CN116946987A - Electronic grade nitric acid preparation device and preparation process thereof - Google Patents
Electronic grade nitric acid preparation device and preparation process thereof Download PDFInfo
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- CN116946987A CN116946987A CN202311213699.5A CN202311213699A CN116946987A CN 116946987 A CN116946987 A CN 116946987A CN 202311213699 A CN202311213699 A CN 202311213699A CN 116946987 A CN116946987 A CN 116946987A
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- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 229910017604 nitric acid Inorganic materials 0.000 title claims abstract description 57
- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- 238000001471 micro-filtration Methods 0.000 claims abstract description 38
- 239000012528 membrane Substances 0.000 claims abstract description 35
- 239000007788 liquid Substances 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 18
- 238000004821 distillation Methods 0.000 claims abstract description 15
- 238000000108 ultra-filtration Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000007664 blowing Methods 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 27
- 238000001914 filtration Methods 0.000 claims description 10
- 239000011265 semifinished product Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 4
- 238000009833 condensation Methods 0.000 claims description 3
- 230000005494 condensation Effects 0.000 claims description 3
- 238000010926 purge Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 6
- 239000002245 particle Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 3
- 235000017491 Bambusa tulda Nutrition 0.000 description 3
- 241001330002 Bambuseae Species 0.000 description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 3
- 239000011425 bamboo Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/20—Nitrogen oxides; Oxyacids of nitrogen; Salts thereof
- C01B21/38—Nitric acid
- C01B21/46—Purification; Separation ; Stabilisation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention relates to the field of nitric acid preparation, and discloses an electronic grade nitric acid preparation device and a preparation process thereof, wherein the preparation device comprises a microfiltration mechanism, a distillation condensing mechanism, a white blowing mechanism and an ultrafiltration mechanism which are sequentially arranged; the micro-filtration mechanism comprises a micro-filtration unit, the micro-filtration unit comprises a cylindrical shell, a liquid inlet connector is arranged at one side of the upper end of the shell, sealing covers are respectively arranged at two ends of the shell, a filter element assembly is arranged in the shell, the filter element assembly comprises a cylindrical framework, end covers are respectively arranged at two ends of the framework, a membrane sleeve is sleeved on the framework, and the two end covers are respectively rotatably arranged on the two sealing covers; the outer wall of the framework is provided with a diaphragm, the diaphragm is connected with an adjusting component, and the adjusting component is used for adjusting the diaphragm to be covered on the outer wall of the membrane sleeve or away from the membrane sleeve in a fitting way; the electronic grade nitric acid preparation device and the process provided by the invention can realize effective microfiltration treatment of nitric acid, the service life of the filter element is long, the replacement frequency is effectively reduced, and the filter element component has self-cleaning function.
Description
Technical Field
The invention relates to the field of nitric acid preparation, in particular to an electronic grade nitric acid preparation device and a preparation process thereof.
Background
Electronic grade reagents, also known as microelectronics chemicals, are one of the key materials indispensable in electronic processing, and their purity plays an important role in the performance and reliability of the processed electronic products. The electronic grade nitric acid is also called ultra-pure nitric acid, belongs to ultra-clean high-purity reagent, is one of eight electronic grade chemical materials commonly used in the electronic industry, has great effect on etching in the semiconductor, flat panel display and photovoltaic industries, and has direct influence on the yield, electrical property and reliability of an integrated circuit in terms of purity.
The existing electronic grade nitric acid is prepared from nitric acid raw material with the concentration of about 70%, the nitric acid solution is required to be subjected to microfiltration treatment in the preparation process, then the microfiltration nitric acid solution is heated and condensed to obtain a semi-finished product, the semi-finished product is subjected to blowing-white treatment by blowing-white air, and finally the electronic grade nitric acid is obtained by ultrafiltration, and when the traditional preparation device is subjected to microfiltration treatment, a microfiltration membrane is usually adopted for filtration, wherein the principle of the filtration is as follows:
isolation function: the filter element of the microfiltration material has micron or submicron pore sizes which can effectively block larger particles, suspended substances, bacteria and the like from passing through the filter element, thereby realizing the isolation of the particles. Trapping: the surface of the filter element has certain adsorption capacity and can adsorb tiny particles and colloid substances in the solution. As the solution passes through the cartridge, these particles become trapped on the surface of the cartridge, thereby effecting their separation. Liquid permeation: the liquid molecules are much smaller in size than the particles and suspensions, and can flow through the microporous structure of the cartridge. Therefore, the micropores of the filter element can pass through the clear liquid, and the suspended matters are left on the filter element, so that the suspended matters are separated.
