CN117030012A - Laser cleaning energy density real-time monitoring system, method and device - Google Patents

Laser cleaning energy density real-time monitoring system, method and device Download PDF

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Publication number
CN117030012A
CN117030012A CN202310786999.6A CN202310786999A CN117030012A CN 117030012 A CN117030012 A CN 117030012A CN 202310786999 A CN202310786999 A CN 202310786999A CN 117030012 A CN117030012 A CN 117030012A
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China
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real
energy
time
laser
laser beam
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胡文哲
刘晓龙
聂树真
张洪流
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Aerospace Information Research Institute of CAS
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Aerospace Information Research Institute of CAS
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Priority to CN202310786999.6A priority Critical patent/CN117030012A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention provides a laser cleaning energy density real-time monitoring system, a method and a device, wherein the system comprises the following components: the system comprises a laser system, an energy real-time monitoring system, a Charge Coupled Device (CCD) real-time monitoring system and a real-time calculation and analysis system; the laser system is used for emitting pulse laser beams with controllable energy, the energy real-time monitoring system is used for monitoring the laser energy generated by the pulse laser beams with controllable energy in real time, the CCD real-time monitoring system is used for monitoring the irradiation spot area during laser cleaning in real time, and the real-time calculation analysis system is used for receiving the results of the energy real-time monitoring system and the CCD real-time monitoring system in real time and calculating the energy density parameters. The energy density parameter is calculated in real time through the real-time calculation analysis system by organically combining the energy real-time monitoring system and the CCD real-time monitoring system, so that the real-time monitoring of the laser cleaning energy density is realized, and the system has higher measuring result accuracy and stronger real-time property.

Description

Laser cleaning energy density real-time monitoring system, method and device
Technical Field
The invention relates to the technical field of laser cleaning, in particular to a system, a method and a device for monitoring laser cleaning energy density in real time.
Background
In the related art, due to the instability of energy output of a pulse laser and the uncertainty of irradiation light spots, laser energy and laser irradiation light spot areas cannot be accurately monitored in real time, and further energy density parameters of laser cleaning cannot be accurately adjusted, so that laser cleaning efficiency is low and energy density detection accuracy is low.
Disclosure of Invention
The invention provides a laser cleaning energy density real-time monitoring system, method and device, which are used for solving the defects of lower laser cleaning efficiency and lower energy density detection precision in the prior art and improving the laser cleaning efficiency and the energy density detection precision.
In a first aspect, the present invention provides a laser cleaning energy density real-time monitoring system, comprising: the system comprises a laser system, an energy real-time monitoring system, a Charge Coupled Device (CCD) real-time monitoring system and a real-time calculation and analysis system;
the laser system is used for emitting pulse laser beams with controllable energy, the energy real-time monitoring system is used for monitoring the laser energy generated by the pulse laser beams with controllable energy in real time, the CCD real-time monitoring system is used for monitoring the irradiation spot area during laser cleaning in real time, and the real-time calculation analysis system is used for receiving the results of the energy real-time monitoring system and the CCD real-time monitoring system in real time and calculating energy density parameters.
The invention provides a laser cleaning energy density real-time monitoring system, which comprises a white light source, a first beam splitter, a lens and a CCD camera, wherein the white light source is arranged in a preset range of a target object;
the CCD camera is used for shooting a high-definition picture of the surface of the target object irradiated by laser beams and sending the high-definition picture to the real-time computing and analyzing system for analysis processing.
The invention provides a laser cleaning energy density real-time monitoring system, which comprises a second beam splitter and an energy meter;
the second beam splitter is used for receiving the pulse laser beam emitted by the laser system and dividing the pulse laser beam into a transmission laser beam and a reflection laser beam with preset light intensity ratio, the energy meter is used for receiving the reflection laser beam, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis and treatment.
The invention provides a laser cleaning energy density real-time monitoring system, which comprises a data transmission line and a computer, wherein the data transmission line is connected with the computer;
the computer receives the laser energy of the reflected laser beam in the energy real-time monitoring system and the high-definition picture of the surface of the target object irradiated by the laser beam in the CCD real-time monitoring system through the data transmission line, calculates the pulse laser energy and the irradiation spot area irradiated on the surface of the target object in real time, and further calculates the energy density parameter in real time.
In a second aspect, the invention further provides a method for monitoring the energy density of laser cleaning in real time, which comprises the following steps:
dividing a pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio by the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis;
receiving light diffusely reflected by the surface of a target object to be cleaned and dividing the light into transmitted light and reflected light with preset light intensity ratio by the CCD real-time monitoring system, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by a laser beam, and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment;
Receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and a high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system by the real-time calculation analysis system, and calculating the pulse laser energy and irradiation spot area irradiated on the surface of the target object in real time;
and calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area by the real-time calculation and analysis system.
According to the method for monitoring the laser cleaning energy density in real time, the real-time calculation and monitoring of the laser energy comprises the following steps:
based on the pulse laser beam with controllable energy emitted by the laser system, the second beam splitter receives the pulse laser beam emitted by the laser system and divides the pulse laser beam into a transmission laser beam and a reflection laser beam with preset light intensity ratio, and the energy meter receives the reflection laser beam and monitors the energy of the reflection laser beam in real time;
monitoring the energy of the transmitted laser beam in real time based on a preset light intensity ratio;
based on the fixed energy loss ratio, the pulse laser energy irradiated on the surface of the target object is monitored in real time.
