CN117348231A - Cover plate assembly for optical observation device and optical observation device - Google Patents
Cover plate assembly for optical observation device and optical observation device Download PDFInfo
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- CN117348231A CN117348231A CN202311374117.1A CN202311374117A CN117348231A CN 117348231 A CN117348231 A CN 117348231A CN 202311374117 A CN202311374117 A CN 202311374117A CN 117348231 A CN117348231 A CN 117348231A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 54
- 238000001816 cooling Methods 0.000 claims abstract description 157
- 239000007788 liquid Substances 0.000 claims abstract description 128
- 239000002826 coolant Substances 0.000 claims description 36
- 238000004891 communication Methods 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 32
- 238000005192 partition Methods 0.000 description 12
- 238000000926 separation method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/28—Base structure with cooling device
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention provides a cover plate assembly for an optical observation device and the optical observation device, wherein the cover plate assembly comprises a cover plate body, a first observation window and a second observation window, and the first observation window is arranged in the cover plate body; the second observation window is arranged in the cover plate body, the first observation window and the second observation window are arranged at parallel intervals, and the liquid cooling system is arranged around the first observation window and the second observation window in a surrounding mode and used for carrying out liquid cooling on the first observation window and the second observation window. The air cooling system is arranged in the cover plate body and between the first observation window and the second observation window and used for carrying out air cooling on the first observation window and the second observation window. The inside at the apron body has liquid cooling system and air-cooled system simultaneously, adopts liquid cooling and forced air cooling to combine together the mode, and the cooling effect is good, prolongs the life of microscope, and the size of heater need not to restrict to guarantee the detection effect of optical observation device.
Description
Technical Field
The present invention relates generally to the field of optical inspection, and more particularly, to a cover plate assembly for an optical observation device and an optical observation device.
Background
In an in-situ CVD growth optical detection system, a high-temperature heating table is required to continuously heat a sample to more than 800 ℃, in order to ensure that an objective lens for short-distance observation continuously works safely for an optical microscope, a heater size reduction mode is adopted in the prior art, the heating area is reduced to be less than 1cm multiplied by 1cm, the heat radiated by the heater to a transparent observation window is further reduced, and meanwhile, a certain distance is reserved between the objective lens of the optical microscope and the transparent observation window, and the heat radiated to the lens through the observation window is further reduced. However, the size of the heater is limited, and only a heater with a smaller heating area can be used, so that the area of the constant temperature area is limited, the constant temperature area can only be suitable for samples with the size of less than 1cm multiplied by 1cm, and for samples with the size of more than 1cm, the size of the heater needs to be increased to enlarge the heating area, but the generated heat is too high, so that the normal operation of a microscope is influenced.
Because the effect of cooling is limited, for the environment with the operating temperature being about 1000 ℃, the temperature of the observation platform after cooling is still above 100 ℃, and the core devices of the observation platform such as a lens are greatly damaged.
Disclosure of Invention
The cover plate assembly for the optical observation device and the optical observation device provided by the invention have the advantages that the cooling effect and the detection precision are improved.
According to a first aspect of the present invention, there is provided a cover plate assembly for an optical observation device, comprising:
a cover plate body;
the first observation window is arranged in the cover plate body;
the second observation window is arranged in the cover plate body, and the first observation window and the second observation window are arranged at intervals in parallel;
the liquid cooling system is arranged around the first observation window and the second observation window in a surrounding mode and is used for carrying out liquid cooling on the first observation window and the second observation window;
the air cooling system is arranged in the cover plate body and between the first observation window and the second observation window, and is used for carrying out air cooling on the first observation window and the second observation window.
In some embodiments, the liquid cooling system comprises:
the first liquid cooling channel is arranged around the first observation window in a surrounding mode and is used for circulating cooling media.
In some embodiments, the first liquid cooling channel comprises:
the first sub-channel is sleeved outside the first observation window;
the second sub-channel is sleeved outside the first observation window and arranged between the first sub-channel and the first observation window, and the first sub-channel and the second sub-channel are mutually communicated.
