CN116853378A - Flexible electrostatic adsorption device with coplanar configuration and manufacturing method thereof - Google Patents
Flexible electrostatic adsorption device with coplanar configuration and manufacturing method thereof Download PDFInfo
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- CN116853378A CN116853378A CN202310753127.XA CN202310753127A CN116853378A CN 116853378 A CN116853378 A CN 116853378A CN 202310753127 A CN202310753127 A CN 202310753127A CN 116853378 A CN116853378 A CN 116853378A
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- electrodes
- electrode layer
- flexible
- electrostatic chuck
- coplanar
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000001179 sorption measurement Methods 0.000 title abstract description 59
- 239000000463 material Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 31
- 239000000853 adhesive Substances 0.000 claims description 25
- 230000001070 adhesive effect Effects 0.000 claims description 24
- 238000005520 cutting process Methods 0.000 claims description 13
- 239000011810 insulating material Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000002699 waste material Substances 0.000 claims description 2
- 238000010030 laminating Methods 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 58
- 230000009471 action Effects 0.000 description 9
- 238000013461 design Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 229910001369 Brass Inorganic materials 0.000 description 8
- 239000010951 brass Substances 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 229920002799 BoPET Polymers 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 230000009193 crawling Effects 0.000 description 2
- 230000005021 gait Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000010147 laser engraving Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- -1 titanium Chemical class 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62D—MOTOR VEHICLES; TRAILERS
- B62D57/00—Vehicles characterised by having other propulsion or other ground- engaging means than wheels or endless track, alone or in addition to wheels or endless track
- B62D57/02—Vehicles characterised by having other propulsion or other ground- engaging means than wheels or endless track, alone or in addition to wheels or endless track with ground-engaging propulsion means, e.g. walking members
- B62D57/024—Vehicles characterised by having other propulsion or other ground- engaging means than wheels or endless track, alone or in addition to wheels or endless track with ground-engaging propulsion means, e.g. walking members specially adapted for moving on inclined or vertical surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Laminated Bodies (AREA)
Abstract
The invention discloses a flexible electrostatic adsorption device with a coplanar structure and a manufacturing method thereof, and relates to the technical field of electrostatic adsorption. The flexible electrostatic adsorption device with the coplanar configuration manufactured by the manufacturing method of the flexible electrostatic adsorption device with the coplanar configuration has good surface laminating property and high environmental adaptability.
Description
Technical Field
The invention relates to the technical field of electrostatic adsorption, in particular to a coplanar-configuration flexible electrostatic adsorption device and a manufacturing method thereof.
Background
Along with the development and application of the crawling robot, how to improve the adaptability of the robot in a complex environment becomes an important research content in the industry, wherein the crawling robot becomes a research hot spot due to the wide working space and the extremely strong environmental adaptability. The common mechanism for wall surface adsorption has the design schemes of repeatable adhesive materials, gecko materials, negative pressure adsorption, electromagnetic adsorption and the like, but the structure is difficult to use in a vacuum environment, the repeated adhesive materials are required to be controlled by designing special robot gait, the gecko materials are complex to manufacture, meanwhile, the negative pressure adsorption mode is difficult to use in a vacuum high-low temperature difference environment, the electromagnetic adsorption is the most practical and mature adsorption technology at present, but the mechanism is limited by the structure and principle of an electromagnet and is difficult to use for non-magnetic metals such as titanium, and the adsorption mode is required to be designed to strictly attach to a shell on the surface of an adsorption target and to accurately control the gait, so that the difficulty to be overcome is brought to the use of the mechanism.
The electrostatic adsorption scheme using the capacitive principle, which is achieved by the electrostatic attraction force generated when there is a potential difference between two contact materials, is currently receiving attention in the industry. The technology has been developed to design applications including fixed connection, adsorption clamping and the like successfully through a great deal of research and development, but most of traditional electrostatic adsorption devices adopt a unipolar and comb-shaped design scheme, and in order to facilitate manufacturing, a rigid structure is adopted.
