CN117098412A - Display substrate, manufacturing method thereof and display device - Google Patents

Display substrate, manufacturing method thereof and display device Download PDF

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Publication number
CN117098412A
CN117098412A CN202311139504.7A CN202311139504A CN117098412A CN 117098412 A CN117098412 A CN 117098412A CN 202311139504 A CN202311139504 A CN 202311139504A CN 117098412 A CN117098412 A CN 117098412A
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CN
China
Prior art keywords
sub
substrate
metal layer
pixel
layer
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CN202311139504.7A
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Chinese (zh)
Inventor
梁翠翠
杨超
荣坤
刘斌
鲍建东
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN202311139504.7A priority Critical patent/CN117098412A/en
Publication of CN117098412A publication Critical patent/CN117098412A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals

Abstract

The application discloses a display substrate, a manufacturing method thereof and a display device, wherein the display substrate comprises: the array arrangement comprises a plurality of sub-pixels, each sub-pixel comprises a driving circuit layer and a light emitting structure layer, the driving circuit layer comprises a first metal layer and a second metal layer arranged on one side, far away from a substrate, of the first metal layer, reset signal lines of the driving circuit are arranged in the first metal layer, data signal lines are arranged in the second metal layer, the light emitting structure layer comprises a pixel defining layer for defining sub-pixel openings, orthographic projections of the sub-pixel openings on the substrate and orthographic projections of the first metal layer on the substrate form a first overlapped part, and the first overlapped part is approximately symmetrical relative to central axes along the row direction and the column direction of the plurality of sub-pixels. The embodiment of the application avoids the problem of color separation caused by uneven wiring under the sub-pixel openings by dividing the first overlapping portion into axisymmetric patterns along the row direction and the column direction of the plurality of sub-pixels.

Description

Display substrate, manufacturing method thereof and display device
Technical Field
The present application relates to the field of display technologies, and in particular, to a display substrate, a manufacturing method thereof, and a display device.
Background
With advances in consumer electronics technology and changes in consumer trends, the display module portion of mobile phones has gradually transitioned from liquid crystal display module (LCD) display to Organic Light Emitting Diode (OLED) display. OLED products are also in the form of rigid products from the previous years, evolving into today's flexible products. The resolution and the display refresh rate (frame frequency) of OLED products are higher and higher, and the pixel driving structure is more and more complex; the requirements on various properties of the products are becoming higher and higher.
In the existing OLED product, due to the fact that the wiring design below the anode of each sub-pixel is asymmetric, the anode is uneven and inclined, and in a black screen state, the white light irradiates on the surface of a display panel to cause the problem of color separation, so that the display effect is affected.
Disclosure of Invention
In order to solve at least one of the above problems, a first aspect of the present application provides a display substrate comprising:
a plurality of sub-pixels arranged in an array, each sub-pixel comprising a driving circuit layer and a light emitting structure layer which are sequentially stacked on a substrate, the driving circuit layer comprises a first metal layer and a second metal layer which is arranged on one side of the first metal layer far away from the substrate, a reset signal line of the driving circuit is arranged in the first metal layer, a data signal line is arranged in the second metal layer, the light emitting structure layer comprises a pixel defining layer which defines a sub-pixel opening,
the orthographic projection of the sub-pixel opening on the substrate and the orthographic projection of the first metal layer on the substrate constitute a first overlapping portion, which is substantially symmetrical with respect to a central axis along the row direction and the column direction of the plurality of sub-pixels.
In some alternative embodiments, the orthographic projection of the sub-pixel openings of at least a portion of the sub-pixels onto the substrate falls within the orthographic projection of the second metal layer onto the substrate.
In some alternative embodiments, the first overlapping portion of at least some of the sub-pixels comprises a first sub-portion, a second sub-portion, a third sub-portion and a fourth sub-portion arranged separately,
wherein the first and second sub-portions are disposed on one side of a central axis in the column direction, and the third and fourth sub-portions are disposed on the other side of the central axis in the column direction; and is also provided with
The first and third sub-portions are disposed on one side of the central axis in the row direction, and the second and fourth sub-portions are disposed on the other side of the central axis in the row direction.
In some alternative embodiments, at least a portion of the first overlapping portion of the sub-pixels is in the shape of a Chinese character 'Chuan'.
In some alternative embodiments, the orthographic projection of the sub-pixel opening of at least part of the sub-pixels onto the substrate and the orthographic projection of the second metal layer onto the substrate form a second overlap portion,
the second overlapping portions are in an axisymmetric pattern in the row and column directions.
In some alternative embodiments, the second overlapping portion does not overlap the first overlapping portion.
In some alternative embodiments, the second metal layer includes a first pattern portion, an orthographic projection of the first pattern portion on the substrate covers an orthographic projection of the sub-pixel opening on the substrate, and the first pattern portion is disposed in one-to-one correspondence with the sub-pixel opening.
In some alternative embodiments, the second metal layer further includes a second pattern portion, where the second pattern portion is a symmetrical linear pattern and is disposed in one-to-one correspondence with the sub-pixel openings.