In some embodiments, the liquid cooling system comprises:
the cooling medium flow guide device comprises a flow guide piece, wherein a communication groove is formed between the first sub-channel and the second sub-channel, and the flow guide piece penetrates through the communication groove and is used for guiding cooling medium in the first sub-channel to the second sub-channel.
In some embodiments, the liquid cooling system further comprises:
the second liquid cooling channel is arranged around the second observation window in a surrounding mode and communicated with the first liquid cooling channel, the second liquid cooling channel is used for circulating cooling medium, and the air cooling system is arranged between the first observation window and the second liquid cooling channel.
In some embodiments, the liquid cooling system further comprises:
the communication channel is arranged in the cover plate body, and the communication channel is arranged between the first liquid cooling channel and the second liquid cooling channel and is respectively communicated with the first liquid cooling channel and the second liquid cooling channel.
In some embodiments, the air cooling system includes:
a gas passage provided in the cover plate body and between the first observation window and the second observation window, the gas passage being for circulating gas therein;
the air inlet is arranged on the cover plate body and communicated with the air channel and is used for introducing air;
the air outlet is arranged on the cover plate body and communicated with the air channel and used for discharging the air.
In some embodiments, a liquid cooling plate is arranged in the cover plate body, the liquid cooling plate is arranged between the first observation window and the second observation window, and a cavity between the first observation window and the liquid cooling plate forms the gas channel.
In some embodiments, the orthographic projection of the second observation window on the reference plane is positioned inside the orthographic projection of the air cooling system on the reference plane; and/or the number of the groups of groups,
the orthographic projection of the air cooling system on the reference plane is positioned in the orthographic projection of the first observation window on the reference plane;
the reference surface is the top surface of the cover plate body along the axial direction of the cover plate body.
According to a second aspect of the present invention, there is also provided a cover plate assembly for an optical observation device, comprising:
a growth chamber provided with an open end;
the heater is arranged in the growth chamber and used for heating the sample to be detected;
the cover plate component for the optical observation device is covered at the opening end of the growth chamber;
and the microscope is arranged corresponding to the first observation window of the cover plate assembly.
One embodiment of the present invention has the following advantages or benefits:
according to the cover plate assembly provided by the embodiment of the invention, the liquid cooling system is arranged around the first observation window and the second observation window in a surrounding mode, and can take away heat around the first observation window and the second observation window so as to cool the first observation window and the second observation window. The air cooling system is arranged in the cover plate body and between the first observation window and the second observation window, and can cool the side surfaces of the first observation window and the second observation window, which are close to each other. The inside at the apron body has liquid cooling system and air-cooled system simultaneously, adopts liquid cooling and forced air cooling to combine together the mode, and the cooling effect is good, prolongs the life of microscope, and the size of heater need not to restrict to guarantee the detection effect of optical observation device.
According to the optical observation device provided by the embodiment of the invention, the cover plate assembly is covered at the opening end of the growth chamber, and a containing chamber for containing the heater and the sample to be detected is formed between the cover plate assembly and the growth chamber. The microscope corresponds to the first observation window of the cover plate assembly, and the microscope can observe the condition of the sample to be detected through the first observation window. Meanwhile, the cooling system designed by combining liquid cooling and air cooling double-layer structures can reduce the size limit of the heater and the temperature of the heater so as to ensure that the microscope continuously works in an absolute safe temperature range.
Drawings
For a better understanding of the invention, reference may be made to the embodiments illustrated in the following drawings. The components in the drawings are not necessarily to scale and related elements may be omitted in order to emphasize and clearly illustrate the technical features of the present invention. In addition, the relevant elements or components may have different arrangements as known in the art. Furthermore, in the drawings, like reference numerals designate identical or similar parts throughout the several views. The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.
