CN116929632A - Two-direction force loading device for calibrating multidimensional force sensor - Google Patents
Two-direction force loading device for calibrating multidimensional force sensor Download PDFInfo
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- CN116929632A CN116929632A CN202310818305.2A CN202310818305A CN116929632A CN 116929632 A CN116929632 A CN 116929632A CN 202310818305 A CN202310818305 A CN 202310818305A CN 116929632 A CN116929632 A CN 116929632A
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- 230000005540 biological transmission Effects 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 6
- 230000002457 bidirectional effect Effects 0.000 claims description 3
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- 238000006243 chemical reaction Methods 0.000 claims description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
Abstract
The two-direction force loading device for calibrating the multi-dimensional force sensor comprises four identical force applying units and a device fixing frame, wherein each force applying unit comprises a front flexible displacement amplifying mechanism, a rear flexible displacement amplifying mechanism, a piezoelectric driving device, a rigid connecting piece, a force transmission element and a strain gauge; the two groups of flexible displacement amplifying mechanisms are connected through a rigid connecting piece, the piezoelectric driving device is positioned between the two groups of flexible displacement amplifying mechanisms, the central block of the rear group of amplifying mechanisms is connected with the fixed frame, the central block of the front group of amplifying mechanisms is provided with a force transmission element, and two strain gauges are adhered on the cross beam of the force transmission element; according to the invention, the piezoelectric driving device is driven by external voltage to generate axial extension, the flexible displacement amplifying mechanism amplifies the force applied load to the calibrated force sensor by the driving force transmitting element, and meanwhile, the strain gauge on the beam of the force transmitting element can detect the applied force. The four groups of force applying units are vertically arranged, so that the application of the calibration force in the horizontal two directions can be completed.
Description
Technical Field
The invention belongs to the technical field of force sensor calibration devices, and particularly relates to a two-direction force loading device for multi-dimensional force sensor calibration.
Background
The multidimensional force sensor is one of important supporting devices for high-speed development in the fields of robots, biomedicine, aerospace, information technology and the like. In general, the accuracy and stability of the sensor will be reduced during long-term use, and the detection characteristics will be changed, affecting the measurement result. Therefore, the force sensor needs to detect and calibrate its characteristics after a period of use to ensure the accuracy of the measurement results. In recent years, with the widespread use of MEMS (Micro-Electro-Mechanical System, microelectromechanical systems) miniature force sensors in various fields, there is also an increasing demand for miniaturization of sensor metering equipment.
Conventional sensor calibration devices tend to be bulky and most devices have only a unidirectional output. When the measurement performance of the MEMS multidimensional force sensor in different sensitive directions is calibrated, the installation position and the tooling of the sensor are required to be adjusted at first, so that the calibration process is complex, and the operation difficulty is high. Meanwhile, the larger volume of the calibration device is difficult to adapt to the smaller stress area of the MEMS miniature multidimensional force sensor. In recent years, piezoelectric driving elements have been widely used in the fields of displacement platforms, holders, vibration tables, and the like, because of their numerous advantages such as quick response, small volume, large driving force, and long-term operation stability. However, the output displacement of the piezoelectric driving element is generally smaller, and the requirement on the driving distance in the calibration process of the force sensor is difficult to meet. The flexible amplifying mechanism is used as a mechanical structure which is matched with the piezoelectric driving element for use, and can amplify the displacement of the piezoelectric driving element. Therefore, the piezoelectric driving element and the flexible amplifying mechanism are assembled to obtain the loading device meeting the calibration requirement of the force sensor, and the loading device still lacks a force detection function. For this purpose, patent CN 108680301a discloses a force output device based on this approach, and incorporates a standard force sensor for detection of the applied force. Overall, however, this type of device still has the following two problems: the O1 device has complex composition and large size, and the loading mode is only suitable for the traditional force sensor with a larger stress surface, so that the calibration requirement of the MEMS miniature multidimensional force sensor can not be met; the device can only apply calibration force in a single direction to the force sensor, and only realize calibration in one direction by one-time installation. The field of MEMS miniature multidimensional force sensor calibration still needs a calibration loading device which has small size, low cost, force detection function and can realize multidirectional loading.
