CN117240125B - Power supply power control circuit, control method, radio frequency power supply and power supply system - Google Patents
Power supply power control circuit, control method, radio frequency power supply and power supply system Download PDFInfo
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Abstract
The invention relates to a power supply power control circuit, a control method, a radio frequency power supply and a power supply system; the control circuit comprises a PID module, a first section signal control module and a second section signal control module; the PID module is used for performing PID control to output control parameters to the signal generating module according to the acquired power supply output current and voltage parameters; the first section signal control module generates two driving signals with the same frequency and the same phase or different phases according to the control parameters output by the PID module and outputs the driving signals to the second section signal control module; the second section signal control module is used for respectively controlling the two driving signals output by the first section signal control module to obtain a switching control value and outputting the switching control value to a full-bridge circuit of the power supply; the power of the power supply is controlled by controlling the on and off of the switching tube. The invention realizes the control of the power supply power and simultaneously controls the output frequency and the phase.
Description
Technical Field
The invention belongs to the technical field of radio frequency power supplies, and particularly relates to a power supply power control circuit, a control method, a radio frequency power supply and a power supply system.
Background
In the current control circuit of the radio frequency power supply, a control core is generally adopted to perform electrical signal operations such as signal conversion, triggering, dead zone (delay) and the like, so as to generate a switching tube control signal of the phase-shifting full-bridge circuit, and a required pulse signal or power signal is formed through switching of the phase-shifting full-bridge circuit. Among them, a commonly used chip such as UCC3895 controller. The UCC3895 controller obtains the voltage value and the frequency value required by the control signal from the SYNC pin through PID operation, and processes the voltage value and the frequency value as above to form a required pulse signal or a required power signal; the frequency value is 2 times the frequency of the power signal that is expected to be output.
Accordingly, the following essential problems exist in the internal circuitry of the UCC3895 chip:
(1) The input signal frequency needs to be twice the output signal frequency, which makes it difficult to control the power supply at a fixed frequency of the output signal.
(2) Because internal elements such as conversion and triggering are easy to generate electromagnetic factors, temperature and other factors, the control signals generated after signal conversion, triggering and dead zone operation are easy to generate phase delay, so that the control of a switching tube of a full-bridge circuit is relatively delayed, and the generated pulse signals or power signals are caused to have phase deviation, and are often 45-180 degrees in phase difference. The power output of the radio frequency power supply is abnormal, so that the conditions of incapability of ignition, power unbalance and the like are caused, and the process cannot be normally performed.
(3) According to the process requirement, the RF power source adopts different signal following modes because the RF power source is a master machine or a slave machine, but the RF power source is in the master machine mode or the slave machine mode, and the machine operation error is caused by the 2 nd point missing.
Disclosure of Invention
In view of the above analysis, the present invention aims to disclose a power supply power control circuit, a control method, a radio frequency power supply and a power supply system, which are used for solving the problems caused by the UCC3895 chip, realizing the power supply power control and simultaneously controlling the output frequency and the phase.
One aspect of the invention discloses a power supply power control circuit comprising: the system comprises a PID module, a first section signal control module and a second section signal control module;
the PID module is used for performing PID control to output control parameters to the signal generating module according to the acquired power supply output current and voltage parameters;
the first section signal control module is used for generating two driving signals with the same frequency and the same phase or different phases according to the control parameters output by the PID module and outputting the driving signals to the second section signal control module;
the second section signal control module is used for respectively controlling the two driving signals output by the first section signal control module to obtain a switching control value and outputting the switching control value to a full-bridge circuit of the power supply; the power of the power supply is controlled by controlling the on and off of the switching tube.
The invention also discloses a power control method of the power supply, which comprises the following steps: including source power control in a master control mode and source power control in a slave control mode;
in the host control mode, according to the acquired current and voltage parameters output by the power supply, PID control is carried out, then the output control parameters generate two driving signals with the same frequency and the same phase or different phases, the driving signals are respectively output to a full-bridge circuit of the power supply after driving control, and the signal switching of a switching tube of the full-bridge circuit is controlled; the power supply is used as a host power supply to output electric power;
in the slave control mode, according to the collected power signals output by the host power supply, after phase locking processing, two driving signals with the same frequency and different phases are generated for driving control and then are respectively output to a full-bridge circuit of the power supply, so as to control signal switching of a full-bridge circuit switching tube; the power supply is used as a slave power supply under the control of a host power supply to output electric power.