Wherein:
FIG. 1 is a schematic view showing the structure of an optical observation device according to an embodiment of the present invention;
FIG. 2 shows a cross-sectional view of a cover plate assembly for an optical viewing device in accordance with one embodiment of the present invention;
FIG. 3 shows a second cross-sectional view of a cover plate assembly for an optical viewing device in accordance with one embodiment of the present invention;
FIG. 4 is an enlarged schematic view of a portion of the air cooling system of FIG. 3 corresponding to the first and second viewing windows;
FIG. 5 is a schematic view showing the structure of a cover plate assembly for an optical observation device according to an embodiment of the present invention;
FIG. 6 is a schematic diagram showing a structure of a cover plate assembly invisible liquid cooling cover for an optical observation device according to an embodiment of the invention;
FIG. 7 is a schematic diagram showing a cover plate assembly for an optical observation device according to an embodiment of the present invention with a hidden liquid cooling cover and a hidden liquid cooling plate;
fig. 8 is a schematic structural view of a cover plate assembly for an optical observation device according to an embodiment of the present invention with a first observation window hidden.
Wherein reference numerals are as follows:
100. a cover plate assembly; 200. a growth chamber; 300. a heater; 400. a microscope;
1. a cover plate body; 2. a first viewing window; 3. a second viewing window; 4. a liquid cooling system; 5. an air cooling system;
11. a base; 111. a separation rib; 112. an inner ring rib; 113. an outer ring rib;
12. a liquid cooling cover; 13. a liquid cooling plate; 14. a spoiler; 15. a liquid baffle;
41. a first liquid cooling channel; 411. a first sub-channel; 412. a second sub-channel; 42. a liquid inlet; 43. a liquid outlet; 44. a drainage member; 45. a second liquid cooling channel; 46. a communication passage; 47. a communication groove;
51. a gas channel; 52. an air inlet; 53. and an air outlet.
Detailed Description
The technical solutions in the exemplary embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the exemplary embodiments of the present invention. The example embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the present invention, and it should be understood that various modifications and changes can be made to the example embodiments without departing from the scope of the invention.
In the description of the present invention, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance unless explicitly specified or limited otherwise; the term "plurality" refers to two or more than two; the term "and/or" includes any and all combinations of one or more of the associated listed items. In particular, references to "the/the" object or "an" object are likewise intended to mean one of a possible plurality of such objects.
Unless specified or indicated otherwise, the terms "connected," "fixed," and the like are to be construed broadly and are, for example, capable of being fixedly connected, detachably connected, or integrally connected, electrically connected, or signally connected; "coupled" may be directly coupled or indirectly coupled through intermediaries. The specific meaning of the above terms in the present invention can be understood by those skilled in the art according to the specific circumstances.
Further, in the description of the present invention, it should be understood that the terms "upper", "lower", "inner", "outer", and the like in the exemplary embodiments of the present invention are described in terms of the drawings, and should not be construed as limiting the exemplary embodiments of the present invention. It will also be understood that in the context of an element or feature being connected to another element(s) "upper," "lower," or "inner," "outer," it can be directly connected to the other element(s) "upper," "lower," or "inner," "outer," or indirectly connected to the other element(s) "upper," "lower," or "inner," "outer" via intervening elements.
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted.
Fig. 1 is a schematic structural view of an optical observation device according to an embodiment of the present invention.
The present embodiment provides an optical observation device, as shown in fig. 1, which includes a growth chamber 200, a heater 300, a microscope 400, and a cover plate assembly 100 for the optical observation device, the growth chamber 200 being provided with an open end, the cover plate assembly 100 being disposed to cover the open end of the growth chamber 200. The heater 300 may also be called a high temperature growth furnace, and the heater 300 is disposed in the growth chamber 200, and is used for heating the sample to be detected, providing a high temperature environment for the sample to be detected, and maintaining the temperature stable. The microscope 400 is disposed corresponding to the first observation window 2 of the cover plate assembly 100, and extends into the first observation window 2 and is located right above the sample to be detected.
In the optical observation device provided in this embodiment, the cover plate assembly 100 is covered at the open end of the growth chamber 200, and a containing chamber for containing the heater 300 and the sample to be detected is formed between the cover plate assembly 100 and the growth chamber 200. The microscope 400 is disposed corresponding to the first observation window 2 of the cover plate assembly 100, the microscope 400 can observe the condition of the sample to be detected through the first observation window 2, and the microscope 400 can be used to focus incident light onto the sample to be detected in the growth chamber 200 and collect reflected light of the sample to be detected.
