CN117231657B - Rotation limiting check device for wafer box transport vehicle and working method of rotation limiting check device - Google Patents
Rotation limiting check device for wafer box transport vehicle and working method of rotation limiting check device Download PDFInfo
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- CN117231657B CN117231657B CN202311497521.8A CN202311497521A CN117231657B CN 117231657 B CN117231657 B CN 117231657B CN 202311497521 A CN202311497521 A CN 202311497521A CN 117231657 B CN117231657 B CN 117231657B
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- check
- main shaft
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- 238000000034 method Methods 0.000 title abstract description 7
- 238000003825 pressing Methods 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 230000006835 compression Effects 0.000 abstract description 2
- 238000007906 compression Methods 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 34
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of semiconductor processing, and discloses a rotation limiting check device for a wafer box transport vehicle and a working method thereof. The device comprises a vertical plate, wherein an eccentric wheel is arranged at the right end of the vertical plate, a seat bearing, a main shaft and a limiting adapter plate II are arranged at the left end of the vertical plate, a limiting block II is inserted into the limiting adapter plate II, the seat bearing and the rear end of the main shaft are provided with the limiting adapter plate II, the limiting adapter plate I and the limiting block I, a check block is arranged on the left surface of the vertical plate, a guide block and a compression rod are connected at the upper end of the vertical plate, a spring strut I is arranged on the upper surface of the check block, a spring strut II is arranged at the upper end of the left surface of the vertical plate, a tension spring is connected between the spring strut I and the spring strut II, and a stop block is arranged at the upper end of the main shaft. The invention solves the problems that the limit device of the current equipment proposal is arranged near the rotating shaft, the turntable is required to be detached when the limit is adjusted, and the non-return device is not arranged in the current equipment proposal, and the turntable structure has the risk of shaking and falling the wafer box caused by inversion when the wafer box is taken.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a rotation limiting check device for a wafer box transport vehicle and a working method thereof.
Background
At present, in the field of semiconductor processing, the production of wafers needs to be processed at different work stations, and in the transportation process of each work station, the wafers need to be placed in the wafer boxes, and the wafer box transport vehicle is a common wafer box transport device. The wafer box is usually placed on a wafer loader, a wafer box transport vehicle is moved to be right in front of the wafer loader and is in butt joint through a standard interface, the wafer box transport vehicle needs to act at a front station and a rear station respectively, and the wafer box is taken down from the wafer loader for transferring; the action requires that the wafer box transport vehicle has an upper limit position and a lower limit position, when the wafer box is taken out, the wafer box transport vehicle is required to be converted from the lower limit position to the upper limit position, when the wafer box transport vehicle is taken out for transferring, the wafer box is required to be converted from the upper limit position to the lower limit position, jolt during transferring is reduced, and the wafer box is ensured to be in a relatively stable state. The current equipment scheme stop device is installed near the pivot, need pull down the carousel when adjusting spacing limit, and current equipment scheme does not have non return device simultaneously, and the carousel structure has the risk that takes place the reversal and lead to wafer box vibrations to fall when getting the wafer box.
Disclosure of Invention
In order to solve the technical problems, the invention provides a rotation limiting check device for a wafer box transport vehicle and a working method thereof.
The specific technical scheme is as follows:
the invention provides a rotation limiting check device for a wafer box transport vehicle, which comprises: the vertical plate is provided with an eccentric wheel at the right end, the left end of the vertical plate is provided with a first limit adapter plate and a first limit block, the first limit adapter plate, the second limit adapter plate and the first limit block are fixed on the left surface of the vertical plate through screws, a check block is arranged at the upper end of the vertical plate, a through hole is formed in the check block, a first bushing and a second bushing are respectively arranged at the left end and the right end of the through hole in the check block, the second limit block is internally inserted and connected with the second limit block, the second limit block is a spindle with a larger end diameter and a smaller end diameter, the first limit adapter plate and the first limit block are arranged at the rear end of the vertical plate, the first limit adapter plate and the first limit block are in the same shape as the second limit adapter plate, the second limit adapter plate and the second limit block are fixed on the left surface of the vertical plate through screws, a first check block is arranged on the left surface of the vertical plate, a first check block is arranged at the upper end of the check block, a first pin is arranged in the check block, a second through hole is respectively arranged at the left end and right end of the check block, a second bushing is inserted and connected with the vertical plate through hole, a first pin is arranged at the right end of the check block, a straight line is inserted and connected with the upper end of the vertical plate, a straight line is provided with a straight line, a guide pin is arranged at the upper end is connected with the upper end, a straight line, a lower end is connected with the upper end is arranged at the upper end of the straight line, a guide pin is connected with the upper end, a lower end is arranged at the upper end, and the straight end is provided with a straight line, and the upper end is provided with a lower end, and the upper end is provided. The rotary table is inserted and connected to the left end of the main shaft, the cover plate is arranged at the left end of the rotary table, and the cover plate is connected with the rotary table and the main shaft through bolts.
