by this way.Therefore, near the restoring force equilbrium position or middle position is less; But,, when deflection, be that non-linear relation is as existing in the spring performance of linearity with corresponding power with respect to corresponding deflection at least at regional area.
Though torsion resilient element pertaining is actually single element, according to embodiments of the invention, it shows as " a series of connection " similarly.But, and, increase spring force according to corresponding deflection according to the spring performance multiple fractionation of torsion resilient element pertaining of the present invention.
In a plurality of applicable cases, can avoid or reduce the shortcoming of spring element with Hookean spring characteristic.
Make according to torsion resilient element pertaining of the present invention with the mode similar, only consider that wherein therefore corresponding design needn't increase manufacturing cost with conventional spring element.
Can be present in the reflecting element such as micro-reflector according to torsion resilient element pertaining of the present invention, it can be used for the scanner that tool changes.
Also can be applied to be used for the device of data output, for example laser writer, laser printer, laser explosure device etc.
But,, in the sensor of viscosity sensor or accelerometer, also exist torsion resilient element pertaining is arranged on the possibility in the deflectable element such as pressure sensor.
The specific embodiment
Hereinafter, by means of the example that is shown in Fig. 1 to 7, schematically explain the present invention.
Therefore, Fig. 1 shows eight examples that are used for according to the possible embodiment of the example of torsion resilient element pertaining of the present invention (torsion resilient element pertaining).
In this respect, the example shown in the right side in following delegation, in all examples, all there is axis orientation linear zone longitudinally.Example shown in the delegation has fork/branch in the end in the above, and it constitutes V-type or U type.
The example that is shown in the following delegation all has fork/branch in two end faces, its each can have different designs, perhaps they longitudinally the length of axis be different.
The example that is shown in the right side in the following delegation is formed by two fork/branches directly connected to each other, and one of them processes the U type, and another processes V-type.
Fig. 2 shows four other examples.In the example on two tops, have fork/branch more than two limbs and be connected in the end and process rectilinear zone.
In two examples that are shown in the bottom, they of fork/branch that have been provided with V-type or U type are provided with two limbs at the opposing end faces place.
For the example of so far being explained, all consider the cross-sectional area that equates respectively for all parts and zone.But, be not this situation in two examples shown in Figure 3.At this, a part of torsion resilient element pertaining is processed through the cross-sectional area continuous change of axis longitudinally along the longitudinal axis.Thereby, the same respective change of Torsion Section coefficient, this has influenced the spring performance when different deflection.
Fig. 4 shows leg-of-mutton branch is connected in the zone of processing straight line in the end example.
In the example depicted in fig. 5, there are two a pair of corresponding limbs of formation two ends that are oppositely arranged.In this respect, this two couple's limb length is different, and consequently constituting a pair of included angle of two limbs is different equally.
In the example shown in Fig. 6 and 7, there is branch, it is arranged on two and processes between the rectilinear zone and be connected to this two zones.In branch, have a plurality of limbs once more, and the orientation of a plurality of limbs differs from one another.
In example, there is the fork/branch of V-type in addition in the end according to Fig. 7.
Claims (17)
1. torsion resilient element pertaining that is used to hang deflectable micro-mechanical component; Said torsion resilient element pertaining remains on the suspension arrangement and is connected to micro-mechanical component; Said torsion resilient element pertaining has the geometry that changes along its longitudinal axis direction, thereby nonlinear spring performance is provided, wherein; Said spring element comprises along the directed linearity region of said longitudinal axis direction
And
Said linearity region have at least one end face and the fork of said at least one end and branch one of at least,
And
Through changing zone that cross-sectional area realizes having fork and branch at the said Torsion Section coefficient that has variation on vertical.
2. torsion resilient element pertaining as claimed in claim 1 is characterized in that, V-type or U type are processed by said fork/branch.
3. torsion resilient element pertaining as claimed in claim 1 is characterized in that, has at least two limbs in fork/bifurcation.
4. torsion resilient element pertaining as claimed in claim 1 is characterized in that, forms leg-of-mutton zone at least one end.
5. torsion resilient element pertaining as claimed in claim 1 is characterized in that said torsion resilient element pertaining is formed by the fork/branch of two different designs connected to one another.
6. torsion resilient element pertaining as claimed in claim 1 is characterized in that, the fork/branch that is positioned at said torsion resilient element pertaining place has different length and/or different limb numbers along said longitudinal axis direction.
7. torsion resilient element pertaining as claimed in claim 1 is characterized in that, the zone that is connected to fork/branch has the Torsion Section coefficient along said vertical variation.
8. torsion resilient element pertaining as claimed in claim 1 is characterized in that, said Torsion Section coefficient changes continuously.
9. torsion resilient element pertaining as claimed in claim 1 is characterized in that, said Torsion Section coefficient is increased to maximum, and reduces along said longitudinal axis direction subsequently.
10. torsion resilient element pertaining as claimed in claim 2 is characterized in that, it is long that the said longitudinal axis direction of the V-type of formation fork/branch shape or edge, U type zone has the limb that differs from one another at said torsion resilient element pertaining place.
11. torsion resilient element pertaining as claimed in claim 1 is characterized in that, said torsion resilient element pertaining is made for respect to said longitudinal axis vertical symmetry.
12. torsion resilient element pertaining as claimed in claim 3 is characterized in that, the limb of said fork/branch is processed linear.
13. torsion resilient element pertaining as claimed in claim 3 is characterized in that, the limb of said fork/branch is crooked.
14. torsion resilient element pertaining as claimed in claim 3 is characterized in that, between two zones of processing straight line, forms branch, said branch has the different each other directed limb of direction in a plurality of edges.