In one embodiment, the optical observation device further comprises a light source, optionally an ultra-narrow single wavelength incoherent light source having a laser linewidth of 1nm and a center wavelength of 488nm, to provide the incident light.
In one embodiment, the optical observation device further comprises an observation device for processing and analyzing the sample reflection collected by the microscope 400.
Since the objective lens of the microscope 400 is a precise element, if the heat generated from the heater 300 is transferred to the cover assembly 100 assembly, the microscope 400 is greatly damaged.
To solve this problem, as shown in fig. 1, the cover assembly 100 for an optical observation device includes a cover body 1, a first observation window 2 and a second observation window 3, wherein the first observation window 2 is disposed in the cover body 1, the second observation window 3 is disposed in the cover body 1, the first observation window 2 and the second observation window 3 are disposed at parallel intervals, and a liquid cooling system 4 is disposed around the first observation window 2 and the second observation window 3 in a surrounding manner for liquid cooling the first observation window 2 and the second observation window 3. The air cooling system 5 is arranged in the cover plate body 1 and between the first observation window 2 and the second observation window 3, and is used for performing air cooling on the first observation window 2 and the second observation window 3.
The cover plate assembly 100 provided in this embodiment is provided, the liquid cooling system 4 is disposed around the first observation window 2 and the second observation window 3, and the liquid cooling system 4 can take away the heat around the first observation window 2 and the second observation window 3 to cool the first observation window 2 and the second observation window 3. The air cooling system 5 is arranged in the cover plate body 1 and between the first observation window 2 and the second observation window 3, and the air cooling system 5 can cool the side surfaces of the first observation window 2 and the second observation window 3, which are close to each other. The liquid cooling system 4 and the air cooling system 5 are arranged in the cover plate body 1, a liquid cooling and air cooling combined mode is adopted, the cooling effect is good, the service life of the microscope 400 is prolonged, the size of the heater 300 is not limited, and therefore the detection effect of the optical observation device is guaranteed.
FIG. 2 shows a cross-sectional view of a cover plate assembly for an optical viewing device in accordance with one embodiment of the present invention; FIG. 3 shows a second cross-sectional view of a cover plate assembly for an optical viewing device in accordance with one embodiment of the present invention; fig. 4 shows an enlarged partial schematic view of the air cooling system of fig. 3 corresponding to the first and second viewing windows.
In one embodiment, as shown in fig. 2-4, the first viewing window 2 is made of a transparent material, such as quartz glass, to facilitate viewing by the objective lens of the microscope 400. The second observation window 3 is specifically a through hole arranged on one side of the cover plate body 1 close to the growth chamber 200, and the objective lens of the microscope 400 can pass through the first observation window 2 and the second observation window 3 to observe the sample with detection on the heater 300.
In one embodiment, as shown in fig. 2-4, the orthographic projection of the second viewing window 3 on the reference plane is located inside the orthographic projection of the air cooling system 5 on the reference plane; and/or, the orthographic projection of the air cooling system 5 on the reference plane is positioned in the orthographic projection of the first observation window 2 on the reference plane; wherein the reference surface is the top surface of the cover plate body 1 along the axial direction thereof.
In other words, the first observation window 2, the air cooling system 5 and the second observation window 3 are coaxially arranged and are just right opposite to each other, the orthographic projections of the first observation window 2, the air cooling system 5 and the second observation window 3 on the reference surface are sequentially reduced, the first observation window 2 can be also called a large observation window, the second observation window 3 can be also called a small observation window, the orthographic projection area of the air cooling system 5 on the reference surface is located between the orthographic projection area of the first observation window 2 on the reference surface and the orthographic projection area of the second observation window 3 on the reference surface, and the air cooling system 5 plays a gradual transition role and simultaneously can also ensure the reliability of cooling the first observation window 2 and the second observation window 3.