Because the electrostatic adsorption principle causes that the action distance required by the dielectric action is smaller, the traditional unipolar arrangement needs to load larger voltage to obtain ideal electrostatic adsorption force, which is extremely easy to cause breakdown of the dielectric film to form short circuit; compared with a unipolar electrode, the comb-shaped structure design has better dielectric effect, but the area utilization rate is low, and only a larger electrostatic adsorption effect can be generated among the internal comb-shaped structure, so that larger loading voltage is needed to improve the adsorption force of the comb-shaped structure, and potential damage of shorter service life caused by breakdown short circuit is also easily brought.
For the above reasons, the existing electrostatic adsorbing device design and manufacturing technology cannot well meet the use requirements of the existing technology, so that a flexible electrostatic adsorbing mechanism in a new configuration needs to be designed and manufactured to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to provide a flexible electrostatic adsorption device with a coplanar configuration and a manufacturing method thereof, which are used for solving the problems in the prior art and improving the surface fitting property and the environmental adaptability.
In order to achieve the above object, the present invention provides the following solutions:
the invention provides a flexible electrostatic adsorption device with a coplanar configuration, which comprises a dielectric layer, an electrode layer and an insulating substrate which are sequentially arranged from top to bottom, wherein adhesive materials are filled in gaps of the electrode layer and between the electrode layer and the insulating substrate, the dielectric layer and the insulating substrate are fixed through the adhesive materials, the electrode layer comprises two electrodes, the two electrodes are respectively connected with an anode and a cathode of a high-voltage direct-current power supply, and the dielectric layer, the electrode layer, the adhesive materials and the insulating substrate are all made of flexible materials.
Preferably, both the electrodes are spiral, and the two electrodes are mutually arranged in a surrounding manner.
Preferably, the widths of the two electrodes are equal, the distances between the two electrodes are equal, and the widths of the electrodes are equal to the distances between the two electrodes.
Preferably, the upper surfaces of the two electrodes are in the same horizontal plane.
Preferably, the electrode layer is made of a metal material having conductivity and ductility.
Preferably, the dielectric layer is made of a flexible material having dielectric properties.
Preferably, the adhesive material is made of an insulating material.
Preferably, the insulating substrate is made of a non-dielectric insulating material having flexibility.
The invention also provides a manufacturing method of the coplanar-configuration flexible electrostatic adsorption device, which is used for manufacturing the coplanar-configuration flexible electrostatic adsorption device according to any one of the technical schemes, and comprises the following steps:
s1, designing the shape and the size of the electrode layer according to target product parameters, and drawing a drawing of the electrode layer;
s2, manufacturing the insulating substrate, and tightly attaching raw materials for manufacturing the electrode layer to the insulating substrate by using the adhesive material;
s3, setting proper cutting parameters, cutting the raw materials to obtain the electrode layer, and stripping waste materials except the electrode layer in the raw materials;
s4, tightly attaching and covering the dielectric layer on the upper end of the electrode layer, and fixing the dielectric layer by using the adhesive material filled in the gap of the electrode layer;
and S5, respectively connecting the two electrodes with the anode and the cathode of the direct-current high-voltage power supply.
