CN106441144A - Three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser - Google Patents
Three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser Download PDFInfo
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- CN106441144A CN106441144A CN201610492914.3A CN201610492914A CN106441144A CN 106441144 A CN106441144 A CN 106441144A CN 201610492914 A CN201610492914 A CN 201610492914A CN 106441144 A CN106441144 A CN 106441144A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention discloses a three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser. The method comprises the following steps: a step of outputting a wide-spectrum laser source to the surface of a measured object for scanning; a step of extracting center point pixel coordinates of light spots of scanned images; and a step of converting the center point pixel coordinates to obtain three-dimensional point-cloud data of the measured object. According to the method, the wide-spectrum light source is output when a laser is at a coherent collapse state, for carrying out accurate three-dimensional surface morphology measurement, such that the speckles are effectively inhibited from a hardware perspective, the technical problem that high-frequency useful information in the images are filtered is solved, the image sharpness is improved, and the application field is wide.
Description
Technical field
The present invention relates to photoelectric measurement and detection technique field are and in particular to a kind of suppress the three of speckle based on wide range laser
Dimension topography measurement method.
Background technology
Due to the restriction of the factors such as ambient temperature, processing method, machine tool accuracy, all may in the links of work piece production
Cause the phenomenon that workpiece size is overproof.Therefore, accurate measurement surface of the work three-dimensional appearance, the underproof workpiece of timely rejecting simultaneously will
Defect information feeds back to upstream foundry, has important for the closed loop control realizing work piece production and raising conforming product rate
Meaning.Wherein, for measurement that is flexible or can not contacting object, noncontact measurement is with high accuracy, high efficiency, surface no
Damage the significant advantages such as detection property to be widely used.In many noncontact measurements, structural light measurement method is with its measurement speed
Degree is fast, high precision, high degree of automation, with low cost the advantages of, occupy critical role wherein.
In structural light measurement method, laser is irradiated to object under test surface, is modulated by object surface appearance and forms image,
Then absorbed by CCD camera.According to as moving the relation and actual displacement between, obtain the three dimensional point cloud of body surface.But
It is that when laser is irradiated to testee surface, coherent light interferes, thus creating speckle pattern.The presence fall of speckle
Low CCD gathers the contrast of image, and then affects the extraction accuracy of laser facula peak pixel coordinate, thus affecting final
Measuring surface form precision.Therefore, many scholars have carried out to the method that speckle suppresses studying it is proposed that different software is realized
Method, including swirler blade angle method, is based on wavelet-decomposing method and Statistics-Based Method etc..Swirler blade angle method is to laser facula peak
The extraction of the geometric properties such as value location of pixels is directly effective, but larger for characteristic changings such as phase places, is not suitable for phase place and surveys
The occasion of amount.Method based on wavelet decomposition can obtain preferable effect for the speckle pattern of single pixel yardstick, but uncomfortable
Close most of EPSI experimental image.Come from statistics and information-theoretical space scale wave filter can effectively filter out speckle noise,
But the method cannot distinguish between useful high fdrequency components and noise, is all smoothed, useful information is led to be lost.
Content of the invention
The technical problem existing for prior art, the present invention provides a kind of three-dimensional shaped suppressing speckle based on wide range laser
Looks measuring method, the method is in the relevant state output wide spectrum light source that caves in by laser instrument and is accurately surveyed with carrying out 3 d surface topography
Amount, and then realize the technology that be filtered out that suppress and solve image medium-high frequency useful information effective to speckle from hardware point of view
Problem, improves image definition, and application is extensive.
