CN117092063A - Gas concentration measuring device and gas concentration measuring method - Google Patents
Gas concentration measuring device and gas concentration measuring method Download PDFInfo
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- CN117092063A CN117092063A CN202210519980.0A CN202210519980A CN117092063A CN 117092063 A CN117092063 A CN 117092063A CN 202210519980 A CN202210519980 A CN 202210519980A CN 117092063 A CN117092063 A CN 117092063A
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- 238000000034 method Methods 0.000 title claims description 27
- 239000007789 gas Substances 0.000 claims abstract description 303
- 239000011261 inert gas Substances 0.000 claims abstract description 35
- 238000005259 measurement Methods 0.000 claims abstract description 24
- 238000000691 measurement method Methods 0.000 claims abstract description 12
- 239000011521 glass Substances 0.000 claims description 90
- 230000031700 light absorption Effects 0.000 claims description 30
- 230000003287 optical effect Effects 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 48
- 229910052786 argon Inorganic materials 0.000 description 24
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 24
- 239000001301 oxygen Substances 0.000 description 24
- 229910052760 oxygen Inorganic materials 0.000 description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 238000001514 detection method Methods 0.000 description 11
- 229910052743 krypton Inorganic materials 0.000 description 9
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- 238000001914 filtration Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/391—Intracavity sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/392—Measuring reradiation, e.g. fluorescence, backscatter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
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- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Spectroscopy & Molecular Physics (AREA)
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Abstract
The invention relates to the field of gas concentration measurement, and discloses a gas concentration measurement device and a gas concentration measurement method. The gas concentration measuring device comprises a laser emitting assembly, a detector and a sealed container. The laser emission assembly is used for emitting laser beams. The detector is used for receiving the laser beam reflected by the hollow transparent structure. The sealed container is filled with inert gas, and the laser emission component and the detector are both accommodated in the sealed container. In the gas concentration measuring device, the laser beam emitted by the laser emitting component is reflected by the hollow transparent structure and is received by the detector, so that the laser emitting component and the detector can be positioned on the same side of the hollow transparent structure, thereby the gas concentration measuring device occupies less field during operation and has strong field adaptability.
Description
Technical Field
The present invention relates to the field of gas concentration measurement, and in particular, to a gas concentration measurement apparatus and a gas concentration measurement method.
Background
Common methods of measuring gas concentration are classified as either contact or non-contact. The contact type sensor comprises a semiconductor type, a catalytic combustion type and an electrochemical type, and is characterized in that gas is required to be in contact with a sensor to react, so that the concentration of the gas is measured. The non-contact method is mainly based on the laser measurement technology and comprises methods such as NDIR (non-dispersive infrared), TDLAS (tuned semiconductor absorption spectrum), CRD (optical cavity attenuation) and the like.
In order to achieve a specific purpose, a gas is often filled into a hollow transparent structure, for example, in a chemical reaction or a semiconductor process, and in order to make the chemical reaction or the semiconductor process not affected by other gases, it is necessary to place the chemical reaction or the semiconductor process in a closed hollow transparent structure and fill an inert gas. For example, in order to obtain a good heat and sound insulating effect, two or more pieces of glass are uniformly spaced and sealed by bonding the periphery, and argon gas or krypton gas is filled between the glass layers.
In order to obtain or maintain a good effect, it is necessary to measure the concentration of the gas in these hollow transparent structures so that the gas in the hollow transparent structures reaches or maintains a preset concentration.
Chinese patent publication No. CN 207379786U discloses a device for detecting argon content in hollow glass, which is to insert a needle into the hollow glass, extract and sample gas in the hollow glass, and analyze the gas sample to obtain the concentration of the gas. The disadvantage of this method is that it can cause damage to the hermetic seal of the hollow glass, which can adversely affect the hermetic seal and integrity of the hollow glass.
Therefore, the current device for measuring the concentration of the gas in the hollow transparent structure is inconvenient to use and cannot meet the use requirement.
Disclosure of Invention
In view of the above, the embodiments of the present invention provide a device and a method for measuring gas concentration, so as to solve the technical problem of inconvenient measurement of the gas concentration in the hollow transparent structure.
The technical scheme adopted by the embodiment of the invention for solving the technical problems is as follows: there is provided a gas concentration measuring apparatus for measuring a concentration of a gas in a hollow transparent structure, the gas concentration measuring apparatus comprising:
a laser emitting assembly for emitting a laser beam;
a detector for receiving the laser beam reflected by the hollow transparent structure; and
and the sealed container is filled with inert gas, and the laser emission component and the detector are both accommodated in the sealed container.
In some embodiments, the laser emitting assembly includes a laser and a laser angle adjustment device;
the laser is used for emitting the laser beam;
the laser angle adjusting device is used for adjusting the angle of the laser beam emitted by the laser.
In some embodiments, the laser angle adjusting device comprises a driving device, the laser is mounted on the driving device, and the driving device is used for driving the laser to rotate so as to adjust the angle of the laser beam emitted by the laser.
In some embodiments, the laser angle adjustment device includes a drive device and a light reflecting element mounted to the drive device;
the light reflecting element is used for reflecting the laser beam emitted by the laser to the hollow transparent structure;
the driving device is used for driving the light reflecting element to rotate so as to adjust the angle of incidence of the laser beam on the hollow transparent structure.
In some embodiments, the laser angle adjustment device further comprises a filter element located within the sealed container and in the optical path of the laser beam reflected by the hollow transparent structure, the filter element further located in the optical path of the laser beam incident on the hollow transparent structure;
the filter element is mounted to a side wall of the sealed container.
