CN117074724A - Novel probe type micro-nano operation method based on thermally induced bubbles - Google Patents

Novel probe type micro-nano operation method based on thermally induced bubbles Download PDF

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Publication number
CN117074724A
CN117074724A CN202310101262.6A CN202310101262A CN117074724A CN 117074724 A CN117074724 A CN 117074724A CN 202310101262 A CN202310101262 A CN 202310101262A CN 117074724 A CN117074724 A CN 117074724A
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CN
China
Prior art keywords
probe
objective lens
optical microscope
bubbles
bubble
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Pending
Application number
CN202310101262.6A
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Chinese (zh)
Inventor
王玉亮
国文韬
王福龙
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Beihang University
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Beihang University
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Priority to CN202310101262.6A priority Critical patent/CN117074724A/en
Publication of CN117074724A publication Critical patent/CN117074724A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04Fine scanning or positioning
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/241Devices for focusing
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/248Base structure objective (or ocular) turrets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/26Stages; Adjusting means therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/32Micromanipulators structurally combined with microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements

Abstract

The invention relates to a novel probe type microscopic operation method based on thermally induced bubbles, which is mainly used in the fields of micro-nano technology and biomedical research. The invention utilizes the electrothermal probe at the tail end of the micromanipulator to realize the generation, collapse and size regulation of thermally induced bubbles and the operations of grabbing, moving, positioning, releasing and the like of a target micro object. The invention can realize the operations of grabbing, moving, positioning, releasing and the like of the target micro-object, solves the problems of poor universality, incapability of being used in complex scenes, high requirement on regularity, difficulty in reliable release and the like commonly existing in the prior art, can realize self-adaption and noninvasive nondestructive micro-operation by utilizing the soft characteristic of bubbles, improves the operation dimension and flexibility, and has strong universality and simple structure.