In one embodiment, as shown in fig. 2-4, the liquid cooling system 4 includes a first liquid cooling channel 41, where the first liquid cooling channel 41 is disposed around the first observation window 2, and the first liquid cooling channel 41 is used for circulating a cooling medium. Since the cooling medium can circulate in the first liquid cooling passage 41, heat of the first observation window 2 in the circumferential direction thereof can be taken away by the cooling medium, so as to achieve the purpose of heat dissipation. Wherein the cooling medium includes, but is not limited to, deionized water and the like.
As shown in fig. 5, a liquid inlet 42 and a liquid outlet 43 are provided on the cover plate body 1, the liquid inlet 42 is used for introducing cooling medium, and the liquid outlet 43 is used for discharging the cooling medium. The first liquid cooling channel 41 is respectively communicated with the liquid inlet 42 and the liquid outlet 43, the cooling medium enters the first liquid cooling channel 41 through the liquid inlet 42, and as the cooling medium flows in the first liquid cooling channel 41, the cooling medium absorbs heat around the first observation window 2 and finally is discharged from the liquid outlet 43.
FIG. 5 is a schematic view showing the structure of a cover plate assembly for an optical observation device according to an embodiment of the present invention; fig. 6 is a schematic diagram of a cover plate assembly hidden liquid cooling cover for an optical observation device according to an embodiment of the invention.
Specifically, as shown in fig. 4-6, the cover plate body 1 has a shape similar to a cylindrical structure, the cover plate body 1 specifically includes a base 11 and a liquid cooling cover 12, the liquid cooling cover 12 has an annular plate structure, the base 11 is provided with an outer annular rib 113 and an inner annular rib 112 protruding toward the direction of the liquid cooling plate 13, the outer annular rib 113 and the inner annular rib 112 are coaxially arranged and sleeved outside the first observation window 2, the inner annular rib 112 is arranged between the outer annular rib 113 and the first observation window 2, a first annular groove recessed toward a direction far away from the liquid cooling cover 12 is formed between the outer annular rib 113 and the inner annular rib 112, and the liquid cooling cover 12 covers a notch of the first annular groove, at this time, a first liquid cooling channel 41 is formed between the first annular groove and the liquid cooling cover 12.
In one embodiment, the first liquid cooling channel 41 includes a first sub-channel 411 and a second sub-channel 412, the first sub-channel 411 is sleeved outside the first observation window 2, the second sub-channel 412 is sleeved outside the first observation window 2 and is disposed between the first sub-channel 411 and the first observation window 2, and the first sub-channel 411 and the second sub-channel 412 are mutually communicated.
In this way, the first liquid cooling channel 41 has two sub-channels, namely the first sub-channel 411 and the second sub-channel 412, which are coaxially arranged and are annularly arranged around the first observation window 2, so that the liquid cooling area in the cover plate body 1 is increased, and the heat exchange range of the cooling medium is increased. Meanwhile, the first sub-channel 411 and the second sub-channel 412 are mutually communicated, the cooling medium can firstly enter the second sub-channel 412 through the first sub-channel 411, the flow paths of the cooling medium are relatively bent, the flow paths of the cooling medium are increased, and the cooling effect of the first observation window 2 is improved.
It is to be understood that at least one of the first sub-channel 411 and the second sub-channel 412 is in communication with the liquid inlet 42, and at least one of the first sub-channel 411 and the second sub-channel 412 is in communication with the liquid outlet 43, for example, the liquid inlet 42 and the liquid outlet 43 are both in communication with the first sub-channel 411 or the second sub-channel 412, and the specific communication and arrangement positions are not limited in this embodiment.
Specifically, a partition rib 111 is disposed in the first annular groove, the partition rib 111 is in an annular structure, the partition rib 111 is disposed between the outer annular rib 113 and the inner annular rib 112, the partition rib 111 divides the first groove into two parts, then a space between the outer annular rib 113, the partition rib 111 and the liquid cooling cover 12 is a first sub-channel 411, and a space between the partition rib 111, the inner annular rib 112 and the liquid cooling cover 12 is a second sub-channel 412.