Another aspect of the invention also discloses a radio frequency power supply comprising: the power supply comprises an ADC circuit, a full-bridge circuit, a transformer, a filter circuit, a VI sensor and a power supply power control circuit;
the ADC circuit is used for converting three-phase alternating current power supply into direct current;
the full-bridge circuit is used for converting the power into radio-frequency alternating current under the control of the power supply power control circuit;
the transformer and the filter circuit are used for performing voltage transformation and power supply filtering treatment on the radio frequency alternating current output by the full-bridge circuit to obtain radio frequency power supply output;
the VI sensor is used for collecting voltage and current parameters output by radio frequency power supply and outputting the voltage and current parameters to the power supply power control circuit;
the power supply power control circuit is used for controlling the power of the radio frequency power supply by adopting the power supply power control circuit.
Another aspect of the present invention also discloses a power supply system including: the master device and the slave device are connected,
the master device is used for generating a power signal to be processed by the slave device;
the slave device adopts the radio frequency power supply as described above and works in a slave control mode; and generating two driving signals with the same frequency and different phases to be output to a second section of signal control module in the slave device after phase locking processing is carried out according to the received power signal to be processed, and generating a switching control quantity to control signal switching of a full-bridge circuit switching tube in the slave device through the second section of signal control module so as to enable the slave device to output electric power under the control of the master device.
Another aspect of the invention also discloses a computer device comprising: a processor, a memory and a bus, the memory storing machine-readable instructions executable by the processor, the processor and the memory in communication via the bus when the computer device is running, the machine-readable instructions when executed by the processor performing the power supply power control method as described above.
Another aspect of the invention also discloses a computer readable storage medium having stored thereon a computer program which when executed by a processor performs the power supply power control method as described above.
The invention can realize the following beneficial effects:
the power supply power control circuit, the control method, the radio frequency power supply and the power supply system disclosed by the invention realize the power supply power control and simultaneously control the output frequency and the phase.
The input signal frequency may not be specifically adapted to be twice or N times the output signal frequency, making the output signal frequency more controllable.
The DDS module is adopted to perform signal conversion and triggering, so that the signal conversion is not interfered by an entity circuit, the dead zone circuit is independently arranged, and the full-bridge control circuit can be orderly controlled, so that the abnormal phase deviation of a pulse signal or an output power signal is avoided.
When the method is applied to a master-slave architecture, the problem that the process cannot be executed due to the fact that a machine body runs wrongly is avoided.
Drawings
The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the invention, like reference numerals being used to designate like parts throughout the drawings;
FIG. 1 is a schematic block diagram of a power control circuit of a power supply in an embodiment of the invention;
FIG. 2 is a schematic diagram of a phase-shifting full-bridge circuit in an embodiment of the present invention;
FIG. 3 is a schematic block diagram of a power control circuit for implementing functions of a master and a slave in an embodiment of the present invention;
FIG. 4 is a schematic block diagram of the RF power supply in an embodiment of the invention;
FIG. 5 is a schematic block diagram of a radio frequency power supply system in an embodiment of the invention;
fig. 6 is a schematic block diagram of a computer device in an embodiment of the invention.
Detailed Description
Preferred embodiments of the present invention are described in detail below with reference to the attached drawing figures, which form a part of the present application and, together with the embodiments of the present invention, serve to explain the principles of the invention.
Example 1
One embodiment of the present invention discloses a power control circuit for a power supply connected to a radio frequency power supply, as shown in fig. 1, comprising: the system comprises a PID module, a first section signal control module and a second section signal control module;
the PID module is used for performing PID control to output control parameters to the signal generating module according to the acquired power supply output current and voltage parameters;
the first section signal control module is used for generating two driving signals with the same frequency and the same phase or different phases according to the control parameters output by the PID module and outputting the driving signals to the second section signal control module;
the second section signal control module is used for respectively controlling the two driving signals output by the first section signal control module to obtain a switching control value and outputting the switching control value to a full-bridge circuit of the power supply; the power of the power supply is controlled by controlling the on and off of the switching tube.
The full-bridge circuit is a phase-shifting full-bridge circuit, and the control of the output power of the power supply is realized under the control of the switching control quantity.
Specifically, in the PID module, PID control is performed according to the output current and voltage parameters of the radio frequency power supply collected by the VI sensor, and the PID can adopt a PID power control method for a conventional radio frequency power supply.
