CN117110156A - Photoresist granularity testing device and method - Google Patents
Photoresist granularity testing device and method Download PDFInfo
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- CN117110156A CN117110156A CN202311392425.7A CN202311392425A CN117110156A CN 117110156 A CN117110156 A CN 117110156A CN 202311392425 A CN202311392425 A CN 202311392425A CN 117110156 A CN117110156 A CN 117110156A
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 187
- 238000012360 testing method Methods 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000003860 storage Methods 0.000 claims abstract description 124
- 238000000149 argon plasma sintering Methods 0.000 claims abstract description 30
- 239000002245 particle Substances 0.000 claims abstract description 29
- 230000009471 action Effects 0.000 claims abstract description 11
- 230000008859 change Effects 0.000 claims abstract description 6
- 238000004140 cleaning Methods 0.000 claims description 19
- 238000001802 infusion Methods 0.000 claims description 18
- 230000000694 effects Effects 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 6
- 238000012546 transfer Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 4
- 230000000712 assembly Effects 0.000 claims description 3
- 238000000429 assembly Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 abstract description 21
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000009795 derivation Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000013019 agitation Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N2015/0238—Single particle scatter
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Abstract
The application belongs to the technical field of photoresist testing, and discloses a photoresist granularity testing device and method. The photoresist granularity testing device comprises a frame, a light scattering particle analyzer is arranged above the frame, the frame is arranged on the left side and the right side of the light scattering particle analyzer, the input end of the light scattering particle analyzer is fixedly communicated with a testing tube, a temporary storage tube is arranged at the bottom end of the testing tube, and the middle part of the top end of the temporary storage tube is communicated with the testing tube. According to the application, through the fixed pipe with the variable inner diameter and the action of the adjusting component, the inner diameter of the fixed pipe is adjusted through the active action of the adjusting component, so that the port pressure is adjusted, the liquid is rapidly stabilized through the active action due to the surge phenomenon caused by the pressure change in different pipelines due to the pressure adjustment balance liquid, the problem of long test caused by the traditional standing method is avoided, and the influence of the stability of photoresist on the test result can be rapidly realized.
Description
Technical Field
The application belongs to the technical field of photoresist testing, and particularly relates to a photoresist granularity testing device and method.
Background
Photoresists are a special type of photosensitive material commonly used in the semiconductor processing, optical device manufacturing, and other fields in microelectronics manufacturing. The material is a material which can generate chemical reaction under illumination, and can realize fine processing of a microstructure by controlling the processes of exposure, development and the like of photoresist. Photoresists are typically composed of polymers, photosensitizers, solvents, etc. and different types of photoresists have different characteristics such as resolution, adhesion, etch resistance, etc. and may be selected according to particular requirements. In microelectronic fabrication, photoresist is an important material for the fabrication of micro-devices such as chips, integrated circuits, and the like. The photoresist must be tested for its particle size when in use to meet the requirements of semiconductor fabrication.
Since the photoresist needs to be prepared on site before being manufactured, the granularity of the photoresist needs to be tested after each preparation, and a laser particle sizer, a light scattering particle sizer and the like are mainly adopted as a testing device for the granularity of the photoresist at present. The particle size of the photoresist can be measured and analyzed through a laser or light scattering principle, the light scattering particle size meter is mainly used at present under the condition of cost, the conventional light scattering particle size meter mainly tests the particle size of the photoresist in the pipeline, the conventional operation method mainly comprises the steps of introducing the photoresist to be tested into the pipeline and testing the photoresist by using a tester, but the photoresist introduced into the pipeline is in an oscillation state and in an unstable state in a long time due to the problems of flow rate and pipe diameter, and the photoresist can be tested by a static part for a long time, so that the testing precision is affected to a certain extent.
In order to test the photoresist inside the pipeline effectively in the process of testing the granularity of the photoresist, impurities inside the pipeline must be removed, photoresist is generally used for cleaning the inside of the pipeline in advance in the prior art, and although the operation mode can clean the inside of the pipeline, more photoresist is generally used for cleaning the inside of the pipeline effectively, and the photoresist cannot be reused, so that it is important how to use less photoresist for cleaning the inside of the pipeline.
Disclosure of Invention
The application aims to provide a photoresist granularity testing device and method for solving the problems in the background technology.
In order to achieve the above object, the present application provides the following technical solutions: the utility model provides a photoresist granularity testing arrangement, includes the frame, the top of frame is equipped with the light scattering particle size meter, the frame is installed in the left and right sides of light scattering particle size meter, the fixed intercommunication of input of light scattering particle size meter has the test tube, the bottom of test tube is equipped with the temporary storage pipe, the temporary storage pipe is horizontal place and be parallel to light scattering particle size meter each other, be linked together between the middle part on temporary storage pipe top and the test tube, the front and back both sides of temporary storage pipe bottom all are fixed intercommunication has the wash pipe, the fixed pipe of front and back both ends of temporary storage pipe all is fixed mounting, two the fixed pipe is relative to the one end that keeps away from all installs the solenoid valve, all be equipped with the stand in the four corners position of light scattering particle size meter, the front and back both ends of frame are connected with the top of stand, every two are a set of and symmetric distribution in the left and right sides of fixed pipe, the bottom between every group of stand is fixed mounting has the bottom plate, the below of every bottom plate is equipped with adjusting part, be linked together between adjusting part and the wash pipe;
the baffle plates are movably mounted at the upper end and the lower end of the inner cavity of the fixed pipe, the extension rods are fixedly mounted at the ends, far away from the baffle plates, of the extension rods, and the ends, far away from the baffle plates, of the extension rods penetrate through the outer side face of the fixed pipe and are fixedly connected with movable plates located at the upper end and the lower end of the fixed pipe.
