CN117031765A - Beam shaping system for laser processing - Google Patents
Beam shaping system for laser processing Download PDFInfo
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- CN117031765A CN117031765A CN202311005711.3A CN202311005711A CN117031765A CN 117031765 A CN117031765 A CN 117031765A CN 202311005711 A CN202311005711 A CN 202311005711A CN 117031765 A CN117031765 A CN 117031765A
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- lenses
- combined
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- 238000007493 shaping process Methods 0.000 title claims abstract description 11
- 238000003825 pressing Methods 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a beam shaping system for laser processing. The combined mirror module capable of being combined is arranged, so that when a user needs to shape a laser spot, each square lens can be combined at will according to the needs to obtain the shape of a required focusing point; in addition, for the convenience of use, the corresponding mask module and the corresponding measuring module are further arranged, so that a user can use a computer to combine the mask module and the measuring module under the condition that the user does not know the arrangement of specific square lenses, and the focal direction vector of each square lens is measured, so that the lens combination mode can be obtained, and the user can disassemble and adjust the combination mode of the combination lens modules according to the needs.
Description
Technical Field
The present invention relates to beam shaping devices, and more particularly, to a beam shaping system for laser processing.
Background
The laser processing is performed by utilizing the photothermal effect by focusing the energy of light through a lens and then achieving high energy density at a focus. The laser processing does not need tools, has high processing speed and small surface deformation, and can process various materials. The material is subjected to various processes such as punching, cutting, dicing, welding, heat treatment, and the like with a laser beam.
When laser processing is carried out, the laser focusing shape is often required to be adjusted, a single focus can be simply set, and a plurality of focuses are required to be set; although multiple foci have many implementations, if too many transmission and reflection times are used, the energy loss of the laser is large;
the compound spectacle lens is a lens which is more in use at present, a plurality of sub-lenses are arranged on a light path, and each lens has independent optical characteristics, so that the shape of a combined light spot can be obtained according to the requirement; however, because the processing components of the compound spectacle lens are extremely high, if each shape is used for processing a group of compound spectacle lenses independently, the utilization rate of the lenses is very low, and the use cost is very high; in addition, the use of the compound spectacle lens is limited due to the long processing period of the compound spectacle lens.
Disclosure of Invention
In view of the above, in order to solve the above problems, a beam shaping system for laser processing is provided, which includes a collimation module, a mask module, a combined mirror module, a measurement module and a computer; the method is characterized in that:
the collimation module, the mask module, the combined mirror module and the measurement module are coaxially arranged;
the collimating module is used for collimating laser, the mask module is provided with a plurality of electric control shutters, the electric control shutters form an electric control shutter array, the combined mirror module is formed by combining n multiplied by n independent square lenses, the square lenses can be combined and disassembled, and in an initial state, the focuses of all the square lenses are positioned at the same point on the same axis of the collimating module, the mask module, the combined mirror module and the measuring module; the number of square lenses is n 2 N, n>2; the square lenses can be disassembled and assembled together again, so that after different arrangements and combinations are carried out, at least one focusing point is formed on a focal plane behind the combined mirror by the light beams passing through the combined mirror module;
the collimated laser enters the mask module, exits from the mask module and then enters the combined mirror module, and then the light beam is focused on a focal plane behind the combined mirror module to form at least one focusing point; so that when the measuring module is placed in the focal plane behind the combined mirror, the measuring module can measure the number of focal points in the focal plane;
the positions of the electric control shutters and the square lenses are in one-to-one correspondence, and each electric control shutter on the mask module corresponds to the square lens on one combined lens module, so that one electric control shutter controls the opening and closing of light entering one square lens at the corresponding position; the number of the electric control shutters is the same as that of the square lenses;
so that when only one electronically controlled shutter is opened, the measurement module can measure the focal position of the square lens corresponding to the electronically controlled shutter.
