CN115754989A - Three-dimensional solid-state laser radar chip and detection method and system thereof - Google Patents
Three-dimensional solid-state laser radar chip and detection method and system thereof Download PDFInfo
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- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
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- G—PHYSICS
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
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Abstract
The invention discloses a three-dimensional solid-state laser radar chip and a detection method and a detection system thereof, wherein the three-dimensional solid-state laser radar chip comprises a laser, a first optical coupler, a first micro-ring resonant cavity, a second micro-ring resonant cavity, a first optical amplifier, a second optical coupler, a 90-degree optical mixer, a first balanced detector, a second balanced detector, a 1 XN power divider, a phase shifter array and a grating antenna array, wherein all photon components are connected through optical waveguides; the invention realizes the scanning of one dimension of the light beam by a frequency dispersion technology, the single grating antenna can realize the mapping of laser frequency-detection angle, the scanning of the other dimension of the space beam is realized based on the phase shifter array, the light fields of adjacent channels have the same phase difference by regulating the phase shifter array, and the mapping of the phase difference-detection angle of the adjacent channels is realized; the two scanning modes are combined with frequency modulation continuous wave radar detection technology and coherent reception, and then the target distance, position and speed information can be obtained.
Description
Technical Field
The invention relates to the technical field of integrated photons, in particular to a three-dimensional solid-state laser radar chip and a detection method and system thereof.
Background
The laser radar can realize high-precision three-dimensional sensing and is widely applied to the fields of automatic driving, intelligent robots, remote sensing and the like. The existing developed laser radar system mostly adopts mechanical scanning and pulse time arrival technology to acquire three-dimensional/two-dimensional space distribution information of a detection target, but due to the reasons of complex structure, poor vibration resistance, easy abrasion and the like of a mechanical rotating part, the service life of the mechanical laser radar is limited, the installation and calibration process is complicated, the size is large, and the application scene at the consumption level is limited. Meanwhile, the solid-state beam control technology based on mechanisms such as integrated optical phased arrays, photonic crystal waveguides and dispersion media is also rapidly developed. For example, rapid scanning of a laser beam using electro/thermal control, better stability than mechanical scanning, and compact system (see [ S. Miller, Y. Phase, M. Shin, etc. ], "Large-scale optical phase array using a low-power multi-pass silicon photonic platform, ]"Optica, vol. 7, no. 1, pp. 3-6, 2020.]). The optical frequency comb is excited by adopting optical solitons, and large-scale parallel coherent laser ranging is carried out based on frequency (wavelength) dispersion-direction mapping, so that solid-state rapid scanning of laser beams in one dimension can be realized (see J. Riemensberger, A. Lukashchuk, M. Karpov, etc. 'Massively parallel coherent laser ranging a soliton microcomb'Nature, vol. 581, 164-170, 2020.]). Although the related technologies are mainly still in the laboratory research stage at present, the solid-state beam control technology attracts academia and industry to solve the technical difficulties under new requirements due to its potential superior characteristics, and the invention is invented (see [ guo clear water, yi Kun, chai tian, liushi Yuan, a "three-dimensional solid-state laser radar detection method and apparatus based on dual-optical frequency comb", CN113820688A.]) A solution is provided, a three-dimensional solid-state laser radar detection device based on a double-optical-frequency comb is combined with a frequency dispersion wave beam scanning technology, a Rotman optical lens wave beam direction control technology and a double-optical-frequency comb coherent receiving technology, and multi-pass is achievedThe data are received at the same time, and the high-precision measurement of the three-dimensional space distribution and the speed information of the target can be realized without mechanical scanning. However, the solid-state lidar detection device of the scheme can only scan in one dimension at the same time, and still needs large-scale discrete devices, so that the system device is large in size and high in cost.