In some alternative embodiments, the plurality of first pattern portions are uniformly arranged along a row direction, and the plurality of second pattern portions are uniformly arranged along a row direction, and each row of first pattern portions and each row of second pattern portions are alternately arranged along a column direction.
In some alternative embodiments, wherein the plurality of first pattern portions are uniformly arranged in the column direction, the plurality of second pattern portions are uniformly arranged in the column direction, each column of first pattern portions
Alternating with each column of the second pattern portions along the row direction.
In some alternative embodiments, a blank area is disposed between two adjacent first pattern portions in the column direction, and a blank area is disposed between two adjacent second pattern portions; and
in the row direction, one blank region is provided between two adjacent first pattern portions, and one blank region is provided between two adjacent second pattern portions.
In some alternative embodiments, the plurality of sub-pixels includes a first sub-pixel, a second sub-pixel, and a third sub-pixel, wherein the sub-pixel openings of the first sub-pixel are disposed in one-to-one correspondence with the first pattern portion, and the sub-pixel openings of the second sub-pixel and the third sub-pixel are disposed in one-to-one correspondence with the second pattern portion.
In some alternative embodiments, the light emitting structure layer further comprises an anode comprising an anode via region, the anode being in direct contact with the first metal layer or the second metal layer through the anode via region,
wherein, the orthographic projection of the anode via region on the substrate and the orthographic projection of the sub-pixel opening on the substrate are not overlapped.
A second aspect of the application is a display device comprising a display substrate as described above.
A third aspect of the present application provides a method for manufacturing the display substrate described above, comprising:
forming a driving circuit layer on the substrate, wherein the driving circuit layer comprises a first metal layer and a second metal layer formed on one side of the first metal layer far away from the substrate;
forming a light emitting structure layer on the driving circuit layer, the light emitting structure layer including a pixel defining layer defining sub-pixel openings,
the front projection of the sub-pixel opening on the substrate and the front projection of the first metal layer on the substrate form a first overlapped part, and the first overlapped part is approximately symmetrical relative to the central axis along the row direction and the column direction of the plurality of sub-pixels.
The beneficial effects of the application are as follows:
the application aims at the existing problems at present, and establishes a display substrate, a manufacturing method thereof and a display device, and by arranging the overlapped part of the first metal layer provided with the reset signal line and the second metal layer provided with the data signal line in the sub-pixel opening to be approximately symmetrical relative to the central axis along the row direction and the column direction of a plurality of sub-pixels, the wiring symmetry under the anode part corresponding to the sub-pixel opening is improved, the flatness consistency of the anode is improved, the problem of color separation caused by uneven anode is avoided, the display effect of products is improved, and the application prospect is wide.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 illustrates a color separation phenomenon under a line light source in a black screen state of a related art display substrate;
FIG. 2 shows an imaging schematic of the phenomenon shown in FIG. 1;
FIG. 3 shows a next example trace of an anode in the related art;
FIG. 4 illustrates an exemplary trace pattern in a display substrate according to one embodiment of the application;
FIG. 5 shows a schematic cross-sectional view of the display substrate of the embodiment of FIG. 4;
FIG. 6 illustrates an exemplary trace pattern in a display substrate according to another embodiment of the application;
FIG. 7 shows a schematic cross-sectional view of the display substrate of the embodiment of FIG. 6;
fig. 8 to 17 show schematic layouts of layers of a display substrate according to an embodiment of the application.
Detailed Description
In order to more clearly illustrate the present application, the present application will be further described with reference to preferred embodiments and the accompanying drawings. Like parts in the drawings are denoted by the same reference numerals. It is to be understood by persons skilled in the art that the following detailed description is illustrative and not restrictive, and that this application is not limited to the details given herein.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs. The terms "first," "second," and the like, as used herein, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items.
As used herein, "on … …," "formed on … …," and "disposed on … …" can mean that one layer is formed directly on or disposed on another layer, or that one layer is formed indirectly on or disposed on another layer, i.e., there are other layers between the two layers. In this document, unless otherwise indicated, the term "in the same layer" is used to mean that two layers, components, members, elements, or portions may be formed by the same patterning process, and that the two layers, components, members, elements, or portions are generally formed of the same material.
In addition, in the present application, the term "co-layer arrangement" is used to mean that two layers, components, members, elements or portions may be formed by the same manufacturing process (e.g., patterning process, etc.), and the two layers, components, members, elements or portions are generally formed of the same material. For example, the two or more functional layers are arranged in the same layer, meaning that the functional layers arranged in the same layer may be formed using the same material layer and the same manufacturing process, so that the manufacturing process of the display substrate may be simplified.
In the related art, referring to fig. 1, since the anode corresponding to the sub-pixel opening is inclined, if the light source simulating the white light emitted from the light tube irradiates the surface of the display screen in the black screen state, the image of the light tube on the display screen is not perfectly linear, but the image separation occurs on both sides of a linear image, and the separated image is a single color with different colors (different colors represent different gray scales in fig. 1), that is, color separation occurs, which affects the display effect.
