CN116939437A

CN116939437A - Plane loudspeaker with conductive vibrating diaphragm and vertical plane driving vibrating die structure thereof

Info

Publication number: CN116939437A
Application number: CN202210330684.6A
Authority: CN
Inventors: 郑生岳; 唐家源; 林士翔
Original assignee: Kingstate Electronics Corp
Current assignee: Kingstate Electronics Corp
Priority date: 2022-03-30
Filing date: 2022-03-30
Publication date: 2023-10-24

Abstract

The invention provides a plane loudspeaker with a conductive vibrating diaphragm and a vertical plane driving vibrating die structure thereof, which comprises: a support frame; the first magnet and the second magnet are arranged on two side edges of the bracket and have a movable gap; and a vertical planar voice coil magnetically interacting with the magnet to move up and down; the bottom surface of the conductive vibrating diaphragm is combined with the vertical plane voice coil in a linkage way; the first conductive sheet and the second conductive sheet are arranged at two sides of the vibrating diaphragm and are electrically connected with the vertical plane voice coil; and the packaging film packages the vertical plane voice coil and the conductive vibrating diaphragm into a whole, and enables the first conductive sheet and the second conductive sheet to be arranged on the plane bracket, and the vibrating diaphragm and the suspension part to be suspended at the central opening. By the implementation of the invention, the problems of wire breakage of the sound source lead, abnormal sound … generation and the like can be effectively solved.

Description

Plane loudspeaker with conductive vibrating diaphragm and vertical plane driving vibrating die structure thereof

Technical Field

The invention relates to a plane loudspeaker with a conductive vibrating diaphragm and a vertical plane driving vibrating mode structure thereof, in particular to a plane loudspeaker structure with a vertical plane voice coil and a conductive vibrating diaphragm, which is applied to sound equipment, computers, portable electronic devices or earphones.

Background

As shown in fig. 1, a conventional speaker P100 mainly comprises a magnet P10, a coil P20, and a loudspeaker diaphragm P30. The coil P20 is fabricated on the loudspeaker diaphragm P30, when a signal current passes through the coil P20, a coil magnetic field is generated, and the coil magnetic field interacts with the magnetic field of the magnet P10 to vibrate the loudspeaker diaphragm P30, and when the coil P20 and the loudspeaker diaphragm P30 vibrate together, surrounding air is pushed to vibrate, so that the conventional loudspeaker P100 generates sound. However, such a structure is liable to cause a problem of wire breakage or abnormal sound because the wire P40 for supplying the signal to the coil is suspended and is often in an irregular vibration state.

As shown in the specification of taiwan patent certificate TWI686092B, a thin speaker with a voice coil having a damper function is disclosed, which includes a frame, a magnetic return device, a damper voice coil and a diaphragm. The conductor (321) is connected with external sound source signals by two conductive suspension parts (322, 323), so that the two conductive suspension parts (322, 323) are suspended and always in an irregular vibration state like the lead wire P40 of the coil P20 of the conventional loudspeaker P100, and therefore the problems of wire breakage or abnormal sound generation are also easy to cause.

Disclosure of Invention

The invention relates to a plane loudspeaker with a conductive vibrating diaphragm and a vertical plane driving vibrating diaphragm structure thereof, which mainly solve the problems that the prior conventional suspension type sound source signal wire is easy to break or easy to produce abnormal sound … along with the vibration of a sound basin/vibrating diaphragm under the condition of long-time or high-power output.

The invention provides a plane loudspeaker structure with a conductive vibrating diaphragm, which comprises: a support frame having a planar support and a central opening; the first magnet is arranged on the first side edge below the plane bracket; the second magnet is arranged on the second side edge below the plane bracket, and a movable gap is formed between the first magnet and the second magnet; and a vertical plane driving vibration mode, which has: at least one vertical plane voice coil which is embedded in the movable gap and performs magnetic interaction with the first magnet and the second magnet to move up and down; an electroconductive diaphragm having: the bottom surface of the vibrating diaphragm is combined with at least one vertical plane voice coil in a linkage way of moving up and down; the first conducting strip is arranged on the first side of the vibrating diaphragm and is electrically connected with the first voice coil input end of at least one vertical plane voice coil; the second conducting strip is arranged on the second side of the vibrating diaphragm and is electrically connected with the second voice coil input end of the at least one vertical plane voice coil; and a packaging film having: a diaphragm support part closely attached to the diaphragm; a suspension part surrounding and combined with the outer edge of the vibrating diaphragm supporting part; the conducting strip packaging part surrounds and is combined with the outer edge of the suspension part, and the conducting strip packaging part is sealed and attached with the first conducting strip and the second conducting strip; and a coil packaging part which packages at least one vertical plane voice coil and combines the at least one vertical plane voice coil with the suspension part and/or the conducting strip packaging part into a whole; the packaging film packages at least one vertical plane voice coil and the conductive vibrating diaphragm into a whole, and enables the packaged first conductive sheet and second conductive sheet to be arranged on the plane support, and enables the vibrating diaphragm and the suspension part to be arranged at the central opening in a suspending mode.