Disclosure of Invention
The invention aims to provide a three-dimensional solid-state laser radar chip and a detection method and a system thereof, which are based on an optical frequency comb dispersion mechanism and phase regulation and control of a phase shifter array, realize simultaneous scanning of a laser radar in two dimensions, combine a frequency modulation continuous wave radar detection technology and coherent reception to realize acquisition of high-resolution target distance and speed information, realize simultaneous reception of all channel data by two detectors based on two optical frequency comb difference frequency multiplexing and coherent detection technologies, and realize monolithic integration of the laser radar based on monolithic integration of a III-V family device chip and a silicon optical chip. The whole system is pure solid, the beam direction is not required to be controlled by mechanical scanning, the system structure is simple and compact, and the system can be integrated.
In order to achieve the purpose, the invention provides the following technical scheme:
the invention discloses a three-dimensional solid-state laser radar chip, which comprises a laser, a first optical coupler, a first micro-ring resonant cavity, a second micro-ring resonant cavity, a first optical amplifier, a second optical coupler, a 90-degree optical mixer, a first balance detector, a second balance detector, a 1 xN power divider, a phase shifter array and a grating antenna array, wherein all photonic components are connected through optical waveguides;
the output end of the laser is connected with the input end of a first optical coupler, the output end of the first optical coupler is respectively connected with a first micro-ring resonant cavity and a second micro-ring resonant cavity with different radius sizes, the output ends of the first micro-ring resonant cavity and the second micro-ring resonant cavity are respectively connected with the input ends of a first optical amplifier and a second optical amplifier, the output ends of the first optical amplifier and the second optical amplifier are respectively connected with one port of the second optical coupler and one input end of a 90-degree optical mixer, the other two ports of the second optical coupler are respectively connected with the input end of a 1 x N power divider and the other input end of the 90-degree optical mixer, N output ends of the 1 x N power divider are connected with N input ends of a phase shifter array, N output ends of the phase shifter array are connected with N input ends of a grating antenna array, and four output ends of the 90-degree optical mixer are respectively connected with the input ends of a first balance detector and a second balance detector.
Preferably, the laser, the first optical amplifier and the second optical amplifier are made of materials which can be integrated with a silicon optical chip, and the materials comprise indium phosphide, gallium arsenide and gallium nitride prepared based on a III-V process platform.
Preferably, the first micro-ring resonator, the second micro-ring resonator, the first optical coupler, the second optical coupler, the 90 ° optical mixer, the 1 × N power divider, the phase shifter array, the grating antenna array, the first balanced detector, and the second balanced detector are devices prepared based on a silicon optical process platform.
Preferably, the first micro-ring resonator and the second micro-ring resonator are used for exciting a chirp signal output by the laser to form a plurality of comb-shaped sidebands by generating dissipative kerr solitons to generate a linear frequency-swept optical frequency comb signal; the radius sizes of the micro-rings of the first micro-ring resonant cavity and the second micro-ring resonant cavity are different and respectively correspond to different optical frequency comb repetition frequencies.
Preferably, the first balanced detector pair and the second balanced detector pair have frequency responses covering all intermediate frequency signals of the lidar.
The invention discloses a detection method based on the three-dimensional solid-state laser radar chip, which comprises the following steps:
step 4, the detection optical signal is reflected back to the grating antenna array after encountering the target to obtain a received optical signal, the received optical signal is sent to the phase shifter array through the grating antenna array, sent to N ports of the 1 xN power divider through the phase shifter array, and sent to the 90-degree optical mixer through the second optical coupler;
and 5, the received light signal and the reference light signal enter a first balanced detector and a second balanced detector to complete coherent detection to obtain a complex intermediate frequency signal carrying target information, and after signal acquisition is carried out on the complex intermediate frequency signal, target three-dimensional spatial distribution and speed information are obtained based on a radar signal algorithm.
Preferably, in step 1, the laser generates a chirped optical signal by a chirp method, which includes, but is not limited to, sawtooth chirp, triangular chirp and piecewise chirp.
