CN116884894B - Wafer production loading equipment - Google Patents
Wafer production loading equipment Download PDFInfo
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- CN116884894B CN116884894B CN202311149896.5A CN202311149896A CN116884894B CN 116884894 B CN116884894 B CN 116884894B CN 202311149896 A CN202311149896 A CN 202311149896A CN 116884894 B CN116884894 B CN 116884894B
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- loading box
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- sealing cover
- sealing
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 238000007789 sealing Methods 0.000 claims abstract description 138
- 230000033001 locomotion Effects 0.000 claims abstract description 12
- 238000001125 extrusion Methods 0.000 claims description 45
- 238000003780 insertion Methods 0.000 claims description 12
- 230000037431 insertion Effects 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims 5
- 238000010168 coupling process Methods 0.000 claims 5
- 238000005859 coupling reaction Methods 0.000 claims 5
- 230000007306 turnover Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 27
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000012466 permeate Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67376—Closed carriers characterised by sealing arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Buffer Packaging (AREA)
Abstract
The invention relates to the field of semiconductors, in particular to wafer production and loading equipment, which comprises a loading box and a sealing cover, wherein fixing holes are formed in the corners of two sides of a port of the loading box; handles are symmetrically arranged on the outer surface of the sealing cover, and a negative pressure pipe is fixedly connected on the sealing cover; this load case and sealed cooperation of lid for sealed lid and load the opening and shutting action of case and go on with gentle state, in the fixed orifices was inserted to the rubber buffer, rubber buffer self had elasticity, can freely stretch out and draw back the deformation, can insert in a flexible way and establish to the fixed orifices, the wearing and tearing that produce when reducing relative movement between the spare part, just also reduce wearing and tearing piece and fly upward the possibility on the brilliant disc, when opening sealed lid simultaneously, at first open the gas valve of negative pressure pipe, let load the incasement with external atmospheric pressure balance, afterwards can take off sealed lid, its action is also comparatively gentle, reduces the impact to this loading equipment, thereby realize the protection to the brilliant disc.
Description
Technical Field
The invention relates to the field of semiconductors, in particular to wafer production and loading equipment.
Background
Wafer refers to a silicon wafer used for manufacturing silicon semiconductor circuits, the original material of which is silicon. The high-purity polycrystalline silicon is dissolved and then doped with silicon crystal seed, and then slowly pulled out to form cylindrical monocrystalline silicon. After grinding, polishing and slicing, the silicon crystal bar forms a silicon wafer, namely a wafer, and the production and processing links are extremely strict, and the wafer loading box is transported and transferred at different positions of a production line; after the wafer loading box reaches the designated position, the sealing door of the wafer loading box is opened, and the wafer is taken out through a mechanical arm or other equipment, so that the loading of the wafer is realized.
The wafer is fragile in texture and is easily damaged by external impact force, and meanwhile, the surface of the wafer is not allowed to have any dirt; the existing wafer loading box has the problem that the impact force is large on the relevant driving mechanism for opening and closing the sealing door, firstly, the wafer body is possibly damaged due to the impact force, secondly, parts between the sealing door and the transfer box are worn, and generated fragments float to the surface of the wafer to pollute the wafer.
Therefore, a wafer production loading apparatus is proposed for the above-mentioned problems.
Disclosure of Invention
Therefore, the invention aims to solve the technical problem that the sealing door and the loading box generate destructive impact force when being matched in use in the prior art.
In order to solve the technical problems, the invention provides wafer production and loading equipment, which is characterized in that: the crystal disc loading device comprises a loading box and a sealing cover, wherein a plurality of layers of supporting blocks are arranged in the loading box up and down, and the crystal disc is placed on the supporting blocks; the periphery of the port of the loading box is provided with a sealing groove, and the corners of the two sides of the port of the loading box are provided with fixing holes; the inner surface of the sealing cover is provided with a sealing strip matched with the sealing groove, and the inner surface of the sealing cover is provided with a rubber plug matched with the position of the fixing hole;
the external surface of the sealing cover is symmetrically provided with handles, the sealing cover is fixedly connected with a negative pressure pipe, the negative pressure pipe is communicated with a negative pressure hole formed in the internal surface of the sealing cover, the end part of the negative pressure pipe extends out of the sealing cover and is communicated with an external negative pressure pump, and the external end of the negative pressure pipe is provided with a gas valve for controlling the flow of gas;
this load case and sealed cooperation of lid for sealed lid and load the opening and shutting action of case and go on with gentle state, the rubber buffer inserts and establishes to the fixed orifices in, rubber buffer self has elasticity, can freely stretch out and draw back the deformation, can insert in a flexible way and establish to the fixed orifices, the wearing and tearing that produce when reducing relative movement between the spare part, just also reduce the possibility that wearing and tearing piece flies upward on the brilliant disc, when opening sealed lid simultaneously, at first open the gas valve of negative pressure pipe, let load the incasement and outside be in same pneumatic pressure, afterwards can take off sealed lid, its action is also comparatively gentle, reduce the impact to this loading equipment, thereby realize the protection to the brilliant disc.
