CN117334615A - Method for processing siliceous sealed outer tube for bearing silicon wafer - Google Patents
Method for processing siliceous sealed outer tube for bearing silicon wafer Download PDFInfo
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- CN117334615A CN117334615A CN202311370978.2A CN202311370978A CN117334615A CN 117334615 A CN117334615 A CN 117334615A CN 202311370978 A CN202311370978 A CN 202311370978A CN 117334615 A CN117334615 A CN 117334615A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 49
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 49
- 239000010703 silicon Substances 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims description 57
- 235000012431 wafers Nutrition 0.000 claims abstract description 40
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000010453 quartz Substances 0.000 claims abstract description 24
- 238000003466 welding Methods 0.000 claims abstract description 11
- 238000003672 processing method Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 159
- 238000003754 machining Methods 0.000 claims description 111
- 239000012188 paraffin wax Substances 0.000 claims description 80
- 239000011265 semifinished product Substances 0.000 claims description 60
- 238000005520 cutting process Methods 0.000 claims description 59
- 238000000227 grinding Methods 0.000 claims description 34
- 239000000047 product Substances 0.000 claims description 33
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 21
- 238000001179 sorption measurement Methods 0.000 claims description 19
- 238000009835 boiling Methods 0.000 claims description 9
- 238000005488 sandblasting Methods 0.000 claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 8
- 238000005406 washing Methods 0.000 claims description 8
- 238000007514 turning Methods 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 244000137852 Petrea volubilis Species 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 4
- 239000004576 sand Substances 0.000 claims description 4
- 230000007306 turnover Effects 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000013467 fragmentation Methods 0.000 abstract description 2
- 238000006062 fragmentation reaction Methods 0.000 abstract description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 2
- 229920005591 polysilicon Polymers 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
A processing method of a siliceous sealed outer tube for bearing silicon wafers replaces high-purity quartz with high-purity polysilicon, and solves the problems of low service life and easy fragmentation in a high-temperature environment; the sectional type processing mode is adopted, so that the mechanical processing is convenient, the production cost is reduced, the strength of a welded product is enhanced, and the size error caused by welding is reduced.
Description
Technical Field
The invention relates to the technical field of siliceous sealed outer tubes, in particular to a processing method of a siliceous sealed outer tube for bearing silicon wafers.
Background
The silicon wafer is the main substrate material of the modern ultra-large scale integrated circuit, a carrier for loading the semiconductor silicon wafer is needed during the heat treatment of the silicon wafer, the semiconductor silicon wafer is placed on the carrier and then is placed into a heat treatment furnace for treatment, the carrier is called a wafer boat in the industry, the wafer boat and the wafer need to be lifted into a section of sealed furnace tube, the high-temperature heat treatment and the deposition process are carried out in a special chemical gas environment, the sealed outer tube is mostly manufactured by using quartz materials in the industry at present, the processing atmosphere of the wafer in a stable cavity in a high-temperature furnace is ensured, the temperature stability in a heat reaction tube in the furnace is ensured, and the sealing effect is improved.
Currently, quartz sealed outer tubes are mostly produced by hot working using fused quartz glass materials. The quartz sealing outer tube can deform and soften after long-time use at the treatment temperature exceeding 1000 ℃, so that the process is abnormal, the service life of the quartz sealing outer tube is lower, and the quartz sealing outer tube is easy to crack; along with the continuous improvement of the semiconductor process technology, the quartz material sealing outer tube is difficult to meet the production and process requirements.
Disclosure of Invention
In order to solve the technical problems in the prior art, in view of the foregoing, it is necessary to provide a method for processing a siliceous sealed outer tube for carrying a silicon wafer.
A method for processing a siliceous sealed outer tube for bearing a silicon wafer comprises the following steps,
s1: dividing the siliceous sealed outer tube into a furnace bottom section, a middle section and a furnace top section according to the principle of sectional processing;
s2: selecting a silicon rod with proper size, cutting out silicon wafers with corresponding lengths required by a furnace bottom section, a middle section and a furnace top section by using a silicon carbide line cutting machine, and performing rough machining on the outer diameter of the cut-out silicon wafer with the furnace bottom section, the inner diameter and the outer diameter of the cut-out silicon wafer with the middle section and the inner diameter and the outer diameter of the cut-out silicon wafer with the furnace top section by using a rolling mill or a rod drawing machine to prepare a corresponding blank with the furnace bottom section, a corresponding blank with the middle Duan Mao and a corresponding blank with the furnace top Duan Mao;
S3: respectively rough machining the furnace bottom section blank, the middle Duan Mao blank and the furnace top section blank by adopting a grinding machine;
s4: machining the blank of the furnace bottom section, the blank of the middle Duan Mao and the blank of the furnace top section by adopting a machine tool to obtain a corresponding semi-finished product of the furnace bottom section, a corresponding semi-finished product of the middle section and a corresponding semi-finished product of the furnace top section;
the method adopts the following modes when the furnace bottom section blank material is processed: processing external characteristics of a blank material of the furnace bottom section, processing internal boss characteristics of the blank material of the furnace bottom section and processing internal characteristics of the blank material of the furnace bottom section;
the following method is adopted in the middle section blank processing: processing the inner diameter and the outer diameter of the upper half part of the blank of the middle section, and turning over to process the inner diameter and the outer diameter of the lower half part of the blank of the middle section;
the method adopts the following modes when the furnace top section blank material is processed: machining the outer diameter and the upper half of the inner diameter of a furnace top section blank, machining a furnace top section blank inner cavity boss and machining the inner diameter of the lower half of the furnace top section blank;
s5: polishing steps with the diameters of more than 0.01mm on a semi-finished product of the furnace bottom section, a semi-finished product of the middle section and a semi-finished product of the furnace top section by adopting 150-200 meshes of polishing sand paper to be smooth, manually polishing and chamfering all edges without chamfer angles by 0.3mm, and eliminating tiny burrs;
S6: clamping the furnace bottom section semi-finished product, the middle section semi-finished product and the furnace top section semi-finished product on a rotary table respectively, setting the rotary table rotation speed to be 45-55 r/min, and adopting 450-500 mesh abrasive sand to perform stable moving sand blasting by utilizing a sand blasting kettle to be 45-55 mm away from the product;
s7: placing the semi-finished products of the furnace bottom section, the middle section and the furnace top section into a flower basket, putting into pure water at 90-100 ℃ for boiling and washing for 10-12 min, and wiping and washing after boiling;
s8: placing the semi-finished products of the furnace bottom section, the intermediate section and the furnace top section in a flower basket, placing the flower basket in a prepared hydrofluoric acid solution for 1-2 min, and etching to remove impurities on the surface of the product;
s9: and splicing the furnace bottom semi-finished product, the middle semi-finished product and the furnace top semi-finished product into a whole according to technical requirements, and placing the whole into a welding furnace for welding to obtain a siliceous sealed outer pipe finished product.
Preferably, in the step S3, when the furnace bottom section blank material is roughly processed, a 250-350 mesh carborundum grinding head is adopted, the rotating speed is 780-820 r/min, the lower cutting is fed with 0.05mm/min, the length is flatly ground to +/-0.05 mm, the parallelism is 0.05mm, and the flatness is 0.05mm;
when the middle section blank material is roughly processed, a 260-300 mesh carborundum grinding head is adopted, the rotating speed is 580-620 r/min, the lower cutting is fed with 0.05mm/min, the length is flatly ground to +/-0.05 mm, the parallelism is 0.05mm, and the flatness is 0.05mm;
When the rough machining is carried out on the blank material at the furnace top section, a 100-120 mesh carborundum grinding head is adopted, the rotating speed is 980-1020 r/min, the blank material is cut into 0.1mm/min, and the length is ground to +/-0.05 mm.