Description

Novel probe type micro-nano operation method based on thermally induced bubbles
Technical Field
The invention relates to a novel probe type micro-operation method based on thermally induced bubbles, in particular to a method for realizing the generation, collapse and size regulation of thermally induced bubbles by utilizing an electrothermal probe at the tail end of a micro-operator, and realizing the operations of grabbing, moving, positioning, releasing and the like of a target micro-object by utilizing the thermally induced bubbles. Is mainly used in the micro-nano technology and biomedical research field.
Background
Along with the development of micro-nano science and biomedical research fields to more microscopic levels, the requirements of people on the observation and operation of research objects in the micrometer or nanometer scale range are becoming stronger, and the requirements on micro-operation technology of micro objects are becoming higher, so that the micro-operation technology becomes a core technology integrating a plurality of different subjects such as mechano-electronics, information technology, life science, physical chemistry and the like. Current micromanipulation methods mainly include two main types, non-contact and contact.
On the one hand, the non-contact micro-operation technology is a technology for controlling the motion of a tiny object by applying various external physical fields such as light, sound, magnetism and the like, such as a photo-pressure effect capturing method based on a photo-potential well, an acoustic radiation method for changing the position or the particle group distribution of single particles, a coil or a magnet for generating magnetic field force to realize the movement or the rotation of the tiny object and the like. The non-contact type micromanipulation technology generally has special requirements on the shape or physical and chemical properties of a target object, and has poor universality; the method using the external potential field as a driving source is difficult to consider the operation precision and efficiency; cannot be used for operations in complex scenarios such as micro-assembly.
On the other hand, the contact micromanipulation technique uses a tangible micromanipulator in direct contact with an operation object, thereby operating a control target with a corresponding macro-micro force. Contact micromanipulation techniques can be divided into two categories, mechanical clamping and mechanical adsorption. The mechanical clamping type micromanipulation technology mainly comprises three modes of thermal driving, field force driving and piezoelectric driving by driving a micro-clamp to grasp, carry and release a tiny object. Due to the influence of the micro-scale effect, the surface micro-force between the clamping end and the micro-object causes difficulty in realizing reliable release of the micro-object; the structure of the gripper is often severely limited by the goal, making the gripper mechanically complex and less versatile. The mechanical adsorption type micro-operation technology realizes the operation of micro objects through the macro-micro adsorption force of an operator, and is mainly divided into a negative pressure adsorption type and a surface micro-adsorption type. The mechanical adsorption type micromanipulation has the common problems that the regularity requirement on the target object is high, and the target object is difficult to release reliably due to the surface adhesion, so that the mechanical adsorption type micromanipulation is not beneficial to wide application.
Based on a thermally induced bubble generation mechanism and in combination with a bubble size regulation technology, the contact type micro-operation of a target micro-object can be realized by using equipment such as a common optical microscope, a precise electric platform, a sample stage, a probe type thermal bubble micro-operator, a camera, a data acquisition card, a driver and the like.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a novel probe type micro-operation method based on thermally induced bubbles, thereby realizing efficient and convenient contact type micro-operation; meanwhile, the flexibility based on bubbles is lossless, noninvasive and controllable, and the problem that an operation object is easy to pick up and difficult to release is solved.
To achieve the above object, the present invention includes: the novel probe type micro-operation method based on thermally induced bubbles is provided, and is characterized in that: the device comprises an optical microscope, a precise electric platform, a sample stage, a probe type hot air bubble micromanipulator, a camera, a computer, a data acquisition card and a driver. The optical microscope is positioned above the precise electric platform; the camera is mounted on the optical microscope; the probe type thermal bubble micromanipulator is positioned above the sample stage and comprises a multi-shaft adjusting stage, an operator supporting structure and a tail end electrothermal probe; the computer, the data acquisition card and the driver are in electrical communication with the probe type thermal bubble micromanipulator.
The optical microscope is a three-mesh front-mounted optical microscope, and in the optical microscope, the bottom end of the optical microscope is fixed on the precise electric platform and is connected through screw fastening; the optical microscope is provided with an objective lens converter, and a low-power objective lens and a high-power objective lens are respectively arranged in the objective lens converter; the magnification of the low-power objective lens is less than or equal to 10 times, and the magnification of the high-power objective lens is more than or equal to 20 times.
The multi-axis adjusting table of the probe type thermal bubble micromanipulator is fixed on the sample table and is fixedly connected through threads; the manipulator support structure is fixed on the multi-axis adjusting table and is fixedly connected through threads; the tail end electrothermal probe is fixed on the manipulator supporting structure and is in clamping connection through a spring piece, the surface and the tip end of the tail end electrothermal probe are distributed with thin metal conducting wires manufactured by MEMS technology, and electrothermal centralized generation can be realized when the tail end electrothermal probe is electrified; the terminal electrothermal probe is immersed in a target container filled with working liquid and target micro-objects; the target container is fixed on the sample table and is in clamping connection through a spring piece.
The precision motorized stage has 2 degrees of freedom and the multi-axis adjustment stage has 3 degrees of freedom.
The novel probe type micromanipulation method based on thermally induced bubbles is characterized by comprising the following steps of:
1. adjusting the objective lens converter to enable the objective lens to be switched to the low-power objective lens, adjusting the precise electric platform to move the optical microscope, enabling the optical microscope field to cover a target micro object, and adjusting the focus of the objective lens to be in a focal plane;
2. the multi-axis adjusting table is adjusted to control the tail end electrothermal probe to move to the vicinity of the target micro object, the computer controls the data acquisition card to generate an excitation signal, current amplification is realized through the driver, and the tail end electrothermal probe is caused to generate bubbles;
