CN117238823B - Rotation angle amplifying device for wafer box transport vehicle and working method of rotation angle amplifying device - Google Patents
Rotation angle amplifying device for wafer box transport vehicle and working method of rotation angle amplifying device Download PDFInfo
- Publication number
- CN117238823B CN117238823B CN202311502290.5A CN202311502290A CN117238823B CN 117238823 B CN117238823 B CN 117238823B CN 202311502290 A CN202311502290 A CN 202311502290A CN 117238823 B CN117238823 B CN 117238823B
- Authority
- CN
- China
- Prior art keywords
- adapter plate
- rotating shaft
- connecting rod
- handle
- rotation angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 8
- 239000006096 absorbing agent Substances 0.000 claims description 10
- 230000035939 shock Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 37
- 238000010586 diagram Methods 0.000 description 3
- 210000001503 joint Anatomy 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Handcart (AREA)
Abstract
The invention relates to the technical field of semiconductor processing, in particular to a rotation angle amplifying device for a wafer box transport vehicle and a working method thereof. The front surface is connected with a first adapter plate and a second adapter plate respectively, the lower end is connected with a bottom plate, a seat bearing is arranged between the front surface and the second adapter plate, a rotating shaft II is arranged in the seat bearing, the upper end is connected with an upper cover plate and an eccentric wheel, the left end and the right end of the rotating shaft II are connected with a first connecting rod, a second connecting rod and a third connecting rod, the lower end of the outer side of the second connecting rod is connected with a first rotating shaft, the first rotating shaft penetrates through the first adapter plate and the second adapter plate, a handle adapter plate is connected to the outer side of the first rotating shaft, and a handle is connected to the outer side of the first rotating shaft in a circle. The invention solves the problems that the lateral rotation handle cannot exceed the frame range of the wafer box transport vehicle due to space limitation, the handle can only rotate in a smaller range, the actual required rotation angle of the eccentric wheel of the adjusting lifting mechanism is larger, and if the rotating shaft is directly connected with the eccentric wheel for rotation, the handle can exceed the frame range of the wafer box transport vehicle.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a rotation angle amplifying device for a wafer box transport vehicle and a working method thereof.
Background
At present, in the field of semiconductor processing, the production of wafers needs to be processed at different work stations, and in the transportation process of each work station, the wafers need to be placed in the wafer boxes, and the wafer box transport vehicle is a common wafer box transport device. The wafer box is usually placed on a wafer loader, a wafer box transport vehicle is moved to be right in front of the wafer loader and is in butt joint through a standard interface, the wafer box transport vehicle needs to act at a front station and a rear station respectively, and the wafer box is taken down from the wafer loader for transferring; the action requires that the wafer box transport vehicle has an upper limit position and a lower limit position, when the wafer box is taken out, the wafer box transport vehicle is required to be converted from the lower limit position to the upper limit position, when the wafer box transport vehicle is taken out for transferring, the wafer box is required to be converted from the upper limit position to the lower limit position, jolt during transferring is reduced, and the wafer box is ensured to be in a relatively stable state. The scheme of the existing equipment is that a turntable is arranged at the back of a wafer box transport vehicle and is connected with a lifting mechanism, a person stands on the back of the wafer box transport vehicle to operate, when the placing distance of a wafer loader on the site of a semiconductor processing factory is relatively short, a reserved space only allows the wafer box transport vehicle to transversely enter, the person cannot operate on the back of the wafer box transport vehicle, meanwhile, due to space limitation, a lateral rotating handle cannot exceed the frame range of the wafer box transport vehicle, the handle can only rotate in a small range, the rotating angle of an eccentric wheel actually needed by the lifting mechanism is large, and if a rotating shaft directly rotates through the eccentric wheel, the handle can exceed the frame range of the wafer box transport vehicle.
Disclosure of Invention
In order to solve the technical problems, the invention provides a rotation angle amplifying device for a wafer box transport vehicle and a working method thereof.
