CN117089910A - Windmill type cathode conductive transmission device and horizontal electroplating equipment - Google Patents

Windmill type cathode conductive transmission device and horizontal electroplating equipment Download PDF

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Publication number
CN117089910A
CN117089910A CN202311069776.4A CN202311069776A CN117089910A CN 117089910 A CN117089910 A CN 117089910A CN 202311069776 A CN202311069776 A CN 202311069776A CN 117089910 A CN117089910 A CN 117089910A
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CN
China
Prior art keywords
insulating
conductive
windmill
rod
cathode conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311069776.4A
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Chinese (zh)
Inventor
张国才
刘培
吴晋
徐苏凡
梁艳超
张路
高志峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Pudate Semiconductor Equipment Co ltd
Shanghai Pudate Equipment Technology Co ltd
Original Assignee
Shanghai Pudate Semiconductor Equipment Co ltd
Shanghai Pudate Equipment Technology Co ltd
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Filing date
Publication date
Application filed by Shanghai Pudate Semiconductor Equipment Co ltd, Shanghai Pudate Equipment Technology Co ltd filed Critical Shanghai Pudate Semiconductor Equipment Co ltd
Priority to CN202311069776.4A priority Critical patent/CN117089910A/en
Publication of CN117089910A publication Critical patent/CN117089910A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/007Current directing devices
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10Electrodes, e.g. composition, counter electrode
    • C25D17/12Shape or form
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors
    • C25D7/123Semiconductors first coated with a seed layer or a conductive layer
    • C25D7/126Semiconductors first coated with a seed layer or a conductive layer for solar cells

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

The invention provides a windmill type cathode conductive transmission device and horizontal electroplating equipment, which can avoid the contact between a rotary cathode conductive rod and electroplating liquid by arranging an insulating rod at the periphery of the rotary cathode conductive rod, and avoid the contact between a conductive wire and the electroplating liquid by arranging an insulating windmill blade connected with the insulating rod, so that only a conductive contact contacted with a solar photovoltaic product to be electroplated is contacted with the electroplating liquid, and the cleaning and/or replacement of the conductive contact can be conveniently realized after the conductive contact is disassembled, thereby improving the utilization rate of the device and reducing the equipment cost; further, the point contact between the conductive contact and the solar photovoltaic product can reduce the influence on the electric field distribution of the cathode and the anode so as to improve the electroplating effect.

