CN117008481A - Pressure parameter optimization-based reaction kettle process control method and device - Google Patents
Pressure parameter optimization-based reaction kettle process control method and device Download PDFInfo
- Publication number
- CN117008481A CN117008481A CN202311287972.9A CN202311287972A CN117008481A CN 117008481 A CN117008481 A CN 117008481A CN 202311287972 A CN202311287972 A CN 202311287972A CN 117008481 A CN117008481 A CN 117008481A
- Authority
- CN
- China
- Prior art keywords
- pressure
- reaction kettle
- temperature
- gas
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 150
- 238000000034 method Methods 0.000 title claims abstract description 91
- 238000005457 optimization Methods 0.000 title claims abstract description 48
- 238000004886 process control Methods 0.000 title claims abstract description 32
- 238000012937 correction Methods 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims description 23
- BULVZWIRKLYCBC-UHFFFAOYSA-N phorate Chemical compound CCOP(=S)(OCC)SCSCC BULVZWIRKLYCBC-UHFFFAOYSA-N 0.000 claims description 23
- 239000011159 matrix material Substances 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 7
- 238000004364 calculation method Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 2
- 238000011478 gradient descent method Methods 0.000 claims description 2
- 238000006467 substitution reaction Methods 0.000 claims description 2
- 238000009529 body temperature measurement Methods 0.000 abstract description 4
- 238000009530 blood pressure measurement Methods 0.000 abstract description 2
- 238000009826 distribution Methods 0.000 abstract description 2
- 230000004927 fusion Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 57
- 238000003756 stirring Methods 0.000 description 6
- 230000001276 controlling effect Effects 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004422 calculation algorithm Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 101100272279 Beauveria bassiana Beas gene Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/0013—Controlling the temperature of the process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/18—Stationary reactors having moving elements inside
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00058—Temperature measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00065—Pressure measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
- B01J2219/00094—Jackets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00162—Controlling or regulating processes controlling the pressure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Software Systems (AREA)
- Medical Informatics (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Evolutionary Computation (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Artificial Intelligence (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention relates to the technical field of reaction kettle control, in particular to a reaction kettle process control method and device based on pressure parameter optimization. Firstly, acquiring temperature values and pressure values of the same height and different positions, and calculating to obtain a temperature average value and a pressure average value which can show the height characteristics; then, performing pressure measurement correction on the temperature average value through an EKF, and simultaneously updating the pressure average value to reduce noise influence generated by pressure, so as to obtain a gas temperature optimized value and a gas pressure optimized value; then, the gas temperatures with different heights are subjected to weight distribution and then data fusion to obtain a more accurate final value of the gas temperature in the reaction kettle, and the gas pressures with different heights are optimized and averaged to obtain a more accurate final value of the gas pressure so as to respectively and correspondingly perform accurate temperature control and pressure control, thereby solving the problem that the control precision is affected due to the fact that errors exist in the temperature measurement in the existing reaction kettle.
Description
Technical Field
The invention relates to the technical field of reaction kettle control, in particular to a reaction kettle process control method based on pressure parameter optimization and a reaction kettle process control device based on pressure parameter optimization, wherein the reaction kettle process control device is used.
Background
The reaction kettle is a container with physical or chemical reaction, and the functions of heating, evaporating, cooling and low-speed and high-speed mixing required by the process are realized through the structural design and parameter configuration of the container.
One important parameter affecting the reaction kettle production efficiency and effect is temperature. Because the reaction kettle is internally provided with the stirring device, stirring can be carried out during the reaction, and the temperature of the reactant and the temperature of the gas above the reactant can be approximately regarded as the same temperature parameter, namely the temperature in the reaction kettle.
In the prior art, the temperature in the reaction kettle is generally controlled by directly measuring the temperature in the reaction kettle by adopting a temperature sensor arranged at a single position. Firstly, temperature values may be different at different heights or different positions of the same height, so that only a single position is set, and the temperature acquisition has one-sided property; on the other hand, the influence of other factors (such as pressure) in the closed container on the temperature measurement is not considered, so that the temperature measurement is error, and the control accuracy of the temperature of the reaction kettle is affected.
Disclosure of Invention
Based on the above, it is necessary to provide a method and a device for controlling a process of a reaction kettle based on optimization of pressure parameters, aiming at the problem that the control accuracy is affected by errors in temperature measurement in the existing reaction kettle.
The invention is realized by adopting the following technical scheme:
in a first aspect of the present disclosure, a method for controlling a process of a reaction vessel based on optimization of pressure parameters is provided, comprising the steps of:
step one, obtaining the current momentt k Height in reaction kettleh i Location NojGas temperature values at various locationsT ikj And calculate the average value。
Acquiring the current timet k Height in reaction kettleh i Location NojGas pressure values at each locationP ikj And calculate the average value。
Acquiring the current timet k Volume of gas in reaction vesselV k 。
Step two, binding by EKFFor->Performing prediction correction to obtain the current momentt k Height in reaction kettleh i Gas temperature optimum at ∈>. Wherein (1)>For the last momentt k-1 Height in reaction kettleh i Is a pressure optimized value.