Preferably, in step 3, a single grating antenna in the grating antenna array controls, based on frequency dispersion, different comb frequency sweep sub-signal beams of the detection optical signal to point to 2m +1 different directions on a θ plane at the same time, where M is the number of comb teeth of the single-side optical frequency comb, so as to obtain 2m +1 detection sub-optical signals pointing to different directions, thereby implementing scanning of the optical beam on one dimension of the θ plane, and implementing scanning of the optical beam on another dimension perpendicular to the θ plane by adjusting and controlling phases of adjacent channels of the phase shifter array.
The invention also discloses a detection system based on the three-dimensional solid-state laser radar chip, which comprises the three-dimensional solid-state laser radar chip and a signal acquisition and processing unit, wherein the signal acquisition and processing unit is connected with the radio frequency output ends of a first balanced detector and a second balanced detector in the three-dimensional solid-state laser radar chip, and the three-dimensional solid-state laser radar chip is used for realizing the simultaneous scanning of a laser radar on a target in two dimensions based on an optical frequency comb dispersion mechanism and phase regulation and control of a phase shifter array; the signal acquisition and processing unit is used for acquiring and processing target information obtained by scanning the three-dimensional solid laser radar chip and realizing target distance, position and speed information acquisition by combining frequency modulation continuous wave radar detection technology and coherent reception.
The invention has the beneficial effects that:
1) The invention realizes the scanning of one dimension of the light wave beam by a frequency dispersion technology, the single grating antenna can realize the mapping of laser frequency-detection angle, the scanning of the other dimension of the space wave beam is realized based on the phase shifter array, the light fields of adjacent channels have the same phase difference by regulating and controlling the phase shifter array, and the mapping of the phase difference-detection angle of the adjacent channels is realized; the two scanning modes combine frequency modulation continuous wave radar detection technology and coherent reception to achieve target distance, position and speed information acquisition.
2) The detection optical signal and the reference optical signal are based on the same laser linear frequency modulation, two silicon nitride micro-ring resonant cavities with slightly different radiuses are driven, a detection optical frequency comb signal and a reference optical frequency comb signal are generated through a dissipative Kerr soliton effect, and based on the two optical frequency comb signal difference frequency multiplexing and coherent detection technologies, the two balanced detectors can achieve simultaneous receiving of all channel data.
3) The invention realizes the monolithic integration of the laser radar based on the monolithic integration of the laser, the optical amplifier, the silicon-based micro-ring resonant cavity, the optical coupler, the balance detector, the 90-degree optical mixer, the phase shifter array, the grating antenna array and other devices, and has compact and simple system and small volume.
Drawings
FIG. 1 is a schematic structural diagram of a three-dimensional solid-state lidar chip of the present invention;
FIG. 2 is a schematic structural diagram of an embodiment of a detection system based on a three-dimensional solid-state lidar chip according to the present invention;
fig. 3 is a mapping relationship diagram of the detection sub-optical signal, the received optical signal, the complex intermediate frequency electrical signal, and the like in the embodiment of the solid-state lidar detection system of the invention.
FIG. 4 shows the chip surface of the solid-state lidar detection system of an embodiment of the present invention,θPlane, perpendicular toθAngle of plane direction scanϕ O And (4) spatial relationship.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood, however, that the description herein of specific embodiments is only intended to illustrate the invention and not to limit the scope of the invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
As shown in fig. 1, an embodiment of the present invention provides a three-dimensional solid-state lidar chip, including: the device comprises a laser, a first optical coupler (OC 1), a first micro-ring resonant cavity, a second micro-ring resonant cavity, a first optical amplifier, a second optical coupler (OC 2), a 90-degree optical mixer, a first balanced detector (BPD 1), a second balanced detector (BPD 2), a 1 xN power divider, a phase shifter array and a grating antenna array, wherein all photonic components are connected through optical waveguides.