In a third aspect, the present invention also provides a device for monitoring energy density of laser cleaning in real time, including:
the energy monitoring module is used for dividing the pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio through the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis and treatment;
the CCD real-time monitoring module is used for receiving light diffusely reflected by the surface of the target object to be cleaned through the CCD real-time monitoring system and dividing the light into transmitted light and reflected light with preset light intensity ratio, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by the laser beam and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment;
the first calculation module is used for receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and the high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system through the real-time calculation analysis system, and calculating the pulse laser energy and the irradiation spot area irradiated on the surface of the target object in real time;
And the second calculation module is used for calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area through the real-time calculation analysis system.
In a fourth aspect, the present invention further provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, where the processor implements the laser cleaning energy density real-time monitoring method according to any one of the above when executing the program.
In a fifth aspect, the present invention also provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, implements a laser cleaning energy density real-time monitoring method as described in any one of the above.
In a sixth aspect, the present invention also provides a computer program product comprising a computer program which when executed by a processor implements a method for monitoring laser cleaning energy density in real time as described in any of the above.
According to the system, the method and the device for monitoring the laser cleaning energy density in real time, the energy real-time monitoring system and the CCD real-time monitoring system are organically combined, the energy density parameters are calculated in real time through the real-time calculation analysis system based on the laser energy monitored by the energy real-time monitoring system and the irradiation light spot area monitored by the CCD real-time monitoring system, and the real-time monitoring of the laser cleaning energy density is realized.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a system for monitoring energy density of laser cleaning in real time;
FIG. 2 is a schematic diagram of a laser cleaning energy density real-time monitoring system according to a second embodiment of the present invention;
FIG. 3 is a schematic diagram of a real-time monitoring device for laser cleaning energy density according to the present invention;
FIG. 4 is a flow chart of the method for monitoring the energy density of laser cleaning in real time;
FIG. 5 is a schematic diagram of a second embodiment of the device for monitoring the energy density of laser cleaning in real time;
fig. 6 is a schematic structural diagram of an electronic device provided by the present invention.
Reference numerals:
1: a pulsed laser; 2: a half-wave plate; 3: a polarizing plate; 4: a second beam splitter; 5: an energy meter; 6: a first beam splitter; 7: a lens; 8: a CCD camera; 9: a white light source; 10: a data transmission line; 11: a computer; 12: vibrating mirror; 13: a field lens; 14: a target object.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The following will be described first:
the laser cleaning is used as a novel green cleaning technology, is widely applied in the fields of machinery, petrochemical industry, cultural relic protection and the like, and is a trend of development of industries such as paint removal, rust removal, precise cleaning and the like in the future. In the laser cleaning process, different cleaning parameters, especially the energy density of laser irradiation, need to be selected for different substrates and attachments. In the related art, due to the instability of energy output of a pulse laser and the uncertainty of an irradiation spot, the laser energy and the area of the laser irradiation spot cannot be accurately monitored in real time, so that the energy density parameter of laser cleaning cannot be accurately adjusted, and the problems of low laser cleaning efficiency and low detection precision are caused.
In the related art, the real-time monitoring of the pulse laser energy can be generally realized through a combined device of a beam splitter and an energy meter. The beam splitter can divide the light beam into transmitted light and reflected light with fixed proportion, and the energy meter can receive a certain light beam and measure the energy of the light beam in real time, so that the pulse laser energy on the surface of the cleaning object with the fixed proportion is indirectly monitored in real time.
In the related art, the measurement scheme of the laser irradiation spot area may be to measure the spot area at the focal point thereof by using a beam analyzer before cleaning, and consider this parameter as being constant throughout the cleaning process. However, different cleaning objects correspond to different cleaning requirements, the laser beam used for actual laser cleaning is not completely focused to the focus, and some cleaning objects with rough surfaces can also cause the change of the spot area of the laser irradiation on the surfaces of the cleaning objects along with the reduction of attachments in the cleaning process, so that the technical scheme for measuring the spot area has poor accuracy, complicated steps and no function of monitoring the laser irradiation spot area in real time.
In summary, although the technical scheme of real-time monitoring of laser energy in the related art has simpler structure, stronger operation controllability and higher accuracy, the technical scheme of measuring the light spot area has poorer accuracy, more complicated steps and lack of real-time property, the energy real-time monitoring system and the irradiation light spot area real-time monitoring system are not effectively combined, and the energy density parameter calculated in real time cannot be obtained by utilizing computer processing, so the technical scheme of real-time monitoring of the energy density parameter is not mature enough.
Therefore, the invention provides a system, a method and a device for monitoring the energy density of laser cleaning in real time, which can calculate the energy density parameter in the laser cleaning process in real time, realize the real-time monitoring of the energy density, have simple structure, strong operation controllability and higher measurement accuracy, and can improve the accuracy and convenience in the parameter monitoring process of the laser cleaning.
The following is a detailed explanation based on a plurality of embodiments.
