CN212311149U

CN212311149U - Laser output head, laser and laser processing equipment

Info

Publication number: CN212311149U
Application number: CN202020234553.4U
Authority: CN
Inventors: 蒋峰; 雷剑; 蒋远志; 张显清; 许玉麟
Original assignee: Maxphotonics Co Ltd; Suzhou Maxphotonics Co Ltd
Current assignee: Maxphotonics Co Ltd; Suzhou Maxphotonics Co Ltd
Priority date: 2020-02-28
Filing date: 2020-02-28
Publication date: 2021-01-08
Anticipated expiration: 2030-02-28

Abstract

The utility model relates to a laser device technical field discloses a laser instrument output head, laser instrument and laser beam machining equipment. The method comprises the following steps: an outer housing provided with an accommodating space; the inner shell is accommodated in the accommodating space, a cooling cavity is enclosed between the inner shell and the outer shell together, and the inner shell is provided with a through installation space; the end cap is accommodated in the accommodating space, and at least part of the end cap extends into the installation space; the optical fiber is at least partially accommodated in the installation space, a first end part of the optical fiber is fixed with the end cap, and a second end part of the optical fiber penetrates through the installation space and extends out of the outer shell; and the flange plate is formed by extending one end of the outer shell far away from the second end part outwards, and the laser output head can be directly and fixedly arranged on a laser processing head matched with the flange plate through the flange plate. The utility model discloses left out traditional female head of connecting, so corresponding laser processing equipment's manufacturing cost reduces by a wide margin \ the structure also more compact.

Description

Laser output head, laser and laser processing equipment

[ technical field ] A method for producing a semiconductor device

The embodiment of the utility model provides a relate to laser device technical field, especially relate to a laser instrument output head, laser instrument and laser beam machining equipment.

[ background of the invention ]

With the development of science and technology, the laser processing technology is gradually mature, and compared with the traditional processing technology, the laser processing technology adopting the laser processing equipment has the advantages of simple operation and high efficiency.

At present, laser processing equipment on the market generally comprises a laser processing head, a laser device and a connecting female head respectively connected with the laser processing head and the laser device. One end of the connecting female head is connected with the laser processing head, and the other end of the connecting female head is provided with a conical first mounting surface; the laser comprises a laser output head, a second mounting surface matched with the first mounting surface is arranged at one end, close to the connecting female head, of the laser output head, and the laser is positioned and mounted through the first mounting surface and the second mounting surface.

The utility model discloses an inventor is realizing the utility model discloses an in-process discovery: on one hand, the machining difficulty of the conical surface is higher, and the machining cost of the connecting female head is also higher; on the other hand, since the laser emitted from the laser sequentially passes through the connecting female head and the laser processing head, the connecting female head accumulates high heat, and a manufacturer generally processes a corresponding cooling flow channel in the connecting female head, which further increases the manufacturing cost of the connecting female head; both of these cases will lead to an increase in the use cost of the laser processing apparatus.

[ Utility model ] content

The embodiment of the utility model provides a aim at providing a laser instrument output head, laser instrument and laser beam machining equipment to solve present laser beam machining equipment technical problem that use cost is high.

The embodiment of the utility model provides a solve its technical problem and adopt following technical scheme:

the utility model provides a laser output head, the one end of laser output head is equipped with the ring flange, the laser output head accessible the ring flange direct fixed mounting in rather than supporting laser processing head.

As a further improvement of the above technical solution, the flange plate is provided with a connecting hole, and the connecting hole is used for being matched with a connecting column matched with the laser processing head.

As a further improvement of the technical scheme, the device further comprises a sensor, wherein the sensor is arranged at the connecting hole and is used for detecting the matching in place condition of the connecting hole and the connecting column.

As a further improvement of the above technical solution, the laser output head includes:

an outer housing provided with an accommodating space;

the inner shell is accommodated in the accommodating space, the inner shell and the outer shell are connected in a sealing mode and form a cooling cavity together in an enclosing mode, and the inner shell is provided with a through installation space;

the end cap is accommodated in the accommodating space and fixed with the inner shell, at least part of the end cap extends into the mounting space, and two ends of the end cap are positioned between two ends of the cooling cavity along the axial direction of the outer shell;

the optical fiber is at least partially accommodated in the installation space, a first end part of the optical fiber is fixed with the end cap, and a second end part of the optical fiber penetrates through the installation space and extends out of the outer shell; and

the flange plate extends outwards from one end, far away from the second end, of the outer shell;

the shell body is also provided with a first communicating port and a second communicating port which are respectively communicated with the cooling cavity.