The output end of the laser is connected with the input end of a first optical coupler, the output end of the first optical coupler is respectively connected with a first micro-ring resonant cavity and a second micro-ring resonant cavity of silicon nitride, the output end of the first micro-ring resonant cavity is connected with the input end of a first optical amplifier, the output end of the second micro-ring resonant cavity is connected with the input end of a second optical amplifier, the output end of the second optical amplifier is connected with one input end of a 90-degree optical mixer, the output end of the first optical amplifier is connected with a port 1 of the second optical coupler, a port 2 of the second optical coupler is connected with the input end of a 1 multiplied by N power divider, N output ends of the 1 multiplied by N power divider are connected with N input ends of a phase shifter array, N output ends of the phase shifter array are connected with N input ends of a grating antenna array, a port 3 of the second optical coupler is connected with the other input end of the 90-degree optical mixer, and four output ends of the 90-degree optical mixer are respectively connected with the input ends of a first balanced detector and a second balanced detector.
The laser, the first optical amplifier and the second optical amplifier are lasers and optical amplifiers which can be integrated on a silicon optical chip, and the materials of the lasers, the first optical amplifier and the second optical amplifier include, but are not limited to, indium phosphide, gallium arsenide, gallium nitride and the like which are prepared based on a III-V process platform or other materials which can be integrated on the silicon optical chip.
The first micro-ring resonant cavity and the second micro-ring resonant cavity are silicon nitride devices prepared on the basis of a silicon optical process platform, and are used for exciting linear frequency modulation signals output by a laser to form a plurality of comb-shaped sidebands by generating dissipative Kerr solitons and generating optical frequency comb signals of linear frequency sweeping; the micro-ring radiuses R1 and R2 of the first micro-ring resonant cavity and the second micro-ring resonant cavity are different and respectively correspond to different optical frequency comb repetition frequencies.
The first optical coupler, the second optical coupler, the 90-degree optical mixer, the 1 xN power divider, the phase shifter array and the grating antenna array are devices which are prepared on the basis of a silicon optical technology platform.
The first balance detector and the second balance detector are devices prepared by materials such as germanium and silicon based on a silicon optical process platform; the frequency response of the first balanced photoelectric detector pair and the second balanced photoelectric detector pair covers all intermediate frequency signals of the laser radar.
As shown in fig. 2, an embodiment of a detection system based on a three-dimensional solid-state lidar chip includes the three-dimensional solid-state lidar chip and a signal acquisition and processing unit, where the signal acquisition and processing unit is connected to radio frequency output ends of a first balanced detector and a second balanced detector. The three-dimensional solid laser radar chip realizes simultaneous scanning of the laser radar on a target in two dimensions based on an optical frequency comb dispersion mechanism and phase regulation and control of a phase shifter array; the signal acquisition and processing unit is used for acquiring and processing target information obtained by scanning the three-dimensional solid laser radar chip, and the acquisition of target distance, position and speed information is realized by combining a frequency modulation continuous wave radar detection technology and coherent reception.
For convenience of understanding, the technical solution of the present invention is described in detail by the following specific embodiments of the detection method and system based on the three-dimensional solid-state lidar chip, which are specifically as follows:
the laser is used as a light source to generate a sawtooth wave linear frequency modulation optical signal with the center frequency offsFrequency of sweep frequencyf LFM =kT (T is more than or equal to 0 and less than or equal to T), the optical signal generated by the laser drives two silicon nitride micro-ring resonant cavities with different radiuses, the generated center frequencies are the same, and the repetition frequencies are respectivelyf PRF1 Andf PRF2 the frequency difference of the center frequencies of the two optical frequency combs is Δf PRF (suppose thatf PRF1 Slightly larger thanf PRF2 ). The frequency spectrum of the output optical frequency comb signal of the first silicon nitride micro-ring resonant cavity is composed off s +if PRF1 (i=-M,-M+1,…,M) The component is used as the input end of the 1 XN power divider for inputting the detection optical frequency comb signal, and the frequency spectrum of the optical frequency comb signal output by the second silicon nitride micro-ring resonant cavity is composed off s +if PRF2 (i=-M,-M+1,…,M) Component composition as a reference optical signal input to one input of a 90 DEG optical mixer, whereinMThe number of the comb teeth of the single-side optical frequency comb,f s is the central frequency of the central comb teeth of the optical frequency comb. Wherein the optical frequency comb signal is detectedS comb1 (t) Specifically, it can be expressed as:
whereinA i_1 (i=-M,-M+1,…,M) For detecting the amplitude of different frequency sweep comb signals of the optical frequency comb signal, the frequency sweep comb signal is not less than 0t ≤TAs a matter of time, the time is, kfor the slope of its frequency modulation,Tis its period. Also, reference optical frequency comb signalS comb2 (t) Specifically, it can be expressed as:
whereinA i_2 (i=-M,-M+1,…,M) In order to reference different amplitudes of the optical frequency comb signals and the sweep frequency comb signals, the reference optical frequency comb signals are sent to one input end of an optical 90-degree optical mixer of the coherent detection unit.
