CN117080131B - Graphite boat heat sink for diode based on photovoltaic direct current drive - Google Patents

Graphite boat heat sink for diode based on photovoltaic direct current drive Download PDF

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Publication number
CN117080131B
CN117080131B CN202311339616.7A CN202311339616A CN117080131B CN 117080131 B CN117080131 B CN 117080131B CN 202311339616 A CN202311339616 A CN 202311339616A CN 117080131 B CN117080131 B CN 117080131B
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graphite boat
motor
air pressure
telescopic rod
rod
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CN117080131A (en
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朱江杰
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Changzhou Langjie Electronic Co ltd
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Changzhou Langjie Electronic Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

The invention belongs to the technical field of graphite boat cooling, and particularly relates to a graphite boat cooling device for a diode based on photovoltaic direct current driving, which comprises a photovoltaic driving water pump, a graphite boat and a cooling mechanism, wherein the interiors of the photovoltaic driving water pump and the graphite boat are connected with a liquid inlet pipe and a liquid outlet pipe; the cooling mechanism is arranged in the graphite boat, and a temperature sensor is arranged in the graphite boat; the cooling mechanism comprises a telescopic rod, a motor, a rotating rod, stirring blades and a heat dissipation part, wherein the telescopic rod is fixedly arranged on the right side of the inner wall of the graphite boat, the motor is fixedly arranged on the left side of the telescopic rod, the rotating rod is fixedly connected with the output end of the motor, and the stirring blades are fixedly arranged on the left end of the rotating rod; the device solves the problem that the graphite boat for producing the current diode cannot realize high-efficiency cooling and ensures the production quality of the diode.