Specifically, the first-segment signal control module in fig. 1 includes a DDS0 module;
the input end of the DDS0 module is connected with the PID module, and the direct digital synthesis is carried out in the DDS0 module according to the control parameters output by the PID module to generate a first driving signal and a second driving signal, and the first driving signal and the second driving signal are respectively output through a first output end and a second output end of the DDS0 module;
the first and second driving signals generated by direct digital synthesis have the same signal frequency, the same phase or different signals.
The second section signal control module in fig. 1 comprises a DDS1 module and a DDS2 module;
the first output end of the DDS0 module is connected with the first input end of the DDS1 module, and outputs a first driving signal to the DDS1 module; the DDS1 module performs direct digital synthesis and converts a first driving signal into a first switch control quantity;
the second output end of the DDS0 module is connected with the first input end of the DDS2 module, and outputs a second driving signal to the DDS2 module; the DDS2 module performs direct digital synthesis and converts a second driving signal into a second switch control quantity;
the first output end and the second output end of the DDS1 module are respectively connected with the control ends of the two switching tubes of the leading arm of the full-bridge circuit, and the two switching tubes of the leading arm are controlled by a first switching control quantity;
the first output end and the second output end of the DDS2 module are respectively connected with the control ends of the two switching tubes of the hysteresis arm of the full-bridge circuit, and the two switching tubes of the hysteresis arm are controlled through the second switching control quantity.
The leading arm of the phase-shifting full-bridge circuit comprises switching tubes S1 and S3, and the lagging arm comprises switching tubes S2 and S4; the DDS1 module outputs switching signals of switching tubes S1 and S3 of the phase-shifting full-bridge circuit, and the DDS2 module outputs switching signals of switching tubes S2 and S4 of the phase-shifting full-bridge circuit, so that phase control of output power signals is realized;
specifically, through the switching control of the DDS1 module and the DDS2 module, the phase-shifting full-bridge circuit is enabled to continuously switch between the following two states to carry out chopping control;
state one, S1/S4 access, S2/S3 open circuit;
and the S1/S4 is disconnected and the S2/S3 is connected.
The preferred phase-shifting full-bridge circuit scheme in this embodiment is shown in fig. 2; in the phase-shifting full-bridge circuit, two input ends BUS+ and BUS-of the phase-shifting full-bridge circuit are respectively connected with the anode and the cathode of BUS direct current voltage of a radio frequency power supply; two output ends AC1 and AC2 of the phase-shifting full-bridge circuit are connected to the converter to output chopped alternating voltage; the switching tubes S1 and S3 connected in series are leading arms of the phase-shifting full-bridge circuit, and grid electrodes of the switching tubes S1 and S3 are respectively connected with a first output end and a second output end of the DDS1 module; the switching tubes S2 and S4 connected in series are hysteresis arms of the phase-shifting full-bridge circuit, and grid electrodes of the switching tubes S2 and S4 are respectively connected with a first output end and a second output end of the DDS2 module; the switching tubes S1, S3, S2 and S4 are respectively connected with protection diodes D1, D3, D2 and D4 in parallel; the capacitor C1 is connected with the leading arm in parallel, and the capacitor C2 is connected with the lagging arm in parallel; that is, the capacitor C1 and the capacitor C2 are connected between the input terminals BUS+ and BUS-and have no connection point with the output terminals AC1 and AC 2.
When the switch is switched, the phases of the switch control amounts output to the grid electrodes of the switching tubes S1 and S3 by the first output end and the second output end of the DDS1 module are different, and the asynchronous switching of the paths or the open circuits of the switching tubes S1 and S3 is controlled; the phases of the switching control amounts output to the grid electrodes of the switching tubes S2 and S4 by the first output end and the second output end of the DDS2 module are different, and the asynchronous switching of the paths or the open circuits of the switching tubes S2 and S4 is controlled; in the switching control, the switching tube S1 and S4 are synchronously switched, and the switching tube S2 and S3 are synchronously switched; thereby realizing continuous switching of the phase-shifting full-bridge circuit between the first state and the second state to form the alternating voltage of chopper output.