Compared with the prior art, the invention has the following technical effects:
the invention provides a coplanar flexible electrostatic adsorption device and a manufacturing method thereof, the coplanar flexible electrostatic adsorption device comprises a dielectric layer, an electrode layer and an insulating substrate which are sequentially arranged from top to bottom, each structure is made of flexible materials, and the whole structure has flexible characteristics, so that the coplanar flexible electrostatic adsorption device can be tightly attached to an adsorption target, the electrostatic adsorption force generated under the action of the same voltage is effectively improved, adhesive materials are filled in gaps of the electrode layer and between the electrode layer and the insulating substrate, the influence of air in the electrostatic adsorption structure is removed as much as possible, the dielectric layer and the insulating substrate are fixed through the adhesive materials, the connection and the fixation of each structure are realized, the electrode layer comprises two electrodes, the two electrodes are respectively connected with the positive electrode and the negative electrode of a high-voltage direct-current power supply, the dielectric effect on any dielectric material is realized, the electrostatic adsorption is realized, and the adsorption can be realized even under the vacuum environment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a top view of a flexible electrostatic chuck in a coplanar configuration as provided in the first embodiment;
FIG. 2 is a front view of FIG. 1;
in the figure: a flexible electrostatic adsorption device in a 100-coplanar configuration, a 1-insulating substrate, a 2-adhesive material, a 3-electrode layer, a 31-electrode, and a 4-dielectric layer.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide a coplanar-configuration flexible electrostatic adsorption device and a manufacturing method thereof, so as to solve the technical problems that the existing mechanism for wall surface adsorption is greatly influenced by environment and has poor surface laminating degree.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Example 1
As shown in fig. 1-2, the present embodiment provides a flexible electrostatic adsorption device 100 with a coplanar configuration, including a dielectric layer 4, an electrode layer 3 and an insulating substrate 1 sequentially arranged from top to bottom, where each structure is made of a flexible material, and the whole has a flexible characteristic, so as to ensure that the flexible electrostatic adsorption device 100 with a coplanar configuration of the present embodiment can be closely attached to an adsorption target, effectively improve electrostatic adsorption force generated under the action of the same voltage, and the gap of the electrode layer 3 and between the electrode layer 3 and the insulating substrate 1 are filled with an adhesive material 2, so as to remove the influence of air in the electrostatic adsorption structure as much as possible, the dielectric layer 4 and the insulating substrate 1 are fixed by the adhesive material 2, so as to realize connection and fixation of each structure, the electrode layer 3 includes two electrodes 31, and the two electrodes 31 are respectively connected to the positive electrode and the negative electrode of a high-voltage direct current power supply, so as to realize dielectric effect on any dielectric material, thereby realizing electrostatic adsorption, and even under a vacuum environment, realizing adsorption.
Specifically, the two electrodes 31 are all spiral, and the two electrodes 31 are mutually arranged around, compared with the design of a single electrode and a comb-shaped structure, the shape of the electrode layer 3 in the embodiment can obtain higher electrostatic adsorption force under the action of the same voltage. The width of each of the two electrodes 31 is equal, and the pitch of each of the two electrodes 31 is also equal, and the width of the electrode 31 is equal to the pitch between the two electrodes 31. The electrode 31 design with equal width and equal distance also enables the electrostatic adsorption effect of each part of the whole device to be nearly the same, and improves the adsorption effect and the adsorption stability.
The upper surfaces of the two electrodes 31 are in the same horizontal plane.
The electrode layer 3 is made of a metal material having good conductivity and ductility, and the electrode layer 3 is a metal sheet.
The dielectric layer 4 is made of a flexible film material with good dielectric property, and has the main functions of preventing the contact part of the flexible electrostatic adsorption device 100 with a coplanar configuration and an adsorption target from being short-circuited under the action of a high-voltage direct-current power supply, forming opposite potential difference through dielectric action, and realizing electrostatic adsorption by utilizing the principle of opposite charge attraction.
The adhesive material 2 is made of an insulating material.
The insulating base 1 is made of a flexible non-dielectric insulating material and has a thin sheet structure, the thickness of which is ensured not to be broken down by the operating voltage.
The working principle of the flexible electrostatic adsorption device 100 with the coplanar configuration provided in this embodiment is to connect two electrodes 31 in the electrode layer 3 and high-voltage direct currents with different polarities respectively, and attach the dielectric layer 4 to the surface of the target, after a short delay, electrostatic adsorption can be realized by the dielectric principle under the action of high voltage, and the electrostatic adsorption force can be effectively improved by increasing the action voltage.