However, after the filter element in the conventional microfilter is used for a certain period of time, the accumulated matters on the surface of the filter element can be increased, so that the filtering effect of the filter element can be affected, the filter element needs to be cleaned and replaced frequently, and the cleaning and replacing period is short.
Disclosure of Invention
In order to solve the technical problems, the invention provides an electronic grade nitric acid preparation device and a preparation process thereof.
An electronic grade nitric acid preparation device comprises a microfiltration mechanism, a distillation condensing mechanism, a white blowing mechanism and an ultrafiltration mechanism which are sequentially arranged;
the micro-filtration mechanism comprises a micro-filtration unit, the micro-filtration unit comprises a cylindrical shell, a liquid inlet connector is arranged on one side of the upper end of the shell, the shell is vertically arranged, sealing covers are respectively arranged at two ends of the shell, a filter element component is arranged in the shell, the filter element component comprises a cylindrical framework, end covers are respectively arranged at two ends of the framework, a membrane sleeve is sleeved on the framework, the membrane sleeve and the end covers enclose the inside of the framework into a closed filter cavity, and the two end covers are respectively rotatably arranged on the two sealing covers;
the diaphragm is arranged on the outer wall of the framework, the diaphragm is connected with the adjusting component, and the adjusting component is used for adjusting the diaphragm to be attached to and covered on the outer wall of the diaphragm sleeve or away from the diaphragm sleeve.
The preferable mode is as follows: the diaphragm is installed on supporting component, and supporting component includes the bracing piece, and the bracing piece both ends are rotated and are installed on the end cover, and the bracing piece is arranged along the length direction of skeleton, and the bracing piece is arranged in the outside of membrane cover, and the border demountable installation of diaphragm is on the bracing piece, and the end cover and the bracing piece connection adjustment subassembly that lie in the top, adjustment subassembly are used for adjusting bracing piece and end cover rotation.
The preferable mode is as follows: the diaphragms and the supporting components are distributed in a one-to-one correspondence mode, and the diaphragms are distributed in a circumferential array mode around the central line of the framework.
More preferred is the following: when the films are attached to and covered on the outer wall of the film sleeve, each film covers the outer wall of the film sleeve completely.
The preferable mode is as follows: the two ends of the membrane sleeve are provided with clamping rings which are connected in annular clamping grooves at the two ends of the framework.
The preferable mode is as follows: the adjusting assembly comprises driven pieces and a transmission assembly, the driven pieces and the supporting rods are arranged in one-to-one correspondence, the upper ends of the supporting rods penetrate through end covers located above, the driven pieces are fixedly installed at the upper ends of the supporting rods, the driven pieces are connected with the transmission assembly, and the transmission assembly is used for driving the driven pieces to synchronously rotate.
The preferable mode is as follows: the transmission assembly comprises a rotary drum, the rotary drum is rotatably arranged on a sealing cover above the framework, the upper end of the rotary drum is connected with the driving assembly, the lower end of the rotary drum is provided with a linkage fluted disc, and the driven part is a gear, and each gear is meshed with the linkage fluted disc.
The preferable mode is as follows: the driving assembly comprises a fluted disc and a rack, the fluted disc is fixedly arranged at the upper end of the rotary drum, and the rack is meshed with the fluted disc.
The preferable mode is as follows: the end cover upper end has a transmission section of thick bamboo portion, and the rotary drum cup joints on transmission section of thick bamboo portion, and the trigger groove has been seted up to transmission section of thick bamboo portion outer wall, and the rotary drum inner wall has to support to lean on protruding with its position that corresponds, supports protruding slidable mounting in trigger inslot, and the rotary drum rotates the in-process, supports to lean on protruding in trigger inslot slip and support the cell end of trigger groove.
The preferable mode is as follows: a pipe A is arranged on the sealing cover positioned above, a pipe B is arranged on the sealing cover positioned below, the pipe A and the pipe B are both communicated with the filter cavity, the pipe A is arranged in the transmission barrel part, the pipe A is respectively connected with the air extraction mechanism and the recoil mechanism, the pipe B is connected with the liquid discharge mechanism and the liquid transfer mechanism, and the liquid transfer mechanism is connected with the distillation condensation mechanism.
An electronic grade nitric acid preparation process comprises the following steps:
s1: micro-filtering nitric acid;
transferring the nitric acid raw material into a micro-filtration unit for micro-filtration treatment;
s2: distilling and condensing;
cooling steam generated by distillation by adopting a multi-stage distillation system to obtain a semi-finished product;
s3: performing blowing white treatment;
purging the semi-finished product by adopting high-purity compressed air;
s4: ultrafiltration treatment;
and performing ultrafiltration treatment on the nitric acid after the blowing-out to obtain the electronic grade nitric acid.
The invention has the beneficial effects that: the electronic grade nitric acid preparation device and the process provided by the invention can realize effective microfiltration treatment of nitric acid, the filter element has long service life, the replacement frequency is effectively reduced, and the filter element component has a self-cleaning function and a good self-cleaning effect.
Drawings
FIG. 1 is a schematic diagram of the structure of a microfiltration unit in an electronic grade nitric acid production device according to the present invention;
FIG. 2 is a schematic diagram of the structure of the interior of a microfiltration unit in an electronic grade nitric acid production device according to the present invention;
FIG. 3 is a schematic structural view of a filter element assembly in a microfiltration unit in an electronic grade nitric acid production device according to the present invention;
FIG. 4 is a schematic diagram of the structure of the adjusting component in the micro-filtration unit in the electronic grade nitric acid preparing apparatus according to the present invention;
fig. 5 is a schematic diagram of a top view structure of a transmission assembly in a microfiltration unit in an electronic grade nitric acid preparation device according to the present invention.
In the figure: 100. a housing; 110. sealing cover; 111. a pipe A; 112. a B pipe; 120. a liquid inlet joint; 130. a filter element assembly; 131. a skeleton; 132. an end cap; 132a, a transmission barrel portion; 132b, trigger slots; 133. an annular clamping groove; 134. a membrane sleeve; 135. a clasp; 136. a membrane; 140. a support assembly; 141. a support rod; 150. an adjustment assembly; 151. a gear; 152. a linkage fluted disc; 152a, abutment projections; 153. a rotating drum; 154. fluted disc; 155. a rack.
Detailed Description
The subject matter described herein will now be discussed with reference to example embodiments. It should be appreciated that these embodiments are discussed so that those skilled in the art will better understand and realize the subject matter described herein. Changes may be made in the function and arrangement of elements discussed without departing from the scope of the disclosure as set forth in the specification. Various examples may omit, replace, or add various procedures or components as desired. In addition, features described with respect to some examples may be combined in other examples as well.
Example 1
Referring to fig. 1 to 5, in this embodiment, an electronic grade nitric acid preparation apparatus is provided, which includes a microfiltration mechanism, a distillation condensation mechanism, a white blowing mechanism and an ultrafiltration mechanism arranged in this order;
the micro-filtration mechanism comprises a micro-filtration unit, the micro-filtration unit comprises a cylindrical shell 100, a liquid inlet joint 120 is arranged on one side of the upper end of the shell 100, the shell 100 is vertically arranged, sealing covers 110 are respectively arranged at two ends of the shell 100, a filter element assembly 130 is arranged in the shell 100, the filter element assembly 130 comprises a cylindrical framework 131, end covers 132 are respectively arranged at two ends of the framework 131, a membrane sleeve 134 is sleeved on the framework 131, the membrane sleeve 134 and the two end covers 132 enclose the inside of the framework 131 into a closed filter cavity, and the two end covers 132 are respectively rotatably arranged on the two sealing covers 110;
the diaphragm 136 is arranged on the outer wall of the framework 131, the diaphragm 136 is connected with the adjusting assembly 150, and the adjusting assembly 150 is used for adjusting the diaphragm 136 to be covered on the outer wall of the membrane sleeve 134 in a fitting mode or far away from the membrane sleeve 134.
The diaphragm 136 is installed on the supporting component 140, the supporting component 140 comprises supporting rods 141, two ends of each supporting rod 141 are rotatably installed on the end covers 132, the supporting rods 141 are arranged along the length direction of the framework 131, the supporting rods 141 are arranged on the outer side of the diaphragm sleeve 134, the edge of the diaphragm 136 is detachably installed on the supporting rods 141, the end covers 132 and the supporting rods 141 located above are connected with the adjusting component 150, and the adjusting component 150 is used for adjusting the rotation of the supporting rods 141 and the end covers 132.
The diaphragms 136 and the supporting components 140 are distributed in a one-to-one correspondence, and the diaphragms 136 are distributed in a circumferential array around the central line of the framework 131.
When the diaphragms 136 are adhered to and cover the outer wall of the diaphragm 134, each diaphragm 136 completely covers the outer wall of the diaphragm 134.
The film sleeve 134 has snap rings 135 at both ends, and the snap rings 135 are connected in annular clamping grooves 133 at both ends of the skeleton 131.
The adjusting component 150 comprises passive components and a transmission component, the passive components and the supporting rods 141 are arranged in one-to-one correspondence, the upper ends of the supporting rods 141 penetrate through the end covers 132 positioned above, the passive components are fixedly arranged at the upper ends of the supporting rods 141, the passive components are connected with the transmission component, and the transmission component is used for driving the passive components to synchronously rotate.
The transmission assembly comprises a rotary drum 153, the rotary drum 153 is rotatably arranged on a sealing cover 110 above a framework 131, the upper end of the rotary drum 153 is connected with the driving assembly, the lower end of the rotary drum 153 is provided with a linkage fluted disc 152, the driven element is a gear 151, and each gear 151 is meshed with the linkage fluted disc 152.
The driving assembly comprises a fluted disc 154 and a toothed rack 155, wherein the fluted disc 154 is fixedly arranged at the upper end of the rotary drum 153, and the toothed rack 155 is meshed with the fluted disc 154.
The upper end of the end cover 132 is provided with a transmission barrel part 132a, the rotary barrel 153 is sleeved on the transmission barrel part 132a, the outer wall of the transmission barrel part 132a is provided with a trigger groove 132b, the corresponding position of the inner wall of the rotary barrel 153 is provided with an abutting protrusion 152a, the abutting protrusion 152a is slidably arranged in the trigger groove 132b, and in the rotating process of the rotary barrel 153, the abutting protrusion 152a slides in the trigger groove 132b and abuts against the groove end of the trigger groove 132 b.
A pipe 111 is arranged on the sealing cover 110 positioned above, a B pipe 112 is arranged on the sealing cover 110 positioned below, the A pipe 111 and the B pipe 112 are both communicated with the filter cavity, the A pipe 111 is arranged in the transmission cylinder part 132a, the A pipe 111 is respectively connected with an air extraction mechanism and a backflushing mechanism, the B pipe 112 is connected with a liquid discharge mechanism and a liquid rotating mechanism, and the liquid rotating mechanism is connected with a distillation condensing mechanism.
In this embodiment, the microfiltration units are provided with multiple groups, and the racks 155 in each group of microfiltration units are the same long rack, which is driven by a reciprocating drive mechanism.
The device proposed in this embodiment is used as follows:
first, the conditioning filter cartridge assembly 130 is in a filtered state, as follows:
the rack 155 drives the fluted disc 154 to rotate, the fluted disc 154 drives the linkage fluted disc 152 to rotate through the rotary drum 153, at the moment, the abutting bulge 152a slides in the triggering groove 132b, the linkage fluted disc 152 drives each gear 151 to synchronously rotate, the gear 151 drives the supporting rod 141 to synchronously rotate ninety degrees, the upper diaphragm 136 of the upper diaphragm rotates and is attached to the membrane sleeve 134, at the moment, the abutting bulge 152a slides to the groove end of the triggering groove 132b and abuts against the triggering groove, as the diaphragm 136 has a certain flexibility, the part close to the supporting rod 141 can be attached to the membrane sleeve 134, the part of the diaphragm 136 far away from the supporting rod 141 does not necessarily rotate along with the diaphragm sleeve 134, so when the abutting bulge 152a abuts against the groove end of the triggering groove 132b, the transmission cylinder 132a drives the end cover 132 to rotate, the end cover 132 drives the framework 131 to rotate, the framework 131 and each supporting rod are driven to rotate around the axis of the framework 131, the part of the diaphragm 136 far away from the 141 is close to the membrane sleeve 134 under the action of rotation traction, and the suction mechanism is started to suck air in the filter cavity, and negative pressure in the filter cavity can adsorb the air close to the membrane 136 on the outer wall 134 of the membrane sleeve.
At this time, the adjustment of the filtering state of the cartridge assembly 130 is completed, and the rack 155 stops moving. Nitric acid is transferred into the shell 100 through the liquid inlet connector 120, the nitric acid in the shell 100 is sucked into the filter cavity through the membrane 136 and the membrane sleeve 134 due to the fact that the filter cavity is always in a negative pressure state, filtering treatment is achieved, and then the micro-filtered nitric acid in the filter cavity is sucked out through the liquid transferring mechanism through the B pipe 112 and transferred into the distillation condensing mechanism.
After the microfiltration unit is operated for a preset time, the filter element assembly 130 is adjusted to be in a cleaning state, and the specific process is as follows:
because larger sized particles, suspended matter, etc. within the nitric acid are isolated from the outer surface of the membrane 136 during filtration of the cartridge assembly 130, smaller sized small particles, etc. may be trapped and adsorbed by the membrane 136 on the outer surface of the membrane 136.
The adjusting rack 155 moves reversely, the rack 155 drives the fluted disc 154 to rotate reversely, the fluted disc 154 drives the linkage fluted disc 152 to rotate through the rotary drum 153, at the moment, the abutting protrusion 152a slides in the triggering groove 132b, the linkage fluted disc 152 drives the gears 151 to rotate synchronously, the gears 151 drive the supporting rods 141 to rotate synchronously ninety degrees, and the upper membrane 136 of the membrane is rotated away from the membrane sleeve 134. And, the air extraction mechanism stops at this moment, and the liquid transfer mechanism is temporarily stopped, and the recoil mechanism continuously adds the washing nitric acid into the filter cavity, and the washing nitric acid is discharged outwards from the filter cavity, and the diaphragm 136 on the laminating film sleeve 134 is washed away from the film sleeve 134, and in the recoil process, the rack 155 reciprocates to drive the fluted disc 154 to reciprocate to drive each supporting rod 141 to reciprocate, so as to realize that the diaphragm 136 is continuously swung under the action of flowing nitric acid, and the particles adsorbed on the surface of the diaphragm 136 are shaken off and washed away. The liquid discharge mechanism discharges the flushing nitric acid.
After the cleaning operation is completed, the filter cartridge assembly 130 is readjusted to a filtering state, unlike the previous description: the rack 155 moves in the opposite direction and similarly engages the other side of the diaphragm 136 against the diaphragm casing 134.
Through the above, realize adjusting diaphragm 136 two sides and constantly change into the filter face to can carry out effectual shake off the washing with the granule that adsorbs on it in the back flush in-process, the back flush is effectual, the effectual life who has prolonged the filter element assembly, has avoided the problem that needs often to change the filter element assembly.
Example 2
In this example, an electronic grade nitric acid manufacturing process using the microfiltration mechanism of example 1 is presented, comprising the steps of:
s1: micro-filtering nitric acid;
first of all,
transferring the nitric acid raw material into the shell 100 through the liquid inlet joint 120, and performing microfiltration treatment in the microfiltration unit;
s2: distilling and condensing;
a multistage distillation system in a distillation condensing mechanism is adopted to cool steam generated by distillation, so as to obtain a semi-finished product;
s3: performing blowing white treatment;
the semi-finished product is purged by adopting a white blowing mechanism, in particular to purging the semi-finished product by adopting high-purity compressed air;
s4: ultrafiltration treatment;
transferring the blown nitric acid into an ultrafiltration mechanism for ultrafiltration treatment to obtain the electronic grade nitric acid.
The embodiment of the present embodiment has been described above with reference to the accompanying drawings, but the embodiment is not limited to the above-described specific implementation, which is merely illustrative and not restrictive, and many forms may be made by those of ordinary skill in the art without departing from the spirit of the embodiment and the scope of the protection of the claims, which fall within the protection of the embodiment.
Claims (10)
1. An electronic grade nitric acid preparation device comprises a microfiltration mechanism, a distillation condensing mechanism, a white blowing mechanism and an ultrafiltration mechanism which are sequentially arranged; it is characterized in that the method comprises the steps of,
the micro-filtration mechanism comprises a micro-filtration unit, the micro-filtration unit comprises a cylindrical shell (100), a liquid inlet joint (120) is arranged on one side of the upper end of the shell (100), the shell (100) is vertically arranged, sealing covers (110) are respectively arranged at two ends of the shell (100), a filter element assembly (130) is arranged in the shell (100), the filter element assembly (130) comprises a cylindrical framework (131), end covers (132) are respectively arranged at two ends of the framework (131), a membrane sleeve (134) is sleeved on the framework (131), the membrane sleeve (134) and the two end covers (132) enclose the inside of the framework (131) into a closed filter cavity, and the two end covers (132) are respectively rotatably arranged on the two sealing covers (110);
the diaphragm (136) is arranged on the outer wall of the framework (131), the diaphragm (136) is connected with the adjusting assembly (150), and the adjusting assembly (150) is used for adjusting the diaphragm (136) to be attached to and covered on the outer wall of the diaphragm sleeve (134) or far away from the diaphragm sleeve (134).
2. The electronic grade nitric acid production apparatus according to claim 1, wherein the membrane (136) is mounted on the support assembly (140), the support assembly (140) comprises support rods (141), both ends of the support rods (141) are rotatably mounted on the end covers (132), the support rods (141) are arranged along the length direction of the framework (131), the support rods (141) are arranged on the outer sides of the membrane sleeves (134), edges of the membrane (136) are detachably mounted on the support rods (141), the upper end covers (132) and the support rods (141) are connected with the adjusting assembly (150), and the adjusting assembly (150) is used for adjusting the rotation of the support rods (141) and the end covers (132).
3. An electronic grade nitric acid production apparatus according to claim 2, wherein the membranes (136) and the support members (140) are arranged in a one-to-one correspondence, and the membranes (136) are arranged in a circumferential array around the center line of the skeleton (131).
4. The device for preparing the electronic grade nitric acid according to claim 1, wherein two ends of the membrane sleeve (134) are provided with clamping rings (135), and the clamping rings (135) are connected in annular clamping grooves (133) at two ends of the framework (131).
5. An electronic grade nitric acid preparing apparatus according to claim 3, wherein the adjusting assembly (150) comprises a passive member and a transmission assembly, the passive member and the supporting rod (141) are arranged in one-to-one correspondence, the upper end of the supporting rod (141) passes through the end cover (132) positioned above, the passive member is fixedly arranged at the upper end of the supporting rod (141), the passive member is connected with the transmission assembly, and the transmission assembly is used for driving each passive member to synchronously rotate.
6. The device for preparing electronic grade nitric acid according to claim 5, wherein the transmission assembly comprises a rotary drum (153), the rotary drum (153) is rotatably arranged on a sealing cover (110) above the framework (131), the upper end of the rotary drum (153) is connected with the driving assembly, the lower end of the rotary drum (153) is provided with a linkage fluted disc (152), the driven part is a gear (151), and each gear (151) is meshed with the linkage fluted disc (152).
7. The apparatus for preparing electronic grade nitric acid according to claim 6, wherein the driving assembly comprises a toothed disc (154) and a rack (155), the toothed disc (154) is fixedly installed at the upper end of the drum (153), and the rack (155) is engaged with the toothed disc (154).
8. The device for preparing electronic grade nitric acid according to claim 7, wherein the upper end of the end cover (132) is provided with a transmission barrel part (132 a), the transmission barrel part (132 a) is sleeved with the rotary barrel (153), the outer wall of the transmission barrel part (132 a) is provided with a trigger groove (132 b), the corresponding position of the inner wall of the rotary barrel (153) is provided with an abutting protrusion (152 a), the abutting protrusion (152 a) is slidably arranged in the trigger groove (132 b), and the abutting protrusion (152 a) slides in the trigger groove (132 b) and abuts against the groove end of the trigger groove (132 b) during the rotation of the rotary barrel (153).
9. The device for preparing electronic grade nitric acid according to claim 8, wherein an A pipe (111) is arranged on the sealing cover (110) positioned above, a B pipe (112) is arranged on the sealing cover (110) positioned below, both the A pipe (111) and the B pipe (112) are communicated with the filter cavity, the A pipe (111) is arranged in the transmission barrel part (132 a), the A pipe (111) is respectively connected with the air extraction mechanism and the backflushing mechanism, the B pipe (112) is connected with the liquid discharge mechanism and the liquid transfer mechanism, and the liquid transfer mechanism is connected with the distillation condensation mechanism.
10. A process for preparing an electronic grade nitric acid using the apparatus of any of claims 1 to 9, comprising the steps of:
s1: micro-filtering nitric acid;
transferring the nitric acid raw material into a micro-filtration unit for micro-filtration treatment;
s2: distilling and condensing;
cooling steam generated by distillation by adopting a multi-stage distillation system to obtain a semi-finished product;
s3: performing blowing white treatment;
purging the semi-finished product by adopting high-purity compressed air;
s4: ultrafiltration treatment;
and performing ultrafiltration treatment on the nitric acid after the blowing-out to obtain the electronic grade nitric acid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202311213699.5A CN116946987B (en) | 2023-09-20 | 2023-09-20 | Electronic grade nitric acid preparation device and preparation process thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311213699.5A CN116946987B (en) | 2023-09-20 | 2023-09-20 | Electronic grade nitric acid preparation device and preparation process thereof |
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| CN116946987A true CN116946987A (en) | 2023-10-27 |
| CN116946987B CN116946987B (en) | 2024-01-12 |
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| CN102616972A (en) * | 2012-04-17 | 2012-08-01 | 常州光辉生物科技有限公司 | Comprehensive recycling method and device for high-salt-content amino acid waste water |
| US20220097005A1 (en) * | 2018-11-30 | 2022-03-31 | Aker Carbon Capture Norway As | A filter device, and method of assembly |
| CN116654884A (en) * | 2023-07-26 | 2023-08-29 | 联仕(昆山)化学材料有限公司 | White blowing equipment for producing electronic grade nitric acid and white blowing process thereof |
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2023
- 2023-09-20 CN CN202311213699.5A patent/CN116946987B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04317723A (en) * | 1991-04-18 | 1992-11-09 | Fuji Photo Film Co Ltd | Filtration method |
| CA2478306A1 (en) * | 1998-10-29 | 2000-05-11 | Applera Corporation | Multi-well microfiltration apparatus |
| CN102616972A (en) * | 2012-04-17 | 2012-08-01 | 常州光辉生物科技有限公司 | Comprehensive recycling method and device for high-salt-content amino acid waste water |
| US20220097005A1 (en) * | 2018-11-30 | 2022-03-31 | Aker Carbon Capture Norway As | A filter device, and method of assembly |
| CN116654884A (en) * | 2023-07-26 | 2023-08-29 | 联仕(昆山)化学材料有限公司 | White blowing equipment for producing electronic grade nitric acid and white blowing process thereof |
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Address after: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province Applicant after: Lianshi New Materials (Suzhou) Co.,Ltd. Address before: 215300 No.66 Wenpu Middle Road, Qiandeng Town, Kunshan City, Suzhou City, Jiangsu Province Applicant before: Lianshi (Kunshan) chemical materials Co.,Ltd. |
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