In an alternative scheme in this embodiment, on the basis of the circuit composition of fig. 2, the connection relationship between the DDS1 module and the DDS2 module and the switching tube, and the form of the output switching signal may be changed to form a new switching method; the method comprises the following steps:
the first output end and the second output end of the DDS1 module are respectively connected with the grid electrodes of the switching tubes S1 and S4, and the first output end and the second output end of the DDS2 module are respectively connected with the grid electrodes of the switching tubes S2 and S3; under the connection relation, the phases of the switching control amounts output to the grid electrodes of the switching tubes S1 and S4 by the first output end and the second output end of the DDS1 module are the same, and synchronous switching of the paths or the open circuits of the switching tubes S1 and S4 is controlled; the first output end and the second output end of the DDS2 module output the same phase of the switching control quantity of the grid electrodes of the switching tubes S2 and S3, and control the synchronous switching of the paths or the open circuits of the switching tubes S2 and S3; in addition, during switching control, the on-off or off-off of the switching tubes S1 and S3 are asynchronously switched, and the on-off or off-off of the switching tubes S2 and S4 are asynchronously switched; thereby realizing continuous switching of the phase-shifting full-bridge circuit between the first state and the second state to form the alternating voltage of chopper output.
In a specific scheme of this embodiment, the power control circuit of the power supply further includes a phase-locked module CEXDDS;
the input end of the phase-locked module CEXDDS is used for carrying out phase-locked processing on power supply signals output by other power supplies serving as a host power supply, generating two driving signals with the same frequency and different phases, outputting the driving signals to the second section of signal control module, and generating switching control quantity to control signal switching of the full-bridge circuit switching tube through the second section of signal control module so that the power supply is used as a slave power supply under the control of the host power supply to output electric power.
The phase locking processing is used for carrying out normalization processing on the power supply signals of the power supply host to obtain waveforms to be synchronized; after signal synchronization processing, two driving signals with the same frequency and different phases are obtained and output to the second section signal control module. The phase difference of the two driving signals is solidified, so that the output power signal is the following input power signal, and an in-phase or fixed phase-locked signal with the phase difference is formed.
In order to realize that the power supply power control circuit can work normally in a master mode and a slave mode, the DDS1 module further comprises a second input end, and the DDS2 module further comprises a second input end;
the input end of the phase-locking module is connected with the power supply host, the first output end of the phase-locking module is connected with the second input end of the DDS1 module, and the second output end of the phase-locking module is connected with the second input end of the DDS2 module; the first output end and the second output end of the DDS1 module are respectively connected with the control ends of the two switching tubes of the leading arm of the full-bridge circuit, and the first output end and the second output end of the DDS2 module are respectively connected with the control ends of the two switching tubes of the lagging arm of the full-bridge circuit; the power control device is used for controlling the power of the power supply when the power supply is in the slave mode.
In a specific aspect of this embodiment, the power control circuit of the power supply further includes a dead zone control circuit; the dead zone control circuit is connected between the second section signal control module and the full-bridge circuit and is used for carrying out delay control on the switching control quantity output by the second section signal control module.
Specifically, the dead zone control circuit includes a first delay circuit delay ya, a second delay circuit delay yb, a third delay circuit delay yc, and a fourth delay circuit delay yd;
the first output end and the second output end of the DDS1 module output the switch control quantity to the control ends of two switch tubes of the leading arm of the full-bridge circuit after the delay of the first delay circuit DELAYA and the second delay circuit DELAYB respectively;
the first output end and the second output end of the DDS2 module respectively output the switch control quantity to the control ends of two switch tubes of a hysteresis arm of the full-bridge circuit after passing through the delay of the third delay circuit DELAYC and the fourth delay circuit DELAYD.
By providing the dead zone control circuits (DELAY a-D), the signal DELAY operation is performed according to the control requirement. The full-bridge control circuit can also be controlled in order, so that no abnormal phase shift of the pulse signal or the output power signal like the UCC3895 occurs.
As shown in fig. 3, a schematic diagram of a power control circuit for implementing functions of a master and a slave is provided.
In summary, the power control circuit of the power supply disclosed in this embodiment controls the output frequency and the phase while realizing the power control of the power supply. The input signal frequency may not be specifically adapted to be twice or N times the output signal frequency, making the output signal frequency more controllable. The DDS module is adopted to perform signal conversion and triggering, so that the signal conversion is not interfered by an entity circuit, the dead zone circuit is independently arranged, and the full-bridge control circuit can be orderly controlled, so that the abnormal phase deviation of a pulse signal or an output power signal is avoided. When the source power control circuit of the embodiment is applied to a master-slave architecture, the problem that the process cannot be executed due to the fact that a machine body runs wrongly is avoided.