For a pair ofOptimizing to obtain the current momentt k Height in reaction kettleh i Optimized value of the pressure->. Wherein,；a、bis a weight coefficient; />For the current momentt k Height in reaction kettleh i A pressure update value at;；/>for the last momentt k-1 Height in reaction kettleh i A pressure update value at; />For the last momentt k-1 Height in reaction kettleh i A gas temperature optimum value at;V k for the current momentt k The volume of gas in the reaction kettle;V k-1 for the last momentt k-1 The volume of gas in the reaction kettle.
Step three, calculatingMean value of>And will->As the current timet k Final value of gas pressure in the reaction vessel.
Calculation based on optimization methodCorresponding weighting coefficientsω ik And then obtain the fused temperature dataAnd will->As the current timet k Final value of gas temperature in the reaction vessel.
Step four, according toThe temperature of the reaction kettle is adjusted according to a preset rule; according to->And (3) performing pressure adjustment on the reaction kettle according to a second preset rule.
The pressure parameter optimization-based reactor process control method implements a method or process according to embodiments of the present disclosure.
In a second aspect of the present disclosure, there is provided a pressure parameter optimization-based reactor process control apparatus, using the pressure parameter optimization-based reactor process control method disclosed in the first aspect.
The reaction kettle process control device based on pressure parameter optimization comprises: the device comprises a data detection module, a data processing module, a temperature adjustment module and a pressure adjustment module.
The data detection module comprises a temperature detection module, a pressure detection module and a volume detection module; the temperature detection module is used for obtaining the current momentt k Height in reaction kettleh i Location NojGas temperature values at various locationsT ikj The method comprises the steps of carrying out a first treatment on the surface of the The pressure detection module is used for acquiring the current momentt k Height in reaction kettleh i Location NojGas pressure values at each locationP ikj Volume detection moduleFor obtaining the current timet k Volume of gas in reaction vesselV k 。
The data processing module is used for calculating an average valueThe method comprises the steps of carrying out a first treatment on the surface of the Calculate the average +.>The method comprises the steps of carrying out a first treatment on the surface of the For->Performing pressure optimization to obtain a pressure optimization value +.>The method comprises the steps of carrying out a first treatment on the surface of the Binding via EKF->For->Performing prediction correction to obtain the current momentt k Height in reaction kettleh i Gas temperature optimum at ∈>The method comprises the steps of carrying out a first treatment on the surface of the Calculate->Mean value of>The method comprises the steps of carrying out a first treatment on the surface of the Calculating ∈>Corresponding weighting coefficientsω ik And obtain the fused temperature data +.>。
The temperature adjusting module is used for adjusting the temperature according toAnd (5) carrying out temperature adjustment on the reaction kettle according to a preset rule. The pressure adjusting module is used for adjusting the pressure according to->And (3) performing pressure adjustment on the reaction kettle according to a second preset rule.
Such pressure parameter optimization-based reactor process control devices implement methods or processes according to embodiments of the present disclosure.
Compared with the prior art, the invention has the following beneficial effects:
firstly, acquiring temperature values and pressure values of the same height and different positions, and calculating to obtain a temperature average value and a pressure average value which can show the height characteristics; then, performing pressure measurement correction on the temperature average value through an EKF, and simultaneously updating the pressure average value to reduce noise influence generated by pressure, so as to obtain a gas temperature optimized value and a gas pressure optimized value; and then, carrying out weight distribution on the gas temperatures at different heights and then carrying out data fusion to obtain a more accurate final value of the gas temperature in the reaction kettle, and carrying out optimization and averaging on the gas pressures at different heights to obtain a more accurate final value of the gas pressure so as to respectively and correspondingly carry out accurate temperature control and pressure control.
And 2, the invention also encrypts and stores the calculated final value of the gas temperature and the final value of the gas pressure in the reaction kettle by adopting an SHA-3 algorithm so as to ensure the safety of data.
Drawings
FIG. 1 is a flow chart of a method for controlling a process of a reaction kettle based on optimization of pressure parameters in the invention;
FIG. 2 is a block diagram of a reaction vessel to which the control method of FIG. 1 is specifically applied;
in the drawings, the list of components represented by the various numbers is as follows:
1. oxygen valve, 2, heater, 3, heat exchanger, 4, outlet cooling water valve, 5, inlet cooling water valve, 6, circulating pump, 7, kettle body, 8, stirring device, 9, jacket, 10, pressure release valve, 11, flexible sensor, 12, volume sensor.
The foregoing general description of the invention will be described in further detail with reference to the drawings and detailed description.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that when an element is referred to as being "mounted to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "secured to" another element, it can be directly secured to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "or/and" as used herein includes any and all combinations of one or more of the associated listed items.
Example 1
Referring to fig. 1, a flow chart of a method for controlling a process of a reaction kettle based on optimization of pressure parameters in the present invention is shown. The control method is particularly applied to the reaction kettle, and the structure of the reaction kettle can be various. Referring to fig. 2, a structural diagram of a reaction kettle to which the control method of embodiment 1 is specifically applied is shown.
