CN116885562A - Annular external cavity interband cascade laser and preparation method thereof - Google Patents
Annular external cavity interband cascade laser and preparation method thereof Download PDFInfo
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 9
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0618—Details on the linewidth enhancement parameter alpha
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1039—Details on the cavity length
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- Condensed Matter Physics & Semiconductors (AREA)
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- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
The invention provides an annular external cavity interband cascade laser and a preparation method thereof, comprising the following steps: an interband cascade laser; plating a layer of antireflection film on the front cavity surface side of the interband cascade laser; the front cavity surface side and the back cavity surface side of the interband cascade laser are respectively provided with a front cavity surface straight lens and a back cavity surface straight lens; the blazed grating is arranged on the front cavity surface side of the front cavity surface straight lens; the gold-plated reflecting mirror group comprises a first gold-plated reflecting mirror, a second gold-plated reflecting mirror and a third gold-plated reflecting mirror which are arranged along an emergent light path of the blazed grating; the front cavity surface straight lens, the blazed grating, the first gold-plated reflecting mirror, the second gold-plated reflecting mirror, the third gold-plated reflecting mirror and the rear cavity surface straight lens form an annular light path cavity; the front cavity surface side of the inter-band cascade laser emits an optical signal, and the optical signal passes through the annular optical path cavity and then is incident to the inter-band cascade laser again from the rear cavity surface side. The device can obtain a wider spectrum tuning range and a larger output power than a Littrow external cavity of zero-order diffraction light output.
Description
Technical Field
The invention relates to the technical field of mid-infrared semiconductor photoelectric devices and laser spectrometers, in particular to an annular external cavity interband cascade laser and a preparation method thereof.
Background
The interband cascade laser (Interband Cascade Lasers, ICL) is a semiconductor laser with the advantages of long upper energy level service life of the emission spectrum in a middle infrared band and high internal quantum efficiency of the quantum cascade laser combined with the quantum well laser, the dominant working band is 3-4 mu m, the band gap between the near infrared (below 3 mu m) of the quantum well laser and the infrared (above 4 mu m) in the Quantum Cascade Laser (QCL) is perfectly made up, and the interband cascade laser has the advantages of small volume, tunable wavelength, lower power consumption of the quantum cascade laser and the like.
The 3-5 μm band is called the "fingerprint" band of gas molecules, as the first atmospheric window in the mid-infrared band in which a large number of molecular absorption lines of the gas are distributed, and each molecule corresponds to a particular line. The spectrum research of the middle and far infrared wave bands has great development prospect in the aspects of atmosphere detection, explosive gas leakage monitoring, medical diagnosis and the like. High accuracy gas detection places a need for high single-mode performance, and integrated distributed feedback (Distributed Feedback, DFB) lasers can solve this problem well. However, in practical application, multiple gases are often required to be detected, and often, because the spectrums of the molecular absorption lines are not overlapped and the tuning range of the DFB laser is smaller, multiple single-mode lasers are often required to cover a larger spectrum range together, which brings inconvenience to the process and device arrangement. For this purpose, the laser is combined with a blazed grating to form an External Cavity (EC) laser, and the grating is used as a wavelength selective element in the External Cavity to provide a very portable and tunable laser source for spectroscopic analysis.
Littrow EC structures with zero-order diffracted light output have achieved an expansion of tuning range in combination with ICL as the most common external cavity structure. In order to further improve the spectrum linewidth, a Littman-Metcalf structure with one plane reflector more than a Littrow structure can be adopted, a reflector is combined behind the blazed grating, the external cavity length and the wavelength selectivity of the EC-QCL are increased through secondary frequency selection of the reflector, and a very narrow spectrum linewidth can be obtained. However, the light incident on the mirror and returned by the return path does not satisfy the Littrow angle, and the tuning range is narrowed due to the low diffraction efficiency. Therefore, a structure that can combine two EC structures to widen the spectrum and reduce the linewidth, and also to improve the output power to some extent is needed.
In addition, the diffracted light energy of blazed gratings is mostly concentrated on the first order diffracted light, and zero order diffracted light as output light limits the output power of the device, typically less than about 10% of the amplified power. The use of a ring resonator with two counter-propagating modes has been demonstrated to couple out light in both directions for higher power. And the ring cavity resonator with two counter-propagating traveling waves can remarkably reduce the Space Hole Burning (SHB) effect related to the standing waves and greatly improve the spectral stability. At present, the traditional external cavity laser is very dependent on the performance of the ICL, and the laser with general output power and spectrum tuning performance cannot continuously obtain larger power or further expand the tuning range through the traditional external cavity structure.