The technical problems of the embodiment of the invention are solved by adopting the following technical scheme: there is provided a gas concentration measurement method for measuring a concentration of a gas in a hollow transparent structure, the gas concentration measurement method comprising:
providing a laser emission assembly, a detector and a sealed container, wherein the sealed container is filled with inert gas, and the laser emission assembly and the detector are both accommodated in the sealed container;
The laser emission component emits a laser beam, and the laser beam is incident on the hollow transparent structure;
the detector receives the laser beam reflected by the hollow transparent structure;
and calculating the concentration of the gas in the hollow transparent structure according to the laser beam received by the detector.
In some embodiments, the fill gas in the hollow transparent structure is an inert gas;
the calculating the concentration of the gas in the hollow transparent structure according to the laser beam received by the detector comprises the following steps:
calculating the concentration of the light absorbing gas in the hollow transparent structure according to the laser beam received by the detector;
and calculating the concentration of the inert gas in the hollow transparent structure according to the concentration of the light absorbing gas.
In some embodiments, the hollow transparent structure comprises a first glass layer, a second glass layer and a third glass layer, wherein a first gas-filled layer is formed between the first glass layer and the second glass layer, and a second gas-filled layer is formed between the second glass layer and the third glass layer;
the laser emission component emits a laser beam, the laser beam being incident on the hollow transparent structure, comprising:
The laser emission component emits a first laser beam, the first laser beam is incident to the hollow transparent structure at a first incident angle, and the first laser beam passes through the first glass layer and the first inflation layer and is incident to the second glass layer;
the laser emission component emits a second laser beam, the second laser beam is incident to the hollow transparent structure at a second incident angle, and the second laser beam passes through the first glass layer, the first gas-filled layer, the second glass layer and the second gas-filled layer and is incident to the third glass layer;
the detector receives the laser beam reflected by the hollow transparent structure, comprising:
the detector receives the first laser beam reflected by the second glass layer;
the detector receives the second laser beam reflected by the third glass layer;
calculating the concentration of the gas within the hollow transparent structure from the laser beam received by the detector, comprising:
calculating the concentration of the gas of the first gas-filled layer according to the first laser beam received by the detector;
and calculating the concentration of the gas of the second gas filled layer according to the concentration of the gas of the second laser beam and the first gas filled layer received by the detector.
In some embodiments, the calculating the concentration of the gas of the second gas-filled layer from the concentration of the gas of the second laser beam and the first gas-filled layer received by the detector includes:
calculating the total light absorption intensity of the gas in the first gas filled layer and the gas in the second gas filled layer according to the second laser beam received by the detector;
calculating to obtain the sum of the gas concentrations according to the total light absorption intensity;
and subtracting the concentration of the gas of the first gas-filled layer from the sum of the gas concentrations to obtain the concentration of the gas of the second gas-filled layer.
In some embodiments, the fill gas in the first inflation layer and the fill gas in the second inflation layer are both inert gases;
said calculating the concentration of gas in said first charge layer from said first laser beam received by said detector, comprising:
calculating the concentration of the light absorption gas of the first inflation layer according to the first laser beam received by the detector;
according to the concentration of the light absorption gas of the first inflation layer, the concentration of the inert gas of the first inflation layer is calculated;
the calculating the concentration of the gas of the second gas-filled layer according to the concentration of the gas of the second laser beam and the first gas-filled layer received by the detector comprises:
According to the second laser beam received by the detector, calculating the total light absorption intensity of the light absorption gas of the first air charging layer and the light absorption gas of the second air charging layer;
calculating to obtain the sum of the gas concentrations according to the total light absorption intensity;
and subtracting the concentration of the inert gas of the first gas-filled layer from the sum of the gas concentrations to obtain the concentration of the inert gas of the second gas-filled layer.
Compared with the prior art, in the gas concentration measuring device and method provided by the embodiment of the invention, the laser beam emitted by the laser emitting component is reflected by the hollow transparent structure and is received by the detector, so that the laser emitting component and the detector can be positioned on the same side of the hollow transparent structure, and therefore, the gas concentration measuring device and method provided by the embodiment of the invention occupy less space and have strong field adaptability. In addition, the sealed container is filled with inert gas, the laser emission component and the detector are both accommodated in the sealed container, after the laser beam exits, the laser beam propagates in the sealed container, so that the interference of other gases on the laser beam can be reduced, and the measurement accuracy is improved.
Drawings
One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which the figures of the drawings are not to be taken in a limiting sense, unless otherwise indicated.
FIG. 1 is a schematic diagram of a gas concentration measuring device according to an embodiment of the present invention, wherein a laser beam emitted from the gas concentration measuring device is incident on a hollow transparent structure at a first incident angle;
FIG. 2 is a schematic diagram of the structure of a laser, collimating lens, light reflecting element, and driving element of a gas concentration measuring device according to some embodiments of the present invention;
FIG. 3 is a schematic view of a laser, collimating lens, and driving element of a gas concentration measuring device according to other embodiments of the present invention;
FIG. 4 is a flow chart of a method for measuring gas concentration according to one embodiment of the present invention;
FIG. 5 is a schematic structural view of the gas concentration measuring device shown in FIG. 1, in which a laser beam emitted from the gas concentration measuring device is incident on the hollow transparent structure at a second incident angle;
FIG. 6 is a schematic view of a laser incident hollow transparent structure, wherein the hollow transparent structure is shown only in part;
FIG. 7 is another schematic view of a laser incident hollow transparent structure, wherein the hollow transparent structure is shown only in part;
fig. 8 is a schematic diagram of measuring the gas concentration in the hollow transparent structure using the first laser beam and the second laser beam, respectively, in embodiment 1 of the present invention;
Fig. 9 is a schematic diagram of measuring the gas concentration in the hollow transparent structure using the first laser beam and the second laser beam, respectively, in embodiment 2 of the present invention.