Referring to fig. 2, the principle of imaging the lamp tube when the anode surface is inclined is shown. As shown in fig. 2, the light tube emits white light, when the white light is incident on the anode through the color film layer, the white light becomes monochromatic after being reflected by the anode, and the red, green and blue sub-pixels are respectively imaged and are incident on human eyes as separate images, so that the image reflected by the lower mirror surface of the black screen of the display panel to the human eyes has color separation. The inventors have found through studies that the reason for causing the inclination of the anode surface is that the wiring pattern thereunder is asymmetrical, and that the main reason for causing the asymmetry is that the wiring of the metal layer under the anode is asymmetrical at present, which is provided with the reset signal line. For example, an example shown in fig. 3, which shows a wiring design of a metal layer wiring provided with a reset signal line corresponding to a sub-pixel opening region, the wiring being symmetrical along a column-direction central axis in the right-left direction in the figure; the vertical direction is asymmetric, the part of the broken line frame ring is provided with a wiring cut-off area, the anode is inclined, and the color separation in the vertical direction of the display panel is caused by the design.
To solve at least one of the above problems, an embodiment of the present application provides a display substrate including:
a plurality of sub-pixels arranged in an array, each sub-pixel comprising a driving circuit layer and a light emitting structure layer which are sequentially stacked on a substrate, the driving circuit layer comprises a first metal layer and a second metal layer which is arranged on one side of the first metal layer far away from the substrate, a reset signal line of the driving circuit is arranged in the first metal layer, a data signal line is arranged in the second metal layer, the light emitting structure layer comprises a pixel defining layer which defines a sub-pixel opening,
the orthographic projection of the sub-pixel opening on the substrate and the orthographic projection of the first metal layer on the substrate constitute a first overlapping portion, which is substantially symmetrical with respect to a central axis along the row direction and the column direction of the plurality of sub-pixels.
In this embodiment, the overlapping portion of the first metal layer provided with the reset signal line and the second metal layer provided with the data signal line in the sub-pixel opening is arranged in an axisymmetric pattern along the row direction and the column direction, so that symmetry of a wiring structure under an anode portion corresponding to the sub-pixel opening is improved, uniformity of flatness of the anode is improved, color separation caused by uneven anode is avoided, display effect of a product is improved, and the display device has a wide application prospect.
In a specific embodiment, a display substrate includes: a plurality of sub-pixels arranged in an array, each sub-pixel including a driving circuit layer and a light emitting structure layer sequentially stacked on the substrate 100. The driving circuit layer includes a first metal layer and a second metal layer disposed on the first metal layer. The driving circuit layer includes pixel circuits and signal lines and circuit connection lines that supply signals to respective ports in the pixel circuits. Each signal line may include: a reset signal line Vinit, a data signal line Vdata, a power signal line VDD, a low voltage signal line VSS, a row scanning signal line Gate, and the like. The first metal layer is a layer provided with a reset signal line Vinit, and the second metal layer is a layer provided with a data signal line Vdata. The light emitting structure layer includes a pixel defining layer defining a sub-pixel opening.
In particular, the orthographic projection of the sub-pixel opening on the substrate 100 and the orthographic projection of the first metal layer on the substrate 100 constitute a first overlapping portion 103, which is substantially symmetrical with respect to the central axis along the row direction and the column direction of the plurality of sub-pixels.
In the present embodiment, the first overlapping portion being substantially symmetrical with respect to the central axis along the row direction and the column direction of the plurality of sub-pixels may refer to: the first overlapping portion is completely symmetrical with respect to the central axis in the row direction and the column direction; alternatively, the first overlapping portions are not completely symmetrical with respect to the central axis in the row direction and the column direction, are similar in shape but differ somewhat, for example the first overlapping portions are completely symmetrical with respect to the central axis in the column direction, but are similar in shape but differ somewhat in the central axis in the row direction, for example the first overlapping portions are completely symmetrical with respect to the central axis in the row direction, but are similar in shape but differ somewhat in the central axis in the column direction, for example the first overlapping portions are similar in shape but differ somewhat in relation to the central axis in the row direction and the central axis in the column direction is also similar in shape but differ somewhat in shape; still alternatively, one part of the first overlapping portions is completely symmetrical with respect to the central axis of the row and column directions, and the other part of the first overlapping portions is not completely symmetrical with respect to the central axis of the row and column directions, and the shape is similar but there are some differences, and the manner of incomplete symmetry is similar to that described above, and is not repeated here.
In the present application, the row direction of the sub-pixels arranged in an array in the display substrate is the extending direction of the row scanning lines for providing the row scanning signals, and the column direction is the extending direction of the data signal lines. In addition, when it is not necessary to distinguish between different structures, a first overlapping portion is denoted by 103, and a second overlapping portion is denoted by 107 hereinafter.
Top and cross-sectional views of the first and second metal layers are shown in fig. 4 and 6. In fig. 4 and 6, the row direction is the X direction, and the column direction is the Y direction.
In this example, the plurality of sub-pixels arranged in an array may include: a first subpixel emitting the first color light, a second subpixel emitting the second color light, and a third subpixel emitting the third color light.