The combined mirror module comprises a frame, a spring and a pressing plate, wherein the spring and the pressing plate are arranged in the frame, the frame is in a shape of a Chinese character 'kou', and the square lens is arranged in the Chinese character 'kou' formed by the surrounding of the frame; the cross section of each side of the frame is U-shaped, and is provided with a bottom edge, two side edges and an opening, and the two side edges are provided with protruding stop blocks at the opening; a spring and a pressing plate are arranged in the frame, one end of the spring is propped against the bottom edge of the section of the frame, the other end of the spring is propped against the first surface of the pressing plate, and two sides of the second surface of the pressing plate are blocked by the stop block; the second surface of the pressing plate is used for propping against the edge of the square lens, and the pressing plate is arranged at the contact position of the square lens in each row and each column and the frame, so that the firmness of the square lens after being installed is ensured.
The cross section of the square lens perpendicular to the optical axis of the square lens is square, and the contact edges of two adjacent square lenses are provided with mutually matched bulges and hollows, and the bulges and hollows are mutually matched when the square lenses are installed, so that the positions of the adjacent square lenses after being combined are relatively fixed.
The square lens is made of JGS1 quartz; the measuring module is a CCD; the computer records the coordinates (A, B) of the opened electric control shutter and the measured coordinates (X, Y) of the focus point position; then, a vector (X-A, Y-B) from the coordinates (A, B) to the coordinates (X, Y) is calculated, and the coordinates (A-X, B-Y) of the square lens measured in the initial state are calculated from the calculated (X-A, Y-B).
Specifically, regarding the side length of the square lens as 1, regarding the center of the combined lens module as the origin of coordinates, regarding the plane perpendicular to the horizontal axis of the combined lens module as the X-Y plane, determining the coordinates (a, B) of the square lens with the shutter opened at first when in actual use, and then measuring the focal coordinates (X, Y) of the square lens after light passes through the square lens, omitting the coordinates of the Z axis, because the size of the Z axis in calculation does not actually affect the calculation of the original position of the square lens, and knowing the original position, it is possible to know that the light moves from (a, B) to (X, Y), that is, (X-a, Y-B) is the direction of movement of the light, and then, since in the initial state, the back focal points of all the square lenses are on the axis of the combined lens module, that is, the coordinates of the focal points are (0, 0); this can be used to extrapolate (A-X, B-Y) to the coordinates of the square lens in the initial state; therefore, if the original position of the combined mirror module cannot be obtained by naked eyes after multiple assembly and combination are carried out, the focus of the square lens can be directly measured by opening one electric control shutter each time, and the position of the square lens in the initial state is obtained through calculation, so that the initial state of the combined mirror module can be restored conveniently.
The invention has the beneficial effects that the combined mirror module which can be combined is arranged, so that when a user needs to shape a laser spot, each square lens can be combined arbitrarily according to the need to obtain the shape of a required focusing point; in addition, for the convenience of use, the corresponding mask module and the corresponding measuring module are further arranged, so that a user can use a computer to combine the mask module and the measuring module under the condition that the user does not know the arrangement of specific square lenses, and the focal direction vector of each square lens is measured, so that the lens combination mode can be obtained, and the user can disassemble and adjust the combination mode of the combination lens modules according to the needs.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosed subject matter, are incorporated in and constitute a part of this specification. The drawings also set forth implementations of the disclosed subject matter and, together with the detailed description, serve to explain the principles of the implementations of the disclosed subject matter. No attempt is made to show structural details of the disclosed subject matter in more detail than is necessary for a fundamental understanding of the disclosed subject matter and its various ways of practice.
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic diagram of a combiner mirror module of the present invention;
FIG. 3 is a schematic view of a square lens according to the present invention;
FIG. 4 is a schematic view of a frame of a combined mirror module according to the present invention;
FIG. 5 is a schematic view of focusing points obtained by different combinations of the present invention.
Detailed Description
The advantages, features and manner of attaining the stated objects of the invention will become apparent from the description to follow, and from the drawings.
Example 1:
referring to fig. 1-4, a beam shaping system for laser processing includes a collimation module 1, a mask module 2, a combined mirror module 3, a measurement module 4, and a computer; the collimation module 1, the mask module 2, the combined mirror module 3 and the measurement module 4 are coaxially arranged.