Detailed Description
In order that the invention may be readily understood, a more particular description thereof will be rendered by reference to specific embodiments that are illustrated in the appended drawings. It will be understood that when an element is referred to as being "connected" to another element, it can be directly on the other element or one or more intervening elements may be present therebetween. The terms "upper," "lower," "left," "right," "upper," "lower," "top," and "bottom," and the like, as used herein, refer to an orientation or positional relationship based on that shown in the drawings, merely for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
The embodiment of the invention is based on a laser measurement technology, and the concentration of the gas in the hollow transparent structure can be measured by penetrating the hollow transparent structure through the laser beam without directly contacting the gas.
Referring to fig. 1, an embodiment of the present invention provides a gas concentration measuring apparatus 100 for measuring the concentration of a gas in a hollow transparent structure 200. The gas concentration measuring device 100 includes a laser emitting assembly 10, a detector 20, and a sealed container 30. The laser emitting assembly 10 is for emitting a laser beam. The detector 20 is for receiving the laser beam reflected by the hollow transparent structure 200. The sealed container 30 is filled with an inert gas, and the laser emitting assembly 10 and the detector 20 are housed in the sealed container 30.
The hollow transparent structure 200 includes a first transparent layer 210 and a second transparent layer 220, a first air-filled layer is disposed between the first transparent layer 210 and the second transparent layer 220, and the first air-filled layer is a closed space filled with gas.
The laser beam is incident on the surface of the first transparent layer 210 at a predetermined angle, then refracted through the first transparent layer 210, enters the first air-filled layer, is reflected through the second transparent layer 220, and then passes through the first air-filled layer and the first transparent layer 210 to be received by the detector 20. In this process, the laser beam interacts with the gas in the first gas-filled layer, that is, the gas-absorbing portion of the laser beam in the first gas-filled layer, and the detector 20 receives the laser beam absorbed by the gas in the first gas-filled layer, and the concentration of the gas in the first gas-filled layer can be calculated by using the relationship between the gas concentration and the absorption intensity by the NDIR or TDLAS method.
In the gas concentration measuring apparatus 100 according to the embodiment of the present invention, the laser beam emitted by the laser emitting assembly 10 is reflected by the hollow transparent structure 200 and received by the detector 20, so that the laser emitting assembly 10 and the detector 20 can be located on the same side of the hollow transparent structure 200, thereby making the gas concentration measuring apparatus 100 according to the embodiment of the present invention occupy less space when operated, and having a strong adaptability to the space, for example, for a building in which the hollow transparent structure 200 is installed, the gas concentration measuring apparatus 100 according to the embodiment of the present invention can measure the gas concentration in the hollow transparent structure 200 only inside the building without performing an overhead operation outside the building.
In addition, the sealed container 30 is filled with an inert gas, and the laser emission unit 10 and the detector 20 are both accommodated in the sealed container 30, and when the gas concentration measuring device 100 is used, the sealed container 30 contacts the first transparent layer 210, and after the laser beam exits, the laser beam propagates in the sealed container 30, then enters the hollow transparent structure 200, is reflected by the hollow transparent structure 200, propagates in the sealed container 30, and finally is received by the detector 20. In the whole propagation process of the laser beam, other gases such as oxygen do not interfere with the laser beam, and only the gas in the first inflation layer interacts with the laser beam, so that the measurement accuracy is improved.
In the present embodiment, the laser emitting assembly 10 includes a laser 110 for emitting a laser beam and a laser angle adjusting device 120 for adjusting an angle of the laser beam emitted by the laser 110.
The laser angle adjusting device 120 includes a driving device 122 and a light reflecting element 124, and the light reflecting element 124 is mounted on the driving device 120. The light reflecting element 124 is used to reflect the laser beam emitted by the laser 110 to the hollow transparent structure 200. The driving device 122 is used for driving the light reflecting element 124 to rotate so as to adjust the angle of incidence of the laser beam on the hollow transparent structure 200.
In this embodiment, the laser emitting assembly 10 further includes a collimating lens 130, the collimating lens 130 is located between the laser 110 and the light reflecting element 124, and the collimating lens 130 is used for collimating the laser beam emitted from the laser 110.
The number of the light reflecting elements 124 is two, one light reflecting element 124 is not mounted on the driving device 122, the light reflecting element 124 is used for reflecting the laser beam emitted by the laser 110 to the other light reflecting element 124, and the other light reflecting element 124 is mounted on the driving device 122 and is used for being driven by the driving device 122 to rotate so as to adjust the incident angle of the laser beam to the hollow transparent structure 200.
It should be understood that, in some embodiments, the number and installation positions of the light reflecting elements 124 may be adjusted according to practical needs, for example, referring to fig. 2, the number of the light reflecting elements 124 is one, the one light reflecting element 124 is mounted on the driving device 122, the one light reflecting element 124 is used for reflecting the laser beam emitted by the laser 110 to the hollow transparent structure 200, and the one light reflecting element 124 is further used for being driven by the driving device 122 to rotate so as to adjust the incident angle of the laser beam incident on the hollow transparent structure 200.
It can be understood that, in some embodiments, referring to fig. 3, the light reflecting element 124 is omitted, the laser angle adjusting device 120 includes a driving device 122, the laser 110 is mounted on the driving device 122, and the driving device 122 is used for driving the laser 110 to rotate so as to adjust the incident angle of the laser beam emitted from the laser 110 to the hollow transparent structure 200.