Before use, the device is connected with the upright post and the adjusting component through the external frame or the external base, the valve of the electromagnetic valve is closed, the power supply of the device is connected, the adjusting component is connected with an external photoresist pipeline, and the preparation before the test is completed.
As a further technical scheme of the application, the baffle plate moves up and down relative to the fixed pipe, the left end and the right end of the movable plate are fixedly provided with guide blocks, the inner side surfaces of the stand columns are provided with guide grooves, and the movable plate is movably clamped with the guide grooves through the guide blocks.
As a further technical scheme of the application, screw sleeves are fixedly arranged at the left end and the right end of the movable plate, threaded rods are movably sleeved at the left side and the right side between the two movable plates, the threaded rods are in threaded sleeve joint with the middle of the screw sleeves, and limit sleeves are fixedly sleeved at the middle of the threaded rods.
As a further technical scheme of the application, the outer side surface of the threaded rod is far away from the two ends of the limiting sleeve, the directions of the threads of the corresponding threaded sleeve are opposite, the directions of the threads of the corresponding threaded grooves are the same, the upper end and the lower end of the upright post are movably connected with the threaded rod through the lug plates, and the threaded rod rotates relative to the upright post.
As a further technical scheme of the application, the middle part of the bottom end of the bottom plate is movably connected with a driving gear, the bottom end of the threaded rod is movably connected with driven gears, and the two driven gears are positioned on the left side and the right side of the driving gear and are in meshed connection with the driving gear.
The inside mountable camera of temporary storage pipe is used for observing the steady state of photoresist, after accomplishing the inside moist washing of temporary storage pipe pipeline, can connect in parallel between two solenoid valves and the outside photoresist pipeline, and open two solenoid valves and ensure that the photoresist can get into the inside of temporary storage pipe, when the photoresist passes through the inside of pipeline entering temporary storage pipe, accessible observation photoresist's the state of agitating about this moment is adjusted two fixed pipes, can drive the driving gear rotatory through opening adjusting part this moment, two driven gears rotate and drive two threaded rods thereupon this moment, can drive two fly leaves relatively near or keep away from under the direction effect of guide block and guide slot this moment, two baffles can be relatively near or keep away from this moment, the internal diameter of fixed pipe can be adjusted this moment, the liquid pressure of two fixed pipe tip is adjusted thereupon, the internal diameter adjustment through the inside photoresist of both ends fixed pipe, make the photoresist of temporary storage pipe inside keep balanced with the inside pressure of outside photoresist pipeline, make the photoresist be in steady state, the convenience is measured its granularity.
Through the fixed pipe that is provided with variable internal diameter to and adjusting part's effect, realize the adjustment of fixed pipe internal diameter through adjusting part's initiative effect, and then realize the regulation of port pressure, the regulation through pressure balances the liquid and gets into the surging phenomenon that the pressure variation leads to in the different pipelines, makes liquid tend to stability fast through initiative effect, avoids the longer problem of test that traditional use method of standing led to, can realize the stable reduction of photoresist fast and to the influence of test result.
When the pressure balance between the temporary storage pipe and the external photoresist pipeline is completed, the liquid level inside the temporary storage pipe is ensured to reach a preset level, the external photoresist can not enter the temporary storage pipe through closing the valves of the two electromagnetic valves, the photoresist inside the temporary storage pipe can not flow out, the external pipeline can be removed, the photoresist in a stable state is temporarily stored in the temporary storage pipe, the granularity of the photoresist can be tested through the light scattering granularity meter and the test pipe, and the granularity test is completed.
Through setting up the fixed pipe to variable internal diameter and the cooperation between temporary storage pipe and the external pipeline, realize the temporary storage of photoresist under the steady state through demolishing external pipeline after pressure balance, and then carry out many times granularity test to the photoresist under the steady state of rest, avoid the influence of the flow of photoresist in the external pipeline to the measurement process, can eliminate the influence of the flow of photoresist to the test result as far as possible, improve the test accuracy.
As a further technical scheme of the application, the adjusting component comprises a power tank, the power tank is positioned below the driving gear, a main shaft is movably connected to the middle part of the inner cavity of the power tank, and the top end of the main shaft penetrates through the top end of the power tank and is connected with the middle part of the bottom end of the driving gear through an electromagnetic clutch.
As a further technical scheme of the application, the outer side surface of the main shaft is fixedly sleeved with an impeller positioned in the power tank, the bottom end of the power tank is fixedly connected with a fixing frame, the top end of the fixing frame is fixedly provided with a servo motor, and the bottom end of the main shaft penetrates through the bottom end of the power tank and is connected with the output end of the servo motor.
