CN116961356A - Long-stroke motion motor capable of providing Z-direction buoyancy for rotor - Google Patents
Long-stroke motion motor capable of providing Z-direction buoyancy for rotor Download PDFInfo
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- CN116961356A CN116961356A CN202311206928.0A CN202311206928A CN116961356A CN 116961356 A CN116961356 A CN 116961356A CN 202311206928 A CN202311206928 A CN 202311206928A CN 116961356 A CN116961356 A CN 116961356A
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- permanent magnet
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- yoke plate
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- 230000000712 assembly Effects 0.000 claims description 22
- 238000000429 assembly Methods 0.000 claims description 22
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000000725 suspension Substances 0.000 description 8
- 238000013461 design Methods 0.000 description 5
- 238000007667 floating Methods 0.000 description 4
- 238000005339 levitation Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000003292 glue Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000036544 posture Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
- H02K1/2706—Inner rotors
- H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
- H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
- H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
- H02K1/278—Surface mounted magnets; Inset magnets
- H02K1/2783—Surface mounted magnets; Inset magnets with magnets arranged in Halbach arrays
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
- H02K1/2786—Outer rotors
- H02K1/2787—Outer rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
- H02K1/2789—Outer rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
- H02K1/2791—Surface mounted magnets; Inset magnets
- H02K1/2792—Surface mounted magnets; Inset magnets with magnets arranged in Halbach arrays
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/46—Fastening of windings on the stator or rotor structure
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/06—Magnetic cores, or permanent magnets characterised by their skew
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Linear Motors (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention relates to the technical field of motors, in particular to a long-stroke motion motor capable of providing Z-directional buoyancy for a rotor, which comprises a base, a coil assembly and a permanent magnet assembly, wherein the base is provided with a motor body; the coil component is positioned on the base and is fixedly connected with the base; the permanent magnet assembly comprises a double-layer magnet array and a magnet yoke plate connected to the outer end of the double-layer magnet array, the double-layer magnet array sequentially comprises a permanent magnet main array and a permanent magnet auxiliary array from top to bottom, and the coil assembly is positioned between the permanent magnet main array and the permanent magnet auxiliary array. The magnetizing directions of the adjacent permanent magnets in the permanent magnet main array are vertical, the magnetizing directions of the adjacent permanent magnets in the permanent magnet auxiliary array are vertical, and the magnetizing directions of the permanent magnets in the permanent magnet main array and the magnetizing directions of the permanent magnets in the permanent magnet auxiliary array are staggered along the horizontal direction. The motor has the advantages of long stroke, strong buoyancy, simple control, high positioning precision and the like.
Description
Technical Field
The invention relates to the technical field of motors, in particular to a long-stroke motion motor capable of providing Z-direction buoyancy for a rotor.
Background
With the development of modern manufacturing industry, the dimensional accuracy of ultra-precision machining technology has reached the nanometer level. The ultra-precise motion platform is widely and widely applied in the micro-nano processing field due to the characteristics of ultra-precise positioning and precise motion. The motion motor with the Z-direction suspension force is the most main component of the ultra-precise motion platform, and the mover is in a floating state by utilizing electromagnetic force, and the motion motor with the Z-direction suspension force has the following advantages: 1) The system has compact structure and simple mechanical parts, thereby having higher natural frequency and higher reliability; 2) The rotor with the Z-direction levitation force motor has large-range plane positioning capability, can perform rotary motion in a small range, and provides a realization means for precision machining compensation and optical system focusing; 3) The motion motor with the Z-direction suspension force motion does not need lubrication and has no abrasion, and meanwhile, the motor adopts a non-air-floating mode, so that the motor meets the requirements of ultra-clean and vacuum environments in the processing process.
The Z-direction levitation force motor is taken as a main component of the ultra-precise motion platform, and the performance of the motor determines the positioning precision and the precise machining performance of the platform. At present, the structural form of the motor with the Z-direction suspension force mainly comprises a moving coil type motor and a moving magnetic type motor, and can meet the processing application scenes of different requirements.