The specific technical scheme is as follows:
a rotation angle amplifying device for a wafer cassette transport cart, comprising: the vertical plate, the riser front surface left and right sides both ends are connected with keysets I and keysets II respectively, riser, keysets I and keysets II upper end are connected with the upper cover plate, keysets I and keysets II lower extreme are connected with the bottom plate, be provided with the tape seat bearing between keysets I and the keysets II, the inside pivot second that is provided with of tape seat bearing, be connected with the eccentric wheel in the middle of the pivot second, pivot second both ends extend to inboard keysets I and keysets two ends, pivot second left and right sides both ends are connected with the connecting rod first, the connecting rod upper end is provided with the connecting rod second, connecting rod first and connecting rod second outside upper end are connected with the connecting rod third, connecting rod third and connecting rod are connected through the round pin axle first, connecting rod second outside lower extreme is connected with the pivot first, the pivot first passes keysets I and keysets second, the pivot outside is connected with the keysets, a week is connected with the handle keysets outside the handle keysets.
Preferably, a first bearing is arranged at the joint of the first rotating shaft and the first and second outer adapter plates, and a second bearing is arranged at the joint of the first rotating shaft and the first and second inner adapter plates.
Preferably, flat keys are arranged at the joints of the second rotating shaft and the eccentric wheel, the handle adapter plate and the first rotating shaft, the first rotating shaft and the connecting rod, and the joints of the second rotating shaft and the connecting rod.
Preferably, a first bushing is arranged on the periphery of the outer surface of the first pin shaft, a second bushing is arranged on the periphery of the outer surface of the pin shaft, a first clamp spring is connected to one end of the pin shaft, and a second clamp spring is connected to one end of the pin shaft.
Preferably, the outer end of the rotating shaft I is connected with a cover plate I at the outer side of the handle adapter plate, and the inner end of the rotating shaft I is provided with a cover plate II at the inner sides of the adapter plate I and the adapter plate II.
Preferably, the rear surface of the vertical plate is connected with a shock absorber base, and the inclined plane at the upper end of the shock absorber base is connected with a rubber shock absorber.
Compared with the prior art, the invention has the following beneficial technical effects:
the rotating angle amplifying device for the wafer box transport vehicle is simple in structure, can be operated laterally, does not occupy the back space of the wafer box transport vehicle, amplifies the rotating angle of the handle on the second rotating shaft through the connecting rod structure, and reduces the space occupied by the rotation of the handle. The invention solves the problems that the lateral rotation handle cannot exceed the frame range of the wafer box transport vehicle due to space limitation, the handle can only rotate in a smaller range, the actual required rotation angle of the eccentric wheel of the adjusting lifting mechanism is larger, and if the rotating shaft is directly connected with the eccentric wheel for rotation, the handle can exceed the frame range of the wafer box transport vehicle.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic rear view of the present invention;
FIG. 3 is an installation view of the present invention;
FIG. 4 is a schematic diagram of the rotation angle magnification principle of the present invention;
fig. 5 is a schematic diagram of a rotation angle amplifying principle of the present invention.
In the figure: 1. a vertical plate; 2. an upper cover plate; 3. an adapter plate I; 4. a bearing with a seat; 6. an eccentric wheel; 7. an adapter plate II; 8. a handle; 10. a cover plate I; 11. a handle adapter plate; 12. a first bearing; 13. a first rotating shaft; 15. a second bearing; 16. a bottom plate; 17. a rubber damper; 18. a shock absorber base; 20. a pin shaft I; 21. a first bushing; 22. a first connecting rod; 23. a cover plate II; 24. a clamp spring I; 25. a second pin shaft; 26. a second bushing; 27. a second connecting rod; 28. a connecting rod III; 29. a second clamp spring; 30. and a second rotating shaft.
Detailed Description
The present invention will be described in detail with reference to specific embodiments and drawings, but the scope of the present invention is not limited by the specific embodiments and drawings.