Description

Graphite boat heat sink for diode based on photovoltaic direct current drive
Technical Field
The invention belongs to the technical field of graphite boat cooling, and particularly relates to a graphite boat cooling device for a diode based on photovoltaic direct current driving.
Background
When the diode chip is heated in the processing process, the graphite boat is required to be used as a carrier for carrying, the temperature of the graphite boat is still high after the process is finished, the graphite boat is required to be cooled, the existing heat dissipation device for cooling the graphite boat is complex in structure and unsatisfactory in cooling effect, and the intelligent performance is poor in operation, so that the quality of the diode cannot be guaranteed, and the diode is damaged.
Disclosure of Invention
The invention aims to provide a graphite boat cooling device for a diode based on photovoltaic direct current driving so as to solve the problems in the background technology.
In order to solve the technical problems, the invention provides the following technical scheme: the graphite boat cooling device for the diode based on photovoltaic direct current driving comprises a photovoltaic driving water pump, a graphite boat and a cooling mechanism, wherein the photovoltaic driving water pump and the graphite boat are internally connected with a liquid inlet pipe and a liquid outlet pipe;
the cooling mechanism is arranged in the graphite boat, and a temperature sensor is arranged in the graphite boat;
the cooling mechanism comprises a telescopic rod, a motor, a rotating rod, stirring blades and a heat dissipation part.
The invention further discloses that the telescopic rod is fixedly arranged on the right side of the inner wall of the graphite boat, the motor is fixedly arranged on the left side of the telescopic rod, the rotating rod is fixedly connected with the output end of the motor, and the stirring blade is fixedly arranged on the left end of the rotating rod;
the heat dissipation part comprises a pressing rod, an air pressure cavity, an air pressure plate and an air pressure rod.
The invention further discloses that the outer ends of the pressing rod and the air pressure rod are respectively provided with a sphere;
the air pressure cavity is fixedly arranged above the inner wall of the graphite boat, the air pressure plate is connected to the inner wall of the air pressure cavity in a sliding manner, and the air pressure rod is fixedly arranged below the air pressure plate and vertically aligned with the pressing rod;
the air pressure cavity is connected with an external pipeline, a first check valve is arranged in the pipeline, the air pressure plate is connected with a spring above the inner wall of the air pressure cavity, a right pipeline of the air pressure cavity is connected with a pressure cavity, a second check valve is arranged in the pipeline, the pressure cavity is connected with an internal pipeline of the telescopic rod, and a pressure valve is arranged in the pipeline;
the telescopic rod is connected with an external control valve pipeline, and an elastic spring is arranged in the telescopic rod.
The invention further discloses that an intelligent control system is arranged in the photovoltaic driving water pump;
the intelligent control system comprises a temperature monitoring module, a conversion module and an intelligent control module;
the temperature monitoring module is arranged in the temperature sensor and is electrically connected with the conversion module, the conversion module is electrically connected with the intelligent control module, and the intelligent control module is electrically connected with the motor;
the temperature monitoring module is used for monitoring the internal temperature of the graphite boat, the conversion module is used for carrying out intelligent conversion according to the internal temperature of the graphite boat, and the intelligent control module is used for controlling the rotating speed of the motor according to the conversion result.
The invention further describes that the intelligent control system comprises the following operation steps:
s1, operating a photovoltaic driving water pump, and operating an intelligent control system through electric driving;
and S2, the temperature monitoring module senses the internal temperature of the graphite boat through the temperature sensor, calculates through the conversion module, and controls the rotation speed change of the motor through the intelligent control module according to a calculation result.
The present invention further describes that in the step S2:
wherein V is the real-time running speed of the motor, V max C is the maximum rotation speed of the motor, C is the internal temperature of the graphite boat, C max The higher the temperature inside the graphite boat is, the faster the rotation speed of the motor is.
The present invention further describes that in the step S2:
when the motor is operated at a higher speed, the motion frequency of the expansion and contraction of the telescopic rod is higher;
when the motor running speed is slower, the motion frequency of the expansion and contraction of the telescopic rod is lower;
and (3) comprehensively changing the left-right swinging frequency of the stirring blade.
Compared with the prior art, the invention has the following beneficial effects: according to the cooling mechanism adopted by the invention, the motor can stir water, and can move leftwards rapidly when stirring, so that the stirring blade moves leftwards rapidly, water in the graphite boat is rocked, the emission of water vapor is further accelerated, the cooling efficiency is further improved, scale generated on the inner wall of the graphite boat can be collided, a certain cleaning effect is achieved, the external control valve is opened, the elastic spring generates a reaction force to reset the telescopic rod, the stirring She Pinfan can be rocked leftwards and rightwards during the rotation of the motor, and the spherical body is used for improving the smoothness of mutual extrusion separation of the stirring blade and the graphite boat.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic plan view of the present invention;
FIG. 3 is a schematic view of the pipe connection between the pneumatic chamber and the telescopic rod according to the present invention;
FIG. 4 is a schematic flow diagram of the intelligent control system of the present invention;
in the figure: 1. a photovoltaic driving water pump; 2. a graphite boat; 3. a liquid inlet pipe; 4. a liquid discharge pipe; 5. a telescopic rod; 6. a motor; 7. a rotating rod; 8. stirring the leaves; 9. pressing a pressing rod; 10. an air pressure chamber; 11. an air pressure plate; 12. a pneumatic rod; 13. a sphere; 14. a pressure chamber; 15. and a pressure valve.
Detailed Description
The technical scheme of the present invention is further described in non-limiting detail below with reference to the preferred embodiments and the accompanying drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-4, the present invention provides the following technical solutions: the graphite boat cooling device for the diode based on photovoltaic direct current driving comprises a photovoltaic driving water pump 1, a graphite boat 2 and a cooling mechanism, wherein the photovoltaic driving water pump 1 and the graphite boat 2 are internally connected with a liquid inlet pipe 3 and a liquid discharge pipe 4;
the cooling mechanism is arranged in the graphite boat 2, and a temperature sensor is arranged in the graphite boat 2;