In one embodiment of the invention, the rubber plug is of a hollow structure, and a supporting unit is arranged in the rubber plug; the supporting unit comprises a fixed plate and a screw rod; one end of the screw rod is rotationally connected with the fixed plate, the fixed plate is fixedly connected to the top of the inner wall of the rubber plug, a plurality of first rods are rotationally connected to the outer periphery of the fixed plate, the end part of each first rod is rotationally connected with the push rod, the push rod is used for extruding the rubber plug on the inner side wall of the fixed hole, the end part of each push rod is rotationally connected with a second rod, the end part of each second rod is clustered and connected with the movable plate, the edge of the movable plate is rotationally connected with the end part of the second rod, the screw rod is connected with the movable plate in a transmission manner, the movable plate can do linear motion along the axis of the screw rod, the other end of the screw rod extends towards the inside of the sealing cover, a motor is arranged inside the sealing cover, and the output end of the motor is fixedly connected with the other end of the screw rod; the rubber plug is inserted in the fixing hole in advance, the sealing cover is hung at the port position of the loading box in advance, then the negative pressure pipe is conveniently connected with the external air pipe, the rubber plug has elasticity and can deform, the sealing cover is hung at the port position of the loading box through the rubber plug, the sealing performance between the sealing cover and the loading box can be unstable, and when the gas in the loading box is extracted, the external gas can permeate into the loading box along a gap between the sealing cover and the loading box; for this reason set up the supporting element, after the rubber buffer is gone into the fixed orifices, driving motor, motor drive lead screw rotates, lead screw transmission fly leaf, make the fly leaf remove to the fixed plate direction, the fly leaf promotes No. two poles simultaneously, the contained angle between No. one pole and No. two poles diminishes gradually this moment, no. one pole and No. two pole extrusion push rods, make the push rod extrude to rubber buffer inside wall direction, make on the rubber buffer extrusion fixed orifices inside wall, the rubber buffer can be stably embedded at the fixed orifices this moment, the intensity of supporting element self simultaneously, not only extrude the fixed orifices with the rubber buffer in, supporting element self also plays the effect of supporting sealed lid simultaneously, after making sealed lid and loading box merge, sealed lid is stabilized on loading box's port in advance, guarantee later stage when taking out loading box internal gas, can be smoothly take out the loading box into the negative pressure state.
In one embodiment of the invention, the securing holes include an outer hole adjacent to the port of the loading bin and an inner hole inside the outer hole, the inner hole having a hole diameter greater than the outer hole diameter; the rubber stopper is embedded into the fixing hole, so that the end part of the rubber stopper is arranged at the position of the inner hole, the motor is driven, the push rod extrudes the rubber stopper to the position of the inner hole, the protruding part of the rubber stopper is arranged at the position of the inner hole, the rubber stopper is further restrained in the fixing hole, and the sealing cover is stably matched with the loading box.
In one embodiment of the invention, a rotary groove is formed in the middle position of the push rod, a connecting rod is rotationally connected to the rotary groove, one end of the connecting rod is rotationally connected to the push rod through a torsion spring, an arc-shaped extrusion plate is fixedly connected to the other end of the connecting rod, the extrusion plate covers the rotationally connected positions of the push rod, the first rod and the second rod, and the extrusion plate is used for extruding the rubber plug on the side wall of the inner hole; the extrusion plate is arranged to replace the push rod to extrude the inner side wall of the rubber plug, and the first rod and the second rod are respectively connected with the two ends of the push rod in a rotating way, so that the pressure on the surface of the rubber plug is high, the inner wall of the rubber plug can be extruded and broken, the contact surface of the arc-shaped extrusion plate and the rubber plug is high, the pressure on the surface of the rubber plug is low, and the possibility of extrusion and breaking of the rubber plug can be reduced; during specific work, the push rod extrudes the extrusion plate on the inner wall of the rubber plug, the arc plate is rotationally connected in the rotary groove through the connecting rod, and the arc plate can freely and flexibly swing, so that the arc plate can be suitable for deformation and swing of the rubber plug, the surface of the extrusion plate is extruded on the rubber plug as much as possible, and the rubber plug is protected from being extruded, damaged and broken.
In one embodiment of the invention, the rubber stopper is provided with the annular bulge, the bulge is arranged close to the end part of the rubber stopper, the bulge is internally provided with an annular hole, and the annular hole is internally provided with an annular tension spring; the rubber plug is provided with a bulge, the extruded part of the rubber plug and the arc plate is thickened, the purpose of the rubber plug is to further protect the extruded part of the rubber plug by the arc plate, meanwhile, an annular hole is formed in the bulge, an annular tension spring is arranged in the annular hole, the tension spring has the function of enabling the supported rubber plug to quickly recover the original shape, and when the sealing cover is separated from the loading box, the rubber plug can smoothly slide out along the fixing hole instead of being clamped at the junction of the inner hole and the outer hole.
In one embodiment of the invention, the inner surface of the rubber plug is provided with a ring-shaped convex part, and the convex part is arranged on the inner side of the convex part; the outer surface of the extrusion plate is provided with two limiting plates, a limiting groove is formed by surrounding the two limiting plates and the extrusion plate, and the convex part is embedded in the limiting groove; set up the cooperation of limiting plate and convex part, restraint the relative movement between stripper plate and the rubber buffer for the stripper plate extrudees at the rubber buffer at every turn, can effectively extrude the position that is thicker in the arch, makes the rubber buffer can stabilize in the extrusion inside hole position, improves the fastness between rubber buffer and the fixed orifices.
In one embodiment of the invention, the lower surface of the loading box is close to the position locating pin of the corner; the upper surface of the loading box is provided with a jack near the corner of the loading box, the positioning pin can be inserted into the jack, the bottom in the jack is provided with a spring groove, the spring groove is communicated with the inside of the loading box, and a plugging unit is arranged in the spring groove; the plugging unit comprises a pressure spring and a sealing plate; the lower end of the pressure spring is fixedly connected to the inner bottom surface of the spring groove, the upper end of the pressure spring is fixedly connected with a sealing plate, the outer diameter of the sealing plate is smaller than the inner diameter of the spring groove, and the sealing plate is positioned at the top of the inner wall of the spring groove and is used for blocking the communication between the insertion hole and the spring groove; when the loading boxes are stacked up and down, the locating pins on the upper loading boxes are inserted into the jacks formed in the lower loading boxes, so that the stacked loading boxes are in a stable state, the loading boxes are in a negative pressure state, after the locating pins are inserted into the jacks, the lower ends of the locating pins press down the sealing plates, the sealing plates press down the pressure springs, the spring grooves are forced to be communicated with the jacks, at the moment, the negative pressure in the loading boxes promotes the locating pins to be adsorbed in the jacks, and the locating pins are adsorbed in the jacks, so that the stability of the upper and lower stacked loading boxes can be further improved.