In the prior art, the Chinese patent publication number is CN101752983A, publication date is 2010-06-23, the patent name is a 'long-stroke high-precision multi-degree-of-freedom planar motor', the motor in the patent comprises a stator of a long-stroke motor, a plurality of movers of the long-stroke motor and a plurality of short-stroke multi-degree-of-freedom motors, a short-stroke multi-degree-of-freedom floating motor is fixed on each mover of the long-stroke motor, the stroke of the mover is not limited, the electromagnetic force acting on the mover of the long-stroke motor is controlled by controlling the current in an armature winding of the long-stroke planar motor, the mover generates the motion in the planar direction, the stroke is not limited, the high-speed motion can be realized, and the high-precision six-degree-of-freedom motion control of the short stroke can be realized by controlling the magnitude and the direction of the current of each coil of the short-stroke planar motor.
However, although the above-mentioned prior art can realize long-stroke high-precision motion, it needs two kinds of motor structures to be superimposed, and the structure is more complicated, and is harsh to the requirement of application scene, can lead to structural design complexity high in order to satisfy the performance requirement, causes the control complicacy of this kind of strong nonlinear system of motor.
In view of the above-mentioned drawbacks of the above-mentioned design scheme and practical application requirements, how to design a long-stroke motor with simple structure, unlimited stroke, simple control and high positioning accuracy, which can provide the Z-directional buoyancy of the mover, is a problem to be solved.
Disclosure of Invention
The invention provides a long-stroke motor capable of providing Z-direction buoyancy for a rotor, which is simple in structural design and solves the problems of limited stroke, limited buoyancy, complex control, low positioning precision and the like of the conventional motor.
In order to achieve the above purpose, the present invention proposes the following technical scheme: a long-travel motor capable of providing Z-directional buoyancy for a rotor comprises a base, a coil assembly and a permanent magnet assembly; the coil component is positioned on the base and is fixedly connected with the base; the permanent magnet assembly comprises a double-layer magnet array and a magnet yoke plate connected to the outer end of the double-layer magnet array, the double-layer magnet array is sequentially provided with a permanent magnet main array and a permanent magnet auxiliary array from top to bottom, and the coil assembly is positioned between the permanent magnet main array and the permanent magnet auxiliary array; the magnetizing directions of the adjacent permanent magnets in the permanent magnet main array are different, the magnetizing directions of the adjacent permanent magnets in the permanent magnet auxiliary array are different, and displacement difference exists between the permanent magnets in the permanent magnet main array and the permanent magnets in the permanent magnet auxiliary array.
Further, the magnetizing directions of the adjacent permanent magnets in the permanent magnet main array are vertical, and the magnetizing directions of the adjacent permanent magnets in the permanent magnet auxiliary array are vertical.
Further, the permanent magnets in the permanent magnet main array and the permanent magnets in the permanent magnet auxiliary array are asymmetrically arranged in the vertical direction, and the magnetizing directions of the permanent magnets in the permanent magnet main array and the magnetizing directions of the permanent magnets in the permanent magnet auxiliary array are staggered in the horizontal direction.
Further, the magnet yoke plate comprises an upper yoke plate and a lower yoke plate which are respectively positioned at two sides of the coil assembly, and the permanent magnet main array and the permanent magnet auxiliary array are oppositely arranged and respectively fixed on the inner walls of the upper yoke plate and the lower yoke plate; the lower yoke plate is located above the base.
Further, the permanent magnet assemblies are two groups uniformly distributed along the horizontal direction, the upper yoke plates in the two groups of permanent magnet assemblies are connected through the connecting table, the two upper yoke plates and the connecting table are of an I-shaped structure integrally, and the connecting table and the two upper yoke plates form an objective table together.
Further, the permanent magnet assemblies are two groups uniformly distributed along the horizontal direction, and the upper ends of the two upper yoke plates are provided with I-shaped object stages.
