CN117141339A - Quartz crucible safe transportation supporting device - Google Patents
Quartz crucible safe transportation supporting device Download PDFInfo
- Publication number
- CN117141339A CN117141339A CN202311373719.5A CN202311373719A CN117141339A CN 117141339 A CN117141339 A CN 117141339A CN 202311373719 A CN202311373719 A CN 202311373719A CN 117141339 A CN117141339 A CN 117141339A
- Authority
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- China
- Prior art keywords
- rod
- leg
- steering
- crucible
- quartz crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 239000006096 absorbing agent Substances 0.000 claims description 8
- 230000035939 shock Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 abstract description 18
- 238000005452 bending Methods 0.000 abstract description 4
- 238000011065 in-situ storage Methods 0.000 abstract description 2
- 239000002994 raw material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60P—VEHICLES ADAPTED FOR LOAD TRANSPORTATION OR TO TRANSPORT, TO CARRY, OR TO COMPRISE SPECIAL LOADS OR OBJECTS
- B60P1/00—Vehicles predominantly for transporting loads and modified to facilitate loading, consolidating the load, or unloading
- B60P1/54—Vehicles predominantly for transporting loads and modified to facilitate loading, consolidating the load, or unloading using cranes for self-loading or self-unloading
- B60P1/5438—Vehicles predominantly for transporting loads and modified to facilitate loading, consolidating the load, or unloading using cranes for self-loading or self-unloading with a moveable base
- B60P1/5457—Vehicles predominantly for transporting loads and modified to facilitate loading, consolidating the load, or unloading using cranes for self-loading or self-unloading with a moveable base attached to the loading platform or similar
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62D—MOTOR VEHICLES; TRAILERS
- B62D11/00—Steering non-deflectable wheels; Steering endless tracks or the like
- B62D11/02—Steering non-deflectable wheels; Steering endless tracks or the like by differentially driving ground-engaging elements on opposite vehicle sides
- B62D11/04—Steering non-deflectable wheels; Steering endless tracks or the like by differentially driving ground-engaging elements on opposite vehicle sides by means of separate power sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62D—MOTOR VEHICLES; TRAILERS
- B62D55/00—Endless track vehicles
- B62D55/06—Endless track vehicles with tracks without ground wheels
- B62D55/065—Multi-track vehicles, i.e. more than two tracks
Landscapes
- Engineering & Computer Science (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Handcart (AREA)
Abstract
The invention relates to the technical field of crucible transportation, in particular to a quartz crucible safe transportation supporting device, which comprises: carry on platform, remove supporting mechanism, drive wheel foot and fixed mounting in the crucible clamp subassembly that carries on the platform surface, remove the quantity of supporting mechanism and be four sets of four corners that are fixed in the carry on platform bottom surface in one-to-one, drive wheel foot fixed mounting is in the bottom that removes supporting mechanism, removes supporting mechanism and is including the receipts of swing joint in proper order and opens up drive steering wheel, one-level leg pole, second grade leg pole, tertiary leg pole, quaternary leg pole and steering drive steering wheel. According to the invention, the novel independent transportation structure is arranged, the movement support is carried out by utilizing the plurality of movable support mechanisms, the multi-fold deformation structure of the movable support mechanisms can adapt to different field spaces to carry out bending deformation height adjustment, and the folding and unfolding driving steering engine and the automatic deflection movement of the steering driving steering engine are adopted, so that the multi-fold deformation structure can carry out complex movements such as in-situ turning and the like, is suitable for various working scenes, and has a simple structure and flexible movement.
Description
Technical Field
The invention relates to the technical field of crucible transportation, in particular to a safe transportation supporting device for a quartz crucible.
Background
In the Czochralski crystal production process, quartz crucibles are a critical core component in the thermal field system, requiring movement from warehouse to production site prior to installation. The existing quartz crucible is transported manually, and along with the development of large-size and flaking of silicon wafers, the size of the quartz crucible is correspondingly increased. The maximum possible diameter of the existing silicon wafer is 300mm, and the initial raw material for charging is correspondingly drawn to be about 350kg, so that the whole weight is heavier after the raw material is charged into the quartz crucible, if the raw material is manually carried, a plurality of persons are needed to carry the raw material in a matched mode, the labor intensity is high, the production safety risk is extremely high, time and labor are wasted, and the quality of the pulled single crystal can be influenced when the quartz crucible is damaged or polluted.