In this embodiment, the first transparent layer 210 and the second transparent layer 220 may be transparent glass layers or transparent plastic layers.
Due to the different internal structures of various molecules of substances, the selective absorption of the substances to light rays with different wavelengths is determined, namely, the substances can only absorb light with certain wavelengths. The absorption relationship of a substance to light of a certain wavelength obeys the Lambert-Beer (Lambert 2 Beer) law of absorption. Therefore, the wavelength of the laser beam should be adjusted according to the gas in the hollow transparent structure 200, and the laser beam should be absorbed by the gas in the hollow transparent structure 200 while being not easily absorbed by the inert gas in the sealed container 30.
For example, in the present embodiment, the hollow transparent structure 200 is hollow glass, the first transparent layer 210 is a first glass layer, the second transparent layer 220 is a second glass layer, the filling gas is argon or krypton, and the inert gas in the sealed container 30 is nitrogen. Argon, krypton and nitrogen all belong to inert gases, and NDIR or TDLAS is adopted, so that the light source is limited, and no absorption spectrum line exists, so that direct detection is inconvenient. The gas concentration measuring apparatus 100 of the present invention thus employs an indirect detection method, specifically, a decrease in the argon or krypton content in the hollow glass, meaning that air is entering, resulting in an increase in the air content. Since the ratio of argon or krypton gas that has been charged into the hollow glass is known, the factory requirements are generally 80% or more, and not a very high ratio, such as: 99%, the original argon or krypton ratio is also less accurate, so the measurement accuracy need not be as high. The air is composed of 78% of nitrogen and 21% of oxygen, and the escape rate of argon or krypton can be calculated by detecting the concentration of oxygen in the air, so that the severity of air leakage can be judged. The concentration of argon or krypton is indirectly calculated by detecting oxygen, and the laser is easy to obtain and can realize better detection precision. Thus, the wavelength of the laser beam may range from 760nm to 1269nm, preferably 760nm,763nm or 1269nm. Similarly, the detector 20 may be selected based on the wavelength of the laser beam. The embodiment of the invention adopts an indirect detection method to test the hollow glass, and is simple and easy to operate and low in cost.
It will be appreciated that in some embodiments, if the hollow transparent structure 200 is filled with a gas that readily absorbs the laser beam, the concentration of the gas may be calculated directly from the absorption intensity of the gas.
In some embodiments, the driving device 112 includes a servo motor for driving the light reflecting element 124 or the laser 110 such that the laser beam is incident on the hollow transparent structure 200 at a predetermined incident angle.
Referring back to fig. 1, in the present embodiment, the gas concentration measurement apparatus 100 further includes a filter element 40, the filter element 40 is located in the sealed container 30, and the filter element 40 is located in the optical path of the laser beam reflected by the hollow transparent structure 200.
The filter element 40 filters out light that the detector 20 does not respond to, so as to reduce interference with the detector 20 and improve the measurement accuracy of the detector 20.
The filter element 40 is a narrow band filter element whose center wavelength can be selected according to the wavelength of the laser beam.
It is understood that in some embodiments, the filter element 40 may be located in both the optical path of the laser beam incident on the hollow transparent structure 200 and the optical path of the laser beam reflected by the hollow transparent structure 200. The light of the laser beam incident on the hollow transparent structure 200, which is not responsive to the detector 20, is filtered first, and then the light of the laser beam reflected by the hollow transparent structure 200, which is not responsive to the detector 20, is filtered again, so that the measurement accuracy of the detector 20 can be further improved.
In the present embodiment, the filter element 40 is mounted on the side wall of the sealed container 30, so that the gas concentration measuring device 100 according to the embodiment of the present invention has a simple structure.
In this embodiment, the gas concentration measuring device 100 further includes a diaphragm 50, where the diaphragm 50 is housed in the sealed container 30, and the diaphragm 50 is located in the optical path of the laser beam reflected by the hollow transparent structure 200. The diaphragm 50 only allows light within a preset angle range to enter the detector 20, so that interference caused by other interference light entering the detector 20 is eliminated, and the measurement accuracy of the detector 20 can be improved.
Referring to fig. 4, another embodiment of the present invention further provides a method for measuring a gas concentration, for measuring a hollow transparent structure, the method comprising:
s301, providing a laser emission component, a detector and a sealed container, wherein the sealed container is filled with inert gas, and the laser emission component and the detector are both accommodated in the sealed container.
Referring to fig. 1, specifically, a gas concentration measuring apparatus 100 of the above embodiment is provided, where the gas concentration measuring apparatus 100 includes a laser emitting assembly 10, a detector 20, and a sealed container 30, the sealed container 30 is filled with an inert gas, and the laser emitting assembly 10 and the detector 20 are both accommodated in the sealed container 30.
In some embodiments, the inert gas is nitrogen.
S302, the laser emission component emits a laser beam, and the laser beam is incident to the hollow transparent structure.
The laser 110 emits a laser beam, the laser beam is collimated by the collimating lens 130 and then enters the light reflecting element 124, the light reflecting element 124 reflects the laser beam to the filtering element 40, and the filtering element 40 filters out the light which is not responded by the detector 20. The light reflecting element 124 mounted on the driving device 122 is driven to rotate, so as to adjust the laser beam to be incident on the hollow transparent structure 200 at a preset incident angle.
The center wavelength range of the filter element 40 in this embodiment is selected according to the wavelength of the laser beam emitted from the laser, and in consideration of the process capability and the price factor of the filter element 40, the center wavelength range of the filter element 40 is typically ±5nm of the laser beam emitted wavelength.