As a further improvement of the above technical solution, an outer diameter of the outer shell is gradually increased or kept constant from the second end to the first end; and/or

The outer diameter of the inner housing is gradually increased or kept constant in a direction from the second end to the first end.

As a further improvement of the above technical solution, the inner shell and the outer shell are integrally formed;

or the inner shell and the outer shell are respectively of two independent structures, and two ends of the inner shell are respectively detachably connected with the inner wall of the outer shell in a sealing mode.

a laser comprises the laser output head.

the utility model provides a laser processing equipment, includes laser beam machining head and laser instrument, the laser instrument is close to the one end of laser beam machining head is equipped with the ring flange, the laser instrument passes through the direct fixed mounting of ring flange in the laser beam machining head.

As a further improvement of the above technical solution, one of the laser processing head and the flange plate is provided with a connecting hole, the other of the laser processing head and the flange plate is provided with a connecting column matched with the connecting hole, and the connecting column is inserted into the connecting hole.

As a further improvement of the above technical solution, the laser further comprises a sensor, wherein the laser comprises a laser generating assembly and a controller;

the sensor is arranged at the connecting hole and used for detecting the matching in place condition of the connecting column and the connecting hole;

the laser generation assembly and the sensor are connected with the controller, and the controller controls whether the laser generation assembly emits light or not according to the matching condition of the connecting column and the connecting hole.

As a further improvement of the above technical solution, the laser includes a laser output head, and the laser output head includes:

an outer housing provided with an accommodating space;

the end cap is accommodated in the accommodating space and fixed with the inner shell, at least part of the end cap extends into the mounting space, and the end cap is positioned between two ends of the cooling cavity along the axial direction of the outer shell;

The utility model has the advantages that:

the embodiment of the utility model provides an one end of laser instrument output head is equipped with the ring flange, and this laser instrument output head can pass through the direct fixed mounting of above-mentioned ring flange in rather than supporting laser beam machining head.

Compare with laser instrument or laser beam machining equipment on the existing market, the embodiment of the utility model provides a but laser instrument output head snap-on in laser beam machining head, then the laser beam machining equipment including this laser output head will only include laser beam machining head and laser instrument, has left out traditional female head of connecting, so corresponding laser beam machining equipment's manufacturing cost reduces by a wide margin. In addition, include the embodiment of the utility model provides a laser output head's laser processing equipment's structure is also more compact.

[ description of the drawings ]

One or more embodiments are illustrated in drawings corresponding to, and not limiting to, the embodiments, in which elements having the same reference number designation may be represented as similar elements, unless specifically noted, the drawings in the figures are not to scale.

Fig. 1 is a schematic perspective view of a laser output head according to an embodiment of the present invention;

FIG. 2 is a schematic view of the laser output head of FIG. 1 cut away in one direction;

fig. 3 is a schematic cross-sectional view of a laser output head according to another embodiment of the present invention;

fig. 4 is a schematic perspective view of a laser processing apparatus according to an embodiment of the present invention.

[ detailed description ] embodiments

In order to facilitate understanding of the present invention, the present invention will be described in more detail with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is referred to as being "fixed to"/"mounted to" another element, it can be directly on the other element or one or more intervening elements may be present therebetween. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may be present. The terms "vertical," "horizontal," "left," "right," "inner," "outer," and the like as used herein are for descriptive purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.

In this specification, the term "mounting" includes fixing or limiting a certain element or device to a specific position or place by welding, screwing, clipping, bonding, etc., the element or device may be fixed or movable in a limited range in the specific position or place, and the element or device may be disassembled or not after being fixed or limited to the specific position or place, which is not limited in the embodiment of the present invention.