As shown in fig. 2, the reaction kettle comprises a kettle body 7 and a jacket 9 for accommodating a heat exchange medium. The jacket 9 is arranged at the periphery of the kettle body 7 and is used for enabling the heat exchange medium to exchange heat for the kettle body 7. The heat exchange medium can be heat conduction oil or water. The jacket 9 is connected with a temperature adjusting device, and the temperature of the jacket 9 is adjusted by the temperature adjusting device. The temperature adjusting device can directly adopt a constant temperature tank or a mode of multi-component assembly: the heater 2, the heat exchanger 3 and the circulating pump 6 are arranged on one side of the jacket 9, the top of the jacket 9 is connected with a liquid inlet of the heater 2, a liquid outlet of the heater 2 is connected with a heat medium inlet of the heat exchanger 3, a heat medium outlet of the heat exchanger 3 is connected with an inlet of the circulating pump 6, and an outlet of the circulating pump 6 is connected with the bottom of the jacket 9. The cold medium inlet and outlet of the heat exchanger 3 is connected with a cooling water source and is respectively provided with a cooling water outlet valve 4 and a cooling water inlet valve 5, and the whole forms controllable circulation. That is, when the reaction kettle needs to be cooled, the reaction kettle can be cooled by reducing the temperature of the temperature adjusting device or/and adjusting the flow speed of the heat exchange medium. When the temperature of the reaction kettle is required to be raised, the temperature of the temperature regulating device can be raised, or/and the flow rate of the heat exchange medium can be adjusted, so that the temperature of the reaction kettle is raised.
The stirring device 8 is arranged in the kettle body 7, and the stirring device 8 is driven by an external servo motor to stir reactants in the kettle body 7.
The inner top of the kettle body 7 is provided with a volume sensor 12 for detecting the current momentt k Volume of gas in reaction vesselV k 。
The top of the kettle body 7 is also provided with an oxygen-introducing valve 1 and a pressure relief valve 10 for adjusting the pressure of the reaction kettle. Specifically, when both valves are kept closed, the air tightness in the kettle body 7 is ensured. The pressure relief valve 10 is opened to perform air discharge and pressure relief, and the oxygen opening valve 1 is opened to perform air intake pressurization.
The kettle body 7 is internally and evenly provided withnA plurality of temperature sensors, each plurality of temperature sensors includingmA plurality of; first, theiOf groups ofmThe temperature sensors are distributed at the height in the reaction kettleh i Is a different location of (c). Wherein, the firstjThe temperature sensors are used for detecting the current momentt k Height in reaction kettleh i Location NojGas temperature values at various locationsT ikj 。
The kettle body 7 is internally and evenly provided withnGroup pressure sensorEach group of pressure sensors comprisesmA plurality of; first, theiOf groups ofmThe pressure sensors are distributed at the height in the reaction kettleh i Of (3), whereinjThe pressure sensors are used for detecting the current momentt k Height in reaction kettleh i Location NojGas pressure values at each locationP ikj 。
In this embodiment 1, the temperature sensor and the pressure sensor both adopt the flexible sensor 11, which has the advantages of small volume and convenient installation, and can be arranged at a plurality of positions at the same height, thereby facilitating wiring. As shown in fig. 2, only one set of flexible sensors 11 is shown, but in practice, a plurality of sets of flexible sensors 11 are distributed in the kettle body 7.
Based on the structure of the reaction kettle, the reaction kettle process control method based on pressure parameter optimization of the embodiment 1 comprises the following steps:
in a first step, the first step is to provide a first step,
acquiring the current timet k Height in reaction kettleh i Location NojGas temperature values at various locationsT ikj And calculate the average value。
Acquiring the current timet k Height in reaction kettleh i Location NojGas pressure values at each locationP ikj And calculate the average value。
Acquiring the current timet k Volume of gas in reaction vesselV k 。
See above forT ikj Namely from the firstiGroup ofmFirst of the temperature sensorsjAnd a plurality of temperature sensors. For the followingP ikj Namely from the firstiGroup ofmFirst of the pressure sensorsjAnd obtaining the pressure sensors. For the followingV k I.e. from the volume sensor 12.
Will beAs the current timet k Height in reaction kettleh i Temperature observations at; as the current timet k Height in reaction kettleh i Pressure observations at.i=1,2…n；j=1,2…m。
Step two, a step two of the method,
binding by EKFFor->Performing prediction correction to obtain the current momentt k Height in reaction kettleh i Gas temperature optimum at ∈>；
Wherein,for the last momentt k-1 Height in reaction kettleh i Is a pressure optimized value.
For a pair ofOptimizing to obtain the current momentt k Height in reaction kettleh i Optimized value of the pressure->。
First look atObtain->Is a process of (2)Namely->The optimizing process specifically comprises the following steps:
first, obtaining the last timet k-1 Height in reaction kettleh i Optimized value of gas temperature atThe method comprises the steps of carrying out a first treatment on the surface of the It should be noted that ∈>The last time is needed to passt k-1 The EKF predicts the corrective course, creating a closed loop effect between temperature and pressure.