As a further technical scheme of the application, one ends of the two groups of power tanks, which are relatively far away, are fixedly communicated with a transfusion tube, one ends of the two groups of power tanks, which are relatively close, are fixedly communicated with a circulating tube, the other ends of the circulating tube are communicated with a cleaning tube, and an electromagnetic valve is arranged in the cleaning tube and is used for controlling the communication with a temporary storage tube.
When needs carry out the moist washing to the intraduct of keeping in, the accessible disconnection electromagnetic clutch, and be connected between the transfer line of outside photoresist pipeline and left side at first, and pour into left transfer line with the photoresist, the photoresist can pour into the inside of wasing the pipe through left transfer line and circulating pipe this moment, the inside of pouring into the temporary storage pipe simultaneously is back to flow through right side adjusting part, can be with the transfer line of right-hand member and be linked together between the transfer line of left end through the pipeline this moment, accomplish the circulation, the photoresist can be located between two adjusting part and the temporary storage pipe this moment, can open two servo motor and make left servo motor forward rotation this moment in step, and the servo motor reverse rotation on right side, the forward rotation of left side impeller this moment is with the inside of leading-in photoresist to the temporary storage pipe, and the impeller reverse rotation cooperation gravity effect of right side exports the photoresist and realizes the circulation, and then carry out the moist washing to the inside of temporary storage pipe fully.
Through the initiative of adjusting part is utilized once more to through the cooperation between temporary storage pipe and the adjusting part, two adjusting part are realized respectively leading-in and the derivation of photoresist around the injection cooperation of photoresist, and make it accomplish the circulation through outside pipeline, and then realize the abundant washing to temporary storage pipe inside, reduce the use amount of photoresist, avoid traditional device to need use a large amount of photoresist to carry out abluent problem, reduce the quantity of photoresist, reduce test cost.
The application also provides a using method of the photoresist granularity testing device, which comprises the following steps:
s1: before use, the device is required to ensure that no large foreign matters exist in the temporary storage tube, meanwhile, the power supply of the device is connected, the infusion tube positioned at the left side is connected with an external photoresist pipeline, meanwhile, the upright post and the fixing frame are fixed, so that the upright post and the fixing frame cannot move, the valves of the two electromagnetic valves are closed, and the preparation before the test is completed;
s2: when the inside of the temporary storage tube is rinsed, photoresist can be injected into the infusion tube by opening an external valve, the left servo motor and the right servo motor are started to rotate forward, the right servo motor rotates reversely, the electromagnetic clutch is controlled to be disconnected, the impeller at the input end can be driven to rotate clockwise and the impeller at the output end can be driven to rotate anticlockwise, and after the injection of a certain amount of photoresist is completed, the right infusion tube is communicated with the left infusion tube through a pipeline, so that the circular connection is completed;
s3: at the moment, the photoresist can be injected into the cleaning pipe through the circulating pipe and enter the temporary storage pipe and is rinsed in the temporary storage pipe to remove impurities, meanwhile, the clockwise rotating impeller can enable the photoresist to quickly enter the temporary storage pipe, the anticlockwise rotating impeller can enable the photoresist to quickly flow out of the temporary storage pipe, the photoresist circulates in the two adjusting assemblies and the temporary storage pipe through an external pipeline, the temporary storage pipe is rinsed fully, and the photoresist is discharged after rinsing is completed;
s4: after the rinsing is finished, the temporary storage pipe is integrated into an external photoresist pipeline by opening valves of two electromagnetic valves and connecting the temporary storage pipe with the external photoresist pipeline, the electromagnetic valve in the cleaning pipe is synchronously closed to avoid outflow of photoresist, the photoresist enters the temporary storage pipe through the electromagnetic valve and the fixed pipe at the moment, the photoresist is in an agitating state at the moment, a driving gear can be driven to rotate through a main shaft by combining an electromagnetic clutch and starting a servo motor, and then the two driven gears are driven to synchronously rotate, at the moment, the two threaded rods rotate along with the temporary storage pipe, and the two movable plates are driven to be relatively close to or far away under the guiding action of the guide block and the guide groove;
s5: when two fly boards are relatively close to or keep away from, can drive two extension bars relatively close to or keep away from and then realize the interval adjustment between two baffles, change the internal diameter of fixed pipe and then change the pressure at temporary storage pipe both ends through the interval between two baffles, make the pressure between temporary storage pipe and the outside pipeline keep balanced through the adjustment to both ends pressure, make the inside that outside photoresist can't get into temporary storage pipe and the inside photoresist of temporary storage pipe can't flow out through closing the valve of two solenoid valves, can be through demolishing the outside pipeline this moment, make the photoresist under the steady state temporary storage to the inside of temporary storage pipe, make the photoresist be in steady state, accessible light scattering particle size appearance and test tube test the inside photoresist granularity of temporary storage pipe after accomplishing the adjustment and obtain test data.
The beneficial effects of the application are as follows:
1. according to the application, through the fixed pipe with the variable inner diameter and the action of the adjusting component, the inner diameter of the fixed pipe is adjusted through the active action of the adjusting component, so that the port pressure is adjusted, the liquid is rapidly stabilized through the active action due to the surge phenomenon caused by the pressure change in different pipelines due to the pressure adjustment balance liquid, the problem of long test caused by the traditional standing method is avoided, and the influence of the stability of photoresist on the test result can be rapidly realized.