Preferably, in step S4, the external characteristics of the blank material of the furnace bottom section are processed by adopting the following steps,
a: the diameter of the cutter is 190-210 mm, the sharpening thickness of the cutter is 8-12 mm, the cutter with 180-220 meshes is used for carrying out rough cutting, a blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 280-320 r/min, the cutter adopts a left side cutting mode, the radial feeding is 2mm/min, and the rotary speed is 1450-1550 r/min;
b: the second step of rough cutting is carried out by using a cutter with the diameter of 48-52 mm, the sharpening thickness of 7-9 mm and the granularity of 100-150 meshes, the blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary table rotating speed is set to 280-320 r/min, the cutter adopts an upper side feeding mode, the radial feeding is 0.5mm/min, the axial feeding is 1mm/min, and the rotating speed is 5450-5550 r/min;
c: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 7-9 mm, the cutter with 280-320 meshes is used for finish machining, the blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 280-320 r/min, the cutter adopts an upper side feeding mode, the radial feeding is 0.1mm/min, the axial feeding is 2mm/min, and the rotary speed is 4450-4550 r/min.
Preferably, in step S4, the internal boss feature of the blank material of the furnace bottom section is processed by adopting the following steps,
a: the diameter of the cutter is 25-35 mm, the sharpening thickness of the cutter is 7-9 mm, the cutter with 140-160 meshes is used for carrying out rough cutting, a blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 490-510 mm/min, the axial feeding is 490-510 mm/min, the lower cutting step distance is 0.1mm, and the rotating speed is 6450-6550 r/min;
b: the second step of rough cutting is carried out by using a cutter with the diameter of 7-9 mm, the sharpening thickness of 7-9 mm and 180-220 meshes, the blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 780-820 mm/min, the axial feeding is 480-520 mm/min, the lower cutting step distance is 0.1mm, and the rotating speed is 7450-7550 r/min;
c: the method comprises the steps of carrying out finish machining by using a cutter with the diameter of 3-4 mm, the sharpening thickness of 5-6 mm and the granularity of 280-320 meshes, adhering a blank material to a tool and a quartz plate by adopting yellow paraffin, clamping the blank material on a working platform, radially feeding the cutter by adopting an upper side spiral feeding mode, axially feeding the cutter by 380-420 mm/min, axially feeding the cutter by 180-220 mm/min, and carrying out lower cutting step distance by 0.05mm at the rotating speed of 8450-8550 r/min.
Preferably, in step S4, the internal features of the blank material of the furnace bottom section are processed by adopting the following steps,
a: rough machining is carried out by utilizing a cutter with the diameter of 45-55 mm, the sharpening thickness of 7-9 mm and the mesh of 100-120, blank materials are adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to be 48-55 r/min, the cutter adopts an upper side feeding mode, the axial feeding is carried out by 0.5mm/min, and the rotary speed is 4450-4550 r/min;
b: the second step of rough machining is carried out by utilizing a cutter with the diameter of 70-80 mm, the sharpening thickness of 9-12 mm and the mesh of 100-120, blank materials are adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an inner cavity transverse feeding mode, the radial feeding is carried out for 1mm/min, and the rotary speed is 3450-3550 r/min;
c: the inner wall finish machining is carried out by utilizing a cutter with the diameter of 70-80 mm, the sharpening thickness of 9-12 mm and 280-320 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary table rotating speed is set to 180-220 r/min, the cutter adopts an inner cavity transverse feeding mode, the axial feeding is carried out for 1mm/min, and the rotating speed is 3450-3550 r/min;
d: the method comprises the steps of carrying out fine machining on a spliced sub-buckle by using a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and the 180-220 meshes, adhering blank materials to a matched tool by using yellow paraffin, carrying out adsorption clamping on the tool by using a vacuum negative pressure sucker, setting the rotating speed of the turntable to 280-320 revolutions per minute, axially feeding the cutter by adopting an inner cavity transverse feeding mode, and carrying out rotational speed 4450-4550 revolutions per minute;
e: the inner cavity bottom surface finish machining is carried out by utilizing a cutter with the diameter of 9-11 mm, the sharpening thickness of 5-6 mm and 280-320 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 280-320 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 0.8mm/min, the radial feeding is 0.8mm/min, and the rotary speed is 74550-7550 revolutions per minute.
Preferably, in step S4, the inner and outer diameters of the upper half of the intermediate section blank are processed by the following steps,
a: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 7-9 mm, the cutter with 180-220 meshes carries out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out for 1mm/min, and the rotary speed is 4450-4550 r/min;
b: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter is axially fed by adopting an upper side vertical feeding mode, and the rotary speed is 4450-4550 r/min;
c: the inner diameter of the cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and 180-220 meshes is utilized for carrying out inner diameter radial buckling finish machining, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out by 0.5mm/min, and the rotary speed is 4450-4550 r/min.
Preferably, in the step S4, the inner diameter and the outer diameter of the lower half part of the blank material of the middle section are turned over and processed by adopting the following steps,
a: the diameter of the cutter is 55-65 mm, the sharpening thickness is 7-9 mm, the cutter with 180-220 meshes is used for carrying out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is clamped on a rotary table by adopting a vacuum negative pressure sucker in an adsorption manner, the rotary speed of the rotary table is set to be 180-220 r/min, the cutter adopts an upper side vertical feeding mode to axially feed for 1mm/min, the rotary speed is 4450-4550 r/min, the grinding depth is stopped to the position of 10-11 mm in the last working procedure, and the product is prevented from being broken;
b: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode to axially feed for 1mm/min, the rotary speed is 4450-4550 r/min, the grinding depth is stopped to the position of 10-11 mm of the previous working procedure, and the product is prevented from being broken;
c: the outer diameter sub-buckle finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out by 0.5mm/min, and the rotary speed is 4450-4550 r/min;
d: the diameter of the cutter is 70-80 mm, the sharpening thickness of the cutter is 9-11 mm, the cutter with 180-220 meshes carries out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 revolutions per minute, the cutter adopts an inner cavity transverse straight cutting mode, the axial feeding is carried out for 0.5mm per minute, and the rotary speed is 3450-3550 revolutions per minute;
e: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 70-80 mm, the sharpening thickness of 9-11 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 revolutions per minute, the cutter adopts an inner cavity transverse straight cutting mode, the axial feeding is carried out by 0.5mm per minute, and the rotary speed is 3450-3550 revolutions per minute.
Preferably, in step S4, the upper half of the outer diameter and the inner diameter of the blank material of the furnace roof section is processed by adopting the following steps,
a: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 8-9 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter is axially fed by adopting an upper side vertical feeding mode, and the rotary speed is 4450-4550 r/min;
b: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 8-9 mm, the cutter with 180-220 meshes carries out finish machining on the upper half part of the inner diameter, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out for 1mm/min, and the rotary speed is 4450-4550 r/min.
Preferably, in the step S4, the process of machining the boss of the inner cavity of the blank material of the furnace top section adopts the following steps,
a: the boss of the inner cavity of the product is finely machined by using a cutter with the diameter of 6-7 mm, the sharpening thickness of 5-6 mm and 180-220 meshes, the blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 480-520 mm/min, the axial feeding is 180-220 mm/min, the lower cutting step distance is 0.05mm, and the rotating speed is 8450-8550 r/min.
