CN116929424B - Sensing demodulation system based on polymer athermalized arrayed waveguide grating - Google Patents
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Abstract
The invention discloses a sensing demodulation system based on a polymer athermalized array waveguide grating, which comprises a light source chip, a polymer 2×2 MMI coupler, a polymer athermalized optical sensing device, a polymer athermalized AWG, a photoelectric detector and a signal processing circuit, wherein the light source chip is arranged on the optical sensing device; athermalization of optical sensing demodulation is achieved by integrating a polymer athermalization AWG and a polymer athermalization optical sensing device on a chip. The array waveguide in the polymer athermalization AWG adopts an asymmetric structure, and comprises a NOA61 film, a PDMS (polydimethylsiloxane) cladding layer, a PMMA core layer and a silicone filling layer, so that temperature compensation between the AWG thermal expansion effect and the array waveguide thermal optical effect is realized, and the central wavelength temperature insensitivity of an output optical signal of the polymer athermalization AWG is realized on the premise of ensuring the stable performance of the polymer AWG on the whole.
Description
Technical Field
The invention belongs to the technical field of measurement not specially used for specific variables, and particularly relates to a sensing demodulation system based on a polymer athermalized arrayed waveguide grating.
Background
In recent years, on the basis of the development of fiber grating demodulation, an array waveguide grating (arrayed waveguide grating, AWG) has the characteristics of compact structure, low power consumption and high stability, and an AWG demodulation system is gradually widely applied to the field of fiber sensing. The AWG is used as a key device of the demodulation system, the stability of the central wavelength of an output optical signal directly determines the reliability of the demodulation system, and the output central wavelength of a photon device is deviated along with the temperature change due to the change of the optical parameters of the material caused by the thermo-optical effect of the material, so that the accurate demodulation of the AWG is plagued to a certain extent.
With the development of photonic technology, the photoelectric integration technology provides a rapid development premise for the practical application of the wavelength division multiplexing technology, but for chip type photoelectric integration, the electronic components in operation can cause obvious temperature rise locally or globally on the chip, and the temperature rise can have serious influence on the performance of the photonic devices working on the same chip, so that the optical characteristics of the photonic devices become unstable. Therefore, the problem of temperature stability is always a major obstacle to prevent the further development of the optoelectronic integrated system, and solving the problem that the influence of temperature variation in the optoelectronic integrated system on the system stability is needed to be solved in the field. In order to maintain the temperature stability of the photonic device, an external temperature adjustment system is generally adopted, but the external temperature adjustment device causes additional power loss to the whole optoelectronic integrated system, resulting in complexity of the system and higher application cost.
The sensing demodulation system based on the polymer athermalized array waveguide grating provides a simple and convenient application in a temperature-variable working environment, and the sensing demodulation system has a temperature stabilizing characteristic and can realize sensing demodulation without externally connecting temperature adjusting equipment and a temperature compensation algorithm.
Term interpretation: AWG: an arrayed waveguide grating; PDMS: polydimethyl siloxane; PMMA: polymethyl methacrylate; NOA61: norland ultraviolet optical gum; WBG: waveguide Bragg gratings.
Disclosure of Invention
In view of the above-described drawbacks of the prior art, an object of the present invention is to provide a sensing demodulation system based on a polymer athermalized arrayed waveguide grating.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
a sensing demodulation system based on a polymer athermalized array waveguide grating comprises a light source chip, a polymer 2×2 MMI coupler, a polymer athermalized optical sensing device, a polymer athermalized AWG, a photoelectric detector and a signal processing circuit;
the optical signals emitted by the light source chip are incident to the polymer athermalization optical sensing device through the polymer 2×2 MMI coupler, the reflected optical signals are transmitted to the polymer athermalization AWG through the polymer 2×2 MMI coupler, the central wavelength of the reflected optical signals is located between the central wavelengths of the spectrums of two adjacent output channels of the polymer athermalization AWG, and the output optical signals of the polymer athermalization AWG are converted into electric signals through the photoelectric detector and then transmitted to the signal processing circuit.
The polymer athermalized AWG comprises an input waveguide, an input slab waveguide, an array waveguide, an output slab waveguide and an output waveguide, and the center wavelength temperature of an output optical signal of the polymer athermalized AWG is insensitive;
the input waveguide, the input slab waveguide, the array waveguide, the output slab waveguide and the output waveguide are all made of polymer materials;
the array waveguide adopts an asymmetric structure and comprises a basal layer film, a core layer, a filling layer and a cladding layer arranged on the basal layer film, wherein the upper part of the cladding layer is of a concave structure, the core layer is embedded in the center of the cladding layer, and the upper surface of the core layer is flush with the upper surface of the center of the concave structure; the filling layer covers the upper surface of the core layer and is filled in the invagination area of the concave-shaped structure of the cladding layer;
the basal layer film is a NOA61 film; the filling layer is made of silicone materials.
