CN117270310A - Method, apparatus and medium for optimizing graphic screening and DRC optimization - Google Patents
Method, apparatus and medium for optimizing graphic screening and DRC optimization Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 88
- 238000012216 screening Methods 0.000 title claims abstract description 80
- 238000005457 optimization Methods 0.000 title claims abstract description 26
- 238000004364 calculation method Methods 0.000 claims description 61
- 238000004590 computer program Methods 0.000 claims description 19
- 230000011218 segmentation Effects 0.000 claims description 12
- 238000003860 storage Methods 0.000 claims description 12
- 230000010354 integration Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 abstract description 4
- 238000001259 photo etching Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 12
- 238000001914 filtration Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012937 correction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000000205 computational method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
- G03F7/70441—Optical proximity correction [OPC]
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D10/00—Energy efficient computing, e.g. low power processors, power management or thermal management
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The invention relates to the technical field of photoetching mask pattern screening detection, in particular to a method, a device and a medium for optimizing pattern screening and DRC optimization. The method for optimizing the graphic screening provided by the invention comprises the following steps: acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames; recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data; and receiving a specific graph selection instruction, screening the segmented specific graph according to the second graph information data, and forming third graph information data. By using the method, the specific graph segmented by the boundary of the graph frame can be completely and accurately screened, and the problems of poor and incomplete graph screening precision in the prior art are solved.
Description
[ field of technology ]
The invention relates to the technical field of photoetching mask pattern screening detection, in particular to a method, a device and a medium for optimizing pattern screening and DRC optimization.
[ background Art ]
Photolithography is a key step in the fabrication of semiconductor devices and large scale integrated circuits that requires the transfer of patterns on a reticle onto a wafer. However, as feature sizes continue to shrink, optical proximity effects due to light diffraction become more pronounced, and the problem arises that the pattern on the reticle cannot be accurately transferred to the wafer. In order to solve the problem, computational lithography has been developed, which corrects the pattern on the mask by a computational method to make the pattern projected onto the photoresist meet the design requirements as much as possible.
In computational lithography, design Rule Check (DRC) tools are used to process complex geometries. For example, it is necessary to select corresponding polygons or boundaries in the layout in a targeted manner for clipping. At present, as the integration level of the layout is continuously improved, the graphics are more and more dense, and the limited computing resources cannot be directly applied to the whole layout.
Based on the limited computational resources, there is one way to: the whole layout is divided into different graphic frames, and then the graphic frames are distributed to different computing resources for computing. However, in this method, division of the graphic frame also causes division of the graphic, and when the divided graphic is calculated on a separate computing resource, a complete operation result cannot be obtained, and a problem of calculating the boundary of the graphic frame also occurs. Currently, in order to obtain better calculation results at the boundary of the graphic frame, the calculation of the corresponding graphic frame takes into account the expansion of additional areas to find the complete graphic that is segmented. However, by properly expanding the calculation range, more graphic information can be obtained to perfect the final result, and when the graphic at the boundary of the graphic frame is too large, the accuracy of the final result is still not guaranteed.
[ invention ]
In order to solve the problems of poor and incomplete existing graphic screening precision, the invention provides a method, a device and a medium for optimizing graphic screening and DRC optimization.
The invention provides the following technical scheme for solving the technical problems:
a method of optimizing graphical screening, comprising the steps of:
s1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
s2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
s3, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data, and forming third graph information data.
Preferably, the pattern frame is divided in such a manner that the mask layout is divided into a plurality of square pattern frames along a first direction and a second direction, and the first direction and the second direction are perpendicular to each other.
Preferably, the boundary information includes a value of each side length of the graphic frame, a position coordinate of each side length in the mask layout, and a vertex position of the graphic frame.
Preferably, the second graphic information data includes location information of the graphic and specific location information where the graphic is divided.
The invention also provides a technical scheme for solving the technical problems as follows: a computer readable storage medium storing a computer program which when executed performs a method of optimizing graphical screening as described above.
The invention also provides the following technical scheme for solving the technical problems: a DRC optimization method comprises the method for optimizing graph screening.
Preferably, the DRC optimization method includes the steps of:
t1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
t2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
t3, calculating according to the first graphic information data to obtain a first calculation result;
t4, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data and forming third graph information data;
t5, calculating according to the third graphic information data to obtain a second calculation result;
and T6, integrating the first calculation result and the second calculation result.