In one embodiment of the invention, the positioning pin comprises a fixed pin fixedly connected to the lower surface of the loading box and a movable pin connected with the fixed pin; the lower end face of the fixed pin is provided with a sliding hole, the upper end of the movable pin can be connected in the sliding hole in a vertical sliding way, the outer side of the relative position of the movable pin and the fixed pin is provided with a ring-shaped rubber ring, and the middle position of the outer surface of the rubber ring protrudes outwards; the middle outer side of the jack is provided with a ring-shaped sealing opening, and the rubber ring can be embedded in the sealing opening in a sealing way; after the locating pin inserts in the jack, the lower extreme of movable pin pushes down closely the shrouding, in the upper end shrink sliding hole of movable pin simultaneously, be close to each other between movable pin and the fixed pin, and extrude the rubber circle, force the rubber circle outer lane intermediate position outwards to protruding, and extrude in the sealing port, the cooperation of rubber circle crowded and sealing port this moment can seal the gap between locating pin and the jack, reduces the possibility that outside air permeated to the loading incasement from the jack, guarantees to be in stable negative pressure environment in the loading incasement.
In one embodiment of the invention, a limiting ring is arranged below the sealing plate, and the outer ring of the limiting ring is fixedly connected on the inner side wall of the spring groove; through setting up the spacing ring, the stroke volume of restriction closing plate downshifting also is restrained the formation volume of movable pin downshifting, guarantees that the upper end of movable pin can effectively extend to in the slide hole to the rubber circle outer lane intermediate position is protruding state.
In one embodiment of the invention, a touch switch is arranged on the inner wall of the handle up and down, and the touch switch can control the motor to rotate forward and backward; the handle is grasped by both hands, the sealing cover is close to the port position of the loading box, after the rubber plug is embedded into the fixing hole, the fingers move to the position of the inner side wall of the upper part of the handle, the touch switch at the position is pressed, the motor is controlled to rotate positively, the extruding plate extrudes the rubber plug at the position of the inner hole, and then the loading box is vacuumized; when the sealing cover is required to be opened and removed, a finger moves to the inner side wall of the lower part of the handle, a touch switch at the position is pressed, the motor is controlled to rotate reversely, so that the screw rod of the extrusion plate moves in the direction, the extrusion plate does not extrude the rubber plug any more, the rubber plug is in an initial state under the tension of the tension spring, then a gas valve on the negative pressure pipe is opened, gas reacts into the loading box, and then the rubber plug is taken out from the fixing hole; the touch switch is arranged, so that the combination and opening of the sealing cover and the loading box can be flexibly controlled, and the operation of the wafer production loading equipment is convenient.
Compared with the prior art, the technical scheme of the invention has the following advantages:
1. this load case and sealed cooperation of lid for sealed lid and load the opening and shutting action of case and go on with gentle state, the rubber buffer inserts and establishes to the fixed orifices in, rubber buffer self has elasticity, can freely stretch out and draw back the deformation, can insert in a flexible way and establish to the fixed orifices, the wearing and tearing that produce when reducing relative movement between the spare part, just also reduce the possibility that wearing and tearing piece flies upward on the brilliant disc, when opening sealed lid simultaneously, at first open the gas valve of negative pressure pipe, let load the incasement and outside be in same pneumatic pressure, afterwards can take off sealed lid, its action is also comparatively gentle, reduce the impact to this loading equipment, thereby realize the protection to the brilliant disc.
2. According to the invention, through the strength of the supporting unit, the rubber plug is extruded into the fixing hole, and the supporting unit plays a role in supporting the sealing cover, so that after the sealing cover is combined with the loading box, the sealing cover is stabilized on the port of the loading box in advance, and the negative pressure state of the loading box can be smoothly pumped when the gas in the loading box is pumped out in the later stage.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings.
FIG. 1 is a perspective view of a wafer production and loading apparatus of the present invention;
FIG. 2 is a perspective view of a seal cap according to the present invention;
FIG. 3 is a perspective view of the loading compartment of the present invention;
fig. 4 is a perspective view of a supporting unit in the present invention;
fig. 5 is a cross-sectional view of a support unit in the present invention;
FIG. 6 is a perspective view showing the fit of the rubber stopper and the pressing plate in the present invention;
FIG. 7 is a perspective view of a squeeze plate according to the present invention;
FIG. 8 is a perspective view of the alignment pin and receptacle of the present invention;
FIG. 9 is a perspective view showing the cooperation of the sealing plate and the compression spring in the present invention;
FIG. 10 is a cross-sectional view of the alignment pin and receptacle of the present invention;
FIG. 11 is a perspective view of a fixing pin according to the present invention;
FIG. 12 is a diagram showing the engagement of the locating pin with the receptacle in the present invention;
fig. 13 is a perspective view showing the cooperation of the handle and the trigger switch in the present invention.