The core layer is made of PMMA material, the cladding layer is made of PDMS material, and the filling layer and the core layer are in two-dimensional contact with each other on the top surface.
The thickness of the filling layer of the array waveguide is smaller than that of the NOA61 film, and the thickness of the filling layer is 3-10 mu m; the thickness of the NOA61 film is 300-400 mu m; the refractive index of the filling layer is 1.39-1.4, and the thermo-optic coefficient is-3.7X10 -4 Per DEG C to-4X 10 -4 The value is taken in the range of the temperature/DEG C; the thickness of the core layer is 1-2 mu m, the width of the core layer is 2 mu m, and the thickness of the cladding layer is more than 3 mu m.
The refractive index of the cladding is 1.41, and the thermo-optic coefficient is-4.5X10 -4 The cladding thickness is 3-10 mu m at the temperature of/DEG C; the refractive index of the core layer is 1.488, and the thermo-optic coefficient is-1.2X10 -4 a/DEG C; the refractive index of the filling layer is 1.39, and the thermo-optic coefficient is-3.7X10 -4 The temperature is/DEG C, and the thickness is 10 mu m; AWG coefficient of thermal expansionαDetermined by the NOA61 film, the thermal expansion coefficient of the NOA61 film is 2.20X10 -4 /℃。
The width of the array waveguide is 1.36-1.83 mu m, the thickness of the waveguide is 1 mu m, the initial length is 1500 mu m, and the length difference is 98 mu m; the effective refractive index of the array waveguide changes linearly along with the temperature change, and the effective thermo-optic coefficient of the array waveguide within the temperature range of 20-80 ℃ is-3.11875 multiplied by 10 -4 ~-3.106×10 -4 /℃。
The output center wavelength of the polymer athermalized AWG is 1550nm, when the temperature is increased from 20 ℃ to 80 ℃, the offset of the output center wavelength is increased from 0 to 0.00371nm and then reduced to-0.00234 nm, and the corresponding wavelength offset rate is in the range of-0.000078 nm/K to 0.000124 nm/K; the array waveguide is saddle-shaped, and the derivative of the array waveguide is 25-65; the array waveguide and the input slab waveguide pass through a wedge waveguide with the length of 158-167 mu m, and the width of the wedge waveguide is changed linearly, parabolic or exponentially from 4-5 mu m to the width of the array waveguide; the output waveguide has eight outputs, and the channel interval of the eight output center wavelengths is 0.2-2 nm.
The process for obtaining the polymer athermalized AWG comprises the following steps:
determining the types of polymer materials of the cladding and the core layer, and setting the thickness and width of the core layer and the thickness of the cladding layer;
by using simulation software, on the premise of knowing the material types of the cladding and the core layer, according toSimulating and calculating the value range of the required AWG thermal expansion coefficient;
wherein,Tin order to be able to determine the temperature,n c is the effective refractive index of the array waveguide,αis the thermal expansion coefficient of the AWG;
at a desired AWG coefficient of thermal expansionαChanging the temperature to simulate different AWG thermal expansion coefficients in the range of the valuesαThe influence on the output center wavelength shift takes the AWG thermal expansion coefficient with the smallest wavelength shift as a reference, and selects a material with the thermal expansion coefficient closest to the AWG thermal expansion coefficient as a base layer film material;
and selecting a filling layer material according to the refractive index and the thermo-optic coefficient of the cladding material, wherein the filling layer is obtained by removing the cladding material above the core layer and filling, the filling layer can completely cover the core layer, the coverage area of the filling layer is larger than that of the core layer, and the refractive index and the thermo-optic coefficient of the filling layer material are lower than those of the cladding material.
Preferably, the width of the filling layer is more than 5 times greater than the width of the core layer, and the length of the filling layer is the same as the length of the core layer.
The input waveguide, the input slab waveguide, the output slab waveguide and the output waveguide adopt symmetrical structures, the symmetrical structures are structures with core layers wrapped up by the same cladding materials up and down, NOA61 films are arranged on the lower surfaces of the cladding layers of the symmetrical structures, the cladding layers in the symmetrical structures also adopt PDMS materials, and the core layers in the symmetrical structures adopt PMMA materials.
The polymer athermalization optical sensing device, the polymer athermalization AWG and the polymer 2×2MMI coupler are integrated on the same polymer photon chip, and the reflection center wavelength of the polymer athermalization optical sensing device is insensitive to temperature change.