The invention provides another technical scheme for solving the technical problems as follows: an apparatus for optimizing a method of graphical screening, comprising: the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
and the pattern screening module is used for receiving a specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data.
The invention also provides a technical scheme for solving the technical problems as follows: an apparatus of a DRC optimization method, comprising:
the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
the first calculation module is used for carrying out operation according to the first graphic information data to obtain a first calculation result;
the pattern screening module is used for receiving a specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data;
the second calculation module is used for carrying out operation according to the third graphic information data to obtain a second calculation result;
and the integration module is used for integrating the first calculation result and the second calculation result.
The invention also provides a technical scheme for solving the technical problems as follows: a computer readable storage medium storing a computer program which when executed implements a DRC optimization method as described above.
Compared with the prior art, the method, the device and the medium for optimizing the graphic screening and the DRC optimization have the following beneficial effects:
1. in the first embodiment of the invention, after the divided graphic information is obtained by marking the boundary information of all the graphic frames and combining the graphic information in the recorded graphic frames, the divided specific graphics are screened out. By using the method, the specific graph segmented by the boundary of the graph frame can be completely and accurately screened, and the problems of poor and incomplete graph screening precision in the prior art are solved.
2. The pattern frame provided in the first embodiment of the present invention is divided into a plurality of square pattern frames along a first direction and a second direction, where the first direction and the second direction are perpendicular to each other. The mask layout is divided into the square graphic frames along the first direction and the second direction which are mutually perpendicular, so that the divided graphic frames are regular and uniform, the boundaries of the graphic frames are mutually perpendicular edges, the boundary information of the graphic frames is recorded conveniently and clearly, and the subsequent processing of intersection data of the boundaries and the graphics is simple and clear.
3. The boundary information provided in the first embodiment of the present invention includes the value of each side length of the graphic frame, the position coordinates of each side length in the mask layout, and the vertex position of the graphic frame. By recording the length value of each side of the graphic frame, the position coordinates of each side in the mask layout and the data of the vertex positions of the graphic frame, the position information of different graphic frames and the detailed data of the boundary information of each side of the graphic frame can be accurately obtained, and when the boundary segments the graphics in the graphic frame, the position information of the segmented graphics can be rapidly and accurately obtained so as to position the position information of the complete graphics of the graphics.
4. The second graphic information data provided in the first embodiment of the present invention includes the position information of the graphic and the specific position information where the graphic is divided. The method can judge whether the graph is segmented by the boundary or not by acquiring the position information of the graph and the specific position information of the segmented position of the graph, and can acquire the specific position information of the segmented graph and the graph information on two sides of the segmented boundary.
5. The computer readable storage medium provided in the first embodiment of the present invention stores a computer program, and when the computer program is executed, the method for optimizing the graphic filtering has the same advantages as the method for optimizing the graphic filtering, and will not be described herein.
6. The method for optimizing DRC provided in the second embodiment of the invention comprises the method for optimizing graph screening. By adding the optimized graph screening method into the DRC processing process, the accuracy of the final output data of the DRC is greatly improved, and the efficiency of processing the graph data is also accelerated.
7. The DRC optimization method provided in the second embodiment of the present invention includes the steps of:
t1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
t2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
t3, calculating according to the first graphic information data to obtain a first calculation result;
t4, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data and forming third graph information data;
t5, calculating according to the third graphic information data to obtain a second calculation result;
and T6, integrating the first calculation result and the second calculation result.
By separately collecting and calculating the graphic data divided by the boundary of the graphic frame and the graphic data not divided, the operation speed and the screening accuracy can be improved, the forward and backward signal exchange is more flexible before and after the steps, the parallel data processing can be realized, and the calculation after the graphic is screened occupies less resources.
8. The first embodiment of the present invention also provides an apparatus for optimizing a method for graphic filtering, including: the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
and the pattern screening module is used for receiving the specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data.
The device has the same beneficial effects as the method for optimizing the graphic screening, and the description is omitted here.
9. The second embodiment of the present invention also provides an apparatus for DRC optimization method, including:
the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
the first calculation module is used for carrying out operation according to the first graphic information data to obtain a first calculation result;
the pattern screening module is used for receiving a specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data;
the second calculation module is used for carrying out operation according to the third graphic information data to obtain a second calculation result;
and the integration module is used for integrating the first calculation result and the second calculation result.
The apparatus has the same advantageous effects as the above DRC optimization method, and will not be described here.