In order to solve to exist technical problem in prior art, the present invention adopts the following technical scheme that：
A kind of 3 D measuring method suppressing speckle based on wide range laser, including：
It is scanned step to the surface output wide range lasing light emitter of measured object；
Central point pixel coordinate step is extracted to the hot spot of scanogram；
Central point pixel coordinate is carried out with conversion and obtains measured object three dimensional point cloud step；
Described wide range lasing light emitter executes following steps：
The emergent light that laser instrument is sent carries out collimation and obtains collimated light；
Be aligned direct light carries out feedback intensity and adjusts acquisition feedback light；
Feedback light is divided into two bundle process process；A branch of feedback light carries out reflecting and occurs to return after self-mixed interference with emergent light
Return in original optical path, another bundle feedback light output carries out real-time monitoring and intercepts its return original optical path；
When feedback light adjusting strength reaches -16.3dB, emergent light broadening is processed and obtains wide range lasing light emitter.
Described collimated light is that lens obtain to after emergent light collimation in the composite laser carity.
It is to be obtained with the angle of polarization direction by adjusting the optical axis of the half-wave plate in composite laser carity that feedback intensity is adjusted
Splitting ratio.
Described beam splitting processing procedure is to be directed at direct light by the adjustable beam splitter in composite laser carity to be split process；One
Bundle enters reflecting mirror, a branch of entrance monitoring system.
Feedback light real-time monitoring process is monitored by spectrogrph in monitoring system, when feedback intensity reaches reason
Spectrum widening and export wide range lasing light emitter after thinking value.
Described obstruct feedback light processing procedure is to return original optical path by prevention feedback light optically isolated in monitoring system.
Described composite laser carity is by an outgoing end face of semiconductor laser, lens, adjustable beam splitter and reflecting mirror
Constitute.
Described adjustable beam splitter is made up of with polarization beam apparatus half-wave plate.
Described monitoring system is made up of optoisolator, fiber coupler and spectrogrph.
Described optically isolated it is made up of with polarization beam apparatus quarter-wave plate.
Beneficial effect of the present invention：
First, the present invention carries out the adjustment of feedback intensity using adjustable beam splitter, when the feedback intensity obtaining is -16.3dB
When, it is that the output of laser instrument is in relevant state of caving in, now spectrum widening and the laser for many longitudinal mode vibrations, the method is effectively
Suppression laser speckle, three-dimensional imaging is clear, and picture is true to nature.
Second, the method for the present invention makes the full width at half maximum (FWHM) of spectrum by initial state<0.1nm (a) broadening, to 6nm (b), obtains
Required wide spectrum light source, speckle inhibition is good.
3rd, the method for the present invention makes laser speckle contrast successfully be reduced to 0.049 (b) image by 0.717 (a)
Become more fully apparent smooth.
4th, this method speckle inhibition avoids filtering of high frequency useful information while good, finally improves
Measuring three-dimensional morphology precision.
Brief description
Fig. 1 is a kind of 3 D measuring method flow chart suppressing speckle based on wide range laser of the present invention.
Fig. 2 is to implement a kind of 3 D measuring method apparatus structure signal suppressing speckle based on wide range laser of the present invention
Figure.
Fig. 3 is semiconductor laser typical case output spectra in the present invention：(a) single mode stable state and (b) relevant state of caving in.
Fig. 4 is that speckle image compares；A () initial laser irradiation and (b) wide range laser irradiate.
Fig. 5 is diesel engine cylinder cover pictorial diagram, and wherein, A, B, C represent corresponding air flue hole, and 1-4 represents corresponding cylinder.
Fig. 6 is diesel engine cylinder cover 3D surface reconstruction figure：Before speckle suppression (a) and rear (b).
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is made and explaining：
As shown in figure 1, the present invention provides a kind of 3 D measuring method suppressing speckle based on wide range laser, including such as
Lower step：
In figure 101, shown in 102, is scanned step to the surface output wide range lasing light emitter of measured object；
Shown in figure 103, central point pixel coordinate step is extracted to the hot spot of scanogram；In the present invention, scanning system obtains
The light spot image taking is not single pixel, therefore will carry out the extraction of spot center point pixel coordinate.Using the skeleton of hot spot as
Light point frame, obtains normal vector under this framework for the hot spot, then obtains central point pixel coordinate with centroid method under the direction,
So far obtained the pixel coordinate of sub-pixel precision level.