Compared with the prior art, the invention has the beneficial effects that:
the invention provides an array waveguide grating sensing demodulation system on a PDMS material platform, PDMS is a flexible polymer material with poor temperature stability, wherein the deformation degree along with the temperature change is quite obvious (the thermal expansion coefficient is 9 multiplied by 10) -4 The change of the optical refractive index with temperature is also very remarkable (the thermo-optic coefficient is-4.5X10) -4 /(deg.C). The temperature characteristic of the PDMS of the cladding material brings great influence to the temperature stability of the polymer sensing demodulation system, so the sensing demodulation system based on the PDMS material has great difficulty in practical application, and the design of the temperature insensitive sensing demodulation system based on the PDMS material platform has important value for the application field of flexible sensing demodulation.
The invention provides a sensing demodulation system based on a polymer athermalized array waveguide grating, wherein an AWG is a polymer athermalized AWG, the temperature of the central wavelength of an output optical signal is insensitive, an array waveguide is led into a filling layer made of a silicone material, so that the array waveguide is different from a cladding material, an asymmetric waveguide structure is formed, the filling layer and the core layer only adopt two-dimensional contact of the top surface, the temperature mutual compensation of the thermal optical effect of the AWG and the temperature of the output wavelength of the AWG is realized through the thermal expansion effect of the AWG, and the temperature stability of the output wavelength of the AWG is realized.
According to the invention, the polymer athermalization optical sensing device and the polymer athermalization AWG are integrated on the same polymer photon chip, the temperature compensation of the thermo-optic effect of the device structure is realized through the thermal expansion effect of the polymer athermalization optical sensing device (such as athermalization micro-ring resonator, athermalization waveguide Bragg grating and the like), the sensing demodulation system can maintain better temperature stability under the premise of not resorting to external temperature regulation and temperature compensation algorithm, and the system maintenance cost can be greatly reduced without the subsequent processing steps. In addition, because the adopted polymer material has higher biocompatibility, the sensing demodulation system based on the polymer athermalized array waveguide grating can realize sensing demodulation.
The polymer athermalization AWG adopts a softer material such as PDMS, so that the polymer athermalization AWG has better flexibility, the preparation of the polymer athermalization AWG needs to consider a core layer and an upper cladding layer structure, and adopts two layers of completely irrelevant polymer materials, so that the insensitivity of the temperature of the central wavelength of an output optical signal is realized, and the temperature stability of the AWG is improved through an asymmetric waveguide structure, so that the array waveguide grating demodulation system is used for solving the series of problems faced by the array waveguide grating demodulation system in the prior art.
Drawings
FIG. 1 is a schematic diagram of a polymer athermalized arrayed waveguide grating based sensor demodulation system according to the present invention;
FIG. 2 is a schematic diagram of a polymer athermalized AWG with saddle-type arrayed waveguides in accordance with the present invention;
FIG. 3 is a graph showing the effective refractive index of an array waveguide of a polymer athermalized AWG according to the present invention as a function of temperature;
FIG. 4 is a graph showing the effect of different coefficients of thermal expansion of the AWG on the center wavelength of the output optical signal of the polymer matrix waveguide grating in accordance with the present invention;
FIG. 5 is a schematic three-dimensional view of an array waveguide of an asymmetric polymer athermalized AWG of the present invention;
FIG. 6 is a schematic cross-sectional view of an array waveguide of an asymmetric polymer athermalized AWG of the present invention;
FIG. 7 is a flow chart of the preparation process of the array waveguide with an asymmetric structure in the invention;
FIG. 8 is a graph showing the first order conductance of an asymmetric and symmetric structure all-polymer athermalized AWG of the present invention as a function of temperature;
FIG. 9 is a graph showing the center wavelength of the output optical signal of the polymer athermalized AWG of the asymmetric and symmetric structures according to the present invention as a function of temperature;
FIG. 10 is a graph showing the spectral dependence of one output channel of a polymer athermalized AWG of the present invention as a function of temperature;
FIG. 11 is a graph showing the partial channel output spectrum of a polymer athermalized AWG according to the present invention;
FIG. 12 is a graph showing the output spectrum of adjacent channels of a polymer athermalized AWG and the reflection spectrum of a polymer athermalized optical sensor device according to the present invention;
FIG. 13 is a graph showing the relationship between the reflectance spectrum of glucose-sensing WBG and the center wavelength of the output spectrum of a polymer athermalized AWG according to the present invention as a function of temperature;
reference numerals:
1. input waveguide, 2, input slab waveguide, 3, array waveguide, 4, output slab waveguide, 5, output waveguide, 6, basal lamina film, 7, cladding, 8, core layer, 9, filling layer;
01. a light source chip, 02, a polymer 2×2 MMI coupler, 03, a polymer athermalized optical sensor, 04, polymer athermalization AWG,05, photodetector, 06, signal processing circuit.
Detailed Description
The technical scheme of the invention is described in detail below with reference to the accompanying drawings and specific embodiments.
The described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be obtained by persons skilled in the art without making any creative effort, based on the embodiments of the present invention are included in the protection scope of the present invention, and the embodiments described below by referring to the drawings are exemplary only for explaining the technical scheme of the present invention and should not be construed as limiting the present invention.