Description

Windmill type cathode conductive transmission device and horizontal electroplating equipment
Technical Field
The invention belongs to the field of solar photovoltaics, and relates to a windmill type cathode conductive transmission device and horizontal electroplating equipment.
Background
With the expansion and rapid development of the scale of the photovoltaic industry, competition for solar photovoltaic products in the market is stronger and stronger, so that cost reduction is a problem to be solved by many enterprises.
Taking a solar cell as an example, in the existing solar cell, silver paste is printed on a silicon wafer to prepare a conductive layer, wherein the silver paste occupies more than 25% of the total production cost of the solar cell, so that how to replace the silver paste to reduce the production cost is a key point.
At present, most enterprises adopt an electrolytic copper plating mode to replace silver paste, and an electrolytic plating metallization technology for replacing silver with copper is a subversion technology in the field of photovoltaic cells, wherein the resistivity of copper grid lines is 1.7 mu omega cm, the resistivity of the silver paste is about 5-10 mu omega cm, and the battery conversion efficiency of the electrolytic copper plating technology is 0.3-0.5% higher than that of screen printing silver paste, so that the metallization of battery pieces can be reduced by about five times by using electrolytic copper instead of screen printing silver paste, and the battery conversion rate can be improved.
However, due to the thin and brittle nature of the silicon wafer, a horizontal electroplating method is required in the production process, so that the electroplated surface of the silicon wafer is stained with an electroplating solution, and an electroplating film is formed on the silicon wafer by combining the cathode assembly and the anode assembly. The existing cathode assembly mostly adopts a metal conductive rod as a conductive roller of the cathode assembly, so that copper ions are inevitably deposited on the metal conductive rod, under the action of an electric field, the deposition speeds of copper metal at different positions of the metal conductive rod are different, the surface of the metal conductive rod is uneven, the recycling rate and the service life of the metal conductive rod are reduced, the electroplating quality is affected, and the copper plating cost is increased.
Therefore, it is necessary to provide a windmill type cathode conductive transmission device and a horizontal electroplating device.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a windmill type cathode conductive driving device and a horizontal electroplating apparatus for solving the metal deposition problem of the cathode metal conductive rod in the prior art.
To achieve the above and other related objects, the present invention provides a windmill type cathode conductive driving device comprising:
a rotary cathode conductive rod;
the insulating rod is arranged on the periphery of the rotary cathode conductive rod and coats the rotary cathode conductive rod;
an insulating windmill blade, one end of which is connected with the insulating rod;
the conductive contact is arranged at one end of the insulating windmill blade, which is far away from the insulating rod;
and the conductive wire is arranged in the insulating rod and the insulating windmill blade, one end of the conductive wire is electrically connected with the rotary cathode conductive rod, and the other end of the conductive wire is electrically connected with the conductive contact.
Preferably, the insulating rod comprises an integrally formed PP insulating rod, PVC insulating rod or PTFE insulating rod; or the insulating rod comprises a coating cured epoxy insulating rod.
Preferably, the connection mode of the insulating windmill blade and the insulating rod comprises detachable connection or integrally formed connection.
Preferably, the connection mode of the conductive contact and the insulating windmill blade comprises threaded connection or snap connection.
Preferably, the conductive contacts comprise metallic conductive contacts or fibrous conductive contacts.
Preferably, the topography of the conductive contacts comprises a diverging sphere.
Preferably, N insulating windmill blades are arranged on the radial section of the insulating rod, wherein N is more than or equal to 1 and less than or equal to 6.
Preferably, when 1 < N, N of the insulating wind blades are arranged at equal intervals around the insulating rod.
Preferably, the insulating wind turbine blades are arranged at intervals in an axial direction of the insulating rod.
Preferably, the insulating windmill blades are alternately arranged at intervals along the axial direction of the insulating rod.
Preferably, at least two of the rotating cathode conductive rods are included, and the rotating cathode conductive rods are arranged in parallel.
The invention also provides horizontal electroplating equipment which comprises any windmill type cathode conductive transmission device.
As described above, according to the windmill type cathode conductive transmission device and the horizontal electroplating equipment, the insulating rod is arranged at the periphery of the rotary cathode conductive rod, so that the contact between the rotary cathode conductive rod and electroplating liquid can be avoided, and the insulating windmill blade connected with the insulating rod is arranged, so that the contact between the conductive wire and the electroplating liquid can be avoided, the conductive contact which is only in contact with a solar photovoltaic product to be electroplated is in contact with the electroplating liquid, and cleaning and/or replacement of the conductive contact can be conveniently realized after the conductive contact is disassembled, so that the utilization rate of the device can be improved, and the equipment cost is reduced; further, the point contact between the conductive contact and the solar photovoltaic product can reduce the influence on the electric field distribution of the cathode and the anode so as to improve the electroplating effect.
Drawings
Fig. 1 is a schematic perspective view of a windmill type cathode conductive driving device according to the present invention.
Fig. 2 shows a schematic view of the radial cross-section along A-A' in fig. 1.
Fig. 3 is a schematic side view of another windmill type cathode conductive driving device according to the present invention.
Fig. 4 is a schematic diagram showing the state of the windmill type cathode conductive driving device in the present invention when the solar photovoltaic product is transmitted.
Description of element reference numerals