Second, calculating the current timet k Height in reaction kettleh i Pressure update value at；
The method comprises the steps of carrying out a first treatment on the surface of the Wherein (1)>For the last momentt k-1 Height in reaction kettleh i A pressure update value at;for the last momentt k-1 Height in reaction kettleh i A gas temperature optimum value at;V k for the current momentt k The volume of gas in the reaction kettle;V k-1 for the last momentt k-1 The volume of gas in the reaction kettle.
Third step, calculate. Wherein,a、bis a weight coefficient; for the followinga、bThe requirements of (2) are as follows:a∈[0,1]，b∈[0,1]，a+b=1。
review ofObtain->The process of (1) is the current timet k The EKF of (a) predicts the course of correction. Wherein it is required to use，/>Then use and +.>The same procedure results in a closed loop effect between temperature and pressure.
The method specifically comprises the following steps:
s101, establishing the current momentt k Prediction equation for pressure versus temperature:
；
wherein,for the current momentt k The prior predicted value of the gas temperature in the reaction kettle,w k-1 for the last momentt k-1 Process noise of the system;α、β、γis a constant; />For the last momentt k-1 Posterior estimate of pressure in tank->。
It should be noted that the prediction equation is constructed based on the Clausius-Clapeyron equation and the ideal gas state equation.
S102, establishing the current momentt k Temperature observation equation in reaction kettleZ ik ：
；
Wherein,v k for the current momentt k Measurement noise of the system.
S103, carrying out prior estimation on the temperature of the gas in the reaction kettle:
this is because the influence of the system noise, i.e., the process noise is 0, is not considered in the a priori estimation calculation.
S104, calculating gas temperature covariance:
wherein,for the current momentt k A predicted value of gas temperature covariance; />For the last momentt k-1 A posterior estimate of gas temperature covariance.
Is->And (5) linearizing to obtain the jacobian matrix. I.e. < ->Will->At the position of、/>Solving bias guide and introducing internal process noise +.>. Wherein (1)>Representing the last timet k-1 And (5) a posterior estimation value of the gas temperature in the reaction kettle.
For gas temperature spread kalman filter process noise,w k is the current timet k Is a function of the gas temperature process noise of (a),Qis process noisew k Is a covariance matrix of (a);
s105, calculating a gas temperature gain coefficient:
；
wherein,K ik for the current momentt k Is a gain factor of (a).HFor the observation equationZ ik Is a coefficient matrix of (a).
Measurement noise for gas temperature extended kalman filtering,v k is the current step of measuring noise for the gas temperature,Rto measure noisev k Is a covariance matrix of (a).
S106, performing posterior estimation on the temperature of the gas in the reaction kettle:
；
wherein,for the current momentt k A posterior estimation value of the gas temperature in the reaction kettle; />Is a nonlinear expression of the expected value of the gas temperature.
Obtaining the target parameter value +.>。
The system noise contribution is likewise not taken into account in the posterior estimation, i.e. the process noise is 0.
S107, update the gas temperature covariance:
；
wherein,C ik for the current momentt k A posterior estimate of the gas temperature covariance,Iis an identity matrix.
Step three, calculatingMean value of>And will->As the current timet k Final value of gas pressure in the reaction vessel.
Calculation based on optimization methodCorresponding weighting coefficientsω ik And then obtain the fused temperature dataAnd will->As the current timet k Final value of gas temperature in the reaction vessel.
In the second step, a current time can be obtained for different heightst k Temperature observations and pressure observations. For final control, the current moment of the reaction kettle can be represented by conversion based on temperature observation values and pressure observation values of different heightst k Temperature value, pressure value of (c).
In this example 1, the pressure was calculated by directly averagingAnd takes the average value as the current timet k Final value of gas pressure in the reaction vessel.
For the temperature, calculating a weighting coefficient based on an optimization method, and then obtaining the temperature by weighting calculationThe method comprises the following specific steps of:
s201, dividing the inside of the reaction kettle into parts along the height direction of the reaction kettlenA subsystem; wherein,h i corresponds to the firstiAnd a subsystem.
S202, build the firstiWeighted error function for subsystems：
；
Wherein,ω ik is thatWeight coefficient of (c) in the above-mentioned formula (c).
S203, using a weighted least square method pairDeviation guide is calculated:
；
wherein,f (P,K) Representing pressureTAnd temperaturePIs derived from S103) and expressed as:
f (P,K)：。
s204, using gradient descent methodAnd (3) substitution:
；
wherein,λrepresenting an update step size;λ∈[0,n]the specific value is adjusted according to the actual value.
S205, simultaneous
Calculated outω ik 。
Then based onω ik Building a weighted formulaThus obtaining +.>。
Step four, according toThe temperature of the reaction kettle is adjusted according to a preset rule; according to->And (3) performing pressure adjustment on the reaction kettle according to a second preset rule.
Specifically, the preset rule one includes:
judgingWhether it is in a preset temperature range;
if it isJudging +.>Relationship with upper and lower temperature limits of the temperature range;
wherein if itThe temperature is higher than the upper limit temperature of the temperature range, and the reaction kettle is cooled;
if it isAnd (3) heating the reaction kettle at a temperature lower than the lower limit temperature of the temperature range.
In addition, ifIn a preset temperature range, no operation is performed.
