CN117348228A - Low power microscope objective lens - Google Patents
Low power microscope objective lens Download PDFInfo
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- CN117348228A CN117348228A CN202311438408.2A CN202311438408A CN117348228A CN 117348228 A CN117348228 A CN 117348228A CN 202311438408 A CN202311438408 A CN 202311438408A CN 117348228 A CN117348228 A CN 117348228A
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- refractive power
- microscope objective
- positive refractive
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- 230000003287 optical effect Effects 0.000 claims abstract description 35
- 230000004075 alteration Effects 0.000 abstract description 18
- 238000012545 processing Methods 0.000 abstract description 12
- 238000003384 imaging method Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 238000012937 correction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/08—Anamorphotic objectives
- G02B13/12—Anamorphotic objectives with variable magnification
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B15/00—Optical objectives with means for varying the magnification
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B15/00—Optical objectives with means for varying the magnification
- G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
- G02B15/143—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having three groups only
- G02B15/1431—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective having three groups only the first group being positive
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
- G02B21/025—Objectives with variable magnification
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Lenses (AREA)
Abstract
The invention provides a low power microscope objective lens, wherein the microscope objective lens at least comprises the following components in sequence from an image side surface to an object side surface along an optical axis: the first lens group is provided with positive focal power and is used for deflecting light rays entering the first lens group from the object side of the first lens group; the second lens group is provided with positive focal power and is used for correcting aberration of a light beam which enters from the object side of the second lens group and exits from the image side of the second lens group to the first lens group; and the third lens group is a beam splitting prism and is used for splitting. The invention belongs to the technical field of optics, in particular to a microscope objective lens which has an interference structure, can ensure a long working distance, has the characteristics of less lens number and simple processing under the condition of smaller aberration. The method solves the problems of long working distance, low imaging quality and difficult processing, and realizes high-precision three-dimensional measurement.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to a low power microscope objective lens.
Background
With the rapid development of the semiconductor industry in recent years, the detection precision of the micro-nano structure is higher and higher. The detection precision of the microscope is improved, so that the observation requirement is met. Generally, since a long working distance is required for industrial detection, for a low-magnification objective lens having a simple structure as an advantage, this may cause the structural design of the lens to become more complicated, aberration correction to be difficult, the number of lenses to be increased, and processing difficulty and processing cost to be increased.
Chinese patent document CN115202024a discloses a microscope objective lens having a low magnification, long working distance, but a large number of lenses and high processing cost.
Chinese patent document CN115202023a discloses a microscope objective lens having a low magnification, a simple structure, a long working distance, but not well correcting aberrations.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a low-power micro objective lens which can ensure the characteristics of long working distance, good correction of aberration, less lens number and simple processing, so as to solve the problems of more lens number and high processing cost under the long working distance and realize high-precision three-dimensional structure measurement.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a low power micro-mirror objective lens includes a first lens group of positive refractive power, a second lens group of negative refractive power, and a third lens group including a beam-splitting prism; the second lens group with negative refractive power is arranged between the first lens group with positive refractive power and the third lens group comprising the beam-splitting prism; the positive refractive power first lens group includes a positive refractive power first lens and a negative refractive power second lens glued to the positive refractive power first lens.
Further, the second lens group with negative refractive power comprises a third lens with negative refractive power and a fourth lens with positive refractive power, and the third lens with negative refractive power and the fourth lens with positive refractive power are sequentially arranged.
Further, the third lens group including a beam splitting prism has a beam splitting prism.
Further, the first lens group with positive refractive power and the second lens group with negative refractive power meet the condition that 20 < |f/NA/DO| < 30, and f is the focal distance of the microscope objective lens; NA is the object numerical aperture of the microscope objective; d0 is the distance on the optical axis from the object surface to the lens surface of the microscope objective closest to the object.
Further, the first lens has a positive refractive power, the second lens has a negative refractive power, the third lens has a negative refractive power, and the fourth lens has a positive refractive power.
Further, the first lens group of positive refractive power and the second lens group of positive refractive power satisfy the condition that-0.45 < f1/f2<0.20;0.5< f1/f <0.8, f1 is the focal length of the first lens group, f2 is the focal length of the second lens group, and f is the focal length of the microscope objective.
