CN117148318B - Coherent detector and laser radar chip - Google Patents
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- CN117148318B CN117148318B CN202311402997.9A CN202311402997A CN117148318B CN 117148318 B CN117148318 B CN 117148318B CN 202311402997 A CN202311402997 A CN 202311402997A CN 117148318 B CN117148318 B CN 117148318B
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- 230000001427 coherent effect Effects 0.000 title claims abstract description 35
- 230000005855 radiation Effects 0.000 claims description 37
- 230000003287 optical effect Effects 0.000 claims description 24
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- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
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- 238000005530 etching Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 10
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- 239000002184 metal Substances 0.000 description 6
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- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
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- 238000004519 manufacturing process Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000003877 atomic layer epitaxy Methods 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
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- 238000005224 laser annealing Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
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- Optical Radar Systems And Details Thereof (AREA)
Abstract
The invention provides a coherent detector and a laser radar chip, which relate to the technical field of laser radars, wherein the coherent detector comprises: a grating, a photodetector, and a filter; the grating and the photoelectric detector are vertically aligned and distributed, so that light radiated downwards is fully utilized, part of light in the incident light is upwardly radiated to the space through the grating, and the other part of light in the incident light is downwardly radiated to the photoelectric detector through the grating, so that the light energy utilization rate is improved. The coherent detector structure and the laser radar chip with the grating and the photoelectric detector distributed up and down are compact in structure, the highest utilization rate of light energy is achieved, and the chip can be integrated by a CMOS (complementary metal oxide semiconductor) process, so that low cost and high processing precision can be realized.
Description
Technical Field
The invention relates to the technical field of laser radars, in particular to a coherent detector and a laser radar chip.
Background
Laser radar has been widely used in many fields, from smart phones, to autopilots, to unmanned aerial vehicles, etc. Different applications put different requirements on the laser radar, but the laser radar with low cost and small size is a common requirement of all laser radars, and the all-solid-state laser radar adopting the silicon-based optoelectronic integrated chip is a powerful means for achieving the target. The frequency modulated continuous wave method is advantageous over the time of flight method in terms of measurement methods. The chip type laser radar has few reports at present, and the existing chip type coherent detector laser radar chip has the defects of insufficient compact structure and high light energy loss.
In the current market, the grating can scatter in both upward and downward directions, and the scattered light beam enters the substrate and is lost, so that only the scattered light beam can be utilized by the laser radar system, and the light energy utilization rate is low.
FIG. 1 is a schematic diagram of a lidar system with a detector, wherein incident light is split into an upward beam and a downward beam after passing through a grating, a majority of the upward beam is output through a lens (not shown), and a small portion of the upward beam is reflected by the lens as local light, which is returned to the detector in the receiving unit; the method for acquiring the local light by means of reflection of the lens has the advantages that firstly, the structure is not compact enough, the mixing effect of the local light and the signal light is poor, the control is difficult, and the control is difficult; and secondly, the downward light beam in the emitted light is completely wasted, and the light energy utilization rate is low.
Disclosure of Invention
Aiming at the problems in the background technology, the invention provides a coherent detector and a laser radar chip, which solve the defects of a laser radar detection device in the prior art.
The technical scheme for solving the technical problems is as follows:
a coherent detector for a lidar, comprising:
a grating, a photodetector, and a filter;
the grating and the photoelectric detector are vertically aligned and distributed, part of light in the incident light is upwards radiated to the space by the grating, and the other part of light in the incident light is downwards radiated to the photoelectric detector by the grating.
Preferably, the filter is a high pass filter.
Preferably, the grating adopts a unidirectional radiation grating, the unidirectional radiation grating radiates more than 90% of light in the incident light upwards to the space, and the unidirectional radiation grating radiates the rest of light in the incident light downwards to the photodetector as local light.
Preferably, the grating adopts a common grating, the common grating enables light which is radiated upwards to the space and light which is radiated downwards to the photoelectric detector in incident light to be approximately equal, one electrode of the photoelectric detector is used as a reflecting mirror of the common grating, part of light which is radiated downwards to the photoelectric detector is reflected upwards to the space, and the rest of light which is radiated downwards to the photoelectric detector is used as local light.