In the figure: 1. a loading box; 2. sealing cover; 3. sealing grooves; 4. a fixing hole; 5. a sealing strip; 6. a rubber stopper; 7. a handle; 8. a negative pressure pipe; 9. a negative pressure hole; 10. a fixing plate; 12. a screw rod; 13. a first rod; 14. a push rod; 15. a second rod; 16. a movable plate; 17. a motor; 18. an outer aperture; 19. an inner hole; 20. a rotary groove; 21. a connecting rod; 22. an extrusion plate; 23. a protrusion; 24. an annular hole; 25. a tension spring; 26. a convex portion; 27. a limiting plate; 28. a limit groove; 30. a positioning pin; 31. a jack; 32. a spring groove; 33. a pressure spring; 34. a sealing plate; 35. a fixing pin; 36. a movable pin; 37. a slide hole; 38. sealing the mouth; 39. a limiting ring; 40. the trigger switch.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Example 1
Referring to fig. 1, 2, 3 and 4, a wafer production and loading device comprises a loading box 1 and a sealing cover 2, wherein a plurality of layers of supporting blocks are arranged in the loading box 1 up and down, and wafer disks are placed on the supporting blocks; the periphery of the port of the loading box 1 is provided with a sealing groove 3, and both sides of the port of the loading box 1 are provided with fixing holes 4; the inner surface of the sealing cover 2 is provided with a sealing strip 5 matched with the sealing groove 3, and the inner surface of the sealing cover 2 is provided with a rubber plug 6 matched with the position of the fixing hole 4;
the external surface of the sealing cover 2 is symmetrically provided with handles 7, the sealing cover 2 is fixedly connected with a negative pressure pipe 8, the negative pressure pipe 8 is communicated with a negative pressure hole 9 formed in the sealing cover 2, the end part of the negative pressure pipe 8 extends out of the sealing cover 2 and is communicated with an external negative pressure pump, and the external end of the negative pressure pipe 8 is provided with a gas valve for controlling the flow of gas;
the embodiment of the invention provides wafer production loading equipment, in particular use, wafers are placed into a loading box 1 one by one and are sequentially erected on a supporting block, then a sealing cover 2 is close to a port of the loading box 1, the end part of a rubber plug 6 is aligned with a fixing hole 4 in advance, then the sealing cover 2 is attached to the end surface of the loading box 1, at the moment, the rubber plug 6 stretches into the fixing hole 4, a sealing strip 5 is embedded into a sealing groove 3, then whether the edge of the sealing cover 2 is flush with the edge of the port of the loading box 1 is observed, if not flush, fine adjustment is carried out, the sealing cover 2 is slightly floated until the edge is flush, then one end of an external air pipe is communicated with an external negative pressure pump, the other end of the external air pipe is communicated with an air valve, the air valve of the negative pressure pipe 8 is opened, the negative pressure pump pumps air in the loading box 1 through the external air pipe, so that a negative pressure state is formed in the loading box 1, at the moment, the sealing cover 2 is firmly attached to the port of the loading box 1, and then the external air valve is closed, and the external air valve is removed;
the cooperation of this loading box 1 and sealed lid 2 for sealed lid 2 and loading box 1's action of opening and shutting is gone on with gentle state, and rubber buffer 6 inserts to fixed orifices 4 in, and rubber buffer 6 self has elasticity, can freely stretch out and draw back the deformation, can insert in a flexible way and establish to fixed orifices 4, reduces the wearing and tearing that produce when moving relatively between the spare part, just also reduces wearing and tearing piece and flies to the possibility on the brilliant disc, when opening sealed lid 2 at first, opens the gas valve of negative pressure pipe 8, lets loading box 1 in with external atmospheric pressure balance, afterwards can take off sealed lid 2, and its action is also comparatively gentle, reduces the impact to this loading equipment, thereby realizes the protection to the brilliant disc.
Referring to fig. 4, 5 and 6, the rubber stopper 6 has a hollow structure, and a supporting unit is arranged in the rubber stopper 6; the support unit comprises a fixed plate 10 and a screw rod 12; one end of the screw rod 12 is rotationally connected with the fixed plate 10, the fixed plate 10 is fixedly connected to the top of the inner wall of the rubber plug 6, a plurality of first rods 13 are rotationally connected to the outer periphery of the fixed plate 10, the end part of each first rod 13 is rotationally connected with a push rod 14, the push rod 14 is used for extruding the rubber plug 6 on the inner side wall of the fixed hole 4, the end part of each push rod 14 is rotationally connected with a second rod 15, the end part of each second rod 15 is in bunched connection with a movable plate 16, the edge of the movable plate 16 is rotationally connected with the end part of the second rod 15, the screw rod 12 is in transmission connection with the movable plate 16, the movable plate 16 can do linear motion along the axis of the screw rod 12, the other end of the screw rod 12 extends towards the inside of the sealing cover 2, a motor 17 is arranged inside the sealing cover 2, and the output end of the motor 17 is fixedly connected with the other end of the screw rod 12; the rubber plug 6 is inserted in the fixing hole 4 in advance, the sealing cover 2 is hung at the port position of the loading box 1 in advance, then the negative pressure pipe 8 is conveniently connected with an external air pipe, the rubber plug 6 has elasticity and can deform, the gravity of the sealing cover 2 presses down the rubber plug 6, the rubber plug 6 is extruded and deformed at the outer edge position of the fixing hole 4, meanwhile, the sealing cover 2 can deflect downwards, the sealing cover 2 is hung at the port position of the loading box 1 through the rubber plug 6, the sealing performance between the sealing cover 2 and the loading box 1 can be unstable, and when the gas in the loading box 1 is extracted, the external gas can permeate into the loading box 1 along a gap between the sealing cover 2 and the loading box 1; for this reason, the supporting unit is provided, after the rubber stopper 6 is plugged into the fixed hole 4, the motor 17 drives the screw rod 12 to rotate, the screw rod 12 drives the movable plate 16, the movable plate 16 moves towards the direction of the fixed plate 10, meanwhile, the movable plate 16 pushes the second rod 15, at this time, the included angle between the first rod 13 and the second rod 15 is gradually reduced, the first rod 13 and the second rod 15 extrude the push rod 14, the push rod 14 extrudes towards the direction of the inner side wall of the rubber stopper 6, the rubber stopper 6 extrudes onto the inner side wall of the fixed hole 4, at this time, the rubber stopper 6 can be stably embedded into the fixed hole 4, meanwhile, the strength of the supporting unit not only extrudes the rubber stopper 6 into the fixed hole 4, meanwhile, the supporting unit also plays a role of supporting the sealing cover 2, so that the sealing cover 2 is pre-stabilized on the port of the loading box 1 after the sealing cover 2 is combined with the loading box 1, and the negative pressure state of the loading box 1 can be smoothly pumped in the loading box 1 in the later stage when the gas is pumped out.