10. In a second embodiment of the present invention, a computer readable storage medium is further provided, where the computer readable storage medium stores a computer program, and when the computer program is executed, the method for optimizing DRC as described above is implemented, which has the same advantages as the method for optimizing DRC described above, and will not be described herein.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a flowchart of a method for optimizing graphic filtering according to a first embodiment of the present invention.
Fig. 2 is a schematic diagram of a prior art graphical screening method.
Fig. 3 is a schematic diagram of a method for optimizing graphic screening according to a first embodiment of the present invention.
Fig. 4 is a flowchart of a DRC optimization method provided by the second embodiment of the present invention.
The attached drawings are used for identifying and describing:
1. and (5) expanding and selecting a frame.
[ detailed description ] of the invention
For the purpose of making the technical solution and advantages of the present invention more apparent, the present invention will be further described in detail below with reference to the accompanying drawings and examples of implementation. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
First embodiment
Referring to fig. 1, a first embodiment of the present invention provides a method for optimizing graphic filtering, which includes the following steps:
s1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
s2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
s3, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data, and forming third graph information data.
In the first embodiment of the invention, after the divided graphic information is obtained by marking the boundary information of all the graphic frames and combining the graphic information in the recorded graphic frames, the divided specific graphics are screened out. By using the method, the specific graph segmented by the boundary of the graph frame can be completely and accurately screened, the problems of poor and incomplete graph screening precision in the prior art are solved, a perfect graph selection result is obtained, and the subsequent layout correction is facilitated.
Referring to fig. 2, after the prior art graph screening method is divided into a plurality of graph frames, the region is properly expanded, that is, more graph information is obtained according to the expanding frame 1 to find the divided complete graph, but the accuracy of the result cannot be guaranteed in this way. Taking fig. 2 as an example, if a rectangle is to be selected when DRC is performed, when the graphic C, D, F is considered to be a rectangle in the calculation area within the range in the expansion frame 1, the division graphic in the expansion frame 1 and the division graphic in the graphic frame are both rectangular even if the complete graphic thereof is not a rectangle, so that the graphic D is also output when the expansion frame 1 is selected, and in fact the complete graphic of the graphic D is an i-type and is not a rectangle, whereby inaccuracy of the related art can be seen.
Referring to fig. 3, in the dividing manner of the graphic frame provided in the first embodiment of the present invention, the dividing situation is determined by recording the boundary information of the graphic frame and the graphic information divided by the boundary information of the graphic frame, then the graphic information is compared in the whole layout, the graphic shape of the divided graphic in the whole layout is directly found, and then the comparison program is used to determine whether the specific graphic instruction to be selected and output is met. As shown in fig. 3, taking a central graphic frame as an example, graphic information in the graphic frame and boundary information of the graphic frame are recorded in first graphic information data; and the information data of the divided pattern C, D, E, F is recorded in the second pattern information data; after receiving the instruction of selecting the rectangle, screening the graph C according to the second graph information data, so that the information data of the graph C is recorded in the third graph information data, and finally the third graph information data is output to perform the follow-up layout graph optimization operation.
Referring to fig. 3, in a first embodiment of the present invention, a pattern frame is divided into a plurality of square pattern frames along a first direction and a second direction, wherein the first direction and the second direction are perpendicular to each other. In the specific embodiment, as shown in the figure, the whole mask layout is divided into 3×3 square graphic frames, and boundaries of the graphic frames are marked by dotted lines in the figure. The mask layout is divided into the square graphic frames along the first direction and the second direction which are mutually perpendicular, so that the divided graphic frames are regular and uniform, the boundaries of the graphic frames are mutually perpendicular edges, the boundary information of the graphic frames is recorded conveniently and clearly, and the subsequent processing of intersection data of the boundaries and the graphics is simple and clear.
Further, the boundary information includes a value of each side length of the graphics frame, a position coordinate where each side length is in the mask layout, and a graphics frame vertex position. By recording the length value of each side of the graphic frame, the position coordinates of each side in the mask layout and the data of the vertex positions of the graphic frame, the position information of different graphic frames and the detailed data of the boundary information of each side of the graphic frame can be accurately obtained, and when the boundary segments the graphics in the graphic frame, the position information of the segmented graphics can be rapidly and accurately obtained so as to position the position information of the complete graphics of the graphics.