Preferably, the grating is divided into two sections, the first section is an upward unidirectional radiation grating for radiating incident light upward to a space, the second section is a downward unidirectional radiation grating for radiating the incident light downward to the photodetector, and the downward unidirectional radiation grating and the photodetector are vertically aligned and distributed as local light.
Preferably, the photodetector receives the local light and the light returned after the light in the space is reflected by the target object, and the photodetector converts the light signal into an electrical signal, wherein the electrical signal comprises a direct current signal and an alternating current signal, the direct current signal is removed through the filter, and the alternating current signal carries information of the distance and the speed of the object.
Preferably, the photodetector receives the local light and the light in space passes through the downward unidirectional radiation grating after being reflected by the target object, and converts the optical signal into an electrical signal, wherein the electrical signal comprises a direct current signal and an alternating current signal, the direct current signal is removed through the filter, and the alternating current signal carries information of the distance and the speed of the object.
A lidar chip comprising an input optical waveguide, a 1 xn optical switch array, a transceiver unit, and a lens, wherein the transceiver unit comprises any of the above coherent detectors.
Preferably, the transceiver unit further comprises a beam expander, which is a multi-waveguide structure implemented with Y-splitters or directional couplers, each waveguide being connected to one of the coherent detectors.
The beneficial effects of the invention are as follows:
(1) The acquisition of local light does not depend on lens reflection, and the device has compact structure, small volume and high integration level;
(2) The photoelectric detector and the grating are vertically aligned and distributed, the grating upwardly radiates part of light in the incident light to the space, the grating downwardly radiates the other part of light in the incident light to the photoelectric detector, and the downwardly radiated part of light is not wasted, can be used as local light, and has higher light energy utilization rate;
(3) A unidirectional radiation grating can be adopted, more than 90% of light is scattered in one direction, and the energy efficiency of the grating is improved; meanwhile, the rest of light scattered downwards is fully utilized, so that the light energy utilization rate is further improved, and the loss is greatly reduced;
(4) The common grating can be adopted to save cost, and when the common grating is adopted, the electrode of the photoelectric detector can be used as a reflecting mirror of part of light and is distributed below the grating, so that the control is easy;
(5) The detector can be a common PN junction type detector, an avalanche photodiode or any other photoelectric conversion device, and the type of the detector is not limited;
(6) The segmented unidirectional radiation grating with high unidirectional property can be adopted, the transmission and the reception are separated, the shielding is avoided, and the energy control of local light is easy to realize.
Drawings
For easier understanding of the present invention, the present invention will be described in more detail by referring to specific embodiments shown in the drawings. These drawings depict only typical embodiments of the invention and are not therefore to be considered to limit the scope of the invention.
FIG. 1 is a schematic diagram of a prior art lidar system;
fig. 2 is a schematic structural diagram of a coherent detection lidar system according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a transceiver unit according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a coherent detector according to an embodiment of the present invention;
FIG. 5 is a side view of a coherent detection laser according to an embodiment of the present invention;
FIG. 6 is a side view of another configuration of a coherent detector provided in accordance with another embodiment of the present invention;
fig. 7 is a side view of another configuration of a coherent detector according to another embodiment of the present invention.
Reference numerals:
100-input optical waveguide, 200-1 XN optical switch array, 300-transceiver unit, 400-lens, 310-beam expander, 320-coherent detector, 321-grating, 322-photodetector, 323-filter, 3211-unidirectional radiation grating, 3212-ordinary grating, 324-electrode, 325-return light.
Description of the embodiments
Embodiments of the present invention will be described below with reference to the accompanying drawings so that those skilled in the art can better understand the present invention and implement it, but the examples listed are not limiting to the present invention, and the following examples and technical features of the examples can be combined with each other without conflict, wherein like parts are denoted by like reference numerals. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.
Referring to fig. 2, fig. 3, fig. 4 and fig. 5, fig. 2 is a schematic structural diagram of a laser radar system based on a coherent detector according to an embodiment of the present invention; FIG. 3 is a schematic diagram of the transceiver unit of FIG. 2; FIG. 4 is a schematic diagram of a coherent detector of FIG. 3; fig. 5 is a structural side view of a coherent detector according to an embodiment of the present invention.