Example two
One embodiment of the invention discloses a power supply power control method, which comprises source power control in a master control mode and power supply power control in a slave control mode;
in the host control mode, according to the acquired current and voltage parameters output by the power supply, PID control is carried out, then the output control parameters generate two driving signals with the same frequency and the same phase or different phases, the driving signals are respectively output to a full-bridge circuit of the power supply after driving control, and the signal switching of a switching tube of the full-bridge circuit is controlled; the power supply is used as a host power supply to output electric power;
in the slave control mode, according to the collected power signals output by the host power supply, after phase locking processing, two driving signals with the same frequency and different phases are generated for driving control and then are respectively output to a full-bridge circuit of the power supply, so as to control signal switching of a full-bridge circuit switching tube; the power supply is used as a slave power supply under the control of a host power supply to output electric power.
Specifically, in the host control mode, the power control of the power supply specifically includes:
PID control is carried out to output control parameters according to the acquired current and voltage parameters of the power supply;
generating two driving signals with the same frequency and the same phase or different phases according to the ID control output control parameters;
the two driving signals are respectively controlled to obtain a switching control value, and the switching control value is output to a full-bridge circuit of the power supply;
the power of the power supply is controlled by controlling the on and off of the switching tube.
Specifically, in the slave control mode, the power control of the power supply specifically includes:
carrying out phase locking processing on power supply signals output by other power supplies serving as a power supply host to generate two driving signals with the same frequency and different phases;
the two driving signals are respectively controlled to obtain a switching control value, and the switching control value is output to a full-bridge circuit of the power supply;
the power of the power supply is controlled by controlling the on and off of the switching tube.
And in the control mode of the master machine and the slave machine, the method further comprises a dead zone control step, wherein when dead zone control is carried out, the dead zone control circuit is arranged in front of the control end of the switching tube of the full-bridge circuit, and the dead zone control is realized by respectively carrying out delay control on the switching control quantity and then outputting the delayed control quantity to the full-bridge circuit.
The power control method of the present embodiment relies on the power control circuit of the first embodiment, and specific technical details and beneficial effects are the same as those of the first embodiment, and reference is made to the specific contents of the first embodiment, which are not described herein.
Example III
One embodiment of the present invention discloses a radio frequency power supply, as shown in fig. 4, comprising: the power supply comprises an ADC circuit, a full-bridge circuit, a transformer, a filter circuit, a VI sensor and a power supply power control circuit;
the ADC circuit is used for converting three-phase alternating current power supply into direct current;
the full-bridge circuit is used for converting the power into radio-frequency alternating current under the control of the power supply power control circuit;
the transformer and the filter circuit are used for performing voltage transformation and power supply filtering treatment on the radio frequency alternating current output by the full-bridge circuit to obtain radio frequency power supply output;
the VI sensor is used for collecting voltage and current parameters output by radio frequency power supply and outputting the voltage and current parameters to the power supply power control circuit;
the power supply power control circuit adopts the power supply power control circuit according to the first embodiment to control the power of the radio frequency power supply.
The specific technical details and beneficial effects of the power control circuit of the present embodiment are the same as those of the first embodiment, and reference is made to the specific contents of the first embodiment, which are not described herein.
Example IV
One embodiment of the present invention discloses a radio frequency power supply system, such as a plasma power supply system, as shown in fig. 5, comprising: a master device and a slave device;
the main equipment generates a power supply signal to be processed;
the slave device adopts the radio frequency power supply in the third embodiment to work in a slave control mode;
the phase locking module in the slave device performs phase locking processing on the power signal to be processed output by the master device, generates two driving signals with the same frequency and different phases, outputs the driving signals to the second section signal control module in the slave device, and generates a switching control quantity to control the signal switching of the full-bridge circuit switching tube in the slave device through the second section signal control module so that the slave device outputs electric power under the control of the master device.
Preferably, the master device may also use the rf power supply as described in embodiment three to operate in the host control mode.
The specific technical details and beneficial effects of the rf power supply of the present embodiment are the same as those of the third embodiment, and reference is made to the specific contents of the third embodiment, which are not described herein.
Example five
Based on the same technical concept, the embodiment of the invention further provides a computer device, which comprises a memory and a processor, as shown in fig. 6, wherein the memory stores a computer program, and the processor executes the computer program to implement the power control method of any one of the above.