100. Rotary cathode conductive rod
200. Conductive wire
300. Conductive contact
400. Insulating rod
500. Insulating windmill blade
600. Solar photovoltaic product
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention.
Please refer to fig. 1-3. It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.
Referring to fig. 1 and 2, the present embodiment provides a windmill type cathode conductive transmission device, which includes: the device comprises a rotary cathode conductive rod 100, a conductive wire 200, a conductive contact 300, an insulating rod 400 and an insulating windmill blade 500, wherein the insulating rod 400 is arranged on the periphery of the rotary cathode conductive rod 100 and is used for coating the rotary cathode conductive rod 100, and one end of the insulating windmill blade 500 is connected with the insulating rod 400; the conductive contact 300 is disposed at an end of the insulating windmill blade 500 away from the insulating rod 400; the conductive wire 200 is disposed inside the insulating rod 400 and the insulating windmill blade 500, and one end of the conductive wire 200 is electrically connected to the rotating cathode conductive rod 100, and the other end is electrically connected to the conductive contact 300.
Specifically, the rotary cathode conductive rod 100 is electrically connected to a power source (not shown), and the rotary cathode conductive rod 100, the conductive wire 200 and the conductive contact 300 are in communication with each other to form a circuit, and the conductive contact 300 is used to supply power to the solar photovoltaic product 600 to be electroplated, such as a battery silicon wafer, so that the solar photovoltaic product 600 is electroplated under the action of the windmill cathode conductive transmission device in combination with an electroplating solution (not shown) and an anode assembly (not shown), so that a metal film is formed on the surface of the solar photovoltaic product 600 by electroplating. Wherein the rotation of the rotating cathode conductive rod 100 may drive the rotation of other components connected thereto, so that the solar photovoltaic product 600 may perform the operation in the horizontal direction through the conductive contacts 300, wherein the rotation linear velocity may be 0.5 to 10m/s, such as 0.5m/s, 1m/s, 5m/s, 8m/s, 10m/s, etc., without being excessively limited thereto.
The windmill type cathode conductive transmission device of this embodiment, by disposing the insulating rod 400 at the periphery of the rotating cathode conductive rod 100, can avoid the contact between the rotating cathode conductive rod 100 and the electroplating solution, and by disposing the insulating windmill blade 500 connected with the insulating rod 400, can avoid the contact between the conductive wire 200 and the electroplating solution, so that only the conductive contact 300 contacting the solar photovoltaic product 600 to be electroplated is contacted with the electroplating solution, and cleaning and/or replacement of the conductive contact 300 can be conveniently realized after the conductive contact 300 is disassembled, thereby improving the utilization rate of the device and reducing the equipment cost.
As an example, the insulation rod 400 may include an integrally formed PP insulation rod, PVC insulation rod, or PTFE insulation rod; or the insulating rod 400 comprises a coated cured epoxy insulating rod.
Specifically, the insulating rod 400 is mainly configured to perform an insulating function, so as to avoid plating a metal film on the surface of the rotating cathode conductive rod 100 during electroplating, so that the insulating rod 400 may be made of materials such as PP, PVC, PTFE, and the insulating rod 400 may be manufactured by an integral molding method and then be mounted on the periphery of the rotating cathode conductive rod 100, so as to protect the rotating cathode conductive rod 100, and the mounting method of the rotating cathode conductive rod 100 is not limited herein.
Of course, the insulating rod 400 may be made of epoxy resin or the like, if necessary, so as to be formed on the surface of the rotating cathode conductive rod 100 by coating and curing, so as to achieve good insulation of the rotating cathode conductive rod 100, which is not excessively limited herein.
As an example, the connection manner of the insulating windmill blade 500 and the insulating rod 400 may include a detachable connection or an integrally formed connection.
Specifically, according to needs, the insulating windmill blade 500 and the insulating rod 400 may be separate components, that is, the insulating windmill blade 500 and the insulating rod 400 may be detachably mounted, so that the insulating windmill blade 500 and/or the insulating rod 400 may be replaced conveniently, where the insulating windmill blade 500 is mainly provided to perform an insulating function, and a metal film is prevented from being electroplated on the surface of the conductive wire 200 during electroplating, so that the material of the insulating windmill blade 500 may be the same as that of the insulating rod 400, such as PP, PVC, PTFE, epoxy resin, etc., and the insulating rod 400 may be referred to for the preparation of the insulating windmill blade 500, which is not described herein. When cleaning and/or replacement of the conductive contacts 300 is desired, it may be performed by removing the insulated windmill blade 500 for personnel to operate, such that the conductive contacts 300 are removed along with the insulated windmill blade 500.
The connection manner of the insulating windmill blade 500 and the insulating rod 400 may include, for example, a screw connection or a snap connection, etc., and is not limited thereto.
Of course, the insulating windmill blade 500 and the insulating rod 400 may be formed integrally, that is, the insulating windmill blade 500 and the insulating rod 400 may be regarded as a single integral component, so as to protect the rotating cathode conductive rod 100 and the conductive wire 200. Wherein the conductive contact 300 can be directly removed when cleaning and/or replacement of the conductive contact 300 is required.
As an example, the connection manner of the conductive contact 300 and the insulating windmill blade 500 may include a screw connection or a snap connection, but is not limited thereto, and may be specifically set as required, without being excessively limited thereto.
As an example, the conductive wire 200 may be a conductor having good conductivity, such as a copper wire, a silver-plated carbon fiber, or the like, to electrically connect the rotating cathode conductive rod 100 and the conductive contact 300 through the conductive wire 200, and the size and length of the conductive wire 200 are not excessively limited and may be selected as required.