Preferably, the upper and lower parts of the first magnet and the second magnet are fixed by a group of upper washer and a group of lower washer respectively.

The present invention also provides a vertical plane driving vibration mode structure, comprising: at least one vertical planar voice coil; an electroconductive diaphragm having: the bottom surface of the vibrating diaphragm is combined with at least one vertical plane voice coil in a linkage way of moving up and down; the first conducting strip is arranged on the first side of the vibrating diaphragm and is electrically connected with the first voice coil input end of at least one vertical plane voice coil; the second conducting strip is arranged on the second side of the vibrating diaphragm and is electrically connected with the second voice coil input end of the at least one vertical plane voice coil; and an encapsulation film having: a diaphragm support part which is in sealing fit with the diaphragm; a suspension part surrounding and combined with the outer edge of the vibrating diaphragm supporting part; the conducting strip packaging part surrounds and is combined with the outer edge of the suspension part, and the conducting strip packaging part is tightly attached to the first conducting strip and the second conducting strip; and a coil packaging part which packages at least one vertical plane voice coil and combines the at least one vertical plane voice coil with the suspension part and/or the conducting strip packaging part into a whole; the packaging film packages at least one vertical plane voice coil and the conductive vibrating diaphragm into a whole, and the packaged first conductive sheet, second conductive sheet and bottom surface of the vibrating diaphragm are located on the same plane.

Preferably, the at least one vertical planar voice coil has a first vertical planar voice coil and a second vertical planar voice coil, and an insulating film is disposed between the first vertical planar voice coil and the second vertical planar voice coil.

Preferably, the first conductive sheet and the second conductive sheet have a first welding positioning sheet and a second welding positioning sheet respectively between the first input end and the second input end, and the first welding positioning sheet and the second welding positioning sheet have a pair of welding openings respectively.

Preferably, the at least one vertical planar voice coil and the conductive diaphragm are perpendicular to each other in a T-shaped structure.

Preferably, the suspension part has a semicircular arc structure.

Preferably, the first conductive sheet and the second conductive sheet are copper conductive sheets.

Preferably, the first conductive sheet and the second conductive sheet have a set of arc-shaped bending parts respectively, and an extension plane is provided at an end of each arc-shaped bending part.

Preferably, the arc-shaped bending part and/or the end part of the arc-shaped bending part are provided with a plurality of openings.

By the implementation of the invention, at least the following progressive effects can be achieved:

1. the vertical plane voice coil can obtain higher magnetic energy conversion efficiency.

2. The magnetic circuit and stroke stack of the planar horn structure can be optimized.

3. The height limit of the planar horn structure can be reduced.

4. The vertical planar voice coil can be made more slender, narrower and thinner.

5. The small-sized loudspeaker can improve the defects that the lead wire of the small-sized loudspeaker is easy to break when working at high power or for a long time.

6. Compared with the micro-horn with the same size, the micro-horn has the advantages that the first conductive sheet and the second conductive sheet which are more firm in structure are used as voice coil leads.

7. It is easier to design a planar horn of higher rated power and extremely high instantaneous maximum power.

8. Can achieve the foolproof of welding and can improve the production efficiency during production.

So that those skilled in the art can readily understand and practice the present invention, the detailed features and advantages of the invention will be described in the detailed description, with reference to the drawings.

Drawings

FIG. 1 is a schematic diagram of a conventional loudspeaker.

Fig. 2 is a perspective view of an exploded embodiment of the present invention.

Fig. 3 is a perspective view of a three-dimensional combination embodiment of the present invention.