S303, a detector receives the laser beam reflected by the hollow transparent structure;
the hollow transparent structure 200 may be hollow glass, a transparent closed container in a semiconductor process, a transparent chemical reaction container in a laboratory, etc. The hollow transparent structure 200 includes a first transparent layer 210 and a second transparent layer 220, a first air-filled layer is disposed between the first transparent layer 210 and the second transparent layer 220, and the first air-filled layer is a closed space filled with gas.
The laser beam passing through the filter element 40 sequentially passes through the first transparent layer 210 and the first gas-filled layer, is reflected by the second transparent layer 220, passes through the first gas-filled layer and the first transparent layer 210 again, and then enters the filter element 40, and the filter element 40 filters out the light that the detector 20 does not respond to again. The laser beam passing through the filter element 40 passes through the diaphragm 50, and the diaphragm 50 excludes light outside a preset angle range to reduce interference of ambient light with the detector 20. The detector 20 receives the laser beam passing through the diaphragm 50.
S304, calculating the concentration of the gas in the hollow transparent structure according to the laser beam received by the detector.
The laser beam passing through the first gas-filled layer is absorbed by the gas in the first gas-filled layer, and the concentration of the gas in the first gas-filled layer can be calculated by using the relation between the gas concentration and the absorption intensity through an NDIR or TDLAS method.
If the gas filled in the first inflatable layer is inert gas, NDIR or TDLAS is adopted, and the light source is limited, so that no absorption spectrum line exists, and direct detection is inconvenient. Therefore, the gas concentration measurement method according to the embodiment of the present invention adopts an indirect detection method, for example, the hollow transparent structure 200 is hollow glass, the first transparent layer 210 is a first glass layer, the second transparent layer 220 is a second glass layer, the gas filled in the first inflation layer is argon, when the argon content in the first inflation layer is reduced, which means that air enters, resulting in an increase in air content, and the content of argon can be calculated by detecting the air concentration. The air is composed of 78% of nitrogen and 21% of oxygen, and the concentration of the argon can be calculated by detecting the concentration of the oxygen.
Thus, in some embodiments, if the filling gas in the hollow transparent structure is an inert gas, the step of calculating the concentration of the gas in the hollow transparent structure according to the laser beam received by the detector specifically includes:
according to the laser beam received by the detector, calculating to obtain the concentration of the light absorption gas in the hollow transparent structure;
and calculating the concentration of the inert gas in the hollow transparent structure according to the concentration of the light absorbing gas.
The filling gas refers to a gas filled into the hollow transparent structure 200 to perform a specific function, for example, when the hollow transparent structure 200 is hollow glass, the filling gas may be argon or krypton to perform a heat-insulating and sound-insulating function of the hollow glass.
The light absorbing gas is a gas capable of absorbing a laser beam, and may be oxygen, carbon monoxide, nitrogen oxide, sulfur dioxide, or the like.
Referring to fig. 1 and 5 together, in some embodiments, the hollow glass 200 further includes a third transparent layer 230, and a second gas filled layer is formed between the second transparent layer 220 and the third transparent layer 230, and the second gas filled layer is filled with a filling gas, such as argon.
In step S302, the laser emitting assembly emits a laser beam, which is incident on the hollow transparent structure, including:
The laser emission component emits a first laser beam, the first laser beam is incident on the hollow transparent structure at a first incident angle, the first laser beam passes through the first glass layer and the first air charging layer and is incident on the second glass layer (see figure 1);
the laser emission component emits a second laser beam, the second laser beam is incident on the hollow transparent structure at a second incident angle, and the second laser beam passes through the first glass layer, the first air-filled layer, the second glass layer and the second air-filled layer and is incident on the third glass layer (see figure 5).
In step S303, the detector receives the laser beam reflected by the hollow transparent structure, including:
the detector receives the first laser beam reflected by the second glass layer (see fig. 1);
the detector receives the second laser beam reflected by the third glass layer (see fig. 5).
In step S304, calculating the concentration of the gas in the hollow transparent structure from the laser beam received by the detector, including:
calculating the concentration of the gas in the first gas-filled layer according to the first laser beam received by the detector;
the concentration of the gas in the second charge layer is calculated from the concentration of the gas in the first charge layer and the second laser beam received by the detector.
Specifically, referring back to fig. 1, the laser 110 emits a first laser beam, the first laser beam is collimated by the collimating lens 130 and then enters the light reflecting element 124, the light reflecting element 124 reflects the first laser beam to the filtering element 40, and the filtering element 40 filters out the light that is not responded to by the detector 20. The first laser beam passing through the filter element 40 is incident on the first transparent layer 210 at a first incident angle, then passes through the first gas filled layer, is reflected by the second transparent layer 220, then passes through the first gas filled layer and the first transparent layer 210 again, and then enters the filter element 40, and the filter element 40 filters out the light that the detector 20 does not respond to again. The first laser beam passing through the filter element 40 passes through the diaphragm 50, and the diaphragm 50 excludes light outside the preset angle range. The detector 20 receives the first laser beam passing through the diaphragm 50.
The concentration of the filling gas in the first gas-filled layer is calculated from the first laser beam received by the detector 20 by using the relation between the gas concentration and the absorption intensity, and for example, the concentration of oxygen is calculated from the first laser beam received by the detector 20 by using hollow glass, and the concentration of argon in the first gas-filled layer is calculated from the concentration of oxygen. It is understood that if the filling gas in the first inflation layer is a light absorbing gas that is easy to absorb the laser beam, the concentration of the filling gas can be directly calculated.