FIG. 1 is a schematic diagram of a system for monitoring energy density of laser cleaning in real time according to the present invention, as shown in FIG. 1, the system includes: a laser system, an energy real-time monitoring system, a Charge-coupled Device (CCD) real-time monitoring system, and a real-time calculation and analysis system;
the laser system is used for emitting pulse laser beams with controllable energy, the energy real-time monitoring system is used for monitoring the laser energy generated by the pulse laser beams with controllable energy in real time, the CCD real-time monitoring system is used for monitoring the irradiation spot area during laser cleaning in real time, and the real-time calculation analysis system is used for receiving the results of the energy real-time monitoring system and the CCD real-time monitoring system in real time and calculating energy density parameters.
Alternatively, the laser system may comprise a pulsed laser and an attenuator.
Alternatively, the laser system may include a pulsed laser, a half-wave plate, and a polarizer.
Alternatively, the pulsed laser may be a picosecond pulsed laser having a wavelength of 1064nm and a pulse width of 10 ps.
Alternatively, an adjustable attenuator consisting of a half-wave plate and a polarizer may be placed at the light exit of the pulse laser to emit an energy-controllable pulsed laser beam.
Alternatively, an adjustable attenuator consisting of a half-wave plate and a polarizer may be used to continuously adjust the laser energy.
Alternatively, the half-wave plate may rotate the polarization direction of the laser light, and the polarizer may select the polarization direction of the transmitted light, the combination of which may allow for continuous adjustment of the laser energy.
Alternatively, the energy real-time monitoring system may monitor in real time the laser energy generated by the energy controllable pulsed laser beam emitted by the laser system.
Alternatively, the laser energy can be adjusted to obtain a laser beam, so that damage to the surface of the cleaning object is avoided.
Optionally, the CCD real-time monitoring system can monitor the irradiation spot area of the laser beam in real time when the laser cleaning is performed.
Optionally, the real-time calculation analysis system can receive the laser energy monitored by the energy real-time monitoring system and the irradiation light spot area monitored by the CCD real-time monitoring system in real time, and calculate the energy density parameter by using the formula that the energy density of laser irradiation is equal to the single pulse energy divided by the irradiation light spot area.
Optionally, in order to realize real-time monitoring of the energy density of laser cleaning, firstly, a pulse laser of a laser system can emit a pulse laser beam, a half-wave plate can rotate the polarization direction of the pulse laser beam, and a polaroid can select the polarization direction of the pulse laser beam, so that continuous adjustment of laser energy is realized, and a pulse laser beam with controllable energy is obtained; the energy real-time monitoring system can monitor the laser energy generated by the pulse laser beam with controllable energy emitted by the laser system in real time, and the CCD real-time monitoring system can monitor the irradiation spot area of the laser beam in real time when the laser cleaning is performed; finally, the real-time calculation analysis system can receive the laser energy monitored by the energy real-time monitoring system and the irradiation light spot area monitored by the CCD real-time monitoring system in real time, and the formula is utilized: energy density of laser irradiation = single pulse energy/irradiation spot area, the energy density parameter is calculated.
According to the laser cleaning energy density real-time monitoring system provided by the invention, the energy real-time monitoring system and the CCD real-time monitoring system are organically combined, the energy density parameters are calculated in real time through the real-time calculation analysis system based on the laser energy monitored by the energy real-time monitoring system and the irradiation spot area monitored by the CCD real-time monitoring system, and the real-time monitoring of the laser cleaning energy density is realized.
Optionally, the CCD real-time monitoring system comprises a white light source arranged in a preset range of the target object, a first beam splitter, a lens arranged above the first beam splitter, and a CCD camera connected with the lens;
the CCD camera is used for shooting a high-definition picture of the surface of the target object irradiated by laser beams and sending the high-definition picture to the real-time computing and analyzing system for analysis processing.
Alternatively, the target object may be a cleaning object with rough surface, such as a mechanical element with surface rust spots, or a cleaning object with smooth surface, such as a mechanical element with smooth surface or a cultural relic.
Alternatively, a white light source may be placed over or on both sides of the target object to provide a light source for the CCD camera in the event of insufficient illumination.
Alternatively, the first beam splitter may be a 1064nm beam splitter, a 1000nm beam splitter, or a 1100nm beam splitter, which is not limited in the present invention.
Optionally, the first beam splitter may be inclined by 45 degrees and placed in the optical path of the pulsed laser, so as to ensure that light diffusely reflected by the surface of the object to be cleaned is incident on the beam splitting film surface of the first beam splitter and is divided into transmitted light and reflected light with a preset light intensity ratio, and the reflected light may be used for monitoring the irradiation spot area.
Alternatively, the splitting ratio of the first beam splitter may not be limited to a fixed value.
For example, after the light diffusely reflected by the surface of the object to be cleaned enters the light splitting film surface of the first beam splitter, the light may be divided into 70% of transmitted light and 30% of reflected light, may be divided into 90% of transmitted light and 10% of reflected light, and may be divided into 50% of transmitted light and 50% of reflected light.
Alternatively, a lens may be disposed above the first beam splitter for receiving the reflected light and imaging.
Alternatively, the lens may be selected as standard with a suitable working distance and without sacrificing the resolution of the camera.