FIG. 4 is a diagram showing an exploded embodiment of a vertical plane voice coil and a conductive diaphragm.

Fig. 5 is a diagram of a cross-sectional embodiment of fig. 3.

FIG. 6 is a diagram of an exploded embodiment of a dual vertical planar voice coil.

FIG. 7 is a diagram showing a combination of a vertical planar voice coil and a conductive diaphragm.

Fig. 8 is a diagram of a cross-sectional embodiment of fig. 7.

FIG. 9 is a cross-sectional view of an embodiment of a vertical plane drive vibrating die suspended from a planar support.

FIG. 10 is a graph showing the frequency response of the loudspeaker according to the present embodiment and the conventional loudspeaker.

[ Main element symbols description ]

P100: the conventional speaker P10: magnet

P20: coil P30: loudspeaker vibrating diaphragm

P40: lead 100: plane loudspeaker structure with conductive vibrating diaphragm

10: support frame 110: plane support

111: central opening 112: supporting leg

211: first magnet 212: second magnet

213: top washer 214: chinese sauce

215: the active clearance 30: vertical plane driving vibration mould

30a: first sound source input terminal 30b: second sound source input end

31a: first voice coil input terminal 31b: second voice coil input terminal

32a: first welding detent tab 32b: second welding locating piece

33: welding opening 33a: solder material

310: vertical planar voice coil 311: first vertical plane voice coil

312: second vertical planar voice coil 313: insulating film

320: conductive diaphragm 321: vibrating diaphragm

322: first conductive sheet 323: second conductive sheet

324: arc-shaped bent portion 325: plane of extension

326: perforation 330: packaging film

331: diaphragm support 332: suspension part

333: conductive sheet package 334: coil packaging part

Inv-1W: the present example 1 Watt frequency response curve

Inv-2W: example 2 Watt frequency response curve

Inv-3W: example 3 Watt frequency response curve

Inv-4W: the present example 4 Watt frequency response curve

Inv-5W: this example 5 Watt frequency response curve

Pr-1W: the conventional 1W frequency response curve

Pr-2W: the conventional 2W frequency response curve

Detailed Description

As shown in fig. 2 and 3, the present embodiment is a planar horn structure 100 with a conductive diaphragm, which includes: a support frame 10; a first magnet 211; a second magnet 212; and a vertical plane driving vibration mode 30. For convenience of description, the following planar horn structure 100 with a conductive diaphragm in this embodiment will be simply referred to as the planar horn structure 100.

A supporting frame 10 for supporting the vertical plane driving vibration mode 30, so that the supporting frame 10 has a plane supporting frame 110, and a central opening 111 is formed at the central portion of the plane supporting frame 110; in addition, the support frame 10 may also be used to fix the first magnet 211 and the second magnet 212, for example, a plurality of supporting legs 112 extend downward from the planar support 110, so as to effectively fix the first magnet 211 and the second magnet 212, and provide a height space required for driving the vibration module 30 to vibrate up and down in a vertical plane.

The first magnet 211 is a permanent magnet and is disposed on a first side under the planar bracket 110; the second magnet 212 is also a permanent magnet and is disposed on a second side under the planar support 110; in order to effectively fix the first magnet 211 and the second magnet 212, a set of upper washer 213 and a set of lower washer 214 are used to effectively fix the first magnet 211 and the second magnet 212 above and below the first magnet 211 and the second magnet 212, respectively.

The upper washer 213, the first magnet 211, the second magnet 212, and the lower washer 214 form a sandwich structure, and an integral structure is formed under the frame of the support frame 10, and a movable gap 215 is formed at the central portion of the sandwich structure, i.e., between the two upper washers 213, between the first magnet 211 and the second magnet 212, and between the two lower washers 214.

As shown in fig. 4 and 5, the vertical plane driving vibration mode 30 includes: at least one vertical planar voice coil 310; a conductive diaphragm 320; and an encapsulation film 330. Wherein at least one of the vertical planar voice coils 310 and the conductive diaphragm 320 are of a T-shaped structure perpendicular to each other.

As shown in fig. 4 to 6, the vertical plane voice coil 310 is similar to the voice coil structure of a general loudspeaker, the vertical plane voice coil 310 is embedded in the movable gap 215, and when a signal such as audio is input to the vertical plane voice coil 310, the vertical plane voice coil 310 generates a voice coil magnetic field along with the change of the audio signal, and the voice coil magnetic field interacts with the first magnet 211 and the second magnet 212 magnetically, so that the vertical plane voice coil 310 moves up and down.