As described in detail in the embodiments of the present invention, the cross-sectional view of the device structure is not partially enlarged to a general scale for convenience of explanation, and the schematic drawings are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.
For ease of description, spatially relative terms such as "above," "upper," "above," "left-right region," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. These spatial relationship words are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the figures.
Example 1: fig. 1 is a schematic diagram of a sensing demodulation system of a polymer athermalized arrayed waveguide grating, which is described in the present invention, and includes a light source chip 01, a polymer 2×2 MMI coupler 02, a polymer athermalized optical sensing device 03, a polymer athermalized AWG 04, a photodetector 05, and a signal processing circuit 06. The polymer 2×2 MMI coupler, the polymer athermalized optical sensor, the polymer athermalized AWG and the photodetector are integrated on the same polymer photonic chip. The optical signals emitted by the light source chip are incident to the polymer athermalized optical sensing device through the polymer 2×2 MMI coupler, the reflected optical signals are transmitted to the polymer athermalized AWG through the polymer 2×2 MMI coupler, and the central wavelength of the reflected optical signals is located between the central wavelengths of the spectrums of two adjacent output channels of the polymer athermalized AWG. With the change of the sensor information, the output optical power of two adjacent channels of the polymer athermalized AWG is changed. The photoelectric detector is used for converting the optical power of the output optical signal of the polymer athermalized AWG into current, and the signal processing circuit is used for calculating and deducing the sensing information.
The polymer athermalization AWG is made of polymer materials, and the thermo-optic effect of the polymer materials is that the polymer materials have higher negative thermo-optic coefficients (-0.8 to-4.5X10) -4 I deg.c), the refractive index of the material decreases with increasing temperature, and the center wavelength of the output optical signal of the arrayed waveguide grating caused by the thermo-optic effect of the polymer material shifts by-120 pm/deg.c. Meanwhile, unlike inorganic materials (such as silicon, indium phosphide and the like), the polymer material has remarkable thermal expansion effect, and the thermal expansion coefficient and the thermo-optic coefficient are in the same order of magnitude (0.7-9 multiplied by 10) -4 I c) and is positive. And the PDMS material has a thermal expansion coefficient of 9X 10 -4 And is a material with remarkable thermal expansion effect. Based on the thermal expansion effect of PDMS, the temperature will lead toThe positive shift of the array waveguide grating is significantly higher than the thermo-optical effect of the array waveguide.
Fig. 2 is a schematic structural diagram of a polymer athermalized AWG according to the present invention, comprising an input waveguide 1, an input slab waveguide 2, an array waveguide 3, an output slab waveguide 4, and an output waveguide 5. The input waveguide, the input slab waveguide, the output slab waveguide and the output waveguide adopt symmetrical structures, the symmetrical structures are structures of cladding layers which are vertically wrapped by the same cladding materials, and NOA61 films are arranged on the lower surfaces of the cladding layers of the symmetrical structures. The core layer is made of PMMA material, and the cladding layer is made of PDMS material.
The center wavelength of the output optical signal of the arrayed waveguide grating satisfies the equation of the grating equation as follows:
（1）
wherein,λ c in order to output the center wavelength of the optical signal,n c is the effective refractive index of the array waveguide,ΔLfor the difference in length between adjacent ones of the arrayed waveguides,mis a diffraction order. Equation (1) versus temperatureTThe derivative is taken to obtain the relation of the central wavelength of the output optical signal along with the change of temperature:
（2）
wherein,αis the thermal expansion coefficient of the AWG. Since the shift of the center wavelength of the output optical signal of the athermalized arrayed waveguide grating with the temperature change is 0, the equation in brackets in the equation (2) is 0, then:
（3）
as shown in formula (3), the temperature stability of the array waveguide grating and the effective thermo-optic coefficient of the array waveguideAWG thermal expansionCoefficient of expansionαRelated to the following.
Effective thermo-optic coefficient of array waveguide according to formula (3)Coefficient of thermal expansion with AWGαSatisfy the following requirements
（4）
For a polymer athermalized AWG, by adjusting the effective refractive index of the arrayed waveguiden c Effective thermo-optic coefficientAnd AWG coefficient of thermal expansionαTemperature compensation between the thermo-optic effect and the thermal expansion effect is achieved.
FIG. 3 shows a device obtained by selecting PMMA material as core material and PDMS material as cladding material, and having a core thickness of 1 μm, a core width of 2 μm, and a cladding thickness of 3 μm or more, and examining effective refractive indexn c With temperatureTA graph of the relationship of the changes. As can be seen from the figure, the effective refractive index of the waveguide decreases with increasing temperature, the refractive index of the PDMS material is 1.41, and the thermo-optic coefficient is-4.5X10 -4 The refractive index of PMMA material is 1.488, and the thermo-optic coefficient is-1.2X10 -4 Per DEG C, resulting in an effective refractive index of the array waveguiden c Decreasing with increasing temperature. And then according to the formula (4), the AWG thermal expansion coefficient required by the device is required to be satisfiedαIncreasing with increasing temperature, in the case of defined cladding and core materialsαTake values over a varying interval.