2. According to the application, the active action of the adjusting component is recycled, the photoresist is respectively led in and led out through the two adjusting components before and after injection matching of the photoresist through matching between the temporary storage pipe and the adjusting component, and circulation is completed through the external pipeline, so that the inside of the temporary storage pipe is fully rinsed, the using amount of the photoresist is reduced, the problem that a large amount of photoresist is required to be cleaned in the traditional device is avoided, the using amount of the photoresist is reduced, and the testing cost is reduced.
3. According to the application, the fixed pipe with the variable inner diameter and the temporary storage pipe are matched with the external pipeline, and temporary storage of the photoresist in a stable state is realized by removing the external pipeline after pressure balance, so that the photoresist in the static stable state is subjected to multiple particle size tests, the influence of the flowing of the photoresist in the external pipeline on the measurement process is avoided, the influence of the flowing of the photoresist on the test result is eliminated as much as possible, and the test precision is improved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present application;
FIG. 2 is a schematic view of the bottom end structure of the present application;
FIG. 3 is a schematic cross-sectional view of the internal structure of the temporary storage tube of the present application;
FIG. 4 is a schematic illustration of the fit of the post and mounting tube structure of the present application;
FIG. 5 is an isolated schematic cross-sectional view of the structure of the adjustment assembly of the present application;
FIG. 6 is an exploded view of the post and deck structure of the present application;
FIG. 7 is a schematic cross-sectional view of the internal structure of the fixing tube of the present application;
fig. 8 is an exploded view of the movable plate and threaded rod structure of the present application.
In the figure: 1. a frame; 2. a light scattering particle sizer; 3. a test tube; 4. a temporary storage tube; 5. a column; 6. a guide groove; 7. a guide block; 8. a movable plate; 9. a thread sleeve; 10. a threaded rod; 11. a limit sleeve; 12. a fixed tube; 13. an electromagnetic valve; 14. an extension rod; 15. a baffle; 16. an adjustment assembly; 161. a power tank; 162. a main shaft; 163. an impeller; 164. a fixing frame; 165. a servo motor; 166. an infusion tube; 167. a circulation pipe; 17. cleaning the tube; 18. a bottom plate; 19. a drive gear; 20. a driven gear.
Description of the embodiments
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
As shown in fig. 1 to 8, in the embodiment of the application, a photoresist granularity testing device comprises a frame 1, wherein a light scattering granularity meter 2 is arranged above the frame 1, the frame 1 is arranged on the left side and the right side of the light scattering granularity meter 2, the input end of the light scattering granularity meter 2 is fixedly communicated with a testing tube 3, the bottom end of the testing tube 3 is provided with a temporary storage tube 4 which is horizontally and transversely arranged and parallel to the light scattering granularity meter 2, the middle part of the top end of the temporary storage tube 4 is communicated with the testing tube 3, the front side and the rear side of the bottom end of the temporary storage tube 4 are fixedly communicated with a cleaning tube 17, the front end and the rear end of the temporary storage tube 4 are fixedly provided with a fixed tube 12, the far end of the two fixed tubes 12 are respectively provided with an electromagnetic valve 13, the four corners of the light scattering granularity meter 2 are respectively provided with an upright post 5, the front end and the rear end of the frame 1 are connected with the top ends of the upright posts 5, each two upright posts 5 are symmetrically distributed on the left side and the right side of the fixed tube 12, the bottom end between each upright post 5 is fixedly provided with a bottom plate 18, an adjusting assembly 16 is arranged below each bottom plate 18, and one end between the adjusting assembly 16 and one end of the cleaning tube 17 is communicated with the adjusting assembly 16;
baffle plates 15 are movably mounted at the upper end and the lower end of the inner cavity of the fixed pipe 12, extension rods 14 are fixedly mounted at the ends, far away from the baffle plates 15, of the two baffle plates 15, and movable plates 8 located at the upper end and the lower end of the fixed pipe 12 are fixedly connected with one end, far away from the baffle plates 15, of the extension rods 14 through the outer side face of the fixed pipe 12.
Before use, the device is firstly connected with the upright post 5 and the adjusting component 16 through an external frame or an external base, the valve of the electromagnetic valve 13 is closed, the power supply of the device is connected, and the adjusting component 16 is connected with an external photoresist pipeline, so that the preparation before test is completed.
As shown in fig. 4, fig. 5, fig. 6 and fig. 7, the baffle 15 is displaced up and down relative to the fixed tube 12, the guide block 7 is fixedly installed at the left and right ends of the movable plate 8, the guide groove 6 is all provided at the inner side of the upright post 5, the movable plate 8 is movably clamped between the guide block 7 and the guide groove 6, the threaded sleeves 9 are fixedly installed at the left and right ends of the movable plate 8, the threaded rod 10 is movably sleeved at the left and right sides between the two movable plates 8, the threaded rod 10 is in threaded sleeve connection with the middle of the threaded sleeve 9, the limit sleeve 11 is fixedly sleeved at the middle of the threaded rod 10, the outer side surface of the threaded rod 10 is far away from the two ends of the limit sleeve 11, the thread directions of the thread grooves in the threaded sleeves 9 corresponding to the opposite directions are the same, the upper and lower ends of the upright post 5 are movably connected with the threaded rod 10 through the ear plates, the threaded rod 10 rotates relative to the upright post 5, the driving gear 19 is movably connected at the middle of the bottom plate 18, the bottom of the threaded rod 10 is movably connected with the driven gear 20, the driven gears 20 are movably connected with the driven gears 20, and the driven gears 20 are positioned at the left and right sides of the driving gear 19 and are in meshed connection with the driving gear 19.