Preferably, a handle is fixedly connected to the outer side of the rotary table.
Preferably, a spacer bush is arranged between the bearing with the seat and the eccentric wheel.
Preferably, a spring is arranged between one end of the first limiting block and the second limiting block, which is larger in diameter, and the outer side of the first limiting adapter plate and the outer side of the second limiting adapter plate.
Preferably, rubber protection pads are arranged on the upper surfaces of the first limiting block and the second limiting block.
Preferably, one ends of the first limiting block and the second limiting block, which are smaller in diameter, are made of metal materials.
Compared with the prior art, the invention has the following beneficial technical effects:
the rotation limiting check device for the wafer box transport vehicle is simple in structure and convenient to use, the upper limit position and the lower limit position of the turntable can be adjusted through the screws, the turntable is prevented from reversing through the tension spring and the check block structure, and the stability of the wafer box transport vehicle when the wafer box is taken and placed is improved. The invention solves the problems that the limit device of the current equipment proposal is arranged near the rotating shaft, the turntable is required to be detached when the limit is adjusted, and the non-return device is not arranged in the current equipment proposal, and the turntable structure has the risk of shaking and falling the wafer box caused by inversion when the wafer box is taken.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of an upper limit check station of the present invention;
FIG. 3 is a schematic view of an upper limit unlocking station of the present invention;
fig. 4 is a schematic view of a lower limit station of the present invention.
In the figure: 1. a vertical plate; 2. a spacer bush; 3. an eccentric wheel; 4. a backing plate; 5. a bearing with a seat; 6. a first limiting adapter plate; 7. a first limiting block; 8. a second limiting block; 9. a limiting adapter plate II; 10. a main shaft; 11. a button; 12. a linear bearing; 13. a guide block; 14. a compression bar; 15. clamping springs; 16. a tension spring strut I; 17. a tension spring; 18. a cylindrical pin; 19. a tension spring strut II; 20. a non-return block; 21. a first bushing; 22. a second bushing; 23. a contour screw; 24. a stop block; 25. a turntable; 26. and a cover plate.
Detailed Description
The present invention will be described in detail with reference to specific embodiments and drawings, but the scope of the present invention is not limited by the specific embodiments and drawings.