Specifically, fig. 4 and 5 show structural diagrams of the first sub-pixel, in which structural diagrams of one or more sub-pixels are shown, and this example is described taking the G pixel as an example. Referring to fig. 4, the first overlapping portion 103-1 of the first sub-pixel includes a first sub-portion, a second sub-portion, a third sub-portion, and a fourth sub-portion that are separately provided. Wherein the first and second sub-portions are disposed at one side of the central axis AA 'in the column direction, and the third and fourth sub-portions are disposed at the other side of the central axis AA' in the column direction; and the first and third sub-portions are disposed on one side of the central axis BB 'in the row direction, and the second and fourth sub-portions are disposed on the other side of the central axis BB' in the row direction. The central axis AA 'represents the symmetry axis of the orthographic projection of the sub-pixel slit KK1 on the substrate 100 in the column direction, and the central axis BB' represents the symmetry axis of the orthographic projection of the sub-pixel slit KK2 on the substrate 100 in the row direction.
Through the above arrangement, the first overlapping portion 103-1 formed by the orthographic projection of the first metal layer below the light emitting structure layer on the substrate 100 and the orthographic projection of the sub-pixel slit KK1 on the substrate 100, that is, the pattern of the portion corresponding to the sub-pixel slit KK1 in the first metal layer is set to be the symmetrical pattern shown in fig. 4, so that the flatness of the anode 111 arranged thereon along the row direction and the column direction is consistent, and the anode 111 is not inclined up, down, left and right, thereby avoiding the occurrence of the color separation phenomenon and improving the display effect.
Further preferably, as shown with reference to fig. 4 and 5, the orthographic projection of the sub-pixel slit KK1 of at least part of the sub-pixels on the substrate 100 falls within the orthographic projection of the second metal layer on the substrate 100. That is, the second metal layer is a complete layer corresponding to the region 107-1 of the subpixel opening KK1, so that the second metal layer is completely flat on the basis that the pattern of the subpixel opening KK1 is symmetrically designed by the first metal layer, so as to ensure that the anode 111 disposed thereon is consistent in flatness along the row direction and the column direction, thereby avoiding occurrence of color separation phenomenon and improving display effect.
In view of the fact that if holes are punched below the anode, the flatness of the punched area will be different with respect to other portions, it is preferable that the light emitting structure layer of the first sub-pixel further includes an anode 111, the anode 111 includes an anode via area CK1, and the anode 111 is in direct contact with the first metal layer through the anode via area CK, wherein the orthographic projection of the anode via area CK on the substrate 100 and the orthographic projection of the sub-pixel slit KK1 on the substrate do not overlap. Those skilled in the art will understand that the anode via region CK will directly contact the first metal layer through vias penetrating the first metal layer, and these vias are disposed in other dielectric layers between the first metal layer and the anode 111, which will not be described herein.
It should be noted that, in the embodiment of the present application, the anode via region CK is not limited to be directly contacted with the first metal layer, and the anode via region may be directly contacted with the second metal layer as required. That is, the anode is in direct contact with the second metal layer through a via penetrating to the second metal layer.
With this arrangement, it is ensured that the anode via region CK does not affect the uniformity of the flatness of the anode portion corresponding to the sub-pixel slit KK1, avoiding the occurrence of a color separation phenomenon.
On the other hand, fig. 6 and 7 show structural diagrams of the second sub-pixel and the third sub-pixel, in which structural diagrams of one or more sub-pixels are shown, and this example is described taking BR pixels as an example. The first metal layer is a layer provided with a reset signal line Vinit, and the second metal layer is a layer provided with a data signal line Vdata. The light emitting structure layer includes a pixel defining layer 113 defining a sub-pixel slit KK2.
Specifically, referring to fig. 6, an orthographic projection of the sub-pixel slit KK2 on the substrate 100 and an orthographic projection of the first metal layer 103-2 on the substrate 100 constitute a first overlapped portion 103-2. The first overlapping portion 103-2 is in the shape of a Chinese character 'Chuan'.
Further specifically, referring to fig. 6, the first overlapping portion 103-2 includes three sub-portions separately provided, wherein the first sub-portion 103-21 is located on a central axis CC' in the column direction, the sub-portion includes an extension extending in the column direction and two end portions (shown in dashed boxes), the two end portions including a widened portion having a width larger than that of the extension; the second sub-portion 103-22 and the third sub-portion 103-23 are located on both sides of the center trace, respectively, and each of the second sub-portion 103-22 and the third sub-portion 103-23 includes an extension portion extending in the column direction and a bent portion (shown in a broken line frame) at both ends. The extending portions are symmetrical with respect to the central axes in the row and column directions, the end portions are symmetrical with respect to the central axes in the row and column directions, and the bent portions are substantially symmetrical with respect to the central axes in the row and column directions.
It should be noted that the central axis CC' represents a symmetry axis of the orthographic projection of the sub-pixel slit KK2 on the substrate 100 in the column direction, and the central axis (not shown) in the row direction represents a symmetry axis of the orthographic projection of the sub-pixel slit KK2 on the substrate 100 in the row direction. In addition, although not shown in the drawings, the first sub-portion 103-21, the second sub-portion 103-22, and the third sub-portion 103-23 constitute a first overlapping portion 103-2.