The collimating module 1 is used for performing beam expansion collimation on laser, the mask module 2 is provided with a plurality of electric control shutters, the combined mirror module 3 is formed by combining n rows and n columns of independent square lenses 5, the square lenses 5 can be disassembled and combined, and in an initial state, the focuses of all the square lenses 5 are positioned at the same point on the axes of the collimating module 1, the mask module 2, the combined mirror module 3 and the measuring module 4; the number of square lenses 5 is n 2 N, n>2; the square lens 5 can be disassembled so that the light beam passing through the combined mirror module 3 forms at least one focus on the focal plane behind the combined mirror after different arrangements and combinations are made;
each electronically controlled shutter on the mask module 2 corresponds to a square lens 5 on one of the combined mirror modules 3; the number of the electric control shutters is the same as that of the square lenses 5;
the collimated laser enters the mask module 2, exits from the mask module 2 and enters the combined mirror module 3, and then the light beam is focused on a focal plane behind the combined mirror to form at least one focusing point; so that when the measuring module 4 is placed on the focal plane behind the combined mirror, the measuring module 4 can acquire the number of focal points on the focal plane;
the combined mirror module 3 comprises a frame 6, a spring 7 and a pressing plate 8 which are arranged in the frame 6, the frame 6 is shaped like a Chinese character 'kou', and the square lens 5 is arranged in the frame 6; the cross section of each side of the frame 6 is U-shaped, and is provided with a bottom edge, two side edges and an opening, and the two side edges are provided with protruding stop blocks 9 at the opening; a spring 7 and a pressing plate 8 are arranged in the frame 6, one end of the spring 7 is propped against the bottom edge of the section of the frame 6, the other end is propped against the first surface of the pressing plate 8, and two sides of the second surface of the pressing plate 8 are blocked by a stop block 9; the second surface of the pressing plate 8 is used for propping against the square lenses 5, and the pressing plate 8 is arranged at the contact part of each row and each column of square lenses 5 and the frame 6, so that the firmness of the square lenses 5 after being installed is ensured.
The cross section of the square lens 5 perpendicular to the optical axis is square, and the two adjacent square lenses 5 are provided with the mutually matched protrusions 11 and the mutually matched depressions 12, and the protrusions 11 and the depressions 12 are mutually matched when the square lenses 5 are installed, so that the adjacent square lenses 5 cannot relatively displace.
The square lens 5 is made of JGS1 quartz; the measuring module 4 is a CCD; the computer records the coordinates A and B of the opened electric control shutter and the coordinates X and Y of the focus point position obtained by measurement; the vector X-a, Y-B from coordinates a, B to coordinates X, Y is then calculated and the original coordinates of the square lens 5 measured are calculated from the calculated X-a, Y-B.
The plurality of electronically controlled shutters provided in the mask module 2 can control the opening and closing of light entering each square lens 5 so that when only one electronically controlled shutter is opened, the measuring module 4 can acquire the focal position of the square lens 5 corresponding to the electronically controlled shutter.
Example 2:
establishing a rectangular coordinate system by taking the center of the combined mirror module as an origin, only considering the coordinates of a plane perpendicular to the horizontal axis of the combined mirror module, and assuming that the side length of each square lens is 1, if the square lens is an 8×8 combined mirror, the center position of the lens at the leftmost upper corner is (-3.5,3.5), and the coordinates of the focal positions of all square lenses at the initial setting are (0, 0) by analogy; thus, the focal direction vector of each lens can be obtained, and the focal direction vector of the lens at the leftmost upper corner is obtained by subtracting (-3.5,3.5) from (0, 0) (3.5, -3.5); others and so on;
if the order of the lenses is disturbed and the operator has no way of knowing the original position of each lens, the computer can be used to record the coordinates (A, B) of the open electronically controlled shutter and the measured coordinates (X, Y) of the focus position; then, a vector (X-A, Y-B) from the coordinates A, B to the coordinates (X, Y) is calculated, and the original coordinates of the square lens 5 measured are calculated from the calculated (X-A, Y-B).