Example two
The present embodiment provides a method for manufacturing a flexible electrostatic adsorbing device with a coplanar configuration, which is used for manufacturing a flexible electrostatic adsorbing device 100 with a coplanar configuration in the first embodiment, and includes the following steps:
step one, designing the shape and the size of the electrode layer 3 according to the target product parameters required to be processed, and drawing a drawing of the electrode layer 3 by using computer software;
in order to ensure that the electrostatic adsorption effect is almost the same everywhere as much as possible, the electrode 31 widths of the positive and negative electrodes 31 and the electrode 31 in the electrode layer 3 are equal and d, the two electrodes 31 are in a spiral shape which is tightly surrounded, the interval width is d, the distance between the edge of the electrode layer 3 and the edge of the insulating substrate 1 is d, the specific value of d and the number of spiral turns can be calculated according to the adsorption task and the target size design, in this embodiment, d=10mm is selected, and the number of spiral turns of the electrode 31 in the electrode layer 3 is 2.
Step two, using a flexible insulating thin material as an insulating substrate 1, and compacting and tightly attaching a metal sheet used for manufacturing the electrode 31 on the flexible insulating thin material by using an adhesive material 2;
in this example, a transparent PVC sheet material with a thickness of 0.02mm was used to make the insulating substrate 1, a brass sheet with a thickness of 0.02mm was used to make the two electrodes 31 in the electrode layer 3, and a double sided tape with a thickness of 0.1mm using cotton paper as the substrate was used as the adhesive material 2. In this embodiment, a laminating machine is used to tightly compact and adhere a PVC sheet, a double faced adhesive tape and a brass sheet together to form a composite whole, and then a laser cutting and engraving machine is used to set appropriate cutting parameters to cut the composite whole along the edge of the designed insulating substrate 1, so as to obtain the insulating substrate 1 with the required size.
Step three, setting proper cutting parameters by using a cutting and engraving machine, and carrying out pattern cutting on the electrode layer 3 without damaging the insulating substrate 1 and the adhesive material 2;
in this embodiment, by setting appropriate cutting parameters of the laser dicing machine, the brass sheet in the composite whole obtained by processing in the second step is cut along the designed cutting path, so as to ensure that the left cutting trace makes the brass sheet of the rest part easily torn off. It should be noted that the setting of the cutting parameters in this step is required to ensure that the brass sheet is cut completely through without damaging the double-sided adhesive layer.
Step four, the shape of the designed electrode layer 3 is obtained by using a material reduction manufacturing method, namely, the rest metal materials except the required graph in the brass sheet are stripped;
and (3) carefully removing the redundant part of the brass sheet according to the cutting trace obtained in the step (III) to obtain the final adhesive material 2 and the electrode layer 3. In addition, thanks to the unique properties of the double sided tape of the tissue paper substrate, the thickness of the tissue paper substrate is slightly increased when the extra adhered brass sheet is removed, making it easier to adhere the dielectric layer 4 and ensuring the flatness of the working surface of the electrostatic adsorbing device.
Step five, tightly attaching and covering the flexible dielectric film on the electrode layer 3, and realizing fixation by using the adhesive material 2 filled in the gaps of the electrode layer 3;
in this embodiment, a transparent PET film material with a thickness of 0.05mm is selected to manufacture the dielectric layer 4, in order to improve the overall manufacturing precision of the electrostatic adsorption device, the PET film and the composite whole obtained in the step four are tightly compacted and fixedly connected through the adhesive material 2 by means of a film laminating machine, and then redundant parts of the PET film are cut off along the edge of the insulating substrate 1 to obtain the dielectric layer 4.
And step six, connecting the two electrodes 31 of the electrode layer 3 with the positive electrode and the negative electrode of the direct-current high-voltage power supply respectively, so that the purpose of generating a dielectric effect on any dielectric material and realizing electrostatic adsorption can be realized.