Wherein the memory comprises at least one type of readable storage medium including flash memory, hard disk, multimedia card, card memory (e.g., SD or DX memory, etc.), magnetic memory, magnetic disk, optical disk, etc. The memory may in some embodiments be an internal storage unit of the radio frequency power supply system, such as a hard disk. The memory may also be an external storage device of the plasma power system in other embodiments, such as a plug-in hard disk, a smart Card (SMC), a Secure Digital (SD) Card, a Flash Card (Flash Card), etc.
Further, the memory may also include both internal storage units and external storage devices of the power supply system. The memory may be used not only for storing application software installed in the power supply system and various kinds of data, such as codes of power supply programs, etc., but also for temporarily storing data that has been output or is to be output.
The processor may in some embodiments be a central processing unit (Central Processing Unit; CPU), controller, microcontroller, microprocessor or other data processing chip for running program code or processing data stored in the memory, e.g. executing a power program or the like.
It can be appreciated that the technical details and beneficial effects provided in this embodiment are the same as those in the second embodiment, and reference is made to the specific contents in the second embodiment, which are not described in detail herein.
A specific embodiment of the invention also provides a computer readable storage medium having stored thereon a computer program which when executed by a processor performs the steps of the power supply power control method described in the above method embodiments. Wherein the storage medium may be a volatile or nonvolatile computer readable storage medium.
The computer program product of the power supply power control method provided in this embodiment includes a computer readable storage medium storing program codes, where the instructions included in the program codes may be used to execute the steps of the power supply power control method described in the foregoing method embodiment, and specifically, reference may be made to the foregoing method embodiment, which is not repeated herein.
The present embodiment also provides a computer program which, when executed by a processor, implements any of the methods of the previous embodiments. The computer program product may be realized in particular by means of hardware, software or a combination thereof. In an alternative embodiment, the computer program product is embodied as a computer storage medium, and in another alternative embodiment, the computer program product is embodied as a Software product, such as a Software development kit (Software DevelopmentKit, SDK), or the like.
It is to be understood that the same or similar parts in the above embodiments may be referred to each other, and that in some embodiments, the same or similar parts in other embodiments may be referred to.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention.
Claims (11)
1. A power supply power control circuit, comprising: the system comprises a PID module, a first section signal control module and a second section signal control module;
the PID module is used for performing PID control to output control parameters to the signal generating module according to the acquired power supply output current and voltage parameters;
the first section signal control module is used for generating two driving signals with the same frequency and the same phase or different phases according to the control parameters output by the PID module and outputting the driving signals to the second section signal control module;
the second section signal control module is used for respectively controlling the two driving signals output by the first section signal control module to obtain a switching control value and outputting the switching control value to a full-bridge circuit of the power supply; the power of the power supply is controlled by controlling the on and off of the switching tube;
the first section signal control module comprises a DDS0 module;
the input end of the DDS0 module is connected with the PID module, and the direct digital synthesis is carried out in the DDS0 module according to the control parameters output by the PID module to generate a first driving signal and a second driving signal, and the first driving signal and the second driving signal are respectively output through a first output end and a second output end of the DDS0 module;
the signal frequencies of the first driving signal and the second driving signal are the same, the phases are the same or different;
the second section signal control module comprises a DDS1 module and a DDS2 module;
the first output end of the DDS0 module is connected with the first input end of the DDS1 module, and outputs a first driving signal to the DDS1 module; the DDS1 module performs direct digital synthesis and converts a first driving signal into a first switch control quantity;
the second output end of the DDS0 module is connected with the first input end of the DDS2 module, and outputs a second driving signal to the DDS2 module; the DDS2 module performs direct digital synthesis and converts a second driving signal into a second switch control quantity;
the first output end and the second output end of the DDS1 module are respectively connected with the control ends of the two switching tubes of the leading arm of the full-bridge circuit, and the two switching tubes of the leading arm are controlled by a first switching control quantity;
the first output end and the second output end of the DDS2 module are respectively connected with the control ends of the two switching tubes of the hysteresis arm of the full-bridge circuit, and the two switching tubes of the hysteresis arm are controlled by the second switching control quantity;
the phase locking device also comprises a phase locking module;
the input end of the phase-locking module is used for carrying out phase-locking processing on power supply signals output by other power supplies serving as a host power supply, generating two driving signals with the same frequency and different phases, outputting the driving signals to the second section of signal control module, and generating a switching control quantity to control signal switching of a full-bridge circuit switching tube through the second section of signal control module so that the power supply is used as a slave power supply under the control of the host power supply to output electric power;
the phase locking processing is used for carrying out normalization processing on the power supply signals of the power supply host to obtain waveforms to be synchronized; after signal synchronization processing, two driving signals with the same frequency and different phases are obtained and output to a second section signal control module;
the DDS1 module further comprises a second input end, and the DDS2 module further comprises a second input end;
the input end of the phase-locking module is connected with the power supply host, the first output end of the phase-locking module is connected with the second input end of the DDS1 module, and the second output end of the phase-locking module is connected with the second input end of the DDS2 module; the first output end and the second output end of the DDS1 module are respectively connected with the control ends of the two switching tubes of the leading arm of the full-bridge circuit, and the first output end and the second output end of the DDS2 module are respectively connected with the control ends of the two switching tubes of the lagging arm of the full-bridge circuit; the power control device is used for controlling the power of the power supply when the power supply is in the slave mode.