3. adjusting the objective lens converter to switch to the high-power objective lens, acquiring a micromanipulation image by the camera, transmitting the micromanipulation image to the computer, displaying the micromanipulation image in real time, simultaneously calculating and feeding back the size of generated bubbles in real time, and correcting an excitation signal;
4. adjusting the multi-axis adjusting table by utilizing the bubbles with stable size to adhere the target micro-object and moving the target micro-object to a required position;
5. and controlling the computer to stop outputting the excitation signal, so that the bubble collapse disappears, and the release of the target micro object is realized.
And the terminal electrothermal probe controls the generation and the size of terminal bubbles, uses the bubbles as tools to adhere and operate the target micro-object, realizes the release of the target micro-object through natural collapse of the bubbles, and observes the operation condition in real time through the camera and the optical microscope.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention adopts the bubble micromanipulator to realize the stable release of the target micro-object by utilizing the characteristic of rapid natural collapse of the bubble micromanipulator, and realizes the self-adaptive nondestructive operation and non-invasive micromanipulation of various operation objects by utilizing the soft characteristic of the bubble micromanipulator;
2. the invention adopts the air bubble as the end effector, does not need complex mechanical design, has strong universality for the operation of different target micro-objects, and improves the operation dimension and flexibility by matching with a multi-axis motion platform;
3. the invention adopts microscopic visual positioning technology to solve the problem of visual closed-loop feedback of constant control of the size of the electrothermal bubble, and can be realized by combining a common optical microscope and a camera, and has simple structure.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings.
FIG. 1 is a schematic structural diagram of a micromanipulation method of the present invention.
Detailed Description
The present invention will be described in further detail below with reference to the accompanying drawings in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the description is only illustrative and is not intended to limit the scope of the invention.
The invention combines a precise positioning technology based on visual sense and a thermally induced bubble control technology based on resistance heat to realize a novel probe type microscopic operation method, and the structure of the probe type microscopic operation method is shown in figure 1.
The novel probe type micro-operation method based on the thermally induced bubbles mainly comprises an optical microscope 1, a precise electric platform 2, a sample stage 3, a probe type thermal bubble micro-operator 4, a camera 5, a computer 6, a data acquisition card 7, a driver 8, a controller 9, a multi-axis adjusting stage 10, an operator supporting structure 11, a terminal electric heating probe 12, an objective lens converter 13, a low power objective lens 14, a high power objective lens 15, a microscope frame 16, a light source 17, a target container 18, bubbles 19 and a target micro-object 20. Wherein the objective lens converter 13, the low power objective lens 14, the high power objective lens 15, the microscope stand 16 and the light source 17 are components of the optical microscope 1; the multi-axis adjustment stage 10, manipulator support structure 11 and terminal electrothermal probe 12 are integral parts of the probe-type thermal bubble micromanipulator 4.
Wherein the light source 17 is mounted on the microscope stand 16 directly above the whole system, and the light source 17 can be white light or fluorescent light. The objective lens changer 13 is mounted on a microscope stand 16, and the low power objective lens 14 and the high power objective lens 15 are respectively screwed on the objective lens changer 13. The precise electric platform 2 is fixed, and the microscope stand 16 is fixed on the precise electric platform 2 through screws, so that the precise electric platform 2 can control the whole optical microscope 1 to realize movement.
The sample stage 3 is fixed, the multi-axis adjustment stage 10 is fixed on the sample stage 3 by screws, the manipulator support structure 11 is fixed on the multi-axis adjustment stage 10 by screws, the terminal electrothermal probe 12 is clamped and connected on the manipulator support structure 11 by spring pieces, and an operation bubble 19 is generated at the tip of the terminal electrothermal probe 12. The target container 18 is attached to the sample stage 3 by spring clamping, and has a target micro-object 20 placed on the inner bottom surface thereof. The dimensions of the target micro-objects 20 and the tip portion of the distal electrothermal probe 12 are in the order of micrometers.
The camera 5 is arranged on a microscope stand 16 of the optical microscope 1, and the computer 6 is electrically connected with the camera 5, the data acquisition card 7 and the controller 9 through cables; the data acquisition card 7 outputs an excitation signal, amplifies the current through the driver 8 and inputs the excitation signal to the tail end electrothermal probe 12 of the probe type thermal bubble micromanipulator 4; the controller 9 outputs control signals to operate the motion of the precision electric platform 2.
The invention relates to a novel probe type micro-operation method based on thermally induced bubbles, which comprises the following implementation processes in an embodiment:
1. adjusting the objective lens converter 13 to switch the objective lens to the low power objective lens 14, adjusting the precision electric stage 2 to move the optical microscope 1 so that the field of view of the optical microscope 1 covers the target micro object 20, and adjusting the focus of the low power objective lens 14 to be in a focal plane;
2. adjusting the multi-axis adjusting table 10 to control the tail end electrothermal probe 12 to move to the vicinity of the target micro-object 20, and controlling the data acquisition card 7 by the computer 6 to generate an excitation signal, wherein the excitation signal is a combination of high-amplitude short pulse and low-amplitude PWM waveforms, and the excitation signal realizes current amplification through the driver 8 to promote the tail end electrothermal probe 12 to generate the air bubble 19;
3. adjusting the objective lens converter 13 to switch to the high-power objective lens 15, wherein the camera 5 collects microscopic operation images, transmits the microscopic operation images to the computer 6 and displays the microscopic operation images in real time, and simultaneously extracts the outline and the position of the bubble 19 by utilizing a machine vision algorithm, calculates the feedback size in real time and compensates and corrects the excitation signals;
4. adjusting the multi-axis adjustment stage 10 to pick up the target micro-object 20 to move it to a desired position using the dimensionally stable air bubble 19;
5. and controlling the computer 6 to stop outputting an excitation signal, so that the bubble 19 collapses and disappears, and the target micro-object 20 is released.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims (6)

