CN117268576A - MEMS-based temperature sensor circuit - Google Patents
MEMS-based temperature sensor circuit Download PDFInfo
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- CN117268576A CN117268576A CN202311235739.6A CN202311235739A CN117268576A CN 117268576 A CN117268576 A CN 117268576A CN 202311235739 A CN202311235739 A CN 202311235739A CN 117268576 A CN117268576 A CN 117268576A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
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Abstract
The invention relates to a temperature sensor circuit based on MEMS, which comprises two MEMS oscillating circuits, a mixer circuit, a difference frequency temperature sensing circuit and a temperature coding circuit. The MEMS oscillation circuit amplifies weak oscillation signals of the MEMS resonator by using the driving circuit. The mixer circuit performs difference frequency processing on output signals of the two MEMS oscillating circuits and outputs corresponding difference frequency signals. The difference frequency temperature sensing circuit processes the difference frequency signal by using a sensitization quantizer and a sensitization loop, extracts current temperature information and outputs a digital temperature code corresponding to the current temperature. The circuit improves the resolution of the whole temperature sensing scheme to the micro Kelvin level, and has the advantages of high temperature sensing resolution, small error, low circuit complexity and the like.
Description
Technical Field
The invention relates to a temperature sensor circuit based on MEMS and application thereof, belonging to the field of circuits and systems, in particular to the technical field of radio frequency integrated circuits/sensors of microelectronics and solid-state electronics.
Background
In recent years, the fields of 5G communication, artificial intelligence, aerospace, national defense equipment and the like have provided requirements for temperature sensors, such as higher precision, higher temperature resolution, stronger impact resistance, smaller volume, power consumption and the like. Currently, mainstream temperature sensor products manufactured entirely by means of CMOS processes have technical bottlenecks that are difficult to overcome in meeting these performance requirements due to limitations in material properties and manufacturing techniques.
The temperature sensor based on the MEMS resonator is manufactured by integrating the MEMS resonator with a CMOS circuit, which is strong in robustness, and is an update of the traditional temperature sensor. The high-precision temperature sensor based on the MEMS resonator is obviously superior to the traditional temperature sensor in the aspects of volume, power consumption, frequency stability, average fault-free time, vibration impact resistance and reliability. On the other hand, in the application fields of temperature compensation clocks, narrow linewidth lasers and the like, the temperature sensing precision and resolution of a temperature sensor based on the MEMS resonator can influence the stability of the output frequency of the temperature compensation clocks and reduce the coherence of the narrow linewidth lasers. Therefore, improving the accuracy and resolution of temperature sensors is an important development direction of MEMS-based temperature compensated crystal oscillator and narrow linewidth lasers
The Sanxingelectronic corporation applied for a patent related to the present invention, the patent number is: CN110243485B (CMOS temperature sensor). The CMOS temperature sensor in this patent includes a bandgap reference circuit, a reference voltage generator, and a temperature information voltage generator. The bandgap reference circuit generates a first current proportional to temperature, and copies the first current using the reference voltage generator, outputs a reference voltage generated using the first voltage and the copied first current, and finally copies the first current and outputs a temperature information voltage proportional to temperature by the temperature information voltage generator. The temperature sensor is low in temperature information quantization precision and is used for performing digital coding of temperature information. The forty-eighth institute of electronic technology in China applies for a patent related to the invention, and the patent number is as follows: CN109632118B (a CMOS temperature sensing circuit and MEMS temperature sensor system). The MEMS temperature sensor system comprises a temperature sensor and a CMOS temperature sensing circuit, wherein the temperature sensor is connected with the CMOS temperature sensing circuit and is used for generating a current signal changing along with temperature, and the CMOS temperature sensing circuit is used for receiving the current signal and generating a duty ratio signal proportional to the temperature signal. The MEMS temperature sensor system uses a duty ratio signal proportional to a temperature signal to represent the actual temperature, the temperature quantization precision is easily influenced by the threshold voltage and the process deviation of a comparator, and the quantization precision is low. The university of Zhejiang applies for a patent related to the invention, the patent number is: CN115524531a (a full CMOS temperature and voltage sensor based on leakage current). The oscillator module in this patent includes a temperature-sensing oscillator, a reference oscillator, and a voltage-sensing oscillator. The output signals of the oscillator module are counted and processed through a counter of the digital part, and finally the counted values are received through a processor to obtain temperature and voltage information. The output frequency of the oscillating circuit is easily influenced by environmental factors, the oscillating circuit is not provided with any frequency compensation and correction module, and the temperature detection is completely dependent on the performances of a processor and a counter, so that the improvement of the precision and the resolution of the temperature sensor is limited.