Referring to fig. 4, 5 and 6, the fixing hole 4 includes an outer hole 18 and an inner hole 19, the outer hole 18 is adjacent to the port of the loading box 1, the inner hole 19 is located inside the outer hole 18, and the hole diameter of the inner hole 19 is larger than that of the outer hole 18; the rubber stopper 6 is embedded into the fixing hole 4, so that the end part of the rubber stopper 6 is arranged in the inner hole 19, the motor 17 is driven, the push rod 14 extrudes the rubber stopper 6 to the bottom wall of the inner hole 19, the protruding part of the rubber stopper 6 is arranged on the hole side wall of the inner hole 19, the rubber stopper 6 is further restrained in the fixing hole 4, and the sealing cover 2 is stably matched with the loading box 1.
Referring to fig. 6 and 7, a rotating groove 20 is formed in the middle position of the push rod 14, the rotating groove 20 is rotationally connected with a connecting rod 21, one end of the connecting rod 21 is rotationally connected to the push rod 14 through a torsion spring, the other end of the connecting rod 21 is fixedly connected with an arc-shaped extrusion plate 22, the extrusion plate 22 covers the rotationally connected position of the push rod 14, the first rod 13 and the second rod 15, and the extrusion plate 22 is used for extruding the rubber plug 6 on the side wall of the inner hole 19; by arranging the extrusion plate 22 to replace the extrusion of the push rod 14 to the inner side wall of the rubber plug 6, as the two ends of the push rod 14 are respectively connected with the first rod 13 and the second rod 15 in a rotating way, the two rotating connection points are opposite to the arc-shaped extrusion plate 22, the pressure on the surface of the rubber plug 6 is higher, the inner wall of the rubber plug 6 can be extruded and broken, and the arc-shaped extrusion plate 22 is larger in contact surface with the rubber plug 6, the pressure on the surface of the rubber plug 6 is smaller, and the possibility of extrusion and breaking of the rubber plug 6 can be reduced; during specific operation, the push rod 14 extrudes the extrusion plate 22 on the inner wall of the rubber plug 6, the arc plate is rotationally connected in the rotary groove 20 through the connecting rod 21, and the arc plate can freely and flexibly swing, so that the arc plate can be suitable for deformation of the rubber plug 6 to swing, the surface of the extrusion plate 22 is extruded on the rubber plug 6 as much as possible, and the rubber plug 6 is protected from being extruded, damaged and broken.
Referring to fig. 4, 5 and 6, a ring-shaped protrusion 23 is arranged on the rubber stopper 6, the protrusion 23 is arranged close to the end of the rubber stopper 6, an annular hole 24 is formed in the protrusion 23, and a ring-shaped tension spring 25 is arranged in the annular hole 24; the rubber stopper 6 is provided with the bulge 23, the extruded part of the rubber stopper 6 and the arc plate is thickened, the purpose of the rubber stopper 6 is to further protect the extruded part of the rubber stopper 6 by the arc plate, meanwhile, the bulge 23 is provided with the annular hole 24, the annular hole 24 is internally provided with the annular tension spring 25, the tension spring 25 has the function of enabling the supported large rubber stopper 6 to quickly recover the original shape, and when the sealing cover 2 is separated from the loading box 1, the rubber stopper 6 can smoothly slide out along the fixing hole 4 instead of being clamped at the junction of the inner hole 19 and the outer hole 18.
The inner surface of the rubber plug 6 is provided with a ring-shaped convex part 26, and the convex part 26 is arranged on the inner side of the convex part 23; the outer surface of the extrusion plate 22 is provided with two limiting plates 27, the limiting plates 27 and the extrusion plate 22 enclose a limiting groove 28, and the convex part 26 is embedded in the limiting groove 28; the cooperation of limiting plate 27 and convex part 26 is set up, restrains the relative movement between stripper plate 22 and the rubber buffer 6 for stripper plate 22 at every turn extrudees on rubber buffer 6, can effectively extrude the position that is thick at protruding 23, makes rubber buffer 6 can stabilize in the extrusion inside hole 19 position, improves the fastness between rubber buffer 6 and the fixed orifices 4.
Referring to fig. 1, 3, 8, 9, 10, 11 and 12, the lower surface of the loading box 1 is provided with a positioning pin 30 near the corner thereof; the upper surface of the loading box 1 is provided with a jack 31 near the corner of the loading box, a positioning pin 30 can be inserted into the jack 31, the inner bottom of the jack 31 is provided with a spring groove 32, the spring groove 32 is communicated with the inside of the loading box 1, and a plugging unit is arranged in the spring groove 32; the plugging unit comprises a pressure spring 33 and a sealing plate 34; the lower end of the pressure spring 33 is fixedly connected to the inner bottom surface of the spring groove 32, the upper end of the pressure spring 33 is fixedly connected with a sealing plate 34, and the outer diameter of the sealing plate 34 is smaller than the inner diameter of the spring groove 32; the sealing plate 34 is positioned at the top of the spring groove 32 and is used for blocking the communication between the jack 31 and the spring groove 32; when the loading boxes 1 are stacked up and down, the positioning pins 30 on the upper loading boxes 1 are inserted into the insertion holes 31 formed in the lower loading boxes 1, so that the stacked loading boxes 1 are in a stable state, and at the moment, the loading boxes 1 are in a negative pressure state, after the positioning pins 30 are inserted into the insertion holes 31, the lower ends of the positioning pins 30 press down the sealing plates 34, the sealing plates 34 press down the pressure springs 33, the spring grooves 32 are forced to be communicated with the insertion holes 31, at the moment, the negative pressure in the loading boxes 1 promotes the positioning pins 30 to be adsorbed in the insertion holes 31, and the positioning pins 30 are adsorbed in the insertion holes 31, so that the stability of the upper and lower stacked loading boxes 1 can be further improved.