Since the movable gap 215 needs only a small magnetic gap, and is usually only slightly larger than the thickness of the vertical planar voice coil 310, the vertical planar voice coil 310 can obtain higher magnetic energy conversion efficiency, and the magnetic circuit and stroke stack of the planar horn structure 100 can be optimized, and the height limitation of the planar horn structure 100 can be reduced.

Since the vertical plane voice coil 310 may have a single-layer or multi-layer structure and is a planar copper wire voice coil, it is not limited by the conventional voice coil shape, and thus may be manufactured to be more slim, narrower, or thinner ….

The vertical plane voice coil 310 may be a single or multiple vertical plane voice coils 310, for example, the vertical plane voice coil 310 may have a first vertical plane voice coil 311 and a second vertical plane voice coil 312, and an insulating film 313 is disposed between the first vertical plane voice coil 311 and the second vertical plane voice coil 312.

In addition to being composed of two vertical plane voice coils 310, the vertical plane voice coils 310 may be composed of three, four or more vertical plane voice coils 310, and the electrical connection of the vertical plane voice coils 310 may be in series, parallel or series/parallel with each other.

The vertical plane voice coil 310, in terms of acoustic impedance, can be applied to standard impedance or other specific impedance requirement designs; in terms of electrical advantages, nonlinear distortion and Total Harmonic Distortion (THD) can be reduced, and abnormal sounds (Rub & Buzz) can be effectively avoided; in the temperature resistance characteristic, the high-power current can be born; is especially suitable for 1-5W power design and is superior to the current micro horn application.

As shown in fig. 4 and 7, the conductive diaphragm 320 has: a diaphragm 321; a first conductive sheet 322; and a second conductive sheet 323. The two sides of the first conductive sheet 322 and the second conductive sheet 323 extend outwards to form the first sound source input end 30a and the second sound source input end 30b of the planar speaker structure 100, so that the replacement of the input direction of the sound source can be facilitated during the production of different types of products.

In order to avoid the error in the soldering operation during mass production, the first sound source input end 30a and the second sound source input end 30b can be respectively designed at both ends of the long axis of the vertical plane voice coil 310 and respectively positioned on the two corresponding side surfaces of the vertical plane voice coil 310, so that during the production, even if the vertical plane voice coil 310 is horizontally rotated 180 degrees, the problem of soldering error does not occur, and the production efficiency can be further improved under the operation mode without considering the placement direction of the vertical plane voice coil 310.

The diaphragm 321 corresponds to a cone of a general loudspeaker, and the bottom surface of the diaphragm 321 is combined with the vertical plane voice coil 310 in a linkage manner, that is, when the vertical plane voice coil 310 magnetically interacts with the first magnet 211 and the second magnet 212 to vibrate up and down, the diaphragm 321 vibrates up and down, and the vibration of the diaphragm 321 drives surrounding air to vibrate to generate sound.

The first conductive plate 322 is disposed on the first side of the diaphragm 321 and is electrically connected to the first voice coil input end 31a of the vertical plane voice coil 310, that is, the first soldered portion; the second conductive plate 323 is disposed on the second side of the diaphragm 321 and is electrically connected to the second voice coil input end 31b of the vertical plane voice coil 310, i.e. the second soldered portion.

In order to have good electrical conductivity, the first conductive plate 322 and the second conductive plate 323 are copper conductive plates, and the conductive plates are used to replace the signal leads of the conventional loudspeaker, so that the problem of wire breakage easily caused by long-term up-down vibration of the signal leads along with the cone when the conventional copper wires are used as the signal leads can be thoroughly improved.

The first conductive plate 322 and the second conductive plate 323 may further have a first soldering and positioning plate 32a and a second soldering and positioning plate 32b, which are heat-resistant and insulating, respectively, between the first input end 31a and the second input end 31b of the vertical planar voice coil 310, and the first soldering and positioning plate 32a and the second soldering and positioning plate 32b may have a pair of soldering openings 33, respectively.

By means of the soldering openings 33, the soldering between the first conductive sheet 322 and the first input end 31a and between the second conductive sheet 323 and the second input end 31b can be performed only at the soldering openings 33, so that a large-scale soldering can be avoided, or excessive solder 33a is attached during soldering, so that the weight, balance and frequency response of the diaphragm 321 are affected.