Preferably, in step S4, the inner diameter of the lower half of the blank of the furnace roof section is processed by adopting the following steps,
a: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 8-9 mm, the cutter with 180-220 meshes carries out finish machining on the upper half part of the inner diameter, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out for 1mm/min, and the rotary speed is 4450-4550 r/min.
Compared with the prior art, the processing method of the siliceous sealed outer tube for bearing the silicon wafer provided by the invention has the advantages that high-purity quartz is replaced by high-purity polysilicon, so that the problems of low service life and easiness in fragmentation in a high-temperature environment are solved; the sectional type processing mode is adopted, so that the mechanical processing is convenient, the production cost is reduced, the strength of a welded product is enhanced, and the size error caused by welding is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of the structure of the siliceous sealed outer tube of the present invention.
FIG. 2 is a schematic view of the direction of feed of a first step of the tool during processing of external features of a hearth section blank according to the present invention.
FIG. 3 is a schematic view of the direction of feed of the tool in the second step of the present invention for processing internal features of a hearth section blank.
FIG. 4 is a schematic representation of the present invention in processing internal boss features of a hearth section blank.
FIG. 5 is a schematic view of the direction of feed of a first step of the tool during processing of internal features of a hearth section blank according to the present invention.
FIG. 6 is a schematic view of the direction of feed of the tool in the second step of the present invention for processing internal features of a hearth section blank.
FIG. 7 is a schematic view of the direction of tool feed in the third step of the present invention for processing internal features of a hearth section blank.
FIG. 8 is a schematic representation of a fourth step in the processing of internal features of a hearth section blank according to the present invention.
FIG. 9 is a schematic view of a fifth step in the processing of internal features of a hearth section blank according to the present invention.
FIG. 10 is a schematic view showing the direction of feed of the cutter in the first step of processing the inner and outer diameters of the upper half of the intermediate section blank according to the present invention.
FIG. 11 is a schematic view showing the direction of feed of the cutter in the second step of processing the inner and outer diameters of the upper half of the intermediate section blank according to the present invention.
FIG. 12 is a schematic view of the third step in the processing of the inner and outer diameters of the upper half of the intermediate blank according to the present invention.
Fig. 13 is a schematic view of the direction of cutter feed in the first step of turning the inner and outer diameters of the lower half of the blank in the middle section according to the present invention.
Fig. 14 is a schematic view of the direction of cutter feed in the second step of turning the inner and outer diameters of the lower half of the blank in the middle section according to the present invention.
FIG. 15 is a schematic view of the third step of the present invention in the turn-over process of the inner and outer diameters of the lower half of the intermediate stock.
Fig. 16 is a schematic view of the fourth step of cutter feeding direction when turning the inner and outer diameters of the lower half of the blank in the middle section.
FIG. 17 is a schematic view of the direction of feed of the first step of the tool of the present invention in the machining of the upper halves of the outside and inside diameters of a roof section blank.
FIG. 18 is a schematic view showing the direction of feed of the tool in the second step of the present invention when machining the upper half of the outer and inner diameters of the roof section blank.
FIG. 19 is a schematic view of the present invention in processing a furnace roof section blank cavity boss.
FIG. 20 is a schematic view of the direction of feed of the tool during the machining of the inner diameter of the lower half of a roof section blank according to the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Taking an ultra-thin silicon sealed outer tube with the wall thickness of 4mm and the length of 1400mm as an example, the invention provides a processing method of the silicon sealed outer tube for bearing silicon wafers, which comprises the following steps,
s1: dividing the siliceous sealed outer tube into a furnace bottom section, a middle section and a furnace top section according to the principle of sectional processing; wherein the first section is a furnace bottom section, and the length is set to 120mm; the second section is a middle section and is four second, third, fourth and fifth sections of furnace tubes with the length of 315 mm; the sixth section is a furnace top section, and the length is set to be 20mm.
S2: a first furnace bottom section, namely selecting a silicon rod with a proper size, intercepting a silicon wafer with a diameter of 126mm plus or minus 3mm by using a silicon carbide line cutter, and then roughly machining the outer diameter by using a roller mill or a rod drawing machine to obtain a furnace bottom section blank; selecting silicon rods with proper sizes, cutting out silicon wafers with the diameter of 321mm plus or minus 3mm by using a silicon carbide line cutting machine, then carrying out rough machining on the outer diameter by using a rolling mill or a rod drawing machine, and carrying out rough machining on the inner diameter of a product by using the rod drawing machine so as to reduce the grinding amount of subsequent machining; in order to ensure the strength of the product in the subsequent processing, the allowance of the inner and outer diameter blanks is set to be 10-15 mm, and a middle section blank is obtained; and a sixth section of furnace top section, selecting a silicon rod with proper size, intercepting a silicon wafer with the diameter of 26mm plus or minus 3mm by using a silicon carbide line cutter, then performing rough machining on the outer diameter by using a roller mill or a rod drawing machine, and performing rough machining on the inner diameter of a product by using the rod drawing machine so as to reduce the subsequent machining grinding quantity. In order to ensure the strength of the product in the subsequent processing, the allowance of the outer diameter blank is set to be 10-15 mm, and the inner diameter is required to be processed to form a boss, so that the allowance of the inner diameter blank is set to be 30-35 mm, and the top section blank is obtained.
S3: respectively rough machining the furnace bottom section blank, the middle Duan Mao blank and the furnace top section blank by adopting a grinding machine;
S4: machining the blank of the furnace bottom section, the blank of the middle Duan Mao and the blank of the furnace top section by adopting a machine tool to obtain a corresponding semi-finished product of the furnace bottom section, a corresponding semi-finished product of the middle section and a corresponding semi-finished product of the furnace top section;
the method adopts the following modes when the furnace bottom section blank material is processed: processing external characteristics of a blank material of the furnace bottom section, processing internal boss characteristics of the blank material of the furnace bottom section and processing internal characteristics of the blank material of the furnace bottom section;
the following method is adopted in the middle section blank processing: processing the inner diameter and the outer diameter of the upper half part of the blank of the middle section, and turning over to process the inner diameter and the outer diameter of the lower half part of the blank of the middle section;
the method adopts the following modes when the furnace top section blank material is processed: machining the outer diameter and the upper half of the inner diameter of a furnace top section blank, machining a furnace top section blank inner cavity boss and machining the inner diameter of the lower half of the furnace top section blank;
s5: and (3) manual grinding treatment: adopting 200-mesh grinding sand paper to grind and level steps with the diameters of more than 0.01mm on a furnace bottom section semi-finished product, a middle section semi-finished product and a furnace top section semi-finished product, manually grinding and chamfering edges without chamfering for 0.3mm, and eliminating tiny burrs;
s6: surface sand blasting: clamping the furnace bottom section semi-finished product, the middle section semi-finished product and the furnace top section semi-finished product on a rotary table respectively, setting the rotary table rotation speed to 50 revolutions per minute, and carrying out stable moving sand blasting by adopting 500-mesh abrasive sand and utilizing a sand blasting kettle to be 50mm away from the product;
S7: boiling and cleaning: placing the semi-finished products of the furnace bottom section, the middle section and the furnace top section in a flower basket, putting into pure water at 100 ℃ for boiling and washing for 10min, and wiping and washing after boiling;
s8: acid liquor etching treatment: placing the semi-finished products of the furnace bottom section, the semi-finished products of the middle section and the semi-finished products of the furnace top section in a flower basket, placing the flower basket in a prepared hydrofluoric acid solution for 1min, and etching to remove impurities on the surfaces of the products;
s9: and (3) splicing and welding treatment: and splicing the furnace bottom semi-finished product, the middle semi-finished product and the furnace top semi-finished product into a whole according to technical requirements, and placing the whole into a welding furnace for welding to obtain a siliceous sealed outer pipe finished product.