Referring to fig. 8 and 9, the positioning pin 30 includes a fixing pin 35 fixedly connected to the lower surface of the loading box 1, and a movable pin 36 connected to the fixing pin 35; the lower end surface of the fixed pin 35 is provided with a sliding hole 37, the upper end of the movable pin 36 can be connected in the sliding hole 37 in a vertical sliding way, the outer side of the opposite position of the movable pin 36 and the fixed pin 35 is provided with a ring-shaped rubber ring 351, and the middle position of the outer surface of the rubber ring 351 protrudes outwards; the middle outer side of the jack 31 is provided with a ring-shaped sealing opening 38, and a rubber ring 351 can be sealed and embedded in the sealing opening 38; after the locating pin 30 is inserted into the jack 31, the lower end of the movable pin 36 presses down the sealing plate 34, meanwhile, the upper end of the movable pin 36 is retracted into the sliding hole 37, the movable pin 36 and the fixed pin 35 are mutually close, the rubber ring 351 is extruded, the middle position of the outer ring of the rubber ring 351 is forced to protrude outwards and is extruded into the sealing opening 38, at the moment, the rubber ring 351 is extruded and matched with the sealing opening 38, gaps between the locating pin 30 and the jack 31 can be filled, the possibility that external air permeates into the loading box 1 from the jack 31 is reduced, and the loading box 1 is ensured to be in a stable negative pressure environment.
A limiting ring 39 is arranged below the sealing plate 34 in fig. 8 and 9, and the outer ring of the limiting ring 39 is fixedly connected to the inner side wall of the spring groove 32; by arranging the limiting ring 39, the stroke amount of the downward movement of the sealing plate 34 is limited, and the formation amount of the downward movement of the movable pin 36 is also restrained, so that the upper end of the movable pin 36 can be effectively extended into the sliding hole 37, and the middle position of the outer ring of the rubber ring 351 is in a protruding state.
Example two
Referring to fig. 11, in a first comparative example, as another embodiment of the present invention, a trigger switch 40 is disposed on the inner wall of the handle 7, and the trigger switch 40 can control the motor 17 to rotate forward and backward; the handles 7 are grasped by two hands, the sealing cover 2 is close to the port position of the loading box 1, after the rubber plug 6 is embedded into the fixing hole 4, the fingers move to the upper inner side wall position of the handles 7, the touch switch 40 at the position is pressed, the motor 17 is controlled to rotate positively, the extruding plate 22 extrudes the rubber plug 6 at the position of the inner hole 19, and then the loading box 1 is vacuumized; when the sealing cover 2 needs to be opened and removed, a finger moves to the position of the inner side wall of the lower part of the handle 7, the touch switch 40 at the position is pressed, the motor 17 is controlled to rotate reversely, so that the extrusion plate 22 moves in the direction of the screw rod 12, the extrusion plate 22 does not extrude the rubber stopper 6, the rubber stopper 6 is at the same time under the tension of the tension spring 25, the rubber stopper 6 is restored to the original state, then the gas valve on the negative pressure pipe 8 is opened, the gas reacts into the loading box 1, and then the rubber stopper 6 is taken out from the fixing hole 4; the touch switch 40 can flexibly control the combination and opening of the sealing cover 2 and the loading box 1, thereby facilitating the operation of the wafer production loading device.
Working principle: when the device is specifically used, wafers are placed into a loading box 1 one by one and are sequentially erected on a supporting block, then a sealing cover 2 is close to a port of the loading box 1, the end part of a rubber plug 6 is aligned with a fixing hole 4 in advance, then the sealing cover 2 is attached to the end face of the loading box 1, at the moment, the rubber plug 6 stretches into the fixing hole 4, a sealing strip 5 is embedded into a sealing groove 3, then whether the edge of the sealing cover 2 is flush with the edge of the port of the loading box 1 is observed, if not flush, fine adjustment is carried out, the sealing cover 2 is slightly floated until the edge is flush, then one end of an external air pipe is communicated with an external negative pressure pump, the other end of the external air pipe is communicated with an air valve, the air valve of a negative pressure pipe 8 is opened, the negative pressure pump pumps air in the loading box 1 through the external air pipe, so that a negative pressure state is formed in the loading box 1, at the moment, the sealing cover 2 is firmly attached to the port of the loading box 1, then the air valve is closed, and the external air pipe is removed;
the loading box 1 and the sealing cover 2 are matched, so that the opening and closing actions of the sealing cover 2 and the loading box 1 are carried out in a soft state, the rubber plug 6 is inserted into the fixing hole 4, the rubber plug 6 is elastic and can freely stretch and deform, the rubber plug can be flexibly inserted into the fixing hole 4, abrasion generated during relative movement between parts is reduced, the possibility that abrasion fragments fly to a crystal disc is reduced, meanwhile, when the sealing cover 2 is opened, the air valve of the negative pressure pipe 8 is firstly opened, the air pressure in the loading box 1 is balanced with the air pressure of the outside, and then the sealing cover 2 can be taken down, so that the action is soft, the impact on loading equipment is reduced, and the protection of the crystal disc is realized;