In the embodiment, in order to facilitate understanding of the structure and the relative position of each layer of tissue, the electrical connection pins of the two electrodes 31 in the electrode layer 3 are omitted, and the electrical connection pins of the two electrodes 31 can be freely designed according to the design requirements and the structural parameters in practical application, and the two electrodes 31 have no positive and negative polarity wiring requirements. In this embodiment, in order to ensure the flatness of the working surface of the electrostatic adsorbing device, the electrical connection pins are led out from the opposite directions of the two electrodes 31 respectively and the lengths of the electrical connection pins exceed the insulating substrate 1, and then the electrical connection pins are bent to be closely attached to the bottom of the insulating substrate 1, so as to connect the positive and negative electrodes of the high-voltage direct-current power supply.
The specific materials of the dielectric layer 4, the insulating substrate 1, the adhesive material 2, and the electrode layer 3 used in the present embodiment are not limited to the above.
The principles and embodiments of the present invention have been described in this specification with reference to specific examples, the description of which is only for the purpose of aiding in understanding the method of the present invention and its core ideas; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In summary, the present description should not be construed as limiting the invention.
Claims (9)
1. A flexible electrostatic chuck device of coplanar configuration, characterized in that: the electrode layer comprises two electrodes, the two electrodes are respectively connected with the positive electrode and the negative electrode of a high-voltage direct-current power supply, and the dielectric layer, the electrode layer, the adhesive material and the insulating substrate are made of flexible materials.
2. The flexible electrostatic chuck of coplanar configuration according to claim 1, wherein: the two electrodes are spiral, and the two electrodes are mutually and circumferentially arranged.
3. The flexible electrostatic chuck of coplanar configuration according to claim 2, wherein: the widths of the two electrodes are equal, the distances between the two electrodes are equal, and the widths of the electrodes are equal to the distances between the two electrodes.
4. The flexible electrostatic chuck of coplanar configuration according to claim 1, wherein: the upper surfaces of the two electrodes are in the same horizontal plane.
5. The flexible electrostatic chuck of coplanar configuration according to claim 1, wherein: the electrode layer is made of a metal material having conductivity and ductility.
6. The flexible electrostatic chuck of coplanar configuration according to claim 1, wherein: the dielectric layer is made of flexible materials with dielectric properties.
7. The flexible electrostatic chuck of coplanar configuration according to claim 1, wherein: the adhesive material is made of insulating materials.
8. The flexible electrostatic chuck of coplanar configuration according to claim 1, wherein: the insulating substrate is made of a flexible non-dielectric insulating material.
9. A method for manufacturing a coplanar-configuration flexible electrostatic chuck, for manufacturing the coplanar-configuration flexible electrostatic chuck according to any one of claims 1 to 8, characterized in that: the method comprises the following steps:
s1, designing the shape and the size of the electrode layer according to target product parameters, and drawing a drawing of the electrode layer;
s2, manufacturing the insulating substrate, and tightly attaching raw materials for manufacturing the electrode layer to the insulating substrate by using the adhesive material;
s3, setting proper cutting parameters, cutting the raw materials to obtain the electrode layer, and stripping waste materials except the electrode layer in the raw materials;
s4, tightly attaching and covering the dielectric layer on the upper end of the electrode layer, and fixing the dielectric layer by using the adhesive material filled in the gap of the electrode layer;
and S5, respectively connecting the two electrodes with the anode and the cathode of the direct-current high-voltage power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310753127.XA CN116853378A (en) | 2023-06-25 | 2023-06-25 | Flexible electrostatic adsorption device with coplanar configuration and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310753127.XA CN116853378A (en) | 2023-06-25 | 2023-06-25 | Flexible electrostatic adsorption device with coplanar configuration and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116853378A true CN116853378A (en) | 2023-10-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310753127.XA Pending CN116853378A (en) | 2023-06-25 | 2023-06-25 | Flexible electrostatic adsorption device with coplanar configuration and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116853378A (en) |
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2023
- 2023-06-25 CN CN202310753127.XA patent/CN116853378A/en active Pending
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