As shown in fig. 1 to 4, the rotation limiting check device for a wafer cassette transport vehicle of the present invention includes: the vertical plate 1, the right-hand member of vertical plate 1 is provided with eccentric wheel 3, the left end of vertical plate 1 is provided with take seat bearing 5, be provided with backing plate 4 between taking seat bearing 5 and the vertical plate, pass through screw connection between eccentric wheel 3 and the taking seat bearing 5, take seat bearing 5 left end to insert and be connected with main shaft 10, take seat bearing 5 and main shaft 10 front end to be provided with spacing keyless entry second 9, spacing keyless entry second 9 inside is inserted and is connected with stopper second 8, stopper second 8 is the spindle that one end diameter is great one end diameter is less, take seat bearing 5 and main shaft keyless entry second 9, stopper second 8 rear end be provided with spacing keyless entry first 6 and stopper first 7 the same shape, spacing keyless entry first 6, stopper first 7 spacing keyless entry second 9 and stopper second 8 pass through the screw fixation at riser 1 left surface, the left surface of the vertical plate 1 and the upper end of the bearing 5 with a seat are provided with check blocks 20, through holes are formed in the check blocks 20, a bushing I21 and a bushing II 22 are respectively arranged at the left end and the right end of the through holes in the check blocks 20, cylindrical pins 18 which are inserted and connected with the vertical plate 1 are arranged at the right end of the check blocks 20, equal-height screws 23 are inserted and connected at the left end of the check blocks 20, the right end of the equal-height screws 23 and the cylindrical pins 18 are inserted and connected, the upper end of the left surface of the vertical plate 1 is connected with a guide block 13, the upper end of the guide block 13 is provided with a linear bearing 12, the upper end of the linear bearing 12 is provided with a button 11, the lower end of the button 11 is connected with a pressing rod 14, the pressing rod 14 extends to the lower end of the guide block 13 through the linear bearing 12, a clamp spring 15 is arranged at the lower end of the pressing rod 14 and the upper surface of the check block 20, the upper surface of the check block 20 is provided with a spring strut I16, the upper end of the left surface of the vertical plate 1 and positioned at the rear end of the guide block 13 are provided with a second spring support 19, an extension spring 17 is connected between the first spring support 16 and the second spring support 19, the upper end of the main shaft 10 is provided with a stop block 24, the left end of the main shaft 10 is inserted and connected with a turntable 25, the left end of the turntable 25 is provided with a cover plate 26, and the cover plate 26 is connected with the turntable 25 and the main shaft 10 through bolts; the device has the advantages that the structure is simple, the use is convenient, the upper limit position and the lower limit position of the turntable can be adjusted through the screws, the turntable is prevented from reversing through the tension spring and the check block structure, and the stability of the wafer box transport vehicle when the wafer box is taken and placed is improved.
As shown in fig. 1, an embodiment of the present invention provides an implementation manner, and based on the above implementation manner, a handle is fixedly connected to the outer side of the turntable 25.
As can be seen from an analysis of the above structure, the single turntable 25 is not easy to hold, and therefore, the handle is fixedly connected to the outer side of the turntable 25, and when the turntable 25 needs to be rotated, the handle is only needed to be held for rotation.
As shown in fig. 1, the embodiment of the present invention provides an implementation manner, and based on the above implementation manner, a spacer 2 is disposed between the bearing 5 with the base and the eccentric 3.
By analyzing the structure, the sizes and shapes of the wafer boxes with different specifications are different, so that the position of the eccentric wheel 3 is not necessarily required, and the distance between the eccentric wheel 3 and the bearing with the seat 5 can be controlled by adjusting the width of the spacer bush 2.
As shown in fig. 1-4, an embodiment of the present invention provides an implementation manner, and based on the above implementation manner, springs are disposed between one ends of the first limiting block 7 and the second limiting block 8, which have larger diameters, and the outer sides of the first limiting adapter plate 6 and the second limiting adapter plate 9.
According to the analysis of the structure, when the stop block 24 rotates, the stop block I7 and the stop block II 8 can be collided, the contact surfaces of the stop block 24 and the stop block I7 as well as the stop block II 8 can be worn due to overlarge force, and the whole structure can be irradiated to shake due to overlarge impact force, so that springs are arranged between one ends of the stop block I7 and the stop block II 8, which are larger in diameter, and the outer sides of the stop adapter plate I6 and the stop adapter plate II 9, and when the stop block 24 is impacted, the force can be absorbed by the springs first, so that the impact force is reduced.
As shown in fig. 1-4, an embodiment of the present invention provides an implementation manner, based on the above implementation manner, the upper surfaces of the first stopper 7 and the second stopper 8 are both provided with rubber protection pads.
By analyzing the above structure, the rubber protection pads on the upper surfaces of the first and second limiting blocks 7 and 8 can reduce the impact force of the stop block 24 on the first and second limiting blocks 7 and 8, and reduce the abrasion of the upper surfaces of the first and second limiting blocks 7 and 8.
As shown in fig. 1-4, an embodiment of the present invention provides an implementation manner, based on the above implementation manner, one ends of the first limiting block 7 and the second limiting block 8 with smaller diameters are made of metal materials, and the metal materials are aluminum alloy or stainless steel.