Referring to fig. 2, in an embodiment of the present invention, a lidar system chip is composed of an input optical waveguide 100, a 1 xn optical switch array 200, a transceiver unit 300, and a lens 400.
The modulated narrow linewidth laser signal enters the 1 xn optical switch array 200 through the input optical waveguide 100, and the incident light enters a certain transceiver unit 300 through the selection of the 1 xn optical switch array, and the directions of the outgoing light are different due to the difference of the center positions of the transceiver unit relative to the lens, thereby playing a scanning effect. The transceiver unit 300 is the core device of the system and functions as a laser ranging.
Referring to fig. 3, the transceiver unit 300 is composed of a beam expander 310 and a coherent detector 320, wherein the beam expander 310 is used for realizing the transverse expansion of a light beam, so as to enable the light beam to have larger transmitting and receiving areas, and the light beam expander can be a multi-waveguide structure realized by a Y-branch or a directional coupler, and each waveguide is connected with one coherent detector 320.
Referring to fig. 4 and 5, the coherence detector 320 is composed of a grating 321, a photodetector 322, and a filter 323. In various embodiments of the present invention, grating 321 may take a variety of different forms, and unidirectional radiation grating 3211 is used in fig. 5, where unidirectional radiation grating 3211 radiates most of the incident light (i.e.,. Gtoreq.90%) upward into space, and the rest of the incident light radiates downward as local light. The optical signal radiated upward to the space is reflected by the target object as return light, which passes through the unidirectional radiation grating 3211 to be irradiated to the photodetector 322 together with the downward local light. The photodetector 322 converts the optical signal into an electrical signal to generate a direct current signal and an alternating current signal, the direct current signal is removed by the filter 323, and the alternating current signal is extracted to calculate the distance and speed information of the object. The filter 323 may employ a high pass filter.
It should be noted that, in the prior art shown in fig. 1, local light is obtained by reflection of a lens, but the coherent detector provided in this embodiment does not depend on a lens, and the unidirectional radiation grating is adopted by the grating, so that more than 90% of light in the incident light can be radiated upwards to the space by the unidirectional radiation grating, and the rest of light in the incident light is radiated downwards to the photoelectric detector by the unidirectional radiation grating to be used as local light; the structure is compact, the volume is small, and the integration level is high; the photoelectric detector and the grating are vertically aligned and distributed, most of light in the incident light is emitted by the grating as a light source, the rest of light is used as local light, and the energy of the downward light is completely utilized, so that the energy of the downward light is not wasted, and the light energy utilization rate is higher.
The unidirectional radiation grating can enable most of incident light to radiate upwards to the space, most of the light is emitted as a light source, and a light signal radiated upwards to the space is reflected by a target object to obtain return light, so that the light energy utilization rate is high. The unidirectional radiation grating can be manufactured by adopting a double-layer silicon nitride waveguide, or a double-layer structure of a layer of silicon waveguide and a layer of silicon nitride waveguide, or other double-layer waveguide gratings with certain dislocation structures; other gratings that can achieve efficient unidirectional radiation in the prior art may be used, and are not specifically limited herein, and are within the scope of the present application, depending on the specific application environment.
Referring to fig. 6, fig. 6 provides a side view of a coherent detector according to another embodiment of the present invention, and the grating in the coherent detector shown in fig. 6 may be replaced by a common grating 3212 and a mirror, where one electrode 324 of the photodetector 322 is used as the mirror of the grating, and after a portion of the light in the incident light is radiated downward to the photodetector 322 by the common grating 3212, most of the light in the downward beam is reflected to the space, and is reflected by the object together with the upward beam, and a small portion of the light in the downward beam enters the photodetector 322 as local light and all of the return light 325 reflected back by the object; when the common grating 3212 is adopted, the electrode 324 of the photodetector 322 can also be used as a reflector for part of light, and the photodetector 322 is distributed below the common grating 3212. Wherein the electrode 324 acts as a mirror and has a small area from a vertical angle, and the return light 325 mostly enters the photodetector 322. The photodetector 322 receives the local light and the return light 325 of the light in space after being reflected by the target object, and the photodetector 322 converts the optical signal into an electrical signal including a direct current signal and an alternating current signal, the direct current signal being removed by the filter 323, the alternating current signal carrying the distance and speed information of the object. Wherein the filter may be a high pass filter.