15. torsion resilient element pertaining as claimed in claim 14 is characterized in that, the limb of said branch is angular orientation vertical, parallel and/or that tilt with on-right angle with respect to said longitudinal axis.
16. torsion resilient element pertaining as claimed in claim 1 is characterized in that, said fork/branch processes with respect to said longitudinal axis symmetry.
17. torsion resilient element pertaining as claimed in claim 1 is characterized in that, than primary deflector the time, said torsion resilient element pertaining has the spring performance of successively decreasing and changes, and it is converted into the spring changing features for increasing progressively when deflection increases.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/DE2006/000746 WO2007121693A1 (en) | 2006-04-24 | 2006-04-24 | Torsion resilient element for hanging micromechanical elements which can be deflected |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101426717A CN101426717A (en) | 2009-05-06 |
| CN101426717B true CN101426717B (en) | 2012-12-05 |
Family
ID=37492429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800543800A Active CN101426717B (en) | 2006-04-24 | 2006-04-24 | Torsion resilient element for hanging micromechanical elements which can be suspended and deflected |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20090250853A1 (en) |
| CN (1) | CN101426717B (en) |
| DE (1) | DE112006003854B4 (en) |
| WO (1) | WO2007121693A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007051820A1 (en) | 2007-04-02 | 2008-10-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micromechanical component with increased rigidity |
| EP2207190B9 (en) * | 2009-01-08 | 2014-09-24 | Epcos AG | Resilient device |
| DE102010029074B4 (en) | 2010-05-18 | 2018-03-08 | Robert Bosch Gmbh | Connection structure for micro swing devices |
| DE102018207783B4 (en) * | 2018-05-17 | 2022-11-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS array made of MEMS, each with a movable structural element |
| JP6964102B2 (en) * | 2019-01-16 | 2021-11-10 | 株式会社鷺宮製作所 | MEMS beam structure and MEMS vibration power generation element |
| DE102020112267A1 (en) | 2020-05-06 | 2021-11-11 | Northrop Grumman Litef Gmbh | Torsion spring element |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1173594A (en) * | 1996-08-08 | 1998-02-18 | 德克萨斯仪器股份有限公司 | Non-linear hinge for micro-mechanical device |
| US6431714B1 (en) * | 2000-10-10 | 2002-08-13 | Nippon Telegraph And Telephone Corporation | Micro-mirror apparatus and production method therefor |
| US6672732B1 (en) * | 1999-08-28 | 2004-01-06 | Robert Bosch Gmbh | Micromechanical oscillating device |
| CN1620626A (en) * | 2002-01-21 | 2005-05-25 | 松下电器产业株式会社 | Optical switch and production method therefor, information transmission device using |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5739941A (en) * | 1995-07-20 | 1998-04-14 | Texas Instruments Incorporated | Non-linear hinge for micro-mechanical device |
| US6157114A (en) * | 1996-07-03 | 2000-12-05 | International Business Machines Corporation | Mechanical signal processor comprising means for loss compensation |
| KR100439908B1 (en) * | 2002-02-28 | 2004-07-12 | (주)엠투엔 | Electrostatic micro actuator |
| JP3987382B2 (en) * | 2002-06-11 | 2007-10-10 | 富士通株式会社 | Micromirror device and manufacturing method thereof |
| TWI231290B (en) * | 2002-08-14 | 2005-04-21 | Fujitsu Ltd | Micro-pivotal device having torsion bars |
| US7446911B2 (en) * | 2002-11-26 | 2008-11-04 | Brother Kogyo Kabushiki Kaisha | Optical scanning apparatus and image forming apparatus |
| DE10320725A1 (en) * | 2003-05-08 | 2004-11-25 | Robert Bosch Gmbh | Micromechanical motion sensor has electrostatic field excited oscillating spring beam with compensation using separate or combined comb drives |
| US7042613B2 (en) * | 2003-08-12 | 2006-05-09 | Terraop Ltd. | Bouncing mode operated scanning micro-mirror |
| JP2005092174A (en) * | 2003-08-12 | 2005-04-07 | Fujitsu Ltd | Micro-oscillation element |
| JP4461870B2 (en) * | 2004-03-26 | 2010-05-12 | ブラザー工業株式会社 | Optical scanning device and image forming apparatus having the same |
| US7529011B2 (en) * | 2004-04-12 | 2009-05-05 | Ricoh Company, Ltd. | Deflector mirror with regions of different flexural rigidity |
-
2006
- 2006-04-24 DE DE112006003854T patent/DE112006003854B4/en active Active
- 2006-04-24 US US12/297,878 patent/US20090250853A1/en not_active Abandoned
- 2006-04-24 CN CN2006800543800A patent/CN101426717B/en active Active
- 2006-04-24 WO PCT/DE2006/000746 patent/WO2007121693A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1173594A (en) * | 1996-08-08 | 1998-02-18 | 德克萨斯仪器股份有限公司 | Non-linear hinge for micro-mechanical device |
| US6672732B1 (en) * | 1999-08-28 | 2004-01-06 | Robert Bosch Gmbh | Micromechanical oscillating device |
| US6431714B1 (en) * | 2000-10-10 | 2002-08-13 | Nippon Telegraph And Telephone Corporation | Micro-mirror apparatus and production method therefor |
| CN1620626A (en) * | 2002-01-21 | 2005-05-25 | 松下电器产业株式会社 | Optical switch and production method therefor, information transmission device using |
Also Published As
| Publication number | Publication date |
|---|---|
| DE112006003854B4 (en) | 2011-09-08 |
| CN101426717A (en) | 2009-05-06 |
| WO2007121693A1 (en) | 2007-11-01 |
| US20090250853A1 (en) | 2009-10-08 |
| DE112006003854A5 (en) | 2009-01-15 |
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