Further, the positive refractive power first lens group also satisfies the condition of 0.6< f11/f1<0.75; -1.8< f12/f1< -1.3; f11 is the focal length of the first lens, f12 is the focal length of the second lens, and f1 is the focal length of the first lens group.
Further, the first lens, the second lens, the third lens, the fourth lens and the beam-splitting prism meet the condition of 1.58< N11<1.70;1.70< n12<1.80;1.55< N21<1.67;1.54< n22<1.66;1.45< n31<1.57; n11 is the refractive index of the first lens, N12 is the refractive index of the second lens, N21 is the refractive index of the third lens, N22 is the refractive index of the fourth lens, and N31 is the refractive index of the dichroic prism.
Further, the first lens, the second lens, the third lens, the fourth lens and the light-splitting prism meet the conditions that V11 is less than or equal to 60, V12 is less than or equal to 40, V21 is less than or equal to 50, V22 is less than or equal to 60 and V31 is less than or equal to 70; v11 is the Abbe number of the first lens, V12 is the Abbe number of the second lens, V21 is the Abbe number of the third lens, V22 is the Abbe number of the fourth lens, and V31 is the Abbe number of the beam-splitting prism.
Further, the first lens, the second lens, the third lens, the fourth lens and the beam-splitting prism meet the condition that 1.1< T1/T2<1.3;0.6< T1/T3<1.2;0.45< T11/T1<0.55;0.45< T12/T1<0.55;0.36< T21/T2<0.43;0.36< T22/T2<0.43; t1 is the length of the first lens group on the optical axis, T2 is the length of the first lens group on the optical axis, T3 is the length of the beam splitting prism on the optical axis, T11 is the thickness of the first lens on the optical axis, T12 is the thickness of the second lens on the optical axis, T21 is the thickness of the third lens on the optical axis, and T22 is the thickness of the fourth lens on the optical axis.
The beneficial effects obtained by the invention by adopting the structure are as follows:
the invention sets the first lens group, the second lens group and the third lens group, so that the first lens group has positive refractive power, the second lens group has negative refractive power, and the third lens group has light splitting effect, so that the microscope objective lens has good optical performance; in addition, the focal distance, the refractive index, the Abbe number and the thickness of the first lens group and the second lens group are limited, so that the field curvature, the distortion and the aberration sensitivity of the microscope objective are further improved, the optical performance of the microscope objective is ensured, the microscope objective has long working distance and good aberration correction, the number of lenses is reduced, and the processing difficulty and the processing cost are reduced.
Drawings
FIG. 1 is a diagram showing a lens structure according to a first embodiment of the present invention;
FIG. 2 is a spherical aberration diagram of a first embodiment of the present invention;
FIG. 3 is a field diagram of a first embodiment of the present invention;
FIG. 4 is a distortion chart of a first embodiment of the present invention;
FIG. 5 is a graph of the optical Modulation Transfer Function (MTF) of a first embodiment of the present invention;
the accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention; all other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1, the low power micro objective OB of the present invention is configured as: the image side 100 includes, in order: a first lens group 11 having positive refractive power; a second lens group 12 having negative refractive power; a lens group 13 having a spectroscopic function; the absolute value of refractive power of the first lens group 11 is larger than that of the second lens group 12; so that the microscope objective has a strong positive refractive power.
In order to provide a longer working distance for the microscope objective, the following conditions are fulfilled:
20<|f/NA/D0|<30
wherein f is the focal distance of the microscope objective; NA is the object numerical aperture of the objective optics; d0 is the distance on the optical axis from the object surface to the lens surface of the microscope objective closest to the object.
In order to provide a microscope objective with a large magnification, a long working distance, better optical performance, the first lens group 11 and the second lens group 12 satisfy the following conditions:
-0.45<f1/f2<0.20；
0.5<f1/f<0.8；
wherein f1 is the focal distance of the first lens group, f2 is the focal distance of the second lens group, f is the focal distance of the microscope objective lens, and satisfies the above conditions, the working distance is enlarged, and meanwhile, the aberration of the microscope objective lens OB is corrected, and the resolution capability of the microscope objective lens OB is improved.