As can be seen from analyzing the above structure, when the stop block 24 hits the first stop block 7 and the second stop block 8, the smaller ends of the first stop block 7 and the second stop block 8 will rub against the first stop adapter plate 6 and the second stop adapter plate 9, so that the metal material is used to reduce the loss of the first stop block 7 and the second stop block 8.
When the novel anti-return device is used, the handle rotating turntable 25 is covered, the turntable 25 drives the spindle 10 to rotate together, the seat bearing 5 and the spindle 10 are fixedly connected through the bolts, when the spindle 10 rotates, the seat bearing 5 rotates along with the rotation together, the eccentric wheel 3 rotates, the wafer box can be lifted when the eccentric wheel 3 rotates, meanwhile, the press rod 14 presses the front end of the anti-return block 20 along with the gradual lifting of the involute of the eccentric wheel 3 when the eccentric wheel 3 is lifted, when the eccentric wheel 3 slowly rotates, the stop block 24 on the spindle 10 moves along with the spindle 10 in a rotating mode, the rear end of the anti-return block 20 is lifted firstly in the process, when the end is reached, the anti-return block 20 falls down, meanwhile, the stop block 24 is blocked by the upper limit end of the first limit block 7, the rear end of the anti-return block 20 is blocked by the rotation, the whole mechanism cannot move, the eccentric wheel 3 can reach the highest position, the press button is only pressed down, the press rod 14 presses the front end of the anti-return block 20 along with the involute of the eccentric wheel 3, the rotation of the anti-return block 20 is wound around the equal-return screw 23, the stop block 24 can not be lifted up to the position when the eccentric wheel is stretched, the stop block 20 can not be pulled up to the position when the eccentric wheel is stretched, and the stop block 20 can not be pulled to the position when the stop block is stretched to the position is stretched, and the position of the stop block 20 is not be stretched, and the position is not reached, and the position is the maximum.
Claims (6)
1. A rotatory spacing non return device for wafer box transport vechicle, characterized in that includes: the vertical plate (1), vertical plate (1) right-hand member is provided with eccentric wheel (3), vertical plate (1) left end is provided with take seat bearing (5), take seat bearing (5) to be provided with backing plate (4) between the vertical plate, pass through screw connection between eccentric wheel (3) and the take seat bearing (5), take seat bearing (5) left end to insert and be connected with main shaft (10), take seat bearing (5) and main shaft (10) front end to be provided with spacing keysets up second (9), spacing keysets up second (9) inside to insert and be connected with stopper keysets (8), stopper second (8) are the spindle type that one end diameter is great one end diameter is less, take seat bearing (5) and main shaft (10) rear end to be provided with spacing keysets second (9), stopper second (8) limit plate (6) and stopper first (7) that the shape is the same, spacing keysets second (9) and second (8) pass through stopper (1) to be fixed on vertical plate (1) and take the left end surface (20) to set up check block, the surface is provided with check block (20), the left end and the right end of the through hole inside the check block (20) are respectively provided with a bushing I (21) and a bushing II (22), the right end of the check block (20) is provided with a cylindrical pin (18) which is inserted and connected with the vertical plate (1), the left end of the check block (20) is inserted and connected with a constant-height screw (23), the right end of the constant-height screw (23) is inserted and connected with the cylindrical pin (18), the upper end of the left surface of the vertical plate (1) is connected with a guide block (13), the upper end of the guide block (13) is provided with a linear bearing (12), the upper end of the linear bearing (12) is provided with a button (11), the lower end of the button (11) is connected with a pressing rod (14), the pressing rod (14) penetrates through the linear bearing (12) to extend to the lower end of the guide block (13), the lower end of the pressing rod (14) is provided with a clamp spring (15) which is positioned on the upper surface of the check block (20), the upper surface of the check block (20) is provided with a spring strut I (16), the upper surface of the vertical plate (1) is connected with a guide block (13), the upper end of the guide block (19) is positioned on the left surface of the vertical plate (1), the upper end of the guide block is provided with a spring II (19), the main shaft (19) is connected with a main shaft (17), the left end of the rotary table (25) is provided with a cover plate (26), and the cover plate (26) is connected with the rotary table (25) and the main shaft (10) through bolts.