Disclosure of Invention
Aiming at the existing problems, the invention aims to provide a two-direction force loading device for calibrating a multidimensional force sensor, and four groups of force applying units which are orthogonally and symmetrically distributed can apply two-direction force to a calibrated sensor along two directions in a horizontal plane, so that a foundation is laid for realizing calibration of two-direction characteristics of the sensor.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
a two-direction force loading device for calibrating a multi-dimensional force sensor comprises a fixed frame 2 and four identical force applying units 1 which are symmetrically and orthogonally distributed in the fixed frame 2; the force applying unit 1 comprises a back group flexible displacement amplifying mechanism 3 and a front group flexible displacement amplifying mechanism 4 which are arranged in parallel and have identical shapes, two ends of the back group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4 are connected through a rigid connecting piece 5, a piezoelectric driving device 6 is arranged between the back group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4, the two ends of the piezoelectric driving device are connected with the rigid connecting piece 5, the front group flexible amplifying mechanism 4 comprises a first center block 7 and flexible branched chains 8 arranged at two ends of the first center block 7, a force transmission element 9 is arranged on the first center block 7 of the front group flexible displacement amplifying mechanism 4, two strain gauges 10 are adhered at the end parts of the force transmission element 9, and the back group flexible displacement amplifying mechanism 3 comprises a second center block 11 fixedly connected with a fixed frame 2 and flexible branched chains 8 arranged at two ends of the second center block 11;
the two ends of the flexible branched chain 8 are provided with notches, flexible hinges are formed at the inner sides of the notches, and the flexible hinges connecting the first central block 7 and the second central block 11 are closer to the piezoelectric driving device 6 in the width direction than the flexible hinges connecting the first rigid connecting piece 3 and the second rigid connecting piece 4;
when the device works, four groups of force applying units which are orthogonally and symmetrically distributed apply bidirectional forces to the calibrated force sensor along two directions in a horizontal plane; the second center block 11 of the rear group flexible displacement amplifying mechanism 3 is fixed on the fixed frame 2, a calibrated force sensor is arranged among the four force transmission elements 9, when excitation voltage is applied to the piezoelectric driving device 6 to generate displacement, as the flexible hinge connecting the first center block 7 is closer to the piezoelectric driving device 6 in the width direction than the flexible hinge connecting the first rigid connecting piece 3 and the second rigid connecting piece 4, the flexible branched chain 8 drives the first center block 7 to move in the direction away from the piezoelectric driving device 6, and then the power transmission elements 9 are driven to move in the direction away from the piezoelectric driving device 6; the displacement of the force transmission element 9 enables the short beam to contact and interact with the stressed element of the calibrated force sensor, and the short beam is deformed by the reaction force when the calibrated force is applied to the calibrated force sensor, so that the resistance value of the strain gauge 10 is changed; the resistance change of the strain gauge 10 is converted into output voltage corresponding to the calibration force applied by the loading device through a Wheatstone bridge circuit; the corresponding relation between the output voltage of the Wheatstone bridge calibrated in advance and the stress of the short beam of the force transmission element 9 is utilized, namely the magnitude of the force value applied by the loading device to the calibrated force sensor is calculated by detecting the output voltage of the Wheatstone bridge in the process of calibrating the calibrated force sensor; comparing a plurality of force values acting on the calibrated force sensor under different driving with a plurality of corresponding values measured by the calibrated force sensor to obtain measurement deviation of the calibrated force sensor, and completing calibration of the force sensor; the force applying unit 1 positioned on the same straight line in the calibration process can apply calibration forces with opposite directions to the force receiving element of the calibrated force sensor, and the calibration sensor is characterized in that positive and negative forces act in a certain direction.
The first center block 7, the second center block 11 and the flexible branched chains 8 in the force applying unit 1 have high rigidity, and are not deformed in the displacement amplifying process.
The rigid connecting piece 5 in the force applying unit 1 is rectangular, has the same thickness as the first center block 7, the second center block 11 and the flexible branched chains 8, has high rigidity, does not deform in the displacement amplifying process, and is connected with the inner side of the rigid connecting piece 5 and the piezoelectric driving device 6.
The force transmission element 9 comprises two long beams perpendicular to the front group flexible amplifying mechanism 4, a short beam connected with the ends of the two long beams, two strain gauges 10 are stuck on the short beams, the lengths of the two long beams are more than 5 times of the lengths of the short beams, and the rigidity of the two long beams is more than 100 times of the rigidity of the short beams.
The piezo-electric drive 6 in the force applying unit 1 is a piezo-electric stack.
The fixed frame 2 is a square frame with a bulge 12 in the middle of each side, and the fixed frame 2 does not move and does not deform in the working process of the device; the second center block 11 of the rear group flexible displacement amplifying mechanism 3 is connected with a bulge 12 at the middle of the corresponding edge of the fixed frame 2.