Referring back to fig. 5, the laser 110 emits a second laser beam, the second laser beam is collimated by the collimating lens 130 and then enters the light reflecting element 124, the light reflecting element 124 reflects the second laser beam to the filtering element 40, and the filtering element 40 filters out the light that the detector 20 does not respond to. The driving device 122 drives the light reflecting element 124 mounted on the driving device 122, so that the second laser beam passing through the filter element 40 enters the first transparent layer 210 at a second incident angle, then sequentially passes through the first air-filled layer, the second transparent layer 220 and the second air-filled layer, and then sequentially passes through the second air-filled layer, the second transparent layer 220, the first air-filled layer and the first transparent layer 210 after being reflected by the third transparent layer 230, then enters the filter element 40, and the filter element 40 filters the light which is not responded by the detector 20 again. The second laser beam passing through the filter element 40 passes through the diaphragm 50, and the diaphragm 50 excludes light outside the preset angle range. The detector 20 receives the second laser beam through the aperture 50.
The total light absorption intensity of the gas in the first gas filled layer and the gas in the second gas filled layer is calculated from the second laser beam received by the detector 20, and the total gas concentration is calculated from the total light absorption intensity, and the concentration of the filling gas in the first gas filled layer obtained as described above is subtracted from the total gas concentration to obtain the concentration of the filling gas in the second gas filled layer.
In some embodiments, if the fill gas in the first charge layer and the fill gas in the second charge layer are both inert gases. The calculating the concentration of the gas in the first gas-filled layer according to the first laser beam received by the detector includes:
calculating the concentration of the light absorption gas of the first gas filled layer according to the first laser beam received by the detector;
and calculating the concentration of the inert gas of the first gas-filled layer according to the concentration of the light absorption gas of the first gas-filled layer.
The calculating the concentration of the gas of the second gas filled layer according to the concentration of the gas of the second laser beam and the first gas filled layer received by the detector comprises the following steps:
according to the second laser beam received by the detector, calculating to obtain the total light absorption intensity of the light absorption gas of the first air charging layer and the light absorption gas of the second air charging layer;
Calculating to obtain the sum of the gas concentrations according to the total light absorption intensity;
subtracting the concentration of the inert gas of the first gas-filled layer from the sum of the gas concentrations to obtain the concentration of the inert gas of the second gas-filled layer.
Taking hollow glass as an example, the total light absorption intensity of the oxygen in the first gas-filled layer and the oxygen in the second gas-filled layer is calculated from the second laser beam received by the detector 20, the total gas concentration is calculated from the total light absorption intensity, and the concentration of the argon in the first gas-filled layer is obtained by subtracting the obtained total gas concentration from the obtained total gas concentration.
Because the second laser beam is absorbed by the oxygen in the first air charging layer and the oxygen in the second air charging layer, the total gas concentration of the argon in the first air charging layer and the argon in the second air charging layer can be calculated according to the total light absorption intensity of the oxygen in the first air charging layer and the oxygen in the second air charging layer, and the obtained concentration of the argon in the first air charging layer can be obtained by subtracting the obtained total gas concentration.
In the gas concentration measurement method of the present embodiment, the sealed container 30 is filled with the inert gas, and the laser emitting assembly 10 and the detector 20 are both accommodated in the sealed container 30, so that the interference of oxygen is reduced when the laser beam propagates in the sealed container 30, thereby improving the measurement accuracy of the gas concentration measurement method of the present embodiment. For example, the sealed container 30 may be filled with high purity nitrogen gas to minimize the oxygen content in the sealed container 30.
Further, the sealed container 30 contacts the first transparent layer 210, and the laser beam enters the first transparent layer 210 after exiting from the sealed container 30, so that contact with oxygen in air is reduced, and the measurement accuracy of the gas concentration measurement method of the embodiment can be further improved.
In this embodiment, the predetermined incident angle of the laser beam to the hollow transparent structure 200 is determined by whether total internal reflection occurs in the transparent layer. If total reflection occurs in the transparent layer, no light is refracted to enter the air again, and the subsequent measurement of the gas in the gas filled layer cannot be completed.
Consider that the refractive index of air is n when laser light enters the air from glass a The refractive index of the transparent layer material is n g The angle r at which total internal reflection occurs inside the transparent layer is determined by the following formula as shown in fig. 6:
n g sin r＝n a
for example, in fig. 6, the transparent material is glass, the laser beam is incident on the glass layer 300 from the air, and the refractive index n of the glass g 1.52, air refractive index n a 1.0, the total reflection angle r is 41.14 °. On the basis of this angle, the maximum allowable angle may be 38.4 ° taking into account the deviation of the actual alignment angle with a certain margin (e.g., 3 °).
Consider again the angle of the laser beam from the air entering the glass layer 300:
n g sin r＝n a sin i
Refractive index n of glass g 1.52, air refractive index n a For 1.0, r=38.4 °, i=70.8° can be found, which is the maximum allowed angle of the laser beam to enter the glass layer 300 from the air.
Referring to fig. 7, the laser beam is incident on the glass layer 400 from the air, and the size of an incident spot formed on the glass layer 400 by the laser beam is generally 2.0mm in diameter, and a part of light is reflected from between the glass layer 400 and the air and returns to the air. The incident spot 410 and the reflected spot 420 cannot coincide, otherwise interference occurs, affecting the detection of the optical signal. If the thickness of the glass layer is 5mm, r=11.3° can be found. At this angle i=17.3° can be found, which is the minimum allowed angle of incidence.
In order to realize the detection of the oxygen concentration in the inflation layer, the incidence angle is as large as possible, so that the transmission path of the laser beam in the inflation layer is long and can be fully absorbed by oxygen, and the actual choice of the incidence angle i should be as large as possible.