In figure 104, shown in 105, carries out conversion and obtains measured object three dimensional point cloud step to central point pixel coordinate；Right
All light spot images of measured workpiece carry out central point pixel coordinate extraction, carry out coordinate by calibration algorithm to data acquired and turn
Change, obtain the three dimensional point cloud of workpiece for measurement.Reverse engineering software Geomagic is passed through to the three dimensional point cloud being obtained
Studio 8.0 carries out surface reconstruction.
Shown in figure 106, obtain imaging.
Wherein, described wide range lasing light emitter executes following steps：
In figure 1011, shown in 1012, the emergent light that laser instrument is sent carries out collimation and obtains collimated light；Collimated light is to pass through
In composite laser carity, lens are to acquisition after emergent light collimation.Described composite laser carity is by lens, adjustable beam splitter and reflection
Mirror is constituted.Described adjustable beam splitter is made up of with polarization beam apparatus half-wave plate.In the present invention, laser instrument adopts quasiconductor to swash
Light device.
Shown in figure 1013, be aligned direct light carries out feedback intensity and adjusts acquisition feedback light；Feedback light is being divided at two bundles
Reason, it is to obtain splitting ratio by adjusting the optical axis of the half-wave plate in laser cavity with the angle of polarization direction that feedback intensity is adjusted.
Shown in figure 1014, feedback light is divided into two bundles and processes；A branch of feedback light carries out reflection and occurs certainly to mix with emergent light
Conjunction returns in original optical path after interfering, and another bundle feedback light output carries out real-time monitoring and intercepts its return original optical path；Beam splitting is processed
When direct light be directed at by the adjustable beam splitter in laser cavity be split；A branch of entrance reflecting mirror, a branch of entrance monitoring system.Instead
Feedback light carries out reflection and occurs, after self-mixed interference, to repeat in figure 1012 to 1014 step with emergent light.
Shown in figure 1015, when feedback light adjusting strength reaches -16.3dB, emergent light broadening is processed with acquisition wide range and swashs
Light source.Another bundle feedback light output of in figure 1014 step is carried out by real-time monitoring and intercepts its return original optical path；Feedback light is real
When monitoring process be real-time monitoring to be carried out to a branch of feedback light of in figure 1014 step by spectrogrph in monitoring system, when anti-
Feedback intensity reach ideal value after spectrum widening and export the launching light of many longitudinal modes vibration.The obstruct feedback light of in figure 1014 step
Process is to return original optical path by prevention feedback light optically isolated in monitoring system.Described monitoring system is by optoisolator, optical fiber coupling
Clutch and spectrogrph are constituted.Described optically isolated it is made up of with polarization beam apparatus quarter-wave plate.
As shown in Fig. 2 a kind of 3 D measuring method suppressing speckle based on wide range laser of the present invention is by laser
Obtain wide range laser source device and laser scanning system two parts hardware is realized.