Embodiment one: the camera can be arranged in the temporary storage tube 4 for observing the stable state of the photoresist, after the inside of the pipeline of the temporary storage tube 4 is rinsed, the two electromagnetic valves 13 can be connected in parallel with the outside photoresist pipeline, the two electromagnetic valves 13 are opened to ensure that the photoresist can enter the inside of the temporary storage tube 4, when the photoresist enters the inside of the temporary storage tube 4 through the pipeline, the front and rear two fixed tubes 12 can be regulated by observing the agitation state of the photoresist at the moment, the driving gear 19 can be driven to rotate by starting the regulating assembly 16, the left and right driven gears 20 can rotate along with the rotation of the two driven gears and drive the two threaded rods 10 to rotate, the two movable plates 8 can be driven to relatively approach or separate under the guiding action of the guide block 7 and the guide groove 6, the two baffles 15 can be relatively approach or separate from each other, the inner diameters of the fixed tubes 12 can be regulated, the liquid pressures at the ends of the two fixed tubes 12 can be regulated along with the inner diameters of the fixed tubes 12, the photoresist inside the temporary storage tube 4 and the pressure inside the external photoresist pipeline can be kept balanced through the inner diameter regulation of the fixed tubes at the two ends, so that the photoresist is in the stable state, and the particle size can be conveniently measured;
wherein the inner diameters of both ends of the fixed tube 12 should correspond to the pressure at the time of inputting and outputting photoresist, that is, when the photoresist pressure inputted from the external photoresist tube is too large, the inner diameter of the fixed tube 12 at the input end should be adjusted at this time, the inner diameter of the fixed tube 12 at the input end should be increased, so that the flow rate and resistance of the liquid can be reduced, thereby realizing the balance of the liquid, and at the same time, the inner diameter of the fixed tube 12 at the output end should be adjusted correspondingly according to the pressure of the photoresist output end, when the inner diameter of the tube is increased, the flow cross-sectional area of the liquid is increased at the same time, so that the flow rate is reduced, when the inner diameter of the tube is reduced, the flow cross-sectional area of the liquid is reduced at the same time, so that the flow rate is increased, in particular, in the present application, the inner diameter of the fixed tube 12 needs to be adjusted correspondingly by the pressure value inside the external photoresist, that is, when the pressure of the external pipeline at the input end is larger than the pressure in the middle part of the temporary storage pipe 4, namely, the pressure near the position of the light scattering particle analyzer 2, the liquid flow rate can be reduced by increasing the inner diameter of the input end of the fixed pipe 12, meanwhile, the inner diameters of the input end and the output end of the fixed pipe 12 are synchronously adjusted to ensure the pressure balance when the photoresist flows in and out, and when the pressure of the photoresist input by the pipeline at the input end is too small to cause the flow rate to be too low, the pressure of the photoresist entering the temporary storage pipe 4 can be increased by reducing the inner diameter of the fixed pipe 12 at the moment, namely, the flow rate of the photoresist is increased, meanwhile, in order to quickly enable the photoresist to enter the temporary storage pipe 4, the inner diameters of the input end and the output end of the fixed pipe 12 are synchronously adjusted to be smaller, the liquid flow rate is synchronously increased, and finally, the liquid balance is realized, the inner diameter of the fixed tube 12 should be correspondingly adjusted according to the input pressure of the photoresist, but not observed by naked eyes, meanwhile, the photoresist can slowly flow in the temporary storage tube 4 through a length of the temporary storage tube 4 without changing the inner diameter of the temporary storage tube 4, so as to smoothly transition the flow rate of the liquid, avoid the liquid from being agitated caused by abrupt pressure change of the input end or the output end, and simultaneously keep the light scattering particle sizer 2 positioned in the middle to test the photoresist in the most stable state;
through the fixed pipe 12 that is provided with the variable internal diameter to and the effect of adjusting part 16, the adjustment of fixed pipe 12 internal diameter is realized through the initiative effect of adjusting part 16, and then the regulation of realization port pressure, the regulation through pressure balances the phenomenon of surging that liquid is in getting into different pipelines because of pressure variation causes, makes liquid tend to stability fast through the initiative effect, avoids the longer problem of test that traditional use method of standing led to, can realize the stable reduction of photoresist to the influence of test result fast.
When the pressure balance between the temporary storage pipe 4 and the external photoresist pipeline is completed, the liquid level inside the temporary storage pipe 4 is ensured to reach a preset level, the external photoresist can not enter the temporary storage pipe 4 and the photoresist inside the temporary storage pipe 4 can not flow out through closing the valves of the two electromagnetic valves 13, the external pipeline can be removed, the photoresist in a stable state is temporarily stored in the temporary storage pipe 4, the granularity of the photoresist can be tested through the light scattering granularity meter 2 and the test pipe 3, and the granularity test is completed.