the rubber plug 6 is inserted in the fixing hole 4 in advance, the sealing cover 2 is hung at the port position of the loading box 1 in advance, then the negative pressure pipe 8 is conveniently connected with an external air pipe, the rubber plug 6 has elasticity and can deform, the sealing cover 2 is hung at the port position of the loading box 1 through the rubber plug 6, the sealing performance between the sealing cover 2 and the loading box 1 can be unstable, and when the gas in the loading box 1 is extracted, the external gas can permeate into the loading box 1 along a gap between the sealing cover 2 and the loading box 1; the supporting unit is arranged, after the rubber stopper 6 is plugged into the fixing hole 4, the motor 17 drives the screw rod 12 to rotate, the screw rod 12 drives the movable plate 16, the movable plate 16 moves towards the direction of the fixing plate 10, meanwhile, the movable plate 16 pushes the second rod 15, at the moment, the included angle between the first rod 13 and the second rod 15 is gradually reduced, the first rod 13 and the second rod 15 press the push rod 14, the push rod 14 presses towards the inner side wall of the rubber stopper 6, the rubber stopper 6 presses the inner side wall of the fixing hole 4, at the moment, the rubber stopper 6 can be stably embedded into the fixing hole 4, meanwhile, the strength of the supporting unit not only presses the rubber stopper 6 into the fixing hole 4, but also plays a role of supporting the sealing cover 2, so that the sealing cover 2 is pre-stabilized on a port of the loading box 1 after the sealing cover 2 is combined with the loading box 1, and the negative pressure state of the loading box 1 can be smoothly pumped in the loading box 1 in the later stage when the gas is pumped out;
the rubber plug 6 is embedded into the fixed hole 4, so that the end part of the rubber plug 6 is arranged at the position of the inner hole 19, the motor 17 is driven, the push rod 14 extrudes the rubber plug 6 to the position of the inner hole 19, the protruding part of the rubber plug 6 is arranged at the position of the inner hole 19, the rubber plug 6 is further restrained in the fixed hole 4, and the sealing cover 2 is stably matched with the loading box 1;
by arranging the extrusion plate 22 to replace the extrusion of the push rod 14 to the inner side wall of the rubber plug 6, as the two ends of the push rod 14 are respectively connected with the first rod 13 and the second rod 15 in a rotating way, the two rotating connection points are opposite to the arc-shaped extrusion plate 22, the pressure on the surface of the rubber plug 6 is higher, the inner wall of the rubber plug 6 can be extruded and broken, and the arc-shaped extrusion plate 22 is larger in contact surface with the rubber plug 6, the pressure on the surface of the rubber plug 6 is smaller, and the possibility of extrusion and breaking of the rubber plug 6 can be reduced; when the rubber stopper 6 is particularly in operation, the push rod 14 extrudes the extrusion plate 22 on the inner wall of the rubber stopper 6, the arc plate is rotationally connected in the rotary groove 20 through the connecting rod 21 and can freely and flexibly swing, so that the arc plate can be suitable for deformation of the rubber stopper 6 to swing, the surface of the extrusion plate 22 is extruded on the rubber stopper 6 as far as possible, and the rubber stopper 6 is protected from being extruded, damaged and broken;
the rubber plug 6 is provided with the bulge 23, the extruded part of the rubber plug 6 and the arc plate is thickened, the purpose of the rubber plug 6 is to further protect the extruded part of the rubber plug 6 by the arc plate, meanwhile, the bulge 23 is provided with the annular hole 24, the annular hole 24 is internally provided with the annular tension spring 25, the tension spring 25 has the function of enabling the supported rubber plug 6 to quickly recover the original shape, and when the sealing cover 2 is separated from the loading box 1, the rubber plug 6 can smoothly slide out along the fixing hole 4 instead of being clamped at the junction of the inner hole 19 and the outer hole 18;
the cooperation of the limiting plate 27 and the convex part 26 is arranged to restrict the relative movement between the extrusion plate 22 and the rubber plug 6, so that the extrusion plate 22 can be effectively extruded at a thicker part of the bulge 23 when being extruded on the rubber plug 6 each time, the rubber plug 6 can be stably extruded at the position of the inner hole 19, and the firmness between the rubber plug 6 and the fixing hole 4 is improved;
when the loading boxes 1 are stacked up and down, the positioning pins 30 on the upper loading boxes 1 are inserted into the insertion holes 31 formed in the lower loading boxes 1, so that the stacked loading boxes 1 are in a stable state, and at the moment, the loading boxes 1 are in a negative pressure state, after the positioning pins 30 are inserted into the insertion holes 31, the lower ends of the positioning pins 30 press down the sealing plates 34, the sealing plates 34 press down the pressure springs 33, the spring grooves 32 are forced to be communicated with the insertion holes 31, at the moment, the negative pressure in the loading boxes 1 promotes the positioning pins 30 to be adsorbed in the insertion holes 31, and the positioning pins 30 are adsorbed in the insertion holes 31, so that the stability of the upper and lower stacked loading boxes 1 can be further improved;
after the locating pin 30 is inserted into the jack 31, the lower end of the movable pin 36 presses down the sealing plate 34, meanwhile, the upper end of the movable pin 36 is retracted into the sliding hole 37, the movable pin 36 and the fixed pin 35 are mutually close, the rubber ring 351 is extruded, the middle position of the outer ring of the rubber ring 351 is forced to protrude outwards and is extruded into the sealing opening 38, at the moment, the rubber ring 351 is extruded and matched with the sealing opening 38, gaps between the locating pin 30 and the jack 31 can be filled, the possibility that external air permeates into the loading box 1 from the jack 31 is reduced, and the loading box 1 is ensured to be in a stable negative pressure environment.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present invention.