Wherein, the present invention obtains wide range laser source device and includes：For launching the semiconductor laser 1 of lasing light emitter, described
Semiconductor laser is made up of two exit end (111,112) faces of laser cavity 11 and semiconductor laser, described recombination laser
Chamber is made up of an outgoing end face (111,112) of 2 semiconductor lasers, lens 21, adjustable beam splitter 22 and reflecting mirror 23.Its
In, described half-wave plate 221 and polarization beam apparatus 222 constitute adjustable beam splitter 22.Described lens 21 carry out standard to the laser receiving
Straight output collimated light, described adjustable beam splitter 22 passes through optical axis and the laser polarization direction of regulation half-wave plate to receiving collimated light
Angle changes splitting ratio and realizes that feedback intensity is adjustable, and meanwhile, the polarization beam apparatus in described adjustable beam splitter 22 enter to feedback light
Row beam splitting is processed, a branch of entrance reflecting mirror 23, described reflecting mirror 23 by feedback light in real time the described composite laser carity of reflection 2 outside with
Launching light is again introduced into composite laser carity 2 after there is mixed interference, in a branch of entrance monitoring system 3.Described monitoring system by every
Constitute from device 31, fiber coupler 32 and spectrogrph 33.Wherein, quarter-wave plate 311 and polarization beam apparatus 312 constitute light every
From device, for stoping feedback light from returning original optical path.When the feedback intensity of feedback light reaches ideal value for -16.3dB so that institute
The launching light stating laser instrument 1 is in relevant state of caving in；In described monitoring system, the rapid broadening of spectrum of 3 spectrogrph 33 output is defeated
Go out many longitudinal mode vibration launching lights, thus obtaining wide range lasing light emitter.
Wherein, described laser scanning system 4, including CCD 41, motor 42, precision one-dimensional translating rails 43 and workpiece
44 composition laser scanning systems.In real work, workpiece for measurement 44 is placed on testboard, semiconductor laser 1 device and
CCD41 is fixed on the same slide block of one-dimensional guide rail 43, drags one-dimensional guide rail by motor 42 and translates.In translation motion
In, laser projections are continuously scanned on the surface of workpiece for measurement, and CCD41 is continuously shot light spot image.
As shown in figure 3, fine adjustment optical feedback intensity, the single mode stable state of acquisition is defeated with the typical case of relevant state of caving in
Go out spectrum.No optical feedback when, laser instrument is output as stable single-mode output.When feedback intensity is -16.3dB, laser
The output of device is in relevant state of caving in, now the rapid broadening of spectrum and for many longitudinal modes vibrations.From the figure 3, it may be seen that the half-peak of spectrum is complete
Width is by initial state<0.1nm (a) broadening, to 6nm (b), obtains required wide spectrum light source.By being in single mode stable state and relevant
The laser of state of caving in irradiates surface of the work, the luminous point speckle image being obtained.Contrast Fig. 4 (a) and (b) can be seen that at laser
In relevant cave in state when, image becomes more fully apparent smooth, and therefore speckle inhibition is obvious.Analytical calculation understands, speckle pair
Successfully it is reduced to 0.049 (b) by 0.717 (a) than degree.
As shown in figure 5, being based on Structure light method, respectively using initial laser and wide range laser to diesel engine cylinder cover surface topography
Accurate measurement, obtains the three-dimensional appearance cloud data of its air inlet face and ground level, carries out three-dimensional surface using reverse engineering software
Reconstruct, contrast Fig. 6 (a) and (b) is as can be seen that become apparent from smoothing using reconstructed image after the suppression of wide range laser speckle, with reality
Border surface character information is coincide good.Extract the centre coordinate in each air flue hole, be compared (table 1), speckle with normal data
Higher certainty of measurement is obtained after suppression.
Table 1
The actual mechanical process of the present invention：After the emergent light of this wide spectrum light source is by the collimated of below focal length 2mm, irradiate
To cylinder of diesel engine cap surface (air inlet face and baseplane), CCD camera shoots the dot pattern picture being formed in surface of the work, by feature
Extract and obtain sub-pixel spot center position, obtain body surface three-dimensional cloud data using optic triangle method, using reverse
Engineering software Geomagic Studio 8.0 carries out surface reconstruction, extracts the center in each air flue hole additionally by certain algorithm
Coordinate.Using CCD camera resolution be 1600 × 1200, pixel dimension be 4.4 μm of 4.4 μ m.In order to simulate human eye
Visual Observations Observations effect, the time of integration of setting camera is 40ms.
Examples detailed above is merely to illustrate the present invention, and the structure of wherein each part, material, connected mode are all to have become
Change, every equivalents carrying out on the basis of the technology of the present invention and improvement, all should not exclude the protection model in the present invention
Outside enclosing.