As shown in fig. 3, the detection optical frequency comb signal is amplified by the first optical amplifier and then sent to the input end of the second optical coupler, the second optical coupler sends the detection optical frequency comb signal to the 1 × N power divider, the output ports of the 1 × N power divider are connected to the phase shifter arrays including N input ports one by one, the 1 × N power divider equally divides the detection optical frequency comb signal and sends the detection optical frequency comb signal to the N input ends of the phase shifter arrays, the phase shifter arrays perform phase control on the detection optical frequency comb signal on each channel, the detection optical frequency comb signal is sent from the N output ends of the phase shifter arrays to the input ends of the N grating antenna arrays, the detection optical frequency comb signal is radiated into the space through the grating antenna arrays, and the single grating antenna controls the detection optical signal to have different comb-frequency sweep sub-signal beams at the comb-tooth frequency sweep sub-signal beam based on the frequency dispersion controlθPointing at 2M +1 (on the plane simultaneouslyMNumber of comb teeth of unilateral optical frequency) to obtain 2M +1 probe optical signals pointing to different directions with pointing angles ofθ i ，i=1,2,…,2M+1，θ i The optical comb signals with different central frequencies have a mapping relation, so that optical beams are realizedθScanning in one dimension of the plane, and realizing the light beam in the direction vertical to the plane by regulating the phase of the adjacent channels of the phase shifter arrayθScanning in another dimension in the plane direction with a phase difference between adjacent channelsϕThe grating antenna array enables N detection optical frequency comb signals to be perpendicular toθIn the plane direction at the scanning angleϕ O The scanning is carried out by scanning the object,ϕ O is at a right angle toθBeams scanned in the plane direction andθangle of plane and angle in space relation see fig. 4ϕAngle of scanningϕ O The mapping relationship exists, and can be specifically expressed as follows:
whereinλTo detect the optical-frequency comb signal wavelength,dthe distance between adjacent channels of the raster antenna array is controlled, and the phase difference between adjacent channels of the phase shifter array is regulatedϕThat is, the light beam is perpendicular toθScanning in the plane direction, the detection light signal emitted to the space is reflected after meeting a target, the target reflection signal is received by the grating antenna array and then is sent to the second optical coupler through the phase shifter array and the 1 xN power divider, and the target reflection signal is sent to the other input end of the 90-degree optical coupler through the second optical coupler to realize coherent reception with the reference light signal. Set an angle ofθ i The target reflected signal corresponding to the sub-signal is delayed from the reference optical signal by a time difference τ i . Corresponding to a target speed ofv i The Doppler shift introduced by the motion of the object isf d i_ . The target reflection signal can be expressed as:
whereinA i_R (i=-M,-M+1,…,M) Is the target reflected signal sub-signal amplitude. The optical 90 ° optical mixer output signal of the coherent receiving unit can be expressed as:
whereinS I+ (t)、S I- (t)、S Q+ (t)、S Q- (t) The four optical signals output by the 90-degree optical coupler are respectively sent to two balanced photoelectric detectors to complete photoelectric conversion, the parasitic phase is ignored, and the intermediate-frequency electric signal output by the coherent detection unit can be represented as:
i.e. two orthogonal components of the intermediate frequency signal carrying the target informationS I (t)、S Q (t) In which
For the phase information of the intermediate frequency signal, the corresponding signal complex form is:
whereinA R_i The complex intermediate frequency signal carrying the target information is located in [, (C)m-1/2)∙∆f PFR ，(m+1/2)∙∆f PFR ]A complex single frequency signal within an interval, whereinm= -M +1, \8230, M-1, M is the number of comb teeth at one side optical frequencyf PFR =|∆f PFR1 -∆f PFR2 And | is the repetition frequency difference of the double optical frequency combs, the signal is collected, and channel angle mapping and distance information extraction are carried out, so that the two-dimensional spatial distribution of the theta plane target angle and distance and speed information can be obtained. Then the phase difference between the adjacent channels is regulated and controlled by the phase shifter arrayϕUsing the phase differenceϕAngle of scanningϕ O Is implemented in a manner perpendicular toθThe scanning of the dimension of the plane direction can realize the acquisition of the three-dimensional space distribution and the speed information of the target through signal recombination and processing.