The existing carrying technical means mainly carries out lifting work of the crucible in a mode that lifting clamps are arranged on the surfaces of engineering machinery such as a forklift, no independent carrying devices are arranged, the large-scale engineering machinery is low in movement flexibility and cannot be suitable for working in a small-space factory building, and when the operation in the crucible placement heating furnace is used for controlling the engineering devices, the crucible is easy to collide with and damage due to low sensitivity, and the crucible is limited by large space limitation and inconvenient operation. In view of the above, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a safe transport support device for a quartz crucible, which solves the problems and improves the practical value.
Disclosure of Invention
The present invention aims to solve one of the technical problems existing in the prior art or related technologies.
The technical scheme adopted by the invention is as follows: a quartz crucible safe transport supporting device, comprising: the crucible clamp comprises a carrying platform, a movable supporting mechanism, driving wheel legs and crucible clamp assemblies fixedly mounted on the surface of the carrying platform, wherein the number of the movable supporting mechanisms is four, the four groups of the movable supporting mechanisms are correspondingly fixed at four corners of the bottom surface of the carrying platform one by one, the driving wheel legs are fixedly mounted at the bottom end of the movable supporting mechanism, the movable supporting mechanism comprises a folding driving steering engine, a primary leg rod, a secondary leg rod, a tertiary leg rod, a quaternary leg rod and a steering driving steering engine which are movably connected in sequence, the top surface of each driving wheel leg is provided with a shock absorber fixedly connected with the bottom surface of the steering driving steering engine, actuators are movably mounted on the surfaces of the folding driving steering engine, the primary leg rod, the secondary leg rod, the tertiary leg rod and the quaternary leg rod, an output shaft of the folding driving steering engine is fixedly connected with the bottom surface of the carrying platform, and an output shaft of the steering driving steering engine is fixedly connected with the surface of the shock absorber;
the crucible clamp assembly comprises a telescopic boom, a top chuck and a plurality of chuck rods, one end of each chuck rod is movably connected with the surface of the top chuck, the chuck rods are uniformly distributed on the surface of the top chuck in the circumferential direction, the telescopic boom is of a manual hydraulic rod structure and is fixed on the surface of a carrying platform, and the output end of the telescopic boom is fixedly connected with the surface of the top chuck.
The present invention may be further configured in a preferred example to: the inside of drive wheel foot is loaded with independent power supply and control mainboard, independent power supply's output is connected with the tip electricity of executor, the input signal connection of control mainboard has wireless remote control terminal.
The present invention may be further configured in a preferred example to: the folding and unfolding driving steering engine and the steering driving steering engine are of gear motor structures, and fixed lugs used for being connected with an actuator are arranged on the surfaces of the folding and unfolding driving steering engine and the steering driving steering engine.
The present invention may be further configured in a preferred example to: the output ends of the executors on the surfaces of the folding and unfolding driving steering engine, the primary leg rod, the secondary leg rod, the tertiary leg rod and the quaternary leg rod are respectively and movably connected with the surfaces of the primary leg rod, the secondary leg rod, the tertiary leg rod, the quaternary leg rod and the steering driving steering engine.
The present invention may be further configured in a preferred example to: the actuator comprises a loop bar, a telescopic bar, a gear motor fixed on the surface of the loop bar and a screw rod rotatably installed on the inner side of the loop bar, a fluted disc connected with the gear motor in a transmission manner is sleeved at the bottom end of the screw rod, and the telescopic bar is sleeved on the inner side of the loop bar in a sliding manner and is provided with a thread bush matched with the screw rod.
The present invention may be further configured in a preferred example to: the driving wheel feet comprise a control box and crawler driving wheel structures positioned on two sides of the control box, and the bottom ends of the shock absorbers are movably connected with the surface of the control box.
The present invention may be further configured in a preferred example to: the bottom surface of top chuck is connected with tension interlock dish through extension spring, extension spring is in tensile state, tension interlock dish's periphery and the surface swing joint of clamp pole.