The first lens group 11 is composed of a first lens 111 having positive refractive power and a second lens 112 having negative refractive power; the second lens group 12 is composed of a third lens 121 of negative refractive power, a fourth lens 122 of positive refractive power; the third lens group 13 is composed of a beam-splitting prism 131.
The first lens group 11 has positive refractive power, and also satisfies the following conditions:
0.6<f11/f1<0.75；
-1.8<f12/f1<-1.3；
where f11 is the focal length of the first lens, f12 is the focal length of the second lens, and f1 is the focal length of the first lens group.
In order to improve the optical performance of the microscope objective lens, the refractive indices of the first lens group 11 and the second lens group 12 may be set as follows to reduce the number of lenses, reduce the processing difficulty, and further correct the aberration of the microscope objective lens.
The first lens 111, the second lens 112, the third lens 121, the fourth lens 122, and the beam splitter prism 131 are made of materials satisfying the following conditions:
1.58<N11<1.70；
1.70<N12<1.80；
1.55<N21<1.67；
1.54<N22<1.66；
where N11 is the refractive index of the first lens 111, N12 is the refractive index of the second lens 112, N21 is the refractive index of the third lens 121, and N22 is the refractive index of the fourth lens 122.
On the basis of the above, in order to reduce chromatic aberration of the objective lens and further improve imaging quality thereof, abbe numbers of the first lens group 11 and the second lens group 12 may be set as follows:
V11≤60，
V12≤40，
V21≤50，
V22≤60，
wherein V11 is the Abbe number of the first lens, V12 is the Abbe number of the second lens, V21 is the Abbe number of the third lens, and V22 is the Abbe number of the fourth lens.
In order to reduce the decentering sensitivity of the microscope objective lens, reduce the lens processing cost and improve the assembly yield of the microscope objective lens, the thicknesses of the first lens group 11 and the second lens group 12 are set as follows:
1.1<T1/T2<1.3；
0.6<T1/T3<1.2；
0.45<T11/T1<0.55；
0.45<T12/T1<0.55；
0.36<T21/T2<0.43；
0.36<T22/T2<0.43；
wherein T1 is the length of the first lens group on the optical axis, T2 is the length of the first lens group on the optical axis, T3 is the length of the beam splitter prism on the optical axis, T11 is the thickness of the first lens on the optical axis, T12 is the thickness of the second lens on the optical axis, T21 is the thickness of the third lens on the optical axis, and T22 is the thickness of the fourth lens on the optical axis.
Example 1
As shown in fig. 1, the microscope objective OB of the first embodiment includes a first lens group 11, a second lens group 12, and a third lens group 13, wherein the first lens group 11 includes a first lens 111 having positive refractive power and a second lens 112 having negative refractive power. The surface of the first lens 111 facing the image side is a first lens first surface 1111 and the surface facing the object side is a first lens second surface 1112. The surface of the second lens 112 facing the image side is a second lens first surface 1121, and the surface facing the object side is a second lens second surface 1122. The second lens group 12 includes a third lens 121 and a fourth lens 122 disposed in order from the image side to the object side. The third lens 121 has a negative refractive power, and a surface facing the image side is a third lens first surface 1211, and a surface facing the object side is a third lens second surface 1212. The fourth lens 122 has a positive refractive power, and a surface facing the image side is a fourth lens first surface 1221, and a surface facing the object side is a fourth lens second surface 1222. The third lens group 13 includes a prism 131, a prism first surface 1311 facing the image side, and a prism second surface 1312 facing the object side.
In this embodiment, the focal length f11 of the first lens 111 is 17.64, the refractive index N11 is 1.62, the abbe number V11 is 56.9, and the thickness T11 is 3. The focal length f12 of the second lens 112 is-44.59, the refractive index N12 is 1.75, the abbe number V12 is 35.0, and the thickness T12 is 3. The focal length f21 of the third lens 121 is-18.96, the refractive index N21 is 1.61, the abbe number V21 is 44.1, and the thickness T21 is 2. The fourth lens 122 has a focal length f22 of 25.80, a refractive index N22 of 1.60, an abbe number V22 of 58.9, and a thickness T22 of 2. The refractive index N31 of the prism was 1.52, abbe number V31 was 61.2, and thickness T31 was 10. Other optical parameters of the objective optical system are shown in Table 1-1.