In summary, the three-dimensional solid-state lidar chip, the detection method and the detection system thereof of the invention realize simultaneous scanning of the lidar in two dimensions based on the optical frequency comb dispersion mechanism and the phase regulation of the phase shifter array, realize acquisition of high-resolution target distance and speed information by combining the frequency modulation continuous wave radar detection technology and coherent reception, realize simultaneous reception of all channel data based on two optical frequency comb difference frequency multiplexing and coherent detection technologies, and realize monolithic integration of the lidar based on monolithic integration of a III-V group device chip and a silicon optical chip. The whole system is pure solid, the beam direction is not required to be controlled by mechanical scanning, the system structure is simple and compact, and the system can be integrated.
The above description is intended to be illustrative of the preferred embodiment of the present invention and should not be taken as limiting the invention, but rather, the invention is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.
Claims (9)
1. A three-dimensional solid-state laser radar chip is characterized in that: the grating optical coupler comprises a laser, a first optical coupler, a first micro-ring resonant cavity, a second micro-ring resonant cavity, a first optical amplifier, a second optical coupler, a 90-degree optical mixer, a first balanced detector, a second balanced detector, a 1 xN power divider, a phase shifter array and a grating antenna array, wherein all photonic components are connected through optical waveguides;
the output end of the laser is connected with the input end of a first optical coupler, the output end of the first optical coupler is respectively connected with a first micro-ring resonant cavity and a second micro-ring resonant cavity with different radius sizes, the output ends of the first micro-ring resonant cavity and the second micro-ring resonant cavity are respectively connected with the input ends of a first optical amplifier and a second optical amplifier, the output ends of the first optical amplifier and the second optical amplifier are respectively connected with one port of the second optical coupler and one input end of a 90-degree optical mixer, the other two ports of the second optical coupler are respectively connected with the input end of a 1 x N power divider and the other input end of the 90-degree optical mixer, N output ends of the 1 x N power divider are connected with N input ends of a phase shifter array, N output ends of the phase shifter array are connected with N input ends of a grating antenna array, and four output ends of the 90-degree optical mixer are respectively connected with the input ends of a first balance detector and a second balance detector.
2. The three-dimensional solid-state lidar chip of claim 1, wherein: the laser, the first optical amplifier and the second optical amplifier are made of materials which can be integrated with a silicon optical chip, and the materials comprise indium phosphide, gallium arsenide and gallium nitride which are prepared based on a III-V group process platform.
3. The three-dimensional solid-state lidar chip of claim 1, wherein: the first micro-ring resonant cavity, the second micro-ring resonant cavity, the first optical coupler, the second optical coupler, the 90-degree optical mixer, the 1 xN power divider, the phase shifter array, the grating antenna array, the first balanced detector and the second balanced detector are devices prepared on the basis of a silicon optical process platform.
4. The three-dimensional solid-state lidar chip of claim 1, wherein: the first micro-ring resonant cavity and the second micro-ring resonant cavity are used for exciting a linear frequency modulation signal output by the laser to form a plurality of comb-shaped sidebands by generating dissipative Kerr solitons to generate a linear frequency-sweeping optical frequency comb signal; the radius sizes of the micro-rings of the first micro-ring resonant cavity and the second micro-ring resonant cavity are different and respectively correspond to different optical frequency comb repetition frequencies.