When detecting the gas concentration in the first inflation layer, if the preset incident angle is smaller than 17.3 °, the laser beam is easy to overlap with the light spot on the second transparent layer 220, so as to form interference of light, which results in unstable measurement result. And too short a travel path of the laser beam in the first gas-filled layer may result in insufficient absorption of the laser beam by the gas in the first gas-filled layer, and thus may affect the accuracy of the detection of the gas in the first gas-filled layer by the detector 20. If the preset incident angle is greater than 70.8 °, the laser beam is easy to totally internally reflect in the first transparent layer 210, so that the laser cannot penetrate through the first transparent layer 210 and enter the second transparent layer 220 and the third transparent layer 230, and the detector 20 cannot acquire reflected signals from the second transparent layer 220 and the third transparent layer 230, so that the measurement of the gas concentration cannot be completed.
Thus, in some embodiments, the predetermined angle of incidence of the laser beam into the hollow transparent structure 200 may range from 17.3 ° to 70.8 °, within which the gas concentration measurement device 100 may enable detection of the gas concentration of the gas-filled layer. In the actual operation process, the incident light angle should be within the range, and factors such as actual assembly are considered, so that the incident angle is selected as large as possible, the interaction between laser and gas is increased, and the detection sensitivity is improved.
The gas concentration measuring device and the method provided by the embodiment of the invention can be also applied to a hollow transparent structure comprising more than 3 transparent layers, and the concentration of the gas in different inflatable layers can be sequentially obtained only by adjusting the incidence angle of the laser beam on the hollow transparent structure, for example, when the transparent layers are four layers and the inflatable layers are three layers, the concentration of the gas in a third inflatable layer is required to be measured, the laser beam can be firstly incident on hollow transparent glass, the laser beam is reflected by the third transparent layer, the reflected laser beam is received by the detector, and the first gas concentration is calculated; then, the laser beam is incident into the hollow transparent glass, the incidence angle of the laser beam is adjusted, the laser beam is reflected by the fourth transparent layer, the detector receives the reflected laser beam, the second gas concentration is calculated, and the concentration of the gas in the third gas filled layer is obtained by subtracting the first gas concentration from the second gas concentration. By analogy, since the path of the laser beam reflected back to the detector through the glass layer is unique, the gas concentration measuring method provided by the embodiment of the invention can be suitable for detecting the internal gas concentration of the hollow gas layer with uncertain number of layers.
In addition, the gas concentration measuring device and the gas concentration measuring method provided by the embodiment of the application can be also suitable for hollow transparent structures with different transparent layer thicknesses and different transparent layer intervals.
The technical scheme and effect of the present application will be described in detail by the following specific examples and comparative examples, which are only some examples of the present application, and are not intended to limit the present application in any way.
Example 1
The embodiment measures the hollow glass with a three-layer structure, the thickness of the three glass layers of the hollow glass is 5mm, the distance between the glass layers is 18mm, and the first inflation layer and the second inflation layer are filled with argon.
The gas concentration measuring apparatus 100 of the above embodiment is provided, and the inside of the sealed container 30 is filled with nitrogen gas so that the sealed container 30 is abutted against the first glass layer.
Referring to fig. 8, the laser 110 emits a first laser beam 1022 with a wavelength of 760nm, the first laser beam 1022 is collimated by the collimating lens 130 and then enters the light reflecting element 124, and the light reflecting element 124 reflects the first laser beam 1022 to the filtering element 40. The first laser beam 1022 passes through the filter element 40, is incident on the first glass layer at an incident angle of 27.5 degrees, sequentially passes through the first glass layer and the first gas-filled layer, is reflected by the second glass layer, passes through the first gas-filled layer and the first glass layer again, and then is incident on the filter element 40. The first laser beam 1022 that has passed through the filter element 40 passes through the aperture 50 and is then received by the detector 20. And calculating the concentration of oxygen in the first gas filled layer, and calculating the concentration of argon in the first gas filled layer according to the concentration of oxygen.
Then, the laser 110 emits a second laser beam 1024 having a wavelength of 760nm again, the second laser beam 1024 is collimated by the collimator lens 130 and then enters the light reflecting element 124, and the light reflecting element 124 reflects the second laser beam 1024 to the filter element 40. The driving device 122 drives the light reflecting element 124 mounted on the driving device 122, so that the second laser beam 1024 passing through the filter element 40 enters the first glass layer at an incident angle of 20 degrees, then sequentially passes through the first gas-filled layer, the second glass layer, the second gas-filled layer, and then sequentially passes through the second gas-filled layer, the second glass layer, the first gas-filled layer, and the first glass layer after being reflected by the third glass layer, and then enters the filter element 40. The second laser beam 1024 passing through the filter element 40 passes through the aperture 50 and is received by the detector 20. The total light absorption intensity of the oxygen in the first gas-filled layer and the oxygen in the second gas-filled layer is calculated from the second laser beam 1024 received by the detector 20, a gas concentration sum is calculated from the total light absorption intensity, and the concentration of the argon in the first gas-filled layer obtained as described above is subtracted from the gas concentration sum to obtain the concentration of the argon in the second gas-filled layer.
In this example, the measured sensitivity value is better than 1%.
Example 2
Referring to fig. 9, the embodiment measures a three-layer hollow glass, which is different from embodiment 1 in that: the thickness of the three glass layers of the hollow glass is 6mm, and the intervals between the glass layers are 12mm. The angle of incidence of the first laser beam 1022 is 30.5 degrees, and the angle of incidence of the second laser beam 1024 is 23.5 degrees.