The beneficial effects obtained by the invention are as follows:
1. according to the invention, the novel independent transportation structure is arranged, the movement support is carried out by utilizing the plurality of movable supporting mechanisms, the multi-fold deformation structure of the movable supporting mechanisms can adapt to different field spaces to carry out bending deformation height adjustment, the independent deflection movement of the folding driving steering engine and the steering driving steering engine is adopted, flexible steering control is carried out in the supporting transportation, and the movement speed of each driving wheel foot is independently controlled, so that the vehicle can carry out complex movements such as in-situ turning and the like, and the vehicle is suitable for various working scenes and has simple structure and flexible movement.
2. According to the invention, the height can be arbitrarily adjusted through the bending motion of the movable supporting mechanism in the crucible clamping and releasing processes, and the crucible is stably clamped by being matched with the manual lifting and hoisting operations of the crucible clamping assembly, so that the self weight of the crucible is converted into the clamping force, and the stability in the transportation of the crucible is ensured.
3. According to the invention, the actuator is used for controlling the deflection motions of the primary leg rod, the secondary leg rod, the tertiary leg rod and the quaternary leg rod, the bending and shrinkage can be realized in a non-use stage, and the deflection driving of the folding driving steering engine and the steering driving steering engine is matched, so that the deformation storage is realized, the volume is reduced, the occupied space is small, and the use experience is further optimized.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an embodiment of the present invention;
FIG. 2 is a schematic diagram of a mobile support mechanism and a mounting platform according to an embodiment of the present invention;
FIG. 3 is a schematic view of a movable supporting mechanism according to an embodiment of the present invention;
FIG. 4 is a schematic view of a leg link connection structure according to one embodiment of the present invention;
FIG. 5 is a schematic cross-sectional view of an actuator according to one embodiment of the present invention;
FIG. 6 is a schematic view of a driving wheel leg structure according to an embodiment of the present invention;
FIG. 7 is a schematic view of a crucible clamp assembly according to one embodiment of the present invention;
fig. 8 is a schematic view illustrating a storage state according to an embodiment of the present invention.
Reference numerals:
100. a carrying platform;
200. a movable support mechanism; 210. a steering engine is driven in a retracting and unfolding mode; 220. steering drive steering engine; 230. a primary leg bar; 240. a secondary leg bar; 250. three-stage leg bars; 260. four-stage leg bars; 270. an actuator; 271. a loop bar; 272. a telescopic rod; 273. a speed reducing motor; 274. a screw rod;
300. a driving wheel foot; 310. a damper;
400. a crucible clamp assembly; 410. a telescopic boom; 420. a top chuck; 430. a clip rod; 421. tension bite plate.
Detailed Description
The objects, technical solutions and advantages of the present invention will become more apparent by the following detailed description of the present invention with reference to the accompanying drawings. It should be noted that, without conflict, the embodiments of the present invention and features in the embodiments may be combined with each other.
A safe transport supporting device for a quartz crucible according to some embodiments of the present invention is described below with reference to the accompanying drawings.
Referring to fig. 1 to 8, the invention provides a safe transportation supporting device for a quartz crucible, comprising: the movable supporting mechanism 200 comprises a folding driving steering engine 210, a primary leg rod 230, a secondary leg rod 240, a tertiary leg rod 250, a quaternary leg rod 260 and a steering driving steering engine 220 which are movably connected in sequence, the top surface of the driving wheel leg 300 is provided with a shock absorber 310 fixedly connected with the bottom surface of the steering driving steering engine 220, the surfaces of the folding driving steering engine 210, the primary leg rod 230, the secondary leg rod 240, the tertiary leg rod 250 and the quaternary leg rod 260 are movably provided with an actuator 270, the output shaft of the folding driving steering engine 210 is fixedly connected with the bottom surface of the carrying platform 100, and the output shaft of the steering driving steering engine 220 is fixedly connected with the surface of the shock absorber 310;
the crucible clamp assembly 400 comprises a telescopic boom 410, a top chuck 420 and a plurality of chuck rods 430, wherein one ends of the chuck rods 430 are movably connected with the surface of the top chuck 420, the chuck rods 430 are uniformly distributed on the surface of the top chuck 420 in the circumferential direction, the telescopic boom 410 is of a manual hydraulic rod structure and is fixed on the surface of the carrying platform 100, and the output ends of the telescopic boom 410 are fixedly connected with the surface of the top chuck 420.
In this embodiment, the driving wheel pins 300 are internally mounted with an independent power source and a control main board, the output end of the independent power source is electrically connected with the end of the actuator 270, and the input end of the control main board is electrically connected with a wireless remote control terminal.