the cooling mechanism comprises a telescopic rod 5, a motor 6, a rotating rod 7, stirring blades 8 and a heat dissipation part.
The telescopic rod 5 is fixedly arranged on the right side of the inner wall of the graphite boat 2, the motor 6 is fixedly arranged on the left side of the telescopic rod 5, the rotating rod 7 is fixedly connected with the output end of the motor 6, and the stirring blade 8 is fixedly arranged on the left end of the rotating rod 7;
the heat dissipation part comprises a pressing rod 9, an air pressure cavity 10, an air pressure plate 11 and an air pressure rod 12;
the photovoltaic drive water pump 1 passes through photovoltaic drive operation, in drawing water source rethread feed liquor pipe 3 row into graphite boat 2 from outside, cool off graphite boat 2 inside, the rethread fluid-discharge tube 4 draws graphite boat 2 with water after the cooling finishes, the cooling in-process, motor 6 operation drives bull stick 7 rotation, bull stick 7 drives stirring leaf 8 rotation, stir water for the aqueous vapor distributes away, thereby cooling effect to in the graphite boat 2 is better, the radiating efficiency is improved, accelerate the cooling rate to graphite boat 2.
The outer ends of the pressing rod 9 and the air pressure rod 12 are provided with spheres 13;
the air pressure cavity 10 is fixedly arranged above the inner wall of the graphite boat 2, the air pressure plate 11 is slidably connected to the inner wall of the air pressure cavity 10, and the air pressure rod 12 is fixedly arranged below the air pressure plate 11 and vertically aligned with the pressing rod 9;
the air pressure cavity 10 is connected with an external pipeline, a first check valve is arranged in the pipeline, the air pressure plate 11 is connected with a spring above the inner wall of the air pressure cavity 10, a right pipeline of the air pressure cavity 10 is connected with a pressure cavity 14, a second check valve is arranged in the pipeline, the pressure cavity 14 is connected with an internal pipeline of the telescopic rod 5, and a pressure valve 15 is arranged in the pipeline;
the telescopic rod 5 is connected with an external control valve pipeline, and an elastic spring is arranged in the telescopic rod 5;
in the stirring process of the stirring blade 8, the pressing rod 9 is driven to rotate around the center of the stirring blade, so that the ball 13 at the outer end of the pressing rod contacts with the ball at the outer end of the air pressing rod 12 and extrudes mutually, the air pressing rod 12 is forced to push the air pressing plate 11 to slide upwards along the inner wall of the air pressure cavity 10, the spring is forced to deform, air above the air pressing plate 11 is extruded and then enters the pressure cavity 14 through a pipeline, the check valve II controls the air in the air pressure cavity 10 to enter the pressure cavity 14 in a one-way, then the pressing rod 9 rotates to enable the two balls 13 to be separated from contact, the spring generates a reaction force to enable the air pressing plate 11 to reset, the air is extracted from the outside through the pipeline in the resetting process, the check valve I controls the external air to enter the air pressure cavity 10 in the one-way, the operation is repeated until the gas pressure in the pressure cavity 14 reaches the pressure bearing limit of the pressure valve 15, the pressure valve 15 is opened, the gas is quickly stretched in the telescopic rod 5, the telescopic rod 5 is quickly stretched, the motor 6 is quickly driven to move leftwards, the stirring blade 8 is quickly moved leftwards, water in the graphite boat 2 is rocked, the water vapor emission is further accelerated, the cooling efficiency is further improved, scale produced on the inner wall of the graphite boat 2 can be collided, a certain cleaning effect is achieved, the external control valve is opened, the elastic spring produces a reaction force to reset the telescopic rod 5, the stirring blade 8 can be frequently rocked leftwards and rightwards in the rotation process of the motor 6, and the sphere 13 has the effect of improving the smoothness of mutual extrusion separation of the stirring blade 8 and the stirring blade.
An intelligent control system is arranged in the photovoltaic driving water pump 1;
the intelligent control system comprises a temperature monitoring module, a conversion module and an intelligent control module;
the temperature monitoring module is arranged in the temperature sensor and is electrically connected with the conversion module, the conversion module is electrically connected with the intelligent control module, and the intelligent control module is electrically connected with the motor 6;
the temperature monitoring module is used for monitoring the internal temperature of the graphite boat 2, the conversion module is used for carrying out intelligent conversion according to the internal temperature of the graphite boat 2, and the intelligent control module is used for controlling the rotating speed of the motor 6 according to the conversion result.
The intelligent control system comprises the following operation steps:
s1, operating a photovoltaic driving water pump 1, and operating an intelligent control system through electric driving;
and S2, the temperature monitoring module senses the internal temperature of the graphite boat 2 through a temperature sensor, calculates through a conversion module, and controls the rotation speed change of the motor 6 through an intelligent control module according to a calculation result.
In step S2:
wherein V is the real-time running speed of the motor 6, V max C is the internal temperature of the graphite boat 2 and C is the maximum rotation speed of the motor 6 max For the highest bearing temperature inside the graphite boat 2, the higher the temperature inside the graphite boat 2 is, the faster the rotating speed of the motor 6 is;
the higher the temperature inside the graphite boat 2 is, the higher the rotating speed of the motor 6 is, so that the higher the rotating speed of the stirring blade 8 is, the emission of water vapor can be enhanced, the heat dissipation efficiency is improved, and when the temperature inside the graphite boat 2 is relatively low, the rotating speed of the motor 6 is reduced, the energy consumption is reduced, and the cost is reduced.
In step S2:
when the motor 6 runs at a higher speed, the movement frequency of the expansion and contraction of the telescopic rod 5 is higher;
when the motor 6 runs at a lower speed, the movement frequency of the expansion and contraction of the telescopic rod 5 is lower;
comprehensive, the left-right swing frequency of the stirring blade 8 is changed;
in the stirring process, the stirring is faster, the frequency of shaking water left and right of the stirring blade 8 is higher, so that the water vapor emission is further enhanced, the cleaning effect on the interior of the graphite boat 2 is improved, meanwhile, when the stirring speed is low, the shaking of water is reduced, the structural loss can be reduced, the noise generated in the interior can be reduced, the production environment of the diode is improved, and the operators are protected.
In the description of the present invention, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Finally, it should be pointed out that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting. Although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may be modified or some technical features may be equivalently replaced, and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (5)