Disclosure of Invention
First, the technical problem to be solved
In view of the above-mentioned shortcomings, a primary object of the present invention is to provide a ring-shaped external cavity interband cascade laser and a method for manufacturing the same, so as to solve the problem that better linewidth quality, output power and tuning range than those of the conventional external cavity are obtained when the same ICL is used.
(II) technical scheme
To achieve the above object, according to a first aspect of the present invention, there is provided a ring-shaped external cavity interband cascade laser comprising: an interband cascade laser; plating a layer of antireflection film on the front cavity surface side of the interband cascade laser; the front cavity surface side and the back cavity surface side of the interband cascade laser are respectively provided with a front cavity surface straight lens and a back cavity surface straight lens; the blazed grating is arranged on the front cavity surface side of the front cavity surface straight lens; the gold-plated reflecting mirror group comprises a first gold-plated reflecting mirror, a second gold-plated reflecting mirror and a third gold-plated reflecting mirror which are arranged along an emergent light path of the blazed grating; the front cavity surface straight lens, the blazed grating, the first gold-plated reflecting mirror, the second gold-plated reflecting mirror, the third gold-plated reflecting mirror and the rear cavity surface straight lens form an annular light path cavity; the front cavity surface side of the interband cascade laser emits an optical signal, and the optical signal is emitted clockwise through the annular optical path cavity and then is incident to the interband cascade laser again from the rear cavity surface side.
In the scheme, the cavity of the interband cascade laser is of a Fabry-Perot structure and can continuously work at room temperature.
In the scheme, the blazed grating is fixed on a grating frame, and the grating frame is arranged in the direction of the light path emitted by the front cavity surface straight lens.
In the scheme, the front cavity surface straight lens and the rear cavity surface straight lens are fixed on the copper plate of the optical lifting platform.
In the scheme, the back cavity surface side of the inter-band cascade laser emits an optical signal, and the optical signal is emitted anticlockwise through the annular light path cavity and then is incident to the inter-band cascade laser (1) again from the front cavity surface side.
In the scheme, the device also comprises a pyroelectric power meter; the method comprises the steps of completing directional coupling of a clockwise emergent propagation optical signal and a counterclockwise emergent propagation optical signal in an interband cascade laser; after directional coupling, only zero-order diffraction light emitted after entering the blazed grating in the clockwise direction can be detected; pyroelectric power meters are used to detect zero-order diffracted light.
The invention provides a preparation method of an annular external cavity interband cascade laser, which comprises the following steps: step S1, providing an inter-band cascade laser, and plating a layer of antireflection film on the front cavity surface side of the inter-band cascade laser; step S2, providing a front cavity surface straight lens and a rear cavity surface straight lens, wherein the front cavity surface side and the rear cavity surface side of the interband cascade laser are respectively provided with the front cavity surface straight lens and the rear cavity surface straight lens; step S3, providing a blazed grating, and arranging the blazed grating on the front cavity surface side of the front cavity surface straight lens; s4, a gold-plated reflecting mirror group comprises a first gold-plated reflecting mirror, a second gold-plated reflecting mirror and a third gold-plated reflecting mirror which are arranged on an emergent light path along the blazed grating; s5, forming an annular light path cavity by the front cavity surface straight lens, the blazed grating, the first gold-plated reflecting mirror, the second gold-plated reflecting mirror, the third gold-plated reflecting mirror and the rear cavity surface straight lens; s6, emitting optical signals from the front cavity surface side of the interband cascade laser, and enabling the optical signals to be emitted clockwise to pass through the annular light path cavity and then to be incident to the interband cascade laser again from the rear cavity surface side; step S7, directional coupling between the optical signals transmitted by clockwise emergent transmission and the optical signals transmitted by anticlockwise emergent transmission is generated in the interband cascade laser; after directional coupling, only the zero-order diffraction light emitted after entering the blazed grating in the clockwise direction can be detected.
In the above scheme, step S3 includes: the blazed grating is fixed on the grating frame, and the grating frame can rotate through the traveling wave speed reducer.
In the above scheme, step S1 specifically includes: the interband cascade laser is welded on the aluminum nitride heat sink layer reversely and then sintered on the indium heat sink layer; the cavity of the interband cascade laser is the same as the widths of the aluminum nitride heat sink layer and the indium heat sink layer; the indium heat sink layer is provided with screw holes; the inter-band cascade laser after sintering is fixed on an optical lift table.