Referring to fig. 1-5, the present invention provides a technical solution: a rotation angle amplifying device for a wafer cassette transport cart, comprising: a rotation angle amplification device for wafer box transport vechicle includes: the vertical plate 1, the left and right ends of the front surface of the vertical plate 1 are respectively connected with a first adapter plate 3 and a second adapter plate 7, the upper ends of the vertical plate 1, the first adapter plate 3 and the second adapter plate 7 are connected with an upper cover plate 2, the lower ends of the first adapter plate 3 and the second adapter plate 7 are connected with a bottom plate 16, a seat bearing 4 is arranged between the first adapter plate 3 and the second adapter plate 7, a rotating shaft 30 is arranged in the seat bearing 4, an eccentric wheel 6 is connected in the middle of the rotating shaft 30, two ends of the rotating shaft 30 extend to two ends of the first adapter plate 3 and the second adapter plate 7 on the inner side, the left and right ends of the rotating shaft 30 are connected with a first connecting rod 22, the upper end of the first connecting rod 22 is provided with a second connecting rod 27, the outer side upper ends of the first connecting rod 22 and the second connecting rod 27 are connected with a third connecting rod 28 through a pin shaft 20, the third connecting rod 28 and the second connecting rod 27 are connected with a rotating shaft 25 through a pin shaft 25, the outer side lower end of the second connecting rod 27 is connected with a rotating shaft 13, the first rotating shaft 13 passes through the first adapter plate 3 and the second adapter plate 7, and the handle 11 is connected with a handle 11 on the outer side of the rotating shaft 8; this a rotation angle amplification device for wafer box transport vechicle, simple structure can the side direction operation, need not to occupy wafer box transport vechicle back space, enlarges the rotation angle that handle 8 reacted on pivot two 30 through the link structure, reduces the rotatory space that occupies of handle 8.
As shown in fig. 1-3, an embodiment of the present invention provides an implementation manner, based on the above implementation manner, a first bearing 12 is disposed at a connection position of the first rotating shaft 13 and the first outer adapter plate 3, and a second bearing 15 is disposed at a connection position of the first rotating shaft 13 and the first inner adapter plate 3, and the second adapter plate 7.
By analyzing the structure, the friction between the contact part can be reduced by the first bearing 12 arranged at the joint of the first rotating shaft 13 and the first outer adapter plate 3 and the second adapter plate 7 and the second bearing 15 arranged at the joint of the first rotating shaft 13 and the first inner adapter plate 3 and the second adapter plate 7.
As shown in fig. 1-3, an embodiment of the present invention provides an implementation manner, based on the above implementation manner, a flat key is disposed at a connection position between the second rotating shaft 30 and the eccentric wheel 6, between the handle adapter plate 11 and the first rotating shaft 13, between the first rotating shaft 13 and the third connecting rod 28, and between the second rotating shaft 30 and the first connecting rod 22.
By analyzing the structure, the flat key at the joint of the second rotating shaft 30 and the eccentric wheel 6, the handle adapter plate 11 and the first rotating shaft 13, the first rotating shaft 13 and the second connecting rod 27, and the second rotating shaft 30 and the first connecting rod 22 can make the connection more stable and prevent idle running.
1-3, an embodiment of the present invention provides an implementation manner, based on the above implementation manner, a first bushing 21 is disposed on a circumference of an outer surface of the first pin 20, a second bushing 26 is disposed on a circumference of an outer surface of the second pin 25, one end of the first pin 20 is connected with a first snap spring 24, and one end of the second pin 25 is connected with a second snap spring 29.
By analyzing the structure, the first bushing 21 on the periphery of the outer surface of the first pin 20, the second bushing 26 on the periphery of the outer surface of the second pin 25 can reduce friction between the first pin 20 and the second pin 25, the first snap spring 24 connected with one end of the first pin 20, and the second snap spring 29 connected with one end of the second pin 25 can prevent the first pin 20 and the second pin 25 from moving axially.
As shown in fig. 1-3, an embodiment of the present invention provides an implementation manner, based on the above implementation manner, a cover plate one 10 is connected to the outer end of the first rotating shaft 13 and located at the outer side of the handle adapter plate 11, and a cover plate two 23 is provided to the inner end of the first rotating shaft 13 and located at the inner side of the adapter plate one 3 and the adapter plate two 7.