In the concrete implementation steps, when a furnace bottom section blank material is roughly processed, a 300-mesh carborundum grinding head is adopted, the rotating speed is 800 turns/min, the lower cutting is fed with 0.05mm/min, the length is flatly ground to 121mm plus or minus 0.05mm, the parallelism is 0.05mm, and the flatness is 0.05mm, so that the vacuum chuck adsorption force in the subsequent processing meets the processing requirement;
when the middle section blank material is roughly processed, a second section furnace tube, a third section furnace tube, a fourth section furnace tube and a fifth section furnace tube adopt a 280-mesh carborundum grinding head, the rotating speed is 600 r/min, the lower cutting is 0.05mm/min, the length is flatly ground to 316mm plus or minus 0.05mm, the parallelism is 0.05mm, and the flatness is 0.05mm, so that the vacuum chuck adsorption force in the subsequent processing meets the processing requirement;
When the rough machining is carried out on the blank material at the furnace top section, a 100-mesh carborundum grinding head is adopted, the rotating speed is 1000 turns/min, the lower cutting is fed with 0.1mm/min, and the length is ground to 21+/-0.05 mm.
In a specific implementation step, the external characteristics of the blank material of the bottom section of the furnace are processed by adopting the following steps,
a: the diameter of the cutter is 200mm, the sharpening thickness of the cutter is 10mm, the cutter with 200 meshes is used for carrying out rough cutting, a blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 300 revolutions per minute, the cutter adopts a left side cutter feeding mode, the radial feeding speed is 2mm per minute, and the rotary speed is 1500 revolutions per minute.
b: the diameter of the cutter is 50mm, the sharpening thickness of the cutter is 8mm, the cutter with 100 meshes performs the second step of coarse cutting, the blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 300 revolutions per minute, the cutter adopts an upper side feeding mode, the radial feeding is 0.5mm per minute, the axial feeding is 1mm per minute, and the rotary speed is 5500 revolutions per minute.
c: and (3) carrying out finish machining by using a cutter with the diameter of 60mm, the sharpening thickness of 8mm and 300 meshes, wherein a blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, and the rotary speed of the rotary table is set to be 300 revolutions per minute. The cutter adopts an upper side feeding mode, radially feeds 0.1mm/min, axially feeds 2mm/min and rotates at 4500 revolutions/min.
In a specific implementation step, the internal boss feature of the blank material of the furnace bottom section is processed by adopting the following steps,
a: the diameter of the cutter is 30mm, the sharpening thickness of the cutter is 8mm, the cutter with 150 meshes is used for carrying out rough cutting, and a blank material is adhered to a tool and a quartz plate by adopting yellow paraffin and is clamped on a working platform. The cutter adopts an upper side screw feeding mode, radial feeding is 500mm/min, axial feeding is 500mm/min, lower cutting step distance is 0.1mm, and rotating speed is 6500 revolutions/min.
b: and (3) carrying out second-step rough cutting by using a cutter with the diameter of 8mm, the sharpening thickness of 8mm and 200 meshes, and clamping blank materials on a working platform by adopting yellow paraffin to adhere to a tool and a quartz plate. The cutter adopts an upper side screw feeding mode, radially feeds 800mm/min, axially feeds 500mm/min, and has a lower cutting step distance of 0.1mm and a rotating speed of 7500 revolutions/min.
c: and 3mm in diameter, a cutter with the sharpening thickness of 5mm and 300 meshes is used for finish machining, and a blank material is adhered to a tool and a quartz plate by adopting yellow paraffin and is clamped on a working platform. The cutter adopts an upper side screw feeding mode, radial feeding is 400mm/min, axial feeding is 200mm/min, lower cutting step distance is 0.05mm, and rotating speed is 8500 revolutions/min.
In the concrete implementation steps, the internal characteristics of the blank material of the bottom section of the furnace are processed by adopting the following steps,
a: the diameter of the tool is 50mm, the sharpening thickness of the tool is 8mm, a 100-mesh tool is used for rough machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, and the rotary speed of the rotary table is set to be 50 revolutions per minute. The cutter adopts an upper side feeding mode, and axially feeds 0.5mm/min, and the rotating speed is 4500 revolutions/min.
b: and (3) performing second-step rough machining by using a cutter with the diameter of 75mm, the sharpening thickness of 10mm and the size of 100 meshes, adhering blank materials to a matched tool by using yellow paraffin, and performing adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an inner cavity transverse feeding mode, radial feeding is carried out for 1mm/min, and the rotating speed is 3500 revolutions/min.
c: the inner wall finish machining is carried out by utilizing a cutter with the diameter of 70-80 mm, the sharpening thickness of 9-12 mm and 280-320 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary table rotating speed is set to 180-220 r/min, the cutter adopts an inner cavity transverse feeding mode, the axial feeding is carried out for 1mm/min, and the rotating speed is 3450-3550 r/min;
d: and (3) carrying out fine machining on the spliced sub-buckle by using a cutter with the diameter of 60mm, the sharpening thickness of 8mm and 200 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 300 revolutions per minute. The cutter adopts an inner cavity transverse feeding mode, and axially feeds for 1mm/min, and the rotating speed is 4500 revolutions/min.
e: and (3) carrying out inner cavity bottom surface finish machining by using a cutter with the diameter of 10mm and the sharpening thickness of 5mm and 300 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 300 revolutions per minute. The cutter adopts an upper side vertical feeding mode, axial feeding is 0.8mm/min, radial feeding is 0.8mm/min, and rotating speed is 7500 revolutions/min.
In a specific implementation step, the inner diameter and the outer diameter of the upper half part of the blank in the middle section are processed by adopting the following steps,
a: the diameter is 60mm, the sharpening thickness is 8mm, a 200-mesh cutter is used for carrying out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, and the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds for 1mm/min at a rotating speed of 4500 revolutions/min.
b: and (3) carrying out external diameter finish machining by using a cutter with the diameter of 60mm, the sharpening thickness of 8mm and 200 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds for 1mm/min at a rotating speed of 4500 revolutions/min.
c: the inner diameter radial buckling finish machining is carried out by utilizing a cutter with the diameter of 60mm, the sharpening thickness of 8mm and the size of 200 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, and the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds 0.5mm/min at a rotating speed of 4500 revolutions/min.
In the concrete implementation steps, the inner diameter and the outer diameter of the lower half part of the blank material of the middle section of the turn-over processing adopt the following steps,
a: the diameter is 60mm, the sharpening thickness is 8mm, a 200-mesh cutter is used for carrying out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, and the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds for 1mm/min at a rotating speed of 4500 revolutions/min. Stopping the grinding depth to the position 10mm from the previous working procedure, and preventing the product from being broken.
b: and (3) carrying out external diameter finish machining by using a cutter with the diameter of 60mm, the sharpening thickness of 8mm and 200 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds for 1mm/min at a rotating speed of 4500 revolutions/min. Stopping the grinding depth to the position 10mm from the previous working procedure, and preventing the product from being broken.
c: and (3) carrying out external diameter sub-buckle finish machining by using a cutter with the diameter of 60mm, the sharpening thickness of 8mm and the size of 200 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds 0.5mm/min at a rotating speed of 4500 revolutions/min.
d: and (3) carrying out inner diameter finish machining by utilizing a cutter with the diameter of 75mm, the sharpening thickness of 10mm and the size of 200 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by adopting a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an inner cavity transverse straight feeding mode, and axially feeds 0.5mm/min, and the rotating speed is 3500 revolutions/min.
e: and (3) carrying out external diameter finish machining by using a cutter with the diameter of 75mm, the sharpening thickness of 10mm and the size of 200 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an inner cavity transverse straight feeding mode, and axially feeds 0.5mm/min, and the rotating speed is 3500 revolutions/min.