TABLE 1-1
As can be seen from the above table, in the microscope objective OB of this embodiment, f is the focal distance of the microscope objective OB, that is, f is 40; NA the object-side numerical aperture of the microscope objective, i.e. NA is 0.13; d0 is the distance on the optical axis from the image side 100 to the vertex of the first lens surface 1111 of the first lens 111 facing the image side, i.e., D0 is 13.62, then |f/NA/d0| is 23.31. So that the microscope objective lens has the characteristic of long working distance.
The focal length of the first lens group 11 is the combined focal length of the first lens 111 to the second lens 112, i.e. f1 is 27.88; the focal length of the second lens group 82 is the combined focal length of the third lens element 121 to the fourth lens element 122, i.e., f2 is-83.90; the focal length f of the whole optical system is 40, then f1/f2 is-0.30, f1/f is 0.7, and the microscope objective lens within the range of focal length values has larger positive refractive power, so that the long working distance is provided, and the curvature of field, distortion and aberration of the microscope objective lens are improved, thereby improving the resolution performance, reducing the number of lenses and reducing the processing difficulty.
In the first embodiment, the thickness T1 of the first lens group 11 is 6, and the thickness T2 of the second lens group 12 is 6; the thickness T3 of the third lens group 83 is 10; T1/T2 is 1.2, T1/T3 is 0.6, T11/T1 is 0.50, T12/T1 is 0.50, T21/T2 is 0.40, and T22/T2 is 0.40.
Fig. 2 to 5 show the aberration diagrams and the optical modulation transfer function performance diagrams of a microscope objective lens according to the embodiment, wherein the aberrations represent resolution capability, and when the aberrations are smaller, images with better quality can be observed.
Specifically, fig. 2 is a spherical aberration diagram of a microscope objective lens according to a first embodiment of the present invention, and as shown in fig. 2, an abscissa thereof is an amount of spherical aberration in mm, and an ordinate thereof is an image height in mm. As shown in FIG. 2, the spherical aberration of the microscope objective lens is controlled within + -0.02 mm, so that the center resolution of the microscope objective lens is optimal.
Fig. 3 is a field curvature diagram of a microscope objective according to a first embodiment of the present invention, and as shown in fig. 3, the abscissa indicates an object plane movement amount in mm, and the ordinate indicates an image height in mm. As shown in fig. 3, the solid line indicates the sagittal of light rays with respect to each wavelength, and the broken line indicates the meridional with respect to each wavelength. From the distribution of field curvature, the field curvature of the microscope objective is controlled within +/-0.04 mm, so that the center resolution of the microscope objective is optimal.
Fig. 4 is a distortion chart of a microscope objective according to a first embodiment of the present invention, wherein the abscissa represents distortion amount, unit%, and the ordinate represents image height, unit mm, as shown in fig. 4. From the distortion distribution, the distortion of the microscope objective is controlled within +/-0.002%, so that the center resolution of the microscope objective is optimal.
Fig. 5 is a graph of MTF modulation transfer function of a microscope objective according to a first embodiment of the present invention, wherein the abscissa of the graph is spatial frequency, the unit is cycles/mm, and the ordinate is modulation, i.e. MTF, as shown in fig. 5. As shown in fig. 5, the uppermost line of the image represents the diffraction limit.
Claims (10)
1. A low power micromirror objective lens characterized by: a first lens group including positive refractive power, a second lens group including negative refractive power, and a third lens group including a beam-splitting prism; the second lens group with negative refractive power is arranged between the first lens group with positive refractive power and the third lens group comprising the beam-splitting prism; the positive refractive power first lens group includes a positive refractive power first lens and a negative refractive power second lens glued to the positive refractive power first lens.