Compared with the prior art, the invention has the following technical effects:
the invention provides a two-direction force loading device for calibrating a multidimensional force sensor, four groups of force applying units which are orthogonally and symmetrically distributed can apply two-direction force to a calibrated sensor along two directions in a horizontal plane, and a foundation is laid for realizing calibration of two-direction characteristics of the sensor. In each force applying unit, the piezoelectric stack is used as a driving device, has the advantages of quick response, small volume, large output force and the like, is matched with a flexible displacement amplifying mechanism with simple and compact structure to amplify the extension of the piezoelectric stack, realizes the output of calibration force, ensures the small volume and low cost of the device, and can meet the calibration requirement of the MEMS multidimensional force sensor. In addition, the device incorporates a strain gauge for detecting the magnitude of the force in the force application unit, realizing the detection function of the output force. Finally, the components except the piezoelectric stack can be integrally processed, so that the assembly difficulty of the device is reduced.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a top view of fig. 1.
Fig. 3 is a schematic perspective view of a force applying unit.
Fig. 4 is a schematic structural view of two flexible displacement amplifying mechanisms and two rigid connectors.
Fig. 5 is a schematic structural view of the fixing frame.
Fig. 6 is a schematic diagram of the operation of the bridge amplifying mechanism.
Fig. 7 is a graph showing the relationship between the driving voltage and the displacement of the output terminal in the force applying unit.
Wherein: 1-a force applying unit; 2-a fixed frame; 3-a rear group flexible displacement amplifying mechanism; 4-front group flexible displacement amplifying mechanism; 5-a rigid connection; 6-a piezoelectric driving device; 7-a first center block; 8-flexible branches; 9-a force transmission element; 10-strain gage; 11-a second center block; 12-bump. In fig. 6, the broken line indicates a state before the deformation of the amplifying mechanism, and the solid line indicates a state after the operation of the piezoelectric driving device.
Detailed Description
The invention is described in further detail below with reference to the attached drawing figures:
referring to fig. 1 to 7, a two-directional force loading device for calibration of a multi-dimensional force sensor is mainly composed of four identical force applying units 1 and a fixed frame 2. In each force applying unit 1, the rigid connecting pieces 5 at two ends between the rear group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4 are connected, the rigid connecting pieces 5 have larger rigidity, and the rigid connecting pieces are ensured not to obviously deform when being pushed by the piezoelectric driving device 6, so that the output displacement of the piezoelectric driving device 6 is efficiently transmitted to the rear group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4, and the actual amplification factor of the amplifying mechanism is ensured. The piezoelectric driving device 6 is arranged between the rear group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4, two ends of the piezoelectric driving device are connected with two rigid connecting pieces 5, and a feeler gauge can be added to provide pretightening force for the piezoelectric driving device 6 if necessary. The front group flexible displacement amplifying mechanism 4 of the force applying unit 1 comprises a first center block 7 and flexible branched chains 8 arranged at two ends of the first center block 7, wherein a force transmission element 9 is arranged on the first center block 7, and two strain gauges 10 are arranged on an end short beam of the force transmission element 9. The rear group flexible displacement amplifying mechanism 3 includes a second center block 11 and flexible branched chains 8 provided at both ends of the second center block 11, and each force applying unit 1 is fixed to a boss 12 in the middle of four sides of the fixed frame 2 through the second center block 11 of the rear group flexible displacement amplifying mechanism 3.
The rear group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4 have the same structure, two ends of the flexible branched chain 8 are provided with notches, and flexible hinges are formed at the inner sides of the notches. The first center block 7, the second center block 11 and the flexible branched chains 8 have higher rigidity, and do not generate obvious deformation in the displacement amplification process. During operation of the loading device, the first centre piece 7 of each force applying unit 1 will be pushed, resulting in a translational displacement. The force transmission element 9 is driven by the first centre block 7, via its short beam, to apply a calibration force to the force-receiving part of the calibrated sensor. Meanwhile, the short beam is influenced by the attack force, and generates strain corresponding to the applied calibration force, so that the resistance value of the two strain gauges 10 on the short beam is changed, and the loaded force is detected. To ensure that the force application units 1 do not interfere with each other during loading, the vertical beams of the force transfer element 9 have a large length and are much stiffer than the cross beams to prevent deformation of the vertical beams during loading.
Referring to fig. 7, as an output of the force applying unit 1, the force transmitting element 9 has a displacement proportional to the driving voltage applied to the piezoelectric driving means 6. The higher the driving voltage, the greater the displacement output by the force transmission element 9 and thus the greater the calibration force applied to the calibrated sensor. The calibration force which can be generated by the device can be adjusted by adjusting the driving voltage.