The preset rule II comprises the following steps:
judgingWhether in a predetermined pressure range;
if it isJudging +.>Relationship with upper pressure and lower pressure of pressure range;
wherein if itThe pressure is greater than the upper limit pressure of the pressure range, and the pressure of the reaction kettle is relieved;
if it isAnd (3) pressurizing the reaction kettle when the pressure is smaller than the lower limit pressure of the pressure range.
In addition, in the case of the optical fiber,if the pressure is within the preset pressure range, the operation is not performed.
In another embodiment, there is a second method of autoclave process control based on pressure parameter optimization: before the fourth step, the SHA-3 method is used for obtaining the product in the third step、/>And (5) performing encryption storage. SHA-3 is a third generation secure hash algorithm, and has the characteristics of high encryption speed and high security.
、/>Is the same as the encryption process of (a) here only +.>An example is described. Specific: invoking SHA-3 library generationHash value of (a)α k And do->Encryption using a preset key to obtain an encrypted value A k And then A is carried out k And (3) withα k Binding together to form A k ||α k And stored. Thus, the encrypted storage is completed.
For encrypting and storing、/>And (3) performing decryption, and if the decryption is correct, performing step four. Or +.>The following description is given for the sake of example: call +.>When in use, the stored A is firstly called k ||α k And check A k ||α k Whether or not to contain hash valueα k The method comprises the steps of carrying out a first treatment on the surface of the If call A k ||α k Without hash valuesα k And indicating that the data is not trusted because the data is called by mistake or tampered in the transmission process. If call A k ||α k Containing hash valuesα k Then continue to decrypt with the preset key to get +.>Based on the decryption +.>And controlling.
Used in step four、/>Is stored from encryption>、/>Extracting. That is, the encryption is stored first +.>、/>Decryption is performed, only correct decryption is achieved>、/>And step four can be smoothly performed.
Example 2
Example 2 first discloses a first pressure parameter optimization-based reactor process control apparatus, using the pressure parameter optimization-based reactor process control method disclosed in example 1.
The reaction kettle process control device based on pressure parameter optimization comprises: the device comprises a data detection module, a data processing module, a temperature adjustment module and a pressure adjustment module.
The data detection module comprises a temperature detection module, a pressure detection module and a volume detection module. The temperature detection module is used for obtaining the current momentt k Height in reaction kettleh i Location NojGas temperature values at various locationsT ikj . The pressure detection module is used for acquiring the current momentt k Height in reaction kettleh i Location NojGas pressure values at each locationP ikj . The volume detection module is used for acquiring the current momentt k Volume of gas in reaction vesselV k 。
The data processing module is used for carrying out the following processes:
1, calculating an average value；
2, calculating the average value；
3, toPerforming pressure optimization to obtain a pressure optimization value +.>；
4, binding by EKFFor->Performing prediction correction to obtain the current momentt k Height in reaction kettleh i Gas temperature optimum at ∈>；
5, calculatingMean value of>；
6, calculating based on the optimization methodCorresponding weighting coefficientsω ik And obtain fused temperature data。
The temperature adjusting module is used for adjusting the temperature according toA pair of reaction kettles enter according to a preset ruleAnd (5) row temperature adjustment. The pressure adjusting module is used for adjusting the pressure according to->And (3) performing pressure adjustment on the reaction kettle according to a second preset rule.
Of course, this embodiment 2 also discloses a second reactor process control device based on pressure parameter optimization, and uses the second reactor process control method based on pressure parameter optimization disclosed in embodiment 1.
The second pressure parameter-based optimized reactor process control apparatus is substantially the same as above, except that it further comprises: an encryption module and a decryption module.
The encryption module is used for obtaining the data processing module by using the SHA-3 method、/>And (5) performing encryption storage.
The decryption module is used for encrypting and storing、/>Decrypting; if decryption is correct, get->、/>。
Then, the temperature adjustment module is based onIs derived from the decryption module>. The pressure adjusting module is based on->Is derived from the decryption module>. Compared to directly retrieving +.>、/>By encrypting and decrypting, the communication security during data transmission can be ensured.
Example 3
Embodiment 3 discloses a readable storage medium, in which computer program instructions are stored, which when read and executed by a processor, perform the steps of the pressure parameter optimization-based reactor process control method disclosed in embodiment 1.