By way of example, the conductive contacts 300 may include metallic conductive contacts or fiber conductive contacts.
Specifically, the conductive contact 300 may be one or a bundle of metal or conductive fibers with good conductive performance, the conductive contact 300 may well contact with the solar photovoltaic product 600, such as a silicon wafer, and may not scratch the silicon wafer, in this embodiment, it is preferable that the conductive contact 300 is a conductive fiber with good flexibility, such as a carbon fiber, so as to ensure that the solar photovoltaic product 600 is not damaged, and the conductive fiber with flexibility may also fully contact with the solar photovoltaic product 600 to be electroplated, even if a concave surface or a slit exists on the surface of the solar photovoltaic product 600, and good electroplating may also be achieved.
As an example, the topography of the conductive contact 300 may include a diverging sphere.
In particular, the shape of the conductive contact 300 is preferably spherical, so that the solar photovoltaic product 600 located above the conductive contact 300 is operated when the rotating cathode conductive rod 100 rotates, but the shape of the rotating cathode conductive rod 100 is not limited thereto, and may be elliptical, a sector having an arc, or the like, and is not excessively limited thereto.
Further, the conductive contact 300 is preferably in a shape of a diverging sphere, that is, the conductive contact 300 may be regarded as having a plurality of diverging conductive wires, so that sufficient contact between the conductive contact 300 and the solar photovoltaic product 600 is ensured by the diverging spherical conductive contact, and an open circuit caused by the roughness of the surface of the solar photovoltaic product 600 is avoided. Of course, the shape of the conductive contact 300 may be configured in other shapes, such as a diverging oval shape or a diverging fan shape with an arc, etc., as desired, without being limited thereto.
As an example, N number of the insulating wind blades 500 are provided along the radial cross section of the insulating rod 400, where 1N 6.
Specifically, in this embodiment, as shown in fig. 2, 4 insulating windmill blades 500 are disposed on the radial cross section of the insulating rod 400, that is, n=4, and preferably, 4 insulating windmill blades 500 are disposed at equal intervals, so that when the rotating cathode conductive rod 100 rotates 360 ° circumferentially, the solar photovoltaic product 600 may be supported by the conductive contact 300 disposed on the insulating windmill blade 500 instead of the rotating cathode conductive rod, and the solar photovoltaic product 600 is driven to run in the horizontal direction, the value of N is not limited to this, and may also be 3, 5, 6, etc., where, considering that the transmission stability of the solar photovoltaic product 600 and the distribution of the electric field, that is, the greater the N, the higher the transmission stability, but the influence on the electric field distribution, in this embodiment, N is preferably 4, but the value and the distribution of N are not limited to this, and may also be set as required, for example, only 1 insulating windmill blade 500, that is, n=1, and a plurality of conductive rods 100 may be disposed on the radial cross section of the insulating rod 400, and the same cathode conductive rod 100 may be rotated by setting a plurality of rotating cathode conductive rods 100, for example, and the solar photovoltaic product 600 may be stably transmitted in the horizontal direction.
Of course, the rotation angle of the rotating cathode conductive rod 100 is not limited to 360 ° circumferential operation, but may be less than 360 ° rotation, which is not limited herein.
As an example, the insulating windmill blades 500 may be disposed at intervals in the axial direction along the insulating rod 400.
Specifically, 1 insulating wind blade 500 may be disposed in the axial direction of the insulating rod 400, or a plurality of insulating wind blades 500 may be disposed, and preferably a plurality of insulating wind blades 500 are disposed at intervals in the axial direction of the insulating rod 400, so as to realize multi-directional dispersion of the conductive contacts 300.
Further, the insulating windmill blades 500 are preferably arranged alternately in the axial direction of the insulating rod 400.
Specifically, as shown in fig. 3, when the insulating windmill blades 500 are alternately arranged along the axial direction of the insulating rod 400, the stability and the conductive effect of the operation of the solar photovoltaic product 600 can be improved when the solar photovoltaic product 600 is horizontally transferred.
As an example, at least two of the rotating cathode conductive rods 100 are included, and the rotating cathode conductive rods 100 are disposed in parallel.
Specifically, as shown in fig. 4, when two rotating cathode conductive rods 100 are disposed in parallel, the solar photovoltaic product 600 may pass through between the two rotating cathode conductive rods 100, so as to achieve double-sided contact with the solar photovoltaic product 600. The specific number and distribution of the rotating cathode collector bars 100 is not excessively limited herein.
The embodiment also provides a horizontal electroplating device, which includes the above windmill type cathode conductive transmission device, and the structure of the windmill type cathode conductive transmission device is not described herein.
In summary, according to the windmill type cathode conductive transmission device and the horizontal electroplating equipment, the insulating rod is arranged on the periphery of the rotary cathode conductive rod, so that the contact between the rotary cathode conductive rod and electroplating liquid can be avoided, and the insulating windmill blade connected with the insulating rod is arranged, so that the conductive wire can be prevented from being contacted with the electroplating liquid, the conductive contact which is only contacted with a solar photovoltaic product to be electroplated is contacted with the electroplating liquid, and cleaning and/or replacement of the conductive contact can be conveniently realized after the conductive contact is disassembled, so that the utilization rate of the device can be improved, and the equipment cost is reduced; further, the point contact between the conductive contact and the solar photovoltaic product can reduce the influence on the electric field distribution of the cathode and the anode so as to improve the electroplating effect. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.