Referring to fig. 1 and fig. 2, a schematic perspective view of a laser output head according to an embodiment of the present invention and a schematic sectional view of the laser output head in one direction are respectively shown, where the laser output head includes an outer shell 100, an inner shell 200, an end cap 300 and an optical fiber 400. Wherein, the outer casing 100 is provided with an accommodating space. The inner shell 200 is integrally accommodated in the accommodating space and is hermetically connected with the outer shell 100 to form a cooling cavity 110, and the outer shell 100 is provided with a first communication port 120 and a second communication port 130 which are respectively communicated with the cooling cavity 110; the inner case 200 is provided therein with a through installation space 210. The end cap 300 is accommodated in the accommodating space of the outer casing 100 and fixed to the inner casing 200, and the end cap 300 at least partially extends into the mounting space 210, and both ends of the end cap 300 are located between both ends of the cooling cavity 110 along the axial direction of the outer casing 100. The optical fiber 400 is at least partially received in the installation space 210, has a first end fixed to the end cap 300, and has a second end extending through the installation space 210 in the axial direction of the inner housing 200 and protruding out of the inner housing 200.

Referring to fig. 2, the outer housing 100 has a tubular structure with a through-hole therein, and an accommodating space is provided therein for accommodating the inner housing 200, the end cap 300, the optical fiber 400, and the like. The outer wall of the outer case 100 is provided with a first communication port 120 and a second communication port 130, respectively, both ends of the first communication port 120 are communicated with the accommodating space and the outside, respectively, and both ends of the second communication port 130 are communicated with the accommodating space and the outside, respectively. In this embodiment, the inner wall of the outer casing 100 is cylindrical; it is understood that in other embodiments of the present invention, the inner wall of the outer casing 100 may be designed into other shapes as required to adjust the volume of the cooling cavity, so as to improve the cooling effect, such as a step shape or a trumpet shape.

With reference to the inner housing 200, please refer to fig. 2, the inner housing 200 is also a cylindrical structure, and is accommodated in the accommodating space and is coaxial with the outer housing 100. Both ends of the inner housing 200 are detachably connected with the inner wall of the outer housing 100 in a sealing manner by a sealing ring, and enclose the cooling cavity 110. The first communication port 120 and the second communication port 130 are specifically communicated with the cooling cavity 110, and one of the first communication port 120 and the second communication port 130 is used for introducing cooling liquid so that the cooling liquid enters the cooling cavity 110; the other of the first communication port 120 and the second communication port 130 is used for allowing the cooling liquid to flow out of the cooling cavity 110, so that the cooling liquid flows in the cooling cavity 110 to take away heat accumulated in the inner shell 200 and the end cap 300. Alternatively, the inner housing 200 is made of a heat conductive material, thereby improving heat dissipation efficiency of the inner housing 200 itself. Further optionally, the inner surface of the inner housing 200 is plated with a gold film to improve the reflectivity of the inner housing 200 to light, so that the return light entering the inner housing 200 is reflected multiple times inside the inner housing 200, thereby avoiding the disadvantage that the return light is locally concentrated in the inner housing 200 to cause an excessively high local temperature; it can be understood that, in other embodiments of the present invention, the metal film made of other materials may be substituted for the gold film, as long as the metal film can effectively improve the reflectivity to light.

Referring to fig. 2, the end cap 300 is accommodated in the accommodating space and disposed at one end of the inner housing 200, and the end cap 300 at least partially extends into the mounting space 210 and is attached to the inner wall of the inner housing 200. The end cap 300 is entirely accommodated in the accommodating space, so that the defect that the end cap 300 is accidentally damaged when the laser output head is disassembled and assembled can be avoided. Both ends of the end cap 300 are located between both ends of the cooling cavity 110 in the axial direction of the outer case 100. The end cap 300 and the inner wall of the inner housing 200 together form a backlight heat dissipation area; the end cap 300, the end of the inner housing 200 near the end of the end cap 300 and the inner wall of the outer housing 100 together define a light-passing and heat-dissipating area 310. On the one hand, the laser light output from the optical fiber 400 passes through the light-passing and heat-dissipating region 310; on the other hand, when the laser is emitted to the material with high reflectivity at a specific angle, part of the laser will pass through the light-passing and heat-dissipating region 310 along the original optical path and enter the light-returning and heat-dissipating region, so the heat accumulation of the light-returning and heat-dissipating region and the light-passing and heat-dissipating region 310 is high.