The method of embodiment 1 may be applied in the form of software, such as a program designed to be independently executable on a computer-readable storage medium, which may be a usb disk, through which the program is designed to start the entire method by external triggering.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (10)
1. The reaction kettle process control method based on pressure parameter optimization is characterized by comprising the following steps of:
step one, obtaining the current momentt k Height in reaction kettleh i Location NojGas temperature values at various locationsT ikj And calculate the average valueThe method comprises the steps of carrying out a first treatment on the surface of the Acquiring the current timet k Height in reaction kettleh i Location NojGas pressure values at each locationP ikj And calculate the average +.>The method comprises the steps of carrying out a first treatment on the surface of the Acquiring the current timet k Volume of gas in reaction vesselV k ；
Wherein,for the current momentt k Height in reaction kettleh i Temperature observations at; />For the current momentt k Height in reaction kettleh i A pressure observation at;i=1,2…n；j=1,2…m；
step two, binding by EKFFor->Performing prediction correction to obtain the current momentt k Height in reaction kettleh i Gas temperature optimum at ∈>The method comprises the steps of carrying out a first treatment on the surface of the Wherein (1)>For the last momentt k-1 Height in reaction kettleh i A pressure optimization value;
for a pair ofOptimizing to obtain the current momentt k Height in reaction kettleh i Optimized value of the pressure->；
Wherein,；a、bis a weight coefficient; />For the current momentt k Height in reaction kettleh i A pressure update value at; />；/>For the last momentt k-1 Height in reaction kettleh i A pressure update value at; />For the last momentt k-1 Height in reaction kettleh i A gas temperature optimum value at;V k for the current momentt k The volume of gas in the reaction kettle;V k-1 for the last momentt k-1 The volume of gas in the reaction kettle;
step three, calculatingMean value of>And will->As the current timet k A final value of gas pressure in the reaction kettle;
calculation based on optimization methodCorresponding weighting coefficientsω ik And then obtain the fused temperature dataAnd will->As the current timet k A final value of the gas temperature in the reaction kettle;
step four, according toThe temperature of the reaction kettle is adjusted according to a preset rule; according to->And (3) performing pressure adjustment on the reaction kettle according to a second preset rule.
2. The pressure parameter optimization-based reactor process control method according to claim 1, wherein: in step two, binding by EKFFor->The method for performing predictive correction includes:
s101, establishing the current momentt k Prediction equation for pressure versus temperature:
；
wherein,for the current momentt k The prior predicted value of the gas temperature in the reaction kettle,w k-1 for the last momentt k-1 Process noise of the system;α、β、γis a constant; />For the last momentt k-1 Posterior estimate of pressure in the tank->；
S102, establishing the current momentt k Temperature observation equation in reaction kettleZ ik ：
；
Wherein,v k for the current momentt k Measuring noise of the system;
s103, carrying out prior estimation on the temperature of the gas in the reaction kettle:
；
s104, calculating gas temperature covariance:
；
wherein,for the current momentt k A predicted value of gas temperature covariance; />For the last momentt k-1 A posterior estimate of gas temperature covariance; />Is->Linearizing to obtain a jacobian matrix;
for gas temperature spread kalman filter process noise,w k is the current timet k Is a function of the gas temperature process noise of (a),Qis process noisew k Is a covariance matrix of (a);
s105, calculating a gas temperature gain coefficient:
；
wherein,K ik for the current momentt k Is used for the gain factor of (a),Hfor the observation equationZ ik Coefficient matrix of (a);measurement noise for gas temperature extended kalman filtering,v k is the current step of measuring noise for the gas temperature,Rto measure noisev k Is a covariance matrix of (a);
s106, performing posterior estimation on the temperature of the gas in the reaction kettle:
；
wherein,for the current momentt k A posterior estimation value of the gas temperature in the reaction kettle; />；
Is a nonlinear expression of the expected value of the gas temperature;
s107, update the gas temperature covariance:
；
wherein,C ik for the current momentt k A posterior estimate of the gas temperature covariance,Iis an identity matrix.
3. The pressure parameter optimization-based reactor process control method according to claim 2, wherein: in step three, calculating based on the optimization methodCorresponding weighting coefficientsω ik The method of (1) comprises:
s201, dividing the inside of the reaction kettle into parts along the height direction of the reaction kettlenA subsystem; wherein,h i corresponds to the firstiA subsystem;
s202, build the firstiWeighted error function for subsystems：
；
Wherein,ω ik is thatWeight coefficient of (2);
s203, using a weighted least square method pairDeviation guide is calculated:
；
wherein,f (P,K) Representing pressureTAnd temperaturePIs expressed as:
f (P,K)：；
s204, using gradient descent methodAnd (3) substitution:
；
wherein,λrepresenting an update step size;
s205, simultaneousCalculated outω ik 。
4. The pressure parameter optimization-based reaction kettle process control method according to claim 1, wherein the reaction kettle comprises a kettle body;
the kettle body is uniformly provided withnA plurality of temperature sensors, each plurality of temperature sensors includingmA plurality of; first, theiOf groups ofmThe temperature sensors are distributed at the height in the reaction kettleh i Of (3), whereinjThe temperature sensors are used for detectingT ikj ；
The kettle body is uniformly provided withnA plurality of pressure sensors, each plurality of pressure sensors includingmA plurality of; first, theiOf groups ofmThe pressure sensors are distributed at the height in the reaction kettleh i Of (3), whereinjThe pressure sensors are used for detectingP ikj ；
The top of the kettle body is provided with a volume sensor for detectingV k 。
5. The pressure parameter optimization-based reaction kettle process control method according to claim 4, wherein the reaction kettle further comprises a jacket for accommodating a heat exchange medium, and the jacket is arranged outside the kettle body and used for enabling the heat exchange medium to exchange heat with the kettle body;
the top of the kettle body is also provided with an oxygen-introducing valve and a pressure-releasing valve for adjusting the pressure of the reaction kettle.