Further, the coil assembly comprises a strip-shaped coil and a coil yoke plate, wherein the strip-shaped coil is positioned in the coil yoke plate, and the coil yoke plate is fixedly connected with the base.
Further, the strip-shaped coil is encapsulated in the coil yoke plate by glue filling, and the strip-shaped coil adopts an enameled wire structure.
Further, the coil assemblies at the two groups of permanent magnet assemblies are of an integrated structure, so that the coil assemblies are of a long-span high-rigidity structure.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts double-layer permanent magnet arrays and long-span high-rigidity coil assemblies, and can realize long-stroke movement.
2. The double-layer permanent magnet assembly adopts the magnet array with displacement difference, and the electromagnetic force is enhanced and the positioning accuracy of the system is improved on the premise of not changing the buoyancy of the movement direction.
3. According to the invention, the object stage is fixedly connected with the two permanent magnet assemblies, and the position and the posture of the bearing object are compensated through the multi-degree-of-freedom motion of the two permanent magnet assemblies.
4. In the invention, the base and the coil assembly are fixedly connected as the planar motor stator, so that the rigidity of the long-stroke stator can be ensured; meanwhile, the coil in the coil assembly is encapsulated in the coil yoke plate by potting, the coil can be wound into any required shape by adopting enameled wires, and the coil has good expansibility to meet the requirements of various working environments.
Drawings
FIG. 1 is a top view of a long travel motor according to a first embodiment of the present invention;
FIG. 2 is a cross-sectional view taken along the direction A-A in FIG. 1;
FIG. 3 is a schematic diagram of magnetizing directions in a main permanent magnet array and an auxiliary permanent magnet array provided according to an embodiment of the present invention;
fig. 4 is an isometric view (partially showing a bar coil) of a long-stroke motor according to a second embodiment of the present invention.
Reference numerals: the device comprises a base 1, a coil assembly 2, a strip-shaped coil 2-1, a coil yoke plate 2-2, a permanent magnet assembly 3, a permanent magnet main array 3-1, a permanent magnet auxiliary array 3-2, a magnet yoke plate 3-3, an objective table 4, an upper yoke plate 5, a lower yoke plate 6 and a connecting table 7.
Detailed Description
Hereinafter, an embodiment of the present invention will be described with reference to fig. 1 to 4. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, a detailed description thereof will not be repeated.
The present invention will be further described in detail with reference to fig. 1 to 4 and the specific embodiments thereof in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
The utility model provides a can provide long stroke motion motor of active cell Z to buoyancy, as shown in fig. 1, 2, including base 1, coil pack 2 and permanent magnet assembly 3, coil pack 2 is located base 1 and with base 1 fixed connection, base 1 and coil pack 2 link firmly can be as plane motor stator, guarantees the rigidity of long stroke stator. The permanent magnet assembly 3 includes a double-layered magnet array and a magnet yoke plate 3-3 coupled to the outer end of the double-layered magnet array.
As shown in fig. 2 and 3, the double-layer magnet array is sequentially a permanent magnet main array 3-1 and a permanent magnet auxiliary array 3-2 from top to bottom, and the coil assembly 2 is positioned between the permanent magnet main array 3-1 and the permanent magnet auxiliary array 3-2. The magnetizing directions of the adjacent permanent magnets in the permanent magnet main array 3-1 are different, the magnetizing directions of the adjacent permanent magnets in the permanent magnet auxiliary array 3-2 are different, and displacement difference exists between the permanent magnets in the permanent magnet main array 3-1 and the permanent magnets in the permanent magnet auxiliary array 3-2. As shown by S1 in fig. 3, the magnetizing directions of adjacent permanent magnets in the main permanent magnet array 3-1 are perpendicular, and the magnetizing directions are different by 90 °, as shown by S4 in fig. 3, the magnetizing directions of adjacent permanent magnets in the auxiliary permanent magnet array 3-2 are perpendicular, and the magnetizing directions are different by 90 °. As shown in S2 and S3 in fig. 3, the permanent magnets in the permanent magnet main array 3-1 and the permanent magnets in the permanent magnet auxiliary array 3-2 are asymmetrically arranged in the vertical direction, and the magnetizing directions of the permanent magnets in the permanent magnet main array 3-1 and the magnetizing directions of the permanent magnets in the permanent magnet auxiliary array 3-2 are staggered in the horizontal direction. The magnet array with displacement difference is adopted in the double-layer magnet assembly, so that electromagnetic force is enhanced and positioning accuracy of the system is improved on the premise of not changing buoyancy of the moving direction.