Claims (10)
1. a kind of 3 D measuring method suppressing speckle based on wide range laser, including：
It is scanned step to the surface output wide range lasing light emitter of measured object；
Central point pixel coordinate step is extracted to the hot spot of scanogram；
Central point pixel coordinate is carried out with conversion and obtains measured object three dimensional point cloud step；
It is characterized in that described wide range lasing light emitter executes following steps：
The emergent light that laser instrument is sent carries out collimation and obtains collimated light；
Be aligned direct light carries out feedback intensity and adjusts acquisition feedback light；
Feedback light is divided into two bundle process process；A branch of feedback light carry out reflection with emergent light generation self-mixed interference after return former
In light path, another bundle feedback light output carries out real-time monitoring and intercepts its return original optical path；
When feedback light adjusting strength reaches -16.3dB, emergent light broadening is processed and obtains wide range lasing light emitter.
2. a kind of 3 D measuring method suppressing speckle based on wide range laser according to claim 1, its feature exists
Obtain after being that lens are to emergent light collimation in the composite laser carity in, described collimated light.
3. a kind of 3 D measuring method suppressing speckle based on wide range laser according to claim 1, its feature exists
In it is to obtain beam splitting by adjusting the optical axis of the half-wave plate in composite laser carity with the angle of polarization direction that feedback intensity is adjusted
Than.
4. a kind of 3 D measuring method suppressing speckle based on wide range laser according to claim 1, its feature exists
In described beam splitting processing procedure is to be directed at direct light by the adjustable beam splitter in composite laser carity to be split process；A branch of enter
Enter reflecting mirror, a branch of entrance monitoring system.
5. a kind of 3 D measuring method suppressing speckle based on wide range laser according to claim 1, its feature exists
In being monitored by spectrogrph in monitoring system to feedback light real-time monitoring process, when feedback intensity reaches ideal value
Spectrum widening and export wide range lasing light emitter afterwards.
6. a kind of 3 D measuring method suppressing speckle based on wide range laser according to claim 1, its feature exists
In described obstruct feedback light processing procedure is to return original optical path by prevention feedback light optically isolated in monitoring system.
7. a kind of 3 D measuring method suppressing speckle based on wide range laser according to claim 2, its feature exists
It is to be made up of an outgoing end face of semiconductor laser, lens, adjustable beam splitter and reflecting mirror in, described composite laser carity.
8. a kind of 3 D measuring method suppressing speckle based on wide range laser according to claim 4, its feature exists
In described adjustable beam splitter is made up of with polarization beam apparatus half-wave plate.
9. according to claim 5 a kind of laser speckle suppressing method it is characterised in that described monitoring system is by optically isolated
Device, fiber coupler and spectrogrph are constituted.
10. according to claim 6 a kind of laser speckle suppressing method it is characterised in that described optically isolated be by four/
One wave plate and polarization beam apparatus composition.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850144A (en) * | 2018-04-12 | 2020-02-28 | 安徽大学 | Voltage sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
| CN112684463A (en) * | 2020-12-21 | 2021-04-20 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN114018177A (en) * | 2021-11-18 | 2022-02-08 | 南昌航空大学 | Mirror surface object three-dimensional measurement method based on speckle pattern |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850144A (en) * | 2018-04-12 | 2020-02-28 | 安徽大学 | Voltage sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
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| CN112684463B (en) * | 2020-12-21 | 2024-03-26 | 武汉光目科技有限公司 | Area array sweep frequency measuring device and method |
| CN114018177A (en) * | 2021-11-18 | 2022-02-08 | 南昌航空大学 | Mirror surface object three-dimensional measurement method based on speckle pattern |
| CN114018177B (en) * | 2021-11-18 | 2023-12-26 | 南昌航空大学 | Three-dimensional measurement method for mirror surface object based on speckle pattern |
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