Wherein, the outer edge and the inner edge of the liquid cooling cover 12 are respectively overlapped on the step of the outer ring rib 113 and the step of the inner ring rib 112, the liquid cooling cover 12 is arranged on the separation rib 111, and the separation rib 111 plays a role in supporting the liquid cooling cover 12. Meanwhile, the fixing piece can penetrate through the liquid cooling cover 12 and the separation rib 111, so that the fixing and the installation between the liquid cooling cover 12 and the base 11 are realized.
In one embodiment, as shown in fig. 4 to fig. 6, the first sub-channel 411 and the second sub-channel 412 may be provided with a spoiler 14, where the spoiler 14 may be specifically disposed between the outer ring rib 113 and the partition rib 111, and between the partition rib 111 and the inner ring rib 112, and the spoiler 14 plays a role in disturbing the cooling medium, so that the flow speed of the cooling medium is prevented from being too fast, and the cooling medium can perform sufficient heat exchange with the first observation window 2.
In one embodiment, as shown in fig. 4 to 6, a communication slot 47 is provided between the first sub-channel 411 and the second sub-channel 412, and the communication slot 47 communicates with the first sub-channel 411 and the second sub-channel 412. The communication grooves 47 are formed through the partition ribs 111 in the radial direction of the partition ribs 111, and the cooling medium in the first sub-channel 411 enters the second sub-channel 412 through the communication grooves 47, or the cooling medium in the second sub-channel 412 enters the first sub-channel 411 through the communication grooves 47, so that circulation and circulation of the cooling medium are realized.
In one embodiment, as shown in fig. 4-6, the liquid cooling system 4 further includes a flow guiding member 44, where the flow guiding member 44 penetrates through the communication slot 47, and is used for guiding the cooling medium in the first sub-channel 411 to the second sub-channel 412.
The drainage piece 44 is disposed in the communication groove 47 and extends along the radial direction of the partition piece, two ends of the drainage piece 44 along the radial direction of the partition rib 111 are respectively abutted against the inner wall of the outer ring rib 113 and the outer wall of the inner ring rib 112, the cooling medium in the first sub-channel 411 can flow into the second sub-channel 412 along the side wall of the drainage piece 44, or the cooling medium in the second sub-channel 412 can flow into the first sub-channel 411 along the side wall of the drainage piece 44, and meanwhile, the drainage piece 44 also plays a role of disturbing the cooling medium to a certain extent, so that the circulation and circulation effect of the cooling medium are improved, and the cooling effect of the first observation window 2 is improved.
It should be noted that, the included angle between the spoiler 14 and the drainage member 44 may be 180 °, that is, the spoiler 14 and the drainage member 44 are collinear, and of course, the spoiler 14 and the drainage member 44 may be disposed at other angles.
Fig. 7 is a schematic diagram showing a structure of a cover plate assembly obscuration liquid cooling cover and a liquid cooling plate for an optical observation device according to an embodiment of the invention.
In one embodiment, as shown in fig. 4 and 7, the liquid cooling system 4 further includes a second liquid cooling channel 45, where the second liquid cooling channel 45 is disposed around the second observation window 3 and is in communication with the first liquid cooling channel 41, the second liquid cooling channel 45 is used for circulating a cooling medium, and the air cooling system 5 is disposed between the first observation window 2 and the second liquid cooling channel 45. Since the cooling medium can circulate in the second liquid cooling passage 45, heat of the second observation window 3 in the circumferential direction thereof can be taken away by the cooling medium, so as to achieve the purpose of heat dissipation.
In one embodiment, as shown in fig. 4 and 7, the liquid cooling system 4 further includes a communication channel 46, where the communication channel 46 is disposed in the cover body 1, and the communication channel 46 is disposed between and respectively communicates with the first liquid cooling channel 41 and the second liquid cooling channel 45. In this way, the cooling medium in the first liquid cooling passage 41 enters the second liquid cooling passage 45 through the communication passage 46, the flow path of the cooling medium is increased, and the reliability of heat dissipation around the second observation window 3 is ensured.
Specifically, an axial hole is provided at a position of the base 11 corresponding to the second sub-channel 412, the axial hole may be a circular hole structure, and the inner ring rib 112 is provided with a radial hole along a radial direction thereof, and the radial hole may be a oblong hole structure. The axial holes and the radial holes are communicated, so that the cooling medium in the second sub-channel 412 enters the second liquid cooling channel 45 through the axial holes and the radial holes.