As shown in fig. 2, the magnet yoke plate 3-3 includes an upper yoke plate 5 and a lower yoke plate 6 respectively located at both sides of the coil assembly 2, and the permanent magnet main array 3-1 and the permanent magnet auxiliary array 3-2 are oppositely installed and respectively fixed on inner walls of the upper yoke plate 5 and the lower yoke plate 6, and the lower yoke plate 6 is located above the base 1.
The permanent magnet assemblies 3 are two groups uniformly distributed along the horizontal direction, the upper ends of the two upper yoke plates 5 are provided with I-shaped object tables 4, and the positions and the postures of objects are carried by the multi-degree-of-freedom motion compensation object tables 4 of the two groups of permanent magnet assemblies 3. The coil assemblies 2 at the two groups of permanent magnet assemblies 3 are of an integrated structure, so that the coil assemblies 2 are of a long-span high-rigidity structure, and the moving-magnet type suspension motor structure can realize long-stroke motion in a Z-direction suspension state, wherein the moving-magnet type suspension motor structure is formed by a double-layer permanent magnet array and the long-span coil assemblies 2.
The coil assembly 2 includes a strip-shaped coil 2-1 and a coil yoke plate 2-2, and the coil yoke plate 2-2 can ensure the overall rigidity of the coil assembly 2. The strip-shaped coil 2-1 is positioned in the coil yoke plate 2-2, and the coil yoke plate 2-2 is fixedly connected with the base 1. The strip-shaped coil 2-1 is encapsulated in the coil yoke plate 2-2 by glue filling, and the strip-shaped coil 2-1 adopts an enameled wire structure and can be wound into any required shape.
As shown in fig. 3, when the strip coil 2-1 is energized, the permanent magnet assembly 3 (including the permanent magnet main array 3-1, the permanent magnet auxiliary array 3-2, and the magnet yoke plate 3-3, wherein the magnet yoke plate 3-3 includes the upper yoke plate 5 and the lower yoke plate 6) floats integrally, so that a gap shown at M is formed between the permanent magnet main array 3-1 and the permanent magnet auxiliary array 3-2 and the coil yoke plate 2-2, and the gap shown at M is always present when energized, i.e., the permanent magnet main array 3-1 and the permanent magnet auxiliary array 3-2 are not in contact with the coil yoke plate 2-2 when energized, and at the same time, the lower yoke plate 6 is located above the base 1 and includes a gap shown at N above the base 1 when energized. When energized, the permanent magnet assembly 3 floats to a proper height position and is basically maintained at the position without floating up and down, and at the moment, the permanent magnet assembly 3 floats left and right.
When the strip coil 2-1 is not electrified, the whole permanent magnet assembly 3 does not float and naturally falls down, and at this time, the permanent magnet main array 3-1 is in contact with the coil yoke plate 2-2, and the lower yoke plate 6 can be in contact with the base 1 or not in contact with the base 1. The base 1 is here simply a generic term, which means a supporting carrier, and can be provided in particular according to the circumstances.
In addition, the mover of the long-stroke motion motor is a permanent magnet assembly 3 and an objective table 4, the stator is a coil assembly 2, the permanent magnet assembly 3 can provide magnetic fields in X and Z directions, the strip-shaped coil 2-1 and the magnetic fields interact to generate Lorenter magnetic forces in the X and Z directions, wherein the magnetic field in the X direction provides levitation force in the Z direction, and the magnetic field in the Z direction provides driving force in the X direction; the force in the Z direction ensures the suspension state of the mover and can realize zero resistance movement. The permanent magnet assembly 3 enhances the magnetic field intensity in the X direction without affecting the magnetic field intensity in the Z direction, and increases the levitation force of the rotor. The motion range of the rotor is determined according to the length of the stator, and long-stroke stator arrangement is adopted in the embodiment under the condition that the overall structural rigidity of the stator is ensured.