Optionally, the CCD camera can be connected with the lens by using a screw thread and is used for shooting a high-definition picture of the surface of the cleaning object irradiated by the laser beam, and the high-definition picture is sent to the real-time calculation analysis system through the data transmission line to be analyzed and processed so as to monitor the irradiation spot area in real time.
Optionally, a CCD camera with high resolution and pixel size below 10 microns can be selected to ensure the accuracy of image recognition and spot monitoring.
In one embodiment of the invention, an object space telecentric lens with a working distance of 400-420mm is selected, the measuring range is consistent with that of a CCD camera, the resolution is higher than that of the CCD camera, so that the resolution of the camera is not sacrificed, and the pixel size is below 10 microns, so as to ensure the accuracy of image recognition and light spot monitoring.
Optionally, in order to realize real-time monitoring of the irradiation spot area, the light diffusely reflected on the surface of the object to be cleaned can be divided into transmitted light and reflected light with a certain light intensity ratio through the first beam splitter, then the reflected light is received through a lens and imaged, a high-definition picture of the surface of the object to be cleaned irradiated by the laser beam can be shot by using the CCD camera, and the high-definition picture is sent to a real-time calculation and analysis system through a data transmission line for analysis processing, so that real-time monitoring of the irradiation spot area is realized.
According to the laser cleaning energy density real-time monitoring system provided by the invention, the CCD real-time monitoring system is arranged, the CCD camera is utilized to shoot a high-definition picture of laser beam irradiation on the surface of a cleaning object, and the high-definition picture is sent to the real-time calculation analysis system through the data transmission line for analysis and treatment, so that the real-time monitoring of the irradiation spot area is realized.
Optionally, the energy real-time monitoring system comprises a second beam splitter and an energy meter;
the second beam splitter is used for receiving the pulse laser beam emitted by the laser system and dividing the pulse laser beam into a transmission laser beam and a reflection laser beam with preset light intensity ratio, the energy meter is used for receiving the reflection laser beam, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis and treatment.
Alternatively, the second beam splitter may be a 1064nm beam splitter, a 1000nm beam splitter, or a 1100nm beam splitter, which is not limited in the present invention.
Optionally, the second beam splitter may be inclined 45 degrees and placed in the optical path of the pulsed laser to ensure that the laser beam is incident on the beam splitting film surface of the second beam splitter and is split into a transmitted laser beam and a reflected laser beam with a certain light intensity ratio, and the reflected laser beam may be received by an energy meter and the energy of the reflected beam is monitored in real time.
Alternatively, the splitting ratio of the second beam splitter may not be limited to a fixed value.
Alternatively, the split ratio of the second beam splitter may depend on the measurement range of the selected energy meter and the energy range required for laser cleaning.
For example, after the pulse laser beam is incident on the beam splitting film surface of the second beam splitter, the pulse laser beam may be divided into 70% of the transmitted laser beam and 30% of the reflected laser beam, may be divided into 90% of the transmitted laser beam and 10% of the reflected laser beam, and may be divided into 50% of the transmitted laser beam and 50% of the reflected laser beam.
Optionally, the energy meter can monitor the energy of the reflected laser beam, and the laser beam finally irradiated on the surface of the cleaning object is enough to complete laser cleaning;
alternatively, the reflected laser beam and the laser beam irradiated on the surface of the cleaning object can be mutually noninterfered in space, and the energy of the reflected laser beam and the laser beam has a fixed proportion, so that the energy of the pulse laser irradiated on the surface of the cleaning object can be indirectly monitored in real time.
Optionally, in order to monitor the energy of the pulse laser irradiated on the surface of the target object in real time, the pulse laser beam can be divided into a transmission laser beam and a reflection laser beam with preset light intensity ratios by a second beam splitter in the energy real-time monitoring system, the reflection laser beam is received by an energy meter, the energy of the second reflection laser beam is monitored in real time, and the energy of the pulse laser irradiated on the surface of the target object can be indirectly monitored in real time.
According to the laser cleaning energy density real-time monitoring system provided by the invention, the pulse laser beam is divided into the transmitted laser beam and the reflected laser beam with the preset light intensity ratio by the second beam splitter in the energy real-time monitoring system, the reflected laser beam is received by the energy meter, the energy of the reflected laser beam is monitored in real time, and the energy of the pulse laser irradiated on the surface of the target object can be indirectly monitored in real time.
Optionally, the real-time computing and analyzing system comprises a data transmission line and a computer;
the computer receives the laser energy of the reflected laser beam in the energy real-time monitoring system and the high-definition picture of the surface of the target object irradiated by the laser beam in the CCD real-time monitoring system through the data transmission line, calculates the pulse laser energy and the irradiation spot area irradiated on the surface of the target object in real time, and further calculates the energy density parameter in real time.
Optionally, the computer may receive the image captured and sent by the CCD camera using the data transmission line, and then perform steps such as gray-scale preprocessing, image filtering, and edge detection on the image, extract the image contour, and calculate the irradiation spot area.
Optionally, to realize real-time monitoring of energy density, the computer may receive the laser energy monitored by the energy real-time monitoring system and the irradiation spot area monitored by the CCD real-time monitoring system by using the data transmission line, and then may use the formula: energy density of laser irradiation = single pulse energy/irradiation spot area, calculating energy density parameter, realizing real-time monitoring of energy density in laser cleaning process.