Through setting up the cooperation between fixed pipe 12 and temporary storage pipe 4 and the outside pipeline to the variable internal diameter, through dismantling the temporary storage of photoresist under the steady state through the outside pipeline after pressure balance, and then carry out many times granularity test to the photoresist under the steady state of rest, avoid the influence of the flow of photoresist in the outside pipeline to the measurement process, can eliminate the influence of the flow of photoresist to the test result as far as possible, improve the test accuracy.
As shown in fig. 1 and 2 and fig. 4 and 5, the adjusting component 16 comprises a power tank 161, the power tank 161 is located below the driving gear 19, a main shaft 162 is movably connected to the middle of the inner cavity of the power tank 161, the top end of the main shaft 162 penetrates through the top end of the power tank 161 and is connected with the middle of the bottom end of the driving gear 19 through an electromagnetic clutch, an impeller 163 located inside the power tank 161 is fixedly sleeved on the outer side surface of the main shaft 162, a fixing frame 164 is fixedly connected to the bottom end of the power tank 161, a servo motor 165 is fixedly installed on the top end of the fixing frame 164, the bottom end of the main shaft 162 penetrates through the bottom end of the power tank 161 and is connected with the output end of the servo motor 165, one ends, relatively far away, of the two groups of power tanks 161 are fixedly communicated with a transfusion tube 166, one ends relatively close to each other ends of the two groups of power tanks 161 are fixedly communicated with a circulating tube 167, the other ends of the circulating tube 167 are communicated with a cleaning tube 17, and an electromagnetic valve is installed inside the cleaning tube 17 and is used for controlling communication with the temporary storage tube 4.
Embodiment two: when the inside of the temporary storage tube 4 needs to be rinsed, the electromagnetic clutch can be disconnected, the external photoresist pipeline is connected with the left infusion tube 166, photoresist is injected into the left infusion tube 166, at this time, the photoresist can be injected into the cleaning tube 17 through the left infusion tube 166 and the circulating tube 167, meanwhile, after the photoresist is injected into the inside of the temporary storage tube 4, the photoresist flows out through the right adjusting component 16, at this time, the right infusion tube 166 can be communicated with the left infusion tube 166 through the pipeline, circulation is completed, at this time, the photoresist can be positioned between the two adjusting components 16 and the temporary storage tube 4, at this time, the two servo motors 165 can be synchronously started, the left servo motor 165 can be rotated forward, the right servo motor 165 can be rotated reversely, at this time, the left impeller 163 can be rotated forward, the photoresist is led into the inside of the temporary storage tube 4, and the right impeller 163 is rotated reversely to cooperate with gravity to lead out the photoresist and realize circulation, so that the inside of the temporary storage tube 4 is fully rinsed.
The principle is that the convection pump is generally composed of two impellers, namely, a clockwise rotating impeller and a counterclockwise rotating impeller, when the two impellers simultaneously work, a certain centrifugal force effect is generated, photoresist can be conveyed to the temporary storage pipe 4 with higher height by matching with pressure of photoresist input, meanwhile, a certain centrifugal force is generated when the impeller 163 at the output end rotates anticlockwise, photoresist can be led out from the temporary storage pipe 4 by matching with gravity effect, and thus a rinsing cycle is completed.
Through recycling the initiative effect of adjusting part 16 to through the cooperation between temporary storage pipe 4 and the adjusting part 16, two adjusting part 16 realize respectively the leading-in of photoresist and the derivation of photoresist around the injection cooperation of photoresist, and make it accomplish the circulation through outside pipeline, and then realize the abundant washing to temporary storage pipe 4 inside, reduce the use amount of photoresist, avoid traditional device to need use a large amount of photoresist to wash the problem, reduce the quantity of photoresist, reduce test cost.