The optical fiber 400 is integrally formed in a bar shape, and at least a portion of the optical fiber 400 is received in the installation space 210 of the inner housing 200, a first end of the optical fiber 400 is fixed to the end cap 300, and a second end of the optical fiber 400 passes through the installation space 210 and extends out of the outer housing 100. Optionally, the optical fiber 400 and the end cap 300 are fixed by fusion. Alternatively, the outer diameter of the outer housing 100 is gradually increased or kept constant in a direction from the second end of the optical fiber 400 toward the first end thereof. Likewise, optionally, the outer diameter of the inner housing 200 is gradually increased or kept constant in a direction from the second end of the optical fiber 400 toward the first end thereof.

In this embodiment, the cooling cavity 110 includes two portions, namely a first cooling cavity 111 and a second cooling cavity 112. The first cooling chamber 111 is formed by the gap between the outer casing 100 and the inner casing 200, so that the coolant in the first cooling chamber 111 can cool the inner casing 200 and the heat dissipation area. The second cooling cavity 112 is arranged in the outer shell 100, and is annularly arranged on the periphery of at least part of the end cap 300, the second cooling cavity 112 and the first cooling cavity 111 are communicated to form the cooling cavity 110, and along the axial direction of the outer shell 100, two ends of the end cap 300 are both located between two ends of the cooling cavity 110; second cooling cavity 112 is capable of cooling end cap 300. The first communication port 120 and the second communication port 130 are disposed at one end of the outer shell 100 corresponding to the first cooling cavity 111, and are respectively communicated with the first cooling cavity 111. It is understood that, in other embodiments of the present invention, the first communicating port and the second communicating port may be disposed at other positions, for example: in some embodiments, the first communication port and the second communication port are disposed at an end of the outer casing 100 corresponding to the second cooling chamber 112, and are respectively communicated with the second cooling chamber 112.

In addition, the second cooling cavity 112 at least partially surrounds the periphery of the light-passing and heat-dissipating region 310, so that the light-passing and heat-dissipating region 310 can be cooled in time, and the heat dissipation effect of the laser output head can be further improved.

Further, to ensure that any coolant entering the cooling cavity 110 can pass through the second cooling cavity 112 to enhance the cooling effect on the end cap 300 and the light-passing and heat-dissipating region 310, the laser output head further includes a partition assembly (not shown). Specifically, a baffle assembly is provided in the cooling cavity 110, which includes a first baffle (not shown) and a second baffle (not shown). The first partition extends along a direction parallel to the axis of the outer casing 100, and extends from one end of the first cooling cavity 111 far away from the second cooling cavity 112 to the second cooling cavity 112; one end is connected to the outer wall of the inner housing 200 and the other end extends toward the inner wall of the outer housing 100 in a direction parallel to the radial direction of the outer housing 100 to be attached to each other. The second partition extends along a direction parallel to the axis of the outer casing 100, extends from one end of the first cooling chamber 111 far away from the second cooling chamber 112 to the second cooling chamber 112, and extends along a direction parallel to the radial direction of the outer casing 100, one end of the second partition is connected with the outer wall of the inner casing 200, and the other end extends towards the inner wall of the outer casing 100 to be attached to the inner wall of the outer casing 100. The first partition plate and the second partition plate cooperate together to divide the cooling cavity 110 into a first flow passage and a second flow passage, which are communicated with the second cooling cavity 112. The first communication port is communicated with the first flow channel, the second communication port is communicated with the second flow channel, and taking the first communication port as a liquid inlet and the second communication port as a liquid outlet as an example, the cooling liquid entering the cooling cavity 110 through the first communication port 120 passes through the first cooling cavity 111 in the first flow channel, the second cooling cavity 112 in the second flow channel and the first cooling cavity 111 in the second flow channel in sequence under the guiding action of the first partition plate and the second partition plate, and then flows out of the cooling cavity 110 through the second communication port 130. Therefore, the cooling liquid entering the cooling cavity 110 can cool the end cap 300 and the light-passing heat dissipation area 310, and the laser output head has good cooling effect on the end cap 300 and the heat dissipation area 310. The direction of the arrows in fig. 2 represents the direction of flow of the coolant.