Claims (9)
1. Wafer production loading equipment, its characterized in that: the crystal disc loading device comprises a loading box (1) and a sealing cover (2), wherein a plurality of layers of supporting blocks are arranged in the loading box (1) up and down, and the crystal disc is placed on the supporting blocks; sealing grooves (3) are formed in the periphery of the port of the loading box (1), and fixing holes (4) are formed in the corners of two sides of the port of the loading box (1); the inner surface of the sealing cover (2) is provided with a sealing strip (5) matched with the sealing groove (3), and the inner surface of the sealing cover (2) is provided with a rubber plug (6) matched with the fixing hole (4) in position;
the external surface of the sealing cover (2) is symmetrically provided with handles (7), the sealing cover (2) is fixedly connected with a negative pressure pipe (8), the negative pressure pipe (8) is communicated with a negative pressure hole (9) formed in the internal surface of the sealing cover (2), and the end part of the negative pressure pipe (8) extends out of the sealing cover (2) and is communicated with an external negative pressure pump;
the rubber plug (6) is of a hollow structure, and a supporting unit is arranged in the rubber plug (6); the supporting unit comprises a fixed plate (10) and a screw rod (12); one end of lead screw (12) rotates to be connected on fixed plate (10), and fixed plate (10) rigid coupling is at rubber buffer (6) inner wall top, and fixed plate (10) outer turnover is connected with a plurality of pole (13) one, and the tip of every pole (13) rotates to be connected push rod (14), and push rod (14) are used for extrudeing rubber buffer (6) on fixed orifices (4) inside wall, every the tip rotation of push rod (14) is connected with pole (15) two, every No. two the tip of pole (15) are tied in a bundle and are connected with fly leaf (16), the tip of pole (15) two is connected in the edge rotation of fly leaf (16), fly leaf (16) can be along lead screw (12) axis rectilinear motion, the other end of lead screw (12) extends to sealed lid (2) inside, the other end of the output rigid coupling of lead screw (12) of motor (17) is equipped with motor (17) inside sealed lid (2).
2. A wafer production and loading apparatus according to claim 1, wherein: the fixing hole (4) comprises an outer hole (18) and an inner hole (19), the outer hole (18) is close to the port of the loading box (1), the inner hole (19) is positioned on the inner side of the outer hole (18), and the hole diameter of the inner hole (19) is larger than that of the outer hole (18).
3. A wafer production and loading apparatus according to claim 1, wherein: the middle position of push rod (14) is offered and is changeed groove (20), and change groove (20) rotate and be connected with adapter rod (21), and the one end of adapter rod (21) is rotated through the torsional spring and is connected on push rod (14), and the other end rigid coupling of adapter rod (21) has extrusion board (22) of arc shape, and extrusion board (22) cover is in push rod (14) and the rotation hookup location of rod (13) and rod (15) No. two, and extrusion board (22) are used for extrudeing rubber buffer (6) on the lateral wall of internal hole (19).
4. A wafer production and loading apparatus according to claim 3, wherein: the rubber stopper (6) is provided with a ring-shaped bulge (23), the bulge (23) is close to the end part of the rubber stopper (6), the bulge (23) is internally provided with a ring-shaped hole (24), and the ring-shaped hole (24) is internally provided with a ring-shaped tension spring (25).
5. A wafer production and loading apparatus as recited in claim 4, wherein: the inner surface of the rubber plug (6) is provided with a ring-shaped convex part (26), and the convex part (26) is arranged at the inner side of the bulge (23); the outer surface of the extrusion plate (22) is provided with two limiting plates (27), limiting grooves (28) are formed by the two limiting plates (27) and the extrusion plate (22), and the convex parts (26) are embedded in the limiting grooves (28).
6. A wafer production and loading apparatus according to claim 1, wherein: the lower surface of the loading box (1) is close to the position locating pin (30) of the corner; the upper surface of the loading box (1) is provided with a jack (31) near the corner of the loading box, a positioning pin (30) can be inserted into the jack (31), the inner bottom of the jack (31) is provided with a spring groove (32), the spring groove (32) is communicated with the inside of the loading box (1), and a plugging unit is arranged in the spring groove (32); the plugging unit comprises a pressure spring (33) and a sealing plate (34); the lower extreme rigid coupling of pressure spring (33) is in the interior bottom surface position of spring groove (32), and the upper end rigid coupling of pressure spring (33) has closing plate (34), and the external diameter of closing plate (34) is less than the internal diameter of spring groove (32), and closing plate (34) are located spring groove (32) top for the intercommunication of shutoff jack (31) and spring groove (32).
7. The wafer production and loading apparatus of claim 6, wherein: the positioning pin (30) comprises a fixed pin (35) fixedly connected to the lower surface of the loading box (1), and a movable pin (36) connected to the fixed pin (35); the lower end surface of the fixed pin (35) is provided with a sliding hole (37), the upper end of the movable pin (36) can be connected in the sliding hole (37) in a vertical sliding way, the outer side of the opposite position of the movable pin (36) and the fixed pin (35) is provided with a ring-shaped rubber ring (351), and the middle position of the outer surface of the rubber ring (351) protrudes outwards; a ring-shaped sealing opening (38) is formed in the middle outer side of the insertion hole (31), and the rubber ring (351) can be embedded in the sealing opening (38) in a sealing mode.
8. The wafer production and loading apparatus of claim 6, wherein: and a limiting ring (39) is arranged below the sealing plate (34), and the outer ring of the limiting ring (39) is fixedly connected on the inner side wall of the spring groove (32).
9. A wafer production and loading apparatus according to claim 1, wherein: a touch switch (40) is arranged on the upper and lower parts of the inner wall of the handle (7), and the touch switch (40) can control the motor (17) to rotate forwards and reversely.
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| CN202311149896.5A CN116884894B (en) | 2023-09-07 | 2023-09-07 | Wafer production loading equipment |
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| CN202311149896.5A CN116884894B (en) | 2023-09-07 | 2023-09-07 | Wafer production loading equipment |
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| CN116884894B true CN116884894B (en) | 2023-11-28 |
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| JP3769417B2 (en) * | 1999-06-30 | 2006-04-26 | 株式会社東芝 | Substrate storage container |
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| EP0744765A1 (en) * | 1995-05-22 | 1996-11-27 | Symbios Logic Inc. | Apparatus for storing and carrying semiconductor wafers |
| US6123120A (en) * | 1997-12-03 | 2000-09-26 | Kabushiki Kaisha Toshiba | Clean storage equipment for substrates and method of storing substrates |
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| CN116884894A (en) | 2023-10-13 |
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