2. The power supply power control circuit of claim 1, further comprising a dead zone control circuit; the dead zone control circuit is connected between the second section signal control module and the full-bridge circuit and is used for carrying out delay control on the switching control quantity output by the second section signal control module.
3. The power control circuit of claim 2, wherein,
the dead zone control circuit includes a first delay circuit delay ya, a second delay circuit delay yb, a third delay circuit delay yc, and a fourth delay circuit delay yd;
the first output end and the second output end of the DDS1 module output the switch control quantity to the control ends of two switch tubes of the leading arm of the full-bridge circuit after the delay of the first delay circuit DELAYA and the second delay circuit DELAYB respectively;
the first output end and the second output end of the DDS2 module respectively output the switch control quantity to the control ends of two switch tubes of a hysteresis arm of the full-bridge circuit after passing through the delay of the third delay circuit DELAYC and the fourth delay circuit DELAYD.
4. A power supply control method of a power supply control circuit according to any one of claims 1 to 3, comprising: including source power control in a master control mode and source power control in a slave control mode;
in the host control mode, according to the acquired current and voltage parameters output by the power supply, PID control is carried out, then the output control parameters generate two driving signals with the same frequency and the same phase or different phases, the driving signals are respectively output to a full-bridge circuit of the power supply after driving control, and the signal switching of a switching tube of the full-bridge circuit is controlled; the power supply is used as a host power supply to output electric power;
in the slave control mode, according to the collected power signals output by the host power supply, after phase locking processing, two driving signals with the same frequency and different phases are generated for driving control and then are respectively output to a full-bridge circuit of the power supply, so as to control signal switching of a full-bridge circuit switching tube; the power supply is used as a slave power supply under the control of a host power supply to output electric power.
5. The method of claim 4, wherein in the host control mode, the power control comprises:
PID control is carried out to output control parameters according to the acquired current and voltage parameters of the power supply;
generating two driving signals with the same frequency and the same phase or different phases according to the ID control output control parameters;
the two driving signals are respectively controlled to obtain a switching control value, and the switching control value is output to a full-bridge circuit of the power supply;
the power of the power supply is controlled by controlling the on and off of the switching tube.
6. The method according to claim 4, wherein in the slave control mode, the power control specifically includes:
carrying out phase locking processing on power supply signals output by other power supplies serving as a power supply host to generate two driving signals with the same frequency and different phases;
the two driving signals are respectively controlled to obtain a switching control value, and the switching control value is output to a full-bridge circuit of the power supply;
the power of the power supply is controlled by controlling the on and off of the switching tube.
7. The method according to any one of claims 4 to 6, characterized by further comprising a dead zone control step in the master and slave control modes; when dead zone control is carried out, the dead zone control circuit arranged in front of the control end of the switching tube of the full-bridge circuit is used for respectively carrying out delay control on the switching control quantity and then outputting the delayed control quantity to the full-bridge circuit to realize dead zone control.