1. Graphite boat heat sink for diode based on photovoltaic direct current drive, including photovoltaic drive water pump (1), graphite boat (2) and cooling mechanism, its characterized in that: the photovoltaic driving water pump (1) and the graphite boat (2) are internally connected with a liquid inlet pipe (3) and a liquid outlet pipe (4);
the cooling mechanism is arranged in the graphite boat (2), and a temperature sensor is arranged in the graphite boat (2);
the cooling mechanism comprises a telescopic rod (5), a motor (6), a rotating rod (7), stirring blades (8) and a heat dissipation part, wherein the telescopic rod (5) is fixedly arranged on the right side of the inner wall of the graphite boat (2), the motor (6) is fixedly arranged on the left side of the telescopic rod (5), the rotating rod (7) is fixedly connected with the output end of the motor (6), and the stirring blades (8) are fixedly arranged on the left end of the rotating rod (7);
the heat dissipation part comprises a pressing rod (9), an air pressure cavity (10), an air pressure plate (11) and an air pressure rod (12), wherein the outer ends of the pressing rod (9) and the air pressure rod (12) are respectively provided with a sphere (13);
the air pressure cavity (10) is fixedly arranged above the inner wall of the graphite boat (2), the air pressure plate (11) is connected to the inner wall of the air pressure cavity (10) in a sliding mode, and the air pressure rod (12) is fixedly arranged below the air pressure plate (11) and vertically aligned with the pressing rod (9);
the pneumatic pressure device is characterized in that the pneumatic pressure cavity (10) is connected with an external pipeline, a first check valve is arranged in the pipeline, the pneumatic pressure plate (11) is connected with a spring above the inner wall of the pneumatic pressure cavity (10), a pressure cavity (14) is connected to the right side pipeline of the pneumatic pressure cavity (10), a second check valve is arranged in the pipeline, the pressure cavity (14) is connected with the internal pipeline of the telescopic rod (5), and a pressure valve (15) is arranged in the pipeline;
the telescopic rod (5) is connected with an external control valve pipeline, and an elastic spring is arranged in the telescopic rod (5).
2. The graphite boat cooling device for a diode based on photovoltaic direct current driving according to claim 1, wherein: an intelligent control system is arranged inside the photovoltaic driving water pump (1);
the intelligent control system comprises a temperature monitoring module, a conversion module and an intelligent control module;
the temperature monitoring module is arranged in the temperature sensor and is electrically connected with the conversion module, the conversion module is electrically connected with the intelligent control module, and the intelligent control module is electrically connected with the motor (6);
the temperature monitoring module is used for monitoring the internal temperature of the graphite boat (2), the conversion module is used for carrying out intelligent conversion according to the internal temperature of the graphite boat (2), and the intelligent control module is used for controlling the rotating speed of the motor (6) according to the conversion result.
3. The graphite boat cooling device for a diode based on photovoltaic direct current driving according to claim 2, wherein: the intelligent control system comprises the following operation steps:
s1, a photovoltaic driving water pump (1) operates, and an intelligent control system operates through electric driving;
and S2, the temperature monitoring module senses the internal temperature of the graphite boat (2) through a temperature sensor, calculates through a conversion module, and controls the rotation speed change of the motor (6) through an intelligent control module according to a calculation result.
4. The graphite boat cooling device for a diode based on photovoltaic direct current driving according to claim 3, wherein: in the step S2:
wherein V is the real-time running speed of the motor (6), V max C is the maximum rotation speed of the motor (6), C is the internal temperature of the graphite boat (2), C max The higher the internal temperature of the graphite boat (2) is, the faster the rotating speed of the motor (6) is.
5. The graphite boat cooling device for a diode based on photovoltaic direct current driving according to claim 4, wherein: in the step S2:
when the running speed of the motor (6) is higher, the movement frequency of the expansion and contraction of the telescopic rod (5) is higher;
when the running speed of the motor (6) is slower, the movement frequency of the expansion and contraction of the telescopic rod (5) is lower;
the frequency of the left and right swinging of the stirring blade (8) is changed comprehensively.
CN202311339616.7A 2023-10-17 2023-10-17 Graphite boat heat sink for diode based on photovoltaic direct current drive Active CN117080131B (en)