The light emitted upwards to the space and the light emitted downwards to the photoelectric detector in the incident light are approximately equal by adopting the common grating as the grating, one electrode of the photoelectric detector is used as a reflector of the common grating, and part of the light emitted downwards to the photoelectric detector is reflected upwards to the space, so that most of the light is emitted as a light source; meanwhile, the rest light radiated downwards to the photoelectric detector is used as local light, so that the cost is saved and the control is easy to realize; and the downward light beam is not wasted, and the light energy utilization rate is high.
The common grating may be a common silicon waveguide grating, and the light propagating along the waveguide is split into upper and lower scattered light beams after encountering the grating, wherein the light scattering directions are up and down, and the upward scattered light and the downward scattered light are approximately equal in quantity. In the embodiment of the invention, the light which can be utilized not only has one upward beam, but also is fully utilized without being wasted, thereby greatly improving the grating efficiency and reducing the cost.
Referring to fig. 7, fig. 7 provides another embodiment of the coherent detector of the present invention, and the coherent detector shown in fig. 7 can be divided into two sections, which are unidirectional radiation gratings with high unidirectional properties, and almost no scattered light in the other direction; the first section is an upward unidirectional radiation grating which is used as a space radiation source, and the second section is a downward unidirectional radiation grating which is used as local light; the unidirectional radiation grating is divided into two sections, so that the first section of upward unidirectional radiation grating is used for radiating incident light upwards to a space, the second section of downward unidirectional radiation grating is used for radiating the incident light downwards to the photoelectric detector as local light, and the downward unidirectional radiation grating and the photoelectric detector are vertically aligned and distributed; the photoelectric detector receives the local light radiated downwards to the photoelectric detector and the return light which passes through the downward unidirectional radiation grating after the light radiated upwards to the space is reflected by the target object, and the distance information and the speed information of the target object are obtained through calculation.
The embodiment realizes the separation of transmission and reception, does not shade each other, and is easier to control the energy of local light.
The upward unidirectional radiation grating and the downward unidirectional radiation grating of the embodiment have high unidirectional performance, and the design of high unidirectional performance can be realized by a scattering intensity matching method.
In the specific manufacturing process of the coherent detector, firstly, photoresist with the thickness of 1 micron is spin-coated on a cleaned Si (or SOI) wafer, and a window of an ohmic contact area under the detector is opened by a photoetching method and ion implantation is carried out; after photoresist removal and cleaning, a 200nm silicon dioxide layer is deposited, and a window of the epitaxial Ge is opened by an etching method; growing 720nm germanium by using a super vacuum CVD selective epitaxial technology; spin-coating photoresist with the thickness of 1 micron, opening a window of an ohmic contact area on the detector by a photoetching method, and carrying out ion implantation; after photoresist removal and cleaning, carrying out laser annealing; depositing silicon dioxide with the thickness of 1 micron, and carrying out reverse etching in the epitaxial Ge region by an etching method and carrying out CMP to smooth the surface of the wafer; ohmic contact holes of an upper electrode and a lower electrode of the photoelectric detector are opened through photoetching and etching technologies; depositing 25nm TaN,750nm AlSiCu and 25nm TaN, and manufacturing electrode wiring and capacitance and inductance shapes required in a high-pass filter by photoetching and metal etching technologies; depositing silicon dioxide with the thickness of 1 micron, performing reverse etching on metal wiring, and performing CMP to enable the surface to be flat and smooth; etching silicon dioxide to metal in the area of the high-pass filter requiring capacitance by photoetching and etching technology, and depositing Al with thickness of 1nm by utilizing atomic layer epitaxy technology 2 O 3 The method comprises the steps of carrying out a first treatment on the surface of the Depositing 25nm of TaN,750nm of AlSiCu and 25nm of TaN, and manufacturing the area required by the capacitor through photoetching and metal etching technologies; depositing silicon dioxide with the thickness of 1 micron and a 400nm silicon nitride waveguide layer, and manufacturing structures such as a waveguide, a grating and the like through photoetching and etching technologies of the silicon nitride waveguide layer; after photoresist removal and cleaning, depositing silicon dioxide with the thickness of 2 microns, and performing CMP to make the surface flat and smooth; etching contact holes between metal and the surface electrode by photoetching and etching technology; after photoresist stripping and cleaning, 25nm of TaN,2 microns of AlSiCu and 25nm of TaN are deposited, and the surface electrode is etched again through photoetching and metal etching technologies.