1. The novel probe type micromanipulation method based on thermally induced bubbles is characterized in that: the device comprises an optical microscope 1, a precise electric platform 2, a sample stage 3, a probe type hot air bubble micromanipulator 4, a camera 5, a computer 6, a data acquisition card 7 and a driver 8; the optical microscope 1 is positioned above the precision electric platform 2; the camera 5 is mounted on the optical microscope 1; the probe type hot air bubble micromanipulator 4 is positioned above the sample stage 3 and comprises a multi-shaft adjusting stage 10, an operator supporting structure 11 and a tail end electrothermal probe 12; the computer 6, data acquisition card 7 and driver 8 are in electrical communication with the probe thermal bubble micromanipulator 4.
2. The novel thermally induced bubble-based probe micromanipulation method according to claim 1, wherein: the optical microscope 1 is a three-mesh front-mounted optical microscope, and in the optical microscope 1, the bottom end is fixed on the precise electric platform 2 and is connected through screw fastening; the optical microscope 1 has an objective lens converter 13, and a low power objective lens 14 and a high power objective lens 15 are respectively installed in the objective lens converter 13; the magnification of the low power objective lens 14 is 10 times or less, and the magnification of the high power objective lens 15 is 20 times or more.
3. The novel thermally induced bubble-based probe micromanipulation method according to claim 1, wherein: the multi-axis adjusting table 10 of the probe type thermal bubble micromanipulator 4 is fixed on the sample table 3 and is connected through screw threads; the manipulator support structure 11 is fixed on the multi-axis adjustment table 10 and is connected through screw fastening; the tail end electrothermal probe 12 is fixed on the manipulator supporting structure 11 and is in clamping connection through a spring piece, thin metal conductive wires manufactured by MEMS technology are distributed on the surface and the tip end of the tail end electrothermal probe 12, and when the tail end electrothermal probe is electrified, electric heat can be generated in a concentrated mode; the end electrothermal probe 12 is immersed in a target container 18 containing a working fluid and a target micro-object 20; the target container 18 is fixed on the sample stage 3 and is clamped and connected through a spring piece.
4. The novel thermally induced bubble-based probe micromanipulation method according to claim 1, wherein: the precision motorized stage 2 has 2 degrees of freedom and the multi-axis adjustment stage 10 has 3 degrees of freedom.
5. The novel probe type micromanipulation method based on thermally induced bubbles is characterized by comprising the following steps of:
adjusting the objective lens converter 13 to switch the objective lens to the low power objective lens 14, adjusting the precision electric platform 2 to move the optical microscope 1, enabling the field of view of the optical microscope 1 to cover the target micro object 20, and adjusting the focus of the low power objective lens 14 to be in a focal plane;
adjusting the multi-axis adjusting table 10 to control the tail end electrothermal probe 12 to move to the vicinity of the target micro-object 20, and controlling the data acquisition card 7 to generate an excitation signal by the computer 6, wherein current amplification is realized through the driver 8, so that the tail end electrothermal probe 12 is caused to generate bubbles 19;
adjusting the objective lens converter 13 to switch to the high-power objective lens 15, acquiring microscopic operation images by the camera 5, transmitting the microscopic operation images to the computer 6 for real-time display, simultaneously calculating and feeding back the size of the generated bubbles 19 in real time, and correcting excitation signals;
adjusting the multi-axis adjustment stage 10 to pick up the target micro-object 20 and move to a desired position using the dimensionally stable bubble 19;
the computer 6 stops outputting the excitation signal, so that the bubble 19 collapses and disappears, and the release of the target micro-object 20 is realized.
6. The novel thermally induced bubble-based probe micromanipulation method according to claims 1-5, wherein: the terminal electrothermal probe 12 controls the generation and the size of terminal bubbles 19, uses the bubbles 19 as tools to adhere and operate the target micro-object 20, realizes the release of the target micro-object 20 through the natural collapse of the bubbles 19, and observes the operation condition in real time through the camera 5 and the optical microscope 1.
CN202310101262.6A 2023-02-13 2023-02-13 Novel probe type micro-nano operation method based on thermally induced bubbles Pending CN117074724A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310101262.6A CN117074724A (en) 2023-02-13 2023-02-13 Novel probe type micro-nano operation method based on thermally induced bubbles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310101262.6A CN117074724A (en) 2023-02-13 2023-02-13 Novel probe type micro-nano operation method based on thermally induced bubbles

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CN117074724A true CN117074724A (en) 2023-11-17

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