But AWG coefficient of thermal expansionαIs substantially constant over a range, which results in thermal expansion temperature compensation of the selected device that only allows athermalized arrayed waveguide gratings to reach athermalized equilibrium at one temperature point. According to the simulation calculation, the AWG thermal expansion coefficient required by athermalization of the array waveguide grating under the material system is known by taking PMMA as a core layer material and PDMS as a cladding layer materialαAt 1.97X10 -4 ~ 2.22×10 -4 between/deg.C. FIG. 4 examines the coefficients of thermal expansion of different AWGsαThe influence on the center wavelength of the output optical signal of the polymer athermalized AWG is that when the temperature is changed from 20-80 ℃, the change trend of the offset of the center wavelength of the output optical signal of the polymer athermalized AWG is based on different thermal expansion coefficients of the AWG: the center wavelength is first shifted positively in the direction of the wavelength increase and then reaches a peak point where the positive shift gradually decreases to a negative shift. Wherein whenα=2.2×10 -4 The deviation of the center wavelength is the smallest at/deg.C, the material having the closest thermal expansion coefficient to the AWG having the smallest wavelength deviation is selected as the base layer film material with reference to the AWG thermal expansion coefficient, and the final thermal expansion coefficient is selected to be 2.2X10 in this example -4 NOA61 material at/DEG C as a material for determining the thermal expansion coefficient of an AWGαIs a substrate layer material of the substrate layer. The thickness of the lower cladding layer is 10 mu m, the thickness of the core layer waveguide is 1 mu m, the thickness of the upper cladding layer is 10 mu m, the thickness of the NOA61 film is 380-400 mu m, and the thermal expansion coefficient of the whole AWGαDetermined by the NOA61 film.
The center wavelength of the output optical signal of the athermalized AWG has a maximum value and a minimum value in the shifting process, and the smaller the difference value between the maximum value and the minimum value of the wavelength shifting is, the more the temperature stability of the polymer array waveguide grating can be improved.
The array waveguide 3 adopts an asymmetric structure. Fig. 5 is a three-dimensional structure diagram of an array waveguide 3 of an athermalized polymer AWG employed in the present invention, the array waveguide referring to an array of a plurality of waveguides, the length difference referring to the difference between lengths of adjacent waveguides in the array waveguide, and a cross-sectional structure diagram thereof is given in fig. 6 by taking one of the array waveguides as an example. The array waveguide comprises a basal layer film 6, a cladding layer 7 arranged on the basal layer film 6, a core layer 8 arranged on the cladding layer 7 and a filling layer 9 arranged on the core layer; the filling layer is made of silicone material, the core layer is made of PMMA material, the cladding layer is made of PDMS material, the filling layer 9 of the array waveguide and the core layer 8 are made of PDMS material only in a mode of two-dimensional contact of the top surface, and the left area and the right area which are at the same height as the core layer 8 are made of PDMS material; the input waveguide 1, the input slab waveguide 2, the output slab waveguide 4 and the output waveguide 5 of the polymer athermalized AWG adopt a symmetrical structure.
Fig. 7 is a process flow diagram of a preparation of an array waveguide with an asymmetric structure:
preparing a NOA61 film with the thickness of 380-400 mu m by spin coating, wherein the spin coating adopts a spin coating mode of high speed and low speed, the spin coating rotating speed at high speed is 1000+/-10 r/min, the spin coating time is 10s, the spin coating rotating speed at low speed is 20+/-1 r/min, and the spin coating time is 20s;
spin-coating a PDMS lower cladding with the thickness of 10 mu m on the NOA61 film, wherein the spin-coating adopts a spin-coating mode of first low speed and then high speed, the spin-coating rotating speed at low speed is 500+/-2 r/min, the spin-coating time is 5s, the spin-coating rotating speed at high speed is 4700+/-2 r/min, and the spin-coating time is 100s;
spin-coating a PMMA film, wherein a spin-coating mode of first low speed and then high speed is adopted, the spin-coating rotating speed at low speed is 500+/-2 r/min, the spin-coating time is 5s, the spin-coating rotating speed at high speed is 3000+/-2 r/min, and the spin-coating time is 60s;
patterning the PMMA film by adopting a plasma etching process to obtain a PMMA core layer, wherein SF is obtained in the plasma etching process 6 And O 2 Is a mixed gas of SF and has a gas flow rate ratio of 6 :O 2 =2:3, rf power 200W;
continuously spin-coating a PDMS upper cladding with the thickness of 10-15 mu m above and around the PMMA core layer;
and (3) utilizing the mask plate and the overlay mark on the waveguide to overlay a two-dimensional top surface contact area pattern of the array waveguide, and etching the PDMS upper cladding layer by adopting a reactive ion etching process, so that a filling area with the thickness of 10-15 mu m is formed on the surface of the PMMA core layer for adding silicone solution, wherein the reactive ion etching conditions are as follows: SF (sulfur hexafluoride) 6 And O 2 Is a mixed gas of SF and has a gas flow rate ratio of 6 :O 2 =1:2, rf power is 200W;
and finally, filling a silicone solution in the filling area formed after etching, and curing to form a filling layer to complete the preparation of the array waveguide.