The first conductive sheet 322 and the second conductive sheet 323 respectively have a set of arc-shaped bending parts 324, and an extension plane 325 is disposed at an end of each arc-shaped bending part 324. By the curved line of the arc-shaped bending portion 324, the first conductive sheet 322 and the second conductive sheet 323 can have the same curvature as the suspension portion 332, so that the first conductive sheet 322 and the second conductive sheet 323 can be perfectly bonded together, and the extension plane 325 can be used as a welding portion for welding the first conductive sheet 322 and the second conductive sheet 323 with the first input end 31a and the second input end 31 b.

In order to avoid interference of the stress of the arc bending portion 324 and the extension plane 325 when the suspension portion 332 vibrates up and down, and further to influence the compliant restoring force and damping action of the suspension portion 332, a plurality of through holes 326 may be provided on the arc bending portion 324 and/or the extension plane 325 at the end portion of the arc bending portion 324, so as to reduce the stress of the arc bending portion 324 and the extension plane 325.

As shown in fig. 8, the encapsulation film 330 has: a diaphragm support 331; a hanging portion 332; a conductive sheet package 333; coil package 334.

The diaphragm support 331 is planar and is integrally and closely attached to the diaphragm 321 from below the diaphragm 321.

The suspension 332 is formed around and coupled to the outer edge of the diaphragm support 331, and the suspension 332 may have a semicircular arc-shaped cross section. The suspension 332 corresponds to a suspension edge of a typical speaker around a cone, and the suspension 332 is mainly used for supporting a vibration system of the diaphragm 321 and providing a compliant restoring force and damping effect. In addition, the suspending portion 332 also has the effect of encapsulating the arc-shaped bending portions 324 of the first conductive sheet 322 and the second conductive sheet 323.

And a conductive sheet package 333 surrounding and combined with the outer edge of the suspension 332, wherein the conductive sheet package 333 and the suspension 332 are sealed and adhered to the first conductive sheet 322, the second conductive sheet 323 and the arc bending part 324 thereof into a whole, and the diaphragm support 331 seals and covers the extension plane 325 from above.

And a coil packaging part 334 for packaging at least one vertical plane voice coil 310 and integrating with the suspension part 332 and/or the conductive sheet packaging part 33, wherein the packaging film 330 can seal the vertical plane voice coil 310, the diaphragm 321, the first conductive sheet 322 and the second conductive sheet 323 together, and the bottom surfaces of the packaged first conductive sheet 322, second conductive sheet 323 and diaphragm supporting part 331 can be located on the same plane.

As shown in fig. 9, during assembly, the first conductive plate 322 and the second conductive plate 323 after encapsulation are disposed on the planar support 110, and the diaphragm 321 and the suspension 332 are suspended at the central opening 111, so that the vertical planar voice coil 310 is embedded in the movable gap 215, thereby completing the complete planar horn structure 100.

Since the first conductive plate 322 and the second conductive plate 323 are plate-shaped structures instead of linear structures, and the vertical plane voice coil 310, the first conductive plate 322, the second conductive plate 323, the diaphragm 321, and the encapsulation film 330 are encapsulated into an integral structure, the encapsulation film 330 also bears the vibration force applied to the first conductive plate 322 and the second conductive plate 323 when the diaphragm 321 vibrates.

Furthermore, since the first conductive sheet 322 and the second conductive sheet 323 are stably arranged on the planar support 110 instead of the thin wire and suspended vibration, the vibration stability during movement can be improved, and the mass and rigidity can be increased, so that the defects of high power or long-time operation and easy wire breakage of the signal leads of the conventional general small-sized loudspeaker can be improved.

In addition, the first conductive sheet 322 and the second conductive sheet 323 are also part of the suspension system, so that the problems of deformation and distortion of the elongated diaphragm 321 caused by too large ratio difference between the long side and the short side during vibration can be improved by optimizing the geometric shape and the position of the first conductive sheet and the second conductive sheet.

As shown in FIG. 10, inv-1W, inv-2W, inv-3W, inv-4W and Inv-5W respectively show the frequency response curves of the present embodiment at 1W, 2W, 3W, 4W and 5W power outputs, and Pr-1W and Pr-2W respectively show the frequency response curves of the conventional speakers at 1W and 2W power outputs; as can be seen from the correlation curves, the embodiment has better sound intensity performance in each frequency band.