By the arrangement, the first overlapping portion 103-2 formed by the orthographic projection of the first metal layer 103-2 below the light emitting structure layer on the substrate 100 and the orthographic projection of the sub-pixel slit KK2 on the substrate 100, that is, the pattern of the portion corresponding to the sub-pixel slit KK2 in the first metal layer 103-2 is set to be the substantially symmetrical pattern shown in fig. 6, so that the uniformity of flatness of the anode 111 arranged thereon is improved, the anode is not inclined up, down, left and right, the occurrence of color separation phenomenon is avoided, and the display effect is improved.
Further preferably, referring to fig. 6, the orthographic projection of the sub-pixel slit KK2 of the second sub-pixel and the third sub-pixel on the substrate 100 and the orthographic projection of the second metal layer on the substrate 100 constitute a second overlapped part 107-2, and the second overlapped part 107-2 is an axisymmetric pattern in the row direction and the column direction. With this arrangement, it is ensured that the second overlapping portion 107-2 of the second metal layer and the subpixel opening KK2 does not affect the uniformity of the flatness of the anode.
Preferably, as shown with reference to fig. 6 and 7, the second overlapping portion 107-2 does not overlap the first overlapping portion 103-2. In other words, the first overlapping portion 103-2 and the second overlapping portion 107-2 constitute complementary designs, so that complementary supports are formed on the anode by the arrangement optimization of the traces by utilizing the symmetrical characteristic of the patterns, and the flatness of the anode on the anode is ensured to be more uniform as a whole. Referring to fig. 6, the second overlap portion 107-2 may be in particular a stripe shape extending in the column direction along an orthographic projection of the subpixel opening KK2 on the substrate 100.
In view of the fact that if holes are punched below the anode, the flatness of the punched portions will be different with respect to other portions, it is preferable that the light emitting structure layers of the second sub-pixel and the third sub-pixel further include an anode 111, the anode 111 includes an anode via region CK1, and the anode 111 is in direct contact with the first metal layer 103-1 through the anode via region CK, wherein the orthographic projection of the anode via region CK on the substrate 100 and the orthographic projection of the sub-pixel opening KK1 on the substrate do not overlap. Those skilled in the art will understand that the anode via region CK will directly contact the first metal layer through a via penetrating to the first metal layer, and will not be described herein.
In the embodiment of the present application, the anode via region CK is not limited to be in direct contact with the first metal layer 103-1, but may be in direct contact with the second metal layer as required. That is, the anode is in direct contact with the second metal layer through a via penetrating to the second metal layer.
With this arrangement, it is ensured that the anode via region CK does not affect the flatness of the portion of the anode 111 corresponding to the sub-pixel slit KK1, avoiding the occurrence of the color separation phenomenon.
To further understand the second metal layer and the wiring structure of the second metal layer in this example, the overall layout is further described below.
The second metal layer includes a first pattern portion, where the front projection of the first pattern portion on the substrate covers the front projection of the sub-pixel opening on the substrate 100, and the first pattern portion is disposed in one-to-one correspondence with the sub-pixel opening. That is, the orthographic projection of the second metal layer corresponding to the first pattern portion on the substrate 100 covers the orthographic projection of the sub-pixel opening corresponding thereto on the substrate 100. The power signal line may be disposed on the second metal layer, and its orthographic projection on the substrate 100 at least partially overlaps the first pattern portion. That is, in some embodiments, the second pattern portion is a power signal line.
Optionally, the second metal layer further includes a second pattern portion, where the second pattern portion is a symmetrical linear pattern and is disposed in one-to-one correspondence with the sub-pixel openings. The data signal line is disposed on the second metal layer, and its orthographic projection on the substrate 100 is at least partially overlapped with the first pattern portion. That is, in some embodiments, at least a portion of the symmetrical thin line pattern is a data signal line.
Alternatively, the plurality of first pattern portions are uniformly arranged along the row direction, and the plurality of second pattern portions are uniformly arranged along the row direction, and each row of first pattern portions and each row of second pattern portions are alternately arranged along the column direction.
Alternatively, the plurality of first pattern portions are uniformly arranged in the column direction, and the plurality of second pattern portions are uniformly arranged in the column direction, with each column of first pattern portions alternating with each column of second pattern portions in the row direction.
Specifically, in the column direction, a blank area is provided between two adjacent first pattern portions, and a blank area is provided between two adjacent second pattern portions; and a blank area is arranged between two adjacent first pattern parts in the row direction, and a blank area is arranged between two adjacent second pattern parts.
It will be appreciated by those skilled in the art that preferably the overall layout of the first metal layer corresponds to the layout of the second metal layer. That is, the first pattern portion of the second metal layer corresponds to the first metal layer pattern shown in fig. 4, and the second pattern portion of the second metal layer corresponds to the first metal layer pattern in fig. 6, so as to ensure that the anode flatness of the sub-pixel opening area is maintained uniform.