Fig. 2 is a second schematic structural diagram of the laser cleaning energy density real-time monitoring system according to the present invention, as shown in fig. 2, in one embodiment of the present invention, the laser cleaning energy density real-time monitoring system further includes: a scanning galvanometer system and a target object 14, the scanning galvanometer system comprising a galvanometer 12 and a field lens 13.
Alternatively, the scanning galvanometer system may be composed of two galvanometers 12 and one field lens 13, and the pulsed laser beam may be combined into a two-dimensional scanning beam after passing through the two galvanometers 12, and the scanning beam may be collected on the surface of the target object 14 after passing through the field lens to form a laser beam, so as to perform laser cleaning on the target object 14.
Specifically, firstly, a pulse laser 1 in a laser system can emit a pulse laser beam, a half-wave plate 2 can rotate the polarization direction of the pulse laser beam, and a polarizing plate 3 can select the polarization direction of the pulse laser beam, so that continuous adjustment of laser energy is realized, and the pulse laser beam with controllable energy is obtained; then, after the pulse laser beam with controllable energy is incident on the beam splitting film surface of the second beam splitter 4 in the energy real-time monitoring system, the pulse laser beam can be divided into a transmission laser beam and a reflection laser beam with preset light intensity ratio, the energy meter 5 can monitor the laser energy generated by the reflection laser beam in real time and send the laser energy to the computer 11 in the real-time computing and analyzing system for analysis processing through the data transmission line 10, and the single pulse energy in the laser cleaning process is monitored in real time;
Then, the transmitted laser beams pass through the CCD real-time monitoring system and then pass through two vibrating mirrors 12 in the scanning vibrating mirror system to be combined into scanning beams of a two-dimensional plane, and the scanning beams can be gathered on the surface of the target object 14 after passing through the field lens 13 to form laser beams, so that the target object 14 is subjected to laser cleaning;
after the light diffusely reflected by the surface of the object to be cleaned is incident on the light splitting film surface of the first beam splitter 6 in the CCD real-time monitoring system, the light can be divided into transmitted light and reflected light with preset light intensity ratio;
then the reflected light can be received and imaged through a lens 7 in a CCD real-time monitoring system, a CCD camera 8 is utilized to shoot a high-definition picture of the surface of the cleaning object irradiated by the laser beam, and the high-definition picture is sent to a computer 11 in a real-time computing and analyzing system through a data transmission line 10 for analysis and treatment, so that the irradiation spot area of the laser beam in the laser cleaning process is monitored in real time;
the CCD real-time monitoring system can monitor the irradiation spot area of the laser beam in real time when the laser cleaning is performed; finally, the real-time calculation analysis system can receive the laser energy monitored by the energy real-time monitoring system and the irradiation light spot area monitored by the CCD real-time monitoring system in real time through the data transmission line 10, and the computer 11 calculates the energy density parameter by dividing the energy density of the laser irradiation by the single pulse energy by the irradiation light spot area by using the formula.
FIG. 3 is a schematic diagram of a real-time monitoring device for laser cleaning energy density, which is shown in FIG. 3, and includes a laser system, an energy real-time monitoring system, a CCD real-time monitoring system, a real-time calculation analysis system, and a scanning galvanometer system;
the laser system comprises a pulse laser 1, a half-wave plate 2 and a polaroid 3, the energy real-time monitoring system comprises a second beam splitter 4 and an energy meter 5, the CCD real-time monitoring system comprises a first beam splitter 6, a lens 7, a CCD camera 8 and a white light source 9, the real-time computing and analyzing system comprises a data transmission line 10 and a computer 11, and the scanning galvanometer system comprises a galvanometer 12 and a field lens 13.
According to the laser cleaning energy density real-time monitoring system provided by the invention, the energy density of the formula laser irradiation is equal to the single pulse energy divided by the irradiation spot area through the laser energy monitored by the energy real-time monitoring system and the irradiation spot area monitored by the CCD real-time monitoring system, so that the energy density parameter is calculated, and the real-time monitoring of the energy density in the laser cleaning process is realized.
Fig. 4 is a flow chart of the method for monitoring the energy density of laser cleaning in real time, as shown in fig. 4, the method comprises the following steps:
Step 400, dividing the pulse laser beam emitted by the laser system and with controllable energy into a transmitted laser beam and a reflected laser beam with preset light intensity ratio by the energy real-time monitoring system, monitoring the energy of the reflected laser beam in real time and sending the energy of the reflected laser beam to the real-time calculation analysis system for analysis;
alternatively, the laser system may comprise a pulsed laser and an attenuator.
Alternatively, the laser system may include a pulsed laser, a half-wave plate, and a polarizer.
Alternatively, the pulsed laser may be a picosecond pulsed laser having a wavelength of 1064nm and a pulse width of 10 ps.
Alternatively, an adjustable attenuator consisting of a half-wave plate and a polarizer may be placed at the light exit of the pulse laser to emit an energy-controllable pulsed laser beam.
Alternatively, an adjustable attenuator consisting of a half-wave plate and a polarizer may be used to continuously adjust the laser energy.