In the concrete implementation steps, the upper half parts of the outer diameter and the inner diameter of the blank material of the furnace top section are processed by adopting the following steps,
a: and (3) carrying out external diameter finish machining by using a cutter with the diameter of 60mm, the sharpening thickness of 8mm and 200 meshes, adhering blank materials to a matched tool by using yellow paraffin, and carrying out adsorption clamping on a rotary table by using a vacuum negative pressure sucker, wherein the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds for 1mm/min at a rotating speed of 4500 revolutions/min.
b: the upper half part of the inner diameter of the cutter with the diameter of 60mm and the sharpening thickness of 8mm and 200 meshes is finely machined, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, and the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds for 1mm/min at a rotating speed of 4500 revolutions/min.
In the concrete implementation steps, the process of the boss of the inner cavity of the blank material of the furnace top section adopts the following steps,
and (3) carrying out the fine machining of the boss of the inner cavity of the product by using a cutter with the diameter of 6mm, the sharpening thickness of 5mm and 200 meshes, and clamping a blank material on a working platform by adopting yellow paraffin to adhere to a tool and a quartz plate. The cutter adopts an upper side screw feeding mode, radial feeding is 500mm/min, axial feeding is 200mm/min, lower cutting step distance is 0.05mm, and rotating speed is 8500 revolutions/min.
In the concrete implementation steps, the inner diameter of the lower half part of the blank material of the furnace top section is processed by adopting the following steps,
the upper half part of the inner diameter of the cutter with the diameter of 60mm and the sharpening thickness of 8mm and 200 meshes is finely machined, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, and the rotary speed of the rotary table is set to be 200 revolutions per minute. The cutter adopts an upper side vertical feeding mode, and axially feeds for 1mm/min at a rotating speed of 4500 revolutions/min.
Example 2
Taking an ultra-thin silicon sealed outer tube with the wall thickness of 4mm and the length of 1400mm as an example, the invention provides a processing method of the silicon sealed outer tube for bearing silicon wafers, which comprises the following steps,
s1: dividing the siliceous sealed outer tube into a furnace bottom section, a middle section and a furnace top section according to the principle of sectional processing; wherein the first section is a furnace bottom section, and the length is set to 120mm; the second section is a middle section and is four second, third, fourth and fifth sections of furnace tubes with the length of 315 mm; the sixth section is a furnace top section, and the length is set to be 20mm.
S2: a first furnace bottom section, namely selecting a silicon rod with a proper size, intercepting a silicon wafer with a diameter of 126mm plus or minus 3mm by using a silicon carbide line cutter, and then roughly machining the outer diameter by using a roller mill or a rod drawing machine to obtain a furnace bottom section blank; selecting silicon rods with proper sizes, cutting out silicon wafers with the diameter of 321mm plus or minus 3mm by using a silicon carbide line cutting machine, then carrying out rough machining on the outer diameter by using a rolling mill or a rod drawing machine, and carrying out rough machining on the inner diameter of a product by using the rod drawing machine so as to reduce the grinding amount of subsequent machining; in order to ensure the strength of the product in the subsequent processing, the allowance of the inner and outer diameter blanks is set to be 10-15 mm, and a middle section blank is obtained; and a sixth section of furnace top section, selecting a silicon rod with proper size, intercepting a silicon wafer with the diameter of 26mm plus or minus 3mm by using a silicon carbide line cutter, then performing rough machining on the outer diameter by using a roller mill or a rod drawing machine, and performing rough machining on the inner diameter of a product by using the rod drawing machine so as to reduce the subsequent machining grinding quantity. In order to ensure the strength of the product in the subsequent processing, the allowance of the outer diameter blank is set to be 10-15 mm, and the inner diameter is required to be processed to form a boss, so that the allowance of the inner diameter blank is set to be 30-35 mm, and the top section blank is obtained.
S3: respectively rough machining the furnace bottom section blank, the middle Duan Mao blank and the furnace top section blank by adopting a grinding machine;
s4: machining the blank of the furnace bottom section, the blank of the middle Duan Mao and the blank of the furnace top section by adopting a machine tool to obtain a corresponding semi-finished product of the furnace bottom section, a corresponding semi-finished product of the middle section and a corresponding semi-finished product of the furnace top section;
the method adopts the following modes when the furnace bottom section blank material is processed: processing external characteristics of a blank material of the furnace bottom section, processing internal boss characteristics of the blank material of the furnace bottom section and processing internal characteristics of the blank material of the furnace bottom section;
the following method is adopted in the middle section blank processing: processing the inner diameter and the outer diameter of the upper half part of the blank of the middle section, and turning over to process the inner diameter and the outer diameter of the lower half part of the blank of the middle section;
the method adopts the following modes when the furnace top section blank material is processed: machining the outer diameter and the upper half of the inner diameter of a furnace top section blank, machining a furnace top section blank inner cavity boss and machining the inner diameter of the lower half of the furnace top section blank;
s5: adopting 150-mesh grinding sand paper to grind and level steps with the diameters of more than 0.01mm on a furnace bottom section semi-finished product, a middle section semi-finished product and a furnace top section semi-finished product, manually grinding and chamfering edges without chamfering for 0.3mm, and eliminating tiny burrs;
S6: clamping the furnace bottom section semi-finished product, the middle section semi-finished product and the furnace top section semi-finished product on a rotary table respectively, setting the rotary table rotation speed to 55 revolutions per minute, and carrying out stable moving sand blasting by adopting 450 meshes of abrasive sand at a position 55mm away from the product by utilizing a sand blasting kettle;
s7: placing the semi-finished products of the furnace bottom section, the middle section and the furnace top section in a flower basket, putting into pure water at 100 ℃ for boiling and washing for 12min, and wiping and washing after boiling;
s8: placing the semi-finished products of the furnace bottom section, the semi-finished products of the middle section and the semi-finished products of the furnace top section in a flower basket, placing the flower basket in a prepared hydrofluoric acid solution for 2min, and etching to remove impurities on the surfaces of the products;
s9: and splicing the furnace bottom semi-finished product, the middle semi-finished product and the furnace top semi-finished product into a whole according to technical requirements, and placing the whole into a welding furnace for welding to obtain a siliceous sealed outer pipe finished product.
In the concrete implementation step, when the furnace bottom section blank material is roughly processed, a 350-mesh carborundum grinding head is adopted, the rotating speed is 820 r/min, the lower cutting is fed with 0.05mm/min, the length is flatly ground to 121mm plus or minus 0.05mm, the parallelism is 0.05mm, and the flatness is 0.05mm.