In the above scheme, step S4 specifically includes: and sequentially adjusting the positions and angles of the first gold-plated reflecting mirror, the second gold-plated reflecting mirror and the third gold-plated reflecting mirror by using the infrared detection card and the diode laser.
(III) beneficial effects
The technical scheme of the embodiment of the invention has at least the following beneficial effects:
(1) By introducing a plurality of reflectors, the cavity length can be increased by a plurality of times compared with the common EC cavity length, which is helpful for prolonging the photon service life and obtaining a narrower external cavity spectrum linewidth;
(2) After being directionally coupled, CW (clockwise) light and CCW (anticlockwise) light enter the ICL through the annular cavity again, so that the light intensity in the laser chip is more, and the ICL is easy to obtain a wider tuning range than a traditional external cavity;
(3) After directional coupling, CW (clockwise) light and CCW (anticlockwise) light enter the ICL through the annular cavity again, and the light intensity fed back into the laser chip is more, so that the emergent power after being diffracted by the blazed grating can be enhanced.
(4) CW (clockwise) and CCW (anticlockwise) light are traveling waves in the annular cavity, so that the Space Hole Burning (SHB) effect related to the standing waves can be remarkably reduced, and the spectral stability is greatly improved.
Drawings
Fig. 1 schematically shows a schematic structure of an annular external cavity interband cascade laser according to an embodiment of the present invention.
Fig. 2 schematically shows a flow chart of a method for manufacturing an annular external cavity interband cascade laser according to an embodiment of the present invention.
Fig. 3 schematically shows a propagation diagram of an optical path emerging through a blazed grating, according to an embodiment of the present invention.
Fig. 4 schematically shows a spectral diagram of an annular external cavity interband cascade laser according to an embodiment of the present invention.
[ description of reference numerals ]
1-an interband cascade laser; 2-an antireflection film; 3-front facet straight lens;
4-rear facet straight lens; 5-blazed gratings; 6-a first gold-plated mirror;
7-a second gold-plated mirror; 8-a third gold-plated mirror; 9-pyroelectric power meter.
Detailed Description
The present invention will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
Referring specifically to fig. 1, fig. 1 schematically illustrates a schematic structure of an annular external cavity interband cascade laser according to an embodiment of the present invention.
As shown in fig. 1, an embodiment of the present invention provides a ring-shaped external cavity interband cascade laser, including: an interband cascade laser 1; plating a layer of antireflection film 2 on the front cavity surface side of the interband cascade laser 1; the front cavity surface side and the back cavity surface side of the interband cascade laser 1 are respectively provided with a front cavity surface straight lens 3 and a back cavity surface straight lens 4; a blazed grating 5 provided on the front surface side of the front surface straight lens 3; the gold-plated reflecting mirror group comprises a first gold-plated reflecting mirror 6, a second gold-plated reflecting mirror 7 and a third gold-plated reflecting mirror 8 which are arranged along the emergent light path of the blazed grating 5; wherein the front cavity surface straight lens 3, the blazed grating 5, the first gold-plated reflecting mirror 6, the second gold-plated reflecting mirror 7, the third gold-plated reflecting mirror 8 and the rear cavity surface straight lens 4 form an annular light path cavity; the front cavity surface side of the interband cascade laser 1 emits an optical signal, and the optical signal is emitted clockwise through the annular optical path cavity and then is incident on the interband cascade laser 1 again from the rear cavity surface side.
The cavity of the interband cascade laser 1 is of a Fabry-Perot structure and can continuously work at room temperature; non-reciprocal losses can be formed in both CW (clockwise) and CCW (counter-clockwise), boosting output power and suppressing F-P (fabry-perot) modes in ICL.
For example, the front facet coating material for ICL with a center wavelength of 3.3 microns was Al2O3/Ge (300/30 nm).
In the present embodiment, the front facet straight lens 3 and the rear facet straight lens 4 are fixed on the copper plate of the optical lift table.
The front cavity surface collimating lens 3 is located on the outer side of the front cavity surface of the ICL, the rear cavity surface collimating lens 4 is located on the outer side of the rear cavity surface of the ICL, and the front cavity surface collimating lens is fixed on a lifting platform copper plate for placing the ICL through ultraviolet glue. Both collimating lenses are high numerical aperture (na=0.85) and collimate divergent light from the front and back facets of ICL into parallel beams.
In this embodiment, the blazed grating 5 is fixed on a grating frame, and the grating frame is arranged in the direction of the light path emitted by the front cavity surface straight lens 3.
The grating frame can rotate through the traveling wave speed reducer to provide wavelength-selective optical feedback. The laser chip is mounted in such a manner that the epitaxial direction is perpendicular to the groove direction of the blazed grating.
For example, a blazed grating design wavelength may be 3.5 μm, a grating ruling 300g/mm, and an anti-reflection coating, with a grating diffraction efficiency of > 80% across the ruling.
In the present embodiment, the back facet side of the interband cascade laser 1 emits an optical signal, which is emitted counterclockwise through the annular optical path cavity and then is incident again on the interband cascade laser 1 from the front facet side.
In the embodiment, the light signal transmitted by clockwise emergent and the light signal transmitted by anticlockwise emergent are completed, and directional coupling is carried out on the interband cascade laser 1; after directional coupling, only zero-order diffraction light emitted after entering the blazed grating 5 in the clockwise direction can be detected; the pyroelectric power meter 9 is used to detect zero-order diffracted light.
In summary, in the annular external cavity interband cascade laser, the blazed grating and the three gold-plated reflectors are used for enabling light emitted from the front cavity surface of the F-P interband cascade laser with the front cavity surface being plated with the antireflection film to vertically enter the rear cavity surface after the light path is adjusted. The traveling wave light in both the clockwise direction and the counterclockwise direction emitted from the front cavity surface and the rear cavity surface is formed. Because the front cavity surface plating antireflection film introduces nonreciprocal loss in the two directions, directional coupling in the clockwise direction can be formed. And the directionally coupled light is subjected to blazed grating to obtain output light in the zero-order reflected light direction. According to the scheme, the multiple reflectors are introduced, so that the cavity length can be increased by a plurality of times compared with the common EC cavity length, the service life of photons can be prolonged, and the narrower external cavity spectrum linewidth can be obtained; and the optical fiber is a traveling wave, so that the space hole burning related to the standing wave can be obviously reduced, and the spectral stability is improved. In addition, after directional coupling, the clockwise and anticlockwise light enters the ICL through the annular cavity again, so that the light intensity in the laser chip is more, and therefore, a wider tuning range and higher emergent power are easy to obtain compared with the external cavity structure of the traditional zero-order diffraction light output.
Fig. 2 schematically shows a flow chart of a method for manufacturing an annular external cavity interband cascade laser according to an embodiment of the present invention.
Referring to fig. 2 specifically, a specific process of the method for preparing an annular external cavity interband cascade laser according to an embodiment of the present invention includes steps S1 to S7.
In operation S1, providing an interband cascade laser 1, and plating an antireflection film 2 on a front cavity surface side of the interband cascade laser 1;
in operation S2, a front facet straight lens 3 and a rear facet straight lens 4 are provided, the front facet straight lens 3 and the rear facet straight lens 4 being provided on the front facet side and the rear facet side of the interband cascade laser 1, respectively;
in operation S3, a blazed grating 5 is provided, which is provided on the front surface side of the front surface straight lens 3;
in operation S4, a gold-plated mirror group including a first gold-plated mirror 6, a second gold-plated mirror 7, and a third gold-plated mirror 8 disposed on an outgoing optical path along the blazed grating 5;
in operation S5, the front facet straight lens 3, the blazed grating 5, the first gold-plated mirror 6, the second gold-plated mirror 7, the third gold-plated mirror 8, and the rear facet straight lens 4 form an annular optical path cavity;
in operation S6, the front facet side of the interband cascade laser 1 emits an optical signal, and the optical signal is emitted clockwise through the annular optical path cavity and then is incident again to the interband cascade laser 1 from the rear facet side;
in operation S7, the optical signal propagating clockwise outgoing and the optical signal propagating counterclockwise outgoing are coupled in a directional manner in the interband cascade laser 1; after directional coupling, only the zero-order diffraction light emitted after entering the blazed grating 5 in the clockwise direction is detected.
Specifically, the interband cascade laser 1 is reversely welded on an aluminum nitride heat sink layer and then sintered on an indium heat sink layer; the width of the cavity of the interband cascade laser 1 is the same as that of the aluminum nitride heat sink layer and the indium heat sink layer; the indium heat sink layer is provided with screw holes; the inter-band cascade laser 1 completed with sintering is fixed on an optical lift table.
After the optical device is placed, the positions and angles of the first gold-plated reflecting mirror 6, the second gold-plated reflecting mirror 7 and the third gold-plated reflecting mirror 8 are sequentially adjusted by using an infrared detection card and a diode laser, and the optical paths are carefully aligned. The two counter-propagating modes clockwise and counterclockwise form a closed loop in the annular outer cavity. The length of the whole ring resonant cavity is more than 1 meter.
Fig. 3 schematically shows a propagation diagram of an optical path emerging through a blazed grating, according to an embodiment of the present invention.
In this example, the operating state of the ring-shaped external cavity interband cascade laser may be, for example: ICL of the annular external cavity interband cascade laser is arranged on a temperature controller (TEC), and the working temperature of the ICL is controlled to be fixed near room temperature through a three-stage water cooling device.
In this embodiment, the ring-shaped external cavity interband cascade laser achieves the directional propagation in the CW (clockwise) direction under the adjustment of the injection current after the optical signal is directionally coupled.
Referring to fig. 3, after directional propagation is generated, only the zero-order diffracted light emitted from the blazed grating in the CW (clockwise) direction is detected, and the zero-order diffracted light is used as the output light of the entire ring-shaped external cavity interband cascade laser and is detected by the pyroelectric power meter 9.
Wherein, the zero-order diffraction light emitted after the anti-clockwise incidence blazed grating cannot be detected.
The optical signal transmitted in the annular light path cavity is 1-order diffraction light, and the optical signal emitted by the interband cascade laser sequentially passes through the annular light path cavity in a clockwise (anticlockwise) manner and then is incident to the interband cascade laser again.
Fig. 4 schematically shows a spectral diagram of an annular external cavity interband cascade laser according to an embodiment of the present invention.
Referring specifically to fig. 4, in this embodiment, for example, using the same ICL at room temperature, both in continuous wave operation, a tuning range of the conventional Littrow external cavity is 80cm for the laser wavelength -1 The tuning range of the annular outer cavity exceeds 150cm -1 Proved by the acquisition of the annular outer cavityA larger spectral tuning range than the conventional Littrow external cavity is obtained, approximately 2 times the tuning range of the Littrow external cavity.
The annular external cavity interband cascade laser in the embodiment forms a closed annular light path through the diffraction grating and the reflecting mirror, and light emitted by the front cavity surface and the rear cavity surface of the ICL respectively form two propagation directions of CW (clockwise) and CCW (anticlockwise) in the annular cavity. Due to the fact that the different reflectivities of the front cavity surface and the back cavity surface are adopted, nonreciprocal loss is caused, the difference of optical power in two directions is caused, the ICL is induced to form an oriented state in the CW (clockwise) direction with lower loss and stronger power under certain conditions, the zero-order diffraction light which is incident into the blazed grating through the front cavity surface in the CW (clockwise) direction is used as output light, and the output power of a Littrow external cavity structure which is output by the zero-order diffraction light is improved. Meanwhile, due to the arrangement of the annular outer cavity, the threshold value is effectively reduced due to the increase of the cavity length, and more light intensity is fed back into the laser, so that the same ICL can obtain a spectrum range in a larger range than that of a traditional outer cavity.
It will be understood by those skilled in the art that while the present invention has been shown and described with reference to particular exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents. The scope of the invention should, therefore, be determined not with reference to the above-described embodiments, but instead should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be construed as reflecting the intention that: i.e., the claimed invention requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no limitations are intended to the scope of the invention, except insofar as modifications, equivalents, improvements or modifications are within the spirit and principles of the invention.
Claims (10)
1. An annular external cavity interband cascade laser comprising:
an interband cascade laser (1);
plating a layer of antireflection film (2) on the front cavity surface side of the interband cascade laser (1);
the front cavity surface side and the rear cavity surface side of the interband cascade laser (1) are respectively provided with a front cavity surface straight lens (3) and a rear cavity surface straight lens (4);
a blazed grating (5) provided on the front surface side of the front surface straight lens (3);
the gilded reflector group comprises a first gilded reflector (6), a second gilded reflector (7) and a third gilded reflector (8) which are arranged along the emergent light path of the blazed grating (5);
the front cavity surface straight lens (3), the blazed grating (5), the first gold-plated reflecting mirror (6), the second gold-plated reflecting mirror (7), the third gold-plated reflecting mirror (8) and the rear cavity surface straight lens (4) form an annular light path cavity;
the front cavity surface side of the interband cascade laser (1) emits an optical signal, and the optical signal is incident to the interband cascade laser (1) again from the rear cavity surface side after passing through the annular light path cavity in a clockwise direction.
2. The ring-shaped external cavity interband cascade laser according to claim 1, characterized in that the cavity of the interband cascade laser (1) is of fabry-perot structure and continuously operable at room temperature.
3. The annular external cavity interband cascade laser according to claim 1, characterized in that the blazed grating (5) is fixed on a grating frame arranged in the direction of the light path emitted by the front facet straight lens (3).
4. An annular external cavity interband cascade laser according to claim 3, characterized in that the front facet straight lens (3) and the back facet straight lens (4) are fixed on a copper plate of an optical lift stage.
5. The ring-shaped external cavity interband cascade laser according to claim 1, characterized in that the back facet side of the interband cascade laser (1) emits an optical signal, which after counter-clockwise emission through the ring-shaped optical path cavity is re-incident to the interband cascade laser (1) from the front facet side.
6. The ring-shaped external cavity interband cascade laser according to claim 5, characterized by further comprising a pyroelectric power meter (9);
wherein the light signal which completes the clockwise outgoing propagation and the light signal which completes the anticlockwise outgoing propagation are directionally coupled in the interband cascade laser (1);
after the directional coupling, only zero-order diffraction light which is incident in the clockwise direction and exits after passing through the blazed grating (5) can be detected;
the pyroelectric power meter (9) is used for detecting the zero-order diffracted light.
7. A method of manufacturing a ring-shaped external cavity interband cascade laser as claimed in any of claims 1-6, comprising:
step S1, providing an inter-band cascade laser (1), and plating a layer of antireflection film (2) on the front cavity surface side of the inter-band cascade laser (1);
step S2, providing a front cavity surface straight lens (3) and a rear cavity surface straight lens (4), wherein the front cavity surface side and the rear cavity surface side of the interband cascade laser (1) are respectively provided with the front cavity surface straight lens (3) and the rear cavity surface straight lens (4);
step S3, providing a blazed grating (5) arranged on the front cavity surface side of the front cavity surface straight lens (3);
s4, a gold-plated reflecting mirror group, which comprises a first gold-plated reflecting mirror (6), a second gold-plated reflecting mirror (7) and a third gold-plated reflecting mirror (8) which are arranged on an emergent light path along the blazed grating (5);
s5, forming an annular light path cavity by the front cavity surface straight lens (3), the blazed grating (5), the first gold-plated reflecting mirror (6), the second gold-plated reflecting mirror (7), the third gold-plated reflecting mirror (8) and the rear cavity surface straight lens (4);
s6, emitting an optical signal from the front cavity surface side of the interband cascade laser (1), and enabling the optical signal to be emitted clockwise to pass through the annular light path cavity and then to be incident to the interband cascade laser (1) again from the rear cavity surface side;
step S7, the directional coupling of the optical signal transmitted by the clockwise emergent transmission and the optical signal transmitted by the anticlockwise emergent transmission is generated in the interband cascade laser (1); after the directional coupling, only zero-order diffraction light which is incident in the clockwise direction and exits after passing through the blazed grating (5) can be detected.
8. The method according to claim 7, wherein the step S3 comprises: the blazed grating (5) is fixed on a grating frame, and the grating frame can rotate through a traveling wave speed reducer.
9. The preparation method according to claim 7, wherein the step S1 specifically includes:
the interband cascade laser (1) is welded on an aluminum nitride heat sink layer in a reverse mode and then sintered on an indium heat sink layer;
the cavity of the interband cascade laser (1) is the same as the widths of the aluminum nitride heat sink layer and the indium heat sink layer; the indium heat sink layer is provided with screw holes;
the inter-band cascade laser (1) completed with the sintering is fixed on an optical lifting table.
10. The preparation method according to claim 7, wherein step S4 specifically comprises: and sequentially adjusting the positions and angles of the first gold-plated reflecting mirror (6), the second gold-plated reflecting mirror (7) and the third gold-plated reflecting mirror (8) by using an infrared detection card and a diode laser.
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| CN202310920335.4A CN116885562A (en) | 2023-07-25 | 2023-07-25 | Annular external cavity interband cascade laser and preparation method thereof |
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