The present invention is not limited to the above-mentioned embodiments, but is not limited to the above-mentioned embodiments, and any simple modification, equivalent changes and modification made to the above-mentioned embodiments according to the technical matters of the present invention can be made by those skilled in the art without departing from the scope of the present invention.

Claims

1. A planar horn structure having a conductive diaphragm, comprising:

a support frame having a planar support and a central opening;

the first magnet is arranged on the first side edge below the plane bracket;

the second magnet is arranged on the second side edge below the plane bracket, and a movable gap is formed between the first magnet and the second magnet; and

a vertical plane drive vibrating die having:

at least one vertical plane voice coil embedded in the movable gap and magnetically interacting with the first magnet and the second magnet to move up and down;

an electroconductive diaphragm having:

the bottom surface of the vibrating diaphragm is combined with the at least one vertical plane voice coil in a linkage way of moving up and down;

the first conducting strip is arranged on the first side of the vibrating diaphragm and is electrically connected with the first voice coil input end of the at least one vertical plane voice coil; a kind of electronic device with high-pressure air-conditioning system

The second conducting strip is arranged on the second side of the vibrating diaphragm and is electrically connected with the second voice coil input end of the at least one vertical plane voice coil; a kind of electronic device with high-pressure air-conditioning system

An encapsulation film having:

a diaphragm support portion closely attached to the diaphragm;

a suspension part surrounding and combined with the outer edge of the vibrating diaphragm supporting part;

the conducting strip packaging part surrounds and is combined with the outer edge of the suspension part, and the conducting strip packaging part is sealed and attached with the first conducting strip and the second conducting strip; a kind of electronic device with high-pressure air-conditioning system

A coil packaging part which packages the at least one vertical plane voice coil and is integrated with the suspension part and/or the conducting strip packaging part;

the packaging film packages the at least one vertical plane voice coil and the conductive vibrating diaphragm into a whole, and enables the packaged first conductive sheet and second conductive sheet to be arranged on the plane support, and enables the vibrating diaphragm and the suspension part to be arranged at the central opening in a suspending way.

2. The flat horn structure of claim 1, wherein the upper and lower sides of the first and second magnets are fixed by a set of upper and lower washers, respectively.

3. A vertical plane driven vibrating die structure characterized by comprising:

at least one vertical planar voice coil;

an electroconductive diaphragm having:

The second conducting strip is arranged on the second side of the vibrating diaphragm and is electrically connected with the second voice coil input end of the at least one vertical plane voice coil; and

an encapsulation film having:

a diaphragm support portion closely attached to the diaphragm;

the packaging film packages the at least one vertical plane voice coil and the conductive vibrating diaphragm into a whole, and enables the packaged first conductive sheet, the packaged second conductive sheet and the bottom surface of the vibrating diaphragm to be located on the same plane.

4. The vertical plane drive vibration mode structure according to claim 3, wherein the at least one vertical plane voice coil has a first vertical plane voice coil and a second vertical plane voice coil, and an insulating film is provided between the first vertical plane voice coil and the second vertical plane voice coil.

5. The vertical plane drive vibrating die structure according to claim 4, wherein the first conductive sheet and the second conductive sheet have a first welding position sheet and a second welding position sheet respectively between the first input end and the second input end, and the first welding position sheet and the second welding position sheet have a pair of welding openings respectively.

6. A vertical plane drive vibrating diaphragm structure according to claim 3, wherein the at least one vertical plane voice coil and the conductive vibrating diaphragm are perpendicular T-shaped structures.

7. A vertical plane drive vibrating die structure according to claim 3, wherein the suspension portion has a semicircular arc structure.

8. The vertical plane drive vibrating die structure according to claim 3, wherein the first conductive sheet and the second conductive sheet are copper conductive sheets.

9. The vertical plane driving vibration mode structure according to claim 3, wherein the first conductive sheet and the second conductive sheet respectively have a set of arc-shaped bending portions, and an extension plane is provided at an end of each arc-shaped bending portion.

10. The vertical plane driving vibration mode structure according to claim 9, wherein a plurality of openings are provided at the arc bending portion and/or the end of the arc bending portion.