As can be seen from analyzing the above structure, the cover plate 10 at the outer end of the first rotating shaft 13 and located at the outer side of the handle adapter plate 11 and the cover plate 23 at the inner end of the first rotating shaft 13 and located at the inner sides of the first adapter plate 3 and the second adapter plate 7 can prevent the first rotating shaft 13 from moving longitudinally.
As shown in fig. 1-2, the embodiment of the present invention provides an implementation manner, based on the above implementation manner, the rear surface of the riser 1 is connected with a shock absorber base 18, and an upper end inclined plane of the shock absorber base 18 is connected with a rubber shock absorber 17.
As can be seen from an analysis of the above structure, the damper base 18 is fixed on the rear surface of the riser 1, and the rubber damper 17 contacts the first shaft 13, so that the rubber damper 17 absorbs a certain jump of the first shaft 13 when the first shaft 13 rotates to vibrate.
When the handle 8 is held by both hands and pulled backwards, the handle adapter plate 11 is fixedly connected with the handle 8, the handle adapter plate 11 is fixedly connected with the first rotating shaft 13, the handle 8 is pulled to drive the handle adapter plate 11 to rotate together with the first rotating shaft 13, the first rotating shaft 13 is fixedly connected with the third connecting rod 28, the second connecting rod 27 rotates together, the first connecting rod 22 is connected with the third connecting rod 28 through the first pin shaft 20, the third connecting rod 28 is connected with the second connecting rod 27 through the second pin shaft 25, the first connecting rod 22 is fixedly connected with the second rotating shaft 30, the first rotating shaft 13 can pull the second connecting rod 27, the second connecting rod 27 can pull the first connecting rod 11 to drive the second rotating shaft 30 to rotate, the eccentric wheel 6 fixedly connected with the second rotating shaft 30 is driven to rotate, the second rotating angle of the second connecting rod 27 does not need to be too large, and the second eccentric wheel 6 can also rotate at a large angle.
Claims (7)
1. A rotation angle amplifying device for a wafer cassette transport vehicle, comprising: the vertical plate (1), the left and right ends of the front surface of the vertical plate (1) are respectively connected with a first adapter plate (3) and a second adapter plate (7), the upper ends of the vertical plate (1), the first adapter plate (3) and the second adapter plate (7) are connected with an upper cover plate (2), the lower ends of the first adapter plate (3) and the second adapter plate (7) are connected with a bottom plate (16), a seat bearing (4) is arranged between the first adapter plate (3) and the second adapter plate (7), a rotating shaft II (30) is arranged in the seat bearing (4), an eccentric wheel (6) is connected between the rotating shaft II (30), the two ends of the rotating shaft II (30) extend to the two ends of the first adapter plate (3) and the second adapter plate II (7), the left and right ends of the rotating shaft II (30) are connected with a connecting rod I (22), the upper ends of the connecting rod I (22) and the outer side of the connecting rod II (27) are connected with a connecting rod III (28), the first connecting rod II (22) and the outer side of the connecting rod II (27) are connected with the connecting rod III (28) through a pin shaft II (27), the rotary shaft I (13) penetrates through the adapter plate I (3) and the adapter plate II (7), the handle adapter plate (11) is connected to the outer side of the rotary shaft I (13), and the handle (8) is connected to one circle of the outer side of the handle adapter plate (11).
2. The rotation angle amplifying device for a wafer cassette transport cart according to claim 1, wherein: the bearing I (12) is arranged at the joint of the rotating shaft I (13) and the outer adapter plate I (3) and the adapter plate II (7), and the bearing II (15) is arranged at the joint of the rotating shaft I (13) and the inner adapter plate I (3) and the adapter plate II (7).
3. The rotation angle amplifying device for a wafer cassette transport cart according to claim 1, wherein: and flat keys are arranged at the joints of the second rotating shaft (30) and the eccentric wheel (6), the handle adapter plate (11) and the first rotating shaft (13), the first rotating shaft (13) and the second connecting rod (27) and the joints of the second rotating shaft (30) and the first connecting rod (22).