8. A radio frequency power supply, comprising: the power supply comprises an ADC circuit, a full-bridge circuit, a transformer, a filter circuit, a VI sensor and a power supply power control circuit;
the ADC circuit is used for converting three-phase alternating current power supply into direct current;
the full-bridge circuit is used for converting the power into radio-frequency alternating current under the control of the power supply power control circuit;
the transformer and the filter circuit are used for performing voltage transformation and power supply filtering treatment on the radio frequency alternating current output by the full-bridge circuit to obtain radio frequency power supply output;
the VI sensor is used for collecting voltage and current parameters output by radio frequency power supply and outputting the voltage and current parameters to the power supply power control circuit;
the power supply power control circuit adopts the power supply power control circuit as claimed in any one of claims 1-3 to control the power of the radio frequency power supply.
9. A power supply system, comprising: the master device and the slave device are connected,
the master device is used for generating a power signal to be processed by the slave device;
the slave device, which adopts the radio frequency power supply as claimed in claim 8, operates in a slave control mode; and generating two driving signals with the same frequency and different phases to be output to a second section of signal control module in the slave device after phase locking processing is carried out according to the received power signal to be processed, and generating a switching control quantity to control signal switching of a full-bridge circuit switching tube in the slave device through the second section of signal control module so as to enable the slave device to output electric power under the control of the master device.
10. A computer device, comprising: a processor, a memory and a bus, the memory storing machine-readable instructions executable by the processor, the processor and the memory in communication via the bus when the computer device is running, the machine-readable instructions when executed by the processor performing the power supply power control method of any one of claims 4 to 7.
11. A computer readable storage medium, characterized in that the computer readable storage medium has stored thereon a computer program which, when executed by a processor, performs the power control method of the power supply according to any one of claims 4 to 7.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2458814Y (en) * | 2000-12-12 | 2001-11-07 | 北京通力环电气有限公司 | Full-bridge phase-shift drive |
| CN108768183A (en) * | 2018-05-16 | 2018-11-06 | 中国计量大学 | Broadband induction heating power based on resonant frequency tracking |
| WO2021059583A1 (en) * | 2019-09-25 | 2021-04-01 | ローム株式会社 | Switching power-supply circuit |
| CN213094079U (en) * | 2020-06-24 | 2021-04-30 | 安徽省金屹电源科技有限公司 | High-power high-frequency switching power supply module and device |
| CN113346762A (en) * | 2021-07-16 | 2021-09-03 | 上海空间电源研究所 | Flexible switching control circuit and control method for double full-bridge converter |
| CN114337300A (en) * | 2021-12-29 | 2022-04-12 | 南京理工大学 | Digital implementation system and method for LCC resonant converter time phase shift control |
| CN115425967A (en) * | 2022-08-31 | 2022-12-02 | 北京北方华创微电子装备有限公司 | Phase synchronization device and method, radio frequency power supply and semiconductor process equipment |
| CN116722751A (en) * | 2023-06-26 | 2023-09-08 | 中南大学 | Frequency selective type radio frequency power supply and flexible variable frequency control method |
| CN117060733A (en) * | 2023-07-18 | 2023-11-14 | 阳光电源股份有限公司 | Control circuit, method and system of resonant bidirectional converter |
-
2023
- 2023-11-15 CN CN202311514810.4A patent/CN117240125B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2458814Y (en) * | 2000-12-12 | 2001-11-07 | 北京通力环电气有限公司 | Full-bridge phase-shift drive |
| CN108768183A (en) * | 2018-05-16 | 2018-11-06 | 中国计量大学 | Broadband induction heating power based on resonant frequency tracking |
| WO2021059583A1 (en) * | 2019-09-25 | 2021-04-01 | ローム株式会社 | Switching power-supply circuit |
| CN213094079U (en) * | 2020-06-24 | 2021-04-30 | 安徽省金屹电源科技有限公司 | High-power high-frequency switching power supply module and device |
| CN113346762A (en) * | 2021-07-16 | 2021-09-03 | 上海空间电源研究所 | Flexible switching control circuit and control method for double full-bridge converter |
| CN114337300A (en) * | 2021-12-29 | 2022-04-12 | 南京理工大学 | Digital implementation system and method for LCC resonant converter time phase shift control |
| CN115425967A (en) * | 2022-08-31 | 2022-12-02 | 北京北方华创微电子装备有限公司 | Phase synchronization device and method, radio frequency power supply and semiconductor process equipment |
| CN116722751A (en) * | 2023-06-26 | 2023-09-08 | 中南大学 | Frequency selective type radio frequency power supply and flexible variable frequency control method |
| CN117060733A (en) * | 2023-07-18 | 2023-11-14 | 阳光电源股份有限公司 | Control circuit, method and system of resonant bidirectional converter |
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