In summary, the conventional temperature sensor circuit has low temperature detection precision and resolution, and cannot meet the application requirements of modern high-stability temperature compensation crystal oscillator and narrow linewidth lasers at millikelvin level.
Disclosure of Invention
The invention aims to: the invention aims to provide a temperature sensor based on difference frequency temperature sensing to solve the problems of low temperature detection precision and low resolution of the temperature sensor; the circuit utilizes the difference frequency temperature sensing circuit to detect the output frequency difference of the two MEMS oscillating circuits, improves the sensitivity and the precision of temperature sensing, acquires the temperature information at the current moment, improves the temperature sensing precision of the whole temperature sensor circuit to millikelvin level, and improves the temperature resolution to micro kelvin level.
The invention adopts the following technical scheme for solving the technical problems:
the temperature sensor circuit based on the MEMS comprises two MEMS oscillating circuits, a mixer circuit, a difference frequency temperature sensing circuit and a temperature coding circuit, wherein output signals of the two MEMS oscillating circuits are used as input of the mixer circuit, so that the difference frequency processing of the two MEMS oscillating signals is realized, the difference frequency signals are input into the difference frequency temperature sensing circuit, the difference frequency temperature sensing circuit processes the difference frequency signals by using a sensitization quantizer and a sensitization loop, current temperature information is extracted, a digital temperature code corresponding to the current temperature is output, and the representation of the current temperature is realized.
Preferably, the MEMS oscillation circuit includes a MEMS resonator and a driving circuit for amplifying an output signal of the MEMS resonator and outputting an oscillation signal of a fixed frequency. According to the application requirement and the working frequency, different frequencies, MEMS resonators and corresponding driving circuits can be selected to output low-noise oscillation signals with fixed frequencies. The mixer circuit mixes the output signals of the two MEMS oscillating circuits and takes the difference frequency signal containing the current temperature information and one path of MEMS output signal as the input of the difference frequency temperature sensing circuit
Preferably, the difference frequency temperature sensing circuit comprises a sensitization quantizer, a frequency regulation module and a clock generation circuit, and the modules together form a sensitization quantization loop. The mixer circuit mixes the output signals of the two MEMS oscillating circuits and takes a difference frequency signal containing current temperature information as the input of the sensitization quantizer. The sensitization quantizer detects and tracks the frequency of the difference frequency signal, converts the detection result into a control signal to control the frequency regulation module, further controls the clock generation module, extracts temperature information contained in the difference frequency signal, and realizes hundred-fold sensitization to the temperature information by utilizing the sensitization quantization loop.
Preferably, the clock generation circuit comprises a phase frequency detector, a loop low pass filter, a voltage controlled oscillator and a fractional divider. The output signal of the clock generation circuit is used as the clock input of the sensitization quantizer, so that the clock autocorrelation control of the sensitization quantizer is realized. According to the application requirement and the working frequency, the frequency dividing ratio of the fractional frequency divider can be regulated and controlled to adapt to the working speed of the sensitization quantizer.
Preferably, the temperature coding circuit comprises a multi-bit quantization coding digital circuit, receives an output signal of the sensitization quantization loop, and converts the output signal into a high-precision digital code, so that high-precision real-time characterization of the current temperature is realized.
The circuit comprises a temperature sensor circuit based on MEMS, a temperature compensation circuit and a frequency synthesizer circuit, wherein the temperature compensation circuit receives temperature data of the temperature coding circuit, outputs a corresponding frequency synthesizer control word, adjusts the output frequency of the frequency synthesizer, and realizes high-precision temperature compensation of the MEMS oscillation circuit.
A linewidth control circuit for a narrow linewidth laser, the circuit comprising a MEMS-based temperature sensor circuit and a narrow linewidth laser,
a temperature sensor circuit based on MEMS, realizes the real-time coding and digital characterization of the current temperature,
the narrow linewidth laser comprises a laser, a temperature receiving module and a linewidth control module, wherein the temperature receiving module receives a temperature code output by the temperature sensor, the linewidth controller generates a corresponding control code according to the temperature code to control the linewidth of the laser to be a constant value, and the linewidth control circuit scheme of the narrow linewidth laser realizes a linewidth control function with high precision and high stability by relying on a temperature detection result with high precision and high resolution, so that the narrow linewidth laser has good practical application value.
Compared with the prior art, the invention has the following technical effects:
1) The temperature sensor circuit based on difference frequency temperature sensing can improve the temperature sensing precision of the whole temperature sensor circuit to millikelvin level and the temperature resolution to micro kelvin level, so that the problems of low precision and resolution of the traditional temperature sensor circuit are solved;
2) The temperature sensor circuit based on difference frequency temperature sensing solves the problems that a traditional temperature sensor circuit needs a high-precision counter, an analog-to-digital converter and high power consumption;
3) The temperature sensor circuit based on difference frequency temperature sensing can be widely applied to the fields of 5G communication, artificial intelligence, aerospace, national defense equipment and the like, and can realize high-precision and high-resolution temperature detection in a wider temperature range.