Further, the second graphic information data includes position information of the graphic and specific position information where the graphic is divided. The specific implementation mode is as follows: and establishing a rectangular coordinate system by taking one vertex of the mask layout as an origin point, and acquiring a boundary coordinate range and a graph coordinate. The method can judge whether the graph is segmented by the boundary or not by acquiring the position information of the graph and the specific position information of the segmented position of the graph, and can acquire the specific position information of the segmented graph and the graph information on two sides of the segmented boundary.
Further, the computer readable storage medium provided in the first embodiment of the present invention stores a computer program, and the computer program when executed implements the method for optimizing graphic screening as described above, which has the same advantages as the method for optimizing graphic screening described above, and is not described herein.
Further, in the first embodiment of the present invention, there is also provided an apparatus for optimizing a method for graphic filtering, including: the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
and the pattern screening module is used for receiving the specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data.
The device has the same beneficial effects as the method for optimizing the graphic screening, and the description is omitted here.
Second embodiment
The method for optimizing DRC provided in the second embodiment of the present invention includes the method for optimizing graphic screening provided in the first embodiment. By adding the optimized graph screening method into the DRC processing process, the accuracy of the final output data of the DRC is greatly improved, and the efficiency of processing the graph data is also accelerated.
The specific implementation mode is as follows: assuming that the shape of the graphic to be screened is rectangular, as shown in fig. 2, firstly, the non-segmented graphic information in the middle graphic frame is acquired, two complete graphics a and B can be obtained, the application program is used for detecting that the obtained graphic a is rectangular, but the B is not, so that the a is screened and output as first graphic information data, the non-meeting screening limit is not processed in the graphic frame of the graphic E, the boundary information and the graphic segmentation information are combined to form second graphic information data for the portions of the graphic C, D and the graphic F segmented in the graphic frame, the search range of the graphic frame is enlarged through the second graphic information data, all the graphic frames containing the segmented graphic are found, the complete segmented graphic is obtained, the graphic C can be obtained as the complete rectangle, and the complete graphic F is not rectangular, so that the graphic C graphic information data is screened and output as third graphic information data, and finally, the first graphic information data and the third graphic information data are subjected to subsequent DRC detection calculation through the calculation unit.
Referring to fig. 3, the DRC optimization method according to the second embodiment of the present invention includes the following steps:
t1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
t2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
t3, calculating according to the first graphic information data to obtain a first calculation result;
t4, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data and forming third graph information data;
t5, calculating according to the third graphic information data to obtain a second calculation result;
and T6, integrating the first calculation result and the second calculation result.
In a specific implementation, the order of acquiring the graphic information data can be exchanged or parallel, and the first graphic information data of the complete graphic in the graphic frame can be acquired first, or the second graphic information data of the segmented graphic segmented by the boundary line can be acquired directly, so that the complete graphic is matched. The allocation of the computing resource is that a single graphic frame corresponds to a computing unit, and when the complete graphics of the split graphics need to be matched, matching information needs to be searched in the whole mask layout database, namely, the data of the peripheral graphic frames need to be combined.
By separately collecting and calculating the graphic data divided by the boundary of the graphic frame and the graphic data not divided, the operation speed and the screening accuracy can be improved, the forward and backward signal exchange is more flexible before and after the steps, the parallel data processing can be realized, and the calculation after the graphic is screened occupies less resources.
Further, in a second embodiment of the present invention, there is also provided an apparatus for DRC optimization method, including:
the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
the first calculation module is used for carrying out operation according to the first graphic information data to obtain a first calculation result;
the pattern screening module is used for receiving a specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data;
the second calculation module is used for carrying out operation according to the third graphic information data to obtain a second calculation result;
and the integration module is used for integrating the first calculation result and the second calculation result.
The apparatus has the same advantageous effects as the above DRC optimization method, and will not be described here.
Further, in the second embodiment of the present invention, a computer readable storage medium is provided, where a computer program is stored, and when the computer program is executed, the method for optimizing DRC as described above is implemented, which has the same advantages as the method for optimizing DRC described above, and will not be described herein.
In the embodiments provided herein, it should be understood that "B corresponding to a" means that B is associated with a, from which B can be determined. It should also be understood that determining B from a does not mean determining B from a alone, but may also determine B from a and/or other information.
It should be appreciated that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. Those skilled in the art will also appreciate that the embodiments described in the specification are alternative embodiments and that the acts and modules referred to are not necessarily required for the present invention.
In various embodiments of the present invention, it should be understood that the sequence numbers of the foregoing processes do not imply that the execution sequences of the processes should be determined by the functions and internal logic of the processes, and should not be construed as limiting the implementation of the embodiments of the present invention.