6. The pressure parameter optimization-based reactor process control method according to claim 1, wherein the preset rule one includes:
judgingWhether it is in a preset temperature range;
if it isJudging +.>Relationship with upper and lower temperature limits of the temperature range;
wherein if itThe temperature is higher than the upper limit temperature of the temperature range, and the reaction kettle is cooled;
if it isAnd heating the reaction kettle at a temperature lower than the lower limit temperature of the temperature range.
7. The pressure parameter optimization-based reactor process control method according to claim 6, wherein the preset second rule comprises:
judgingWhether in a predetermined pressure range;
if it isJudging +.>Relationship with upper and lower pressure limits of the pressure range;
wherein if itThe pressure is greater than the upper limit pressure of the pressure range, and the pressure of the reaction kettle is relieved;
if it isAnd (3) pressurizing the reaction kettle when the pressure is smaller than the lower limit pressure of the pressure range.
8. The pressure parameter optimization-based reactor process control method according to claim 1, wherein the step three is performed by using the SHA-3 method before the step four、/>Encrypting and storing;
for encrypting and storing、/>And (3) performing decryption, and if the decryption is correct, performing step four.
9. A pressure parameter optimization-based reaction kettle process control device, characterized in that the pressure parameter optimization-based reaction kettle process control method according to any one of claims 1 to 7 is used;
the reaction kettle process control device based on pressure parameter optimization comprises:
the data detection module comprises a temperature detection module, a pressure detection module and a volume detection module; the temperature detection module is used for obtaining the current momentt k Height in reaction kettleh i Location NojGas temperature values at various locationsT ikj The method comprises the steps of carrying out a first treatment on the surface of the The pressure detection module is used for obtaining the current moment
t k Height in reaction kettleh i Location NojGas pressure values at each locationP ikj The volume detection module is used for acquiring the current momentt k Volume of gas in reaction vesselV k ；
A data processing module for calculating an average valueThe method comprises the steps of carrying out a first treatment on the surface of the Calculate the average +.>The method comprises the steps of carrying out a first treatment on the surface of the For->Performing pressure optimization to obtain a pressure optimization value +.>The method comprises the steps of carrying out a first treatment on the surface of the Binding via EKF->For->Performing prediction correction to obtain the current momentt k Height in reaction kettleh i Gas temperature optimum at ∈>The method comprises the steps of carrying out a first treatment on the surface of the Calculate->Mean value of>The method comprises the steps of carrying out a first treatment on the surface of the Calculating ∈>Corresponding weighting coefficientsω ik And obtain the fused temperature data +.>；
A temperature adjusting module for adjusting the temperature according toA pair of reaction kettles enter according to a preset ruleRow temperature adjustment;
and
a pressure adjusting module for adjusting the pressure according toAnd (3) performing pressure adjustment on the reaction kettle according to a second preset rule.
10. The pressure parameter optimization-based reactor process control device of claim 9, further comprising:
an encryption module for obtaining the data processing module by SHA-3 method、/>Encrypting and storing;
and
a decryption module for encrypting the stored data、/>Decrypting; if decryption is correct, get->、/>；
Wherein the temperature adjusting module is based onDerived from decryption module>The method comprises the steps of carrying out a first treatment on the surface of the Pressure adjusting dieBlock basis->Derived from decryption module>。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311287972.9A CN117008481B (en) | 2023-10-08 | 2023-10-08 | Pressure parameter optimization-based reaction kettle process control method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311287972.9A CN117008481B (en) | 2023-10-08 | 2023-10-08 | Pressure parameter optimization-based reaction kettle process control method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117008481A true CN117008481A (en) | 2023-11-07 |
| CN117008481B CN117008481B (en) | 2023-12-22 |
Family
ID=88574751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311287972.9A Active CN117008481B (en) | 2023-10-08 | 2023-10-08 | Pressure parameter optimization-based reaction kettle process control method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117008481B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117414785A (en) * | 2023-12-19 | 2024-01-19 | 广东林工工业装备有限公司 | Control method, device, equipment and medium of high-throughput reaction kettle for photoresist production |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040192989A1 (en) * | 2003-03-24 | 2004-09-30 | Conocophillips Company | Commercial fischer-tropsch reactor |
| JP2007014226A (en) * | 2005-07-05 | 2007-01-25 | Toyo Seikan Kaisha Ltd | Retort pressure control method using displacement sensor |
| CN105617968A (en) * | 2015-12-30 | 2016-06-01 | 汪振朴 | Device integrating temperature control and stirring |
| CN107670608A (en) * | 2016-09-30 | 2018-02-09 | 青岛大学 | A kind of chemical mechanical system of Temperature Fuzzy Control |
| CN109581870A (en) * | 2018-11-27 | 2019-04-05 | 中国工程物理研究院化工材料研究所 | The temperature in the kettle dynamic matrix control method of energetic material reaction kettle |
| US20190152898A1 (en) * | 2016-05-24 | 2019-05-23 | Ineos Europe Ag | Ammoxidation reactor control |
| CN110559966A (en) * | 2019-09-17 | 2019-12-13 | 台州道致科技股份有限公司 | multi-mode combined control method and system for reaction kettle |
| US20210054293A1 (en) * | 2017-12-29 | 2021-02-25 | Exxonmobil Chemical Patents Inc. | Coke Mitigation In Hydrocarbon Pyrolysis |
| CN115007084A (en) * | 2022-08-04 | 2022-09-06 | 安徽建筑大学 | Reaction kettle reaction process temperature detection method and device, control method and reaction kettle |
| CN115646396A (en) * | 2022-12-28 | 2023-01-31 | 安徽建筑大学 | Safety parameter detection method, control method and device in reaction kettle reaction process |
-
2023
- 2023-10-08 CN CN202311287972.9A patent/CN117008481B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040192989A1 (en) * | 2003-03-24 | 2004-09-30 | Conocophillips Company | Commercial fischer-tropsch reactor |
| JP2007014226A (en) * | 2005-07-05 | 2007-01-25 | Toyo Seikan Kaisha Ltd | Retort pressure control method using displacement sensor |
| CN105617968A (en) * | 2015-12-30 | 2016-06-01 | 汪振朴 | Device integrating temperature control and stirring |
| US20190152898A1 (en) * | 2016-05-24 | 2019-05-23 | Ineos Europe Ag | Ammoxidation reactor control |
| CN107670608A (en) * | 2016-09-30 | 2018-02-09 | 青岛大学 | A kind of chemical mechanical system of Temperature Fuzzy Control |
| US20210054293A1 (en) * | 2017-12-29 | 2021-02-25 | Exxonmobil Chemical Patents Inc. | Coke Mitigation In Hydrocarbon Pyrolysis |
| CN109581870A (en) * | 2018-11-27 | 2019-04-05 | 中国工程物理研究院化工材料研究所 | The temperature in the kettle dynamic matrix control method of energetic material reaction kettle |
| CN110559966A (en) * | 2019-09-17 | 2019-12-13 | 台州道致科技股份有限公司 | multi-mode combined control method and system for reaction kettle |
| CN115007084A (en) * | 2022-08-04 | 2022-09-06 | 安徽建筑大学 | Reaction kettle reaction process temperature detection method and device, control method and reaction kettle |
| CN115646396A (en) * | 2022-12-28 | 2023-01-31 | 安徽建筑大学 | Safety parameter detection method, control method and device in reaction kettle reaction process |
Non-Patent Citations (2)
| Title |
|---|
| 姜滨;崔莉;: "木材干燥窑内温度检测的自适应加权融合方法研究", 安徽农业科学, no. 22, pages 193 - 194 * |
| 陈雪辉1， 王光伟， 景甜甜， 陈珊珊， 张彬彬: "卡尔曼滤波融合模糊PID 算法优化反应 釜温度控制", 《黑龙江科技大学学报》, vol. 33, no. 1, pages 129 - 135 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117414785A (en) * | 2023-12-19 | 2024-01-19 | 广东林工工业装备有限公司 | Control method, device, equipment and medium of high-throughput reaction kettle for photoresist production |
| CN117414785B (en) * | 2023-12-19 | 2024-03-19 | 广东林工工业装备有限公司 | Control method, device, equipment and medium of high-throughput reaction kettle for photoresist production |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117008481B (en) | 2023-12-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN117008481B (en) | Pressure parameter optimization-based reaction kettle process control method and device | |
| KR102405723B1 (en) | High pressure and high temperature annealing chamber | |
| TWI787307B (en) | High pressure and high temperature anneal chamber | |
| TW300172B (en) | ||
| CN101603935B (en) | Calorimetric method | |
| KR100850396B1 (en) | Heat treatment method, heat treatment apparatus and method of calibrating the apparatus | |
| KR20080015733A (en) | Heat treatment apparatus, heat treatment method, computer program and storage medium | |
| KR101097945B1 (en) | Temperature control method, method of obtaining a temperature correction value, method of manufaturing a semiconductor device and substrate treatment apparatus | |
| JP4710345B2 (en) | Reactor temperature control method and reactor temperature control apparatus | |
| KR20110103866A (en) | Heat treatment apparatus and method of processing substrate | |
| JP2006272291A (en) | Temperature controller | |
| US20170278714A1 (en) | Control device, substrate processing system, substrate processing method, and program | |
| JP4405383B2 (en) | Methods for monitoring and protecting exothermic reactions | |
| CN109296440A (en) | Use modified feedback linearization control internal-combustion engine cooling system | |
| US20220401853A1 (en) | System and method for managing crystallization process in a process control plant | |
| KR20060114284A (en) | Heat treatment apparatus and heat treatment method | |
| JP2018156152A (en) | Control method and control apparatus | |
| KR20120073119A (en) | Control system for material gas | |
| JP4429189B2 (en) | Substrate processing apparatus and method | |
| JP6017265B2 (en) | Control method and control apparatus | |
| JP2003318172A (en) | Film forming method, deducing method for film forming and processing time correction expression, film forming device, and program | |
| Haugwitz et al. | Dynamic start-up optimization of a plate reactor with uncertainties | |
| JP4455856B2 (en) | Semiconductor manufacturing system and semiconductor manufacturing method | |
| JP2013032896A (en) | Heating medium temperature control method and heating medium temperature control device | |
| JP4788963B2 (en) | Chemical reaction calorimeter and measuring method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |