CN116949418A - DLC coating, preparation method and equipment thereof, composite coating and coated product - Google Patents
DLC coating, preparation method and equipment thereof, composite coating and coated product Download PDFInfo
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- CN116949418A CN116949418A CN202210395178.5A CN202210395178A CN116949418A CN 116949418 A CN116949418 A CN 116949418A CN 202210395178 A CN202210395178 A CN 202210395178A CN 116949418 A CN116949418 A CN 116949418A
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- coating
- monomer
- dlc coating
- dlc
- silane
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- 238000000576 coating method Methods 0.000 title claims abstract description 156
- 239000011248 coating agent Substances 0.000 title claims abstract description 148
- 239000002131 composite material Substances 0.000 title claims description 17
- 238000002360 preparation method Methods 0.000 title abstract description 12
- 239000000178 monomer Substances 0.000 claims abstract description 128
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910000077 silane Inorganic materials 0.000 claims abstract description 42
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 41
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 41
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 33
- 238000000151 deposition Methods 0.000 claims abstract description 16
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 238000012360 testing method Methods 0.000 claims description 42
- 239000007789 gas Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 34
- 239000011521 glass Substances 0.000 claims description 27
- 229910000831 Steel Inorganic materials 0.000 claims description 22
- 239000010959 steel Substances 0.000 claims description 22
- 210000002268 wool Anatomy 0.000 claims description 22
- 238000002309 gasification Methods 0.000 claims description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 238000001704 evaporation Methods 0.000 claims description 13
- 239000010702 perfluoropolyether Substances 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000835 fiber Substances 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical group C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 10
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 9
- 239000004033 plastic Substances 0.000 claims description 7
- 229920003023 plastic Polymers 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 7
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 6
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 4
- 239000005977 Ethylene Substances 0.000 claims description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 4
- 238000009835 boiling Methods 0.000 claims description 4
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000004321 preservation Methods 0.000 claims description 4
- 239000007858 starting material Substances 0.000 claims description 4
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 claims description 3
- UCXUKTLCVSGCNR-UHFFFAOYSA-N diethylsilane Chemical compound CC[SiH2]CC UCXUKTLCVSGCNR-UHFFFAOYSA-N 0.000 claims description 2
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 claims description 2
- KCWYOFZQRFCIIE-UHFFFAOYSA-N ethylsilane Chemical compound CC[SiH3] KCWYOFZQRFCIIE-UHFFFAOYSA-N 0.000 claims description 2
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 claims description 2
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 6
- 238000007747 plating Methods 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 230000003666 anti-fingerprint Effects 0.000 description 29
- 230000000052 comparative effect Effects 0.000 description 19
- 238000002834 transmittance Methods 0.000 description 19
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 238000005299 abrasion Methods 0.000 description 14
- 230000001276 controlling effect Effects 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000004075 alteration Effects 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 8
- 239000004926 polymethyl methacrylate Substances 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- -1 acetylene or propyne Chemical class 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000006187 pill Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- XOFYZVNMUHMLCC-ZPOLXVRWSA-N prednisone Chemical compound O=C1C=C[C@]2(C)[C@H]3C(=O)C[C@](C)([C@@](CC4)(O)C(=O)CO)[C@@H]4[C@@H]3CCC2=C1 XOFYZVNMUHMLCC-ZPOLXVRWSA-N 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000001345 alkine derivatives Chemical class 0.000 description 1
- 239000006116 anti-fingerprint coating Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910021387 carbon allotrope Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009396 hybridization Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- MWWATHDPGQKSAR-UHFFFAOYSA-N propyne Chemical compound CC#C MWWATHDPGQKSAR-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Human Computer Interaction (AREA)
- General Physics & Mathematics (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The DLC coating is formed by depositing hydrocarbon monomers and silane monomers by a PECVD method, can be deposited at room temperature in a reaction mode, effectively avoids the influence of higher temperature on the performance of a base material in a conventional film plating mode, has the characteristics of low color difference, high transparency and high bonding strength, is simple in preparation method, is beneficial to process production, and is particularly suitable for coated products such as touch panels.
Description
Technical Field
The invention belongs to the field of chemical coatings, and particularly relates to a DLC coating, a preparation method and equipment thereof, a composite coating and a coated product.
Background
In recent years, along with continuous promotion and update of internet technology and industrial manufacturing technology, the daily life of people has entered into a multimedia era, and touch control screens visible everywhere in life and workplaces are various novel wearable electronic devices, so that great interestingness and convenience are brought to daily life and work. With the popularization of touch control, the characteristics of easy grinding and easy adhesion of fingerprints, on one hand, influence the appearance, on the other hand, influence the function use and bring bad use experience, so that an AF (anti-fingerprint) coating (anti-fingerprint coating) needs to be formed on the surface of the touch control, and Japanese Dajin provides a technology for evaporating fluorinated pills, so that the technology for evaporating the fluorinated pills brings about great promotion of wear resistance and fingerprint resistance and is widely accepted in industry. However, with the increasing use demands and the updating of application scenes, the abrasion resistance requirement on the intelligent touch panel is continuously improved, and the original technical bottleneck is broken through.
DLC (diamond-like coating) coatings are made by the hybridization of carbon allotrope isomers, combining the hard wear resistance of diamond with the flexible lubrication characteristics of graphite, giving DLC coatings a wide range of application possibilities. However, two main problems of limiting DLC coating application on touch panels (PC, glass, PMMA, etc.) are color difference of the film layer, influencing light transmittance, and another problem is film layer bonding strength, which is a concern for bonding with a substrate and subsequent plating of an oleophobic layer. In recent years, researchers have improved the comprehensive performance of the film by doping new elements into DLC coatings, and Ti, cr, zr, si, N and the like are the main doping elements. For example, the silicon-doped DLC coating is prepared by direct current magnetron sputtering, medium frequency magnetron sputtering and ion source assisted deposition, and the diamond-like carbon coating with lower friction coefficient can be obtained. On one hand, the method needs to compound multiple discharge modes simultaneously, the equipment structure is complex, the manufacturing cost is high, on the other hand, the coating temperature is higher than 150 ℃, and the deposition temperature is higher than the highest thermal deformation temperature of conventional high polymer materials such as PMMA, PC and the like, so that the method cannot meet the industrial stable production requirement in the field of touch panels.
Disclosure of Invention
The specific embodiment of the invention provides a DLC coating which is prepared by a PECVD (Plasma Enhanced Chemical Vapor Deposition ) method, is simple to prepare, is beneficial to process production, has low chromatic aberration, high transparency and high bonding strength, and an anti-fingerprint composite coating with low chromatic aberration, high transparency and more scratch resistance, which is prepared by the DLC coating, and the specific scheme is as follows:
a DLC coating, the DLC coating is formed by C x1 H y1 Hydrocarbon monomer and C of (C) x2 H y2 Si z Is deposited by a PECVD process, wherein x1 is an integer from 1 to 10, y1 is an integer from 2 to 22, x2 is an integer from 0 to 32, y2 is an integer from 4 to 68, and z is an integer from 1 to 4.
Optionally, the hydrocarbon monomer and the silane monomer have boiling points below 100 ℃ at normal pressure.
Optionally, the hydrocarbon monomer is methane, acetylene, benzene or ethylene.
Optionally, the silane monomer is silane, methylsilane, dimethylsilane, trimethylsilane, tetramethylsilane, ethylsilane or diethylsilane.
Optionally, the molar ratio of the hydrocarbon monomer to the silane monomer is 60:40-95:5.
Optionally, the DLC coating has a thickness of 5-100nm.
An apparatus for preparing a DLC coating as described above, the apparatus comprising:
a plasma reactor for forming DLC coating by deposition by PECVD method;
the monomer gasification control device is used for heating and gasifying hydrocarbon monomers which are liquid at normal temperature or controlling the gasification state of silane monomers;
the gas flowmeter is used for metering and controlling the flow of the gasified monomer;
and the heat preservation device is used for preserving heat of the monomer flowing line so as to ensure that the gasified monomer in the monomer gasification control device is stably introduced into the plasma reactor.
Optionally, the device further comprises a pressure gauge arranged between the monomer gasification control device and the gas flowmeter, and the temperature of the monomer gasification control device can be controlled according to the reading of the pressure gauge.
A method of preparing a DLC coating as described above, comprising the steps of:
providing a substrate, and placing the substrate in a plasma reactor;
and (3) metering the gases of the hydrocarbon monomer and the silane monomer into the plasma reactor, starting a bias power supply, and depositing a DLC coating on the substrate by adopting a PECVD method.
Optionally, the hydrocarbon monomer and the silane monomer are respectively metered in a gas form by a gas flowmeter.
Optionally, the silane monomer temperature is controlled, and the pressure of the silane monomer gas is controlled to be between 0.001MPa and 0.003 MPa.
Optionally, the flow rate of the hydrocarbon monomer is 10-200sccm, and the flow rate of the silane monomer is 5-100sccm.
Optionally, introducing the monomer gas and simultaneously introducing the inert gas, wherein the flow rate of the inert gas is 20-200sccm.
Alternatively, the pressure in the plasma reactor is 15-100mT, the bias voltage input is-200 to-800V, and the coating deposition time is 2-30min.
A composite coating comprising a DLC coating as described above and an AF coating formed on the DLC coating.
Optionally, the raw material of the AF coating comprises a perfluoropolyether polymer.
Optionally, the perfluoropolyether polymer is a perfluoropolyether silane or a perfluoropolyether alkoxysilane.
Optionally, the thickness of the AF coating is 5-20nm.
Alternatively, the AF coating is formed by deposition by vacuum evaporation.
A coated article having a composite coating as described above on at least a portion of its surface.
Optionally, the product is a touch panel.
Optionally, the coated article has a color difference of less than 0.5 before and after coating.
Optionally, the coated surface substrate of the product is glass, according to the steel wool test, after being subjected to 6000 times of reciprocating cycles with a 10N load, the speed is 40cycle/min, the test direction is the same as the fiber direction of the steel wool, the test stroke is 40mm, and the observed water drop angle is more than 100 degrees.
Optionally, the coated surface substrate of the product is plastic, according to the steel wool test, after being subjected to 800 reciprocating cycles with a 1N load, the speed is 40cycle/min, the test direction is the same as the fiber direction of the steel wool, the test stroke is 40mm, and the observed water drop angle is more than 100 degrees.
The DLC coating of the specific embodiment of the invention is deposited by a PECVD method by hydrocarbon monomer and silane monomer, can be deposited at room temperature to form a coating, effectively avoids the influence of higher temperature on the performance of a substrate in a conventional film plating mode, has the characteristics of low color difference, high transparency and high bonding strength, is simple in preparation method, is beneficial to process production, and is particularly suitable for coated products such as touch panels and the like due to the characteristics of low color difference, high transparency and more scratch resistance.
Drawings
FIG. 1 is a schematic view of an apparatus for producing DLC coating according to an embodiment of the present invention.
Detailed Description
Embodiments of the present invention provide a DLC coating consisting of C x1 H y1 Hydrocarbon monomer and C of (C) x2 H y2 Si z Is deposited by a PECVD process, wherein x1 is an integer from 1 to 10, y1 is an integer from 2 to 22, x2 is an integer from 0 to 32, y2 is an integer from 4 to 68, and z is an integer from 1 to 4.
The DLC coating of the specific embodiment of the invention is doped with silicon element by utilizing a PECVD method, can be deposited at room temperature to form the coating, effectively avoids the influence of higher temperature on the performance of a base material in a conventional coating mode, can be well applied to polymer materials such as PC, PMMA and the like which are conventionally used for touch panels, and can solve the problem that DLC is easy to yellow and color by creatively applying a silicon doping technology to the touch panel.
According to the DLC coating of the specific embodiments, in some specific embodiments, the boiling points of the hydrocarbon monomer and the silane monomer are below 100 ℃, and the monomer with the boiling point below 100 ℃ is used, so that the gasification state of the monomer can be easily controlled, the ratio of the hydrocarbon monomer to the silane monomer can be accurately and continuously controlled by controlling the flow of the gas monomer, the ratio of carbon, hydrogen and silicon in DLC can be accurately controlled, and the hardness, low chromatic aberration and high transparency of the DLC coating can be better ensured.
DLC coatings according to embodiments of the invention, in some embodiments, the x1 is an integer from 1 to 4, y1 is an integer from 2 to 10, x2 is an integer from 0 to 16, y2 is an integer from 4 to 36, and z is 1.
DLC coatings according to embodiments of the invention, in some embodiments, the hydrocarbon monomer may be an alkyne, such as acetylene or propyne, an alkene, such as ethylene or propylene, an alkane, such as methane, ethane or propane, or the like, or an aromatic hydrocarbon, such as benzene, and the hydrocarbon monomer may be one or more.
DLC coatings of embodiments of the invention, in some embodiments, the molar ratio of hydrocarbon monomer to silane monomer is in the range of 60:40 to 95:5, and specifically, for example, 60:40, 65:35, 70:30, 75:25, 80:20, 85:15, 90:10, or 95:5, etc.
DLC coatings according to embodiments of the invention, in some embodiments, the DLC coating may have a thickness of 5 to 100nm, and may be, for example, specifically 5nm, 10nm, 15nm, 20nm, 25nm, 30nm, 35nm, 40nm, 45nm, 50nm, 55nm, 60nm, 65nm, 70nm, 75nm, 80nm, 85nm, 90nm, 95nm or 100nm, etc.
The specific embodiment of the invention also provides a device for preparing the DLC coating, which comprises:
a plasma reactor for forming DLC coating by deposition by PECVD method;
the monomer gasification control device is used for heating and gasifying hydrocarbon monomers which are liquid at normal temperature or controlling the gasification state of silane monomers;
the gas flowmeter is used for metering and controlling the flow of the gasified monomer;
and the heat preservation device is used for preserving heat of the monomer flowing line so as to ensure that the gasified monomer in the monomer gasification control device is stably introduced into the plasma reactor.
The DLC coating producing apparatus according to the embodiment of the invention will be further described with reference to fig. 1, as a schematic view of the DLC coating producing apparatus according to the embodiment of the invention of fig. 1, the DLC coating producing apparatus according to the embodiment of the invention comprising:
a plasma reactor 1 for forming a DLC coating by deposition by a PECVD method;
the monomer gasification control device is used for heating and gasifying hydrocarbon monomers which are liquid at normal temperature or controlling the gasification state of silane monomers;
a first gas flowmeter 6 for precisely metering and controlling the flow rate of the gasified monomer; and the heat preservation device is used for preserving heat of the monomer flowing line so as to ensure that the gasified monomer is in a gasification state in the process of being introduced into the plasma reactor 1.
In some embodiments, the monomer gasification control device includes a monomer container 2 and a temperature control device 3, in some embodiments, the monomer in the monomer container 2 is a hydrocarbon monomer that is liquid at normal temperature, the monomer container 2 is heated by the temperature control device 3 to gasify the hydrocarbon monomer that is liquid at normal temperature, so that the introducing amount of the hydrocarbon monomer that is liquid at normal temperature can be accurately measured by the first gas flow meter 6, in some embodiments, the monomer in the monomer container 2 is a silane monomer, the monomer container 2 is in a suitable temperature state by the temperature control device 3, so that the introducing amount of the silane monomer can be accurately measured by the first gas flow meter 6, and in some embodiments, the temperature control device 3 is a water bath or an oil bath device.
In some embodiments, a pressure gauge 4 is disposed between the monomer gasification control device and the first gas flow meter 6, and the temperature of the monomer gasification control device can be controlled according to the reading of the pressure gauge, for example, in some embodiments, the temperature of the temperature control device 3 is adjusted by monitoring the pressure gauge 4, so as to control the pressure between 0.001MPa and 0.003 MPa.
The DLC coating producing apparatus of the embodiment of the invention further includes, in some embodiments, a second gas flow meter 7 for precisely metering and controlling the flow rate of the hydrocarbon monomer such as methane, ethylene, acetylene, or the like, which is a gas at ordinary temperature.
In some embodiments, the DLC coating preparation device of the present invention has a plurality of hydrocarbon monomers and silane monomers that are liquid at normal temperature, and the corresponding monomer gasification control device and the first gas flow meter 6 are provided in a plurality.
In some embodiments, the DLC coating producing device according to the embodiment of the invention has a plurality of hydrocarbon monomers that are gas at normal temperature, and the corresponding second gas flow meters 7 are provided in a plurality.
The DLC coating producing device according to embodiments of the invention, in some embodiments, further comprises a further second gas flow meter 7 for metering in an inert carrier gas, such as helium or argon.
The DLC coating producing device of the embodiments of the invention, in some embodiments, further comprises a gas mixing device 5 for mixing the various monomer gases uniformly before entering the plasma reactor 1.
According to the DLC coating preparation device, the proportion of carbon, hydrogen and silicon in the DLC coating can be precisely controlled by precisely controlling the proportion of the monomers in a mode of controlling the flow of the gasified monomers, particularly the flow of the silane gasified monomers, so that the hardness, low chromatic aberration and high transparency of the DLC coating are better ensured.
The specific embodiment of the invention also provides a preparation method of the DLC coating, which comprises the following steps:
providing a substrate, and placing the substrate in a plasma reactor;
and (3) metering the gases of the hydrocarbon monomer and the silane monomer into the plasma reactor, starting a bias power supply, and depositing a DLC coating on the substrate by adopting a PECVD method.
In some embodiments, the substrate is made of metal, ceramic, plastic, glass, or the like.
According to the preparation method of the DLC coating, in some specific embodiments, the substrate is a touch panel.
In some embodiments, to further enhance the binding force between the plasma coating and the substrate, the substrate is cleaned, for example, in some embodiments, before the DLC coating, 0-200sccm argon and/or 0-200sccm oxygen is introduced, the pressure is controlled at 15-100mT, the bias power is turned on, the voltage is fed to-300 to-1000V, the substrate is bombarded and cleaned for 5-20min, and the surface oxide and other pollutants of the substrate of the product are etched clean, so that a high surface energy interface is formed, thereby providing a good deposition basis for DLC.
According to the preparation method of the DLC coating in the specific embodiments, in some specific embodiments, the hydrocarbon monomer which is gas at normal temperature is directly and accurately measured by a gas flowmeter, the hydrocarbon monomer which is liquid at normal temperature is heated and gasified first, the hydrocarbon monomer which is liquid at normal temperature is accurately measured by the gas flowmeter, the silane monomer is controlled to have the pressure between 0.001MPa and 0.003MPa by controlling the temperature, and the silane monomer is accurately measured by the gas flowmeter, so that the proportion of the monomer is accurately controlled to accurately control the proportion of carbon, hydrogen and silicon in the DLC coating, and the hardness, low chromatic aberration and high transparency of the DLC coating are better ensured.
According to the preparation method of the DLC coating in the specific embodiments, in some specific embodiments, the flow rate of the hydrocarbon monomer is 10-200sccm, the flow rate of the silane monomer is 5-100sccm, the molar ratio of the hydrocarbon monomer to the silane monomer is 60:40-95:5, and the specific molar ratio of the hydrocarbon monomer to the silane monomer can be controlled by adjusting according to the material of a base material, the specific hydrocarbon monomer to the silane monomer, actual requirements and the like, for example, 60:40, 65:35, 70:30, 75:25, 80:20, 85:15, 90:10 or 95:5, etc.
According to the preparation method of the DLC coating, in some specific embodiments, the monomer gas is introduced, and meanwhile, inert gas such as argon or neon is introduced, wherein the flow rate of the inert gas is 20-200sccm.
In some embodiments, the DLC coating is prepared at a pressure of 15 to 100mT in a plasma reactor, a bias voltage input of-200 to-800V, and a coating deposition time of 2 to 30 minutes.
The description of the hydrocarbon monomer and the silane monomer is as described above.
Embodiments of the present invention also provide a composite coating comprising a DLC coating as described above and an AF coating formed on the DLC coating.
The DLC coating doped with Si element in the specific embodiment of the invention provides a good connection point for the AF coating, can cancel the process of plating silicon dioxide before the AF coating and can also obtain excellent bonding strength of AF and a touch panel, meanwhile, the hardness (1500 HV) of the DLC coating is higher than that of silicon dioxide (1100 HV), so that the mechanical durability of the AF coating can be further improved, and the friction resistance effect of the AF coating is remarkably improved.
In some embodiments, the starting material of the AF coating is a conventional AF coating starting material, for example, in some embodiments, the starting material of the AF coating is a fluorinated material, such as a perfluoropolyether polymer or other suitable fluorinated material. In some embodiments, the perfluoropolyether polymer is a perfluoropolyether silane or a perfluoropolyether alkoxysilane. Specifically, in some embodiments, the perfluoropolyether polymer can be UD509, made by Dain chemical Co., ltd., KY-178, KY-185, KY-1900, fomblin, made by St. Chemical Co., ltd., su-Wis., etc.
In some embodiments, the AF coating has a thickness of 5-20nm, which may be, for example, 5nm, 10nm, 15nm, 20nm, etc.
In some embodiments, the AF coating is formed by vacuum evaporation, and in some embodiments, the AF coating can be formed by other means, such as spray plating.
Embodiments of the present invention also provide a coated article having a composite coating as described above on at least a portion of a surface of the coated article.
In some embodiments, the coated article of embodiments of the present invention is a touch panel, such as a touch panel including a cell phone, tablet, vehicle, television, or LED, and the like, in some embodiments, the article is an electrical article, a construction article, or any article requiring transparency, scratch or abrasion resistance.
In some embodiments, the coated article has a color difference of less than 0.5 before and after coating, in some embodiments, the coated article has a color difference of less than 0.4 before and after coating, and in some embodiments, the coated article has a color difference of less than 0.3 before and after coating.
The coated article of embodiments of the present invention has excellent abrasion resistance, in some embodiments the coated surface substrate of the article is glass, after being subjected to 6000 cycles with a 10N load according to the steel wool test, has a velocity of 40cycle/min, a test direction identical to the fiber direction of the steel wool, a test stroke of 40mm, an observed water drop angle of 100 degrees or more, in some embodiments the coated surface substrate of the article is glass, after being subjected to 7000 cycles with a 10N load according to the steel wool test, has a velocity of 40cycle/min, a test direction identical to the fiber direction of the steel wool, a test stroke of 40mm, an observed water drop angle of 100 degrees or more, in some embodiments the coated surface substrate of the article is glass, after being subjected to 8000 cycles with a 10N load according to the steel wool test, has a velocity of 40cycle/min, the test direction is the same as the fiber direction of the steel wool, the test travel is 40mm, the observed water drop angle is above 100 degrees, in some embodiments, the coated surface substrate of the article is plastic, after being subjected to 800 cycles of reciprocation with a 1N load according to the steel wool test, the speed is 40 cycles/min, the test direction is the same as the fiber direction of the steel wool, the test travel is 40mm, the observed water drop angle is above 100 degrees, in some embodiments, the coated surface substrate of the article is plastic, after being subjected to 900 cycles of reciprocation with a 1N load according to the steel wool test, the speed is 40 cycles/min, the test direction is the same as the fiber direction of the steel wool, the test travel is 40mm, the observed water drop angle is above 100 degrees, in some embodiments, the coated surface substrate of the article is plastic, after being subjected to 1000 cycles of reciprocation with a 1N load according to the steel wool test, the speed is 40cycle/min, the test direction is the same as the fiber direction of the steel wool, the test stroke is 40mm, and the observed water drop angle is more than 100 degrees.
The invention is further illustrated by the following examples.
Examples
Description of the test methods
Coating water drop angle: the test was performed according to the GB/T3047-2013 standard.
Coating light transmittance and color difference: the calculation is carried out according to the GB11186.3-1989 standard, a KONICA spectrometer CM-5 is used, a light source is selected as a C light source for detection, delta E in the test result represents chromatic aberration,t represents light transmittance;l, a, b denote three color channels in the Lab color model, L denotes brightness, a denotes red-green, and b denotes yellow-blue.
Abrasion resistance and abrasion resistance test: the method is characterized in that a Taber5900 reciprocating friction machine is adopted, bonstar #0000 steel wool is adopted, a 10N load is adopted for a glass substrate/a 1N load is adopted for a plastic substrate, the speed is 40 cycles/min, the testing direction is the same as the fiber direction of the steel wool, the testing stroke is 40mm, and the times that the water drop angle is smaller than 100 degrees are observed.
Example 1
And (3) cleaning the surface of the glass touch panel by using dry nitrogen, placing the glass touch panel into a vacuum chamber of a plasma reactor, discharging the impurity gas in the chamber through a vacuum pump set, introducing 100sccm argon when the vacuum pressure is less than 0.05mT, controlling the pressure at 30mT, switching on a bias power supply, feeding-400V voltage, and bombarding and cleaning the substrate for 5min. Then the power supply and the air source are turned off, the water bath is turned on to control the water bath temperature to 26 ℃, the gas pressure value of the tetramethylsilane monomer is controlled to be between 0.001MPa and 0.003MPa at the temperature, the gas flow valve is regulated, the flow of the tetramethylsilane monomer is controlled to be 40sccm, the flow of argon is 100sccm, the flow of methane is 80sccm, the mixture is fed into the gas mixer and then is fed into the plasma reactor, the pressure in the cavity of the plasma reactor is controlled to be 30mT, the bias power supply is turned on, the voltage is input to-300V, the coating time is 10min, a layer of 20nm high-transparency high-hardness DLC coating is obtained by plating, then the power supply, the air source and the pump group are turned off in sequence, and the chamber door of the plasma reactor is turned on to take out the glass touch panel.
Placing the glass touch panel with the DLC coating into an AF evaporation chamber, and vacuumizing to 3.0X10 - 3 Pa, introducing UD509AF liquid, evaporating to obtain current 12A for 800s, evaporating to obtain a 10nm AF coating, and taking out the glass touch panel.
The above glass touch panel having DLC coating and AF coating deposited in this order was subjected to light transmittance, color difference and abrasion resistance test, and the results are shown in table 1 below.
Example 2
The glass touch panel in example 1 was changed to a PC touch panel, 100sccm argon gas introduced in the substrate cleaning step was changed to 100sccm oxygen gas, the cleaning time was prolonged to 20min, and the other process steps were unchanged, and the PC touch panel with DLC coating and AF coating deposited in this order was subjected to light transmittance, color difference and abrasion resistance test, and the results are shown in table 1 below.
Example 3
The glass touch panel in example 1 was changed to a PMMA touch panel, the etching cleaning time was shortened to 2min, other process steps were unchanged, and the PMMA touch panel with DLC coating and AF coating deposited in this order was subjected to light transmittance, color difference and abrasion resistance test, and the results are shown in table 1 below.
Example 4
The glass touch panel with DLC coating and AF coating deposited in this order was tested for light transmittance, color difference and abrasion resistance by changing the water bath temperature in example 1 to 10 ℃ and changing the tetramethylsilane monomer to trimethylsilane monomer, with other process step parameters maintained, and the results are shown in table 1 below.
Comparative example 1
And (3) cleaning the surface of the glass touch panel by using dry nitrogen, putting the glass touch panel into a vacuum chamber of a plasma reactor, discharging miscellaneous gas in the chamber through a vacuum pump set, when the vacuum pressure is less than 0.05mT, introducing 100sccm argon, controlling the pressure at 30mT, switching on a bias power supply, feeding-400V voltage, bombarding and cleaning a substrate for 5min, taking out, and spraying a 20nm silicon dioxide layer and a 10nm UD509AF layer on the surface by adopting a conventional spraying mode. The coated glass touch panel was subjected to light transmittance, color difference and abrasion resistance test, and the results are shown in table 1 below.
Comparative example 2
The surface of a glass touch panel is purged by dry nitrogen and put into a vacuum chamber of a plasma reactor, the impurity gas in the chamber is discharged through a vacuum pump set, when the vacuum pressure is less than 0.05mT, 100sccm argon is introduced, the pressure is controlled at 30mT, a bias power supply is turned on, a voltage of-400V is fed, the substrate is bombarded and cleaned for 5min, the substrate is taken out and put into an evaporation chamber, and the vacuum bottom pressure is pumped to 4.0 multiplied by 10 at first -3 Under Pa, setting the current of the evaporation boat filled with silicon dioxide to 30A for 120s, evaporating a layer of dioxygen of 20nmA silicon layer is formed, and then vacuum is pumped to 3.0X10 -3 Pa, introducing UD509AF liquid into another evaporation boat, evaporating boat current 12A for 800s, evaporating a 10nm AF coating layer, and taking out the glass touch panel. The coated glass touch panel was subjected to light transmittance, color difference and abrasion resistance test, and the results are shown in table 1 below.
Comparative example 3
The flow of the tetramethylsilane monomer in example 1 was set to zero, the coating time was prolonged to 15min, other process step parameters were kept unchanged, a 20nm dlc coating was obtained by coating, and then a 10nm AF coating was prepared under the same process conditions. The glass touch panel with DLC coating and AF coating deposited in this order was subjected to light transmittance, color difference, and abrasion resistance test, and the results are shown in table 1 below.
Comparative example 4
The glass touch panel was purged only with dry nitrogen and was not coated, and the light transmittance was measured, and the results are shown in table 1 below.
Comparative example 5
The PC touch panel was purged only with dry nitrogen and not coated, and the light transmittance was tested and the results are shown in table 1 below.
Comparative example 6
The PMMA touch panel was purged with dry nitrogen only, without coating, and was subjected to a light transmittance test, the results of which are listed in table 1 below.
TABLE 1 results of Performance test of examples 1-4 and comparative examples 1-6
| Transmittance of light | Color difference delta E | Number of wear-resistant times | |
| Example 1 | 91.4％ | 0.2 | 8000 |
| Example 2 | 89.9％ | 0.1 | 1000 |
| Example 3 | 92.5％ | 0.2 | 1000 |
| Example 4 | 91.3％ | 0.3 | 8000 |
| Comparative example 1 | 91.3 | 0.2 | 1000 |
| Comparative example 2 | 91.4％ | 0.1 | 3000 |
| Comparative example 3 | 88.2％ | 2.3 | 500 |
| Comparative example 4 | 91.5％ | - | - |
| Comparative example 5 | 90％ | - | - |
| Comparative example 6 | 92.7％ | - | - |
According to the results of table 1 above, the coated glass touch panels of example 1 and example 4 have substantially identical light transmittance as the uncoated glass touch panel of comparative example 4, the coated PC touch panel of example 2 has substantially identical light transmittance as the uncoated PC touch panel of comparative example 5, and the coated PMMA touch panel of example 3 has substantially identical light transmittance as the uncoated PMMA touch panel of comparative example 6, indicating that the DLC coating and the composite coating of the present invention have excellent light transmittance; the number of abrasion resistance times of example 1 is much higher than those of comparative examples 1 and 2, indicating that the composite coating of the present invention has more excellent abrasion resistance properties than those of comparative examples 1 and 2; compared with the example 1, the DLC coating in the comparative example 3 is not filled with tetramethylsilane monomer for Si doping, the light transmittance is obviously reduced, the chromatic aberration is obviously improved, the wear-resisting times are sharply reduced, and the composite coating obtained by depositing the AF coating on the DLC coating has the characteristics of low chromatic aberration, high transparency and more scratch resistance.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention, and the scope of the invention should be assessed accordingly to that of the appended claims.
Claims (24)
1. A DLC coating is characterized in that the DLC coating is composed of C x1 H y1 Hydrocarbon monomer and C of (C) x2 H y2 Si z Is deposited by a PECVD process, wherein x1 is an integer from 1 to 10, y1 is an integer from 2 to 22, x2 is an integer from 0 to 32, y2 is an integer from 4 to 68, and z is an integer from 1 to 4.
2. The DLC coating of claim 1, wherein the hydrocarbon monomer and silane monomer have boiling points below 100 ℃ at normal pressure.
3. The DLC coating of claim 2 wherein the hydrocarbon monomer is methane, acetylene, benzene or ethylene.
4. The DLC coating of claim 2, wherein the silane monomer is silane, methylsilane, dimethylsilane, trimethylsilane, tetramethylsilane, ethylsilane, or diethylsilane.
5. The DLC coating of claim 1, wherein the molar ratio of hydrocarbon monomer to silane monomer is 60:40 to 95:5.
6. The DLC coating of claim 1, having a thickness of 5-100nm.
7. An apparatus for producing a DLC coating as defined in any one of claims 1 to 6, characterised in that the apparatus comprises:
a plasma reactor for forming DLC coating by deposition by PECVD method;
the monomer gasification control device is used for heating and gasifying hydrocarbon monomers which are liquid at normal temperature or controlling the gasification state of silane monomers;
the gas flowmeter is used for metering and controlling the flow of the gasified monomer;
and the heat preservation device is used for preserving heat of the monomer flowing line so as to ensure that the gasified monomer in the monomer gasification control device is stably introduced into the plasma reactor.