For example, (X-A, Y-B) is (3.5, -3.5), then the original coordinates of the square lens 5 are (-3.5,3.5), and it is known that it is the upper left lens;
the computer also has a function of inputting the movement vector (M, N) of each lens (A, B) into the computer when the user needs to perform an arrangement; then (A+M, B+N) is the moved coordinate, and then the moved coordinate can be obtained by combining the focal direction vector (X-A, Y-B) of the lens; after the motion vector of each lens is input, the computer can automatically give the coordinates of all focusing positions, so that the user is facilitated.
Referring to fig. 5, a combination of 6 different square lenses is shown, with the different order of the square lenses in different rows being adjusted in only one direction, resulting in a different combination with one focus, two focuses, three focuses, four focuses;
of course, the above combination mode is just a simple combination mode, the square lens can be further adjusted to adjust the independent position of each lens in the vertical direction, even the lens is rotated, the rotation angle is recorded in the computer after the lens is rotated, so as to calculate, obtain the focal position, and the specific calculation mode of the rotating lens needs to mark the direction on the lens, so that the direction of the lens is considered when the coordinate calculation is performed, and the specific calculation mode can be deduced by a person skilled in the art according to the geometric relationship and is not repeated herein.
The above description is merely of the preferred embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think about the changes or substitutions within the technical scope of the present invention, and the changes or substitutions are intended to be covered by the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (4)
1. The beam shaping system for laser processing is characterized by comprising a collimation module (1), a mask module (2), a combined mirror module (3), a measurement module (4) and a computer; the method is characterized in that:
the collimation module (1), the mask module (2), the combined mirror module (3) and the measurement module (4) are coaxially arranged;
the collimating module (1) is used for collimating laser, the mask module (2) is provided with a plurality of electric control shutters, the electric control shutters form an electric control shutter array, the combined mirror module (3) is formed by combining n multiplied by n independent square lenses (5), the square lenses (5) can be combined and disassembled, and in an initial state, focuses of all the square lenses (5) are positioned at the same point on a common axis where the collimating module (1), the mask module (2), the combined mirror module (3) and the measuring module (4) are positioned; the number of square lenses (5) is n 2 N, n>2; the square lenses (5) can be disassembled and assembled together again, so that after different arrangements and combinations are carried out, the light beam passing through the combined mirror module (3) forms at least one focusing point on a focal plane behind the combined mirror;
the collimated laser enters the mask module (2), exits from the mask module (2) and then enters the combined mirror module (3), and then the light beam is focused on a focal plane behind the combined mirror module (3) to form at least one focusing point; so that when the measuring module (4) is placed in the focal plane behind the combined mirror, the measuring module (4) can measure the number of focal points in the focal plane;
the positions of the electric control shutters are in one-to-one correspondence with the positions of the square lenses, each electric control shutter on the mask module (2) corresponds to the square lens (5) on one combined lens module (3), so that one electric control shutter controls the opening and closing of light entering one square lens (5) at the corresponding position; the number of the electric control shutters is the same as that of the square lenses (5);
so that when only one electronically controlled shutter is open, the measuring module (4) can measure the focal position of the square lens (5) corresponding to the electronically controlled shutter.
2. The beam shaping system for laser processing according to claim 1, wherein:
the combined mirror module (3) comprises a frame (6), a spring (7) and a pressing plate (8) which are arranged in the frame (6), wherein the frame (6) is shaped like a Chinese character 'kou', and the square lens (5) is arranged in the Chinese character 'kou' formed by the frame (6); the cross section of each side of the frame (6) is U-shaped, and is provided with a bottom edge, two side edges and an opening, and the two side edges are provided with protruding stop blocks (9) at the opening; a spring (7) and a pressing plate (8) are arranged in the frame (6), one end of the spring (7) is propped against the bottom edge of the section of the frame (6), the other end is propped against the first surface of the pressing plate (8), and two sides of the second surface of the pressing plate (8) are blocked by a stop block (9); the second surface of the pressing plate (8) is used for propping against the edge of the square lens (5), and the pressing plate (8) is arranged at the contact position of each row and each column of square lenses (5) and the frame (6), so that the firmness of the square lenses (5) after being installed is ensured.