Example two
As shown in fig. 4, the difference between the present embodiment and the first embodiment is that the upper yoke plates 5 in the two sets of permanent magnet assemblies 3 are connected by the connection table 7, the two upper yoke plates 5 and the connection table 7 are in an i-shaped structure as a whole, and the connection table 7 and the two upper yoke plates 5 together form the stage 4.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, provided that the desired results of the technical solutions of the present disclosure are achieved, and are not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (9)
1. The long-stroke motion motor capable of providing Z-directional buoyancy for the mover is characterized by comprising a base (1), a coil assembly (2) and a permanent magnet assembly (3); the coil component (2) is positioned on the base (1) and is fixedly connected with the base (1); the permanent magnet assembly (3) comprises a double-layer magnet array and a magnet yoke plate (3-3) connected to the outer end of the double-layer magnet array, wherein the double-layer magnet array sequentially comprises a permanent magnet main array (3-1) and a permanent magnet auxiliary array (3-2) from top to bottom, the coil assembly (2) is positioned between the permanent magnet main array (3-1) and the permanent magnet auxiliary array (3-2), the magnetizing directions of adjacent permanent magnets in the permanent magnet main array (3-1) are different, the magnetizing directions of adjacent permanent magnets in the permanent magnet auxiliary array (3-2) are different, and displacement difference exists between the permanent magnets in the permanent magnet main array (3-1) and the permanent magnets in the permanent magnet auxiliary array (3-2).
2. The long-stroke motor capable of providing the Z-direction buoyancy of the mover according to claim 1, wherein the magnetizing directions of adjacent permanent magnets in the main permanent magnet array (3-1) are perpendicular, and the magnetizing directions of adjacent permanent magnets in the auxiliary permanent magnet array (3-2) are perpendicular.
3. The long-stroke motor capable of providing the Z-direction buoyancy of the rotor according to claim 2, wherein the permanent magnets in the permanent magnet main array (3-1) and the permanent magnets in the permanent magnet auxiliary array (3-2) are arranged asymmetrically in the vertical direction, and the magnetizing directions of the permanent magnets in the permanent magnet main array (3-1) and the magnetizing directions of the permanent magnets in the permanent magnet auxiliary array (3-2) are staggered in the horizontal direction.
4. A long travel motor capable of providing a mover with a Z-direction buoyancy according to claim 3, wherein the magnet yoke plate (3-3) comprises an upper yoke plate (5) and a lower yoke plate (6) respectively positioned at both sides of the coil assembly (2), and the permanent magnet main array (3-1) and the permanent magnet auxiliary array (3-2) are oppositely installed and respectively fixed on the inner walls of the upper yoke plate (5) and the lower yoke plate (6); the lower yoke plate (6) is located above the base (1).
5. The long-stroke motor capable of providing the Z-direction buoyancy of the mover according to claim 4, wherein the permanent magnet assemblies (3) are two groups uniformly distributed along the horizontal direction, the upper yoke plates (5) in the two groups of permanent magnet assemblies (3) are connected through the connecting table (7), the two upper yoke plates (5) and the connecting table (7) are integrally in an I-shaped structure, and the connecting table (7) and the two upper yoke plates (5) jointly form the objective table (4).
6. The long-stroke motor capable of providing the Z-direction buoyancy of the mover according to claim 4, wherein the permanent magnet assemblies (3) are two groups uniformly distributed along the horizontal direction, and the upper ends of the two upper yoke plates (5) are provided with I-shaped object stages (4).