2. The rotation limiting check device for a wafer cassette transport cart of claim 1, wherein: the outer side of the turntable (25) is fixedly connected with a handle.
3. The rotation limiting check device for a wafer cassette transport cart of claim 1, wherein: a spacer bush (2) is arranged between the bearing (5) with the seat and the eccentric wheel (3).
4. The rotation limiting check device for a wafer cassette transport cart of claim 1, wherein: and springs are arranged between one ends of the first limiting block (7) and the second limiting block (8) with larger diameters and the outer sides of the first limiting adapter plate (6) and the second limiting adapter plate (9).
5. The rotation limiting check device for a wafer cassette transport cart of claim 1, wherein: rubber protection pads are arranged on the upper surfaces of the first limiting block (7) and the second limiting block (8).
6. The rotation limiting check device for a wafer cassette transport cart of claim 1, wherein: and one ends of the first limiting block (7) and the second limiting block (8) with smaller diameters are made of metal materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311497521.8A CN117231657B (en) | 2023-11-11 | 2023-11-11 | Rotation limiting check device for wafer box transport vehicle and working method of rotation limiting check device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311497521.8A CN117231657B (en) | 2023-11-11 | 2023-11-11 | Rotation limiting check device for wafer box transport vehicle and working method of rotation limiting check device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117231657A CN117231657A (en) | 2023-12-15 |
| CN117231657B true CN117231657B (en) | 2024-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311497521.8A Active CN117231657B (en) | 2023-11-11 | 2023-11-11 | Rotation limiting check device for wafer box transport vehicle and working method of rotation limiting check device |
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| CN (1) | CN117231657B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2475579A1 (en) * | 1979-12-21 | 1981-08-14 | Varian Associates | THIN SUBSTRATE TRAINING MACHINE AND ITS HEAT TRANSPORT AND TRANSMISSION DEVICES |
| KR20100073670A (en) * | 2008-12-23 | 2010-07-01 | 황무성 | Wafer transporting system, semiconductor fabrication plant structure using the same and wafer transporting method |
| CN110299312A (en) * | 2019-07-04 | 2019-10-01 | 深圳市诺泰自动化设备有限公司 | A kind of rotary type tower bonder |
| CN211350593U (en) * | 2020-03-19 | 2020-08-25 | 深圳新益昌科技股份有限公司 | Die bonder |
| CN115588639A (en) * | 2022-12-12 | 2023-01-10 | 常州铭赛机器人科技股份有限公司 | Chip supply device and chip supply method |
| CN115775756A (en) * | 2022-12-20 | 2023-03-10 | 常州铭赛机器人科技股份有限公司 | Positioning supply mechanism, die bonder and chip positioning supply method |
-
2023
- 2023-11-11 CN CN202311497521.8A patent/CN117231657B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2475579A1 (en) * | 1979-12-21 | 1981-08-14 | Varian Associates | THIN SUBSTRATE TRAINING MACHINE AND ITS HEAT TRANSPORT AND TRANSMISSION DEVICES |
| KR20100073670A (en) * | 2008-12-23 | 2010-07-01 | 황무성 | Wafer transporting system, semiconductor fabrication plant structure using the same and wafer transporting method |
| CN110299312A (en) * | 2019-07-04 | 2019-10-01 | 深圳市诺泰自动化设备有限公司 | A kind of rotary type tower bonder |
| CN211350593U (en) * | 2020-03-19 | 2020-08-25 | 深圳新益昌科技股份有限公司 | Die bonder |
| CN115588639A (en) * | 2022-12-12 | 2023-01-10 | 常州铭赛机器人科技股份有限公司 | Chip supply device and chip supply method |
| CN115775756A (en) * | 2022-12-20 | 2023-03-10 | 常州铭赛机器人科技股份有限公司 | Positioning supply mechanism, die bonder and chip positioning supply method |
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| CN117231657A (en) | 2023-12-15 |
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