Alternatively, the half-wave plate may rotate the polarization direction of the laser light, and the polarizer may select the polarization direction of the transmitted light, the combination of which may allow for continuous adjustment of the laser energy.
Optionally, in order to realize real-time monitoring of the energy density of laser cleaning, firstly, a pulse laser of the laser system can emit a pulse laser beam, a half-wave plate can rotate the polarization direction of the pulse laser beam, and a polarizing plate can select the polarization direction of the pulse laser beam, so that continuous adjustment of laser energy is realized, and the pulse laser beam with controllable energy is obtained.
Step 410, receiving light diffusely reflected by the surface of the object to be cleaned and dividing the light into transmitted light and reflected light with preset light intensity ratio by the CCD real-time monitoring system, receiving the reflected light and imaging, shooting a high-definition picture of the laser beam irradiated to the surface of the object, and sending the picture to the real-time computing and analyzing system for analysis and treatment;
alternatively, the first beam splitter may be a 1064nm beam splitter, a 1000nm beam splitter, or a 1100nm beam splitter, which is not limited in the present invention.
Optionally, the first beam splitter may be inclined 45 degrees and placed in the optical path of the pulsed laser, so as to ensure that the laser beam is incident on the beam splitting film surface of the first beam splitter and is split into transmitted light and reflected light with a certain light intensity ratio, and the reflected light may be used to monitor the irradiation spot area.
Alternatively, the splitting ratio of the first beam splitter may not be limited to a fixed value.
For example, after the light diffusely reflected by the surface of the object to be cleaned enters the light splitting film surface of the first beam splitter, the light may be divided into 70% of transmitted light and 30% of reflected light, may be divided into 90% of transmitted light and 10% of reflected light, and may be divided into 50% of transmitted light and 50% of reflected light.
Alternatively, a lens in the CCD real-time monitoring system may receive the reflected light and image it.
Optionally, a CCD camera in the CCD real-time monitoring system can be used for shooting pictures of the irradiation of the laser beam to the surface of the target object and calculating the irradiation spot area.
Alternatively, the target object may be a cleaning object with rough surface or a cleaning object with smooth surface.
Alternatively, a lens may be disposed above the first beam splitter for receiving the reflected light and imaging.
Alternatively, the lens may be selected as standard with a suitable working distance and without sacrificing the resolution of the camera.
Optionally, the CCD camera can be connected with the lens by using a screw thread and is used for shooting a high-definition picture of the surface of the cleaning object irradiated by the laser beam, and the high-definition picture is sent to the real-time calculation analysis system through the data transmission line to be analyzed and processed so as to monitor the irradiation spot area in real time.
Optionally, a CCD camera with high resolution and pixel size below 10 microns can be selected to ensure the accuracy of image recognition and spot monitoring.
In one embodiment of the invention, an object space telecentric lens with a working distance of 400-420mm is selected, the measuring range is consistent with that of a CCD camera, the resolution is higher than that of the CCD camera, so that the resolution of the camera is not sacrificed, and the pixel size is below 10 microns, so as to ensure the accuracy of image recognition and light spot monitoring.
Step 420, receiving, by the real-time calculation and analysis system, the energy of the reflected laser beam sent by the energy real-time monitoring system and a high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system, and calculating, in real time, the pulse laser energy and the irradiation spot area irradiated on the surface of the target object;
optionally, the computer in the real-time calculation analysis system can receive the laser energy in the energy real-time monitoring system and the irradiation spot area in the CCD real-time monitoring system through the data transmission line, and calculate the energy density parameter in real time.
And 430, calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area by the real-time calculation and analysis system.
Optionally, the computer may receive the pulse laser energy irradiated on the surface of the target object and the irradiation spot area monitored by the CCD real-time monitoring system, which are monitored by the energy real-time monitoring system, using a data transmission line, and then may use the formula: energy density of laser irradiation = single pulse energy/irradiation spot area, calculating energy density parameter, realizing real-time monitoring of energy density in laser cleaning process.
According to the laser cleaning energy density real-time monitoring method provided by the invention, the energy real-time monitoring system and the CCD real-time monitoring system are organically combined, the energy density parameters are calculated in real time through the real-time calculation analysis system based on the laser energy monitored by the energy real-time monitoring system and the irradiation light spot area monitored by the CCD real-time monitoring system, and the real-time monitoring of the laser cleaning energy density is realized.
Optionally, the calculating and monitoring laser energy in real time includes:
based on the pulse laser beam with controllable energy emitted by the laser system, the second beam splitter receives the pulse laser beam emitted by the laser system and divides the pulse laser beam into a transmission laser beam and a reflection laser beam with preset light intensity ratio, and the energy meter receives the reflection laser beam and monitors the energy of the reflection laser beam in real time;
monitoring the energy of the transmitted laser beam in real time based on a preset light intensity ratio;
based on the fixed energy loss ratio, the energy of the pulse laser irradiated on the surface of the target object is monitored in real time.
Optionally, the pulse laser beam emitted by the laser system may be incident to the energy real-time monitoring system, and the second beam splitter in the energy real-time monitoring system may be configured to make the pulse laser beam emitted by the laser system incident to the beam splitting film surface, so as to divide the pulse laser beam into a transmitted laser beam and a reflected laser beam with preset light intensity ratios, and real-time monitor the energy of the transmitted laser beam to irradiate the pulse laser energy on the surface of the cleaning object.