The asymmetric structure realizes the insensitivity of the center wavelength temperature of the output optical signal of the polymer athermalized AWG through the mutual temperature compensation of the thermal expansion effect of the array waveguide and the thermal-optical effect of the array waveguide with four layers of asymmetric structures.
The filling layer material has refractive index and thermo-optic coefficient lower than PDMS, refractive index of 1.39-1.40, and thermo-optic coefficient of-3.7X10 -4 Per DEG C to-4X 10 -4 The area of the filler layer is such that it completely covers the core layer and extends beyond it, as compared to an AWG of symmetrical construction. The filling layer of silicone material is introduced into the asymmetric structure, and the thermo-optic coefficient is changed into-3.7X10 -4 The refractive index is in the range of 1.39-1.40.
AWG thermal expansion coefficient required by polymer athermalization AWGαSatisfying the formula (4), and respectively deriving the temperature T at two sides of the formula (4) to obtain a first-order derivativeα’The following are provided:
（5）
the top layer of the polymer athermalized AWG with an asymmetric structure is made of silicone material, the refractive index range is 1.39, and the corresponding array waveguide width is 1.36-1.83 mu m. The initial length of the array waveguide (i.e. the length of the first waveguide in the array waveguide) is 1500 μm, the length difference (the length difference between adjacent waveguides in the array waveguide) is 98 μm, the effective refractive index changes linearly with the temperature change, and the effective thermo-optic coefficient of the array waveguide in the temperature range of 20-80 ℃ is-3.11875 ×10 -4 /℃~-3.106×10 -4 /℃。
FIG. 8 shows an array waveguide grating of a symmetric structure (without silicone material) and an array waveguide grating of an asymmetric structure (with silicone material)α’By contrast, it can be found that the asymmetric structure is in the temperature range of 20-65 DEG Cα’Smaller than symmetrical structure, asymmetrical structureα’The desired AWG coefficient of thermal expansion drops rapidlyαIn this range, the thermal expansion coefficient of the base layer is more closely 2.2X10 -4 The temperature of the material is/DEG C, the requirement is met, and the asymmetric structure is within the range of 65-80 DEG Cα (1) Is larger than the symmetrical structure. Therefore, the forward shift speed of the central wavelength of the output optical signal of the array waveguide grating with the asymmetric structure is smaller than that of the symmetric structure in the temperature range of 20-65 ℃, and the asymmetric structure has reverse bias between 40-80 DEG CThe moving speed is lower than that of a symmetrical structure, the central wavelength of the output optical signal is more stable, and the absolute value of the change of the central wavelength is smaller.
Fig. 9 is a graph of the center wavelength of the output optical signal of the AWG with asymmetric and symmetric structures as a function of temperature, where the shift of the center wavelength of the output optical signal increases from 0 to 0.00371nm at-0.00234 nm, and the corresponding wavelength shift rate decreases from 0.000124nm/K to-0.000078 nm/K. Compared with the AWG with a symmetrical structure, the AWG has obvious improvement in the stability of wavelength shift, the maximum value and the minimum value are reduced, and the absolute value of the wavelength shift is obviously reduced.
Fig. 10 is a graph of the output spectrum of one of the output channels of a polymer athermalized AWG as a function of temperature, with the center wavelength of the output optical signal at 1550nm band, and with good temperature stability as the temperature increases from 20 ℃ to 80 ℃ at the center wavelength of the output optical signal.
The array waveguide of the polymer athermalized AWG can adopt a saddle-shaped or traditional structure, and the derivative of the array waveguide is 25-65.
The insertion loss of the polymer athermalized AWG is reduced by connecting the array waveguide and the flat waveguide part (the input flat waveguide or the output flat waveguide) through the wedge-shaped waveguide, the length of the wedge-shaped waveguide is 158-167 mu m, and the width of the waveguide is changed linearly, parabolic or exponentially from 4-5 mu m to the width of the array waveguide.
The channel interval of the central wavelength of the output optical signal of the polymer athermalized AWG is 0.2-2 nm.