Specifically, by mounting a control structure and an independent power supply inside the driving wheel leg 300 to be away from the crucible heat source, equipment failure caused by the high-temperature heat source is avoided.
In this embodiment, the retracting driving steering engine 210 and the steering driving steering engine 220 are of a gear motor structure, and fixed lugs for connecting with the actuator 270 are arranged on the surfaces of the retracting driving steering engine 210 and the steering driving steering engine 220.
Further, the output ends of the actuator 270 on the surfaces of the retracting driving steering engine 210, the primary leg rod 230, the secondary leg rod 240, the tertiary leg rod 250 and the quaternary leg rod 260 are movably connected with the surfaces of the primary leg rod 230, the secondary leg rod 240, the tertiary leg rod 250, the quaternary leg rod 260 and the steering driving steering engine 220 respectively.
Specifically, the actuator 270 controls the deflection motions of the primary leg bar 230, the secondary leg bar 240, the tertiary leg bar 250 and the quaternary leg bar 260, and the actuator can be folded and contracted in a non-use stage, and is matched with the deflection driving of the folding driving steering engine 210 and the steering driving steering engine 220, so that the deformation storage is realized, and the volume is reduced.
In this embodiment, the actuator 270 includes a sleeve rod 271, a telescopic rod 272, a gear motor 273 fixed on the surface of the sleeve rod 271, and a screw rod 274 rotatably mounted on the inner side of the sleeve rod 271, wherein a fluted disc in transmission connection with the gear motor 273 is sleeved at the bottom end of the screw rod 274, the telescopic rod 272 is slidably sleeved on the inner side of the sleeve rod 271, and a threaded sleeve matched with the screw rod 274 is disposed on the inner side of the telescopic rod 272.
Specifically, the screw rod driving control mode of the screw rod 274 is adopted to drive the telescopic rod 272 to slide and telescopic at the inner side of the sleeve rod 271, so that the large-mass crucible conveying device has large output torque, is suitable for conveying large-mass crucibles, and is higher in stability.
In this embodiment, the driving wheel foot 300 includes a control box and track driving wheel structures located at both sides of the control box, and the bottom end of the shock absorber 310 is movably connected with the surface of the control box.
In this embodiment, the bottom surface of the top chuck 420 is connected to a tension snap plate 421 by a tension spring, and the tension spring is in a stretched state, and the outer circumference of the tension snap plate 421 is movably connected to the surface of the chuck rod 430.
Specifically, the tension occluding disc 421 is pulled by the tension spring to approach the surface of the top chuck 420, so that the deflection closure of the chuck rod 430 is realized, the closed state of the chuck rod 430 is maintained, and the chuck rod 430 is elastically unfolded and automatically attached and clamped with the surface of the crucible when being contacted with the crucible, so that the use experience is improved.
The working principle and the using flow of the invention are as follows:
in the quartz crucible transporting operation, as shown in fig. 8, in the initial state of the transporting support device, the rotation motion control of the folding driving steering engine 210 and the steering driving steering engine 220 is used for carrying out the unfolding of each moving support mechanism 200, and under the control drive of the plurality of actuators 270, each moving support mechanism 200 synchronously extends and moves, and lifts the carrying platform 100 to keep the horizontal motion and lift, the independent motion drive of the driving wheel legs 300 realizes the rotation speed difference to match the rotation steering control of the steering driving steering engine 220, and the linear walking is realized under the synchronous motion of each driving wheel leg 300, so that the crucible is above the crucible moving, the crucible clamp assembly 400 faces the surface of the crucible, the contraction control of the actuator 270 is used for enabling each moving support mechanism 200 to bend and move to adjust the height, the bottom end of the clamp rod 430 is sleeved on the outer edge of the crucible, the clamp rod 430 is kept in contact with the crucible surface under the elastic lifting of the tension meshing disc 421, the telescopic boom 410 is manually controlled to shrink and lift the top chuck 420, the clamp rod 430 and the crucible are lifted, the clamping friction effect of the clamp rod 430 and the crucible edge is improved under the self weight effect, so that the crucible transporting is more stable, and the crucible is transported to the upper side and the crucible is heated and then heated.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
Claims (8)
1. A quartz crucible safe transport supporting device, characterized by comprising: carry on platform (100), remove supporting mechanism (200), drive wheel foot (300) and fixed mounting in crucible clamp subassembly (400) on carry on platform (100) surface, the quantity of removing supporting mechanism (200) is four sets of four corners of being fixed in carry on platform (100) bottom surface and one-to-one, drive wheel foot (300) fixed mounting is in the bottom of removing supporting mechanism (200), remove supporting mechanism (200) including the receipts of swing joint in proper order and open drive steering wheel (210), one-level leg pole (230), second grade leg pole (240), tertiary leg pole (250), four-level leg pole (260) and steering drive steering wheel (220), the top surface of drive wheel foot (300) be equipped with steering drive steering wheel (220) bottom surface fixed connection's bumper shock absorber (310), receive and open drive steering wheel (210), one-level leg pole (230), second grade leg pole (240), tertiary leg pole (250), four-level leg pole (260) surface all movable mounting have executor (270), receive and open drive steering wheel's output shaft and carry on platform (100) bottom surface fixed connection, steering wheel (310) are carried on the surface fixed with steering wheel.