3. The beam shaping system for laser processing according to claim 1, wherein:
the cross section of the square lens (5) perpendicular to the optical axis of the square lens is square, and the contact edge of two adjacent square lenses (5) is provided with a protrusion (11) and a recess (12) which are matched with each other, and the protrusion (11) and the recess (12) are matched with each other when the square lens (5) is installed, so that the positions of the adjacent square lenses (5) are relatively fixed after being combined.
4. The beam shaping system for laser processing according to claim 1, wherein:
the square lens (5) is made of JGS1 quartz; the measuring module (4) is a CCD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311005711.3A CN117031765A (en) | 2023-08-10 | 2023-08-10 | Beam shaping system for laser processing |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311005711.3A CN117031765A (en) | 2023-08-10 | 2023-08-10 | Beam shaping system for laser processing |
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| CN117031765A true CN117031765A (en) | 2023-11-10 |
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| CN202311005711.3A Pending CN117031765A (en) | 2023-08-10 | 2023-08-10 | Beam shaping system for laser processing |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08323492A (en) * | 1995-06-01 | 1996-12-10 | Mitsubishi Heavy Ind Ltd | Beam shaping device for excimer laser |
| JP2001287070A (en) * | 2000-03-31 | 2001-10-16 | Matsushita Electric Ind Co Ltd | Laser beam homogenization by scanning of beam on mask |
| KR100783175B1 (en) * | 2006-11-29 | 2007-12-12 | 나노전광 주식회사 | Apparatus for detecting hazes on photomask surface by using a chessboard mask, a microlens array and a ccd and method for detecting hazes thereof |
| CN102252833A (en) * | 2011-06-24 | 2011-11-23 | 北京理工大学 | Large-diameter wide-dynamic range collimating system wavefront quality detection device |
| WO2018099851A1 (en) * | 2016-11-29 | 2018-06-07 | Highyag Lasertechnologie Gmbh | Laser beam shaping element |
| CN113534474A (en) * | 2021-07-19 | 2021-10-22 | 华中科技大学 | Reflective beam shaping mirror and shaping system |
| CN113751892A (en) * | 2021-08-24 | 2021-12-07 | 广东宏石激光技术股份有限公司 | Thick material cutting system based on laser spot energy shaping |
| CN113977072A (en) * | 2021-11-30 | 2022-01-28 | 广东宏石激光技术股份有限公司 | Variable-spot diffraction element-based zoom laser processing system and method |
| CN114769620A (en) * | 2018-05-18 | 2022-07-22 | Ii-Vi 特拉华有限公司 | Additive manufacturing in metal using fiber array laser sources and adaptive multi-beam shaping |
-
2023
- 2023-08-10 CN CN202311005711.3A patent/CN117031765A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08323492A (en) * | 1995-06-01 | 1996-12-10 | Mitsubishi Heavy Ind Ltd | Beam shaping device for excimer laser |
| JP2001287070A (en) * | 2000-03-31 | 2001-10-16 | Matsushita Electric Ind Co Ltd | Laser beam homogenization by scanning of beam on mask |
| KR100783175B1 (en) * | 2006-11-29 | 2007-12-12 | 나노전광 주식회사 | Apparatus for detecting hazes on photomask surface by using a chessboard mask, a microlens array and a ccd and method for detecting hazes thereof |
| CN102252833A (en) * | 2011-06-24 | 2011-11-23 | 北京理工大学 | Large-diameter wide-dynamic range collimating system wavefront quality detection device |
| WO2018099851A1 (en) * | 2016-11-29 | 2018-06-07 | Highyag Lasertechnologie Gmbh | Laser beam shaping element |
| CN114769620A (en) * | 2018-05-18 | 2022-07-22 | Ii-Vi 特拉华有限公司 | Additive manufacturing in metal using fiber array laser sources and adaptive multi-beam shaping |
| CN113534474A (en) * | 2021-07-19 | 2021-10-22 | 华中科技大学 | Reflective beam shaping mirror and shaping system |
| CN113751892A (en) * | 2021-08-24 | 2021-12-07 | 广东宏石激光技术股份有限公司 | Thick material cutting system based on laser spot energy shaping |
| CN113977072A (en) * | 2021-11-30 | 2022-01-28 | 广东宏石激光技术股份有限公司 | Variable-spot diffraction element-based zoom laser processing system and method |
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