The application also provides a using method of the photoresist granularity testing device, which comprises the following steps:
s1: before use, the temporary storage tube 4 is required to be ensured to have no larger foreign matters inside, meanwhile, the power supply of the device is connected, the infusion tube 166 positioned at the left side is connected with an external photoresist pipeline, the upright post 5 and the fixing frame 164 are fixed to ensure that the two electromagnetic valves 13 cannot move, and the valves of the two electromagnetic valves 13 are closed, so that the preparation before the test is completed;
s2: when the inside of the temporary storage pipe 4 is rinsed, photoresist can be injected into the infusion pipe 166 by opening an external valve, the left servo motor 165 and the right servo motor 165 are started to rotate positively, the right servo motor 165 rotates reversely, and the electromagnetic clutch is controlled to be disconnected, so that the impeller 163 at the input end can be driven to rotate clockwise and the impeller 163 at the output end can be driven to rotate anticlockwise, and after the injection of a certain amount of photoresist is completed, the infusion pipe 166 at the right end is communicated with the infusion pipe 166 at the left end through a pipeline, so that the circular connection is completed;
s3: at this time, the photoresist can be injected into the cleaning tube 17 through the circulating tube 167 and enter the temporary storage tube 4 to rinse the interior of the temporary storage tube 4 to remove impurities, meanwhile, the clockwise rotating impeller 163 can enable the photoresist to quickly enter the interior of the temporary storage tube 4, the anticlockwise rotating impeller 163 can enable the photoresist to quickly flow out of the temporary storage tube 4, the photoresist circulates in the two adjusting assemblies 16 and the temporary storage tube 4 through the external pipeline, the temporary storage tube 4 is sufficiently rinsed, and the photoresist is discharged after the rinsing is completed;
s4: after the rinsing is completed, the temporary storage pipe 4 is integrated into an external photoresist pipeline by opening valves of the two electromagnetic valves 13 and connecting the temporary storage pipe 4 with the external photoresist pipeline, the electromagnetic valves in the cleaning pipe 17 are synchronously closed to avoid outflow of photoresist, the photoresist enters the temporary storage pipe 4 through the electromagnetic valves 13 and the fixed pipe 12 at the moment, the photoresist is in an agitating state at the moment, the driving gear 19 can be driven to rotate through the main shaft 162 by combining an electromagnetic clutch and starting the servo motor 165, the two driven gears 20 are driven to synchronously rotate, at the moment, the two threaded rods 10 rotate along with the driving gear, and the two movable plates 8 are driven to be relatively close to or far away under the guiding action of the guide blocks 7 and the guide grooves 6;
s5: when two movable plates 8 are relatively close to or far away from each other, two extension rods 14 can be synchronously driven to relatively close to or far away from each other, so that the distance between two baffle plates 15 is adjusted, the inner diameter of a fixed pipe 12 is changed through the distance between the two baffle plates 15, the pressure at two ends of a temporary storage pipe 4 is changed, the pressure between the temporary storage pipe 4 and an external pipeline is kept balanced through the adjustment of the pressure at the two ends, the external photoresist cannot enter the inside of the temporary storage pipe 4 and the photoresist inside the temporary storage pipe 4 cannot flow out through closing the valves of two electromagnetic valves 13, at the moment, the external pipeline can be removed, the photoresist in a stable state is temporarily stored in the temporary storage pipe 4, the photoresist is in a stable state, and the photoresist granularity inside the temporary storage pipe 4 can be tested through a light scattering particle analyzer 2 and a test pipe 3 after the adjustment is completed, so that test data can be obtained.
Although embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the application, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a photoresist granularity testing arrangement, includes frame (1), its characterized in that: the utility model is characterized in that a light scattering particle size meter (2) is arranged above the frame (1), the frame (1) is arranged on the left side and the right side of the light scattering particle size meter (2), the input end of the light scattering particle size meter (2) is fixedly communicated with a test tube (3), the bottom end of the test tube (3) is provided with a temporary storage tube (4), the temporary storage tube (4) is horizontally and transversely arranged and is parallel to the light scattering particle size meter (2), the middle part of the top end of the temporary storage tube (4) is communicated with the test tube (3), the front side and the rear side of the bottom end of the temporary storage tube (4) are fixedly communicated with a cleaning tube (17), the front end and the rear end of the temporary storage tube (4) are fixedly provided with a fixing tube (12), the electromagnetic valves (13) are arranged at the opposite far ends of the two fixed pipes (12), upright posts (5) are arranged at four corners of the light scattering particle analyzer (2), the front end and the rear end of the frame (1) are connected with the top ends of the upright posts (5), every two upright posts (5) are in a group and symmetrically distributed at the left side and the right side of the fixed pipe (12), a bottom plate (18) is fixedly arranged at the bottom end between each group of upright posts (5), an adjusting component (16) is arranged below each bottom plate (18), and one end of each adjusting component (16) is communicated with a cleaning pipe (17);
baffle (15) are movably mounted at the upper end and the lower end of the inner cavity of the fixed pipe (12), extension rods (14) are fixedly mounted at the ends, far away from each other, of the baffle (15), and one ends, far away from the baffle (15), of the extension rods (14) penetrate through the outer side face of the fixed pipe (12) and are fixedly connected with movable plates (8) located at the upper end and the lower end of the fixed pipe (12).
2. The photoresist granularity testing apparatus according to claim 1, wherein: the baffle (15) is displaced from top to bottom relative to the fixed pipe (12), both ends are all fixed mounting in the left and right sides of fly leaf (8) have guide block (7), guide slot (6) have all been seted up to the medial surface of stand (5), activity joint between fly leaf (8) through guide block (7) and guide slot (6).
3. The photoresist granularity testing apparatus according to claim 1, wherein: the left end and the right end of the movable plate (8) are fixedly provided with threaded sleeves (9), the left side and the right side between the two movable plates (8) are movably sleeved with threaded rods (10), the threaded rods (10) are sleeved with middle threads of the threaded sleeves (9), and the middle parts of the threaded rods (10) are fixedly sleeved with limit sleeves (11).
4. A photoresist granularity testing apparatus according to claim 3, wherein: the outer side face of the threaded rod (10) is far away from the thread directions of two ends of the limiting sleeve (11), the thread directions of the thread grooves in the thread sleeve (9) corresponding to the threaded rod are the same, the upper end and the lower end of the upright post (5) are movably connected with the threaded rod (10) through lug plates, and the threaded rod (10) rotates relative to the upright post (5).
5. A photoresist granularity testing apparatus according to claim 3, wherein: the middle part swing joint of bottom plate (18) bottom has driving gear (19), the bottom of threaded rod (10) all swing joint has driven gear (20), two driven gear (20) are located the left and right sides of driving gear (19) and are connected with the meshing between driving gear (19).