Because the contained angle between axial hole and the radial hole is 90 degrees, in order to be convenient for the processing manufacturing of axial hole and radial hole, when processing, can set up radial groove in the bottom of base 11 to locate radial inslot with fender liquid board 15 lid, form radial hole, reduce the processing degree of difficulty and manufacturing cost.
Fig. 8 is a schematic structural view of a cover plate assembly for an optical observation device according to an embodiment of the present invention with a first observation window hidden.
In one embodiment, as shown in fig. 4 and 8, the air cooling system 5 includes a gas passage 51, the gas passage 51 being disposed in the cover plate body 1 and between the first and second observation windows 2 and 3, and the gas passage 51 being for circulating a gas therein. Since the gas can circulate in the gas passage 51, the heat of the side surfaces of the first and second portholes 2, 3 on the sides close to each other in the axial direction thereof can be taken away by the gas for heat dissipation. Wherein the gas includes, but is not limited to, air, nitrogen, argon, and the like.
Wherein, be provided with air inlet 52 and gas outlet 53 on apron body 1, air inlet 52 is used for letting in gas, and gas outlet 53 is used for gaseous emission. The gas passage 51 communicates with the gas inlet 52 and the gas outlet 53, respectively, and gas enters the gas passage 51 through the gas inlet 52, absorbs heat from the first and second portholes 2 and 3 as the gas flows in the gas passage 51, and is finally discharged from the gas outlet 53. The gas outlet 53 may be connected to a vacuum pump by means of which gas may be pumped out of the gas channel 51, thereby taking away heat from the first viewing window 2 and the second viewing window 3.
In one embodiment, a liquid cooling plate 13 is disposed in the cover plate body 1, the liquid cooling plate 13 is disposed between the first observation window 2 and the second observation window 3, and a cavity between the first observation window 2 and the liquid cooling plate 13 forms a gas channel 51. The cavity area between the first observation window 2 and the liquid cooling plate 13 is used as the gas channel 51, so that the design is reasonable, and the production cost is relatively low. Meanwhile, the gas passage 51 represents a gas chamber, the second liquid passage represents a liquid chamber, and the liquid cooling plate 13 plays a role of gas-liquid chamber space separation.
When the effective heating area of the heater 300 of the optical observation device may be greater than 1cm×1cm, for example, when the circular heater 300 having a diameter of 2.5cm heats the sample to be detected, the heater 300 is heated to 1000 ℃ and kept at this temperature for a long period of time of greater than 1h, and the temperature of the first observation window 2 is in the range of about 40 ° to 120 ° in the conventional case; if only a liquid cooling mode is adopted, the temperature range of the first observation window 2 is about 40-70 degrees; in the cover plate assembly 100 provided in this embodiment, a combination of liquid cooling and air cooling is adopted, the temperature range of the first observation window 2 can be basically kept at about 50 °, and the temperature of the first observation window 2 is relatively low and constant. Facilitating the accuracy of the detection by microscope 400. Meanwhile, the objective lens of the microscope 400 does not need to be specially customized, an infrared filter is not needed, and the microscope can continuously and safely work for more than 1h within the working range of the working distance of the objective lens.
It should be noted herein that the cover plate assembly for an optical observation device shown in the drawings and described in the present specification is merely one example employing the principles of the present invention. It will be clearly understood by those of ordinary skill in the art that the principles of the present invention are not limited to any details or any components of the devices shown in the drawings or described in the specification.
It should be understood that the invention is not limited in its application to the details of construction and the arrangement of components set forth in the specification. The invention is capable of other embodiments and of being practiced and carried out in various ways. The foregoing variations and modifications are intended to fall within the scope of the present invention. It should be understood that the invention disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute various alternative aspects of the present invention. The embodiments described in this specification illustrate the best mode known for carrying out the invention and will enable those skilled in the art to make and use the invention.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. The specification and example embodiments are to be considered exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It is to be understood that the invention is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the invention is limited only by the appended claims.