The four groups of force applying units which are orthogonally and symmetrically distributed can apply bidirectional force to the calibrated force sensor along two directions in the horizontal plane, and lays a foundation for realizing the calibration of the characteristics of the force sensor in two directions. In each force applying unit, the piezoelectric stack is used as a driving device, has the advantages of quick response, small volume, large output force and the like, is matched with a flexible displacement amplifying mechanism with simple and compact structure to amplify the extension of the piezoelectric stack, and ensures the small volume and low cost of the device while realizing the output of the calibration force, thereby meeting the requirement of the MEMS multidimensional force sensor on the high precision of the calibration device. The requirement for small volumes. In addition, the device incorporates a strain gauge for detecting the magnitude of the force in the force application unit, realizing the detection function of the output force. Finally, the components except the piezoelectric stack can be integrally processed, so that the assembly difficulty of the device is reduced.
The working process of the invention is described in detail below:
when the device works, the position of the fixed frame 2 is completely fixed and used as the support of the whole loading device; in each force applying unit 1, taking a piezoelectric stack formed by a plurality of square or round piezoelectric ceramic plates as an example, when the piezoelectric stack is subjected to a driving voltage of 0-150V, the piezoelectric stack generates axial elongation in proportion to the voltage, so that rigid connectors 5 on two sides of the piezoelectric driving device 6 are driven to move together; because the two ends of the rigid connecting piece 5 are respectively connected with the rear group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4, the rear group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4 deform, so that the first center block 7 and the force transmission element 9 of the front group flexible displacement amplifying mechanism 4 generate amplified displacement. The flexible branched chains and the central blocks in the rear group flexible displacement amplifying mechanism 3 and the front group flexible displacement amplifying mechanism 4 can be regarded as rigid bodies due to high self rigidity. For the front group flexible displacement amplifying mechanism 4, when the displacement Δx is input along the x direction, the connection point of the first central block 7 and the flexible branched chain 8 is closer to the piezoelectric driving device 6 than the connection point of the flexible branched chain 8 and the rigid connecting piece 5 in the width direction, and the flexible branched chain 8 can drive the first central block 7 to move in the direction away from the piezoelectric driving device 6, so that the power transmission element 9 is driven to move in the direction away from the piezoelectric driving device 6. The displacement of the force transmission element 9 enables the short beam to contact and interact with the stressed element of the calibrated force sensor, and the short beam is deformed by the reaction force when the calibrated force is applied to the calibrated force sensor, so that the resistance value of the strain gauge 10 is changed; the resistance change of the strain gauge 10 can be converted into output voltage corresponding to the calibration force applied by the loading device through a Wheatstone bridge circuit; and then the corresponding relation between the output voltage of the Wheatstone bridge calibrated in advance and the stress of the short beam of the force transmission element 9 is utilized, so that the magnitude of the force value applied by the loading device to the calibrated force sensor can be calculated by detecting the output voltage of the Wheatstone bridge in the process of calibrating the calibrated force sensor. And comparing a plurality of force values acting on the calibrated force sensor under different driving with a plurality of corresponding values measured by the calibrated force sensor to obtain the measurement deviation of the calibrated force sensor, and completing the calibration of the force sensor through necessary characteristic calculation. The force applying unit 1 positioned on the same straight line in the calibrating process can apply calibrating forces with opposite directions to the force receiving element of the calibrated force sensor, and can calibrate the characteristics of the sensor acted by positive and negative forces in a certain direction.
In summary, the force applying device for calibrating the MEMS multidimensional force sensor provided by the invention can apply the calibration force to the sensor along two horizontal directions with high precision, and can detect the applied calibration force in real time. Meanwhile, the whole device is compact in structure and small in size, and a plurality of parts have integrated processing potential.
The foregoing description of the embodiments of the present invention clearly and fully describes the technical solutions of the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. All directional indications (such as up, down, left, right, front, back … …) in embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular gesture (as shown in the drawings), and if the particular gesture changes, the directional indication changes accordingly.