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CN117080131B true CN117080131B (en) 2024-01-30

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201372969Y (en) * 2009-02-27 2009-12-30 阳江市新力工业有限公司 Cooling system for photovoltaic water pump
CN203274330U (en) * 2013-05-30 2013-11-06 浙江明聚新能源科技有限公司 Solar water heating system of heat collection and circulation through direct drive of photovoltaic direct-current water pump
CN205692823U (en) * 2016-06-13 2016-11-16 深圳市国王科技有限公司 A kind of follow-on controllable silicon water-filled radiator
CN210754129U (en) * 2019-09-04 2020-06-16 运城学院 Energy-concerving and environment-protective chemical industry belt cleaning device
TW202110547A (en) * 2019-09-03 2021-03-16 日商芝浦機械電子裝置股份有限公司 Liquid mist recycling device and substrate processing device for firmly recycling liquid mist while suppressing decrease of exhaust efficiency
CN214065736U (en) * 2020-12-29 2021-08-27 宁夏碳谷能源科技股份有限公司 Continuous graphitizing furnace
CN216115446U (en) * 2021-11-18 2022-03-22 大兴安岭富来森能源科技有限公司 Horizontal ejection of compact cooling device of sllep activation furnace
CN219705860U (en) * 2023-05-22 2023-09-19 苏州首肯机械有限公司 Quick cooling molding plastic envelope press

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201372969Y (en) * 2009-02-27 2009-12-30 阳江市新力工业有限公司 Cooling system for photovoltaic water pump
CN203274330U (en) * 2013-05-30 2013-11-06 浙江明聚新能源科技有限公司 Solar water heating system of heat collection and circulation through direct drive of photovoltaic direct-current water pump
CN205692823U (en) * 2016-06-13 2016-11-16 深圳市国王科技有限公司 A kind of follow-on controllable silicon water-filled radiator
TW202110547A (en) * 2019-09-03 2021-03-16 日商芝浦機械電子裝置股份有限公司 Liquid mist recycling device and substrate processing device for firmly recycling liquid mist while suppressing decrease of exhaust efficiency
CN210754129U (en) * 2019-09-04 2020-06-16 运城学院 Energy-concerving and environment-protective chemical industry belt cleaning device
CN214065736U (en) * 2020-12-29 2021-08-27 宁夏碳谷能源科技股份有限公司 Continuous graphitizing furnace
CN216115446U (en) * 2021-11-18 2022-03-22 大兴安岭富来森能源科技有限公司 Horizontal ejection of compact cooling device of sllep activation furnace
CN219705860U (en) * 2023-05-22 2023-09-19 苏州首肯机械有限公司 Quick cooling molding plastic envelope press

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