4. The rotation angle amplifying device for a wafer cassette transport cart according to claim 1, wherein: a first bushing (21) is arranged on the periphery of the outer surface of the first pin shaft (20), a second bushing (26) is arranged on the periphery of the outer surface of the second pin shaft (25), one end of the first pin shaft (20) is connected with a first clamp spring (24), and one end of the second pin shaft (25) is connected with a second clamp spring (29).
5. The rotation angle amplifying device for a wafer cassette transport cart according to claim 1, wherein: the handle adapter plate is characterized in that a cover plate I (10) is connected to the outer end of the rotating shaft I (13) and located on the outer side of the handle adapter plate (11), and a cover plate II (23) is arranged on the inner end of the rotating shaft I (13) and located on the inner sides of the adapter plate I (3) and the adapter plate II (7).
6. The rotation angle amplifying device for a wafer cassette transport cart according to claim 1, wherein: the rear surface of the vertical plate (1) is connected with a shock absorber base (18), and the inclined plane at the upper end of the shock absorber base (18) is connected with a rubber shock absorber (17).
7. The method of any one of claims 1-6, wherein the method comprises the steps of:
when the handle (8) is held by two hands and pulled backwards, the handle adapter plate (11) is fixedly connected with the handle (8), the handle adapter plate (11) is fixedly connected with the first rotating shaft (13), the handle (8) can drive the handle adapter plate (11) to rotate together with the first rotating shaft (13), the first rotating shaft (13) is fixedly connected with the third connecting rod (28) so that the second connecting rod (27) can rotate together, the first connecting rod (22) is connected with the third connecting rod (28) through the first pin shaft (20), the third connecting rod (28) is connected with the second connecting rod (27) through the second pin shaft (25), the first connecting rod (22) is fixedly connected with the second rotating shaft (30), the first rotating shaft (13) can pull the second connecting rod (27), the first connecting rod (22) can drive the second rotating shaft (30) to rotate together, and accordingly the eccentric wheel (6) fixedly connected with the second rotating shaft (30) can rotate at a large angle, and the eccentric wheel (6) can rotate at a large angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311502290.5A CN117238823B (en) | 2023-11-13 | 2023-11-13 | Rotation angle amplifying device for wafer box transport vehicle and working method of rotation angle amplifying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311502290.5A CN117238823B (en) | 2023-11-13 | 2023-11-13 | Rotation angle amplifying device for wafer box transport vehicle and working method of rotation angle amplifying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117238823A CN117238823A (en) | 2023-12-15 |
| CN117238823B true CN117238823B (en) | 2024-01-30 |
Family
ID=89098740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311502290.5A Active CN117238823B (en) | 2023-11-13 | 2023-11-13 | Rotation angle amplifying device for wafer box transport vehicle and working method of rotation angle amplifying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117238823B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990011089A (en) * | 1997-07-16 | 1999-02-18 | 임채환 | Wafer cassette rotator |
| KR20040070774A (en) * | 2003-02-04 | 2004-08-11 | 아남반도체 주식회사 | Apparatus for wafer cassette loading/unloading of the implant equipment |
| CN101459101A (en) * | 2009-01-09 | 2009-06-17 | 富创得科技（沈阳）有限公司 | Automatic conveying device for turnover type wafer |
| KR20090129078A (en) * | 2008-06-12 | 2009-12-16 | (주)고려호이스트 | Wafer cartridge cart |
| KR20100071550A (en) * | 2008-12-19 | 2010-06-29 | 한미반도체 주식회사 | Transfer apparatus for wafer cassette |