6. The photoresist granularity testing apparatus according to claim 5, wherein: the adjusting component (16) comprises a power tank (161), the power tank (161) is located below the driving gear (19), a main shaft (162) is movably connected to the middle of the inner cavity of the power tank (161), and the top end of the main shaft (162) penetrates through the top end of the power tank (161) and is connected with the middle of the bottom end of the driving gear (19) through an electromagnetic clutch.
7. The photoresist granularity testing apparatus according to claim 6, wherein: the outer side of main shaft (162) is fixed to be cup jointed impeller (163) that are located power jar (161) inside, the bottom fixedly connected with mount (164) of power jar (161), the top fixed mounting of mount (164) has servo motor (165), the bottom of main shaft (162) runs through the bottom of power jar (161) and is connected with the output of servo motor (165).
8. The photoresist granularity testing apparatus according to claim 6, wherein: two sets of one end that power jar (161) kept away from relatively all is fixed to be linked together and is had transfer line (166), and two sets of one end that power jar (161) are close to relatively all is fixed to be linked together and is had circulating pipe (167), be linked together between the other end of circulating pipe (167) and the wash pipe (17), the internally mounted of wash pipe (17) has the solenoid valve to be used for controlling with the intercommunication of temporary storage pipe (4).
9. A method of using a photoresist particle size testing apparatus according to any one of claims 1-8, wherein: comprises the following steps:
s1: before use, the inside of the temporary storage pipe (4) is ensured to have no larger foreign matters, the power supply of the device is connected, the infusion pipe (166) positioned at the left side is connected with an external photoresist pipeline, the upright post (5) and the fixing frame (164) are fixed to ensure that the two electromagnetic valves (13) cannot move, and the valves of the two electromagnetic valves (13) are closed, so that the preparation before the test is finished;
s2: when the inside of the temporary storage pipe (4) is rinsed, photoresist can be injected into the inside of the infusion pipe (166) by opening an external valve, the left servo motor (165) and the right servo motor (165) are started to rotate positively, the right servo motor (165) rotates reversely, the electromagnetic clutch is controlled to be disconnected, at the moment, the impeller (163) at the input end can be driven to rotate clockwise, the impeller (163) at the output end can be driven to rotate anticlockwise, and after the injection of a certain amount of photoresist is completed, the infusion pipe (166) at the right end is communicated with the infusion pipe (166) at the left end through a pipeline, so that the circular connection is completed;
s3: at this time, the photoresist can be injected into the cleaning tube (17) through the circulating tube (167) and enter the temporary storage tube (4) and the temporary storage tube (4) is rinsed to remove impurities, meanwhile, the clockwise rotating impeller (163) can enable the photoresist to quickly enter the temporary storage tube (4), the anticlockwise rotating impeller (163) can enable the photoresist to quickly flow out of the temporary storage tube (4), the photoresist circulates in the two adjusting assemblies (16) and the temporary storage tube (4) through an external pipeline, the temporary storage tube (4) is fully rinsed, and the photoresist is discharged after rinsing is completed;
s4: after the rinsing is finished, the temporary storage pipe (4) is integrated into an external photoresist pipeline by opening the valves of the two electromagnetic valves (13) and connecting the temporary storage pipe (4) with the external photoresist pipeline, the electromagnetic valves in the cleaning pipe (17) are synchronously closed to avoid outflow of photoresist, the photoresist enters the temporary storage pipe (4) through the electromagnetic valves (13) and the fixed pipe (12) at the moment, the photoresist is in an agitating state at the moment, the driving gear (19) can be driven to rotate through the main shaft (162) by combining an electromagnetic clutch and starting the servo motor (165), so that the two driven gears (20) are driven to synchronously rotate, at the moment, the two threaded rods (10) are driven to rotate along with the rotation, and the two movable plates (8) are driven to be relatively close to or far away under the guiding action of the guide block (7) and the guide groove (6);
s5: when two fly leaves (8) are relatively close to or keep away from, can drive two extension poles (14) relatively close to or keep away from and then realize the interval adjustment between two baffles (15), the internal diameter of fixed pipe (12) and then change the pressure at temporary storage pipe (4) both ends is changed through the interval between two baffles (15), the pressure between temporary storage pipe (4) and the outside pipeline keeps balanced through the adjustment to both ends pressure, make the inside of unable entering temporary storage pipe (4) of outside photoresist and the inside photoresist of temporary storage pipe (4) unable outflow through the valve of closing two solenoid valves (13), at this moment, can be through demolishing the outside pipeline, make the photoresist under the steady state temporary storage to the inside of temporary storage pipe (4), make the photoresist be in steady state, accessible light scattering particle size meter (2) and test tube (3) test the inside photoresist granularity of temporary storage pipe (4) after accomplishing the adjustment, obtain test data.
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| CN219348274U (en) * | 2023-03-20 | 2023-07-14 | 丹东百特仪器有限公司 | Double-acting sampler for wet-process online laser granularity monitoring system |
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| US20020071119A1 (en) * | 2000-12-08 | 2002-06-13 | Horiba, Ltd. | Particle size distribution measuring apparatus |
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