In addition, the above example has been described with respect to the display substrate in which the sub-pixels are in a combination of red, blue, and green, but the specific combination of the sub-pixels is not intended to be limiting. The embodiments of the present application are applicable to display substrates of various sub-pixel combination modes, as long as the display substrate mechanism that emits light by driving the corresponding sub-pixels with the circuits in the driving circuit layer is satisfied.
In addition, it should be noted that, although the routing structures of the first sub-pixel are shown in fig. 4 and 5 and the routing structures of the second sub-pixel and the third sub-pixel are shown in fig. 6 and 7 in the above example, the present application is not limited thereto. In other words, the routing structure of at least one of the second sub-pixel and the third sub-pixel may also be as shown in fig. 4 and 5; the pixel routing structure of at least one corresponding position in the two first sub-pixels may also be as shown in fig. 6 and 7; the routing structures of all the sub-pixels can be the structures shown in fig. 4 and 5, or the structures shown in fig. 6 and 7; the wiring structure in the display substrate can be matched arbitrarily according to the requirement. In addition, when the combination of the sub-pixels in the array substrate is not limited to the specific combination of the first sub-pixel, the second sub-pixel, and the third sub-pixel in the above example, the design of the routing structure is the same, and the description thereof is omitted here.
Corresponding to the display substrate, the embodiment of the application also provides a method for manufacturing the display substrate, which comprises the following steps:
forming the driving circuit layer on the substrate, wherein the driving circuit layer comprises the first metal layer and the second metal layer which is formed on one side of the first metal layer far away from the substrate;
forming a light emitting structure layer on the driving circuit layer, the light emitting structure layer including the pixel defining layer defining the sub-pixel opening,
wherein an orthographic projection of the sub-pixel opening on the substrate and an orthographic projection of the first metal layer on the substrate constitute a first overlapping portion that is substantially symmetrical with respect to a central axis along a row direction and a column direction of the plurality of sub-pixels.
In this embodiment, overlapping portions of the first metal layer provided with the reset signal line and the second metal layer provided with the data signal line in the sub-pixel openings are formed into axisymmetric patterns along the row direction and the column direction, so that a routing structure under an anode portion corresponding to the sub-pixel openings is symmetric, flatness of the anode is improved, a color separation problem caused by uneven anode is avoided, a product display effect is improved, and a wide application prospect is provided.
The manufacturing method according to the embodiment of the present application will be described below with reference to the layout shown in fig. 8 to 17, taking the structure of the display substrate as an example for manufacturing the above-described example. In this example, the first subpixel above is a G pixel, the second subpixel is a B pixel, and the third subpixel is an R pixel, and for ease of understanding, the following description is given in terms of G and BR pixels. In addition, in the example in the layout, the number of the first sub-pixels in each group of the first sub-pixels, the second sub-pixels, and the third sub-pixels is 2, but the embodiment of the present application is not limited thereto.
Specifically, referring to fig. 8, a polysilicon layer 101 is formed on a provided base substrate. The polysilicon layer 101 is used to fabricate the active region of the thin film transistor in the pixel circuit, and as can be seen in fig. 8, the layout of the polysilicon layer 101 is periodically arranged in an array according to the arrangement of the sub-pixels. The doping type can be N-type doping or P-type doping, the N-type doping material can be arsenic (As), phosphorus (P) and the like, and the P-type doping material can be aluminum (Al), indium (In) and the like; the specific doping type of the active layer 104 depends on the arrangement of the pixel circuit, and the present application is not limited.
Referring to fig. 9, a first Gate layer (Gate 1) 102 is formed on a polysilicon layer 101, and at least part of the Gate of the thin film transistor is formed in the first Gate layer 102.
Referring to fig. 10, a second Gate layer (Gate 2) 104 is formed on the first Gate layer 102, and a row scan signal line and a Gate of a metal oxide transistor may be disposed in the second Gate layer 104. Of course, although not shown, at least one dielectric insulating layer is included between the first gate layer 102 and the second gate layer 104.
Referring to fig. 11, a metal oxide layer 106, for example, indium Gallium Zinc Oxide (IGZO), is formed on the second gate layer 104, and the metal oxide layer 106 serves as a channel of a metal oxide thin film transistor in the pixel circuit.
Referring to fig. 12, a third Gate layer (Gate 3) 108 is formed on the second Gate layer 104. As shown in fig. 12, the orthographic projection of the trace of the portion of the third gate layer 108 on the substrate substantially coincides with the orthographic projection of the trace of the second gate layer 104 on the substrate, because the third gate layer 108 can be used as a gate of a metal oxide transistor, a connection line for a row scan signal line, a connection line for a reset electrode, or the like. By providing a plurality of metal wiring layers, wiring density can be improved.
Referring to fig. 13, a landing hole is formed, wherein the hole connected to the third gate layer 108 or the oxide thin film transistor is EBB hole 110-2, and the other connection hole is ILD hole 110-1.
Next, referring to fig. 14, a first metal layer is formed. Wherein the front projection of the sub-pixel opening of the G pixel onto the substrate and the front projection of the first metal layer onto the substrate constitute a first overlap portion 103-1 and the front projection of the sub-pixel opening of one of the BR pixels onto the substrate and the front projection of the first metal layer onto the substrate constitute a first overlap portion 103-2 are shown in dashed boxes.