The flowcharts and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present application. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, with the determination being made based upon the functionality involved. It will be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
Compared with the prior art, the method, the device and the medium for optimizing the graphic screening and the DRC optimization have the following beneficial effects:
1. the method for optimizing graph screening provided by the first embodiment of the invention comprises the following steps:
s1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
s2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
s3, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data, and forming third graph information data.
In the first embodiment of the invention, after the divided graphic information is obtained by marking the boundary information of all the graphic frames and combining the graphic information in the recorded graphic frames, the divided specific graphics are screened out. By using the method, the specific graph segmented by the boundary of the graph frame can be completely and accurately screened, the problems of poor and incomplete graph screening precision in the prior art are solved, a perfect graph selection result is obtained, and the subsequent layout correction is facilitated.
2. The pattern frame provided in the first embodiment of the present invention is divided into a plurality of square pattern frames along a first direction and a second direction, where the first direction and the second direction are perpendicular to each other. In the specific embodiment, as shown in the figure, the whole mask layout is divided into 3×3 square graphic frames, and boundaries of the graphic frames are marked by dotted lines in the figure. The mask layout is divided into the square graphic frames along the first direction and the second direction which are mutually perpendicular, so that the divided graphic frames are regular and uniform, the boundaries of the graphic frames are mutually perpendicular edges, the boundary information of the graphic frames is recorded conveniently and clearly, and the subsequent processing of intersection data of the boundaries and the graphics is simple and clear.
3. The boundary information provided by the first embodiment of the invention comprises the length value of each side of the graphic frame, the position coordinates of each side in the mask layout and the vertex position of the graphic frame. By recording the length value of each side of the graphic frame, the position coordinates of each side in the mask layout and the data of the vertex positions of the graphic frame, the position information of different graphic frames and the detailed data of the boundary information of each side of the graphic frame can be accurately obtained, and when the boundary segments the graphics in the graphic frame, the position information of the segmented graphics can be rapidly and accurately obtained so as to position the position information of the complete graphics of the graphics.
4. The second graphic information data provided in the first embodiment of the present invention includes the position information of the graphic and the specific position information where the graphic is divided. The specific implementation mode is as follows: and establishing a rectangular coordinate system by taking one vertex of the mask layout as an origin point, and acquiring a boundary coordinate range and a graph coordinate. The method can judge whether the graph is segmented by the boundary or not by acquiring the position information of the graph and the specific position information of the segmented position of the graph, and can acquire the specific position information of the segmented graph and the graph information on two sides of the segmented boundary.
5. The first embodiment of the present invention further provides a computer readable storage medium, where a computer program is stored, and when the computer program is executed, the method for optimizing graphic screening has the same advantages as the method for optimizing graphic screening, and is not described herein.
6. The method for optimizing DRC provided in the second embodiment of the invention comprises the method for optimizing graph screening. The specific implementation mode is as follows: assuming that the shape of the graphic to be screened is rectangular, as shown in fig. 2, firstly, the non-segmented graphic information in the middle graphic frame is acquired, two complete graphics a and B can be obtained, the application program is used for detecting that the a is rectangular, but the B is not, so that the a is screened and output as first graphic information data, the non-meeting screening limit is not processed in the graphic frame, the boundary information and the graphic segmentation information are combined to form second graphic information data for the portions of the graphics C, D and F segmented in the graphic frame by boundary lines, the search range of the graphic frame is enlarged by the second graphic information data, all the graphic frames containing the segmented graphics are found, the complete segmented graphics are obtained, the graphics C and D can be obtained as complete rectangles, and the complete graphics F is not rectangular, so that the graphic information data of the graphics C and the graphic D are screened and output as third graphic information data, and finally, the first graphic information data and the third graphic information data are subjected to subsequent detection calculation by the calculation unit. By adding the optimized graph screening method into the DRC processing process, the accuracy of the final output data of the DRC is greatly improved, and the efficiency of processing the graph data is also accelerated.
7. The DRC optimization method provided in the second embodiment of the present invention includes the steps of:
t1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
t2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
t3, calculating according to the first graphic information data to obtain a first calculation result;
t4, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data and forming third graph information data;
t5, calculating according to the third graphic information data to obtain a second calculation result;
and T6, integrating the first calculation result and the second calculation result.
By separately collecting and calculating the graphic data divided by the boundary of the graphic frame and the graphic data not divided, the operation speed and the screening accuracy can be improved, the forward and backward signal exchange is more flexible before and after the steps, the parallel data processing can be realized, and the calculation after the graphic is screened occupies less resources.