2. A low power micromirror objective lens according to claim 1, characterized in that: the second lens group with negative refractive power comprises a third lens with negative refractive power and a fourth lens with positive refractive power, and the third lens with negative refractive power and the fourth lens with positive refractive power are sequentially arranged.
3. A low power micromirror objective lens according to claim 2, characterized in that: the third lens group including a beam splitting prism has a beam splitting prism.
4. A low power micromirror objective lens according to claim 1, characterized in that: the first lens group with positive refractive power and the second lens group with negative refractive power meet the condition that f/NA/DO is less than 30 and f is the focal distance of the microscope objective lens; NA is the object numerical aperture of the microscope objective; d0 is the distance on the optical axis from the object surface to the lens surface of the microscope objective closest to the object.
5. A low power micromirror objective lens according to claim 2, characterized in that: the first lens has a positive refractive power, the second lens has a negative refractive power, the third lens has a negative refractive power, and the fourth lens has a positive refractive power.
6. A low power micromirror objective lens according to claim 1, characterized in that: the first lens group with positive refractive power and the second lens group with positive refractive power meet the condition that-0.45 < f1/f2<0.20;0.5< f1/f <0.8, f1 is the focal length of the first lens group, f2 is the focal length of the second lens group, and f is the focal length of the microscope objective.
7. The low power micromirror objective lens of claim 6, wherein: the positive refractive power first lens group also satisfies the condition that 0.6< f11/f1<0.75; -1.8< f12/f1< -1.3; f11 is the focal length of the first lens, f12 is the focal length of the second lens, and f1 is the focal length of the first lens group.
8. A low power micromirror objective lens according to claim 2, characterized in that: the first lens, the second lens, the third lens, the fourth lens and the beam-splitting prism meet the condition of 1.58< N11<1.70;1.70< n12<1.80;1.55< N21<1.67;1.54< n22<1.66;1.45< n31<1.57; n11 is the refractive index of the first lens, N12 is the refractive index of the second lens, N21 is the refractive index of the third lens, N22 is the refractive index of the fourth lens, and N31 is the refractive index of the dichroic prism.
9. A low power micro objective as claimed in claim 3, wherein: the first lens, the second lens, the third lens, the fourth lens and the beam-splitting prism meet the conditions that V11 is less than or equal to 60, V12 is less than or equal to 40, V21 is less than or equal to 50, V22 is less than or equal to 60 and V31 is less than or equal to 70; v11 is the Abbe number of the first lens, V12 is the Abbe number of the second lens, V21 is the Abbe number of the third lens, V22 is the Abbe number of the fourth lens, and V31 is the Abbe number of the beam-splitting prism.
10. A low power micro objective as claimed in claim 9, wherein: the first lens, the second lens, the third lens, the fourth lens and the beam-splitting prism meet the condition that 1.1< T1/T2<1.3;0.6< T1/T3<1.2;0.45< T11/T1<0.55;0.45< T12/T1<0.55;0.36< T21/T2<0.43;0.36< T22/T2<0.43; t1 is the length of the first lens group on the optical axis, T2 is the length of the first lens group on the optical axis, T3 is the length of the beam splitting prism on the optical axis, T11 is the thickness of the first lens on the optical axis, T12 is the thickness of the second lens on the optical axis, T21 is the thickness of the third lens on the optical axis, and T22 is the thickness of the fourth lens on the optical axis.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311438408.2A CN117348228A (en) | 2023-11-01 | 2023-11-01 | Low power microscope objective lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311438408.2A CN117348228A (en) | 2023-11-01 | 2023-11-01 | Low power microscope objective lens |
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| CN117348228A true CN117348228A (en) | 2024-01-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117991481A (en) * | 2024-04-03 | 2024-05-07 | 武汉高明兰光电科技有限公司 | High-zoom-ratio imaging objective lens |
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2023
- 2023-11-01 CN CN202311438408.2A patent/CN117348228A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117991481A (en) * | 2024-04-03 | 2024-05-07 | 武汉高明兰光电科技有限公司 | High-zoom-ratio imaging objective lens |
| CN117991481B (en) * | 2024-04-03 | 2024-06-04 | 武汉高明兰光电科技有限公司 | Objective lens for imaging |
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