When the middle section blank material is roughly processed, a 300-mesh carborundum grinding head is adopted, the rotating speed is 620 turns/min, the lower cutting is fed with 0.05mm/min, the length is flatly ground to 316mm plus or minus 0.05mm, the parallelism is 0.05mm, and the flatness is 0.05mm;
When the rough machining is carried out on the blank material at the furnace top section, a 120-mesh carborundum grinding head is adopted, the rotating speed is 1020 turns/min, the lower cutting is fed with 0.1mm/min, and the length is ground to 21mm plus or minus 0.05mm.
In a specific implementation step, the external characteristics of the blank material of the bottom section of the furnace are processed by adopting the following steps,
a: the diameter of the cutter is 210mm, the sharpening thickness of the cutter is 12mm, the cutter with 220 meshes is used for carrying out rough cutting, a blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 320 revolutions per minute, the cutter adopts a left side cutting mode, the radial feeding speed is 2mm per minute, and the rotary speed is 1550 revolutions per minute.
b: the diameter of the cutter is 52mm, the sharpening thickness of the cutter is 9mm, the cutter with 150 meshes performs the second step of coarse cutting, the blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 320 revolutions per minute, the cutter adopts an upper side feeding mode, the radial feeding is 0.5mm per minute, the axial feeding is 1mm per minute, and the rotary speed is 5550 revolutions per minute.
c: the diameter of the cutter is 65mm, the sharpening thickness of the cutter is 9mm, the cutter with 320 meshes is finely machined, a blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 320 revolutions per minute, the cutter adopts an upper side feeding mode, the radial feeding is 0.1mm per minute, the axial feeding is 2mm per minute, and the rotary speed is 4550 revolutions per minute.
In a specific implementation step, the internal boss feature of the blank material of the furnace bottom section is processed by adopting the following steps,
a: the diameter is 35mm, the sharpening thickness is 9mm, a 160-mesh cutter is used for carrying out rough cutting, a blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side spiral feeding mode, the radial feeding is 510mm/min, the axial feeding is 510mm/min, the lower cutting step distance is 0.1mm, and the rotating speed is 6550 r/min;
b: the second step of coarse cutting is carried out by using a cutter with the diameter of 9mm, the sharpening thickness of 9mm and 220 meshes, a blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 820mm/min, the axial feeding is 520mm/min, the lower cutting step distance is 0.1mm, and the rotating speed is 7550 r/min;
c: the diameter is 4mm, the sharpening thickness is 6mm, a 320-mesh cutter is used for finish machining, a blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, the cutter adopts an upper side spiral feeding mode, the radial feeding is 420mm/min, the axial feeding is 220mm/min, the lower cutting step distance is 0.05mm, and the rotating speed is 8550 r/min.
In the concrete implementation steps, the internal characteristics of the blank material of the bottom section of the furnace are processed by adopting the following steps,
a: the diameter is 55mm, the sharpening thickness is 9mm, a 120-mesh cutter is used for rough machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by using a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 55 revolutions per minute, the cutter adopts an upper side feeding mode, the axial feeding is 0.5mm per minute, and the rotary speed is 4550 revolutions per minute.
b: the diameter of the cutter is 80mm, the sharpening thickness of the cutter is 12mm, the cutter with 120 meshes carries out the second step of rough machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an inner cavity transverse feeding mode, and the radial feeding speed is 1mm per minute and the rotary speed is 3550 revolutions per minute.
c: the inner wall finish machining is carried out by utilizing a cutter with the diameter of 80mm, the sharpening thickness of 12mm and 320 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 20 revolutions per minute, the cutter adopts an inner cavity transverse feeding mode, the axial feeding is carried out by 1mm per minute, and the rotary speed is 3550 revolutions per minute.
d: the diameter is 65mm, the sharpening thickness is 9mm, the 220 mesh cutter is used for fine machining of the spliced sub-buckle, the blank material is adhered to a matched tool by using yellow paraffin, the tool is clamped on a rotary table by adopting a vacuum negative pressure sucker in an adsorption mode, the rotary speed of the rotary table is set to 320 revolutions per minute, the cutter adopts an inner cavity transverse feeding mode, the axial feeding is 1mm per minute, and the rotary speed is 4550 revolutions per minute.
e: the diameter is 11mm, the sharpening thickness is 6mm, a 320-mesh cutter is used for carrying out inner cavity bottom surface finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by using a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 320 revolutions per minute, the cutter adopts an upper side vertical feeding mode, axial feeding is 0.8mm/min, radial feeding is 0.8mm/min, and the rotary speed is 7550 revolutions per minute.
In a specific implementation step, the inner diameter and the outer diameter of the upper half part of the blank in the middle section are processed by adopting the following steps,
a: the diameter is 65mm, the sharpening thickness is 9mm, the inner diameter of a 220-mesh cutter is finished, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by using a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 1mm per minute, and the rotary speed is 4550 revolutions per minute.
b: the diameter is 65mm, the sharpening thickness is 9mm, the outer diameter finish machining is carried out on a 220-mesh cutter, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by using a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 1mm per minute, and the rotary speed is 4550 revolutions per minute.
c: the diameter is 65mm, the sharpening thickness is 9mm, the inner diameter of a 220-mesh cutter is used for carrying out fine machining on a radial buckle, a blank material is adhered to a matched tool by using yellow paraffin, the tool is clamped on a rotary table by adopting a vacuum negative pressure sucker in an adsorption mode, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 0.5mm per minute, and the rotary speed is 4550 revolutions per minute.
In the concrete implementation steps, the inner diameter and the outer diameter of the lower half part of the blank material of the middle section of the turn-over processing adopt the following steps,
a: the diameter is 65mm, the sharpening thickness is 9mm, the inner diameter finish machining is carried out on a 220-mesh cutter, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 1mm/min, the rotary speed is 4550 revolutions per minute, the grinding depth is stopped to the position of 10mm in the previous working procedure, and the product is prevented from being broken.
b: the diameter is 65mm, the sharpening thickness is 9mm, the outer diameter finish machining is carried out on a 220-mesh cutter, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 1mm/min, the rotary speed is 4550 revolutions per minute, the grinding depth is stopped to the position of 10mm in the previous working procedure, and the product is prevented from being broken.
c: the diameter is 65mm, the sharpening thickness is 9mm, the outer diameter sub-buckle finish machining is carried out on a 220-mesh cutter, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 0.5mm per minute, and the rotary speed is 4550 revolutions per minute.
d: the diameter is 80mm, the sharpening thickness is 11mm, a 220-mesh cutter is used for carrying out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an inner cavity transverse straight cutting mode, and the axial feeding is 0.5mm per minute, and the rotary speed is 3550 revolutions per minute.
e: the diameter is 80mm, the sharpening thickness is 11mm, a 220-mesh cutter is used for carrying out external diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an inner cavity transverse straight cutting mode, and the axial feeding is 0.5mm per minute, and the rotary speed is 3550 revolutions per minute.
In the concrete implementation steps, the upper half parts of the outer diameter and the inner diameter of the blank material of the furnace top section are processed by adopting the following steps,
a: the diameter is 65mm, the sharpening thickness is 9mm, the outer diameter finish machining is carried out on a 220-mesh cutter, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by using a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 1mm per minute, and the rotary speed is 4550 revolutions per minute.
b: the diameter of the cutter is 65mm, the sharpening thickness of the cutter is 9mm, the upper half part of the inner diameter of the cutter is finished, the blank material is adhered to a matched tool by using yellow paraffin, the tool is clamped on a rotary table by adopting a vacuum negative pressure sucker in an adsorption mode, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 1mm per minute, and the rotary speed is 4550 revolutions per minute.