It can be understood that, even though the partition plate assembly in the present embodiment includes the first partition plate and the second partition plate which are relatively independent, and the first partition plate and the second partition plate are both fixed to the outer wall of the inner casing 200; however, in other embodiments of the present invention, the baffle plate assembly may also be a unitary body; the partition plate assembly may also be fixedly connected to the inner wall of the outer case 100.

Further, to enhance the cooling efficiency of the cooling fluid to the inner housing 200 and the end cap 300, the laser output head further includes heat dissipation fins 220. Specifically, the heat radiating fins 220 are integrally formed in a plate-like structure, which is mounted to the outer wall of the inner case 200, and integrally extend in a direction parallel to the axis of the outer case 100. The arrangement of the heat radiating fins 220 increases the heat exchange area between the inner shell 200 and the cooling liquid, so that the heat radiating effect of the laser output head can be effectively improved. Optionally, the number of the heat dissipation fins 220 is even, the even number of the heat dissipation fins 220 is divided into two groups, and the two groups of the heat dissipation fins 220 are respectively disposed on two sides of the partition plate assembly.

Further, to facilitate the installation and fixation of the optical fiber 400, the laser output head further includes an optical fiber fixation block 500. The optical fiber fixing block 500 is disposed at an end of the inner housing 200 away from the end cap 300, and is fixedly connected to the outer housing 100 and/or the inner housing 200. The optical fiber fixing block 500 is provided with a through-hole penetrating in a direction parallel to the axis of the inner housing 200, through which the second end of the optical fiber 400 passes to protrude out of the optical fiber fixing block 500. The optical fiber fixing block 500 is used to seal one end of the inner housing 200 and the outer housing 100 away from the end cap 300, and is used to limit and fix the optical fiber 400 to prevent the optical fiber 400 from freely swinging, so that the optical fiber 400 is maintained in a linearly extending state.

Further, to facilitate mounting of the laser output head on an external laser processing head (not shown), the laser output head further comprises a flange 600. A flange 600 extends outwardly from an end of the outer housing 100 remote from the second end of the optical fiber 400. Be equipped with a plurality of connecting hole 610 that link up ring flange 600 on the ring flange 600, this laser instrument output head is connected with outside supporting laser processing head through connecting hole 610, promptly: the laser output head can be directly and fixedly arranged on a laser processing head matched with the laser output head through a flange plate 600.

Furthermore, in order to facilitate the laser with the laser output head to judge whether to emit laser or not according to the installation condition of the laser output head and an external laser processing head, the laser output head further comprises a sensor 620. Specifically, the laser comprises the laser output head, a laser generation assembly and a controller. The sensor 620 is disposed at the connecting hole, and is used for detecting whether an external laser processing head is installed in place; the sensor 620 and the laser generating assembly are connected to the controller. When the laser output head and the laser processing head are installed in place, the sensor 620 detects the installation in-place information and sends the installation in-place information to the controller, and the controller can control the laser generating assembly to emit light; when the laser output head and the laser processing head are not installed in place, the controller controls the laser generating assembly not to emit light. Optionally, sensor 620 is photosensor, and it can be understood that the utility model discloses do not do specifically to specific kind, the model of sensor 620 and restrict, sensor 620 can also be other sensors such as switch on sensor, piezoelectric sensor, as long as it can realize detecting the installation information between this laser output head and the laser beam machining head.

The embodiment of the utility model provides a laser output head includes shell body 100, interior casing 200, end cap 300, optic fibre 400 and optic fibre fixed block 500. Wherein, the inner shell 200 is accommodated in the accommodating space of the outer shell 100, and the inner shell 200 and the outer shell 100 are hermetically connected and enclose a cooling cavity 110 together; the inner case 200 is further provided with a through installation space 210. The end cap 300 is received in the receiving space of the outer housing 100 and fixed to the inner housing 200, and at least partially extends into the mounting space 210. Both ends of the end cap 300 are located between both ends of the cooling cavity 110 in the axial direction of the outer case 100. The optical fiber 400 is at least partially received in the installation space 210, and has a first end fixed to the end cap 300 and a second end penetrating through the installation space 210 and extending out of the outer housing 100. The outer case 100 is further provided with a first communication port 120 and a second communication port 130 respectively communicating with the cooling cavity 110.