Alternatively, after the energy of the transmitted laser beam is acquired, the pulse laser energy irradiated on the surface of the target object may be monitored in real time based on a fixed energy loss ratio.
The laser cleaning energy density real-time monitoring device provided by the invention is described below, and the laser cleaning energy density real-time monitoring device and the laser cleaning energy density real-time monitoring method described above can be correspondingly referred to each other.
FIG. 5 is a second schematic structural diagram of the device for monitoring energy density of laser cleaning in real time according to the present invention, as shown in FIG. 5, the device comprises:
the energy monitoring module is used for dividing the pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio through the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis and treatment;
the CCD real-time monitoring module is used for receiving light diffusely reflected by the surface of the target object to be cleaned through the CCD real-time monitoring system and dividing the light into transmitted light and reflected light with preset light intensity ratio, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by the laser beam and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment;
The first calculation module is used for receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and the high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system through the real-time calculation analysis system, and calculating the pulse laser energy and the irradiation spot area irradiated on the surface of the target object in real time;
and the second calculation module is used for calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area through the real-time calculation analysis system.
According to the laser cleaning energy density real-time monitoring device, the energy real-time monitoring system and the CCD real-time monitoring system are organically combined, the energy density parameters are calculated in real time through the real-time calculation analysis system based on the laser energy monitored by the energy real-time monitoring system and the irradiation light spot area monitored by the CCD real-time monitoring system, and the real-time monitoring of the laser cleaning energy density is realized.
It can be understood that the laser cleaning energy density real-time monitoring device provided by the present invention corresponds to the laser cleaning energy density real-time monitoring method provided by the above embodiments, and the relevant technical features of the laser cleaning energy density real-time monitoring device provided by the present invention may refer to the relevant technical features of the laser cleaning energy density real-time monitoring method provided by the above embodiments, which are not described herein again.
Fig. 6 illustrates a physical schematic diagram of an electronic device, as shown in fig. 6, which may include: processor 610, communication interface (Communications Interface) 620, memory 630, and communication bus 640, wherein processor 610, communication interface 620, and memory 630 communicate with each other via communication bus 640. Processor 610 may invoke logic instructions in memory 630 to perform a laser cleaning energy density real-time monitoring method comprising: dividing a pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio by the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis; receiving light diffusely reflected by the surface of a target object to be cleaned and dividing the light into transmitted light and reflected light with preset light intensity ratio by the CCD real-time monitoring system, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by a laser beam, and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment; receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and a high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system by the real-time calculation analysis system, and calculating the pulse laser energy and irradiation spot area irradiated on the surface of the target object in real time; and calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area by the real-time calculation and analysis system.
Further, the logic instructions in the memory 630 may be implemented in the form of software functional units and stored in a computer-readable storage medium when sold or used as a stand-alone product. Based on this understanding, the technical solution of the present invention may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
In another aspect, the present invention also provides a computer program product, the computer program product including a computer program, the computer program being storable on a non-transitory computer readable storage medium, the computer program, when executed by a processor, being capable of executing the laser cleaning energy density real-time monitoring method provided by the above methods, the method comprising: dividing a pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio by the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis; receiving light diffusely reflected by the surface of a target object to be cleaned and dividing the light into transmitted light and reflected light with preset light intensity ratio by the CCD real-time monitoring system, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by a laser beam, and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment; receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and a high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system by the real-time calculation analysis system, and calculating the pulse laser energy and irradiation spot area irradiated on the surface of the target object in real time; and calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area by the real-time calculation and analysis system.
In yet another aspect, the present invention provides a non-transitory computer readable storage medium having stored thereon a computer program which, when executed by a processor, is implemented to perform the laser cleaning energy density real-time monitoring method provided by the above methods, the method comprising: dividing a pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio by the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis; receiving light diffusely reflected by the surface of a target object to be cleaned and dividing the light into transmitted light and reflected light with preset light intensity ratio by the CCD real-time monitoring system, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by a laser beam, and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment; receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and a high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system by the real-time calculation analysis system, and calculating the pulse laser energy and irradiation spot area irradiated on the surface of the target object in real time; and calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area by the real-time calculation and analysis system.
The apparatus embodiments described above are merely illustrative, wherein the elements illustrated as separate elements may or may not be physically separate, and the elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
From the above description of the embodiments, it will be apparent to those skilled in the art that the embodiments may be implemented by means of software plus necessary general hardware platforms, or of course may be implemented by means of hardware. Based on this understanding, the foregoing technical solution may be embodied essentially or in a part contributing to the prior art in the form of a software product, which may be stored in a computer readable storage medium, such as ROM/RAM, a magnetic disk, an optical disk, etc., including several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method described in the respective embodiments or some parts of the embodiments.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A laser cleaning energy density real-time monitoring system, comprising: the system comprises a laser system, an energy real-time monitoring system, a Charge Coupled Device (CCD) real-time monitoring system and a real-time calculation and analysis system;
the laser system is used for emitting pulse laser beams with controllable energy, the energy real-time monitoring system is used for monitoring the laser energy generated by the pulse laser beams with controllable energy in real time, the CCD real-time monitoring system is used for monitoring the irradiation spot area during laser cleaning in real time, and the real-time calculation analysis system is used for receiving the results of the energy real-time monitoring system and the CCD real-time monitoring system in real time and calculating energy density parameters.