Claims (12)

1. A windmill cathode conductive transmission, characterized in that it comprises:
a rotary cathode conductive rod;
the insulating rod is arranged on the periphery of the rotary cathode conductive rod and coats the rotary cathode conductive rod;
an insulating windmill blade, one end of which is connected with the insulating rod;
the conductive contact is arranged at one end of the insulating windmill blade, which is far away from the insulating rod;
and the conductive wire is arranged in the insulating rod and the insulating windmill blade, one end of the conductive wire is electrically connected with the rotary cathode conductive rod, and the other end of the conductive wire is electrically connected with the conductive contact.
2. The windmill cathode conductive actuator of claim 1, wherein: the insulating rod comprises an integrally formed PP insulating rod, a PVC insulating rod or a PTFE insulating rod; or the insulating rod comprises a coating cured epoxy insulating rod.
3. The windmill cathode conductive actuator of claim 1, wherein: the connection mode of the insulating windmill blade and the insulating rod comprises detachable connection or integrally formed connection.
4. The windmill cathode conductive actuator of claim 1, wherein: the connection mode of the conductive contact and the insulating windmill blade comprises threaded connection or snap connection.
5. The windmill cathode conductive actuator of claim 1, wherein: the conductive contacts include metallic conductive contacts or fibrous conductive contacts.
6. The windmill cathode conductive actuator of claim 1, wherein: the morphology of the conductive contacts includes diverging spheres.
7. The windmill cathode conductive actuator of claim 1, wherein: n insulating windmill blades are arranged on the radial section of the insulating rod, wherein N is more than or equal to 1 and less than or equal to 6.
8. The windmill cathode conductive actuator of claim 7, wherein: when 1 is less than N, N insulating windmill blades are arranged around the insulating rod at equal intervals.
9. The windmill cathode conductive actuator of claim 1, wherein: the insulating windmill blades are arranged at intervals along the axial direction of the insulating rod.
10. The windmill cathode conductive actuator of claim 1, wherein: the insulating windmill blades are arranged at intervals in the axial direction of the insulating rod in a staggered mode.
11. The windmill cathode conductive actuator of claim 1, wherein: the rotary cathode conductive rod comprises at least two rotary cathode conductive rods, and the rotary cathode conductive rods are arranged in parallel.
12. A horizontal electroplating apparatus, characterized in that: the horizontal electroplating apparatus comprising a windmill type cathode conductive actuator according to any one of claims 1 to 11.
CN202311069776.4A 2023-08-23 2023-08-23 Windmill type cathode conductive transmission device and horizontal electroplating equipment Pending CN117089910A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311069776.4A CN117089910A (en) 2023-08-23 2023-08-23 Windmill type cathode conductive transmission device and horizontal electroplating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311069776.4A CN117089910A (en) 2023-08-23 2023-08-23 Windmill type cathode conductive transmission device and horizontal electroplating equipment

Publications (1)

Publication Number Publication Date
CN117089910A true CN117089910A (en) 2023-11-21

Family

ID=88774905

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311069776.4A Pending CN117089910A (en) 2023-08-23 2023-08-23 Windmill type cathode conductive transmission device and horizontal electroplating equipment

Country Status (1)

Country Link
CN (1) CN117089910A (en)

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