7. The long travel motor capable of providing a mover with a Z-direction buoyancy according to claim 5 or 6, wherein the coil assembly (2) comprises a strip coil (2-1) and a coil yoke plate (2-2), the strip coil (2-1) is located in the coil yoke plate (2-2), and the coil yoke plate (2-2) is fixedly connected with the base (1).
8. The long-stroke motor capable of providing the Z-direction buoyancy of the mover according to claim 7, wherein the strip-shaped coil (2-1) is encapsulated in the coil yoke plate (2-2), and the strip-shaped coil (2-1) adopts an enameled wire structure.
9. The long travel motor capable of providing mover Z-direction buoyancy according to claim 8, wherein the coil assemblies (2) at the two sets of permanent magnet assemblies (3) are of an integral structure such that the coil assemblies (2) are of a long span high stiffness structure.
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1967980A (en) * | 2006-11-24 | 2007-05-23 | 沈阳工业大学 | Intersegmental dephasing asymmetric six-phase permanent-magnet linear servo-actuator |
CN101969261A (en) * | 2010-10-22 | 2011-02-09 | 哈尔滨工业大学 | High-power density permanent magnet motor |
US20150137624A1 (en) * | 2012-07-31 | 2015-05-21 | Shanghai Micro Electronics Equipment Co., Ltd. | Linear motor and stage apparatus |
CN208806732U (en) * | 2018-06-29 | 2019-04-30 | 河南东迪电气有限公司 | A kind of linear electric generator |
CN110545023A (en) * | 2019-08-21 | 2019-12-06 | 同济大学 | Segmented coreless long-stator permanent magnet linear synchronous motor for rail transit |
CN112886787A (en) * | 2021-01-18 | 2021-06-01 | 哈尔滨工业大学 | Double-primary coplanar multiphase linear permanent magnet synchronous motor |
CN113765259A (en) * | 2021-08-31 | 2021-12-07 | 华中科技大学 | Permanent magnet electric suspension type linear driving device |
US20220200385A1 (en) * | 2016-02-12 | 2022-06-23 | Asml Netherlands B.V. | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method |
CN115800675A (en) * | 2022-11-23 | 2023-03-14 | 安徽信息工程学院 | Bilateral dislocation magnetic flux switches linear electric motor |
CN115833431A (en) * | 2022-10-26 | 2023-03-21 | 浙江大学 | Multi-rotor bilateral permanent magnet linear motor and segmented power supply method thereof |
-
2023
- 2023-09-19 CN CN202311206928.0A patent/CN116961356B/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1967980A (en) * | 2006-11-24 | 2007-05-23 | 沈阳工业大学 | Intersegmental dephasing asymmetric six-phase permanent-magnet linear servo-actuator |
CN101969261A (en) * | 2010-10-22 | 2011-02-09 | 哈尔滨工业大学 | High-power density permanent magnet motor |
US20150137624A1 (en) * | 2012-07-31 | 2015-05-21 | Shanghai Micro Electronics Equipment Co., Ltd. | Linear motor and stage apparatus |
US20220200385A1 (en) * | 2016-02-12 | 2022-06-23 | Asml Netherlands B.V. | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method |
CN208806732U (en) * | 2018-06-29 | 2019-04-30 | 河南东迪电气有限公司 | A kind of linear electric generator |
CN110545023A (en) * | 2019-08-21 | 2019-12-06 | 同济大学 | Segmented coreless long-stator permanent magnet linear synchronous motor for rail transit |
CN112886787A (en) * | 2021-01-18 | 2021-06-01 | 哈尔滨工业大学 | Double-primary coplanar multiphase linear permanent magnet synchronous motor |
CN113765259A (en) * | 2021-08-31 | 2021-12-07 | 华中科技大学 | Permanent magnet electric suspension type linear driving device |
CN115833431A (en) * | 2022-10-26 | 2023-03-21 | 浙江大学 | Multi-rotor bilateral permanent magnet linear motor and segmented power supply method thereof |
CN115800675A (en) * | 2022-11-23 | 2023-03-14 | 安徽信息工程学院 | Bilateral dislocation magnetic flux switches linear electric motor |
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