2. The system for monitoring the energy density of laser cleaning in real time according to claim 1, wherein the CCD real-time monitoring system comprises a white light source arranged in a preset range of a target object, a first beam splitter, a lens arranged above the first beam splitter, and a CCD camera connected with the lens;
the CCD camera is used for shooting a high-definition picture of the surface of the target object irradiated by laser beams and sending the high-definition picture to the real-time computing and analyzing system for analysis processing.
3. The system of claim 1, wherein the system comprises a second beam splitter and an energy meter;
the second beam splitter is used for receiving the pulse laser beam emitted by the laser system and dividing the pulse laser beam into a transmission laser beam and a reflection laser beam with preset light intensity ratio, the energy meter is used for receiving the reflection laser beam, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis and treatment.
4. The laser cleaning energy density real-time monitoring system of any one of claims 1-3, wherein the real-time computational analysis system comprises a data transmission line and a computer;
the computer receives the laser energy of the reflected laser beam in the energy real-time monitoring system and the high-definition picture of the surface of the target object irradiated by the laser beam in the CCD real-time monitoring system through the data transmission line, calculates the pulse laser energy and the irradiation spot area irradiated on the surface of the target object in real time, and further calculates the energy density parameter in real time.
5. A method for monitoring laser cleaning energy density in real time, which is applied to the laser cleaning energy density real-time monitoring system in any one of claims 1-4, and comprises the following steps:
dividing a pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio by the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis;
receiving light diffusely reflected by the surface of a target object to be cleaned and dividing the light into transmitted light and reflected light with preset light intensity ratio by the CCD real-time monitoring system, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by a laser beam, and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment;
Receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and a high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system by the real-time calculation analysis system, and calculating the pulse laser energy and irradiation spot area irradiated on the surface of the target object in real time;
and calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area by the real-time calculation and analysis system.
6. The method of claim 5, wherein the calculating and monitoring laser energy in real time comprises:
based on the pulse laser beam with controllable energy emitted by the laser system, the second beam splitter receives the pulse laser beam emitted by the laser system and divides the pulse laser beam into a transmission laser beam and a reflection laser beam with preset light intensity ratio, and the energy meter receives the reflection laser beam and monitors the energy of the reflection laser beam in real time;
monitoring the energy of the transmitted laser beam in real time based on a preset light intensity ratio;
based on the fixed energy loss ratio, the pulse laser energy irradiated on the surface of the target object is monitored in real time.
7. A laser cleaning energy density real-time monitoring device, the device comprising:
the energy monitoring module is used for dividing the pulse laser beam emitted by the laser system and with controllable energy into a transmission laser beam and a reflection laser beam with preset light intensity ratio through the energy real-time monitoring system, monitoring the energy of the reflection laser beam in real time and sending the energy of the reflection laser beam to the real-time calculation analysis system for analysis and treatment;
the CCD real-time monitoring module is used for receiving light diffusely reflected by the surface of the target object to be cleaned through the CCD real-time monitoring system and dividing the light into transmitted light and reflected light with preset light intensity ratio, receiving the reflected light and imaging, shooting a high-definition picture of the surface of the target object irradiated by the laser beam and sending the high-definition picture to the real-time computing and analyzing system for analysis and treatment;
the first calculation module is used for receiving the energy of the reflected laser beam sent by the energy real-time monitoring system and the high-definition picture of the surface of the target object irradiated by the laser beam sent by the CCD real-time monitoring system through the real-time calculation analysis system, and calculating the pulse laser energy and the irradiation spot area irradiated on the surface of the target object in real time;
And the second calculation module is used for calculating an energy density parameter based on the pulse laser energy irradiated on the surface of the target object and the irradiation spot area through the real-time calculation analysis system.
8. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, wherein the processor implements the laser cleaning energy density real-time monitoring method of any one of claims 5 to 6 when the program is executed by the processor.
9. A non-transitory computer readable storage medium having stored thereon a computer program, wherein the computer program when executed by a processor implements the laser cleaning energy density real-time monitoring method according to any one of claims 5 to 6.
10. A computer program product comprising a computer program, characterized in that the computer program, when executed by a processor, implements the laser cleaning energy density real-time monitoring method according to any one of claims 5 to 6.
CN202310786999.6A 2023-06-29 2023-06-29 Laser cleaning energy density real-time monitoring system, method and device Pending CN117030012A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117340427A (en) * 2023-12-06 2024-01-05 深圳市智鼎自动化技术有限公司 Laser energy adjusting device and laser micromachining equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117340427A (en) * 2023-12-06 2024-01-05 深圳市智鼎自动化技术有限公司 Laser energy adjusting device and laser micromachining equipment
CN117340427B (en) * 2023-12-06 2024-02-27 深圳市智鼎自动化技术有限公司 Laser energy adjusting device and laser micromachining equipment

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