It can be seen that the first overlapping portion 103-1 comprises a first sub-portion, a second sub-portion, a third sub-portion and a fourth sub-portion, which are separately arranged. Wherein the first and second sub-portions are disposed on one side of a central axis in the column direction, and the third and fourth sub-portions are disposed on the other side of the central axis in the column direction; and the first and third sub-portions are disposed on one side of the central axis in the row direction, and the second and fourth sub-portions are disposed on the other side of the central axis in the row direction.
The first overlapping portion 103-2 is in the shape of a Chinese character 'Chuan'. The first overlapping portion 103-2 includes three sub-portions separately provided, wherein the first sub-portion is located on a central axis in the column direction, the sub-portion includes an extension portion extending in the column direction and two end portions having a width larger than that of the extension portion; the second sub-portion and the third sub-portion are respectively located at both sides of the central wiring, and each of the second sub-portion and the third sub-portion includes an extension portion extending in the column direction and a bent portion located at both ends. The extending portions are symmetrical with respect to the central axes in the row and column directions, the end portions are symmetrical with respect to the central axes in the row and column directions, and the bent portions are substantially symmetrical with respect to the central axes in the row and column directions.
Referring to fig. 15, a second metal layer is formed. Wherein the second overlap portion 107-1 of the front projection of the sub-pixel opening of the G pixel on the substrate and the front projection of the second metal layer on the substrate and the second overlap portion 107-2 of the front projection of the sub-pixel opening of one of the BR pixels on the substrate and the front projection of the second metal layer on the substrate are shown in dashed boxes.
It can be seen that the second overlapping portion 107-1 is an overall pattern, and the second overlapping portion 107-2 does not overlap the first overlapping portion 103-2, forming a complementary design.
Referring to fig. 16, an anode 111 is formed on the second metal layer. The anodes are also arranged in an array corresponding to the arrangement of the sub-pixels, and the sizes of the anodes are different because the sizes of the sub-pixel openings of the respective colors are different.
Through the arrangement, the symmetry of the structural arrangement of the first overlapping part and the second overlapping part is utilized, the uniformity of the flatness of the signal wiring below the anode region corresponding to the pixel opening is improved, and the problem of color separation is avoided.
Next, referring to fig. 17, a pixel defining layer 113 is formed over the anode 111 to define pixel openings KK1 and KK2.
Thereafter, the light emitting layer, cathode, TFE layer, and color film layer (COE) may also continue to be formed. The light-emitting layer of the application can be a light-emitting material layer which emits different lights according to different emergent lights of different sub-pixels, or a light-emitting material layer which emits light of a single color, and when the light of the single color is emitted, the light of different colors can be correspondingly emitted through the color film layer. Of course, for the luminescent material layer emitting different colors of light, the color film layer can be arranged above the luminescent material layer to filter the light of each color to improve the saturation.
The TFE layer is additionally composed of an inorganic encapsulation layer and an organic encapsulation layer, typically the inorganic encapsulation layer comprises a first inorganic encapsulation layer and a second inorganic encapsulation layer, such as: alumina (Al) 2 O 3 ) Titanium oxide (Ti) x O y ) Tantalum oxide (Ta) 2 O 5 ) Hafnium oxide (HfO) 2 ) Zinc oxide (ZnO) x It may be ZnO or ZnO 2 ) One or more inorganic materials of silicon oxide, silicon nitride and silicon oxynitride. The first inorganic encapsulation layer and the second inorganic encapsulation layer may have a single-layer or multi-layer structure including the materials described above. The organic encapsulation layer may comprise a polymer-based material. The polymer-based material may include acryl-based resin, epoxy-based resin, polyimide, and polyethylene. The TFE layer is mainly used for packaging, prevents water vapor from entering, and prevents particles from damaging the OLED device.
Based on the same inventive concept, the embodiment of the application also provides a display device, which comprises the display substrate provided by the embodiment of the application. The principle of the display device for solving the problems is similar to that of the display substrate, so that the implementation of the display device can be referred to the implementation of the display substrate, and the repetition is omitted herein.
In the implementation, the display device may be any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like. Other essential components of the display device will be understood by those skilled in the art, and are not described herein in detail, nor should they be considered as limiting the application.
The application aims at the existing problems at present, and establishes a display substrate, a manufacturing method thereof and a display device, and by arranging the overlapped part of the first metal layer provided with the reset signal line and the second metal layer provided with the data signal line in the sub-pixel opening to be approximately symmetrical relative to the central axis along the row direction and the column direction of a plurality of sub-pixels, the symmetry of a wiring structure under an anode part corresponding to the sub-pixel opening is improved, the uniformity of the flatness of the anode is improved, the problem of color separation caused by uneven anode is avoided, the display effect of a product is improved, and the application prospect is wide.
It should be understood that the foregoing examples of the present application are provided merely for clearly illustrating the present application and are not intended to limit the embodiments of the present application, and that various other changes and modifications may be made therein by one skilled in the art without departing from the spirit and scope of the present application as defined by the appended claims.