8. The first embodiment of the present invention also provides an apparatus for optimizing a method for graphic filtering, including: the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
and the pattern screening module is used for receiving the specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data.
The device has the same beneficial effects as the method for optimizing the graphic screening, and the description is omitted here.
9. The second embodiment of the present invention also provides an apparatus for DRC optimization method, including:
the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
the first calculation module is used for carrying out operation according to the first graphic information data to obtain a first calculation result;
the pattern screening module is used for receiving a specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data;
the second calculation module is used for carrying out operation according to the third graphic information data to obtain a second calculation result;
and the integration module is used for integrating the first calculation result and the second calculation result.
The apparatus has the same advantageous effects as the above DRC optimization method, and will not be described here.
10. In a second embodiment of the present invention, a computer readable storage medium is further provided, where the computer readable storage medium stores a computer program, and when the computer program is executed, the method for optimizing DRC as described above is implemented, which has the same advantages as the method for optimizing DRC described above, and will not be described herein.
The foregoing has described in detail a method, apparatus and medium for optimizing graphical screening and DRC optimization disclosed in embodiments of the present invention, and specific examples have been applied herein to illustrate the principles and embodiments of the present invention, the description of the foregoing examples being only for the purpose of aiding in the understanding of the method and core concept of the present invention; meanwhile, as for those skilled in the art, according to the idea of the present invention, there are changes in the specific embodiments and the application scope, and in summary, the present disclosure should not be construed as limiting the present invention, and any modifications, equivalent substitutions and improvements made within the principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method for optimizing graphical screening, comprising the steps of:
s1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
s2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
s3, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data, and forming third graph information data.
2. The method for optimizing graphical screening of claim 1, wherein: the pattern frame is divided in such a manner that the mask layout is divided into a plurality of square pattern frames along a first direction and a second direction, and the first direction and the second direction are perpendicular to each other.
3. The method for optimizing graphical screening of claim 1, wherein: the boundary information comprises the length value of each side of the graphic frame, the position coordinates of each side in the mask layout and the vertex position of the graphic frame.
4. The method for optimizing graphical screening of claim 1, wherein: the second graphic information data includes position information of the graphic and specific position information where the graphic is divided.
5. A method of optimizing DRC comprising the method of optimizing graphic screening according to claim 1.
6. The DRC optimization method according to claim 5, comprising the steps of:
t1, acquiring a complete mask layout, dividing the complete mask layout into a plurality of graphic frames, and marking boundary information of all the graphic frames;
t2, recording graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
t3, calculating according to the first graphic information data to obtain a first calculation result;
t4, receiving a specific graph selection instruction, screening out the segmented specific graph according to the second graph information data and forming third graph information data;
t5, calculating according to the third graphic information data to obtain a second calculation result;
and T6, integrating the first calculation result and the second calculation result.
7. An apparatus for optimizing a method of graphical screening, comprising: the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
and the pattern screening module is used for receiving a specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data.
8. An apparatus for a DRC optimization method, comprising:
the segmentation module is used for dividing the complete mask layout into a plurality of graphic frames and marking boundary information of all the graphic frames;
the information recording module is used for recording the graphic information in the graphic frame to form first graphic information data; recording the divided graphic information according to the marked boundary information and the first graphic information data to form second graphic information data;
the first calculation module is used for carrying out operation according to the first graphic information data to obtain a first calculation result;
the pattern screening module is used for receiving a specific pattern selection instruction, screening the segmented specific pattern according to the second pattern information data and forming third pattern information data;
the second calculation module is used for carrying out operation according to the third graphic information data to obtain a second calculation result;
and the integration module is used for integrating the first calculation result and the second calculation result.
9. A computer-readable storage medium storing a computer program, characterized in that: a computer program when executed implements a method of optimizing graphical screening as claimed in any one of claims 1-4.
10. A computer-readable storage medium storing a computer program, characterized in that: the computer program when executed implements the DRC optimization method according to claims 7 and 8.
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| CN202311206428.7A CN117270310A (en) | 2023-09-18 | 2023-09-18 | Method, apparatus and medium for optimizing graphic screening and DRC optimization |
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| CN202311206428.7A CN117270310A (en) | 2023-09-18 | 2023-09-18 | Method, apparatus and medium for optimizing graphic screening and DRC optimization |
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