Claims (6)
1. The two-direction force loading device for calibrating the multidimensional force sensor is characterized by comprising a fixed frame (2) and four identical force applying units (1) which are symmetrically and orthogonally distributed in the fixed frame (2); the force applying unit (1) comprises a rear group flexible displacement amplifying mechanism (3) and a front group flexible displacement amplifying mechanism (4) which are arranged in parallel and have the same shape, two ends of the rear group flexible displacement amplifying mechanism (3) and the front group flexible displacement amplifying mechanism (4) are connected through a rigid connecting piece (5), a piezoelectric driving device (6) is arranged between the rear group flexible displacement amplifying mechanism (3) and the front group flexible displacement amplifying mechanism (4), two ends of the piezoelectric driving device are connected with the rigid connecting piece (5), the front group flexible displacement amplifying mechanism (4) comprises a first center block (7) and flexible branched chains (8) arranged at two ends of the first center block (7), a force transmission element (9) is arranged on the first center block (7) of the front group flexible displacement amplifying mechanism (4), two strain gauges (10) are adhered to the end parts of the force transmission element (9), and the rear group flexible displacement amplifying mechanism (3) comprises a second center block (11) fixedly connected with a fixed frame (2) and flexible branched chains (8) arranged at two ends of the second center block (11);
the two ends of the flexible branched chain (8) are provided with notches, flexible hinges are formed at the inner sides of the notches, and the flexible hinges connecting the first central block (7) and the second central block (11) are closer to the piezoelectric driving device (6) in the width direction than the flexible hinges connecting the first rigid connecting piece (3) and the second rigid connecting piece (4);
when the device works, four groups of force applying units which are orthogonally and symmetrically distributed apply bidirectional forces to the calibrated force sensor along two directions in a horizontal plane; the second center block (11) of the rear group flexible displacement amplifying mechanism (3) is fixed on the fixed frame (2), a calibrated force sensor is arranged among four force transmission elements (9), when excitation voltage is applied to the piezoelectric driving device (6) to enable the piezoelectric driving device to generate displacement, the flexible hinge connecting the first center block (7) is closer to the piezoelectric driving device (6) than the flexible hinge connecting the first rigid connecting piece (3) and the second rigid connecting piece (4) in the width direction, and the flexible branched chain (8) drives the first center block (7) to move in the direction away from the piezoelectric driving device (6), so that the power transmission elements (9) are driven to move in the direction away from the piezoelectric driving device (6); the displacement of the force transmission element (9) enables the short beam to contact and interact with the stressed element of the calibrated force sensor, and the short beam is deformed by the reaction force when the calibrated force is applied to the calibrated force sensor, so that the resistance value of the strain gauge (10) is changed; the resistance change of the strain gauge (10) is converted into output voltage corresponding to the calibration force applied by the loading device through a Wheatstone bridge circuit; the corresponding relation between the output voltage of the Wheatstone bridge calibrated in advance and the stress of the short beam of the force transmission element (9) is utilized, namely the magnitude of the force value applied by the loading device to the calibrated force sensor is calculated by detecting the output voltage of the Wheatstone bridge in the process of calibrating the calibrated force sensor; comparing a plurality of force values acting on the calibrated force sensor under different driving with a plurality of corresponding values measured by the calibrated force sensor to obtain measurement deviation of the calibrated force sensor, and completing calibration of the force sensor; the force applying unit (1) positioned on the same straight line in the calibrating process can apply calibrating forces with opposite directions to the force receiving element of the calibrated force sensor, and the calibrating sensor is characterized in that positive and negative forces act in a certain direction.
2. The two-directional force loading device for calibrating the multi-dimensional force sensor according to claim 1, wherein the first center block (7), the second center block (11) and the flexible branched chains (8) in the force applying unit (1) have high rigidity, and are not deformed in the displacement amplifying process.
3. The two-directional force loading device for calibrating the multi-dimensional force sensor according to claim 1, wherein the rigid connecting piece (5) in the force applying unit (1) is rectangular, has the same thickness as the first center block (7), the second center block (11) and the flexible branched chain (8), has high rigidity, does not deform in the displacement amplifying process, and the inner side of the rigid connecting piece (5) is connected with the piezoelectric driving device (6).
4. A two-way force loading device for calibration of a multi-dimensional force sensor according to claim 1, characterized in that the force transfer element (9) comprises two long beams perpendicular to the front set of flexible amplifying mechanisms (4), a short beam connecting the ends of the two long beams, two strain gauges (10) attached to the short beams, two long beams having a length of 5 or more times the length of the short beam and two long beams having a stiffness of 100 or more times the stiffness of the short beam.
5. A two-way force loading device for calibration of a multi-dimensional force sensor according to claim 1, characterized in that the piezo-electric driving means (6) in the force applying unit (1) is a piezo-electric stack.
6. A two-way force loading device for calibration of a multi-dimensional force sensor according to claim 1, characterized in that the fixed frame (2) is a square frame with a protrusion (12) in the middle of each side, the fixed frame (2) does not move and does not deform during operation of the device; the second center block (11) of the rear group flexible displacement amplifying mechanism (3) is connected with a bulge (12) at the middle of the corresponding edge of the fixed frame (2).
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| CN202310818305.2A CN116929632A (en) | 2023-07-05 | 2023-07-05 | Two-direction force loading device for calibrating multidimensional force sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310818305.2A CN116929632A (en) | 2023-07-05 | 2023-07-05 | Two-direction force loading device for calibrating multidimensional force sensor |
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