2. The quartz crucible safe transportation supporting device according to claim 1, wherein an independent power supply and a control main board are mounted in the driving wheel leg (300), an output end of the independent power supply is electrically connected with an end portion of the actuator (270), and an input end of the control main board is electrically connected with a wireless remote control terminal.
3. The quartz crucible safe transportation supporting device according to claim 1, wherein the folding and unfolding driving steering engine (210) and the steering driving steering engine (220) are of gear motor structures, and fixed lugs used for being connected with the actuator (270) are arranged on the surfaces of the folding and unfolding driving steering engine (210) and the steering driving steering engine (220).
4. The quartz crucible safe transportation supporting device according to claim 1, wherein the output ends of the actuators (270) on the surfaces of the folding driving steering engine (210), the primary leg rod (230), the secondary leg rod (240), the tertiary leg rod (250) and the quaternary leg rod (260) are movably connected with the surfaces of the primary leg rod (230), the secondary leg rod (240), the tertiary leg rod (250), the quaternary leg rod (260) and the steering driving steering engine (220) respectively.
5. The quartz crucible safe transportation supporting device according to claim 1, wherein the actuator (270) comprises a sleeve rod (271), a telescopic rod (272), a gear motor (273) fixed on the surface of the sleeve rod (271) and a screw rod (274) rotatably installed on the inner side of the sleeve rod (271), a fluted disc in transmission connection with the gear motor (273) is sleeved at the bottom end of the screw rod (274), the telescopic rod (272) is sleeved on the inner side of the sleeve rod (271) in a sliding manner, and a threaded sleeve matched with the screw rod (274) is arranged on the inner side of the telescopic rod (272).
6. The quartz crucible safe transport supporting device according to claim 1, wherein the driving wheel leg (300) comprises a control box and crawler driving wheel structures positioned at both sides of the control box, and the bottom end of the shock absorber (310) is movably connected with the surface of the control box.
7. The quartz crucible safe transportation supporting device according to claim 1, wherein the crucible clamp assembly (400) comprises a telescopic boom (410), a top chuck (420) and a plurality of chuck rods (430), one ends of the chuck rods (430) are movably connected with the surface of the top chuck (420), the chuck rods (430) are uniformly distributed on the surface of the top chuck (420) in the circumferential direction, the telescopic boom (410) is of a manual hydraulic rod structure and is fixed on the surface of the carrying platform (100), and the output ends of the telescopic boom (410) are fixedly connected with the surface of the top chuck (420).
8. The quartz crucible safe transportation supporting device according to claim 7, wherein the bottom surface of the top chuck (420) is connected with a tension engaging plate (421) through a tension spring, the tension spring is in a tension state, and the periphery of the tension engaging plate (421) is movably connected with the surface of the chuck rod (430).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311373719.5A CN117141339B (en) | 2023-10-23 | 2023-10-23 | Quartz crucible safe transportation supporting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311373719.5A CN117141339B (en) | 2023-10-23 | 2023-10-23 | Quartz crucible safe transportation supporting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117141339A true CN117141339A (en) | 2023-12-01 |
| CN117141339B CN117141339B (en) | 2023-12-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311373719.5A Active CN117141339B (en) | 2023-10-23 | 2023-10-23 | Quartz crucible safe transportation supporting device |
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