In the invention, each embodiment is described in a progressive manner, and each embodiment is mainly used for illustrating the difference from other embodiments, and the same similar parts among the embodiments are mutually referred. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The foregoing examples, which are only preferred embodiments of the invention, use the phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments," which may all refer to one or more of the same or different embodiments in accordance with the present disclosure. Common variations and substitutions by those skilled in the art within the scope of the present invention are intended to be included in the scope of the present invention.
Claims (8)
1. A coherent detector for a lidar, comprising:
a grating, a photodetector, and a filter;
the grating and the photoelectric detector are vertically aligned and distributed, part of light in the incident light is upwards radiated to the space by the grating, and the other part of light in the incident light is downwards radiated to the photoelectric detector by the grating;
the filter is a high-pass filter;
the optical grating adopts a unidirectional radiation optical grating, the unidirectional radiation optical grating radiates more than 90% of light in the incident light upwards to the space, and the unidirectional radiation optical grating radiates the rest of light in the incident light downwards to the photoelectric detector to be used as local light.
2. A coherent detector according to claim 1, characterized in that the photodetector receives the local light and the light of the space returns after reflection by the target object, the photodetector converting the light signal into an electrical signal comprising a direct current signal and an alternating current signal, the direct current signal being removed by the filter, the alternating current signal carrying distance and speed information of the object.
3. A coherent detector for a lidar, comprising:
a grating, a photodetector, and a filter;
the grating and the photoelectric detector are vertically aligned and distributed, part of light in the incident light is upwards radiated to the space by the grating, and the other part of light in the incident light is downwards radiated to the photoelectric detector by the grating;
the filter is a high-pass filter;
the grating adopts a common grating, the common grating enables light which is radiated upwards to the space in incident light and light which is radiated downwards to the photoelectric detector to be approximately equal, one electrode of the photoelectric detector is used as a reflecting mirror of the common grating, part of light which is radiated downwards to the photoelectric detector is reflected upwards to the space, and the rest of light which is radiated downwards to the photoelectric detector is used as local light.
4. A coherent detector according to claim 3, characterized in that the photodetector receives the local light and the light of the space returns after reflection by the target object, the photodetector converting the light signal into an electrical signal comprising a direct current signal and an alternating current signal, the direct current signal being removed by the filter, the alternating current signal carrying distance and speed information of the object.
5. A coherent detector for a lidar, comprising:
a grating, a photodetector, and a filter;
wherein the grating radiates part of light in the incident light upwards to the space, and the grating radiates another part of light in the incident light downwards to the photodetector;
the filter is a high-pass filter;
the optical grating is divided into two sections, wherein the first section is an upward unidirectional radiation optical grating used for radiating incident light upwards to a space, the second section is a downward unidirectional radiation optical grating used for radiating the incident light downwards to the photoelectric detector as local light, and the downward unidirectional radiation optical grating and the photoelectric detector are vertically aligned and distributed.
6. The coherent detector of claim 5, wherein said photodetector receives said local light and spatial light after reflection by a target object passes through said downward unidirectional radiation grating, said photodetector converting an optical signal into an electrical signal comprising a direct current signal and an alternating current signal, said direct current signal being removed by said filter, said alternating current signal carrying distance and speed information of the object.
7. A lidar chip comprising an input optical waveguide, a 1 xn optical switch array, a transceiver unit, and a lens, wherein the transceiver unit comprises the coherent detector of any of claims 1-6.
8. The lidar chip of claim 7, wherein the transceiver unit further comprises a beam expander, the beam expander being a multi-waveguide structure implemented with Y-splitters or directional couplers, each waveguide being connected to one of the coherent detectors.
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