8. The DLC coating producing apparatus according to claim 7, further comprising a pressure gauge provided between the monomer evaporation control means and the gas flow meter, the temperature of the monomer evaporation control means being controlled based on the reading of the pressure gauge.
9. A method for producing a DLC coating as defined in any one of claims 1 to 6, characterized by comprising the steps of:
providing a substrate, and placing the substrate in a plasma reactor;
and (3) metering the gases of the hydrocarbon monomer and the silane monomer into the plasma reactor, starting a bias power supply, and depositing a DLC coating on the substrate by adopting a PECVD method.
10. The DLC coating producing method according to claim 9, wherein the hydrocarbon monomer and the silane monomer are introduced in the form of gas by a gas flow meter, respectively.
11. The DLC coating producing method according to claim 10, wherein the silane monomer temperature is controlled, and the pressure of the silane monomer gas is controlled to be between 0.001MPa and 0.003 MPa.
12. The DLC coating producing method according to claim 10, wherein the flow rate of the hydrocarbon monomer is 10-200sccm, and the flow rate of the silane monomer is 5-100sccm.
13. The DLC coating producing method according to claim 10, wherein the monomer gas is introduced while introducing an inert gas, and the flow rate of the inert gas is 20 to 200sccm.
14. The DLC coating producing method according to claim 10, wherein the pressure in the plasma reactor is 15-100mT, the bias voltage input is-200 to-800V, and the coating depositing time is 2-30min.
15. A composite coating comprising the DLC coating of any one of claims 1 to 6 and an AF coating formed on the DLC coating.
16. The composite coating of claim 15, wherein the starting material of the AF coating comprises a perfluoropolyether polymer.
17. The composite coating of claim 16, wherein the perfluoropolyether polymer is a perfluoropolyether silane or a perfluoropolyether alkoxysilane.
18. The composite coating of claim 15, wherein the AF coating has a thickness of 5-20nm.
19. The composite coating of claim 15, wherein the AF coating is deposited by a vacuum evaporation method.
20. A coated article having at least a portion of its surface provided with the composite coating of any one of claims 15-19.
21. The coated article of claim 20, wherein the article is a touch panel.
22. The coated article of claim 20, wherein the coated article has a color difference of less than 0.5 before and after coating.
23. The coated article of claim 20, wherein the coated surface substrate of the article is glass, and wherein after being subjected to 6000 cycles of reciprocation with a 10N load according to a steel wool test, the speed is 40 cycles/min, the test direction is the same as the fiber direction of the steel wool, the test travel is 40mm, and the observed water drop angle is 100 ° or more.
24. The coated article of claim 20, wherein the coated surface substrate of the article is plastic, and has a velocity of 40 cycles/min after 800 cycles of reciprocation with a 1N load according to a steel wool test, a test direction of the same as a fiber direction of the steel wool, a test stroke of 40mm, and an observed water drop angle of 100 ° or more.
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| CN202210395178.5A CN116949418A (en) | 2022-04-15 | 2022-04-15 | DLC coating, preparation method and equipment thereof, composite coating and coated product |
| PCT/CN2023/081532 WO2023197812A1 (en) | 2022-04-15 | 2023-03-15 | Dlc coating and preparation method and device therefor, composite coating layer and coated product |
| TW112110301A TW202403081A (en) | 2022-04-15 | 2023-03-20 | DLC (Diamond Like Carbon) coating, preparation method and equipment thereof, composite coating and coated product |
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| CN202210395178.5A CN116949418A (en) | 2022-04-15 | 2022-04-15 | DLC coating, preparation method and equipment thereof, composite coating and coated product |
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| US5508368A (en) * | 1994-03-03 | 1996-04-16 | Diamonex, Incorporated | Ion beam process for deposition of highly abrasion-resistant coatings |
| US6582823B1 (en) * | 1999-04-30 | 2003-06-24 | North Carolina State University | Wear-resistant polymeric articles and methods of making the same |
| CN100467664C (en) * | 2005-11-11 | 2009-03-11 | 东北大学 | Method for manufacturing diamond-like film and part with coating manufactured thereby |
| KR20160049110A (en) * | 2014-10-24 | 2016-05-09 | 한국광기술원 | method of coating superhydrophobic film |
| US10413948B2 (en) * | 2017-04-25 | 2019-09-17 | Corning Incorporated | Glass, glass-ceramic and ceramic articles with lubricious anti-fingerprint coatings and methods of making the same |
| EP3658697A1 (en) * | 2017-07-26 | 2020-06-03 | Saint-Gobain Glass France | Coating with diamond-like carbon by means of a pecvd magnetron method |
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