In this example, the measured sensitivity value is better than 1%.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; combinations of features of the above embodiments or in different embodiments are possible within the idea of the invention, and many other variations of the different aspects of the invention as described above exist, which are not provided in detail for the sake of brevity; while the invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will appreciate that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (10)
1. A gas concentration measuring apparatus for measuring a concentration of a gas in a hollow transparent structure, the gas concentration measuring apparatus comprising:
a laser emitting assembly for emitting a laser beam;
a detector for receiving the laser beam reflected by the hollow transparent structure; and
and the sealed container is filled with inert gas, and the laser emission component and the detector are both accommodated in the sealed container.
2. The gas concentration measurement device of claim 1, wherein the laser emitting assembly comprises a laser and a laser angle adjustment device;
the laser is used for emitting the laser beam;
the laser angle adjusting device is used for adjusting the angle of the laser beam emitted by the laser.
3. The gas concentration measurement device according to claim 2, wherein the laser angle adjustment device comprises a driving device to which the laser is mounted, the driving device being configured to drive the laser to rotate so as to adjust the angle of the laser beam emitted by the laser.
4. The gas concentration measurement device according to claim 2, wherein the laser angle adjustment device includes a driving device and a light reflection element, the light reflection element being mounted to the driving device;
The light reflecting element is used for reflecting the laser beam emitted by the laser to the hollow transparent structure;
the driving device is used for driving the light reflecting element to rotate so as to adjust the angle of incidence of the laser beam on the hollow transparent structure.
5. The gas concentration measurement device according to claim 1, further comprising a filter element, the filter element being located within the sealed container and in an optical path of a laser beam reflected by the hollow transparent structure, the filter element being further located in an optical path of a laser beam incident on the hollow transparent structure;
the filter element is mounted to a side wall of the sealed container.
6. A gas concentration measurement method for measuring a concentration of a gas in a hollow transparent structure, the gas concentration measurement method comprising:
providing a laser emission assembly, a detector and a sealed container, wherein the sealed container is filled with inert gas, and the laser emission assembly and the detector are both accommodated in the sealed container;
the laser emission component emits a laser beam, and the laser beam is incident on the hollow transparent structure;
the detector receives the laser beam reflected by the hollow transparent structure;
And calculating the concentration of the gas in the hollow transparent structure according to the laser beam received by the detector.
7. The gas concentration measurement method according to claim 6, wherein the filling gas in the hollow transparent structure is an inert gas;
the calculating the concentration of the gas in the hollow transparent structure according to the laser beam received by the detector comprises the following steps:
calculating the concentration of the light absorbing gas in the hollow transparent structure according to the laser beam received by the detector;
and calculating the concentration of the inert gas in the hollow transparent structure according to the concentration of the light absorbing gas.
8. The method of measuring gas concentration according to claim 6, wherein the hollow transparent structure comprises a first glass layer, a second glass layer, and a third glass layer, a first gas-filled layer is formed between the first glass layer and the second glass layer, and a second gas-filled layer is formed between the second glass layer and the third glass layer;
the laser emission component emits a laser beam, the laser beam being incident on the hollow transparent structure, comprising:
the laser emission component emits a first laser beam, the first laser beam is incident to the hollow transparent structure at a first incident angle, and the first laser beam passes through the first glass layer and the first inflation layer and is incident to the second glass layer;
The laser emission component emits a second laser beam, the second laser beam is incident to the hollow transparent structure at a second incident angle, and the second laser beam passes through the first glass layer, the first gas-filled layer, the second glass layer and the second gas-filled layer and is incident to the third glass layer;
the detector receives the laser beam reflected by the hollow transparent structure, comprising:
the detector receives the first laser beam reflected by the second glass layer;
the detector receives the second laser beam reflected by the third glass layer;
calculating the concentration of the gas within the hollow transparent structure from the laser beam received by the detector, comprising:
calculating the concentration of the gas of the first gas-filled layer according to the first laser beam received by the detector;
and calculating the concentration of the gas of the second gas filled layer according to the concentration of the gas of the second laser beam and the first gas filled layer received by the detector.
9. The method of claim 8, wherein said calculating the concentration of the gas of the second gas filled layer from the concentrations of the gas of the second laser beam and the first gas filled layer received by the detector comprises:
Calculating the total light absorption intensity of the gas in the first gas filled layer and the gas in the second gas filled layer according to the second laser beam received by the detector;
calculating to obtain the sum of the gas concentrations according to the total light absorption intensity;
and subtracting the concentration of the gas of the first gas-filled layer from the sum of the gas concentrations to obtain the concentration of the gas of the second gas-filled layer.
10. The gas concentration measurement method according to claim 8, wherein the filling gas in the first inflation layer and the filling gas in the second inflation layer are both inert gases;
said calculating the concentration of gas in said first charge layer from said first laser beam received by said detector, comprising:
calculating the concentration of the light absorption gas of the first inflation layer according to the first laser beam received by the detector;
according to the concentration of the light absorption gas of the first inflation layer, the concentration of the inert gas of the first inflation layer is calculated;
the calculating the concentration of the gas of the second gas-filled layer according to the concentration of the gas of the second laser beam and the first gas-filled layer received by the detector comprises:
According to the second laser beam received by the detector, calculating the total light absorption intensity of the light absorption gas of the first air charging layer and the light absorption gas of the second air charging layer;
calculating to obtain the sum of the gas concentrations according to the total light absorption intensity;
and subtracting the concentration of the inert gas of the first gas-filled layer from the sum of the gas concentrations to obtain the concentration of the inert gas of the second gas-filled layer.
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