Claims (10)
1. A cover plate assembly for an optical viewing device, comprising:
a cover plate body;
the first observation window is arranged in the cover plate body;
the second observation window is arranged in the cover plate body, and the first observation window and the second observation window are arranged at intervals in parallel;
the liquid cooling system is arranged around the first observation window and the second observation window in a surrounding mode and is used for carrying out liquid cooling on the first observation window and the second observation window;
the air cooling system is arranged in the cover plate body and between the first observation window and the second observation window, and is used for carrying out air cooling on the first observation window and the second observation window.
2. The cover plate assembly for an optical viewing device of claim 1, wherein the liquid cooling system comprises:
the first liquid cooling channel is arranged around the first observation window in a surrounding mode and is used for circulating cooling media.
3. The cover plate assembly for an optical viewing device according to claim 2, wherein the first liquid cooling channel comprises:
the first sub-channel is sleeved outside the first observation window;
the second sub-channel is sleeved outside the first observation window and arranged between the first sub-channel and the first observation window, and the first sub-channel and the second sub-channel are mutually communicated.
4. A cover plate assembly for an optical viewing device according to claim 3, wherein the liquid cooling system comprises:
the cooling medium flow guide device comprises a flow guide piece, wherein a communication groove is formed between the first sub-channel and the second sub-channel, and the flow guide piece penetrates through the communication groove and is used for guiding cooling medium in the first sub-channel to the second sub-channel.
5. The cover plate assembly for an optical viewing device of claim 2, wherein the liquid cooling system further comprises:
the second liquid cooling channel is arranged around the second observation window in a surrounding mode and communicated with the first liquid cooling channel, the second liquid cooling channel is used for circulating cooling medium, and the air cooling system is arranged between the first observation window and the second liquid cooling channel.
6. The cover plate assembly for an optical inspection device of claim 5, wherein the liquid cooling system further comprises:
the communication channel is arranged in the cover plate body, and the communication channel is arranged between the first liquid cooling channel and the second liquid cooling channel and is respectively communicated with the first liquid cooling channel and the second liquid cooling channel.
7. The cover plate assembly for an optical inspection device of claim 1, wherein the air cooling system comprises:
a gas passage provided in the cover plate body and between the first observation window and the second observation window, the gas passage being for circulating gas therein;
the air inlet is arranged on the cover plate body and communicated with the air channel and is used for introducing air;
the air outlet is arranged on the cover plate body and communicated with the air channel and used for discharging air.
8. The cover plate assembly for an optical inspection device according to claim 7, wherein a liquid cooling plate is disposed in the cover plate body, the liquid cooling plate being disposed between the first and second inspection windows, and a cavity between the first inspection window and the liquid cooling plate forming the gas passage.
9. The cover plate assembly for an optical inspection device of any one of claims 1-8, wherein the orthographic projection of the second viewing window on the reference plane is located inside the orthographic projection of the air cooling system on the reference plane; and/or the number of the groups of groups,
the orthographic projection of the air cooling system on the reference plane is positioned in the orthographic projection of the first observation window on the reference plane;
the reference surface is the top surface of the cover plate body along the axial direction of the cover plate body.
10. An optical observation device, comprising:
a growth chamber provided with an open end;
the heater is arranged in the growth chamber and used for heating the sample to be detected;
a cover plate assembly for an optical inspection device according to any one of claims 1-9, covering said open end of said growth chamber;
and the microscope is arranged corresponding to the first observation window of the cover plate assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311374117.1A CN117348231A (en) | 2023-10-23 | 2023-10-23 | Cover plate assembly for optical observation device and optical observation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311374117.1A CN117348231A (en) | 2023-10-23 | 2023-10-23 | Cover plate assembly for optical observation device and optical observation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117348231A true CN117348231A (en) | 2024-01-05 |
Family
ID=89370711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311374117.1A Pending CN117348231A (en) | 2023-10-23 | 2023-10-23 | Cover plate assembly for optical observation device and optical observation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117348231A (en) |
-
2023
- 2023-10-23 CN CN202311374117.1A patent/CN117348231A/en active Pending
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