FIG. 11 is an output spectrum of a polymer athermalized AWG. The athermalized AWG can maintain the normal optical performance of the device, the output loss is about 3dB, and the inter-channel crosstalk is-23 dB.
The polymer athermalization optical sensing device is an on-chip photon device, such as athermalization micro-ring resonator, athermalization waveguide Bragg grating and the like, and is integrated with the polymer athermalization AWG on the same polymer photon chip, the thermal expansion effect of the base layer film material NOA61 realizes the temperature compensation of the thermo-optical effect of the polymer athermalization optical sensing device, and the reflection spectrum center wavelength of the polymer athermalization optical sensing device shifts when and only when the measured sensing information changes, and the influence of the temperature change on the optical performance of the polymer athermalization optical sensing device is weak.
Fig. 12 is a schematic of the output spectra of adjacent channels of a polymer athermalized AWG and the reflectance spectra of a polymer athermalized optical sensing device. The dashed line represents the reflected light signal of the athermalized polymer optical sensing device, and the solid line represents the center wavelength of the output spectra of two adjacent output channels of the athermalized polymer AWG. The polymer athermalization optical sensing device can also realize the sensing measurement of various non-specific sensing information, such as the concentration of a glucose solution, and the reflected light signal of the polymer athermalization optical sensing device is transmitted to the polymer athermalization AWG, and the central wavelength of the reflected light signal is between the central wavelengths of the output spectrums of two adjacent output channels of the polymer athermalization AWG. The change of the biochemical sensing information influences the change of the reflection wavelength of the polymer athermalization optical sensing device, so that the optical power of the optical signals of two adjacent output channels of the polymer athermalization AWG is changed.
Example 2: the embodiment is based on a sensing demodulation system of a polymer athermalized array waveguide grating, which is used for detecting the concentration of a glucose solution, wherein a polymer athermalized optical sensing device adopts WBG, and FIG. 13 is the relation between the reflection spectrum of the glucose sensing WBG and the change of the central wavelength of the output spectrum of the polymer athermalized AWG along with the temperature. The trend of the change of the reflection spectrum center wavelength of the WBG along with the temperature is similar to the trend of the change of the output spectrum center wavelength of the polymer athermalization AWG along with the temperature, and the offset difference of the reflection spectrum of the polymer athermalization optical sensing device and the output spectrum center wavelength of the polymer athermalization AWG along with the temperature is controlled within 0.001nm, so that the demodulation system is not affected by the temperature when detecting the concentration of glucose, and the detection can be more accurate.
The polymer materials adopted by the invention, such as PDMS, PMMA, silicone and NOA61, belong to materials which are easy to purchase in the market, and the technical scheme adopted by the invention is easy to realize.
The sensing demodulation system based on the polymer athermalization array waveguide grating adopts the polymer athermalization AWG and the polymer athermalization optical sensing device, and the optical performance is insensitive to temperature on the premise of ensuring the performance of the device, so that the sensing demodulation system described by the invention can be applied to a working environment with temperature change without externally connecting a temperature regulating device and a temperature compensation algorithm.
The invention is applicable to the prior art where it is not described.
Claims (9)
1. A sensing demodulation system based on a polymer athermalized arrayed waveguide grating is characterized in that: the device comprises a light source chip, a polymer 2×2 MMI coupler, a polymer athermalization optical sensor, a polymer athermalization AWG, a photoelectric detector and a signal processing circuit;
the optical signals emitted by the light source chip are incident to the polymer athermalized optical sensing device through the polymer 2×2 MMI coupler, the reflected optical signals of the polymer athermalized optical sensing device are transmitted to the polymer athermalized AWG through the polymer 2×2 MMI coupler, the central wavelength of the reflected optical signals is positioned between the central wavelengths of the spectrums of two adjacent output channels of the polymer athermalized AWG, and the output optical signals of the polymer athermalized AWG are converted into electric signals through the photoelectric detector and then transmitted to the signal processing circuit;
the polymer athermalized AWG comprises an input waveguide, an input slab waveguide, an array waveguide, an output slab waveguide and an output waveguide, and the center wavelength temperature of an output optical signal of the polymer athermalized AWG is insensitive;
the input waveguide, the input slab waveguide, the array waveguide, the output slab waveguide and the output waveguide are all made of polymer materials;
the array waveguide adopts an asymmetric structure and comprises a basal layer film, a core layer, a filling layer and a cladding layer arranged on the basal layer film, wherein the upper part of the cladding layer is of a concave structure, the core layer is embedded in the center of the cladding layer, and the upper surface of the core layer is flush with the upper surface of the center of the concave structure; the filling layer covers the upper surface of the core layer and is filled in the invagination area of the concave-shaped structure of the cladding layer;
the basal layer film is a NOA61 film; the filling layer is made of silicone materials.