Drawings
FIG. 1 is a block diagram of a temperature sensor circuit based on difference frequency temperature sensing according to the present invention.
Fig. 2 is a block diagram of a specific structure of a MEMS oscillating circuit of a temperature sensor circuit based on difference frequency temperature sensing according to the present invention.
FIG. 3 is a block diagram showing a differential frequency temperature sensing circuit of the temperature sensor circuit based on differential frequency temperature sensing.
FIG. 4 is a block diagram of a high-precision temperature compensated clock circuit for MEMS-based temperature sensors according to the present invention.
Fig. 5 is a block diagram showing a specific structure of a line width control circuit of a narrow line width laser according to the present invention.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are exemplary only for explaining the present invention and are not to be construed as limiting the present invention.
Example 1: the temperature sensor circuit based on the MEMS comprises two MEMS oscillating circuits, a mixer circuit, a difference frequency temperature sensing circuit and a temperature coding circuit, wherein output signals of the two MEMS oscillating circuits are used as inputs of the mixer circuit, so that the difference frequency processing of the two MEMS oscillating signals is realized, the difference frequency signals are input into the difference frequency temperature sensing circuit, the detection and tracking of the current temperature are realized, and the detection result is converted into a digital temperature code, so that the representation of the current temperature is realized.
The MEMS oscillation circuit comprises an MEMS resonator and a driving circuit, wherein the driving circuit is used for amplifying an output signal of the MEMS resonator and outputting an oscillation signal with fixed frequency. According to the application requirement and the working frequency, different frequencies, MEMS resonators and corresponding driving circuits can be selected to output low-noise oscillation signals with fixed frequencies. The mixer circuit mixes output signals of the two MEMS oscillating circuits, and takes a difference frequency signal containing current temperature information and one path of MEMS output signal as input of the difference frequency temperature sensing circuit.
The differential frequency temperature sensing circuit comprises a sensitization quantizer, a frequency regulation module and a clock generation circuit, wherein the sensitization quantizer, the frequency regulation module and the clock generation circuit form a sensitization quantization loop together, the mixer circuit mixes output signals of the two MEMS oscillating circuits and takes a differential frequency signal containing current temperature information as input of the sensitization quantizer, the sensitization quantizer detects and tracks the frequency of the differential frequency signal, the detection result is converted into a control signal to control the frequency regulation module, the clock generation module is controlled, temperature information contained in the differential frequency signal is extracted, and hundred-fold sensitization to the temperature information is realized by utilizing the sensitization quantization loop.
The clock generation circuit comprises a frequency-discrimination phase detector, a loop low-pass filter, a voltage-controlled oscillator and a fractional frequency divider, wherein the frequency-discrimination phase detector, the low-pass filter, the voltage-controlled oscillator and the fractional frequency divider are sequentially connected, an output signal of the clock generation circuit is used as a clock input of the sensitization quantizer, clock autocorrelation control of the sensitization quantizer is achieved, and the frequency division ratio of the fractional frequency divider is regulated and controlled according to application requirements and working frequency so as to adapt to the working speed of the sensitization quantizer.
The temperature coding circuit comprises a multi-bit quantization coding digital circuit, receives an output signal of the sensitization quantization loop, and converts the output signal into a high-precision digital code, so that high-precision real-time characterization of the current temperature is realized.
Example 2: fig. 4 is a schematic diagram of a high-precision temperature compensation clock circuit disclosed in the invention, wherein the circuit comprises a temperature sensor circuit based on MEMS, a temperature compensation circuit and a frequency synthesizer circuit, the temperature compensation circuit receives temperature data of a temperature encoding circuit, outputs a corresponding frequency synthesizer control word, adjusts the output frequency of the frequency synthesizer, and realizes high-precision temperature compensation of a MEMS oscillation circuit. The MEMS oscillating circuit comprises an MEMS resonator and a driving circuit, and the difference frequency temperature sensing circuit comprises a sensitization quantizer, a frequency regulation module and a clock generating circuit. The sensitization quantizer adopts a full digital counting type frequency quantization circuit to realize temperature and frequency quantization of the frequency difference signal and outputs a corresponding digital control signal to control the clock generation circuit. The temperature coding circuit adopts a multi-bit quantization coding digital circuit to realize real-time coding and digital characterization of the current temperature.