In the concrete implementation steps, the process of the boss of the inner cavity of the blank material of the furnace top section adopts the following steps,
the diameter of the cutter is 7mm, the sharpening thickness of the cutter is 6mm, the boss of the inner cavity of the product is finished by a 220-mesh cutter, a blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 520mm/min, the axial feeding is 220mm/min, the lower cutting step distance is 0.05mm, and the rotating speed is 8550 r/min.
In the concrete implementation steps, the inner diameter of the lower half part of the blank material of the furnace top section is processed by adopting the following steps,
the diameter of the cutter is 65mm, the sharpening thickness of the cutter is 9mm, the upper half part of the inner diameter of the cutter is finished, the blank material is adhered to a matched tool by using yellow paraffin, the tool is clamped on a rotary table by adopting a vacuum negative pressure sucker in an adsorption mode, the rotary speed of the rotary table is set to 220 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 1mm per minute, and the rotary speed is 4550 revolutions per minute.
The processing cutters used in the invention are grinding cutters formed by mixing and bonding metal and silicon carbide.
The foregoing disclosure is illustrative of the preferred embodiments of the present invention, and is not to be construed as limiting the scope of the invention, as it is understood by those skilled in the art that all or part of the above-described embodiments may be practiced with equivalents thereof, which fall within the scope of the invention as defined by the appended claims.
Claims (10)
1. A processing method of a siliceous sealed outer tube for bearing a silicon wafer is characterized by comprising the following steps of: comprises the steps of,
s1: dividing the siliceous sealed outer tube into a furnace bottom section, a middle section and a furnace top section according to the principle of sectional processing;
s2: selecting a silicon rod with proper size, cutting out silicon wafers with corresponding lengths required by a furnace bottom section, a middle section and a furnace top section by using a silicon carbide line cutting machine, and performing rough machining on the outer diameter of the cut-out silicon wafer with the furnace bottom section, the inner diameter and the outer diameter of the cut-out silicon wafer with the middle section and the inner diameter and the outer diameter of the cut-out silicon wafer with the furnace top section by using a rolling mill or a rod drawing machine to prepare a corresponding blank with the furnace bottom section, a corresponding blank with the middle Duan Mao and a corresponding blank with the furnace top Duan Mao;
s3: respectively rough machining the furnace bottom section blank, the middle Duan Mao blank and the furnace top section blank by adopting a grinding machine;
S4: machining the blank of the furnace bottom section, the blank of the middle Duan Mao and the blank of the furnace top section by adopting a machine tool to obtain a corresponding semi-finished product of the furnace bottom section, a corresponding semi-finished product of the middle section and a corresponding semi-finished product of the furnace top section;
the method adopts the following modes when the furnace bottom section blank material is processed: processing external characteristics of a blank material of the furnace bottom section, processing internal boss characteristics of the blank material of the furnace bottom section and processing internal characteristics of the blank material of the furnace bottom section;
the following method is adopted in the middle section blank processing: processing the inner diameter and the outer diameter of the upper half part of the blank of the middle section, and turning over to process the inner diameter and the outer diameter of the lower half part of the blank of the middle section;
the method adopts the following modes when the furnace top section blank material is processed: machining the outer diameter and the upper half of the inner diameter of a furnace top section blank, machining a furnace top section blank inner cavity boss and machining the inner diameter of the lower half of the furnace top section blank;
s5: polishing steps with the diameters of more than 0.01mm on a semi-finished product of the furnace bottom section, a semi-finished product of the middle section and a semi-finished product of the furnace top section by adopting 150-200 meshes of polishing sand paper to be smooth, manually polishing and chamfering all edges without chamfer angles by 0.3mm, and eliminating tiny burrs;
s6: clamping the furnace bottom section semi-finished product, the middle section semi-finished product and the furnace top section semi-finished product on a rotary table respectively, setting the rotary table rotation speed to be 45-55 r/min, and adopting 450-500 mesh abrasive sand to perform stable moving sand blasting by utilizing a sand blasting kettle to be 45-55 mm away from the product;
S7: placing the semi-finished products of the furnace bottom section, the middle section and the furnace top section into a flower basket, putting into pure water at 90-100 ℃ for boiling and washing for 10-12 min, and wiping and washing after boiling;
s8: placing the semi-finished products of the furnace bottom section, the intermediate section and the furnace top section in a flower basket, placing the flower basket in a prepared hydrofluoric acid solution for 1-2 min, and etching to remove impurities on the surface of the product;
s9: and splicing the furnace bottom semi-finished product, the middle semi-finished product and the furnace top semi-finished product into a whole according to technical requirements, and placing the whole into a welding furnace for welding to obtain a siliceous sealed outer pipe finished product.
2. The method for processing the siliceous sealed outer tube for carrying silicon wafers according to claim 1, wherein the method comprises the steps of: in the step S3, when the furnace bottom section blank material is roughly processed, a 250-350 mesh carborundum grinding head is adopted, the rotating speed is 780-820 r/min, the lower cutting is fed with 0.05mm/min, the length is flatly ground to +/-0.05 mm, the parallelism is 0.05mm, and the flatness is 0.05mm;
when the middle section blank material is roughly processed, a 260-300 mesh carborundum grinding head is adopted, the rotating speed is 580-620 r/min, the lower cutting is fed with 0.05mm/min, the length is flatly ground to +/-0.05 mm, the parallelism is 0.05mm, and the flatness is 0.05mm;
when the rough machining is carried out on the blank material at the furnace top section, a 100-120 mesh carborundum grinding head is adopted, the rotating speed is 980-1020 r/min, the blank material is cut into 0.1mm/min, and the length is ground to +/-0.05 mm.
3. The method for processing the siliceous sealed outer tube for carrying silicon wafers according to claim 1, wherein the method comprises the steps of: in the step S4, the external characteristics of the blank material of the bottom section of the furnace are processed by adopting the following steps,
a: the diameter of the cutter is 190-210 mm, the sharpening thickness of the cutter is 8-12 mm, the cutter with 180-220 meshes is used for carrying out rough cutting, a blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 280-320 r/min, the cutter adopts a left side cutting mode, the radial feeding is 2mm/min, and the rotary speed is 1450-1550 r/min;
b: the second step of rough cutting is carried out by using a cutter with the diameter of 48-52 mm, the sharpening thickness of 7-9 mm and the granularity of 100-150 meshes, the blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary table rotating speed is set to 280-320 r/min, the cutter adopts an upper side feeding mode, the radial feeding is 0.5mm/min, the axial feeding is 1mm/min, and the rotating speed is 5450-5550 r/min;
c: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 7-9 mm, the cutter with 280-320 meshes is used for finish machining, the blank material is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 280-320 r/min, the cutter adopts an upper side feeding mode, the radial feeding is 0.1mm/min, the axial feeding is 2mm/min, and the rotary speed is 4450-4550 r/min.