| KR20100077635A (en) * | 2008-12-29 | 2010-07-08 | 삼성테크윈 주식회사 | Wafer automatic feeder |
| JP2015032763A (en) * | 2013-08-06 | 2015-02-16 | 株式会社Sumco | Wafer transportation wagon and wafer transportation method |
| CN112885758A (en) * | 2020-12-31 | 2021-06-01 | 至微半导体(上海)有限公司 | Push-pull type wafer box conveying method of wafer cleaning equipment |
| CN217376094U (en) * | 2022-05-20 | 2022-09-06 | 华芯(嘉兴)智能装备有限公司 | Be used for OHT wide-angle rotary device |
| CN116825687A (en) * | 2023-06-29 | 2023-09-29 | 江苏弘琪工业自动化有限公司 | Wafer cassette (SMIF) loading device suitable for 8 inch wafer |
-
2023
- 2023-11-13 CN CN202311502290.5A patent/CN117238823B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990011089A (en) * | 1997-07-16 | 1999-02-18 | 임채환 | Wafer cassette rotator |
| KR20040070774A (en) * | 2003-02-04 | 2004-08-11 | 아남반도체 주식회사 | Apparatus for wafer cassette loading/unloading of the implant equipment |
| KR20090129078A (en) * | 2008-06-12 | 2009-12-16 | (주)고려호이스트 | Wafer cartridge cart |
| KR20100071550A (en) * | 2008-12-19 | 2010-06-29 | 한미반도체 주식회사 | Transfer apparatus for wafer cassette |
| KR20100077635A (en) * | 2008-12-29 | 2010-07-08 | 삼성테크윈 주식회사 | Wafer automatic feeder |
| CN101459101A (en) * | 2009-01-09 | 2009-06-17 | 富创得科技（沈阳）有限公司 | Automatic conveying device for turnover type wafer |
| JP2015032763A (en) * | 2013-08-06 | 2015-02-16 | 株式会社Sumco | Wafer transportation wagon and wafer transportation method |
| CN112885758A (en) * | 2020-12-31 | 2021-06-01 | 至微半导体(上海)有限公司 | Push-pull type wafer box conveying method of wafer cleaning equipment |
| CN217376094U (en) * | 2022-05-20 | 2022-09-06 | 华芯(嘉兴)智能装备有限公司 | Be used for OHT wide-angle rotary device |
| CN116825687A (en) * | 2023-06-29 | 2023-09-29 | 江苏弘琪工业自动化有限公司 | Wafer cassette (SMIF) loading device suitable for 8 inch wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117238823A (en) | 2023-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20190284680A1 (en) | Turnover mechanism and coating production line | |
| CN209889797U (en) | Battery cell pairing object streamline | |
| CN117238823B (en) | Rotation angle amplifying device for wafer box transport vehicle and working method of rotation angle amplifying device | |
| KR102264358B1 (en) | Drive wheel device including a pair of wheels to control the movement of the parking robot and parking robot | |
| CN106733506A (en) | Steel drum bottom cover glue-spraying device | |
| JP2006347424A (en) | Conveying truck | |
| CN219465161U (en) | Battery welding system | |
| CN205114997U (en) | AGV dolly automatic rising drive mechanism | |
| CN106734705A (en) | Decompressor and its manipulator | |
| CN213799295U (en) | AGV car and assembly line thereof | |
| CN213325620U (en) | Automatic glass steering device | |
| CN212391223U (en) | Driving wheel detection module and assembly detection platform comprising same | |
| CN219602550U (en) | Novel copper pipeline shift fork unloading device | |
| CN207346527U (en) | A kind of traversing platform of ground pit type Mobile garbage station | |
| CN110153874A (en) | Wafer planarization equipment wafer transfer approach | |
| CN220462814U (en) | Adjusting device for welding | |
| CN209849632U (en) | Transition turnover mechanism | |
| CN212268584U (en) | Electromechanical device transport table convenient to loading and unloading | |
| JP2009083028A (en) | Workpiece reversing device | |
| JP4157509B2 (en) | Fitting device for tire assembly | |
| CN214731705U (en) | Mobile transportation system | |
| CN218706706U (en) | Automatic centering device for assembly line parts | |
| CN109132931A (en) | A kind of transport trolley of illegally assembled car chassis band picking-up structure | |
| CN211915961U (en) | Rotary displacement device and welding system | |
| CN212637738U (en) | AGV dolly with vertical lifting and horizontal conveying function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |