CN116991114B - Method for measuring and compensating and correcting splicing errors in laser processing - Google Patents
Method for measuring and compensating and correcting splicing errors in laser processing Download PDFInfo
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T3/00—Geometric image transformation in the plane of the image
- G06T3/40—Scaling the whole image or part thereof
- G06T3/4038—Scaling the whole image or part thereof for image mosaicing, i.e. plane images composed of plane sub-images
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/33—Director till display
- G05B2219/33133—For each action define function for compensation, enter parameters
Abstract
A method for measuring and compensating and correcting splicing errors of laser processing designs an error detection processing pattern with the same length and width as the maximum processing width of a corrected vibrating mirror, and measures separation errors and overlapping errors; measuring errors of all spliced positions of the X-direction and Y-direction error detection processing patterns; performing reverse correction compensation on the data of the edge position in the original or default galvanometer calibration data file; storing the corrected and compensated galvanometer calibration file; validating the new calibration data file according to the operating steps of the calibration program software; checking the splicing error compensation effect, and returning to perform detection and compensation calibration of the splicing error again if the error exceeds the allowable error range; the invention greatly reduces the splicing error by the method of detecting the processing pattern by the design error and reversely correcting and compensating the calibration file, has simple and convenient overall operation flow, and is suitable for the application of technicians on more equipment debugging and product production sites.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a method for measuring, compensating and correcting splicing errors in laser processing.
Background
The laser galvanometer control processing mode is used as a convenient and efficient mode, is widely applied to the processing fields of laser cutting, welding, cleaning, marking and the like, and in the laser precision processing field, the scanning working range of the laser galvanometer is generally smaller than 100X 100mm, so that the processing of large-format materials and large-format patterns can be realized only by the matched movement of a two-dimensional moving platform and the galvanometer. For example, for cutting circuit patterns in a flexible circuit board with the width of more than 400 multiplied by 350mm, for marking continuous patterns in a ceramic plate with the width of more than 500 multiplied by 450mm, machining is realized by designing a workbench and an X-Y two-dimensional motion platform of a workpiece with the stroke range of more than the maximum machining size, after the workpiece moves by one working distance on the two-dimensional motion platform, laser scanning machining of a vibrating mirror is performed, after the machining of the vibrating mirror is completed, the motion platform drives the workpiece to move by one moving distance smaller than the maximum scanning range of the vibrating mirror, then next scanning machining of the vibrating mirror is performed, and the machining of the whole width patterns of the workpiece is completed repeatedly.
In the processing process of matching the vibration mirror with the vibration mirror scanning by the moving platform, the processing graph of a scanning working area on the vibration mirror and the connection of the processing graph of the next scanning working area cannot be accurately connected due to the reasons of vibration mirror scanning errors, positioning errors of the moving platform, installation errors of the workbench and the like, the problem of pattern disconnection or superposition generally occurs, splicing errors of + -10-20 mu m generally occur, and in the occasions of laser cutting, marking and welding of precise devices, the processing problem at the connection of the processing area of the vibration mirror often leads to disqualification of processing of a whole material or hidden processing problems to serious quality problems of subsequent processes or final products. For example, patent application CN202110354694.9 discloses a printing method with multiple galvanometer splicing, which is to install and control multiple laser scanning galvanometers to preset a printing track in an overlapping area of galvanometer scanning; the patent number CN201620941048.7 discloses a galvanometer spliced laser etching machine, which is characterized in that the number of times of spliced etching is reduced by installing two or more lasers and a vibrating lens, and the problem of low yield caused by splicing errors is solved. However, the above patent application is assembled by a plurality of laser scanning galvanometer, so that the processing figure of one scanning working area on the galvanometer can be also formed, the connection position of the processing figure of the next scanning working area can not be accurately connected, and the problem of splicing error of the pattern can be solved.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a method for measuring and compensating and correcting the splicing errors of laser processing, which solves the processing error problem of the scanning of a two-dimensional motion platform composite galvanometer on the basis of not adding an external measuring feedback instrument and changing the existing processing control hardware, meets the requirement of high-precision laser processing, and has the characteristics of convenience and effectiveness.
In order to achieve the above object, the technical scheme of the present invention is as follows:
a method for measuring and compensating and correcting splicing errors in laser processing comprises the following steps:
step S1, designing an error detection processing pattern with the same length and width as the maximum processing width of the corrected vibrating mirror, wherein the error detection processing pattern extends to the peripheral edge of the maximum processing width of the vibrating mirror, is connected with the error detection processing pattern of the next vibrating mirror processing area in the X direction and the Y direction, and measures the separation error and the overlapping error after the error detection processing pattern is processed;
s2, using the original laser galvanometer and the control parameters of the motion platform, introducing the error detection processing pattern designed in the step S1 on laser processing equipment, processing the error detection processing pattern by using test paper or normal processing materials, and measuring by using a two-dimensional image measuring instrument, a video microscope or a high-precision vision measuring method after processingThe error at each splice in the X-direction and Y-direction of the processed pattern is denoted as (Xerr) i ，Yerr i ) I=1, 2, … …, n, where overlay error is represented by positive values and separation error is represented by negative values;
step S3, opening original or default galvanometer calibration data files in the galvanometer calibration program software, and obtaining all (Xerr i ，Yerr i ) Data, carrying out reverse correction compensation on the data of the edge position in the original or default galvanometer calibration data file; storing the corrected and compensated galvanometer calibration data file;
s4, loading the vibrating mirror calibration data file which is corrected, compensated and stored in the step S3 into the vibrating mirror calibration program software to replace the original or default vibrating mirror calibration data file, and enabling the new calibration data file to be effective according to the operation steps of the calibration program software;
s5, processing a detection pattern by using test paper, or directly processing a product, and checking a splicing error compensation effect; if the splicing error is not completely eliminated or the compensation effect needs to be further improved, returning to the step S2-S4 to perform splicing error detection and compensation calibration again;
and S6, periodically checking the splicing error degree of the product, and if the splicing error exceeds the allowable error range due to the error of the transmission system, the error of the optical path system or the drift of the control error of the galvanometer, returning to the steps S2-S5 to carry out the detection and compensation calibration of the splicing error again.
The method of the reverse correction compensation in the step S3 comprises the following steps: the measurement error (Xerr at the splice position of the X direction and the Y direction i ，Yerr i ) Corresponding to the X-direction and Y-direction edge position data of the scanning range of the galvanometer respectively, and compensating the original data, specifically, the X-direction splice point error value (Xerr i ，Yerr i ) Halving compensation is carried out on the position data of the left side edge and the right side edge corresponding to the X-direction of the scanning range of the vibrating mirror, and the Y-direction splicing point error value (Xerr) i ，Yerr i ) Performing halving compensation on upper and lower edge position data corresponding to the scanning range Y direction of the vibrating mirror;
if the error value is positive, based on the original dataThe position points on two sides are increased by half of error values; if the error value is negative, reducing the position points at two sides by half on the basis of the original data; the (X) of all edge position points in the galvanometer calibration file i ，Y i ) The value is based on (Xerr i ，Yerr i ) After correction is completed, the correction is saved as a new galvanometer calibration data file, whereinX i Representing edge location pointsiThe X-direction primary data of the position,Yirepresenting edge location pointsiY-direction raw data at.
Compared with the prior art, the invention has the following beneficial effects:
1. compared with the traditional method, the traditional method is realized by adopting a method for detecting a processed pattern through design errors and carrying out reverse correction and compensation of a calibration file, the method greatly reduces splicing errors, and compared with the traditional method for improving splicing errors, the traditional method is realized by gradually improving the operation precision of an equipment feeding system, an optical path system, a workbench jig and a vibrating mirror, and adopting a method for improving the closed-loop control precision, and compared with the traditional method, the traditional method needs more expensive hardware equipment investment, and meanwhile increases the debugging, control and maintenance difficulties of equipment.
2. The splicing error measuring and correcting compensation method provided by the invention is suitable for laser processing equipment platforms of which the biaxial motion platforms and the galvanometer scanning of different types and specifications move in a matched mode, and is also suitable for laser processing technological processes such as laser precision cutting, welding, cleaning, marking and the like of the equipment platforms.
3. The splicing error measurement and correction compensation method provided by the invention does not need to use other precise and complicated instruments and equipment such as a laser interferometer, a linear grating ruler and the like, only needs to apply a secondary image measuring instrument, a video microscope or a vision measuring instrument which are commonly used in the field of precise machining, has strong adaptability, and meanwhile, the whole operation flow of the method is simple and convenient, and is suitable for being applied by technicians on more equipment debugging and product production sites.
Drawings
FIG. 1 is a schematic flow chart of the present invention.
FIG. 2 shows a separation error of-15 μm at the edges of the two adjacent vibrating mirrors in the X direction.
FIG. 3 shows the overlay error at the edges of the two adjacent galvanometer fields in the X direction, the error being 15 μm.
Fig. 4 is a splice error detection processing pattern of the first embodiment, wherein rectangular blocks in four dotted line boxes represent single processing ranges of the galvanometer, and black solid lines in the rectangular blocks represent laser engraving patterns.
Fig. 5 is a graph showing the relationship between the X-direction error detection result and the negative value error and the stitching error formed by the adjacent scanning regions, wherein the dots are theoretical positions and the star points are processing points representing the error values.
Fig. 6 is a graph showing the relationship between the positive value error and the stitching error formed by the X-direction error detection result and the adjacent scanning area, wherein the dot is a theoretical position, and the star point is a processing point representing the error value.
FIG. 7 shows the result of the processing and splicing error of the arc pattern before compensation and correction, wherein the X-direction splicing error before compensation and correction is-15.21 μm.
FIG. 8 is a graph showing the result of the compensation of the corrected arc pattern machining splice error, which is 1.67 μm.
Fig. 9 is a graph showing the error between the theoretical position and the actual position of the two times in the scanning range of the galvanometer, the circular point is the theoretical position point, the star point is the actual position point, and the error value is shown in 5 times of the magnification.
Fig. 10 is a schematic diagram before compensation of Y-direction splice errors of rectangular processing patterns.
Fig. 11 is a schematic diagram of the actual effect after the Y-direction splicing error compensation of the rectangular processing pattern.
Detailed Description
The present invention will be described in further detail with reference to the following examples and the accompanying drawings.
Example 1
Fig. 1 is a method for measuring and compensating and correcting a splicing error in laser processing, which specifically comprises the following steps:
step S1, according to the reason that the combination processing of the motion platform and the vibrating mirror generates a splicing error, the splicing error generated by the laser processing of the original motion platform and the vibrating mirror in a matched motion is divided into a separation error and an overlapping error, as shown in fig. 2 and 3, at the joint position of the edges of the processing ranges of the left and right adjacent vibrating mirrors in the X direction, the processing error affecting the product quality is generated;
according to the single maximum processing breadth of the vibrating mirror, an error detection processing graph with the length and the width equal to those of the corrected maximum processing breadth of the vibrating mirror is designed, as shown in fig. 4, rectangular blocks in four dotted line frames represent the single processing range of the vibrating mirror, black solid lines in the rectangular blocks represent laser engraving graphs, the processing graph extends to the peripheral edge of the single maximum processing breadth of the vibrating mirror, and the error detection processing graph is connected with the error detection processing graph of the next vibrating mirror processing area in the X direction and the Y direction; after the error detection processing pattern is processed, X, Y-direction splicing error values can be effectively separated at the splicing positions of the scanning ranges of the adjacent vibrating mirrors.
S2, using original laser galvanometer and motion platform control parameters, introducing the error detection processing pattern designed in the step S1 on laser processing equipment, processing the detection pattern by using test paper, measuring the error of the processing pattern X, Y to each splicing position by using a two-dimensional image measuring instrument after processing, and recording as @Xerr i ，Yerr i ），i=1，2，……，nThe method comprises the steps of carrying out a first treatment on the surface of the The measured splice error is shown in fig. 5 and 6.
As can be seen from fig. 5 and 6, the error at the edge position of the single galvanometer processing is smaller or larger than the theoretical position, and when the motion platform moves, the edge position of the galvanometer scanning area is connected with the edge position of the next adjacent galvanometer processing area, so as to form a separation error or an overlapping error. The vibrating mirror errors in FIG. 5 correspondingly form the actual machining splicing errors in FIG. 2, namely the separating splicing errors are generated when the actual positioning of the vibrating mirror is smaller than the theoretical position, and the separating splicing errors are recorded by negative values; the galvanometer error of fig. 6 corresponds to the actual machining splice error of fig. 3, i.e., the overlap splice error occurs when the actual positioning of the galvanometer is greater than the theoretical position, recorded with positive values. The positioning error of the vibrating mirror in the Y direction has the same corresponding relation with the splicing error of the vibrating mirror scanning area in the Y direction.
S3, opening original or default galvanometer calibration data files in the galvanometer calibration program software, wherein the step S2 obtains the step SXerr i ，Yerr i ) The data are subjected to reverse correction on the data of the edge positions in the original or default vibrating mirror calibration data file, namely the error values are positive, and half of the error values are increased on the basis of the original data of the edge position points at the two sides; and when the error value is negative, reducing the error value by half on the basis of the original data of the edge position points at both sides.
The method of the reverse correction compensation in the step S3 comprises the following steps: measuring error at the splicing position of X direction and Y directionXerr i ，Yerr i ) Corresponding to the X-direction and Y-direction edge position data of the scanning range of the galvanometer respectively, and compensating the original data, specifically, the error value of the X-direction splicing point is [ (]Xerr i ，Yerr i ) Halving compensation is carried out on position data of the left side and the right side of the scanning range X direction of the corresponding vibrating mirror, and error value of Y-direction splicing points is [ ]Xerr i ，Yerr i ) Performing halving compensation on upper and lower edge position data corresponding to the scanning range Y direction of the vibrating mirror;
if the error value is positive, increasing the error value by half on the basis of the original data at the position points at two sides; if the error value is negative, reducing the position points at two sides by half on the basis of the original data; the vibration mirror calibration file is used for calibrating all edge position pointsX i ，Y i ) The value is according to%Xerr i ，Yerr i ) After the correction is completed, storing a corrected and compensated galvanometer calibration data file, whereinX i Representing edge location pointsiThe X-direction primary data of the position,Yirepresenting edge location pointsiY-direction raw data at.
And S4, taking correXion5.exe galvanometer calibration program software as an example, importing the galvanometer calibration data file corrected and stored in the step S3 into a calibration program, importing the corrected and compensated calibration data file, and then carrying out data generation and storage, namely completing the replacement and validation of a new calibration data file.
And S5, updating the effective galvanometer calibration data file by using the step S4, directly processing the product graph by using test paper, checking the splicing error compensation correction effect, comparing the laser processing splicing errors before and after the error compensation correction with those shown in the figures 7 and 8, wherein the splicing error is reduced from-15.21 mu m before compensation to 1.67 mu m after compensation, and returning to the steps S2-S4 for carrying out splicing error detection and compensation correction again if the splicing error is not completely eliminated or the compensation effect is required to be further improved.
Step S6, since the splicing error in the laser processing by the cooperative movement of the moving platform and the galvanometer comprises error influence factors such as motor movement characteristics of the moving platform, laser light path change, device temperature stability and the like besides the galvanometer control error factors, the actual change condition of the splicing error formed by the factors is periodically detected in the production and equipment operation process of the product, and if the splicing error exceeds the allowable error range due to the error of a transmission system, the error of a light path system or the drift of the galvanometer control error, the method returns to the steps S2-S5 for error correction compensation so as to ensure the processing quality of the product; or in the product quality inspection process, when the situation of splicing error increase is found, the method returns to the steps S2-S5 for detecting and correcting compensation of the splicing error, so that the processing quality of the equipment is in a good state.
After the calibration equipment is normally operated for 35 days, the actual errors of all parts in the scanning range of the vibrating mirror, which are obtained by measurement after the design and processing according to the splicing error test pattern, are shown in fig. 9, and the comparison of the errors of the theoretical position of the scanning point of the vibrating mirror and the actual scanning positions of the two times in the drawing is respectively represented by a circular point and a star point.
Measuring the splicing error value at the edge of the scanning range of the galvanometer, reversely correcting and compensating the splicing error value to an original galvanometer calibration data file, importing calibration program software and enabling a new calibration data file to be effective, and then processing an actual product graph, wherein the actual compensation effect of Y-direction splicing error before and after compensation is shown in fig. 10 and 11; FIG. 10 shows a linear splicing error before compensation, the processed line width is 20 μm, the theoretical width of a rectangular frame is 1mm, and the splicing errors at the left and right positions are respectively 12.07 μm and 13.52 μm; fig. 11 shows the straight line splicing error after compensation, and it is seen from the figure that the splicing error at the left and right splicing positions is basically eliminated, and the compensation and calibration effects of the splicing error are good.
Example two
The splicing error measurement and correction compensation method provided by the invention is suitable for a laser processing equipment platform with different types and specifications of biaxial motion platforms and galvanometer scanning matched motions, and the embodiment is that the two-dimensional motion platform and the galvanometer scanning matched motions are applied to the field of laser cleaning, and in the laser cleaning of semiconductor materials and precision dies, poor laser cleaning quality can be caused due to the splicing errors of adjacent galvanometer scanning areas. For example, invar alloy mold used for manufacturing precision devices, because local oxidation, local adhesion chemical agent, release agent and the like can be generated on the surface of the invar alloy mold in the use process, laser cleaning is required to be carried out on the area with surface foreign matters, the separation error formed by the scanning and splicing position of the vibrating mirror can cause poor cleaning of the surface foreign matters of the mold, and the overlapping error formed by the scanning and splicing position of the vibrating mirror can cause ablation damage of the invar alloy substrate in the laser cleaning process. Since the mold is reused at high frequency in production, the surface of the mold is also cleaned by laser at multiple frequencies, and the poor cleaning and excessive cleaning caused by the above separation errors and overlapping errors can cause final complete damage to the alloy mold, thereby increasing the production cost.
For invar alloy dies with the width of 450 multiplied by 300mm, the precision laser cleaning technology is adopted, the original splicing error is 18.4 mu m, and the service life of a single die is 2800 hours due to damage caused by using and laser cleaning. According to the method, the splicing error of the laser vibrating mirror is measured, compensated and calibrated, a splicing error detection processing graph is designed firstly, then after the processing detection graph, error value measurement, calibration data file reverse compensation, new calibration data file validation and splicing effect test processing are carried out, the splicing error of the laser cleaning vibrating mirror is reduced to 1.7 mu m after the measurement and calibration, and meanwhile, the service life of a single die is prolonged to 4000 hours, so that the splicing error compensation and calibration effect is good.
In summary, the method provided by the invention is also suitable for laser processing technology processes such as laser precision cutting, welding, cleaning, marking and the like of the equipment platform.
Claims (1)
1. The method for measuring and compensating and correcting the splicing error of the laser processing is characterized by comprising the following steps of:
step S1, designing an error detection processing pattern with the same length and width as the maximum processing width of the corrected vibrating mirror, wherein the error detection processing pattern extends to the peripheral edge of the maximum processing width of the vibrating mirror, is connected with the error detection processing pattern of the next vibrating mirror processing area in the X direction and the Y direction, and measures the separation error and the overlapping error after the error detection processing pattern is processed;
s2, using the original laser galvanometer and the control parameters of the motion platform, introducing the error detection processing pattern designed in the step S1 on laser processing equipment, processing the error detection processing pattern by using test paper or normal processing materials, measuring the error of each spliced position of the processed pattern in the X direction and the Y direction by using a two-dimensional image measuring instrument, a video microscope or a high-precision vision measuring method after processing, and recording as (Xerr i ，Yerr i ) I=1, 2, … …, n, where overlay error is represented by positive values and separation error is represented by negative values;
step S3, opening original or default galvanometer calibration data files in the galvanometer calibration program software, and obtaining all (Xerr i ，Yerr i ) Data, carrying out reverse correction compensation on the data of the edge position in the original or default galvanometer calibration data file; storing the corrected and compensated galvanometer calibration data file;
s4, loading the vibrating mirror calibration data file which is corrected, compensated and stored in the step S3 into the vibrating mirror calibration program software to replace the original or default vibrating mirror calibration data file, and enabling the new calibration data file to be effective according to the operation steps of the calibration program software;
s5, processing a detection pattern by using test paper, or directly processing a product, and checking a splicing error compensation effect; if the splicing error is not completely eliminated or the compensation effect needs to be further improved, returning to the step S2-S4 to perform splicing error detection and compensation calibration again;
step S6, periodically checking the splicing error degree of the product, and if the splicing error exceeds the allowable error range due to the error of the transmission system, the error of the optical path system or the drift of the control error of the galvanometer, returning to the steps S2-S5 to carry out detection and compensation calibration of the splicing error again;
the method of the reverse correction compensation in the step S3 comprises the following steps: the measurement error (Xerr at the splice position of the X direction and the Y direction i ，Yerr i ) Corresponding to the X-direction and Y-direction edge position data of the scanning range of the galvanometer respectively, and compensating the original data, specifically, the X-direction splice point error value (Xerr i ，Yerr i ) Halving compensation is carried out on the position data of the left side edge and the right side edge corresponding to the X-direction of the scanning range of the vibrating mirror, and the Y-direction splicing point error value (Xerr) i ，Yerr i ) Performing halving compensation on upper and lower edge position data corresponding to the scanning range Y direction of the vibrating mirror;
if the error value is positive, increasing the error value by half on the basis of the original data at the position points at two sides; if the error value is negative, reducing the position points at two sides by half on the basis of the original data; values (X i ，Y i ) According to (Xerr i ，Yerr i ) After correction is completed, the correction is saved as a new galvanometer calibration data file, wherein X i The X-direction raw data at the edge position point i is represented, and Yi represents the Y-direction raw data at the edge position point i.
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