Compare with the laser output head on the existing market, the embodiment of the utility model provides an inside cooling cavity 110 of laser output head has wholly covered the length region of end cap 300 in the axis direction along shell body 100, is promptly the embodiment of the utility model provides a laser output head is after letting in the coolant liquid, can not only play the cooling effect to interior casing 200, can also play good cooling effect to end cap 300. Meanwhile, at least part of the cooling cavity 110 is arranged around the periphery of the light-transmitting and heat-dissipating area 310, and then the laser output head can also dissipate heat of the light-transmitting and heat-dissipating area 310 after the cooling liquid is introduced, so that the overall heat dissipation effect of the laser output head is further improved. In addition, the laser output head structure of this application can guarantee sealed effect well, has avoided the possibility that the dust got into to reduce clean area effectively, so long-term after using, this laser output head only need clean end cap terminal surface and lead to the inner wall in light radiating area can.

Referring to fig. 3, which is a schematic cross-sectional view illustrating a laser output head 700 according to another embodiment of the present invention, the direction of the arrow in fig. 3 represents the flow direction of the cooling liquid. The laser output head 700 includes an outer housing 710, an inner housing 720, an end cap 730 and an optical fiber 740, please combine fig. 1 and fig. 2, the main differences between the laser output head 700 and the laser output head provided in the previous embodiment are:

the outer shell 100 and the inner shell 200 of the laser output head in the first embodiment are independent structures, and are hermetically connected through a sealing member;

the outer shell 710 and the inner shell 720 of the laser output head 700 in the second embodiment are integrally formed, which can reduce the fitting and installation process between the outer shell 710 and the inner shell 720, thereby improving the assembly efficiency.

Based on the same inventive concept, the embodiment of the present invention further provides a laser, which includes a laser generating assembly, a laser output head and a controller in any of the above embodiments. The laser generating assembly is connected with an optical fiber in the laser output head, and the sensor and the laser generating assembly in the laser output head are both connected with the controller. By having the laser output head shown in fig. 2 or fig. 3, the laser output head has a good cooling effect of both the inner housing and the end cap. In addition, after the laser is introduced with the cooling liquid, the cooling effect of the light-transmitting and heat-dissipating area in the laser is also good.

Based on the same inventive concept, an embodiment of the present invention further provides a laser processing apparatus, please refer to fig. 4, the laser processing apparatus 800 includes a laser processing head 810 and the laser 820 in the above embodiment. The laser processing head 810 includes, but is not limited to, one of a laser cutting head, a laser cladding head, and a laser welding head. The end of the laser 820 adjacent the laser machining head 810 is provided with a flange by which it is fixedly mounted directly to the laser machining head 810. Specifically, a connecting hole is formed in the flange, a connecting column matched with the connecting hole is arranged at one end, close to the flange, of the laser processing head 810, the connecting column is inserted into the connecting hole, and then the connecting column is fixed through locking pieces such as bolts. The sensor arranged at the connecting hole on the laser is used for detecting the matching in-place condition between the connecting column and the connecting hole; when the connecting column and the connecting hole are matched in place, the sensor detects the matching information and sends the matching information to the controller, and the controller can control the laser generating assembly to emit light; when the laser output head is not matched with the laser processing head in place, the controller controls the laser generating assembly not to emit light. It can be understood that, as for the laser processing equipment, in other embodiments of the present invention, the connection hole may also be disposed at the laser processing head, and correspondingly, the connection column is disposed at the flange; similarly, the sensor may also be provided in the laser processing head.

One type of laser machining apparatus currently on the market generally comprises a laser machining head, a connecting female head and a laser. The connecting female head is fixedly arranged at one end, close to the laser, of the laser processing head, and a first conical mounting surface (not shown) is arranged at one end, far away from the laser processing head, of the connecting female head. One end of the laser, which is close to the connecting female head, is provided with a second mounting surface (not shown) matched with the first mounting surface, and the laser is positioned and attached to the second mounting surface through the first mounting surface and is fixedly connected with the second mounting surface. The use cost of this laser processing equipment has been improved greatly in the setting of connecting female head, and concrete reason is as follows: on one hand, the machining difficulty of the conical surface is higher, and the machining cost of the connecting female head is also higher; on the other hand, since the laser beam passes through the connecting female head and the laser processing head in sequence after being emitted from the laser output head, the connecting female head also accumulates high heat, and a manufacturer generally processes a corresponding cooling flow channel in the connecting female head, which further increases the manufacturing cost of the connecting female head. In addition, under the condition of the same volume, because the existence of connecting female head, the laser output head can correspondingly diminish near the one end size of connecting female head, and the processing degree of difficulty is higher, and the inside cooling cavity of laser output head also will further reduce in addition, and then the radiating effect of laser itself receives the influence.

Compare with laser instrument output head, laser instrument or the laser processing equipment that provides on the existing market, the embodiment of the utility model provides a laser instrument output head, laser instrument or laser processing equipment have following advantage:

first, this application laser processing equipment 800 only includes laser beam machining head 810 and laser instrument 820, has omitted traditional female head of connecting, so this laser beam machining equipment's manufacturing cost reduces by a wide margin, and this laser beam machining equipment 800 still has advantages such as overall structure is more compact simultaneously, is applicable to high power like ten thousand watt level laser beam machining, and makes the laser beam machining process more steady. In the second aspect, the laser output head structure breaks through the relevant limitation of connecting the female head, and the heat dissipation efficiency is higher. And the size and the function of the laser output head can be changed according to different laser power outputs and different heat dissipation requirements in application scenes, so that the laser output head has better expansibility.

The laser processing apparatus also has the advantages of the laser output head and the laser, which are not described herein.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; within the idea of the invention, also technical features in the above embodiments or in different embodiments can be combined, steps can be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.

Claims

1. A laser output head, comprising:

an outer housing provided with an accommodating space;

the inner shell is accommodated in the accommodating space, a cooling cavity is enclosed between the inner shell and the outer shell together, and the inner shell is provided with a through installation space;

the end cap is accommodated in the accommodating space, and at least part of the end cap extends into the installation space;

the ring flange, certainly the shell body is kept away from the one end of second tip outwards extends and forms, the laser instrument output head accessible the ring flange direct fixed mounting is in rather than supporting laser beam machining head.

2. The laser output head as set forth in claim 1 wherein the flange is provided with a connection hole for mating with a mating connection post on the laser processing head.

3. The laser output head as claimed in claim 2, further comprising a sensor disposed at the connecting hole, the sensor being configured to detect the in-place engagement of the connecting hole with the connecting post.

4. The laser output head as claimed in claim 1, wherein the inner casing and the outer casing are hermetically connected and together enclose the cooling cavity, and the outer casing is further provided with a first communication port and a second communication port respectively communicated with the cooling cavity;

the end cap is fixed with the inner shell, and two ends of the end cap are located between two ends of the cooling cavity along the axial direction of the outer shell.

5. The laser output head as set forth in claim 4, wherein the outer diameter of the outer housing is gradually increased or kept constant from the second end toward the first end; and/or

6. The laser output head as set forth in claim 4, wherein the inner housing is integrally formed with the outer housing;

7. A laser comprising a laser output head as claimed in any one of claims 1 to 6.

8. A laser processing apparatus comprising a laser processing head and a laser, the laser including a laser output head, the laser output head comprising:

an outer housing provided with an accommodating space;

the ring flange, certainly the shell body is kept away from the one end of second tip outwards extends and forms, the laser instrument passes through ring flange direct fixed mounting in laser beam machining head.

9. The laser processing apparatus as claimed in claim 8, wherein one of the laser processing head and the flange is provided with a connection hole, and the other of the laser processing head and the flange is provided with a connection post fitted into the connection hole, the connection post being inserted into the connection hole.

10. The laser processing apparatus of claim 9, further comprising a sensor, the laser including a laser generating assembly and a controller;

11. Laser machining apparatus according to any one of claims 8 to 10,

the inner shell and the outer shell are connected in a sealing mode and enclose a cooling cavity together, and the outer shell is further provided with a first communication port and a second communication port which are communicated with the cooling cavity respectively;