Claims (15)

1. A display substrate, comprising:
a plurality of sub-pixels arranged in an array, each sub-pixel comprises a driving circuit layer and a light emitting structure layer which are sequentially stacked on a substrate, the driving circuit layer comprises a first metal layer and a second metal layer which is arranged on one side of the first metal layer far away from the substrate, a reset signal line of the driving circuit is arranged in the first metal layer, a data signal line is arranged in the second metal layer, the light emitting structure layer comprises a pixel defining layer which defines a sub-pixel opening,
the orthographic projection of the sub-pixel opening on the substrate and the orthographic projection of the first metal layer on the substrate constitute a first overlapping portion that is substantially symmetrical with respect to a central axis along the row direction and the column direction of the plurality of sub-pixels.
2. The display substrate of claim 1, wherein an orthographic projection of a subpixel opening of at least a portion of the subpixels onto the substrate falls within an orthographic projection of the second metal layer onto the substrate.
3. The display substrate of claim 2, wherein the first overlapping portion of the at least some sub-pixels comprises a first sub-portion, a second sub-portion, a third sub-portion, and a fourth sub-portion that are separately disposed,
wherein the first and second sub-portions are disposed on one side of a central axis in the column direction, and the third and fourth sub-portions are disposed on the other side of the central axis in the column direction; and is also provided with
The first and third sub-portions are disposed on one side of a central axis in the row direction, and the second and fourth sub-portions are disposed on the other side of the central axis in the row direction.
4. The display substrate of claim 1, wherein the first overlapping portion of at least some of the sub-pixels is in a channel shape.
5. The display substrate of claim 4, wherein an orthographic projection of the subpixel openings of the at least some subpixels onto the substrate and an orthographic projection of the second metal layer onto the substrate form a second overlapping portion,
the second overlapping portion is an axisymmetric pattern along the row direction and the column direction.
6. The display substrate according to claim 5, wherein the second overlapping portion does not overlap with the first overlapping portion.
7. The display substrate according to claim 1, wherein the second metal layer includes a first pattern portion, an orthographic projection of the first pattern portion on the substrate covers an orthographic projection of the sub-pixel opening on the substrate, and the first pattern portion is disposed in one-to-one correspondence with the sub-pixel opening.
8. The display substrate according to claim 1 or 7, wherein the second metal layer further comprises second pattern portions, the second pattern portions being symmetrically linear patterns and being disposed in one-to-one correspondence with sub-pixel openings.
9. The display substrate of claim 8, wherein,
the first pattern portions are uniformly arranged along the row direction, the second pattern portions are uniformly arranged along the row direction, and each row of the first pattern portions and each row of the second pattern portions are alternately arranged along the column direction.
10. The display substrate of claim 9, wherein,
the first pattern portions are uniformly arranged along the column direction, the second pattern portions are uniformly arranged along the column direction, and each column of the first pattern portions and each column of the second pattern portions are alternately arranged along the row direction.
11. The display substrate of claim 8, wherein,
a blank area is arranged between two adjacent first pattern parts in the column direction, and a blank area is arranged between two adjacent second pattern parts; and
in the row direction, one of the blank areas is arranged between two adjacent first pattern portions, and one of the blank areas is arranged between two adjacent second pattern portions.
12. The display substrate according to claim 8, wherein the plurality of sub-pixels includes a first sub-pixel, a second sub-pixel, and a third sub-pixel, the sub-pixel openings of the first sub-pixel are disposed in one-to-one correspondence with the first pattern portion, and the sub-pixel openings of the second sub-pixel and the third sub-pixel are disposed in one-to-one correspondence with the second pattern portion.
13. The display substrate of claim 1, wherein the light emitting structure layer further comprises an anode comprising an anode via region through which the anode is in direct contact with the first metal layer or the second metal layer,
wherein, the orthographic projection of the anode via region on the substrate is not overlapped with the orthographic projection of the sub-pixel opening on the substrate.
14. A display device comprising the display substrate of any one of claims 1-13.
15. A method of manufacturing the display substrate according to any one of claims 1 to 13, comprising:
forming the driving circuit layer on the substrate, wherein the driving circuit layer comprises the first metal layer and the second metal layer which is formed on one side of the first metal layer far away from the substrate;
forming a light emitting structure layer on the driving circuit layer, the light emitting structure layer including the pixel defining layer defining the sub-pixel opening,
wherein an orthographic projection of the sub-pixel opening on the substrate and an orthographic projection of the first metal layer on the substrate constitute a first overlapping portion that is substantially symmetrical with respect to a central axis along a row direction and a column direction of the plurality of sub-pixels.
CN202311139504.7A 2023-09-05 2023-09-05 Display substrate, manufacturing method thereof and display device Pending CN117098412A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311139504.7A CN117098412A (en) 2023-09-05 2023-09-05 Display substrate, manufacturing method thereof and display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311139504.7A CN117098412A (en) 2023-09-05 2023-09-05 Display substrate, manufacturing method thereof and display device

Publications (1)

Publication Number Publication Date
CN117098412A true CN117098412A (en) 2023-11-21

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