The temperature compensation circuit receives the temperature data of the temperature coding circuit, outputs a corresponding frequency synthesizer control word, adjusts the output frequency of the frequency synthesizer, and realizes high-precision temperature compensation of the MEMS oscillation circuit. The temperature compensation clock circuit scheme improves the stability of the output frequency to the order of tens of parts per million, and has good practical application value.
Example 3: referring to fig. 5, a line width control circuit of a narrow line width laser, the circuit comprises a temperature sensor circuit based on MEMS and a narrow line width laser, the temperature sensor circuit based on MEMS realizes real-time coding and digital characterization of the current temperature, the narrow line width laser comprises a laser, a temperature receiving module and a line width control module, the temperature receiving module receives a temperature code output by the temperature sensor, the line width controller generates a corresponding control code to control the line width of the laser to be a constant value according to the temperature code, and the line width control circuit scheme of the narrow line width laser realizes a high-precision and high-stability line width control function according to a high-precision and high-resolution temperature detection result, thereby having good practical application value.
It should be noted that the above-mentioned embodiments are not intended to limit the scope of the present invention, and equivalent changes or substitutions made on the basis of the above-mentioned technical solutions fall within the scope of the present invention as defined in the claims.
Claims (7)
1. The temperature sensor circuit based on the MEMS is characterized by comprising two MEMS oscillating circuits, a mixer circuit, a difference frequency temperature sensing circuit and a temperature coding circuit, wherein output signals of the two MEMS oscillating circuits are used as inputs of the mixer circuit to realize difference frequency processing of the two MEMS oscillating signals, the difference frequency signals are input into the difference frequency temperature sensing circuit to realize detection and tracking of the current temperature, and detection results are converted into digital temperature codes to realize characterization of the current temperature.
2. The MEMS-based temperature sensor circuit of claim 1, wherein the MEMS oscillating circuit comprises a MEMS resonator and a driving circuit for amplifying an output signal of the MEMS resonator and outputting an oscillating signal at a fixed frequency.
3. The MEMS-based temperature sensor circuit of claim 2, wherein the differential frequency temperature sensor circuit comprises a sensitization quantizer, a frequency regulation module and a clock generation circuit, wherein the sensitization quantizer, the frequency regulation module and the clock generation circuit form a sensitization quantization loop together, the mixer circuit mixes output signals of the two MEMS oscillation circuits and takes a differential frequency signal containing current temperature information as an input of the sensitization quantizer, the sensitization quantizer detects and tracks the frequency of the differential frequency signal, and converts a detection result into a control signal to control the frequency regulation module, controls the clock generation module and extracts temperature information contained in the differential frequency signal, and hundred-fold sensitization of the temperature information is achieved by the sensitization quantization loop.
4. A MEMS-based temperature sensor circuit according to claim 3, wherein the clock generation circuit comprises a phase frequency detector, a loop low pass filter, a voltage controlled oscillator, and a fractional divider, wherein the phase frequency detector, the low pass filter, the voltage controlled oscillator, and the fractional divider are sequentially connected, an output signal of the clock generation circuit is used as a clock input of the sensitization quantizer, so as to realize clock autocorrelation control of the sensitization quantizer, and a frequency division ratio of the fractional divider is regulated according to application requirements and an operating frequency to adapt to an operating speed of the sensitization quantizer.
5. The MEMS-based temperature sensor circuit of claim 1, wherein the temperature encoding circuit comprises a multi-bit quantization encoding digital circuit that receives the output signal of the sensitization quantization loop and converts it to a high-precision digital code that enables high-precision real-time characterization of the current temperature.
6. A high-precision temperature compensation clock circuit, which is characterized in that the circuit comprises the MEMS-based temperature sensor circuit, the temperature compensation circuit and the frequency synthesizer circuit according to any one of claims 1-5, wherein the temperature compensation circuit receives temperature data of a temperature coding circuit, outputs a corresponding frequency synthesizer control word, adjusts the output frequency of the frequency synthesizer, and realizes high-precision temperature compensation of an MEMS oscillating circuit.
7. A line width control circuit of a narrow line width laser, characterized in that the circuit comprises the MEMS-based temperature sensor circuit of any one of claims 1 to 5 and a narrow line width laser,
a temperature sensor circuit based on MEMS, realizes the real-time coding and digital characterization of the current temperature,
the narrow linewidth laser comprises a laser, a temperature receiving module and a linewidth control module, wherein the temperature receiving module receives a temperature code output by the temperature sensor, and the linewidth controller generates a corresponding control code according to the temperature code to control the linewidth of the laser to be a constant value.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311235739.6A CN117268576A (en) | 2023-09-22 | 2023-09-22 | MEMS-based temperature sensor circuit |
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| CN202311235739.6A CN117268576A (en) | 2023-09-22 | 2023-09-22 | MEMS-based temperature sensor circuit |
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