2. The sensing demodulation system based on the polymer athermalized arrayed waveguide grating according to claim 1, wherein the core layer is made of PMMA, the cladding layer is made of PDMS, and the filling layer and the core layer are in two-dimensional contact with each other on the top surface.
3. The sensing demodulation system based on a polymer athermalized arrayed waveguide grating according to claim 1, wherein the thickness of the filling layer of the arrayed waveguide is smaller than the thickness of the NOA61 thin film, and the thickness of the filling layer is 3-10 μm; the thickness of the NOA61 film is 300-400 mu m; the refractive index of the filling layer is 1.39-1.4, and the thermo-optic coefficient is-3.7X10 -4 Per DEG C to-4X 10 -4 The value is taken in the range of the temperature/DEG C; the thickness of the core layer is 1-2 mu m, the width of the core layer is 2 mu m, and the thickness of the cladding layer is more than 3 mu m.
4. The sensing demodulation system based on polymer athermalized arrayed waveguide grating according to claim 3, wherein the cladding has a refractive index of 1.41 and a thermo-optic coefficient of-4.5X10 -4 The cladding thickness is 3-10 mu m at the temperature of/DEG C; the refractive index of the core layer is 1.488, and the thermo-optic coefficient is-1.2X10 -4 a/DEG C; the refractive index of the filling layer is 1.39, and the thermo-optic coefficient is-3.7X10 -4 The temperature is/DEG C, and the thickness is 10 mu m; the thermal expansion coefficient of the NOA61 film was 2.20X10 -4 /℃。
5. The sensing demodulation system based on the polymer athermalized arrayed waveguide grating according to claim 1, wherein the width of the arrayed waveguide is 1.36-1.83 μm, the thickness of the waveguide is 1 μm, the initial length is 1500 μm, and the length difference is 98 μm; the effective refractive index of the array waveguide changes linearly along with the temperature change, and the effective thermo-optic coefficient of the array waveguide within the temperature range of 20-80 ℃ is-3.11875 multiplied by 10 -4 ~-3.106×10 -4 /℃。
6. The sensing demodulation system based on the polymer athermalized arrayed waveguide grating according to claim 1, wherein the output center wavelength of the polymer athermalized AWG is 1550nm; the array waveguide is saddle-shaped, and the derivative of the array waveguide is 25-65; the array waveguide and the input slab waveguide pass through a wedge waveguide with the length of 158-167 mu m, and the width of the wedge waveguide is changed linearly, parabolic or exponentially from 4-5 mu m to the width of the array waveguide; the output waveguide has eight outputs, and the channel interval of the eight output center wavelengths is 0.2-2 nm.
7. The polymer athermalized arrayed waveguide grating based sensing demodulation system of claim 1, wherein the polymer athermalized AWG is obtained by the steps of:
determining the types of polymer materials of the cladding and the core layer, and setting the thickness and width of the core layer and the thickness of the cladding layer;
by using simulation software, on the premise of knowing the material types of the cladding and the core layer, according toSimulating and calculating the value range of the required AWG thermal expansion coefficient;
wherein,Tin order to be able to determine the temperature,n c is the effective refractive index of the array waveguide,αis the thermal expansion coefficient of the AWG;
at a desired AWG coefficient of thermal expansionαChanging the temperature to simulate different AWG thermal expansion coefficients in the range of the valuesαThe influence on the output center wavelength shift takes the AWG thermal expansion coefficient with the smallest wavelength shift as a reference, and selects a material with the thermal expansion coefficient closest to the AWG thermal expansion coefficient as a base layer film material;
and selecting a filling layer material according to the refractive index and the thermo-optic coefficient of the cladding material, wherein the filling layer is obtained by removing the cladding material above the core layer and filling, the filling layer can completely cover the core layer, the coverage area of the filling layer is larger than that of the core layer, and the refractive index and the thermo-optic coefficient of the filling layer material are lower than those of the cladding material.
8. The sensing demodulation system based on the polymer athermalized array waveguide grating according to claim 1, wherein the input waveguide, the input slab waveguide, the output slab waveguide and the output waveguide adopt symmetrical structures, the symmetrical structures are structures with the same cladding material vertically wrapping a core layer, and NOA61 films are arranged on the lower surfaces of the cladding layers of the symmetrical structures.
9. The sensing demodulation system based on the polymer athermalized arrayed waveguide grating according to claim 1, wherein the polymer athermalized optical sensing device is an athermalized micro-ring resonator or an athermalized waveguide bragg grating, and the polymer athermalized AWG and the polymer 2×2 MMI coupler are integrated on the same polymer photonic chip, the reflection spectrum center wavelength of the polymer athermalized optical sensing device is insensitive to temperature change, and the difference between the reflection spectrum of the polymer athermalized optical sensing device and the deviation of the output spectrum center wavelength of the polymer athermalized AWG with temperature is less than 0.001nm.
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