5. The three-dimensional solid-state lidar chip of claim 1, wherein: the frequency response of the first balanced detector pair and the second balanced detector pair covers all intermediate frequency signals of the laser radar.
6. A detection method based on the three-dimensional solid-state laser radar chip of any one of claims 1 to 5, characterized in that: the method comprises the following steps:
step 1, a laser generates a linear frequency-modulated optical signal and sends the linear frequency-modulated optical signal to an input end of a first optical coupler, and the first optical coupler divides the optical signal into two paths and sends the two paths of optical signals to a first micro-ring resonant cavity and a second micro-ring resonant cavity respectively;
step 2, exciting the first micro-ring resonant cavity by a linear frequency modulated optical signal to generate a linearly swept detection optical frequency comb signal, exciting the second micro-ring resonant cavity to generate a linearly swept reference optical frequency comb signal, and respectively sending the detection optical frequency comb signal and the reference optical frequency comb signal to a first optical amplifier and a second optical amplifier for amplification; the amplified detection optical frequency comb signal is sent to the 1 XN power divider through the second optical coupler, and the amplified reference optical frequency comb signal is sent to the 90-degree optical mixer;
step 3, the 1 xN power divider equally divides the amplified detection optical frequency comb signals into N paths, the N paths of detection optical frequency comb signals are respectively sent into N phase shifter arrays from the output end of the 1 xN power divider, the phase shifter arrays carry out phase control on the N paths of detection optical frequency comb signals, the N paths of detection optical frequency comb signals with the phase control are sent into the input end of the N grating antenna arrays from the N output ends of the phase shifter arrays, and the detection optical signals are radiated into space through the grating antenna arrays;
step 4, the detection optical signal is reflected back to the grating antenna array after encountering the target to obtain a received optical signal, the received optical signal is sent to the phase shifter array through the grating antenna array, sent to N ports of the 1 xN power divider through the phase shifter array, and sent to the 90-degree optical mixer through the second optical coupler;
and 5, the received light signal and the reference light signal enter a first balanced detector and a second balanced detector to complete coherent detection to obtain a complex intermediate frequency signal carrying target information, and after the complex intermediate frequency signal is subjected to signal acquisition, the target three-dimensional spatial distribution and speed information are obtained based on a radar signal algorithm.
7. The detection method of claim 6, wherein: in the step 1, the chirp method for generating the chirped optical signal by the laser includes, but is not limited to, a sawtooth chirp, a triangular chirp, and a piecewise chirp.
8. The detection method of claim 6, wherein: in step 3, a single grating antenna in the grating antenna array controls different comb-tooth frequency-sweep sub-signal beams of the detection optical signal to point to 2m +1 different directions on the theta plane based on frequency dispersion, wherein M is the number of comb teeth of the single-side optical frequency comb, so that 2m +1 detection sub-optical signals pointing to different directions are obtained, scanning of the optical beam on the theta plane is achieved, and scanning of the optical beam on the other dimension perpendicular to the theta plane is achieved by adjusting and controlling the phase of an adjacent channel of the phase shifter array.
9. A detection system based on the three-dimensional solid-state lidar chip of any of claims 1-5, wherein: the system comprises the three-dimensional solid-state laser radar chip and a signal acquisition and processing unit, wherein the signal acquisition and processing unit is connected with the radio frequency output ends of a first balanced detector and a second balanced detector in the three-dimensional solid-state laser radar chip;
the three-dimensional solid laser radar chip is used for realizing simultaneous scanning of a target by a laser radar in two dimensions based on an optical frequency comb dispersion mechanism and phase regulation and control of a phase shifter array; the signal acquisition and processing unit is used for acquiring and processing target information obtained by scanning the three-dimensional solid laser radar chip and realizing target distance, position and speed information acquisition by combining frequency modulation continuous wave radar detection technology and coherent reception.
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