4. The method for processing a siliceous sealed outer tube for supporting a silicon wafer according to claim 3, wherein:
in the step S4, the internal boss feature of the blank material of the furnace bottom section is processed by adopting the following steps,
a: the diameter of the cutter is 25-35 mm, the sharpening thickness of the cutter is 7-9 mm, the cutter with 140-160 meshes is used for carrying out rough cutting, a blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 490-510 mm/min, the axial feeding is 490-510 mm/min, the lower cutting step distance is 0.1mm, and the rotating speed is 6450-6550 r/min;
b: the second step of rough cutting is carried out by using a cutter with the diameter of 7-9 mm, the sharpening thickness of 7-9 mm and 180-220 meshes, the blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 780-820 mm/min, the axial feeding is 480-520 mm/min, the lower cutting step distance is 0.1mm, and the rotating speed is 7450-7550 r/min;
c: the method comprises the steps of carrying out finish machining by using a cutter with the diameter of 3-4 mm, the sharpening thickness of 5-6 mm and the granularity of 280-320 meshes, adhering a blank material to a tool and a quartz plate by adopting yellow paraffin, clamping the blank material on a working platform, radially feeding the cutter by adopting an upper side spiral feeding mode, axially feeding the cutter by 380-420 mm/min, axially feeding the cutter by 180-220 mm/min, and carrying out lower cutting step distance by 0.05mm at the rotating speed of 8450-8550 r/min.
5. The method for processing the siliceous sealed outer tube for carrying a silicon wafer according to claim 4, wherein the method comprises the steps of: in the step S4, the internal characteristics of the blank material of the bottom section of the furnace are processed by adopting the following steps,
a: rough machining is carried out by utilizing a cutter with the diameter of 45-55 mm, the sharpening thickness of 7-9 mm and the mesh of 100-120, blank materials are adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to be 48-55 r/min, the cutter adopts an upper side feeding mode, the axial feeding is carried out by 0.5mm/min, and the rotary speed is 4450-4550 r/min;
b: the second step of rough machining is carried out by utilizing a cutter with the diameter of 70-80 mm, the sharpening thickness of 9-12 mm and the mesh of 100-120, blank materials are adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an inner cavity transverse feeding mode, the radial feeding is carried out for 1mm/min, and the rotary speed is 3450-3550 r/min;
c: the inner wall finish machining is carried out by utilizing a cutter with the diameter of 70-80 mm, the sharpening thickness of 9-12 mm and 280-320 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary table rotating speed is set to 180-220 r/min, the cutter adopts an inner cavity transverse feeding mode, the axial feeding is carried out for 1mm/min, and the rotating speed is 3450-3550 r/min;
d: the method comprises the steps of carrying out fine machining on a spliced sub-buckle by using a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and the 180-220 meshes, adhering blank materials to a matched tool by using yellow paraffin, carrying out adsorption clamping on the tool by using a vacuum negative pressure sucker, setting the rotating speed of the turntable to 280-320 revolutions per minute, axially feeding the cutter by adopting an inner cavity transverse feeding mode, and carrying out rotational speed 4450-4550 revolutions per minute;
e: the inner cavity bottom surface finish machining is carried out by utilizing a cutter with the diameter of 9-11 mm, the sharpening thickness of 5-6 mm and 280-320 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 280-320 revolutions per minute, the cutter adopts an upper side vertical feeding mode, the axial feeding is 0.8mm/min, the radial feeding is 0.8mm/min, and the rotary speed is 74550-7550 revolutions per minute.
6. The method for processing the siliceous sealed outer tube for carrying silicon wafers according to claim 1, wherein the method comprises the steps of: in the step S4, the inner diameter and the outer diameter of the upper half part of the blank in the middle section are processed by adopting the following steps,
a: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 7-9 mm, the cutter with 180-220 meshes carries out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out for 1mm/min, and the rotary speed is 4450-4550 r/min;
b: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter is axially fed by adopting an upper side vertical feeding mode, and the rotary speed is 4450-4550 r/min;
c: the inner diameter of the cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and 180-220 meshes is utilized for carrying out inner diameter radial buckling finish machining, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out by 0.5mm/min, and the rotary speed is 4450-4550 r/min.
7. The method for processing the siliceous sealed outer tube for carrying silicon wafers according to claim 6, wherein the method comprises the steps of: in the step S4, the inner diameter and the outer diameter of the lower half part of the blank material of the middle section of the turn-over processing adopt the following steps,
a: the diameter of the cutter is 55-65 mm, the sharpening thickness is 7-9 mm, the cutter with 180-220 meshes is used for carrying out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is clamped on a rotary table by adopting a vacuum negative pressure sucker in an adsorption manner, the rotary speed of the rotary table is set to be 180-220 r/min, the cutter adopts an upper side vertical feeding mode to axially feed for 1mm/min, the rotary speed is 4450-4550 r/min, the grinding depth is stopped to the position of 10-11 mm in the last working procedure, and the product is prevented from being broken;
b: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode to axially feed for 1mm/min, the rotary speed is 4450-4550 r/min, the grinding depth is stopped to the position of 10-11 mm of the previous working procedure, and the product is prevented from being broken;
c: the outer diameter sub-buckle finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 7-9 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out by 0.5mm/min, and the rotary speed is 4450-4550 r/min;
d: the diameter of the cutter is 70-80 mm, the sharpening thickness of the cutter is 9-11 mm, the cutter with 180-220 meshes carries out inner diameter finish machining, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 revolutions per minute, the cutter adopts an inner cavity transverse straight cutting mode, the axial feeding is carried out for 0.5mm per minute, and the rotary speed is 3450-3550 revolutions per minute;
e: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 70-80 mm, the sharpening thickness of 9-11 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 revolutions per minute, the cutter adopts an inner cavity transverse straight cutting mode, the axial feeding is carried out by 0.5mm per minute, and the rotary speed is 3450-3550 revolutions per minute.
8. The method for processing the siliceous sealed outer tube for carrying silicon wafers according to claim 1, wherein the method comprises the steps of: in the step S4, the upper half parts of the outer diameter and the inner diameter of the blank material of the furnace top section are processed by adopting the following steps,
a: the outer diameter finish machining is carried out by utilizing a cutter with the diameter of 55-65 mm, the sharpening thickness of 8-9 mm and the diameter of 180-220 meshes, a blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter is axially fed by adopting an upper side vertical feeding mode, and the rotary speed is 4450-4550 r/min;
b: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 8-9 mm, the cutter with 180-220 meshes carries out finish machining on the upper half part of the inner diameter, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out for 1mm/min, and the rotary speed is 4450-4550 r/min.
9. The method for processing the siliceous sealed outer tube for carrying a silicon wafer according to claim 8, wherein the method comprises the steps of: in the step S4, the process of processing the boss of the inner cavity of the blank material of the furnace top section adopts the following steps,
a: the boss of the inner cavity of the product is finely machined by using a cutter with the diameter of 6-7 mm, the sharpening thickness of 5-6 mm and 180-220 meshes, the blank material is stuck on a tool and a quartz plate by adopting yellow paraffin, and is clamped on a working platform, the cutter adopts an upper side screw feeding mode, the radial feeding is 480-520 mm/min, the axial feeding is 180-220 mm/min, the lower cutting step distance is 0.05mm, and the rotating speed is 8450-8550 r/min.
10. The method for processing the siliceous sealed outer tube for carrying a silicon wafer according to claim 9, wherein the method comprises the steps of: in the step S4, the inner diameter of the lower half part of the blank material of the furnace top section is processed by adopting the following steps,
a: the diameter of the cutter is 55-65 mm, the sharpening thickness of the cutter is 8-9 mm, the cutter with 180-220 meshes carries out finish machining on the upper half part of the inner diameter, the blank material is adhered to a matched tool by using yellow paraffin, the tool is adsorbed and clamped on a rotary table by adopting a vacuum negative pressure sucker, the rotary speed of the rotary table is set to 180-220 r/min, the cutter adopts an upper side vertical feeding mode, the axial feeding is carried out for 1mm/min, and the rotary speed is 4450-4550 r/min.
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